KR20100122816A - Substrate inspection device and substrate inspection method using the same - Google Patents

Abstract

PURPOSE: A substrate inspection device and a method for inspecting the substrate using the same are provide dot form the inspection condition automatically, thereby detecting the deformity of the substrate conveniently even detecting the deformity indirectly. CONSTITUTION: A substrate stage(300) is prepared in a main body and locates a substrate. A camera unit(500) runs a camera which photographs the substrate. The camera unit comprises up and down assembling unit circulating the camera to the up and down direction about the substrate and an advance and retreat movement unit transferring the camera the horizontal direction about the substrate. A test condition storage(600) stores test condition which photographs an image in the condition that is similar to the environment in which inspector inspects substrate.

Description

Substrate Inspection Device and Substrate Inspection Method Using the Same {SUBSTRATE INSPECTION DEVICE AND SUBSTRATE INSPECTION METHOD USING THE SAME}

The present invention relates to a substrate inspection apparatus for inspecting a defect of a substrate of a liquid crystal display device and a substrate inspection method using the same.

Defects, such as a stain and a foreign material, may exist in the board | substrate of a liquid crystal display device. The inspector is visually inspecting to detect such defects.

One of the inspection methods is a method of determining by comparing the intensity of the reflected light or the difference in the reflection angle by irradiating light to the substrate.

In performing such a method, the inspector may feel a flare phenomenon such as when directly or specularly reflecting a high-brightness light source such as the sun or a vehicle headlight at night. The flare phenomenon is an instantaneous desensitization phenomenon when a high brightness light source is directly observed by the eye. Flare phenomenon increases the eye fatigue and adversely affects the inspection of the substrate because the contrast needs to be applied to the glare.

Due to these problems, a method other than the direct inspection by the inspector is required.

On the other hand, in general, the inspection is performed by varying the setting conditions for the substrate inspection apparatus for each inspector. As a result, the inspection conditions are different, so that the read rate and the determination rate for each inspector are different for the same defect. Therefore, there is a need for a method for securing a constant inspection quality regardless of the inspector.

On the other hand, in general, as the inspector inspects the interior of the clean room, foreign matter may be introduced or generated by the inspector, which may adversely affect the quality of the substrate.

Because of the flare phenomenon, a method other than the direct inspection by the inspector is necessary.

In addition, even if the defect is detected indirectly, there is a need for a configuration capable of automatically forming inspection conditions so that defects on the substrate can be easily detected.

In addition, a configuration for securing a certain inspection quality is required regardless of the inspector.

Technical problems of the present invention are not limited to the above-mentioned technical problems, and other technical problems that are not mentioned will be clearly understood by those skilled in the art from the following description.

Substrate inspection apparatus according to the present invention for solving the above problems, the main body; A substrate stage provided on the main body and on which a substrate to be inspected is placed; And a camera unit provided in the main body to drive a camera for photographing the substrate, wherein the camera unit includes an up-and-down pivoting portion for rotating the camera in an up-down direction with respect to the substrate, and the camera advancing with respect to the substrate. It may include a forward and backward movement to enable the movement.

In addition, the camera unit may include a lifting unit for lifting the camera in the vertical direction.

In addition, the camera unit may include a lateral moving portion to enable the camera to move in the orthogonal direction with respect to the advancing and moving direction.

In addition, the camera unit may include an auxiliary light source for irradiating light to the substrate.

Substrate inspection apparatus according to the present invention for solving the above problems, the main body; A substrate stage unit provided in the main body and on which a substrate to be inspected is placed; An illumination unit provided in the main body to irradiate light onto the substrate; A camera unit provided in the main body to drive a camera for photographing the substrate; And a controller configured to adjust an inspection environment according to a preset inspection condition, wherein the controller includes a lighting controller for controlling the lighting unit, a substrate stage controller for controlling the substrate stage unit, and a camera controller for controlling the camera unit. At least one.

Substrate inspection method according to the present invention for solving the above problems, the storage step of storing the inspection conditions; And a control step of automatically controlling the inspection apparatus according to the stored inspection condition, wherein the control step includes an illumination control step of controlling the lighting unit according to the inspection condition, a substrate stage control step of controlling the substrate stage unit, and a rear lighting unit. At least one of a rear light control step of controlling the camera control step of controlling the camera unit.

The storing may include storing the type of the substrate, storing the incident angle of a predetermined light according to the type of the stored substrate, storing the predetermined substrate stage angle or position, The method may include at least one of storing the camera position and angle.

The storing may include storing a type of a substrate, and storing a kind of a predetermined light source to be used for a main inspection or a subsidiary inspection according to the type of the stored substrate, and a predetermined mode (converged light or scattered light). ), And storing at least one color of a predetermined light source.

In addition, the lighting control step may include the type of the light source, the color of the light source, the position of the light source, the angle of the light source, the angle of the reflector, the scattering mode or the convergence mode control of the light source, or the position of the lighting unit driver according to the inspection condition. At least one of the angles may be controlled.

In addition, the substrate stage control step may control at least one of the front, rear, left and right positions of the sliding distance of the substrate, the angle of the substrate, the bottom surface of the body based on the inspection condition through the substrate stage unit.

The rear light control step may control at least one of an operation of the rear light source unit, a height of the rear light source unit, and a forward and rearward position of the rear light source unit based on the substrate, according to the inspection condition.

In addition, the camera control step may control the position or angle of the camera through the camera unit according to the inspection condition.

The camera support unit may be provided to be movable in the front, rear, left, and right directions with respect to the bottom surface while supporting the camera. In addition, the multi-joint may be provided so that the image can be taken at various angles with respect to the substrate. The monitor may display the image taken by the camera in real time so that the inspector can check or display the stored image.

This configuration has the advantage of observing the substrate from various angles, similar to the case in which the inspector directly inspects the substrate. Thus, there is an advantageous effect in the detection of defects found only at certain positions and angles.

In addition, the inspection is performed by the camera, not the naked eye of the inspector, and the inspector remotely controls the substrate inspection apparatus from the outside of the clean room. Accordingly, there is an effect of preventing foreign substances introduced or generated by the inspector.

In addition, in the prior art, the inspection was performed by finding the optimum angle of incidence or inspection angle of the light while adjusting the illumination unit or the substrate stage according to the type of each substrate. There is an effect that can secure the image of the substrate photographed under the optimal inspection conditions.

In addition, since the same substrate image is displayed under the same inspection conditions, it is possible to ensure a constant inspection quality in reading a constant substrate image and determining a defect regardless of the inspector.

According to the configuration of the present invention, it is possible to photograph the substrate image at various angles, and thus the inspection apparatus setting time can be secured because the necessary inspection angle can be obtained even if the illumination unit or the substrate stage unit does not excessively move or change the angle. In addition, since the inspection angle can be secured even if the illumination unit or the substrate stage unit is not excessively moved, there is an effect of preventing the total size of the inspection apparatus from increasing.

The technical effects of the present invention are not limited to the above-mentioned effects, and other technical effects not mentioned will be clearly understood by those skilled in the art from the following description.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present embodiment is not limited to the embodiments disclosed below, but can be implemented in various forms, and only this embodiment makes the disclosure of the present invention complete, and the scope of the invention to those skilled in the art. It is provided for complete information. Shapes of the elements in the drawings may be exaggerated parts for a more clear description, elements denoted by the same reference numerals in the drawings means the same element.

1 is a side cross-sectional view of a substrate inspection apparatus according to the present embodiment.

As shown in FIG. 1, the substrate inspection apparatus according to the present embodiment includes a main body 100, an illumination unit 200, a substrate stage unit 300, a rear illumination unit 400, a camera unit 500, and inspection conditions. The storage unit 600 includes a control unit 700 and an image storage unit 800.

The main body 100 may be provided in a frame structure, and the lighting unit 200 may be installed inside.

The lighting unit 200 may be configured in various manners as well as the configuration shown in FIG. 1, and in FIG. 1, a specific configuration is assumed for convenience of description.

The lighting unit 200 includes a light source unit 210, a reflecting unit 220, a light collecting unit 230, a scattering unit 240, and an illumination unit driving unit 250. The light source unit 210 generates light irradiated onto the substrate S. The reflector 220 reflects the light emitted from the light source 210 to the light condenser 230. The condenser 230 serves to focus light reflected through the reflector 220. The scattering unit 240 serves to scatter or pass the light focused through the condenser 230 depending on whether power is applied. The scattering unit 240 may include a liquid crystal scattering plate, and may be switched to a transparent and opaque state according to whether a voltage is applied. Accordingly, the light passing through the liquid crystal scattering plate can be converted into scattered light or convergent light.

The light source unit 210 may adjust the irradiation angle of light by the light source unit driver 213. Inside the light source unit 210, color filters of various colors may be embedded. Accordingly, by placing a color filter of the color required for the inspection of a specific layer in the light source it can be irradiated with a light of a specific color. In addition, the brightness of the light source may be adjusted to implement illuminance for inspection of a specific layer.

The light source unit 210 may include a first light source unit 211 and a second light source unit 212. A metal halide lamp may be used for the first light source unit 211, and a sodium lamp may be used for the second light source unit 212.

 In addition, the reflector 220 may adjust the reflection angle by the reflector driver 221. In addition, the light collecting unit 230 and the scattering unit 240 is adjustable in angle by the light collecting unit driver 231.

In addition, the lighting unit driver 250 may move the lighting unit in the front and rear direction or adjust the angle as a whole.

The configuration of the lighting unit driver 250 as described above is just one example and is not necessarily an essential configuration, and may be added as needed and may be provided in various configurations performing the same function.

The substrate stage unit 300 includes a substrate stage 310 and a substrate stage driver 320. The substrate stage 310 may have a substrate S positioned on an upper surface thereof, and may allow the substrate S to slide parallel to the substrate surface. The substrate stage driver 320 may be provided to rotate the substrate stage 310, and may be provided to be movable in the front, rear, left, and right directions with respect to the bottom surface. That is, the substrate stage 310 is movable in the X-axis and Y-axis directions with respect to the bottom of the main body, and can be lifted in the Z-axis direction. In addition, it may be provided to be able to rotate in the X-axis direction (θX) and Z-axis direction (θZ).

The rear lighting unit 400 is located at the rear of the substrate stage unit 300 and serves to irradiate the transmitted light from the rear of the substrate. The rear light source unit 410 is a portion that generates the transmission light from the rear with respect to the substrate, and the rear light unit driving unit 420 moves the rear light source unit 410 back and forth so as to change the distance between the rear light source unit 410 and the substrate. Retreat.

The camera unit 500 includes a camera 510, a camera support 520, an auxiliary light 530, and a monitor 540. The camera 510 may photograph the specific portion of the substrate S at a high magnification so that the inspector may enlarge the view.

The camera support unit 520 may be provided to be movable in the front, rear, left and right directions with respect to the bottom surface while supporting the camera 510. In addition, the multi-joint may be provided so that the image can be taken at various angles with respect to the substrate (S). The monitor 530 may display an image captured by the camera 510 in real time so that an inspector can check it or display a stored image.

Since the defect may be repeatedly positioned at a specific position of the substrate depending on the type of the defect, the camera 510 may be positioned to capture an image at a specific position in the inspection step of the specific layer by setting.

Auxiliary light 530 may be used as a general three-wavelength fluorescent lamp to replace the function that the inspector illuminates the existing handy light in the case of proximity inspection.

This configuration has the advantage of observing the substrate from various angles, similar to the case in which the inspector directly inspects the substrate. Thus, there is an advantageous effect in the detection of defects found only at certain positions and angles.

The inspection condition storage unit 600 is a portion in which inspection conditions are stored such that an image is taken under conditions similar to an environment in which an inspector inspects a substrate. The conditions of the substrate inspection environment include 1) the type of substrate, 2) the type, color or mode of the light source (scattered light or convergent light), 3) the incident angle of the light irradiated from the light source unit 210 with the substrate, 4) the substrate stage. The position of the unit 300, the angle of the substrate, and 5) the distance between the eye of the inspector and the substrate, and the inspection angle.

layer Main inspection Secondary inspection Type of light source mode color Type of light source mode color Glass plate Metal halides Convergence White Transparent electrode Metal halides Convergence
or scattered light White Backlight BM
(Black Matrix) Metal halides Convergence White Backlight Red salt Scattered light Metal halides Convergence White,
green Backlight Green Metal halides Convergence White
green salt Scattered light Backlight Blue
Metal halides Convergence White
green salt Scattered light Backlight OC
(Overcoating) salt Scattered light Metal halides Convergence White,
green Backlight CS General fluorescent lamp Final inspection before return to substrate bonding process salt Scattered light Metal halides Convergence White,
green Backlight
General fluorescent lamp

Table 1 is a table showing suitable lighting conditions according to the layer of the substrate.

As shown in Table 1, it can be seen that a relatively suitable condition for detecting a defect of a substrate differs depending on whether the substrate is a layer type, a main inspection, or a secondary inspection. Accordingly, it is preferable to set the type, mode and color of the required light source differently.

Specifically, in the case of inspecting the black matrix (BM) layer, the inspection may be performed while changing the position or angle of the light source 210 or the reflector 220. In addition, the inspection may be performed while rotating the substrate stage 310 in the vertical direction or moving in the horizontal direction. Accordingly, the conditions of various incident angles and inspection angles can be realized, and the substrate image can be observed under these various conditions. The inspection angle refers to the angle formed by the light reflected from the substrate surface and the inspector's eye when the inspector inspects with the naked eye. In the case of the BM layer, since the range of the incident angle and the inspection angle of light is wide, rotating the reflector may be advantageous to the inspection speed. In the case of the BM layer, the inspection is often performed when the light reflected by the substrate is not close to the eye (relatively dark light). In addition, spots can be inspected at a relatively wide range of angles.

In the case of inspecting the RGB layer, the entire surface of the substrate may be divided into three stages of top, bottom, top and bottom. In this case, the substrate stage can be inspected while moving in the vertical direction or in the horizontal direction. In the case of the RGB layer, inspection is often performed when the reflected light is close to the eye (relatively bright light). In addition, defects can be inspected while maintaining relatively the same angle. In other words, the same incident angle and inspection angle are maintained with respect to the entire surface of the substrate. Therefore, it is preferable to slide the substrate stage 310 up and down.

When examining the CS (column space) layer, an auxiliary light (flashlight) can be used. At this time, it is desirable for the inspector to inspect the substrate in close proximity. The diffused light of the metal halide lamp is used to enter the substrate at a high angle, and the inspection angle is maintained almost perpendicular to the substrate. That is, it can be seen that the proper incidence angle and inspection angle exist in a narrow range.

Therefore, the inspection conditions that can be stored in the inspection condition storage unit 600, 1) the main inspection or auxiliary inspection according to the type of substrate (inspection layer, etc.), 2) the type of substrate (inspection layer, etc.). The type of light source to be used, the mode (converged light or scattered light) or color, 3) the appropriate incidence angle depending on the type of substrate (inspection layer, etc.), Location, and 5) the location and angle of the camera appropriate to the type of substrate (inspection layer, etc.).

In order to find out the inspection conditions, the defects of the substrate are varied by varying the inspector's physical condition, such as eye height, the type of light source, the color of the light source, the angle of incidence of the light, the angle of the substrate, and the like for a given substrate type. Find out the specific parts of the substrate, the specific angle of the substrate, and the direction of the eye that examines the surface of the substrate.

The controller 700 automatically controls the inspection environment according to the inspection conditions set and stored in the inspection condition storage unit 600. The control target includes 1) operation of the first light source unit 211 or the second light source unit 212, color and angle control, 2) angle control of the reflector 220, 3) voltage on the liquid crystal scattering plate of the scattering unit 240. Control whether it is applied (scattering mode or convergence mode), 4) control of the forward and backward movement distance or angle of the lighting unit driver 250 (this configuration may be unnecessary depending on various embodiments), 5) substrate stage 310 Control of the vertical, horizontal, left and right sliding distance of the substrate S, 6) the angle control of the substrate S and the position control of the substrate S by the substrate stage driver 320 (moves back and forth, left and right directions relative to the bottom of the body) ), 7) operation control and rearward position control of the rear lighting unit 400, 8) operation control of the camera 510, 9) front / left / right position control of the camera support 520 and position / of the camera 510 Angle control, 10) display image control through the monitor 540, and the like.

The image storage unit 800 is a part capable of storing the photographed image.

2 is a simplified perspective view showing a camera unit according to the present embodiment.

As shown in FIG. 2, an auxiliary light 530 may be provided at one side of the camera 510. The camera 510 is coupled with the camera support 520. The camera support unit 520 may include a camera stage 521. The camera 510 may be fixed to the upper side of the camera stage 521. The camera stage 521 may be rotatably fixed to the upper side of the first joint 522a in the z-axis direction. In some cases, the first joint 522a may be provided to rotate in the x-axis direction with respect to the first arm 523a. One side of the first joint 522a is provided with a first arm 523a. The first arm 523a and the second arm 523b may be connected by the second joint 522b. In addition, the second arm 523b and the third arm 523c may be connected by the third joint 522c. In addition, the third arm 523c and the fourth arm 523d may be connected by the fourth joint 522d. The fourth arm 523d may be coupled to the support part column 524 to be slidable up and down.

The second joint 522b, the third joint 522c, and the fourth joint 522d may correspond to an up and down pivot that allows the camera 210 to rotate up and down with respect to the substrate.

The support column 524 and the support base plate 526 may be coupled by the column pivot 525. The column turning part 525 allows the support column 524 to be rotatable. The lower portion of the support base plate 526 may be provided with a moving means for moving the entire camera support 520 in the x, y-axis direction.

The moving means that may be provided below the second joint 522b, the third joint 522c, the fourth joint 522d, and the support base plate 526 may allow the camera 210 to move forward and backward with respect to the substrate. It may correspond to a moving part.

In addition, the second joint 522b, the third joint 522c, the fourth joint 522d, and the fourth arm 523d may correspond to a lift unit that allows the camera 210 to move up and down with respect to the substrate. have.

In addition, the movement means that may be provided at the lower portion of the support base plate 526 may correspond to the side movement part because the entire camera support 520 may be moved in the y-axis direction.

Through such a configuration, the substrate image can be photographed at various angles, and thus inspection can be performed even if the illumination unit 200 or the substrate stage unit 300 does not need to move or change the angle excessively. The device setting time can be saved, and the inspection angle can be secured even if the illumination unit 200 or the substrate stage unit 300 is not excessively moved, so that the overall size of the inspection apparatus can be prevented from increasing. There is.

3 is a simplified perspective view showing a camera unit according to another embodiment.

As shown in FIG. 3, an auxiliary light 530 may be provided at one side of the camera 510. The camera 510 is coupled to the camera support 560. The camera support unit 560 may include a camera stage 561. The camera 510 may be fixed to the upper side of the camera stage 561. The camera stage 561 may be rotatably fixed to the upper side of the first joint 562 in the z-axis direction. In some cases, the first joint 562 may be provided to rotate in the y-axis direction with respect to the horizontal arm 563. The horizontal arm 563 may be provided to retreat in the y-axis direction with respect to the support column 564. The operation may be various embodiments, and one of the pins (not shown) provided to protrude outward from the support column 564 is inserted into the guide groove (not shown) provided on the side of the horizontal arm 563. And an actuator (not shown) inside the horizontal arm 563 can operate in a manner to advance and retract the pin. In addition, an actuator (not shown) inside the support part column 564 retreats the other end of the pin inserted into the support part column 564 to elevate the horizontal arm 563. Also, the horizontal arm 563 may be rotatable in the x-axis direction with respect to the support column 564.

The support column 564 and the support base plate 566 may be coupled by the column pivot 565. The column pivot 565 allows the support column 564 to be rotatable. A lower portion of the support base plate 566 may be provided with a moving means for moving the entire camera support 560 in the x, y-axis directions.

Since the horizontal arm 563 is rotatable in the y-axis direction with respect to the support column 564, this portion may correspond to an up-and-down pivot that allows the camera 210 to rotate up and down with respect to the substrate.

The moving means that may be provided below the horizontal arm 563 or the support base plate 566 may correspond to the advance moving part allowing the camera 210 to move forward and backward with respect to the substrate.

In addition, the horizontal arm 563 or the support column 564 may correspond to a lifting unit for allowing the camera 210 to move up and down with respect to the substrate.

In addition, the moving means that may be provided below the support base plate 566 may correspond to the side moving part because the entire camera support 560 may be moved in the y-axis direction.

Through such a configuration, the substrate image can be photographed at various angles, and thus inspection can be performed even if the illumination unit 200 or the substrate stage unit 300 does not need to move or change the angle excessively. The device setting time can be saved, and the inspection angle can be secured even if the illumination unit 200 or the substrate stage unit 300 is not excessively moved, so that the overall size of the inspection apparatus can be prevented from increasing. There is.

Hereinafter, the substrate inspection method using the substrate inspection apparatus according to the present embodiment will be described in detail. 4 is a flowchart showing a substrate inspection method using the substrate inspection apparatus according to the present embodiment.

As shown in Figure 4, the storage step (S10) for storing the predetermined test condition, the selection step (S20) for the examiner to select the test start after the storage step (S10), and the preset test condition after the selection step A control step (S30) for adjusting the inspection device according to, and a photographing step (S40) for photographing the substrate after the control step.

The inspection conditions that can be stored in the storage step (S10) include: 1) type of substrate (inspection layer, etc.), 2) type of light source to be used for the main inspection or subsidiary inspection according to the kind of substrate (inspection layer, etc.) , Mode (converged light or scattered light) or color, 3) the predetermined angle of incidence according to the type of substrate (inspection layer, etc.), 4) the angle or position of the predetermined substrate stage in accordance with the type of substrate (inspection layer, etc.), 5) The position and angle of a predetermined camera according to the type of substrate (inspection layer, etc.).

The control step (S30) is a lighting control step (S31) for controlling the lighting unit 200, a substrate stage control step (S32) for controlling the substrate stage unit 300, rear lighting control for controlling the rear lighting unit (400) In operation S33, a camera control operation S34 of controlling the camera unit 500 may include at least one of the control operations.

S31 to S34 may be performed sequentially or simultaneously regardless of the order.

In addition, the lighting control step (S31) is the type of the light source unit 210, the color of the light source unit 210, the position of the light source unit 210, the angle of the light source unit 210, the angle of the reflector 220, the scattering unit 240 At least one of the scattering mode control, the position or angle of the lighting unit driver 250 may be controlled.

In addition, the substrate stage control step (S32) is at least any one of the position of the substrate in the vertical direction, the left, right, and the front / rear direction based on the sliding distance of the substrate, the angle of the substrate, the bottom surface of the body to the substrate stage unit 300 Can be controlled.

In addition, the rear lighting control step (S33) is a rear of at least one of the operation of the rear light source unit 410, the height of the rear light source unit 410, the front and rear positions of the rear light source unit 410 relative to the substrate (S). The lighting unit driver 420 may be controlled.

In addition, the camera control step (S34) can control the position or angle of the camera 510 through the camera unit 500.

Conventionally, the inspection was performed by finding the optimum angle of incidence or inspection angle of the light while adjusting the illumination unit or the substrate stage according to the type of the substrate (inspection layer, etc.), but inputting one inspection condition through the above configuration. And through the storage there is an effect that can automatically secure the substrate image taken under the optimum inspection conditions.

1 is a side cross-sectional view of a substrate inspection apparatus according to the present embodiment.

2 is a simplified perspective view showing a camera unit according to the present embodiment.

3 is a simplified perspective view showing a camera unit according to another embodiment.

4 is a flowchart showing a substrate inspection method using the substrate inspection apparatus according to the present embodiment.

Claims (12)

main body; A substrate stage provided on the main body and on which a substrate to be inspected is placed; And A camera unit provided in the main body to drive a camera for photographing the substrate, The camera unit includes a vertical movement unit for rotating the camera in the vertical direction with respect to the substrate, and a substrate moving apparatus for moving the movement of the camera relative to the substrate. The method of claim 1, The camera unit is a substrate inspection device, characterized in that it comprises a lifting unit for lifting the camera in the vertical direction. The method of claim 1, The camera unit is a substrate inspection apparatus, characterized in that it comprises a side moving portion for allowing the camera to move in a direction orthogonal to the advancing and moving direction. The method of claim 1, The camera unit comprises a subsidiary light source for irradiating light to the substrate. main body; A substrate stage unit provided in the main body and on which a substrate to be inspected is placed; An illumination unit provided in the main body to irradiate light onto the substrate; A camera unit provided in the main body to drive a camera for photographing the substrate; And And a controller for adjusting the inspection environment according to a preset inspection condition. The control unit includes at least one of a lighting control unit for controlling the lighting unit, a substrate stage control unit for controlling the substrate stage unit, a camera control unit for controlling the camera unit. A storage step of storing the inspection condition; And A control step of automatically controlling the inspection apparatus according to the stored inspection conditions; The control step may include at least one of an illumination control step of controlling an illumination unit according to the inspection condition, a substrate stage control step of controlling a substrate stage unit, a rear illumination control step of controlling a rear lighting unit, and a camera control step of controlling a camera unit. Substrate inspection method comprising one. The method of claim 6, The storing step includes storing a substrate type, storing an incident angle of a predetermined light according to the stored substrate type, storing the predetermined substrate stage angle or position, and a predetermined camera position. Substrate inspection method comprising at least one of the steps of storing the angle. The method of claim 6, The storing step includes storing a substrate type, storing a type of a predetermined light source to be used for a main inspection or a subsidiary inspection according to the stored substrate type, and storing a predetermined mode (converged light or scattered light). And at least one of storing the color of a predetermined light source. The method of claim 6, The lighting control step may be performed according to the inspection condition from among the type of light source, the color of the light source, the position of the light source, the angle of the light source, the angle of the reflector, the scattering mode or the convergence mode control of the light source unit, the position or angle of the lighting unit driver. Substrate inspection method, characterized in that to control at least one. The method of claim 6, In the substrate stage control step, at least one of front, rear, left and right positions of the sliding distance of the substrate, the angle of the substrate, and the bottom surface of the main body is controlled through the substrate stage unit according to the inspection condition. . The method of claim 6, The rear lighting control step may include controlling at least one of an operation of a rear light source unit, a height of the rear light source unit, and a forward and rearward position of the rear light source unit based on the substrate through the rear light source driver according to the inspection condition. method of inspection. The method of claim 6, And the camera control step controls the position or angle of the camera through the camera unit according to the inspection condition.

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