KR20100106144A - Entilate gas tube for semiconductor equipment and manufacture mathod and equipment of that - Google Patents

Abstract

PURPOSE: A discharge gas tube for semiconductor equipment and a manufacturing method are provided to prevent the corrosion due to toxic and corrosive gases by forming an inner side of the discharge gas tube having low friction coefficient. CONSTITUTION: A fluorine resin liquid is inserted in order to coat the inner circumference of a curved pipe. The holes of the curved pipe are shut tightly in order to block the leak of the fluorine resin liquid. The inside of the heat treatment chamber for heating the curved pipe is rotated in transverse direction. The fluorine resin liquid is coated on the inside of the inner circumference of the curved pipe. The curved pipe is moved to a heating path along a conveyer belt.

Description

[Entilate gas tube for semiconductor equipment and manufacture mathod and equipment of that}

The present invention relates to an exhaust gas pipe for semiconductor manufacturing equipment, and more particularly, to improve semiconductor manufacturing by preventing toxic and corrosive exhaust gas generated during semiconductor manufacturing process and preventing powder by-products from adhering. The present invention relates to an exhaust gas pipe for a facility, and a method and apparatus for manufacturing the same.

Generally, hydrogen, halogen, and organometallic compounds are used as the gases used in the deposition process of semiconductors or LCD monitors, so the exhaust gases generated here are toxic and corrosive gases and contain powder by-products.

Therefore, exhaust pipes should not only have corrosion resistance, airtightness and durability (safety) but also easy maintenance.

However, the toxic and corrosive exhaust gases not only corrode the inner circumferential surface of the exhaust pipe, but also cause the powder by-products to adhere and accumulate.

In particular, the exhaust gas generated in the semiconductor manufacturing equipment is exhausted from the vacuum chamber by the vacuum pump and sent to the exhaust gas treatment apparatus at the outlet side of the pump so that the harmful gas is detoxified and then transferred to the exhaust jaw of the factory. Since the exhaust gas contains a component having a low vapor pressure at room temperature, it is solidified at the point where the pressure on the outlet side of the vacuum pump rises, and adheres and deposits in the exhaust gas pipe.

In addition, some of the exhaust gas contains a component that reacts with water to produce a solid product. Such exhaust gas has a process in which the exhaust gas treatment device uses water to remove harmful components. At this time, the solid product adheres to the pipe because the humidity in the exhaust gas pipe close to the inlet of the exhaust gas treatment device increases. To be deposited.

Therefore, the exhaust gas pipe is attached and deposited by powder by-products or solid products contained in the exhaust gas by various factors, directly and indirectly, which leads to shortening of the lifespan and requires replacement.

Therefore, during the replacement of the exhaust gas pipes, the semiconductor manufacturing equipment must be shut down, which causes enormous losses due to production stoppage. Therefore, the exhaust gas pipe replacements should be avoided as much as possible. Therefore, considerable efforts and research have been made to prevent corrosion and maintenance of powder by-products in the pipes. Is going on.

In the prior art, a method of injecting washing water into an exhaust gas pipe to clean powder by-products or heating the washing water to exhaust the powder by-products with the exhaust gas by evaporation.

However, the above prior art requires various devices for injecting the washing water into the exhaust gas pipe and additionally installs a heating device, which consumes a lot of washing water or electric energy, and thus requires a lot of maintenance and maintenance costs. It is accompanied by uneconomical problems, and prevents corrosion of pipes and adhesion of powder by-products in the exhaust gas pipe itself.

Therefore, it has led to the study of exhaust pipes that can fundamentally solve the corrosion prevention of pipes and the adhesion of powder by-products.

Literature Information of the Prior Art

[Document 1] KR 10-0834519 B1 2008.06.02

It is an object of the present invention to provide an exhaust gas pipe for a semiconductor manufacturing equipment which prevents corrosion in the pipe and has low adhesion of powder by-products, and a method and apparatus for manufacturing the same.

Another object of the present invention is to be able to easily detach and remove even if the powder by-product is attached to the inner peripheral surface of the exhaust gas pipe.

Still another object of the present invention is to make it possible to supply more cheaply by making it very easy to manufacture the exhaust gas pipe and making it possible to manufacture even unskilled people.

The present invention is to manufacture the inner circumferential surface of the exhaust gas pipe is divided into a stainless steel grain tube and a straight pipe to prevent corrosion and prevent adhesion of powder; The multi-goal tube is an injection sealing process for injecting the fluorine resin solution in the amount of the coating on the inner circumferential surface area and closed the holes of the multi-goal tube to block the leakage of the fluorine resin solution; The stirring coating molding process of rotating the fluorine resin liquid in the inside of the grain tube to form a fluorine resin liquid coating on the inner circumferential surface of the grain tube by rotating simultaneously in the transverse direction and the driven direction in a heating chamber for heating the grain tube. ; A heat treatment process of receiving heat energy in the process of moving the heating passage along the conveyor belt so that the fluorine resin liquid is heat-treated and cured; It is made of a cooling process for cooling the multi-tubes at room temperature; The straight pipe is sprayed to be applied so that the fluorine resin liquid is injected by the compressed air on the inner peripheral surface; A heat treatment process of receiving heat energy in the process of moving the heating passage along the conveyor belt to harden the fluorine resin layer; Characterized in that the exhaust gas pipe manufacturing method made by a cooling process for allowing the multi-goggle pipe to be cooled slowly at room temperature.

Injecting and closing the fluorine resin solution in a smaller amount than the internal volume of the grains, the pores of the grains are sealed and the stirring coating process is carried out to discharge the remaining fluorine resins in the grains. It is another feature that the drainage process is made to have more.

In the stirring coating molding process, the multi-grain tube is further characterized in that it is rotated in all directions at 150 ° C. for 20-30 minutes.

In the heat treatment process, the grains and straight tube is another feature that is made to be heat-treated for 15-20 minutes at 380 ℃.

And a heat treatment chamber having a heat treatment chamber formed by a housing having an entrance on one side and heated by an electric heater, an exhaust port having a damper for evacuating the heat treatment chamber, and a rail disposed below the heat treatment chamber; A "L" shaped housing having wheels for guiding the rails into and out of the heat treatment chamber, a transverse rotating body rotated about an x-axis center line by a reduction motor power at the upper portion of the housing, and inside the rotating rotating body. In the stirring coating molding means having a mounting processor having a driven rotating body with a plurality of hangers, which is rotated about the y-axis center line and the multi-coated pipe sealed by the sealing cap member is engaged, the multi-coated pipe is rotated in all directions. An exhaust gas pipe manufacturing apparatus is formed so that the filled hydrophobic solution is coated on an inner circumferential surface thereof.

The heat treatment chamber is further characterized by further comprising a circulation fan and a temperature sensing sensor rotated by a motor power to maintain a uniform and constant heating temperature.

One side of the transverse rotating body is supported by a transverse rotating tube shaft which is rotated by the reduction motor power is fixed to one side of the rotating rotating body through the housing, and the other side of the transverse rotating body is rotatable to the shaft support fixed to the housing Another feature is that the transverse rotating body is rotated by being supported by the supported support shaft.

The driven rotating body is fixed to the driven rotating shaft installed in the horizontal rotating body, and is installed to be rotatable. The bevel rotating shaft and the driven shaft which receive the power of the reduction motor through the rotating rotating tube shaft on one side of the horizontal rotating body are driven bevel gears and driven bevels. Power is transmitted by the gear and the driven shaft and the driven rotary shaft is characterized in that the driven rotor is rotated by the power transmission to the pair of chain gear and chain.

The multi-coupling pipe which is caught on the hanger is characterized in that it is made to be caught by a hanger hanger respectively hooked to the hanger hole of the hanger hole and the sealing cap for sealing the hanger of the hanger.

And an exhaust gas pipe consisting of a stainless steel curved pipe and a straight pipe; Inject the fluorine resin solution into the inside of the grain tube and stir in all directions at 150 ° C. for 20-30 minutes to coat the fluorine resin solution on the inner circumferential surface. It has a stratified layer, the straight pipe is characterized in that the fluorine resin is sprayed on the inner circumferential surface to be applied and then subjected to heat treatment at 380 ℃ for 15-20 minutes and slowly cooled to provide an exhaust gas pipe having a fluorine resin layer on the inner circumferential surface.

According to the present invention, the inner circumferential surface of the exhaust gas pipe has superior non-adhesiveness and low friction coefficient, and has non-oil resistance, heat resistance, electrical properties, low temperature stability, chemical resistance, durability and low friction coefficient, thereby preventing corrosion from toxic and corrosive gases. And the deposition and deposition of powder by-products and solid products have the effect of providing an exhaust pipe which is prevented in advance.

In addition, the inner circumferential surface of the exhaust gas pipe of the present invention has a very low critical surface tension than other materials, so that the powder by-products are difficult to adhere to each other, and even if stuck together, they are easily separated by the blowing force of the exhaust gas and are discharged together with the exhaust gas. Even if the powder by-products are attached, it is not only effective to remove and remove, but also to provide easy cleaning, thereby providing ease of maintenance.

In addition, the present invention provides the effect that even non-skilled people can manufacture and shorten the manufacturing time, so that it can be distributed more cheaply according to the production cost reduction.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Figure 1 shows a manufacturing process diagram according to the present invention, the exhaust gas pipe is carried out in the present invention using a stainless steel pipe for the pipe is used, such as straight pipes and small diameter pipes, such as a multi-bowl pipe. The exhaust gas pipe may also be referred to as an exhaust pipe in some cases.

Accordingly, the present invention includes a straight pipe, a small diameter pipe, a multi grain pipe, and the like, which are required for the pipe, and a fluorine resin solution (also called Teflon) for coating the inside of the exhaust gas pipes.

The raw materials for the composition of the fluorine resin solution were provided by a raw material manufacturer (Daiki Co., Ltd.) and mixed and tested in various ways. As a result, 5-15 wt% Fluoropolymer, 5-15 wt% Binder, 10-20 wt% Methyl isobutyl ketone, The composition of 10-20 wt% Methyl ethyl ketone, 10-20 wt% Methyl pyrrolidone, 25-35 wt% Dimethylacetamide, and 5 wt% Other was tested as the best and is explained in detail later.

The raw material blended as described above for the practice of the present invention is stirred at 20-30 ℃ is carried out to be coated on the inner peripheral surface of the exhaust pipe after the fluorine resin solution is prepared. Since the stirrer for mixing the raw materials is a known stirrer is used, detailed drawings and descriptions thereof will be omitted.

On the other hand, the present invention is used in the piping of the exhaust gas pipe as well as a large diameter and long straight pipe, elbows, S-shaped pipe or T-shaped pipe or multi-pipe and short and small diameter pipe used together.

Accordingly, the present invention is carried out a manufacturing method to have a fluorine resin layer on the inner peripheral surface of the exhaust pipe, such as the elbow or S-shaped tube or T-shaped tube or multi-pipe and short diameter small diameter tube. For the understanding and convenience of the present invention, the elbow or the S-shaped tube or the T-shaped tube, the multi-hole tube, and the small-caliber tube having a short length and small diameter will be named and described collectively as a multi-tube tube.

And the same process, such as the material inspection or cleaning of the exhaust gas pipe is carried out according to the present invention will be omitted because it is a conventional manufacturing process.

Referring to Figure 1, the multi-pipe of the present invention is first subjected to an injection sealing process. The injection sealing process is to be blocked by the sealing cap member 20 having a locking hole (12a) one end of the multi-pipe 11 as shown in FIG.

Next, the fluorine resin solution 12a is introduced into the multi-corner tube 11, and two methods may be performed.

In one embodiment, the internal volume of the multi-pipe 11 is calculated, and a smaller amount of the fluorine resin solution 12a is added thereto, and then the other end of the multi-pipe 11 on the other end is another sealing cap. It is sealed by the member 20.

Therefore, when the amount of fluorine resin liquid 12a is injected into the inside of the multi-grain tube 11 when the multi-grain tube 11 moves, the fluorine resin liquid 12a is in a state in which the fluorine resin liquid 12a is flowed and is injected. Since all of the holes drilled in the) are blocked by the respective sealing cap members 20, there is no leakage of the fluorine resin liquid 12a.

In another embodiment, after the inner circumferential surface area of the curved tube 11 is calculated and the fluorine resin solution 12a is injected into the area, the holes of the curved tube 11 are blocked by the sealing cap member 20. To lose.

(A), (b) and (c) of FIG. 2 show various types of multi-pipes 11 in the state of injection sealing as described above. The sealing cap member 20 used in the injection sealing process is not necessarily used only having a cap shape, but may have a catching hole 20a while keeping the holes drilled in the curved tube 11 in some cases. Sealing members of other shapes or other structures may be used.

Next, the present invention is carried out a stirring coating molding process to be coated with the fluorine resin solution 12a on the inner peripheral surface of the multi-corner tube 11, the stirring coating molding process is shown in Figure 3 and 4 stirring coating molding means ( 100).

Stirring coating molding means 100 is largely divided into a heat processor 110 and a mounting processor (120).

The heat processor 110 has a heat treatment chamber 111 having an entrance and exit 111a, and has a circulation fan 113 at the top of which the motor 113a power is transmitted to the fan shaft 113b and rotated, and a damper at one side thereof. It is comprised so that the exhaust port 114 which has 114a) may be provided.

6 and 7, a plurality of electric heaters 112 and a temperature sensor 115 are installed in the heat treatment chamber 111, and the housing 116 constituting the heat processor 110 is provided. A heat insulating material 116b such as glass fiber is embedded in the case 116a, and a rail 140 extending outside the doorway 111a is installed below the heat treatment chamber 111.

Mounting processor 120 is provided with a wheel 139 that is rotated along the rail 140 under the "L" shaped housing 121 to allow the entire mounting processor 120 to enter and exit the heat treatment chamber 111. have.

The horizontal part of the housing 121 is supported by the horizontal rotating tube shaft 124 rotated by the power of the reduction motor 123 to be rotated, and fixed to the horizontal rotating tube 125 to the horizontal rotating tube shaft 124. It is.

In addition, the rear end portion of the horizontal rotating body 125 is configured to be fixed to the horizontal supporting shaft 124a which is rotated by being supported by the shaft support 126 fixed to the lower portion of the housing 121, the horizontal rotating body 125 is As shown in FIG. 10, the rotation is possible around the y axis center line y.

In addition, a bevel rotating shaft 127 is installed in the horizontal rotating tube shaft 124 to be rotated by the reduction motor 123, and an end of the bevel rotating shaft 127 penetrates into the horizontal rotating body 125 to drive a bevel gear ( 128) is fixed.

The drive bevel gear 128 is engaged with the driven bevel gear 128 'of the driven shaft 132 supported by the support bearing boss 133, and is transmitted to the power transmission so that the chain gear 134 provided on the opposite side is rotated. The chain gear 134 is a chain located at one end of the driven rotary shaft 135 installed inside the transverse rotating body 125 so as to be rotatable in a direction piercing the rotating direction of the horizontal rotating body 125. It is configured to be connected to the gear 134 'and the chain 134a so as to transmit power so that the driven rotating body 135 fixed to the driven rotating shaft 138 can rotate around the x-axis center line x shown in FIG. Consists of.

FIG. 5 shows a main part of the components for transmitting power to the horizontal rotating body 125 and the driven rotating body 135, wherein the reduction motor 123 is driven by the pulleys 131 and 131 'and the belt 131a. Power is transmitted to the shaft 124, the transverse rotating body 125 is to be rotated.

In addition, the bevel rotating shaft 127 is rotatably installed through the transverse rotating tube 124 and the bevel rotating shaft 127 is powered by the pulleys 131 and 131 'and the belt 131a from the reduction motor 123. The rotational force is transmitted and the rotational force is transmitted by the driving bevel gear 128 and the driven bevel gear 128 'which are engaged with each other so that the driven shaft 132 is rotated. Reference numeral 129 denotes a bearing boss portion for supporting the transverse rotating tube shaft 124, and reference numerals 129 'and 129 " are fixed to the support 130 and the transverse rotating body 125 to support the bevel rotating shaft 127, respectively. Represents a boss.

According to the present invention, the horizontal rotating body 125 is rotated on the x-axis center line x by the power of the reduction motor 123, and the driven rotating body 135 is on the y-axis center line y in the horizontal rotating body 125. As shown in FIG. 5, not all of them are rotated by only one reduction motor 123, but in some cases, they may be transmitted by power by a plurality of motors and may be rotated by another power transmission structure. The rotating rotating body 125 and the driven rotating body 135 can also be rotated by.

In the present invention, as shown in FIG. 3 and FIG. 9, a plurality of hangers 136 are fixed to the driven rotating body 135 in a horizontal direction and a vertical direction, and a hanger hole 136a is provided in the hanger 136. It is configured to penetrate a large number.

Therefore, in the present invention, as shown in FIG. 3, the hanger rack of the driven rotating body 135 is driven by the hanger hanger 21 of the plurality of multi-pipes 11 in a state where the mounting processor 120 is drawn out from the heat treatment chamber 111. (136) to mount. The hanger hanger 21 is inserted into the locking hole 20a and the hanger hole 136a as shown in FIG. 9 so that the hanger tube 11 is fixed in one place.

Next, when a plurality of multi-pipes 11 are mounted to be driven by the driven rotating body 135, the entire mounting processor 120 is moved to move the transverse rotating body 125 into the heating processing chamber 111 as shown in FIG. 4. The driven rotating body 135 is inserted. At this time, the housing 121 of the mounting processor 120 shields the entrance and exit 111a and the lower portion of the heat treatment chamber 111. Reference numeral 144 denotes a gasket for improving the sealing property of the heat treatment chamber 111.

In addition, since the horizontal heater 125 is inserted into the heat treatment chamber 111, the electric heater 112 is located on one side as shown in FIG.

Therefore, after the transverse rotating body 125 is inserted into the heat treatment chamber 111, the locking bracket of the mounting processor 120 is mounted on the screw shaft 142 on one side of the heat processor 110 as shown in FIGS. 7 and 8. After the 141 is fitted, the lock nut hole 143 is fastened to the screw shaft 142 so that the mounting processor 120 does not leave its own position while the stirring coating molding means 100 is in operation.

Next, when the stirring coating molding means 100 is operated in the state as shown in FIG. 4, the temperature of the heat treatment chamber 111 is increased to a processing temperature of 150 ° C. by the electric heater 112, and the temperature sensor 115 is When the processing temperature is higher than the sensing temperature is applied to the control control unit (not shown) by the control control unit to stop the operation of the electric heater 112, on the contrary, when the processing temperature of the heating chamber 111 is lower than the set temperature, the power supply again By supplying and operating so that the temperature of the heat treatment chamber 111 is always maintained at 150 ℃ processing temperature.

At this time, the heating air of the heat treatment chamber 111 is circulated and spread throughout the room by the circulation fan 113 to partially and evenly maintain the same processing temperature without a difference in heating temperature.

Referring to FIG. 10, power is transmitted by driving of the reduction motor 123, and the horizontal rotating body 125 is rotated at a low speed on the x-axis center line x, and the driven rotating body 135 is the horizontal rotating body ( 125) Since the inside of the multi-pipe 11 hangs on the hanger 136 by being rotated at a low speed on the y-axis center line y, the inside of the multi-pipe 11 is rotated in all directions. The fluororesin liquid 12a flows in a mixed state in all directions.

Therefore, the fluorine resin solution 12a is evenly coated on the inner circumferential surface of the grains 11.

For example, when the inner circumferential surface of the curved tube 11 is applied by the spray coating method, the inner circumferential surface is curved, so that the fluorine resin liquid 12a is not evenly applied, thereby causing a defect. In addition, even when the fluorine resin solution 12a is flowed into the inside of the grain tube 11, since the inner circumferential surface of the grain tube 11 is bent, the fluorine resin solution 12a is not evenly applied, thereby causing a defect. Can be.

However, according to the present invention, the fluorine resin solution 12a flows in all directions as the fluorine resin solution 12a is injected into the inside of the grain tube 11 by being swung by the stirring coating molding means 100. ), It can be coated evenly on the entire inner circumference.

Then, as described above, when heated to 150 degrees at a processing temperature of 150 ° C while rotating the grain tube 11 in all directions, the fluorine resin solution 12a adheres to the inner circumferential surface of the grain layer 11 while the coating layer (film layer) This is to be formed.

When the stirring coating molding process as described above, since the fluorine resin solution 12a flowing in all directions is in contact with the inner circumferential surface of the grain tube 11, bubbles are removed in the coating layer and have a thick coating layer (coating layer) with strong adhesion.

Next, when the coating molding is completed, the deceleration motor 123, the electric heater 112, and the motor 113a are stopped, and the damper 114a is opened to heat the air heated through the exhaust port 114. It is to prevent the hot heating air from being momentarily exhausted and burned through the entrance and exit 111a when the on-site processor 120 is moved away from the heat processor 110 by being exhausted from the 111.

 Therefore, after the heated air of the heat treatment chamber 111 is exhausted, the lock nut port 143 is released, the mounting processor 120 is moved to be separated from the heat processor 110, and the grain tube 11 is separated. Serve

After the stirring coating molding process is completed, the multi-corner tube 11 may have a heat treatment process after the drainage process, or a heat treatment process may be performed immediately without the drainage process.

In detail, in the injection sealing process of the present invention, as an embodiment, the internal volume of the multi-grain tube 11 is calculated, and in the case of the multi-grain tube 11 into which the fluorine resin solution 12a is added in a smaller amount than the internal volume, Since the fluororesin liquid 12a remains after the stirring coating molding process is completed, the sealing cap 20 is separated from the multi grain pipe 11 after cooling the grains 11 and the fluorine resin liquid 12a remaining therein. The heat treatment process is followed by the drainage process.

In another embodiment, however, when the circumferential surface area of the multi-pipe 11 is calculated and injected as much as the amount of fluorine resin solution 12a coated on the area, the fluorine resin solution 12a is deposited on the inner circumferential surface. Since the state is omitted, the drainage process is omitted, and only the sealing cap member 20 is removed and then subjected to the heat treatment process.

11 and 12 show the heat treatment means 150 for performing the heat treatment process of the present invention.

Referring to FIG. 11, the heat treatment means 150 includes a conveyor belt 152 that is guided and driven by a conveyor 159 by the power of the motor 151, and has a long tunnel shape on the conveyor belt 152. The heating passage 153 is provided, and the heating passage 153 has a configuration in which a plurality of heaters 154 are installed.

On the conveyor belt 152, the multi-pipe 11 or straight pipes to be described later are placed on the conveyor belt 152 to be transported along the long heating passage 153, wherein the fluorine resin liquid applied to the inner circumferential surface is dried and heat treated to dry. do. Reference numeral 158 denotes an exhaust port.

Referring to FIG. 12, the conveyor belt 152 is a conveyor belt 152 driven between a pair of guide rollers 155 so that the conveyor belt 152 always presses the conveyor belt 152 downward. Since the 152 is always driven while being in a tense state, the exhaust gas pipes mounted and moved thereon are moved without sag or slip phenomenon with the conveyor belt 152, thereby moving at a constant feed speed.

Therefore, the exhaust gas pipe moving along the conveyor belt 152 can pass through the heating passage 153 at the set drying time, thereby obtaining a good quality heat treated product.

In the heat treatment process of the present invention is to move the multi-pipe 11 for 15-20 minutes at a high heat treatment temperature of 380 ℃ in the heating passage 153 of the heat treatment means 150.

At this time, the drained goggle tube 11 is dried and heat-treated fluorine resin solution coated on the inner circumferential surface becomes a fluorine resin layer 12 while solidifying the state, and has a heat treatment process immediately without drainage process In the case of the multi-grain tube 11, the fluorine resin layer 12, which is solidified on the inner circumferential surface, is stabilized and harder by the heat treatment process, so that the hardness and strength are increased. It is preferable to be carried out immediately to have a heat treatment process in.

After the heat treatment process is completed, the cooling process is performed to cool the granules tube 11 at room temperature by slow cooling to have a solidified fluorine resin layer 12 on the inner circumferential surface of the grains 11. will be.

On the other hand, the straight pipe is carried out in the present invention usually means having a length of 1.5m in the diameter of 500mm or more, since the straight pipe is large in diameter by receiving compressed air having an air pressure of 5-7kg / ㎠ in the compressor spray A spray application process is performed in which the hydrophobic fluid is injected by a gun or a sprayer to be sprayed onto the inner circumferential surface of the straight pipe. Apparatus for allowing the liquid to be applied using the compressed air and the spray gun of the compressor is already known, so the detailed drawings and description thereof will be omitted.

In the spray coating process, the coating thickness of the fluorine resin liquid may be applied in a thickness range of 30 μm-5 mm, and may be repeatedly applied several times due to the material properties of the fluorine resin liquid, and the coating thickness may be adjusted so that The coating thickness of the fluororesin liquid applied according to the type of exhaust gas is determined and applied.

Next, the straight pipe is completed by having a heat treatment process and then a cooling process as shown in FIG.

Since the heat treatment process of the straight pipe is performed by the heat treatment means 150 shown in FIGS. 11 and 12 and already described, a detailed description thereof will be omitted.

The present invention is not only manufactured by the above-described manufacturing process and apparatus, there is no deterioration (degradation) due to repeated coating, so that an unskilled person can easily manufacture and reduce manufacturing time.

Therefore, the present invention, when all the manufacturing process is completed, as shown in Figure 13, the inner circumferential surface is obtained a multi-pipe and straight tube having a fluorine resin layer 12 and the thickness of the fluorine resin layer 12 is preferably coated to 30-50㎛ Do. Such multi-pipes and straight pipes will be referred to below as the exhaust gas pipe 10 and described.

In the exhaust gas pipe 10 obtained by the present invention, since the fluorine resin solution coated on the inner circumferential surface has a low melting temperature and good fluidity, the fluorine resin layer 12 without pinholes in the coating process can be obtained.

On the other hand, there may be a method to be plated as the coating layer is formed on the inner circumferential surface of the exhaust gas pipe as in the present invention, and to form an plating layer on the inner circumferential surface of the pipe as described above to help understand the present invention. do.

That is, when the plating process is performed to form a plating layer on the inner circumferential surface of the exhaust gas pipe, since the plating process itself is plated without fluidity, pinholes are often generated in the plating layer. In reality, pinhole inspection is impossible.

Therefore, if there is a pinhole in the plating layer on the inner circumferential surface of the exhaust gas pipe, the exhaust gas pipe itself is corroded, and the plating layer is detached, which has a disadvantage in that the function of preventing corrosion of the exhaust gas pipe and preventing adhesion of powder by-products is significantly reduced or lost.

However, the present invention not only eliminates the pinholes in the fluorine resin layer during the manufacturing process, but also eliminates the need for the pinhole inspection process, and makes it possible to faithfully prevent corrosion of the exhaust pipe and adhesion of powder by-products, thereby enhancing product reliability. The manufacturing cost can be reduced, so that a good quality product can be distributed more cheaply.

In the present invention, the fluorine resin layer 12 on the inner circumferential surface of the exhaust gas pipe 10 is hardly adhered to all materials due to its material properties, and is relatively non-tacky even in the case of a material or material having a very strong adhesiveness. Has

In addition, the coefficient of friction of the fluororesin layer 12 is slightly different depending on the load, the sliding speed, the type of fluorine resin coating used, but generally has a low friction coefficient of about 0.05-0.20, and the fluororesin layer 12 The surface of) is easy to clean because it is not oily, and in many cases it has a metaphor that keeps clean automatically.

In addition, the fluororesin layer 12 can be used continuously up to 290 ° C, and can be used intermittently up to 350 ° C under appropriate ventilation conditions, and has high insulation, low loss rate and high resistance over a wide frequency range. There are also electrical characteristics.

And even at extremely low temperatures (-270 ℃) has a low temperature stability that does not read the physical properties, and generally has chemical and chemical resistance that is not affected by the chemical environment.

Therefore, since there is a fluorine resin layer 12 on the inner circumferential surface, the exhaust gas pipe 10 is not only prevented from being corroded by toxic gas and corrosive gas, but also contained in the exhaust gas because the fluorine resin layer 12 has high non-tackiness. Even if the powder by-products are not attached to the inner circumferential surface of the exhaust gas pipe 10 or are attached, the powder by-products are prevented from being attached by being easily detached by the exhaust gas having the exhaust pressure.

And the most important element in the present invention is non-tacky. Non-adhesiveness means that other materials do not stick well to each other, but they fall well. These non-tackiness values are as follows according to the numerical values and experiments such as adhesive energy, coefficient of friction and critical surface tension, and contact angle with water.

In general, all materials have inherent adhesion energy that sticks well, and Table 1 shows a comparison table between the different materials.

[Table 1] Comparison table of adhesion energy between materials

         Material (material)     Adhesive energy (dyne / cm)          Fluorine Resin            42         Polyethylene            75    Aluminum (Electropolished)           145

In Table 1, as the adhesion energy is lower, other materials do not stick well, and the adhesion energy of the fluorine resin layer is low, and thus, powder by-products do not adhere well to the fluorine base layer 12.

In addition, all materials have a coefficient of friction that numerically represents the frictional force that occurs when they meet other specified materials, and Table 2 shows a comparison table between resin types.

[Table 2] Comparison table of friction coefficient between resins

        Material (material)           Coefficient of friction          Fluorine Resin             0.04         Polyethylene              4           Nylon              3

In Table 2, the lower the friction coefficient, the less wear. Since the fluorine resin layer 12 has a very low friction coefficient, the wear rate is reduced by the exhaust gas so that the exhaust gas can pass well. The good passage of the gas not only means that the powder by-products adhere well, but also pass well, so that even when the fluorine resin layer 12 is employed in the exhaust gas pipe 10, the wear is less, so that the gas pipe can be faithfully performed.

Table 3 below shows the comparison of the critical surface tension between resin types.

[Table 3] Comparison of critical surface tension between resins

        Material (material)      Critical surface tension (dyne / cm)           Fluorine Resin            17.8          Polyethylene             31            Nylon             46

As shown in Table 3, the lower the critical surface tension value, the lower the other surface material. The critical surface tension of the fluororesin layer 12 is much lower than that of other materials. Not only are the by-products sticking together, but they stick together and are easily separated by the blowing force of the exhaust gas and are discharged together with the exhaust gas.

In addition, the contact angle with respect to water is a photograph of the surface tension characteristics of the water by dropping water on the surface of the material and shows the contact angle as a numerical value. The higher the contact angle value, the better the non-tackiness. The contact angle of the liver with water is compared.

[Table 4] Comparison table of contact angles for water between different materials

         Substance (material)    Contact angle for water (angle)   Unprocessed stainless steel            79 degrees     Unprocessed Titanium            80 degrees       Unprocessed steel            73 degrees       Unprocessed glass            <5 degrees           Fluorine Resin           114 degrees

According to [Table 4], since the contact angle with respect to water is much higher than that of other materials such as stainless, the fluorine resin is very high in tackiness of the fluorine resin layer 12.

On the other hand, the exhaust gas pipe of the electroless composite plating on the stainless steel pipe and the exhaust gas pipe of the present invention having a fluorine resin layer on the stainless steel pipe were manufactured and the contact angles to water were tested.

Referring to FIG. 14 showing the electroless composite plated product picture, the contact angle with respect to water is shown at 49-63 degrees, and the FIG. 15 showing the product picture with the present invention shows that the contact angle is 84-85 degrees.

According to the above experiment, it can be seen that the contact value of the exhaust gas pipe of the present invention is much higher than that of the electroless composite plated exhaust gas pipe, and the higher the contact angle value, the better the non-tackiness. Experimental results show that the adhesiveness.

Therefore, according to the present invention, the inner circumferential surface of the exhaust gas pipe has excellent non-adhesiveness and low friction coefficient, and has non-oil resistance, heat resistance, electrical properties, low temperature stability, chemical resistance, durability and low friction coefficient, so that Corrosion protection and the deposition and deposition of powder by-products and solid products results in exhaust pipes that are prevented in advance.

Although the present invention has been described as an embodiment of the exhaust gas pipe for semiconductor manufacturing equipment, it is not limited thereto, and it can be variously modified by those skilled in the art. It is obvious that the scope and scope of the claims should be broadly applied and protected without departing from the scope of the claims.

1 is a process diagram showing a method for manufacturing an exhaust gas pipe according to the present invention;

2 is a longitudinal cross-sectional view illustrating a process of injecting a multi-goal tube according to the present invention;

3 and 4 are longitudinal cross-sectional view showing the open and closed state of the stirring coating molding means according to the present invention,

5 is a cross-sectional view illustrating a power transmission state of the stirring coating molding means of the present invention;

6 and 7 are a side view and a front configuration view showing the structure of the electric heater employing the stirring coating molding means of the present invention,

8 is a plan view for explaining the lock state of the mounting processor of the stirring coating molding means of the present invention;

9 is a perspective view showing a state in which the multi-pipe hanger hanger according to the invention,

10 is a schematic operation explanatory diagram illustrating the rotation of a multi-pipe according to the present invention;

11 is a block diagram showing a heat treatment means according to the invention,

12 is a schematic configuration diagram of a heat treatment means driving unit according to the present invention;

13 is a cross-sectional configuration diagram of an exhaust gas pipe manufactured by the present invention;

14 is an experimental photograph of the contact angle of the composite plate exhaust gas pipe products to help the understanding of the present invention,

15 is an experimental photograph of the contact angle of the exhaust gas pipe according to the present invention.

Explanation of symbols on the main parts of the drawings

10: exhaust gas pipe 11; Dagokwan

12; Fluorine resin layer 20; Seal cap member

100: stirring coating molding means 110: heat treatment

111; Heat Treatment Room 112: Electric Heater

120: mounted processor 125: the horizontal rotating body

135: driven rotor 150: heat treatment means

Claims (10)

As to manufacture the inner peripheral surface of the exhaust gas pipe is divided into stainless steel grain pipe and straight pipe to prevent corrosion and prevent adhesion of powder; The multi-goal tube is an injection sealing process for injecting the fluorine resin solution in the amount of the coating on the inner circumferential surface area and closed the holes of the multi-goal tube to block the leakage of the fluorine resin solution; The stirring coating molding process of rotating the fluorine resin liquid in the inside of the grain tube to form a fluorine resin liquid coating on the inner circumferential surface of the grain tube by rotating simultaneously in the transverse direction and the driven direction in a heating chamber for heating the grain tube. ; A heat treatment process of receiving heat energy in the process of moving the heating passage along the conveyor belt so that the fluorine resin liquid is heat-treated and cured; It is made of a cooling process for cooling the multi-tubes at room temperature; The straight pipe is sprayed to apply the fluorine resin liquid is injected to the inner peripheral surface by compressed air; A heat treatment process of receiving heat energy in the process of moving the heating passage along the conveyor belt to harden the fluorine resin layer; A method for manufacturing an exhaust gas pipe for semiconductor manufacturing equipment, characterized in that the cooling process for cooling the multi grain pipe at room temperature. The method of claim 1, wherein the fluorine resin solution of a smaller amount than the internal volume of the grain tube is added to the injection sealing process, the pores of the grains are sealed, and then the stirring coating process is performed. A method for manufacturing an exhaust gas pipe for semiconductor manufacturing equipment, characterized in that it further comprises a drainage process for discharging the fluorine resin liquid. The method of claim 1, wherein in the stirring coating molding process, the multi-grain tube is rotated in all directions at 150 ° C. for 20-30 minutes in a heat treatment chamber. The method of claim 1, wherein in the heat treatment process, the curved tube and the straight tube are heat treated at 380 ° C. for 15-20 minutes. A heat treatment chamber formed by a housing having an entrance and exit on one side, and having a heat treatment chamber heated by an electric heater, an exhaust port having a damper for evacuating the heat treatment chamber, and a rail provided below the heat treatment chamber; A "L" shaped housing having wheels for guiding the rails into and out of the heat treatment chamber, a transverse rotating body rotated about an x-axis center line by a reduction motor power at the upper portion of the housing, and inside the rotating rotating body. In the stirring coating molding means having a mounting processor having a driven rotating body with a plurality of hangers, which is rotated about the y-axis center line and the multi-coated pipe sealed by the sealing cap member is engaged, the multi-coated pipe is rotated in all directions. An exhaust gas pipe manufacturing apparatus for a semiconductor manufacturing equipment, characterized in that the filled fluorine resin solution is coated on the inner circumferential surface. 6. The exhaust gas pipe manufacturing apparatus according to claim 5, further comprising a circulation fan and a temperature sensing sensor which are rotated by a motor power in order to keep the heating temperature uniform and constant. The transverse rotating tube shaft which is rotated by the reduction motor power is supported by one side of the transverse rotating body through the housing and fixed to one side of the rotating rotating body, and the other side of the transverse rotating body is fixed to the housing. An exhaust gas pipe manufacturing apparatus for a semiconductor manufacturing equipment, characterized in that the transverse rotating body is rotated by being supported by a support shaft rotatably supported by the shaft support. The bevel rotating shaft and the driven shaft of claim 5, wherein the driven rotating body is fixed to the driven rotating shaft installed in the horizontal rotating body, is rotatably installed, passes through the rotating rotating tube shaft on one side of the horizontal rotating body, and receives the reduction motor power. And a driven bevel gear and a driven bevel gear, the driven shaft and the driven rotating shaft being powered by a pair of chain gears and chains so that the driven rotating body rotates. 6. The semiconductor manufacturing apparatus according to claim 5, wherein the multi-coupling pipe that is hooked to the hanger is hooked by a hanger hook that is locked to each of the hanger holes of the hanger and the sealing hole for sealing the multi-pipe. Exhaust gas pipe manufacturing apparatus. An exhaust gas pipe consisting of a stainless steel curved tube and a straight pipe; Inject the fluorine resin solution into the inside of the grain tube, and stir in all directions at 150 ° C. for 20-30 minutes to coat the fluorine resin liquid on the inner circumferential surface. And a straight layer has a fluorine resin layer on the inner circumferential surface of the straight pipe after spraying the fluorine resin solution on the inner circumferential surface, followed by heat treatment at 380 ° C. for 15-20 minutes, and slow cooling.

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