KR20100088574A

KR20100088574A - Apparatus for breaking substrate of brittle material

Info

Publication number: KR20100088574A
Application number: KR1020100008424A
Authority: KR
Inventors: 카즈야 마에카와; 야스토모 오카지마
Original assignee: 미쓰보시 다이야몬도 고교 가부시키가이샤
Priority date: 2009-01-30
Filing date: 2010-01-29
Publication date: 2010-08-09
Also published as: CN101792254A; JP2010173903A; TWI427046B; TW201043587A; JP5167161B2; KR101112067B1; CN101792254B

Abstract

PURPOSE: An apparatus for breaking a brittle material substrate is provided to divide a glass substrate without using a complex device, to apply even load according to a dividing groove, and to be economically used in a smaller size. CONSTITUTION: An apparatus for breaking a brittle material substrate comprises a base table(1) and a pair of pliers(5) which is supported on the base plate and divides the brittle material substrate by applying a load on both ends of a dividing groove. The pliers are capable of moving to the direction meeting at right angle with the dividing groove. The pliers include an upper chuck and a lower chuck.

Description

Brake device for brittle material substrate {APPARATUS FOR BREAKING SUBSTRATE OF BRITTLE MATERIAL}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a brake device for a brittle material substrate, in particular a brake device for a brittle material substrate for dividing a brittle material substrate, such as a glass plate with a split groove.

In the case of dividing a brittle material substrate such as a glass plate, a glass plate is generally used by a scribing wheel formed of cemented carbide or sintered diamond, or a glass cutting tool having a diamond tip at the tip. Dividing grooves (scribe lines) are formed in the grooves and are divided by bending both sides thereof. When bending a large glass plate especially, the brake apparatus shown by patent document 1 or patent document 2 is used, for example.

In the apparatus shown in patent document 1, the 1st product table and the 2nd product table are arrange | positioned at the slide table and the tilting table so that the edge part may have a fixed angle. Then, the glass plate on which both surfaces are scribed is placed on the table, and the glass plate is pressed and fixed by the first clamp bar and the second clamp bar. When the second product table is rotated in this state, a shearing force and a tensile force act on the scribe line of the glass plate with the clamp bar pressed, and the glass plate is divided into two left and right.

Moreover, in the apparatus shown by patent document 2, the glass plate is divided into two left and right by pressing a brake bar along a dividing groove | channel.

Japanese Patent Publication No. 2003/002471 Japanese Laid-Open Patent Publication No. 7-276174

In patent document 1, as mentioned above, the conventional brake apparatus for dividing a glass plate has a slide table and a tilting table, and has mechanisms, such as a clamp bar for holding a glass plate. Then, by simply tilting the tilting table, a shape is engulfed in the divided surface of the glass plate, so it is necessary to slide the other table or move the rotational movement point of the tilting table.

As is apparent from the above, the conventional brake device has a problem that not only the structure is enlarged, but also requires a complicated mechanism and can not be inexpensively configured.

Moreover, in patent document 2, it is difficult to apply an even load along a dividing groove with respect to a brake bar, and it is easy to produce a segmentation defect.

An object of the present invention is to realize a device for dividing a brittle material substrate such as a glass plate in a compact and inexpensive manner.

A brake device for a brittle material substrate according to claim 1 is an apparatus for dividing a brittle material substrate having a dividing groove along a dividing groove, and includes a base stand and a pair of pliers. The pair of pliers are supported along the base to grip both ends of the dividing grooves of the brittle material substrate on which the dividing grooves are formed to apply a dividing load to both ends of the dividing grooves, thereby dividing the brittle material substrate.

In the present invention, the dividing groove is a dicing using a scribe line or a grinding wheel formed by using a thermal stress by irradiation of a scribing wheel, a laser, or the like, which is usually used for scribing a brittle material substrate. It is meant to be a guideline for separating a brittle material substrate by dividing, including a cut-away groove for dividing formed by processing.

In addition, in this invention, parting means the processing process for separating a brittle material board | substrate along the scribe line or the notch groove formed in the main surface of brittle material.

In the present invention, the brittle material substrate includes glass for building materials, glass windows for automobiles, glass circuit boards such as FPD, ceramics that are sintered materials, single crystal silicon, semiconductor wafers, ceramic substrates, sapphire substrates, stones, and the like. Included.

In this apparatus, a brittle material substrate, such as a glass plate in which a dividing groove is formed, is gripped with a pair of pliers, and the brittle material substrate is divided by applying a dividing load. More specifically, in this apparatus, both ends of the dividing grooves of the brittle material substrate having the dividing grooves are gripped by the pliers, respectively. And one side of a brittle material board | substrate is supported by a pliers, and a pressing force is applied to the other side. By this pressing force, the brittle material substrate is bent, and cracks are generated from both ends of the dividing grooves and are divided.

In such a device, a complicated structure and mechanism such as tilting a table are unnecessary like a conventional device, and only a pair of pliers is formed, which simplifies the configuration. Therefore, an inexpensive device can be realized.

The brake device for a brittle material substrate according to claim 2 is the device of claim 1, wherein the pair of pliers is relatively movable with respect to the brittle material substrate in a direction orthogonal to the direction in which the divided grooves of the brittle material substrate are formed.

When dividing a large brittle material substrate, a plurality of dividing grooves may be formed in one substrate. Therefore, in this apparatus, a pair of pliers is made to be movable relatively with respect to a brittle material substrate in the direction orthogonal to a parting groove. For this reason, even when a plurality of dividing grooves are formed, the dividing loads can be divided by applying a dividing load in order to each dividing groove with a pair of pliers.

The brake device for a brittle material substrate according to claim 3 is the device of claim 1 or 2, wherein the pair of pliers are movable in the direction in which the dividing groove of the brittle material substrate is formed.

Here, the pair of pliers can also move in the direction in which the dividing grooves are formed, so that the pliers can be adjusted to an appropriate position according to the size of the substrate and the like, and good division can be performed on various substrates.

The brake device for a brittle material substrate according to claim 4 is the device according to any one of claims 1 to 3, wherein each of the pair of pliers has an upper chuck and a lower chuck. The upper end has a pressing body for pressing the upper surface of the brittle material substrate at the leading end. The lower chuck has a receiving portion opposed to the pressing body and relatively freely accessible and detached from the pressing body and receiving a lower surface of the brittle material substrate. The lower chuck receiving portion extends a predetermined length in a direction intersecting with the dividing groove, and supports an elastic plate that is elastically deformable with a lower rigidity than the glass plate, and both ends of the elastic plate in the longitudinal direction with respect to the lower chuck. It has an elastic plate support part, and the upper press body has a press part for exerting a distributed load larger than the groove width of a parting groove with respect to a brittle material board | substrate.

In this apparatus, the brittle material substrate having the dividing groove is supported by the lower receiving portion, pressed by the upper pressing body, bent and divided. At this time, one surface of the brittle material substrate is covered by the elastic plate of the receiving portion, and the other surface of the brittle material substrate is subjected to the distribution load by the pressing body in a predetermined width including the dividing groove.

When the brittle material substrate is divided by the pliers having such a chuck, a distribution load is applied to the brittle material substrate to cause the fragmentation. For this reason, compared with the case where a conventional tool is used, a brittle material board | substrate can be divided | segmented at an allowable speed, and the quality of the divided surface of a brittle material board | substrate improves.

In the present invention as described above, the device can be realized in a small size and at a low cost as compared with the conventional brake device.

BRIEF DESCRIPTION OF THE DRAWINGS It is an external appearance perspective view of the conveyance and dividing apparatus of the glass plate which concerns on one Embodiment of this invention.
2 is a schematic diagram of the pliers head of the device.
3 is a configuration diagram of a chuck portion of the pliers head.
4 is a side view of FIG. 3.
5 is a flow chart for explaining the operation of the apparatus.

(Form to carry out invention)

[Overall configuration]

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic external perspective view of the conveying and dividing apparatus of the glass plate which has a brake apparatus which concerns on one Embodiment of this invention. This apparatus is a device capable of conveying the glass plate G, forming and dividing grooves (scribe lines), and having a base stand 1, a scribe table 2, a scribe head 3, And a brake table 4 and a pair of pliers 5. In addition, in the following description, as shown in FIG. 1, the direction (direction orthogonal to the conveyance direction of a glass plate) along one side of the base stand 1 is X-axis direction in the X-axis direction and a horizontal plane. The Y axis direction and the height (vertical) direction are defined as the Z axis direction for the direction orthogonal to the direction (the conveyance direction of the glass plate).

[Base stand]

The base stand 1 has a rectangular parallelepiped shape long in the Y-axis direction, and has a pair of guide rails 10 formed along the Y-axis direction at both ends in the X-axis direction. This pair of guide rails 10 has a length substantially equal to the length of the base stand 1 in the Y-axis direction.

[Scribe table]

The scribe table 2 is formed in a part of one side of the base stand 1. Three rows of ball transfers are arranged on the surface of the scribe table 2, and the glass plate G can be freely moved in the X and Y axis directions.

In addition, a plurality of positioning pins 13, 14, and 15 are formed in the scribe table 2. Specifically, two first positioning pins 13 are arranged at substantially the center of the longitudinal direction of the base stand 1 in the Y-axis direction. This 1st positioning pin 13 is a positioning position which is free to move in an up-down direction, and is able to contact the end surface of the conveyance direction downstream of glass plate G put on the scribe table 2, The retraction position which does not interfere with the movement of glass plate G can be taken. In addition, two second positioning pins 14 are disposed so as to face the two first positioning pins 13 in the Y-axis direction. This 2nd positioning pin 14 is freely movable in an up-down direction, the positioning position which can contact the end surface of the conveyance direction upstream of glass plate G put on the scribe table 2, and glass plate G The retraction position can be taken so that it does not interfere with the movement of. Moreover, the 2nd positioning pin 14 is comprised so that it may move along the Y-axis direction in the raised positioning position. Moreover, two (four total) 3rd positioning pins 15 are arrange | positioned at the both ends of an X-axis direction in this scribe table 2, respectively. The third positioning pin 15 is free to move along the X-axis direction, abuts against the end face of the glass plate G placed on the scribe table 2, and moves the glass plate G along the X-axis direction. It is possible to make or position.

[Scribe head]

The scribe head 3 is arrange | positioned under the glass plate G put on the scribe table 2. The scribe head 3 is free to move in the X-axis direction along the scribe guide 20 extending in the X-axis direction. In the upper part of the scribe head 3, the scribing wheel 21 for forming a dividing groove in the glass plate is formed. Moreover, the support bar 22 is arrange | positioned facing the scribe head 3 up-down direction. The support bar 22 is movable in the vertical direction by the cylinder 24 fixed to the door frame 23. More specifically, when the support bar 22 forms the scribe line in the glass plate G by the cylinder 24, the pressing position which presses the glass plate G from upper direction, and the glass plate G are conveyed, It moves between the retracted positions separated from glass plate G upwards. 1, the support part which supports the sentence frame 24 to the base stand 1 is abbreviate | omitted.

The scribe head 3 may be driven by a servo motor, a linear servo motor, or the like.

[Brake Table]

The brake table 4 is sandwiched between a part of the other side of the base stand 1, that is, the scribe head 3, the scribe guide 20, and the support bar 22 between the scribe table 2 and the Y axis. It is formed on the opposite side in the direction. The glass plate G in which the scribe line was formed by the scribe head 3 is mounted on this brake table 4, and division | segmentation of the glass plate G is performed here. In addition, although not shown in figure, the conveyance conveyor is formed on this brake table 4, and the divided glass plate G is carried out by this conveyance conveyor.

[pliers]

The pair of pliers 5 are free to move along the guide rail 10 in the Y-axis direction, respectively. The pair of pliers 5 have the same structure, respectively, and as shown to FIG. 1 and FIG. 2, the 1st movable body 30 and the 1st movable body which the movement | movement freely engaged with the guide rail 10 in the Y-axis direction are shown. It has the 2nd moving body 31 and the plier head 32 which the movement | movement freely engaged with the X-axis direction with respect to 30. With this configuration, the pliers head 32 is free to move in both directions in the X-axis direction and the Y-axis direction.

The pliers head 32 has an upper chuck 35 and a lower chuck 36 as schematically shown in FIG. 2. The upper chuck 35 is attached to the rod tip of the pressurizing cylinder 37, and can be moved up and down by the pressurizing cylinder 37. Moreover, the lower chuck 36 is attached to the rod end of the receiving side cylinder 38, and can be moved to an up-down direction by the receiving side cylinder 38. As shown in FIG.

With the above structure, both ends of the X-axis direction of the glass plate G are gripped by the upper and lower chucks 35 and 36, and a glass plate is carried out in the Y-axis direction between the scribe table 2 and the brake table 4. (G) can be conveyed. In addition, similarly, the upper and lower chucks 35 and 36 hold both ends in the X-axis direction of the glass plate G, and a parting load is applied to both ends of the scribe line of the glass plate G placed on the brake table 4. It is possible to segment glass plate G.

Chuck

Next, each chuck 35 and 36 will be described in detail with reference to FIGS. 3 and 4.

The upper chuck 35 has a pressing body 40 at its tip. The press body 40 is a part formed in order to press glass plate G from upper direction, and has the press plate 40a as a press part, and the press plate support part 40b as shown in FIG. 3 and FIG. 4 is a right side view of FIG. 3.

The press plate 40a is for exerting a distributed load to the glass plate G in which the scribe line was formed in the range larger than the groove width of a scribe line, and has a predetermined width in a X-axis direction and a Y-axis direction. The pressing plate 40a is preferably formed of a stainless steel material having a higher rigidity than glass, a SK (work steel) material, or the like, but is not particularly limited to these materials. In addition, in this embodiment, the width | variety of the press plate 40a of the Y-axis direction is formed shorter than the width | variety of the receiving part of the lower chuck 36 mentioned later.

The press plate support part 40b is for supporting the press plate 40a at the rod tip part of the pressurizing cylinder 37. As shown in FIG. This press plate support part 40b has three plate-shaped parts extended upward from the upper surface of the press plate 40a.

The connecting member 42 is fixed to the rod end of the pressure cylinder 37. The attachment member 42a inserted in the three plate-shaped parts of the press plate support part 40b is formed in the connection member 42. As shown in FIG. Then, by the connecting pin 43 passing through the through hole formed in the pressing plate support part 40b and the attachment part 42a, the connecting member 42 and the pressing plate support part 40b, that is, of the pressurizing cylinder 37 The rod and the press body 40 are connected.

In addition, the pressing body 40 is connected to the connecting member 42 and the rotational movement freely through the connecting pin 43, the entire surface of the contact surface of the pressing plate 40a on the surface of the glass plate (G) Since it can contact, glass plate G can be chucked reliably between the elastic plates 46 mentioned later.

The lower chuck 36 has a receiving portion 45 at its distal end. The receiving part 45 has the elastic plate 46 and the elastic plate support part 47.

The elastic plate 46 extends to a predetermined length in the Y-axis direction and is a member that is elastically deformable with a lower rigidity than the glass plate G. In this embodiment, the elastic plate 46 is longer than the pressing plate 40a in the Y-axis direction, and is formed to have substantially the same length as the pressing plate 40a in the X-axis direction. In addition, the elastic plate 46 is preferably formed of a resin such as polyacetal, vinyl chloride, or polyethyl ketone, but is not particularly limited to these materials.

The elastic plate support part 47 supports the longitudinal direction both ends of the elastic plate 46 with respect to the receiving side cylinder 38, and has the support shaft 48 and the pair of support members 49. As shown in FIG. The support shaft 48 has almost the same length as the elastic plate 46. Here, the connecting member 50 is fixed to the rod end of the receiving side cylinder 38, and the support shaft 48 penetrates the receiving part supporting hole 50a formed in this connecting member 50. As shown in FIG. The pair of support members 49 are substantially rectangular plate members whose upper surfaces are fixed to both ends of the elastic plate 46. In addition, the pair of support members 49 are formed with a through hole, and the support shaft 48 penetrates.

On the upper surface of the pair of support members 49, stoppers 52 are formed in which the end faces of the glass plates G abut on end portions outside the X-axis direction. By making the stopper 52 abut the end surface of the glass plate G, it is possible to perform relative positioning of the glass plate G and the plier head 32 (chuck | zipper 35, 36).

Moreover, the screw hole which penetrates into the receiving part support hole 50a in the Y-axis direction is formed in the connecting member 50. As shown in FIG. The screw member 51 is screwed into this screw hole, and the support shaft 48 is pressed at its tip.

[action]

Next, the conveyance and dividing operation | movement of a glass plate is demonstrated using the flowchart of FIG. When glass plate G is carried in to the base stand 1 by an automatic conveyance apparatus or a manual labor different from this apparatus, the glass plate set process of step S1 is performed. That is, in this step S1, the pair of pliers 5 (specifically, the first movable body 30) is moved along the guide rail 10 on one end side of the base stand 1, and the pair of pliers is moved. Both ends of the glass plate G carried into the base stand 1 are gripped by the upper and lower chucks 35 and 36 (hereinafter, simply referred to as the plier head 32) of the plier head 32 of (5). In this case, relatively low pressure air is sent to the pressurizing cylinder 37 and the receiving side cylinder 38, and the glass plate G is chucked (it is described as a low pressure chuck below) at low pressure. And the glass plate G is moved on the scribe table 2 in which the positioning pins 13-15 were arrange | positioned in the state which chucked the glass plate G by the plier head 32. As shown in FIG.

Next, in step S2, the pre-alignment process is performed using the positioning pins 13-15. Here, the following processes are performed in the state which canceled the chuck of glass plate G by the plier head 32. As shown in FIG. That is, first, the 1st positioning pin 13 and the 2nd positioning pin 14 protrude to the positioning position which the cross section of glass plate G can contact. And the 2nd positioning pin 14 pushes the cross section of glass plate G to the 1st positioning pin 13 side, and moves the left and right 3rd positioning pins 15 so that they may mutually approach a glass plate. Positioning in the X-axis direction of (G) is performed. In this manner, the glass plates G are placed on the reference position by bringing each of the positioning pins 13 to 15 into contact with the four end faces of the glass plate G.

Next, in step S3, all the positioning pins 13-15 are evacuated, the glass plate G is gripped again by the plier head 32, and it conveys to a scribe position.

Although both ends of the head of the glass plate G in the conveyance direction of the glass plate G are preferable, as for the position of the chuck in the glass plate G holding the glass plate G by the plier head 32, the glass plate to convey Appropriate setting is possible according to the size of (G) or the like.

In addition, conveyance to this scribe position is set by the movement distance of the pliers head 32 from the reference position by step S2. That is, since the first moving body 30 of the plier head 32 is moved in the Y-axis direction by a servo motor (not shown), the moving distance of the glass plate G is controlled by detecting and controlling the rotation speed of the servo motor. By controlling with high precision, glass plate G can be moved to a scribe position correctly.

If glass plate G is moved to a scribe position, a scribe operation is performed in step S4. That is, the scribe head 3 is moved to an X-axis direction, and a scribe line is formed in the lower surface of a glass plate. At this time, the support bar 22 is lowered by driving the cylinder 24, and the upper surface of the glass plate G is pressed by the support bar 22. Then, after one scribe line is formed, the support bar 22 is raised to be evacuated from the glass plate G.

Next, in step S5, it is determined whether or not a predetermined number of scribe lines are formed. In the case of a large glass plate, since several scribe lines may be formed in one glass plate, step S3 thru | or step S5 are repeated until a predetermined number of scribe lines are formed.

When a predetermined number of scribe lines are formed, the process proceeds from step S5 to step S6. In Step S6, the chuck of the glass plate G by the plier head 32 is once released, and the pliers head so that the scribe line formed at the beginning is located in the center of the Y-axis direction of the press plate 40a of the upper chuck 35. The glass plate G is gripped by (32). In addition, the holding of the glass plate G by the plier head 32 here is performed by a low pressure chuck.

Next, in step S7, the pliers head 32 is moved to the brake table 5, and the glass plate G is moved to a brake position.

After moving glass plate G to a brake position, glass plate G is segmented by the pliers head 32 in step S8. That is, relatively high air pressure is supplied to the pressurizing cylinder 37 and the receiving side cylinder 38, and the glass plate G is pressed by the pressurizing cylinder 37. FIG. The air pressure here is a pressure higher than the low pressure chucking at the time of holding and conveying the glass plate G by the plier head 32. Thereby, glass plate G is parted along a scribe line. The divided glass plate is carried out to the next process by step S10.

In step S9, it is determined whether or not the division processing has been performed for all the scribe lines. When the division process for all the scribe lines is not completed, return to step S6 and the pliers head 32 so that the last scribe line may be located in the center of the Y-axis direction of the press plate 40a of the upper end 35. The glass plate G is gripped by (). In addition, as mentioned above, the holding of the glass plate G by the plier head 32 here is switched to the holding by the low pressure chuck.

When the process of step S6-step S9 mentioned above is repeated and a division process with respect to all the scribe lines is completed, a division process is complete | finished.

Here, the operation | movement at the time of dividing in step S8 is demonstrated in detail.

In the dividing process by the pliers head 32, since the press plate 40a has a predetermined | prescribed width | variety in the Y-axis direction, a distributed load acts on the place in which the scribe line was formed. In addition, since the pressing plate 40a does not deform during the dividing process, a uniform distributed load acts over the width of the pressing plate 40a.

In addition, the lower surface of the glass plate G is covered with the elastic plate 46. When the uniform distribution load as mentioned above acts around the scribe line, the elastic plate 46 will accompany the deformation of the glass plate G. Will also deform. And cracks generate | occur | produce from both ends along a scribe line, and glass plate G will be segmented.

At the time of glass division operation | movement as mentioned above, uniform distribution load is applied to the predetermined | prescribed area | region containing a scribe line from the upper surface of glass plate G, and the lower surface of glass plate G is covered with the elastic plate 46. FIG. For this reason, the advancing speed of a crack becomes slow compared with the conventional case. In other words, the crack proceeds slowly, rather than the same division as the conventional one which is thrown off and broken at one instant. For this reason, the parting surface of glass plate G becomes favorable, and it can suppress that the glass parting surfaces of both sides interfere, and the ear | edge and a crack generate | occur | produce on a glass parting surface, and the quality of a glass parting surface is improved and a yield is improved. You can.

[Characteristic]

In this apparatus, a pair of pliers head 32 divides the glass plate by applying a divided load to both ends of the scribe line, thereby reducing the size of the conventional brake apparatus having a configuration such as a tilting table. The device can be configured inexpensively and inexpensively.

Moreover, since conveyance and parting of glass plate G are performed by a pair of pliers head 32, compared with the case where conveyance, formation of a scribe line, and parting are performed by different apparatuses respectively like a conventional apparatus, In addition, the entire system can be miniaturized, and the cost for building the system can be kept low.

Since the pliers head 32 is movable not only in the Y-axis direction but also in the X-axis direction, the pliers head 32 can be adjusted to an appropriate position according to the size of the glass plate or the like, and good division can be performed on various glass plates.

Since the chucks 35 and 36 having the pressing body and the receiving portion are formed in the pliers head 32 and the glass plates are gripped and conveyed in a relatively large area, the glass plates and the pliers head 32 are displaced at the time of conveyance. The problem can be prevented. In particular, since the pressing plate 40a is freely connected to the connecting member 42 by the rotational movement, and the receiving part 45 forms the elastic plate 46 which is elastically deformable, which is lower in rigidity than the glass plate, It becomes possible to reliably support and convey a glass plate. In addition, at the time of dividing, since a distributed load is exerted on a glass plate and it divides, a glass plate can be segmented at a leisurely speed compared with the case where a conventional tool is used, and the quality of the divided surface of a glass plate improves.

[Other Embodiments]

(a) Although the receiving part 45 which has the elastic plate 46 was formed in the lower chuck 36 of the pliers head 32 in the said embodiment, the structure of each chuck 35 and 36 of the pliers head 32 is provided. Is not limited to the above embodiment. Moreover, various deformation | transformation is possible also about the structure for driving each chuck of a pliers head, It is not limited to the structure of the said embodiment.

(b) Each of the first to third positioning pins may be one.

(c) Although the pair of pliers 5 was formed in the said embodiment, you may form two or more pairs of pliers.

(d) The structure for driving the upper and lower chucks 35 and 36 of the plier head 32 is not limited to the air cylinder as in the above embodiment. You may drive using a servo motor, a rack & pinion mechanism, etc.

(e) In the said embodiment, after forming a dividing groove in the glass plate G on the scribe table 2, this glass plate G is divided | segmented on the brake table 4 by the high pressure chuck operation of the pliers head 32. FIG. Although the glass plate G which formed the division groove in the glass plate G on the scribe table 2 was returned to the conveyance direction upstream of the glass plate G in a Y-axis, the high pressure chuck operation of the pliers head 32 was performed. It is also possible to divide on the scribe table 2 by this. In this case, the brake table 4 can be omitted from the base stand 1.

1: Base stand
4: brake table
5: flyer
32: Plier Head
35: high
36: lower back
40: pressing body
40a: pressing plate
40b: pressing plate support
45: receiver
46: elastic plate
47: elastic plate support

Claims

A brake device for a brittle material substrate for dividing a brittle material substrate having a dividing groove along the dividing groove,
With the base stand,
Of a brittle material substrate having a pair of pliers supported by the base to hold both ends of the dividing groove of the brittle material substrate having the dividing groove, and to apply a dividing load to both ends of the dividing groove to divide the brittle material substrate. Brake device.

The method of claim 1,
And the pair of pliers are movable relative to the brittle material substrate in a direction orthogonal to the direction in which the divided grooves of the brittle material substrate are formed.

The method according to claim 1 or 2,
The pair of pliers are brake devices of a brittle material substrate which is movable in a direction in which a divided groove of the brittle material substrate is formed.

The method according to claim 1 or 2,
Each of the pair of pliers,
An upper chuck having a pressing body at its tip for pressing the upper surface of the brittle material substrate,
A lower chuck opposite the press body and relatively freely accessible and detachable from the press body, the lower chuck having a receiving portion supporting a lower surface of the brittle material substrate;
The lower chuck receiving portion includes an elastic plate extending in a predetermined length in a direction crossing the dividing groove and elastically deformable with a lower rigidity than a brittle material substrate, and an elastic plate supporting both ends in the longitudinal direction of the elastic plate against the lower chuck. With support,
And said upper pressing member has a pressing portion for exerting a distributed load wider than the groove width of said dividing groove with respect to the brittle material substrate.

The method of claim 3,
Each of the pair of pliers,
An upper chuck having a pressing member at its tip for pressing the upper surface of the brittle material substrate;
A lower chuck opposite the press body and relatively freely accessible and detachable from the press body and having a receiving portion supporting a lower surface of the brittle material substrate,
The lower chuck receiving portion includes an elastic plate extending in a predetermined length in a direction crossing the dividing groove and elastically deformable with a lower rigidity than a brittle material substrate, and an elastic plate supporting both ends in the longitudinal direction of the elastic plate against the lower chuck. With support,
And said upper pressing member has a pressing portion for exerting a distributed load wider than the groove width of said dividing groove with respect to the brittle material substrate.