KR20100085880A - Butterfly valve - Google Patents

Butterfly valve Download PDF

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Publication number
KR20100085880A
KR20100085880A KR1020100005451A KR20100005451A KR20100085880A KR 20100085880 A KR20100085880 A KR 20100085880A KR 1020100005451 A KR1020100005451 A KR 1020100005451A KR 20100005451 A KR20100005451 A KR 20100005451A KR 20100085880 A KR20100085880 A KR 20100085880A
Authority
KR
South Korea
Prior art keywords
guide
blade
piston
coupled
butterfly valve
Prior art date
Application number
KR1020100005451A
Other languages
Korean (ko)
Inventor
김배진
최기선
Original Assignee
프리시스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 프리시스 주식회사 filed Critical 프리시스 주식회사
Priority to PCT/KR2010/000389 priority Critical patent/WO2010085096A1/en
Publication of KR20100085880A publication Critical patent/KR20100085880A/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
    • F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
    • F16K1/22—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
    • F16K1/221—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves specially adapted operating means therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0209—Check valves or pivoted valves
    • F16K27/0218—Butterfly valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F16K31/0655—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam
    • F16K31/528—Mechanical actuating means with crank, eccentric, or cam with pin and slot
    • F16K31/5282—Mechanical actuating means with crank, eccentric, or cam with pin and slot comprising a pivoted disc or flap

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

The present invention relates to a butterfly valve opening and closing device, the butterfly valve opening and closing device according to a preferred embodiment of the present invention, one side is sealed by the lower cover 110: the other side through portion 121 and the through portion ( The actuator cover 100 is sealed by the guide cover 120 having the guide rails 122 formed in the vertical direction in the 121 direction, and the drive chamber 130 is formed therein; and the actuator 100 moves forward and backward. And a guide unit 300 which is operated while being coupled to the piston 200 and is formed with a guide groove 310 spirally penetrating along a longitudinal direction; and one side of the guide groove. A first guide protrusion 410 coupled to 310 is provided, and the blade 500 is coupled to the other side, and is coupled to the guide rail 122 between the first guide protrusion 410 and the blade 500. The piston 200 is provided with a coupling block 420 that is operated up and down in a state Main shaft 400 which is operated in the rotation and up and down directions according to the forward and backward of the; and is coupled to the other side of the actuator 100, the center of the blade 500 in the up and down direction is operated in the vertical direction The fluid passage 610 is formed to be provided through the space, the upper opening 611 of the fluid passage 610 is a housing 600 that is selectively opened and closed by the blade 500; do.
According to the butterfly valve opening and closing device according to the present invention as described above, because the guide groove for guiding the rotation of the main shaft and the operation in the vertical direction is formed in the guide unit, the phenomena due to the rotation of the blades and the fluid passage due to the rotation, that is, No contact stresses occur and no wear of the O-rings occurs. Therefore, there is an advantage that can not only reduce the cost of maintenance, but also completely block the inside of the vacuum pump from the outside.

Description

Butterfly valve opening and closing device

The present invention relates to a butterfly valve opening and closing device, more specifically, because the guide groove is formed in the guide unit for guiding the rotation of the main shaft and the operation in the up and down direction, the phenomena caused by the rotation of the blade and the fluid passage in contact with the rotation, that is In addition, the contact stress is not generated at all, the wear of the O-ring is not generated at all to reduce the cost of maintenance, and also relates to a butterfly valve opening and closing device that can completely block the inside of the vacuum pump from the outside.

In general, semiconductor manufacturing processes require high precision, so high cleanliness and special manufacturing techniques are required. For this reason, the semiconductor device is manufactured in a state of completely blocking contact of foreign matter contained in air, that is, in a vacuum state.

Therefore, the vacuum working area of the semiconductor manufacturing apparatus and the airtight technology have a great influence on the quality of the product.

Therefore, in the semiconductor manufacturing process, a flow regulating valve, which is installed between the process chamber where the semiconductor element integration process is performed and the vacuum pump that sucks air in the process chamber, opens and closes the transfer of suction power of the vacuum pump to the chamber. Do it.

In general, the butterfly valve opening and closing device refers to a disk-shaped blade formed on the valve shaft and a valve installed to open and close the inner diameter of the housing by the operation of the blade, and recently using a pneumatic actuator that can be driven by pneumatic opening and closing of the blade have.

However, the conventional butterfly valve is provided with an O-ring for blocking a minute gap on the contact surface of the housing and the blade, the wear and hardening of the O-ring due to the collision between the O-ring and the housing occurs when the blade is closed after opening. Accordingly, after the butterfly valve is used for a certain time, the O-ring wears out and a minute gap is generated between the housing and the blade, so the inside of the vacuum pump cannot be completely vacuumed, and the O-ring needs to be replaced periodically, resulting in maintenance costs. Problems have been raised.

The present invention has been made to solve the above problems, an object of the present invention is because the guide groove for guiding the rotation of the main shaft and the operation in the vertical direction is formed in the guide unit is swept by the rotation in contact with the blade and the fluid passage Phenomenon, that is, contact stress is not generated at all, so that the wear of the O-ring is not generated at all, and the cost of maintenance can be reduced, and a butterfly valve opening and closing device that can completely block the inside of the vacuum pump from the outside can be used. To provide.

In order to solve the above problems, the butterfly valve opening and closing device according to the present invention, one side is sealed by the lower cover 110: the other side guides the penetrating portion 121 and the penetrating portion 121 in the vertical direction. A guide cover (120) having a rail (122) formed therein: an actuator (100) sealed by the drive chamber (130) therein; and a piston (200) forward and backward by the actuator (100); and The guide unit 300 is operated in a state coupled to the piston 200, the guide groove 310 is formed to penetrate through the spiral in the longitudinal direction; and the one side is coupled to the guide groove 310 One guide protrusion 410 is provided, the blade 500 is coupled to the other side, the coupling between the first guide protrusion 410 and the blade 500 is operated up and down in the state coupled with the guide rail 122 Block 420 is provided to rotate and up according to the forward and backward of the piston (200) A main shaft 400 which is operated in a downward direction; and a fluid passage that is coupled to the other side of the actuator 100 and has a center formed therein for a space in which the blade 500 is rotated and operated in a vertical direction at a central portion thereof. 610 is provided, the upper opening 611 of the fluid passage 610 is a housing 600 that is selectively opened and closed by the blade 500;

In addition, the guide unit 300 is formed in a pipe (Pipe) shape, the guide groove 310 is a rotation guide portion 311 for guiding the rotation of the main shaft 400; and, the rotation guide portion ( It is formed continuously with 311, the first vertical guide portion 312 for guiding the vertical operation of the main shaft 400; characterized in that consisting of.

In addition, the guide unit 300 is disposed to be spaced apart on the same line as the first vertical guide portion 312, the second vertical guide portion 313 formed in the same shape as the first vertical guide portion 312 And a second guide protrusion 430 formed on an outer circumferential surface of the main shaft 400 and coupled to the second upper and lower guide parts 313.

In addition, the upper opening 611 of the fluid passage 610 is formed smaller than the diameter of the blade 500, the sealing O-ring 613 is provided on the surface in contact with the blade 500; It is done.

In addition, the lower cover 110 further includes a guide shaft 111 extending to the inside of the driving chamber 130, wherein the piston 200 is coupled to the guide shaft 111. do.

In addition, the piston 200 is characterized in that the guide shaft 111 is provided with at least two so as to prevent the rotation in the interior of the drive chamber 130.

In addition, the magnet member 210 provided in the piston 200; and the sensor installed in the actuator 100 to detect the position of the piston 200 by detecting the movement of the magnet member 210 (S) It characterized in that it further comprises.

In addition, the upper opening 611 of the fluid passage 610 is connected to the process chamber (not shown), the lower opening 612 is characterized in that it is connected to the vacuum pump (not shown).

In addition, the diameter of the blade 500 is installed on one side of the housing 600 so that the impact amount due to the relative pressure difference between the upper and lower openings 611 and 612 when the upper opening 611 is opened. Valve 700; characterized in that it further comprises.

In addition, the compressed air flows into the drive chamber 130, the compressed air inlet through-holes 140, 141 formed in the actuator 100 so that the piston 200 is moved forward and backward; It is done.

According to the present invention as described above, since the guide groove for guiding the rotation of the main shaft and the operation in the vertical direction is formed in the guide unit, the phenomena due to the rotation of the blade and the fluid passage due to contact, that is, the contact stress at all It is not generated so that no wear of the O-ring occurs. Therefore, there is an advantage that can not only reduce the cost of maintenance, but also completely block the inside of the vacuum pump from the outside.

1 is a perspective view of a butterfly valve opening and closing apparatus according to a preferred embodiment of the present invention,
2 to 3 is an exploded perspective view of the butterfly valve opening and closing apparatus according to a preferred embodiment of the present invention,
Figure 4 is a perspective view of the initial state of the butterfly valve opening and closing apparatus according to an embodiment of the present invention,
5 is a cutaway perspective view of the main shaft of the butterfly valve opening and closing device according to the preferred embodiment of the present invention being lifted by the guide groove to seal the upper opening of the fluid passage;
Figure 6 is a perspective view of a guide unit of the butterfly valve opening and closing apparatus according to a preferred embodiment of the present invention,
7 is a side view of FIG. 6;
8 to 9 are cross-sectional views showing a state in which the butterfly valve opening device according to a preferred embodiment of the present invention is driven.

Hereinafter, with reference to the accompanying drawings, it will be described embodiments of the present invention. Like reference numerals in the drawings denote like elements. In describing the present invention, detailed descriptions of related well-known functions or configurations are omitted in order not to obscure the subject matter of the present invention.

1 is a perspective view of a butterfly valve opening and closing device according to a preferred embodiment of the present invention, Figures 2 to 3 are exploded perspective view of the butterfly valve opening and closing device according to a preferred embodiment of the present invention, Figure 4 is a preferred embodiment of the present invention 5 is a cutaway perspective view of an initial state of a butterfly valve opening and closing device according to an exemplary embodiment of the present invention, in which a main shaft of a butterfly valve opening and closing device is lifted by a guide groove to seal an upper opening of a fluid passage; Figure 6 is a perspective view of a guide unit of the butterfly valve opening and closing device according to a preferred embodiment of the present invention, Figure 7 is a side view of Figure 6, Figures 8 to 9 is a butterfly valve opening device according to a preferred embodiment of the present invention is driven Here is a cross-sectional view.

Butterfly valve opening and closing device according to a preferred embodiment of the present invention, the actuator 100, the piston 200, the guide unit 300, the main shaft 400 and the housing 600, the cylinder cover 110, Guide shaft 111, guide cover 120, through portion 121, guide rail 122, drive chamber 130, compressed air inlet through holes 140, 141, magnet member 210, guide groove 310 ), The rotation guide part 311, the first upper and lower guide part 312, the second upper and lower guide part 313, the first guide protrusion 410, the coupling block 420, the second guide protrusion 430, the blade 500, the housing body 601, the housing cover 602, the fluid passage 610, the upper opening 611, the lower opening 612, the sealing O-ring 613 and the tube diameter control valve 700 are further included. Can be.

The actuator 100 is a member in which a driving chamber 130 is formed to accommodate a piston 200 to be described later and a guide unit 300 coupled to the piston 200. It is formed by the cylinder cover 110 for sealing one side of the actuator 100 and the guide cover 120 for sealing the other side.

In addition, the actuator 100, as shown in Figure 3, is provided with compressed air inlet through-holes 140, 141, the compressed air is introduced into the compressed air inlet through-holes (140, 141) to the piston 200 ) Forward or backward.

On the other hand, the cylinder cover 110 is provided with a guide shaft 111, the guide shaft 111 is coupled to the piston 200 to be described later serves to guide the forward and backward of the piston 200.

The guide shaft 111 as described above is characterized in that it is provided with at least two or more to be coupled to two or more piston 200, as described above, if the guide shaft 111 and the piston 200 is coupled in two or more places, Since the rotation of the piston 200 can be prevented, the piston is allowed only linear movement inside the cylinder room.

On the other hand, the guide cover 120 is provided on the other side of the cylinder cover 110, that is, the other side of the actuator 100, the through portion 121 in the center of the guide cover 120 is the drive chamber ( 130 is provided in communication with the through part 121 is sealed by a housing 600 to be described later coupled with the guide cover 120.

In addition, the through part 121 is provided with a guide rail 122, the guide rail 122 is coupled to the coupling block 420 of the main shaft 400 to be described later in the vertical direction of the main shaft 400 It serves to guide driving.

The piston 200 is a member which is installed in the drive chamber 130 of the actuator 100 described above and moved forward and backward by the compressed air introduced into the compressed air inflow holes 140 and 141. Guide unit 300 to be described later is fixedly installed, as shown in Figures 2 to 3, the upper portion of the piston 200 is preferably formed in a cylindrical shape to facilitate the accommodation of the guide unit 300, the If the guide unit 300 can be fixed to the piston 200, it will be omitted or modified to other shapes.

In addition, the piston 200 is preferably a pneumatic operation method that is operated by the compressed air flowing into the compressed air inlet through holes 140 and 141, but may be operated by using hydraulic pressure, or may be replaced by a motor and a link. There will be.

Therefore, the present invention will not be limited to the pneumatic operation method.

The guide unit 300 is a member that is driven in accordance with the forward and backward of the piston 200 in a state coupled to the upper portion of the piston 200, the overall shape is shown in Figures 6 to 7, It has a pipe shape.

In addition, the guide grooves 300 are formed in the guide grooves 300 in a spiral (wired) form along the longitudinal direction. The guide grooves 310 have a first guide protrusion 410 of the main shaft 400 to be described later. And the second guide protrusion 430 is inserted and guided so that the main shaft 400 operates in a rotational and vertical direction.

The guide groove 310 as described above is composed of a rotation guide portion 311, the first upper and lower guide portion 312 and the second upper and lower guide portion 313, as shown in Figure 6 to 7, the rotation The guide part 311 and the first upper and lower guide part 312 are continuously formed, and the rotation guide part 311 and the first upper and lower guide part 312 are formed with different curvature radii so that the rotation guide part 311 ) Serves to guide the rotation of the main shaft 400 to be described later, the first upper and lower guide portion 312 serves to guide the up and down direction of the main shaft 400 to be described later.

In addition, the second upper and lower guide part 313 is disposed to be spaced on the same line as the first upper and lower guide part 312, the second upper and lower guide part 313 is formed of the first upper and lower guide part ( 312) and guide rails 122 guide the up and down driving of the main shaft 400.

As described above, the rotation guide part 311 that is involved in the rotation of the main shaft 400 is one, whereas three components that are involved in driving in the up and down direction (the first upper and lower guide parts 312 and the second upper and lower parts). The guide part 313 and the guide rail 122 are intended to withstand the load of the blade 500 and more completely seal the fluid passage 610.

As shown in FIGS. 2 to 5, the main shaft 400 has a first guide protrusion 410 installed at one side thereof, and selectively selects an upper opening 611 of the fluid passage of the housing 600 to be described later. The sealing member is a member 500 is installed, the main shaft 400 is operated in the rotation and vertical direction by the guide unit 300.

In addition, a coupling block 420 coupled to the guide rail 122 described above is provided between the first guide protrusion 410 and the blade 500 while covering the outer circumferential surface of the main shaft 400. A second guide protrusion 430 is provided between the 410 and the coupling block 420.

In more detail, the first guide protrusion 410 rotates and rotates the main shaft 400 by the rotation guide part 311 and the first vertical guide part 312 of the guide unit 300 described above. Direction, and the second guide protrusion 430 drives the main shaft 400 only in the vertical direction by the second vertical guide part 313.

The housing 600 is a member coupled to the other side of the actuator 100 described above, and a fluid passage 610 connected to a process chamber (not shown) and a vacuum pump (not shown), respectively, is formed at a central portion thereof. Preferably, the upper opening 611 is connected to the process chamber and the lower opening 612 is connected to the vacuum pump, but vice versa.

In addition, the fluid passage 610 as described above is preferably provided with a space that is operated when the blade 500 operates in the rotation and vertical direction.

Meanwhile, as illustrated in FIGS. 2 and 3, the housing 600 is preferably divided into a housing body 601 having a lower opening 612 and a housing cover 602 having an upper opening 611. However, when the partition is formed in this way, the assembly of the blade 500 and the main shaft 400 is not only easy to assemble, but also easy to install the sealing O-ring 613 on the surface where the blade 500 and the housing 600 are coupled. something to do.

In addition, the upper opening 611 may be formed to have a smaller diameter than the blade 500 so that the upper opening 611 may be completely blocked by the blade 500.

On the other hand, one side of the housing 600 is preferably provided with a tube diameter control valve 700, such a tube diameter control valve 700, when opening the fluid passage 610 of the blade 500, the upper opening ( 611 and the lower opening 612 serves to mitigate the impact generated by the blade 500 due to the difference in pressure. Accordingly, the lifespan of the main shaft 400, the guide unit 300, and the piston 200 connected to the blade 500 can be extended.

In more detail, the tube diameter control valve 700 is installed to communicate with each other in the through hole of the housing body 601 side and the through hole of the housing cover 602 side, as described above, the housing body 601 is Since the vacuum pump and the housing cover 602 are respectively connected to the process chamber, when the pressure difference of the vacuum pump increases from the process chamber, the vacuum pump and the housing cover 602 serve to reduce the pressure difference, that is, to serve as slow-pumping.

Such a diameter control valve 700, as disclosed in the application No. 10-2007-0008957 (name of the invention: the tube diameter control valve) filed by the applicant, because it is already known in the detailed description Will be omitted.

Hereinafter, with reference to FIGS. 8 to 9, it will be described that the Nani valve opening and closing device according to a preferred embodiment of the present invention is driven. 8 is a cross-sectional view corresponding to FIG. 4 and FIG. 9 is a cross-sectional view corresponding to FIG. 5.

8 is a state in which the fluid passage is completely open as an initial state, and FIG. 9 is a state in which the fluid passage is completely closed.

First, in the initial state as shown in FIG. 8, the compressed air is introduced into the compressed air inlet hole 140 of the lower portion where the piston 200 is advanced among the compressed air inlet holes 140 and 141. The compressed air introduced into the 140 flows into the drive chamber 130 and the piston 200 starts to move forward.

When the piston 200 starts to move forward as described above, the guide unit 300 connected to the piston 200 is also rotated at the same time, in which the main shaft 400 is the first guide fitted into the guide groove 310 The protrusion 410 and the second guide protrusion 430 are moved upward after the rotation in the shape of the guide groove 310, and at the same time, the blade 500 is also moved upward after the rotation.

Here, the guide groove 310 is preferably manufactured so that the blade 500 rotates 85 ~ 95 degrees.

As described above, when the blade 500 is moved upward after rotation, the blade 500 and the sealing O-ring 613 are in contact with each other and the upper opening of the fluid passage 610 is sealed so that the process chamber and the vacuum pump are independent of each other. Is divided into spaces.

Next, the opening of the fluid passage 610 sealed by the blade 500 as described above will be described.

Compressed air is introduced into the compressed air inlet through-hole 141 of the upper portion of the compressed air inlet through-hole (140, 141) in which the piston 200 is reversed, the compressed air introduced into the compressed air inlet through the hole (141) drive chamber Piston 200 begins to reverse as it flows into (130).

At this time, while the main shaft 400 is operated downward by the guide groove 310, the blade 500 connected to the main shaft 400 is also operated downward at the same time.

Subsequently, if the piston 200 continues to move backward, the main shaft 400 starts to rotate by the guide groove 310 and is restored to the state of FIG. 8, that is, the initial state.

In addition, the present invention is preferably provided with a sensor (S) for detecting the position of the piston 200 to operate as described above, accordingly, the piston 200 is provided with a magnet member 210, the actuator It is preferable that the sensor (S) for detecting the position of the magnet member 210 is installed at 100.

The best embodiments have been disclosed in the drawings and the specification. Herein, specific terms have been used, but they are used only for the purpose of illustrating the present invention and are not intended to limit the scope of the present invention as defined in the claims or the claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible from this. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

100-actuator 110-cylinder cover
111-guide shaft 120-guide cover
121-through 122-guide rail
130-Drive chamber 140, 141-Compressed air inlet
200-piston 210-magnet member
300-guide unit 310-guide groove
311-Rotating guide part 312-First upper and lower guide part
313-second upper and lower guide parts
400-main shaft 410-first guide protrusion
420-binding block 430-second guide protrusion
500-blade
600-housing 601-housing body
602-housing cover 610-fluid passage
611-top opening 612-bottom opening
613-sealed o-ring
700-diameter control valve
S-sensor

Claims (10)

One side is sealed by the lower cover 110: the other side is sealed by the guide part 120: the guide part 122 is formed in the vertical direction in the penetrating portion 121 and the penetrating portion 121 in the inside An actuator 100 in which the driving chamber 130 is formed; and
A piston 200 which is moved forward and backward by the actuator 100; and
A guide unit 300 which is operated while being coupled to the piston 200 and has guide grooves 310 formed therethrough helically in a longitudinal direction;
One side is provided with a first guide protrusion 410 is coupled to the guide groove 310, the other side is coupled to the blade 500, the guide rail between the first guide protrusion 410 and the blade 500 A main block 400 that is rotated and vertically operated according to the forward and backward movement of the piston 200 provided with a coupling block 420 that is operated up and down in a state coupled with the 122; and
Is coupled to the other side of the actuator 100, the center is provided with a fluid passage 610 is formed through the fluid passage 610 to provide a space for the rotation and rotation of the blade 500 in the vertical direction, the fluid passage 610 The upper opening (611) of the butterfly valve opening and closing device comprising a; 600; is selectively opened and closed by the blade (500).
The method according to claim 1,
The guide unit 300 is formed in a pipe (Pipe) shape,
The guide groove 310 is a rotation guide unit 311 for guiding the rotation of the main shaft 400; and
A butterfly valve opening and closing device, comprising: a first upper and lower guide part 312 formed continuously with the rotation guide part 311 and guiding the vertical operation of the main shaft 400.
The method according to claim 2,
A second upper and lower guide part 313 formed on the guide unit 300 to be spaced apart from the same line as the first upper and lower guide part 312 and formed in the same shape as the first upper and lower guide part 312; Wow
And a second guide protrusion (430) formed on an outer circumferential surface of the main shaft (400) and coupled to the second upper and lower guide parts (313).
The method according to claim 1,
The upper opening 611 of the fluid passage 610 is formed smaller than the diameter of the blade 500, the sealing O-ring 613 is provided on the surface in contact with the blade 500; Butterfly valve switchgear.
The method according to claim 1,
The lower cover 110 further includes a guide shaft 111 extending to the inside of the driving chamber 130.
The piston 200 is butterfly valve opening and closing device, characterized in that coupled to the guide shaft (111).
The method according to claim 5,
Butterfly valve opening and closing device, characterized in that the piston 200 is provided with at least two guide shafts (111) to prevent rotation in the drive chamber (130).
The method according to claim 1,
Magnet member 210 provided in the piston 200; And
And a sensor (S) installed on the actuator (100) to detect movement of the magnet member (210) to detect the position of the piston (200).
The method according to claim 1,
The upper opening 611 of the fluid passage 610 is connected to the process chamber (not shown), the lower opening 612 is butterfly valve opening and closing device, characterized in that connected to the vacuum pump (not shown).
The method according to claim 8,
A tube diameter control valve installed at one side of the housing 600 such that the blade 500 reduces the amount of impact due to the relative pressure difference between the upper and lower openings 611 and 612 when the upper opening 611 is opened. 700); butterfly valve opening and closing device further comprising.
The method according to claim 1,
Compressed air flows into the drive chamber 130, the compressed air inlet through-holes 140, 141 formed in the actuator 100 so that the piston 200 is moved forward and backward; Butterfly valve switchgear.
KR1020100005451A 2009-01-21 2010-01-21 Butterfly valve KR20100085880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/KR2010/000389 WO2010085096A1 (en) 2009-01-21 2010-01-21 Butterfly valve device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20090005207 2009-01-21
KR1020090005207 2009-01-21

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KR20100085880A true KR20100085880A (en) 2010-07-29

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KR1020100005451A KR20100085880A (en) 2009-01-21 2010-01-21 Butterfly valve

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KR101431661B1 (en) * 2013-05-24 2014-08-22 주식회사 에스알티 Wing Blade Gate Valve
CN104067038A (en) * 2011-10-26 2014-09-24 法雷奥电机控制系统公司 Valve, in particular for a motor vehicle engine
CN114396508A (en) * 2021-12-24 2022-04-26 兰控阀门执行器江苏有限公司 Negative pressure isolator for valve
KR20220052799A (en) * 2020-10-21 2022-04-28 프리시스 주식회사 Vacuum valve

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104067038A (en) * 2011-10-26 2014-09-24 法雷奥电机控制系统公司 Valve, in particular for a motor vehicle engine
CN104067038B (en) * 2011-10-26 2017-03-01 法雷奥电机控制系统公司 Valve especially for motor vehicle engine
KR101431661B1 (en) * 2013-05-24 2014-08-22 주식회사 에스알티 Wing Blade Gate Valve
KR20220052799A (en) * 2020-10-21 2022-04-28 프리시스 주식회사 Vacuum valve
CN114396508A (en) * 2021-12-24 2022-04-26 兰控阀门执行器江苏有限公司 Negative pressure isolator for valve
CN114396508B (en) * 2021-12-24 2024-05-14 兰控阀门执行器江苏有限公司 Valve negative pressure isolator

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