KR101997204B1 - large diameter rotary gantry valve - Google Patents

Abstract

The large-diameter rotary gantry valve according to the present invention has a housing having a cylindrical shape in which one surface is closed and a flow hole through which a fluid flows, and a first communication hole disposed in the housing and communicating with the flow hole. Since it comprises a first seal plate (seal plate) formed and the first driving portion that is disposed inside the housing to rotate the first seal plate so that the first seal plate closes the flow hole, the configuration is simple The manufacturing cost can be reduced by manufacturing a lightweight large diameter rotary gantry valve, and the vibration can be minimized to minimize the generation of particles, thereby improving the reliability of the process.

Description

Large diameter rotary gantry valve

The present invention relates to a large diameter rotating gantry valve, and more particularly, to a large diameter rotating gantry valve installed between the chamber and the pump and used to control the flow of fluid.

Processor chambers used in semiconductor manufacturing, display manufacturing, etc. form a vacuum atmosphere inside the chamber, or to discharge foreign substances in the chamber to the outside, such as a turbo molecular pump (TMP), cryo pump (Cryo Pump), etc. It is connected to a high vacuum pump and operated. At this time, a gate valve for intermittent fluid is installed between the processor chamber and the pump.

Such a gate valve has already been disclosed by the Republic of Korea Patent No. 1425811; Reverse pressure response pendulum-type large diameter rotary gantry valve having a structure that minimizes the high-speed pressure control and particle generation. The registered patent is configured to open and close the opening while the pendulum moves while the main body having a circular opening and the seal plate having a diameter larger than the opening rotates about a rotation axis.

Pendulum-type gate valve as in the registered patent has the following problems.

First, since the rotation radius of the seal plate required for opening and closing the gate valve must be secured, there is a problem in that the size of the entire gate valve is increased and the weight is heavy.

Second, since the radius of rotation of the seal plate increases during opening and closing of the gate valve, there is a problem that particles are generated by vibration.

Third, there is a problem that the manufacturing cost of the gate valve rises.

Fourth, there is a problem that the durability of the gate valve is lowered and the life is shortened.

The above-mentioned problems are further increased in gate valves installed in large diameter pipelines because large diameter pipes are used to connect the chambers and pumps when relatively large pumps such as turbo pumps and cryo pumps are used. Appears prominently.

Republic of Korea Patent No. 1425811 (August 05, 2014)

It is a first object of the present invention to provide a lightweight large diameter rotary gantry valve with a simple configuration.

It is a second object of the present invention to provide a large-diameter rotating gantry valve which minimizes the generation of particles by minimizing vibration.

It is a third object of the present invention to provide a large-diameter rotary gantry valve to reduce manufacturing costs.

It is a fourth object of the present invention to provide a large-diameter rotating gantry valve for improving durability.

The large-diameter rotary gantry valve according to the present invention has a housing having a cylindrical shape in which one surface is closed and a flow hole through which a fluid flows, and a first communication hole disposed in the housing and communicating with the flow hole. The first seal plate may be formed and a first driving part disposed inside the housing to rotate the first seal plate so that the first seal plate closes the flow hole.

The first driving unit may linearly drive the first chamber plate with respect to one surface of the housing such that the first chamber plate is detached from one surface of the housing.

The large-diameter rotating gantry valve may include a first hermetic member disposed between one surface of the housing and the first chamber plate and a second hermetic member disposed around the first communication hole and installed on the first chamber plate. It may further include.

The first driving part is connected to the first cylinder supported by the housing, the first piston linearly driven according to the internal pressure of the first cylinder and the first piston and the first chamber plate, and is linear with the first piston. It may include a first piston rod that is driven to linearly drive the first chamber plate.

The first driving part includes a first screw part disposed between the first cylinder and the first seal plate, a second screw part formed on an outer circumferential surface of the first piston rod, and between the first piston and the first piston rod. And a bearing arranged to freely rotate the first piston rod separately from the first piston, wherein the first piston rod is rotatably driven by being guided by the second screw portion to the first screw portion. The plate can be driven to rotate.

The first driving part is disposed between the first cylinder and the first chamber plate and has a screw accommodating part accommodating the first screw part therein, a guide pin for guiding linear driving of the first screw part, and one end of the first driving part. And a pressurizing pin exposed to the inside of the first cylinder and the other end extending out of the first cylinder to be pressed by the first piston to press the first screw part, wherein the first chamber plate is at a predetermined angle. The first piston presses the pressing pin, and the pressing pin presses the first screw part so that the first screw part is linearly driven together with the first piston rod to prevent rotation of the second screw part. can do.

The first driving unit may further include an elastic body connecting the first cylinder and the first screw unit to provide an elastic force for returning the first screw unit.

A second communication hole is formed in the first chamber plate to secure the flow rate of the fluid when the distribution hole is opened, and the large diameter rotary gantry valve is formed after the distribution hole is closed by the first chamber plate. It may further include a second chamber plate for closing the communication hole.

A second driving part which linearly drives the second chamber plate toward the first chamber plate, wherein the second driving part is linearly driven according to an internal pressure of the second cylinder supported by the housing; It may include a second piston and a second piston rod connected to the second piston and the second chamber plate and linearly driven together with the second piston to linearly drive the second chamber plate.

The large diameter rotating gantry valve may further include a third hermetic member disposed between the second chamber plate and the first chamber plate.

The large-diameter rotating gantry valve according to the present invention can manufacture a lightweight large-diameter rotating gantry valve with a simple configuration, thereby reducing the manufacturing cost.

In addition, the large-diameter rotating gantry valve according to the present invention has an effect of minimizing vibration to minimize generation of particles to improve process reliability.

In addition, the large-diameter rotary gantry valve according to the present invention has an effect of improving durability and providing convenience of maintenance, management, and repair.

1 is a perspective view showing the appearance of a large-diameter rotary gantry valve according to the present embodiment.
2 is an exploded perspective view showing a coupling relationship of the large-diameter rotary gantry valve according to the present embodiment.
3 is a cross-sectional view of a portion of the large-diameter rotating gantry valve according to the present embodiment.
4 is a plan view showing a closed state of the large-diameter rotary gantry valve according to the present embodiment.
5 is a plan view showing an open state of the large-diameter rotary gantry valve according to the present embodiment.

The terms or words used in this specification and claims are not to be construed as limiting in their usual or dictionary meanings, and the inventors may appropriately define the concept of terms in order to best explain their invention in the best way possible. It should be interpreted as meaning and concept corresponding to the technical idea of the present invention based on the principle that the present invention. Therefore, the embodiments described in the specification and the drawings shown in the drawings are only one embodiment of the present invention and do not represent all of the technical idea of the present invention, there may be various equivalents and modifications that can replace them. Should be understood.

In the following description, for the sake of explanation and convenience, the quantity of each component will be described in detail with reference to the accompanying drawings, and the arrangement directions of the components shown in the drawings will be described as up, down, left, and right. . Since the quantity and arrangement direction of each component according to the following description are only matters that can be changed by any amount, the quantity and arrangement direction of each component described above are not to be understood as limiting the scope of the present invention. Will be.

Hereinafter, a large diameter rotary gantry valve according to the present invention will be described with reference to the accompanying drawings.

1 is a perspective view showing the appearance of a large-diameter rotating gantry valve according to the present embodiment, Figure 2 is an exploded perspective view showing a coupling relationship of the large-diameter rotating gantry valve according to the present embodiment, Figure 3 is It is sectional drawing which cut | disconnected a part of large diameter rotary gantry valve.

1 to 3, the large-diameter rotary gantry valve 1 according to the present embodiment includes a housing 10, a first chamber plate 30, a first driving unit 50, and a second chamber plate 70. And a second driving unit 90 may include.

The housing 10 may be provided in a cylindrical shape. The lower end of the housing 10 may be closed by the lower end 11, and the upper end of the housing 10 may be opened. The lower surface 11 may be formed with a distribution hole 110 for the distribution of the fluid. The distribution hole 110 may be radially divided into four regions based on the center of the lower surface of the housing 10, and may be formed in two regions which are not adjacent to each other among the four regions.

The first chamber plate 30 may be provided in a disc shape. The first chamber plate 30 may be disposed inside the housing 10. The first chamber plate 30 may have a first communication hole 310 communicating with the distribution hole 110. That is, the first communication hole 310 is radially divided into four areas based on the center of the first chamber plate 30 so as to communicate with the distribution hole 110, and two areas which are not adjacent to each other among the four areas. Can be formed on.

When the first chamber plate 30 is aligned with the center of the housing 10, the first communication hole 310 communicates with the distribution hole 110, and the fluid is in the distribution hole 110 and the first communication hole 310. Through) may be distributed to the inside, the outside of the housing 10. As such, when the first communication hole 310 communicates with the distribution hole 110, when the first chamber plate 30 is rotated approximately 90 degrees, the distribution hole 110 is closed by the first chamber plate 30. Can be.

In order to prevent leakage of airtightness between the lower surface 11 of the housing 10 and the first chamber plate 30, the lower surface 11 of the housing 10 and the first chamber plate 30 are prevented from leaking. The first hermetic member 31 and the second hermetic member 32 may be disposed. As the first hermetic member 31, an o-ring installed on the lower edge of the first chamber plate 30 may be used, and the second hermetic member 32 may be installed on the lower surface of the first chamber plate 30. The o-ring disposed around the first communication hole 310 may be used.

On the other hand, the first driving unit 50 is to drive the first chamber plate 30 in a straight line, the first cylinder 510, the first piston 520, the first piston rod 530 and the bearing 540 It may include.

The first cylinder 510 may be supported by the housing 10. That is, a plurality of ribs 13 protrude toward the center of the side wall 12 of the housing 10, and the first cylinder 510 may be supported by the ribs 13. The first piston 520 is accommodated in the first cylinder 510. The upper end of the first piston rod 530 is connected to the first piston 520, and the lower end of the first piston rod 530 passes through the first cylinder 510 and extends toward the first seal plate 30. . The first chamber plate 30 is connected to the lower end of the first piston rod 530.

The bearing 540 is disposed between the first piston 520 and the first piston rod 530. In the bearing 540, the first piston rod 530 connected to the first piston 520 is constrained to the first piston 520 so that the bearing 540 can be linearly driven together with the first piston 520. ) Is freely rotatable separately from the first piston 520. The rotation driving of the first piston rod 530 will be described later.

When the internal pressure of the first cylinder 510 increases in the first driving unit 50, the first piston rod 530 descends together with the first piston 520. As the first piston rod 530 descends, the first seal plate 30 may be in close contact with the bottom surface 11 of the housing 10. Therefore, when the first chamber plate 30 maintains the internal pressure of the first cylinder 510 in a state in which the distribution hole 110 is closed, the closed state of the distribution hole 110 by the first chamber plate 30 is maintained. I can keep it solid.

Meanwhile, in order for the first chamber plate 30 to close the distribution hole 110 or open the distribution hole 110, the first chamber plate 30 should be driven to rotate based on the first chamber plate 30. do. In order to drive rotation of the first chamber plate 30, the first driving unit 50 includes a screw receiving portion 550, a first screw portion 560, a second screw portion 570, a guide pin 580, and a pressing pin ( 590 may be further included.

The screw receiving portion 550 is disposed between the first cylinder 510 and the first chamber plate 30. The screw accommodating part 550 may be fastened to the first cylinder 510 to fix a position thereof. The first screw portion 560 may be accommodated in the screw receiving portion 550. The first screw portion 560 may be a female screw. The second screw portion 570 may be a male screw. The second screw portion 570 may be provided by forming a screw thread on the outer circumferential surface of the lower end of the first piston rod 530. Although not shown, at least one ball is installed between the first screw portion 560 and the second screw portion 570 to improve the rolling property of the second screw portion 570 with respect to the first screw portion 560. Can be.

Here, the first screw portion 560 may be linearly driven in the vertical direction in the inside of the screw receiving portion 550, but may be installed to prevent rotational driving. That is, the first screw portion 560 may be provided as a cylinder having an outer diameter smaller than the inner diameter of the screw receiving portion 550. An upper end of the guide pin 580 may be fastened to an outer side of the first cylinder 510, and a lower end of the guide pin 580 may pass through an edge of the first screw part 560. The guide pin 580 not only guides linear driving of the first screw portion 560, but also prevents the first screw portion 560 from rotating together with the second screw portion 570.

As described above, when the pressure inside the first cylinder 510 increases, the first piston rod 530 may be lowered together with the first piston 520. At this time, the first piston rod 530 is rotatable separately from the first piston 520 by the bearing 540. Accordingly, the second screw portion 570 is guided along the female screw formed in the first screw portion 560, and the first piston rod 530 may be driven to rotate. As the first piston rod 530 is driven to rotate, the first chamber plate 30 rotates together. As the first chamber plate 30 is rotated in this manner, the distribution hole 110 may be closed or opened.

Here, in the closing of the distribution hole 110 or opening of the distribution hole 110, if the rotation angle of the first chamber plate 30 is rotated more than a predetermined rotation angle (for example, approximately 90 degrees) Full closure of the 110 or full opening of the distribution hole 110 may be difficult. The large-diameter rotation gantry valve 1 according to the present embodiment may adjust the rotation angle of the first chamber plate 30 by a preset rotation angle according to the distance that the first piston rod 530 descends.

That is, the upper end of the pressing pin 590 protrudes inside the first cylinder 510, and the lower end of the pressing pin 590 penetrates the first cylinder 510 to extend downward of the first cylinder 510. Can be. Of course, the pressing pin 590 may be installed to be linearly driven in the vertical direction. At the first position where the first seal plate 30 is spaced from the bottom surface 11 of the housing 10, the top surface of the pressing pin 590 is spaced apart from the bottom surface of the first piston 520 by a predetermined distance. do.

The first cylinder 510 and the first screw portion 560 are connected by the elastic body 561. The elastic body 561 has an elastic force to allow the first screw portion 560 to return to the position where the first piston 520 and the pressing pin 590 start to contact when the lowered first piston rod 530 is raised. Exert.

As described above, as the pressure inside the first cylinder 510 increases and the first piston 520 descends, the first piston rod 530 and the first chamber plate 30 descend, and at the same time, As the piston rod 530 is driven to rotate, the first chamber plate 30 is rotated. When the first piston 520 is lowered by a predetermined distance, the first piston 520 pressurizes the pressing pin 590. . As the pressing pin 590 is pressed, the pressing pin 590 presses the first screw portion 560 and the first screw portion 560 descends together with the first piston rod 530. That is, after the first piston 520 starts to press the pressing pin 590, the first screw part 560 descends together with the first piston rod 530 to prevent rotation of the first piston rod 530. . Therefore, the first chamber plate 30 which is driven to rotate by the preset rotation angle is no longer rotated, and is driven downward to be in close contact with the bottom surface of the housing 10.

On the other hand, the large-diameter rotary gantry valve 1 according to the present embodiment is the first communication formed in the first chamber plate 30 in order to ensure the flow rate of the fluid in addition to the flow rate of the fluid through the distribution hole 110 The second communication hole 320 may be formed in the remaining two areas other than the area where the hole 310 is formed.

When the large-diameter rotary gantry valve 1 according to the present embodiment is opened, the flow hole 110 and the first communication hole 310 communicate with each other, and the lower surface of the first chamber plate 30 and the housing 10 ( 11) can be spaced apart. Therefore, the fluid may be distributed into and out of the housing 10 through the distribution hole 110 and the first communication hole 310, and the lower surface 11 of the first chamber plate 30 and the housing 10. After flowing through the second through the communication hole 320 may be distributed to the inside, outside of the housing (10).

On the contrary, in order to close the second communication hole 320 together with the closing of the distribution hole 110, the large-diameter rotary gantry valve 1 according to the present embodiment may include the second driving part 90 and the second chamber plate 70. ) May be further included. As the second communication hole 320 is formed in the remaining two areas other than the area in which the first communication hole 310 is formed, the second driving part 90 and the second chamber plate 70 may be provided in pairs, respectively. have.

Each second driving unit 90 may include a second cylinder 910, a second piston 620, and a second piston rod 930. The second cylinder 910 may be supported by the rib 13. The second piston 620 may be accommodated in the second cylinder 910. The second piston rod 930 may have an upper end connected to the second piston 620 and a lower end connected to the second chamber plate 70.

In order to prevent leakage of airtightness between the first chamber plate 30 and the second chamber plate 70, the third hermetic member 33 is disposed between the first chamber plate 30 and the second chamber plate 70. ) May be arranged. As the third hermetic member 33, an o-ring installed on the lower edge of the second chamber plate 70 may be used.

Thus, when the internal pressure of the second cylinder 90 rises, the second piston 90 descends along with the second piston 620. As the second piston rod 930 descends, the second chamber plate 70 may be in close contact with the first chamber plate 30. Therefore, when the second chamber plate 70 maintains the internal pressure of the second cylinder 910 while the second communication hole 320 is closed, the second communication hole 320 by the second chamber plate 70 is maintained. Can keep the closed state firmly.

As described above, in the large-diameter rotary gantry valve 1 according to the present embodiment, after the distribution hole 110 and the second communication hole 320 are closed, the first cylinder 510 and the second cylinder 910 are the first chamber. The state in which the plate 30 and the second chamber plate 70 are pressed together can be maintained. Therefore, the large-diameter rotary gantry valve 1 according to the present embodiment is closed in the flow hole 110 and closed in the second communication hole 320 even when the pressure acts on the first chamber plate 30 according to the external pressure difference. The state and the close contact state of the lower surface 11 of the housing 10 and the first chamber plate 30 can be firmly maintained.

Hereinafter, the operation of the large-diameter rotary gantry valve according to the present embodiment will be described.

4 is a plan view showing a closed state of the large-diameter rotary gantry valve according to the present embodiment.

Referring to FIG. 4, in a state in which the large-diameter rotary gantry valve 1 is opened, the distribution hole 110 and the first communication hole 310 communicate with each other, and the first chamber plate 30 It may be spaced apart from the bottom surface 11 of the housing 10.

In this way, the hydraulic or pneumatic pressure is supplied into the first cylinder 510 to close the large-diameter rotating gantry valve 1 in the open state. As a result, the internal pressure of the first cylinder 510 increases. As the internal pressure of the first cylinder 510 rises, the first piston 520 descends. As the first piston 520 descends, the first piston rod 530 descends together.

At this time, the second screw portion 570 formed on the outer circumferential surface of the first piston rod 530 is guided along the female screw formed on the first screw portion 560, and the first piston rod 530 is rotationally driven. As the first piston rod 530 is driven to rotate, the first chamber plate 30 is driven to rotate. When the first piston 520 is lowered by a predetermined distance, that is, until the top surface of the pressing pin 590 is reached, the first chamber plate 30 which is rotationally driven together with the first piston rod 530 may be preset. Can rotate at a rotation angle.

When the first piston 520 descends by a predetermined distance, the first piston 520 starts to press the upper surface of the pressing pin 590. As the first piston 520 presses the pressing pin 590, the first screw portion 560 descends together with the first piston rod 530, and the second screw portion 570 no longer rotates and is driven to lower. To pressurize the first chamber plate 30.

Thereafter, the pressure inside the first cylinder 510 is maintained and the first chamber plate 30 is held in close contact with the bottom surface 11 of the housing 10 to firmly maintain the closed state of the distribution hole 110. .

Subsequently, the second driving unit 90 lowers the second chamber plate 70 to close the second communication hole 320. That is, hydraulic pressure or pneumatic pressure is supplied to the inside of the second cylinder 910. As a result, the internal pressure of the second cylinder 910 increases. As the internal pressure of the second cylinder 910 rises, the second piston 620 falls. As the second piston 620 descends, the second piston rod 930 descends together. The second piston rod 930 may press the second chamber plate 70, and the second chamber plate 70 may close the second communication hole 320.

Thereafter, the pressure inside the second cylinder 910 is maintained and the second chamber plate 70 is held in close contact with the first chamber plate 30 to firmly maintain the closed state of the second communication hole 320.

5 is a plan view showing an open state of the large-diameter rotary gantry valve according to the present embodiment.

Referring to FIG. 5, in the state where the large-diameter rotary gantry valve 1 according to the present embodiment is closed as described above, the pressure inside the second cylinder 910 is released, and the second piston 620 and the The two piston rod 930 rises. As the second piston rod 930 is raised, the second chamber plate 70 is spaced apart from the first chamber plate 30.

Subsequently, the pressure inside the first cylinder 510 is released, and the first piston 520 and the first piston rod 530 are raised by the elastic force on the elastic body 561. As the first piston rod 530 is raised, the first seal plate 30 is spaced apart from the bottom surface 11 of the housing 10.

At this time, as the first piston rod 530 rises, the first screw portion 560 together with the first piston rod 530 rises together. When the first piston 520 ascends by a predetermined rising distance, the first piston 520 is spaced apart from the pressing pin 590. As the first piston 520 is spaced apart from the pressing pin 590, the second screw portion 570 is guided along the female screw formed in the first screw portion 560 to be reversely rotated, and the first piston rod 530 is reversed together. Is rotated. As the first piston rod 530 is reversely rotated, the first chamber plate 30 is reversely rotated together, and the distribution hole 110 and the first communication hole 310 communicate with each other.

As described above, after the second chamber plate 70 is spaced apart from the first chamber plate 30, the distribution hole 110 and the first chamber plate 30 are rotated according to the rising of the first chamber plate 30 and the rotation of the first chamber plate 30. As the single communication hole 310 is communicated, the large-diameter rotation gantry valve 1 may be opened. Therefore, the large-diameter rotating gantry valve 1 according to the present embodiment may secure a flow rate of more fluid in addition to the flow rate of the fluid through the flow hole 110.

The embodiments of the present invention described above and illustrated in the drawings should not be construed as limiting the technical spirit of the present invention. The protection scope of the present invention is limited only by the matters described in the claims, and those skilled in the art can change and change the technical idea of the present invention in various forms. Therefore, such improvements and modifications will fall within the protection scope of the present invention as long as it will be apparent to those skilled in the art.

1: large diameter rotary gantry valve 10: housing
11: bottom surface 12: side wall
13: rib 30: first chamber plate
31: first hermetic member 32: second hermetic member
33: third airtight member 50: first driving part
70: second chamber plate 90: second driving unit
110: distribution hole 310: first communication hole
320: second communication hole 510: first cylinder
520: first piston 530: first piston rod
540: bearing 550: screw receiving portion
560: first screw portion 561: elastic body
570: second screw portion 580: guide pin
590: pressure pin 910: second cylinder
920: second piston 930: second piston rod

Claims (10)

A housing having a cylindrical shape in which one surface is closed and having a distribution hole through which a fluid flows;
A first seal plate disposed inside the housing and having a first communication hole communicating with the distribution hole; and
And a first driving part disposed inside the housing to rotate the first chamber plate so that the first chamber plate closes the distribution hole.
A second communication hole is formed in the first chamber plate to secure the flow rate of the fluid when the flow hole is opened.
And a second chamber plate for closing the second communication hole after the distribution hole is closed by the first chamber plate. The method of claim 1,
The first driving unit
A large diameter rotating gantry valve, characterized in that for driving the first chamber plate linearly with respect to one surface of the housing so that the first chamber plate is removable on one surface of the housing. The method of claim 2,
A first hermetic member disposed between one surface of the housing and the first chamber plate and installed at an edge of the first chamber plate; and
And a second hermetic member disposed around the first communication hole and installed on the first chamber plate. The method of claim 2,
The first driving unit
A first cylinder supported by the housing;
A first piston linearly driven according to the internal pressure of the first cylinder; and
And a first piston rod connected to the first piston and the first chamber plate and linearly driven together with the first piston to linearly drive the first chamber plate. The method of claim 4, wherein
The first driving unit
A first screw portion disposed between the first cylinder and the first chamber plate;
A second screw portion formed on an outer circumferential surface of the first piston rod;
And a bearing disposed between the first piston and the first piston rod to allow the first piston rod to freely rotate separately from the first piston.
The first piston rod is a large-diameter rotation gantry valve, characterized in that for driving the first chamber plate as the second screw portion is guided and driven to rotate the first screw portion. The method of claim 5,
The first driving unit
A screw accommodating portion disposed between the first cylinder and the first chamber plate and accommodating the first screw portion therein;
A guide pin for guiding linear driving of the first screw portion; and
A pressing pin having one end exposed to the inside of the first cylinder and the other end extending out of the first cylinder to be pressed by the first piston to press the first screw part.
After the first chamber plate is rotated at a predetermined angle, the first piston presses the pressing pin, and the pressing pin presses the first screw portion so that the first screw portion is linearly driven together with the first piston rod. And prevent the rotation of the second screw portion. The method of claim 6,
The first driving unit
And a resilient body connecting the first cylinder to the first screw part to provide an elastic force for returning the first screw part. delete The method of claim 1,
It includes a second driving unit for linearly driving the second chamber plate toward the first chamber plate,
The second driving unit
A second cylinder supported by the housing;
A second piston linearly driven according to the internal pressure of the second cylinder; and
And a second piston rod connected to the second piston and the second chamber plate to be linearly driven together with the second piston to linearly drive the second chamber plate. The method of claim 1,
And a third hermetic member disposed between the second chamber plate and the first chamber plate.

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