KR20100084308A - An angle control device using piezoelectric actuator - Google Patents

Abstract

PURPOSE: A device for adjusting an angle using a piezoelectric element is provided to finely adjust the angle of an output board using the length variation of the piezoelectric element. CONSTITUTION: A supporting stand(20) is fixed to a base. A piezoelectric element unit(30) is fixed to the base. A hinge hole(40) is fixed to the supporting stand and changes and amplifies the length direction displacement of the piezoelectric element to the angle displacement. An output board is fixed to the hinge hole. A controller controls the piezoelectric element unit. An angle adjuster is fixed using a notch type hinge.

Description

Angle control device using piezoelectric actuator

The present invention relates to an angle adjusting device using a piezoelectric element, and more particularly, to an angle adjusting device using a piezoelectric element, wherein the angle of the output plate can be finely adjusted using the length conversion of the piezoelectric element.

As is well known, the importance of ultra-precision positioning technology in each field of industrial field is increasing day by day. In particular, the development of semiconductor technology has led to high integration of circuits, and the line width used in the latest microprocessors is 0.18 μm, which is about 1 / 500th of the thickness of the hair. In this case, the precision required for the stage for manufacturing a wafer is the line width. Reproducibility of 20μm is required at 1/10 of the level.

In addition, the implementation of sub-micron-level ultra-precision conveying apparatuses includes ultra-precision measuring fields such as atomic force microscope (AFM), scanning electron microscope (SEM), and laser scanner system. It can be used in industrial fields such as information industry, and its application range is wide.

A general positioning device using a linear motor or a servomer and a ball screw has a relatively long stroke, but there is a limit in the positional accuracy that can be realized due to structural limitations such as backlash. In addition, in the general positioning device, the height of the entire system is increased by arranging the actuator itself in the vertical direction to obtain the vertical movement.

In general, the ultra-precision position control technology uses a technique for controlling the position by using the piezo effect (piezo effect). The piezoelectric effect refers to a phenomenon in which an external force is applied to a specific crystal of a piezoelectric element to give a deformation, and a voltage is generated on the surface thereof. Examples of such piezoelectric elements include quartz, tourmaline, titanium, and barium oxide. Piezoelectric phenomenon is applied to ultra-precision position control technology, electroacoustic transducer, piezoelectric purification, and ultrasonic humidifier.

In particular, multilayer piezoactuators have a deformation range of about 10 μm per centimeter, and for various applications, it is necessary to amplify small displacements of piezoelectric elements using flexible hinges.

In addition, the displacement amplification mechanism is generally divided into two methods, a lever-type flexible hinge mechanism and a bridge-type flexible hinge mechanism.

Position and angle control system using a multi-layer piezoelectric element is the application number 10-2004-0062092, 10-2001-0028892 and the like filed with the Republic of Korea Patent Office.

However, in the conventional lever method, the angle amplification ratio is limited because the hinge size and the amount of deformation are proportional to the amplification ratio, and the bridge method requires a higher flexibility of the hinge, thus making it difficult to manufacture.

In addition, there is a problem in use that the conventional angle amplification device is difficult to manufacture in a miniature.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide an angle adjusting apparatus using a piezoelectric element capable of increasing the angle amplification ratio while being manufactured in a very small size.

An angle adjusting device using a piezoelectric element according to the present invention is a base, a support fixed to the base, a piezoelectric element portion fixed to the base, fixed to the support, the longitudinal displacement of the piezoelectric element portion to the angular displacement A hinge for changing and amplifying, an output plate fixed to the hinge, and a control means for controlling the piezoelectric element, wherein the angle of the output plate can be adjusted using a length displacement of the piezoelectric element. do.

Here, the hinge is fixed to the support, the body is fixed through a notched hinge in a position eccentric with the body, the angle conversion member that the upper surface of the piezoelectric element portion is in contact with the short axis lower surface, the angle conversion member An angle amplification member fixed through a notched hinge at a position eccentric with the body, the first strain transmitting member connected to the long shaft end of the notch by a notched hinge, and an angle amplification connected to the first strain transmitting member and the short axis end via a notched hinge A piezoelectric element configured to be connected to the edge portion of the output plate through a notched hinge, and a second strain transmitting member connected to the long axis and the notched hinge of the angle amplifying member, and transmitted to the short axis of the angle conversion member. According to the change in the length of the body is characterized in that the angle of the output plate fixed through the notched hinge on the body is changed.

And the angle conversion member is fixed to the lower surface of the body and the angle amplifying member and the output plate is characterized in that fixed to the upper surface of the body.

In addition, the notched hinge connecting the angle amplifying member and the body is characterized in that the output plate is installed on the extension of the notched hinge fixed to the body, the output plate is characterized in that the laser reflector is fixed .

The angle adjusting device using the piezoelectric element according to the present invention has an advantage that the angle of the output plate can be finely adjusted by increasing the angle amplification ratio through a hinge for changing and amplifying the longitudinal displacement of the piezoelectric element into an angular displacement.

 In addition, by adopting a structure that is fixed to the angle change member on the upper surface of the body and the angle amplification member is fixed to the lower surface there is an advantage that can be manufactured in a very small.

Hereinafter, an angle adjusting device using the piezoelectric element of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing an angle adjusting device using a piezoelectric element according to an embodiment of the present invention, Figure 2 is a front view of FIG.

1 and 2, the angle adjusting device using the piezoelectric element according to the present invention includes a base 10, a support 20 fixed to the base 10, and a base 10 fixed to the base 10. It comprises a piezoelectric element portion 30, the hinge 40 fixed to the support 20, the output plate 50 fixed to the hinge 40, and a control means (not shown) The angle of the output plate may be finely adjusted by using the length displacement of the piezoelectric element part 30.

First, the control means may adjust the voltage applied to the piezoelectric element part 30 to finely adjust the angle of the output plate 50 through the displacement change of the piezoelectric element part 30, and according to a user command A controller configured to output and control an element drive signal, and an amplifier to amplify a drive signal from the controller. The sensor unit may include a sensor capable of sensing an angular displacement on the output plate for more precise control. The controller may further include a control circuit for controlling the driving signal of the controller according to a signal input from the controller.

The piezoelectric element part 30 is preferably composed of multilayer piezoactuators, and is fixed to the base 10 so that a voltage is applied and the length thereof is vertically changed.

Specifically, the laser reflector 52 is fixed to the output plate 50, so that the reflection angle of the input laser can be precisely controlled and applied to a precision control machine such as a cutting device using a laser, a laser show, or the like.

 Next will be described in detail with respect to the hinge portion of the main feature of the present invention.

3 is a front view showing a hinge sphere according to an embodiment of the present invention.

Since the hinge 40 shown in FIG. 3 serves to change and amplify the longitudinal displacement of the piezoelectric element into angular displacement, it is preferably made of aluminum, and the body 42 fixed to the support, the angle conversion member (44), the first strain transmission member 46, the angle amplification member 48, and the second strain transmission member (49).

Here, the angle conversion member 44 is fixed to the lower surface of the body 42 serves to amplify the change in the length of the piezoelectric element portion 30, the angle amplification member 48 and the output plate 50 ) Is fixed to the upper surface of the body 42, the first deformation transfer member 46 is located on the side of the body 42 to connect the angle conversion member 44 and the angle amplification member 48 The second strain transmitting member 49 is preferably configured to connect the output plate 50 and the angle amplifying member 48.

Specifically, the angle conversion member 44 is fixed to the position eccentric with the body 42 through the notched hinge a1 and the upper surface of the piezoelectric element portion 30 is in contact with the short axis lower surface.

Here, the eccentric position means that the left side has a short axis and the right side has a long axis around the notched hinge a1 fixed to the body 42 as shown in FIG. 3. Say it is.

In addition, the notched hinge (a1) is to be used in the present invention as a semi-circular recessed groove is formed symmetrically to form a notch, it can be rotated up and down around the notch portion.

Since the notched hinge is borrowed from many conventional technologies, a detailed description thereof will be omitted.

Therefore, when a voltage is applied to the piezoelectric element part 30 and the piezoelectric element part 30 is deformed in the longitudinal direction, the angle conversion member 44 rotates about the notched hinge a1.

Next, the first deformation amount transmission member 46 is connected to the long axis end of the angle conversion member 44 via a notch hinge a2, so that the deformation amount transmitted through the piezoelectric element part 30 is upward (specifically,). Angular amplification member).

In this case, the distance L1 between the portion where the piezoelectric element part 30 contacts the angle conversion member 44 and the notched hinge a1 is the first notch hinge a1 and the angle conversion member 44. Since the distance L2 between the notched hinge a2 connected to the strain transmission member 46 is smaller, the amount of deformation of the length of the piezoelectric element part 30 is amplified through the lever principle.

In addition, the angular amplification member 48 is fixed through a notched hinge a4 at a position eccentric with the body 42 and a notched hinge a3 at the first strain transmission member 46 and a short end. Connected through.

The second strain transmitting member 49 is connected through the long axis of the angle amplifying member 48 and the notched hinge a5, and the edge of the output plate 50 through the notched hinge a6. .

Therefore, when the angle amplifying member 48 is rotated about the notched hinge a4 through the first strain transmitting member 46, the output plate 50 is opened through the second strain transmitting member 49. It can be rotated.

At this time, the angle amplifying member 48 is a notched hinge (a3) connecting the notched hinge a4 fixed to the body 42, the first strain transmission member 46 and the angle amplifying member 48. The distance L3 between the levers is smaller than the distance L4 between the notched hinge a5 and the notched hinge a4 connecting the second strain transmitting member 49 and the angle amplifying member 48. The principle amplifies the length strain.

It will be described with respect to the specific operating principle of the hinge configured as described above.

4 is an operation diagram of FIG. 3.

As shown in FIG. 4, the length deformation amount A of the piezoelectric element part 30 is increased by the length deformation amount B at the notched hinge a2 portion based on the notch hinge a1. .

In addition, the length deformation amount C transmitted to the short axis of the angular amplification member 48 through the first deformation amount transmission member 46 is transmitted to the second deformation amount transmission member as a value obtained by amplifying the length deformation amount D through the lever principle. do.

Accordingly, the rotation angle θ of the output plate 50 is greatly changed even if the length deformation amount A of the piezoelectric element portion is minute.

Next, the position where the angle amplification member and the output plate are fixed to the body will be described.

5 is a conceptual view illustrating a position where the angle amplifying member and the output plate are fixed to the body.

As shown in FIG. 5B, the center point at which the angle amplifying member 48 is rotated is the center E of the notched hinge a4, and the center of rotation of the output plate 50 is the notched hinge a7. Is the center (F) of.

Therefore, when the notch-type hinge a7 to which the output plate 50 is fixed to the body 42 is higher (or lower than the notch-type hinge a4 to which the angle amplifying member 48 is fixed to the body 42). Edo), as shown in FIG.

That is, since the output plate 50 is fixed to the body 42 horizontally, the angle change becomes larger as the amount of Y-axis change is transmitted.

Accordingly, the notched hinge a4 connecting the angle amplifying member 48 and the body 42 is an extension of the notched hinge a7 in which the output plate 50 is fixed to the body 42. It is preferably installed in.

As shown in (a) of FIG. 5, the center E of the notched hinge a4 connecting the angle amplifying member 48 and the body 42 may include the output plate 50. When it is manufactured to be positioned on the same extension line as the center F of the notched hinge a7 fixed to 42, the amount of Y-axis change of the angle amplifying member 48 greatly affects the angle change of the output plate 50. It becomes possible.

Additionally, in order to fix the output plate 50 and the angle amplifying member 48 to the body 42 as described above, the long axis of the angle amplifying member 48 is bent as shown in FIG. It is preferred to be manufactured in the form.

FIG. 6 is a graph showing the length deformation amount of each site of FIG. 4. FIG.

As shown in FIG. 6, when an AC voltage having a maximum voltage of 150 V is applied to the piezoelectric element portion, the length deformation amount A of the piezoelectric element portion has a maximum amplitude of 40 μm when the maximum voltage is applied, and the notched hinge a2 portion. Since the length strain (B) has a maximum amplitude of 133μm, it can bring about 2.6 times of amplification effect.

In addition, the length deformation amount C transmitted to the short axis of the angular amplification member through the first deformation amount transmission member has a maximum amplitude of 83 μm, and the length deformation amount D has a maximum amplitude of 318 μm for the second deformation amount transmission member through the lever principle. It can have about three times the amplification effect.

Therefore, even if the length deformation of the piezoelectric element portion is small, the angle of the output plate can be greatly changed through the lever action of the hinge.

As described above, it can be seen that the present invention has a basic technical idea to provide an angle adjusting device using a piezoelectric element capable of finely adjusting the angle of the output plate, within the scope of the basic idea of the present invention. Of course, many other variations are possible to those of ordinary skill in the art.

1 is a perspective view showing an angle adjusting device using a piezoelectric element according to an embodiment of the present invention.

2 is a front view of FIG. 1;

3 is a front view showing a hinge sphere according to an embodiment of the present invention.

4 is an operation of FIG.

5 is a conceptual view illustrating a position where the angle amplifying member and the output plate are fixed to the body.

FIG. 6 is a graph showing the length deformation amount of each site of FIG. 4. FIG.

<Explanation of symbols for main parts of drawing>

a1, a2, a3, a3, a4, a5, a6, a7: notched hinge

10: base

20: support

30: piezoelectric element part

40: hinge

42: body

44: angle conversion member

46: first strain transmission member

48: angle amplification member

49: second strain transmission member

50: Output board

52: reflector

Claims (5)

A base; A support fixed to the base; A piezoelectric element unit fixed to the base; A hinge tool fixed to the support to change and amplify the longitudinal displacement of the piezoelectric element portion into an angular displacement; An output plate fixed to the hinge hole; And a control means for controlling the piezoelectric element portion, wherein the angle of the output plate can be adjusted by using a length displacement of the piezoelectric element portion. The method of claim 1, The hinge is, A body fixed to the support; An angle conversion member fixed to the position eccentrically with the body, the upper surface of the piezoelectric element being in contact with the lower surface of the short axis; A first strain transmitting member connected to a long axis end of the angle converting member through a notched hinge; An angle amplifying member fixed at a position eccentric to the body and connected to the first strain transmitting member and a short end by a notched hinge; And a second strain transmitting member connected to an edge portion of the output plate through a notched hinge and connected through a long axis of the angle amplifying member and a notched hinge. Angle of the piezoelectric element characterized in that the angle of the output plate fixed to the body through the notched hinge changes in accordance with the change in the length of the piezoelectric element portion transmitted to the short axis of the angle conversion member.  The method of claim 2, The angle conversion member, Fixed to the lower surface of the body, And the angle amplifying member and the output plate are fixed to an upper surface of the body. The method of claim 3, wherein The notched hinge connecting the angle amplifying member and the body, And the output plate is installed on an extension of a notched hinge fixed to the body. The method of claim 1, The output plate, An angle adjusting device using a piezoelectric element, characterized in that the laser reflector is fixed.

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