KR100800387B1 - Amplification mechanism composed of bridge and lever - Google Patents

Abstract

An amplification mechanism composed of a bride and a lever is provided to secure a required amplification by driving X-, Y-, and Z-axis driving. A bridge is formed on a center of an amplification mechanism. A lever(120) supports both sides of the bridge. First and second piezoelectric devices(130a,130b) are connected to a lower end of the bridge and an inner upper portion of the lever. Lengths of the first and second piezoelectric devices are changeable according to a voltage control. A control unit electrically controls the first and second piezoelectric devices. The bridge is comprised of a first pressurized unit(111) and a second pressurized unit, a third pressurized unit(113), and a supporting unit(114). The first and second pressurized units are connected to the inner upper portion of the lever. The third pressurized unit moves upwardly. The lever is comprised of a first connecting unit(121), a second connecting unit, a first fixing unit(123), and a second fixing unit. The first and second connecting units are connected to the first and second piezoelectric devices. The first and second fixing units are fixed by an amplification mechanism unit.

Description

AMPLIFICATION MECHANISM COMPOSED OF BRIDGE AND LEVER}

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic perspective view showing an amplifier mechanism in which a bridge and a lever are mixed according to the present invention.

Fig. 2 is a schematic front view showing an amplifier mechanism in which a bridge and a lever are mixed according to the present invention.

3 is a use state diagram schematically showing a state in which the table is ultra-precise movement through an amplifier mechanism in which a bridge and a lever are mixed according to the present invention.

4 is a diagram illustrating a state in which voltage is applied to a piezoelectric element of an amplifier device in which a bridge and a lever are mixed according to the present invention, and the amount of amplification is adjusted. FIG. 4A illustrates a distance ratio and a first ratio of a first connection part and a first fixing part. Fig. 4B is a configuration diagram showing a state in which the amplification amount is adjusted according to the distance ratio of the first fixing part and the first pressing part, and Fig. 4B shows the distance ratio of the supporting part and the third pressing part and the distance ratio of the second pressing part and the third pressing part. Diagram showing a state in which amplification amount is controlled.

** Explanation of symbols for main parts of the drawing **

100: amplifier port, 110: bridge,

111: first pressing portion, 112: second pressing portion,

113: third pressing portion, 114: supporting portion,

120: lever, 121: first connection portion,

122: second connecting portion, 123: first fixing portion,

124: second fixing portion, 130a: first piezoelectric element,

130b: second piezoelectric element,

L1: distance ratio of the first connecting portion to the first fixing portion,

L2: distance ratio of the first fixing part and the first pressing part,

L3: distance ratio of the supporting part and the third pressing part,

L4: distance ratio of the first pressing portion and the second pressing portion.

The present invention relates to an amplifier device, and more particularly, by adopting a structure using a mixture of a bridge and a lever to enable the use of X, Y-axis drive and Z-axis drive to obtain a desired amount of amplification and The present invention relates to an amplifier mechanism in which a bridge and a lever are mixed so that a precise driving can be performed while maintaining the rigidity of the piezoelectric element by forming a compression force on the piezoelectric element when a load is applied from the side.

In general, the stage device is used for a scanning device for precise inspection of a semiconductor wafer and a liquid crystal display device (LCD), a semiconductor processing machine and an ultra precision processing machine. For example, the micro stage apparatus used as part of the micro electron beam apparatus is pursuing miniaturization, which optically emits an emission tip which is an essential electron emission source in all electron beam apparatus. Submicron-level ultra-precision feeders such as Scanning Tunneling MicroScope (STM) and Atomic Force Microscope (AFM), which are arranged in a structure and operate in Field Emission Mode, will be implemented. In the case of such a modern microprocessor, the line width used is about 0.18 μm, and in this case, the precision required for the motion stage for manufacturing the wafer is about 1/10 of the line width and a reproducibility of 20 nm is required.

In the field of ultra-precision position control technology, a technique of controlling a position using a piezoelectric effect is used. The piezoelectric effect refers to a phenomenon in which a voltage is generated on the surface of a piezoelectric element by applying a force to a specific crystal of the piezoelectric element, and a displacement or force is generated when a voltage is applied to the crystal. Examples of the piezoelectric elements include quartz, tourmaline, titanium, and barium acid. Piezoelectric elements are applied to ultra-precision position control technology, electroacoustic transducers, piezoelectric purification, ultrasonic humidifiers, fish detectors, and ultrasonic diagnostic devices.

A stage apparatus employing a conventional piezoelectric element is composed of a base frame, an x-axis, a y-axis, and a z-axis slider stage in a three-axis positioner. In the stage device having such a configuration, the application structure of the three-way induction motion capable of z-axis driving is not often proposed, and in most cases, the amplification effect is insufficient and the load of the driven part is small. In other words, It is mechanically complex and requires various physical additional functions, and there are disadvantages in that symmetrical problems appear in the physical operation function for each additional function.

In addition, when using the bridge structure constituting the stage device, the most important thing is to design the optimum amplification amount by considering the thickness and width of the guide part in consideration of the yield stress and the elastic modulus of the material, etc. In the case of a piezoelectric element (Actuator) used in the bridge structure, the driving range has a limitation on the length of the element itself, and the driving range is inversely proportional to the length and the rigidity of the piezoelectric element. In order to produce the piezoelectric element, the length of the piezoelectric element is increased, and thus the rigidity of the driving unit is weakened.

The present invention has been made to solve the above problems, by adopting a structure using a mixture of bridge and lever to enable the use of X, Y-axis drive and Z-axis drive to achieve the desired amount of amplification There is this.

Another object of the present invention is to provide a precise driving force while maintaining the rigidity of the piezoelectric element by forming a compressive force on the piezoelectric element when a load is applied from the upper side.

According to the amplifier structure of the bridge and the lever of the present invention devised to solve the above technical problem, the bridge is provided to enable amplification in the center; A lever supporting the bridge at both sides; First and second piezoelectric elements connected to a lower end of the bridge and an inner upper part of the lever, the first and second piezoelectric elements being capable of varying in length depending on whether the voltage is controlled; And control means for controlling the first and second piezoelectric elements. Characterized in that it comprises a.

The bridge has a rhombic shape, and includes a first pressing part and a second pressing part connected to the inner upper part of the lever, and a third pressing part moving upward, and a supporting part constituting the lower end part.

In addition, the lever is composed of a first fixing part connected to the first and second piezoelectric elements, a second fixing part, and a first fixing part and a second fixing part fixed to the amplifier unit.

In addition, the lever is applied to the first and second piezoelectric elements so that the first connection part and the second connection part move outwards, and the first fixing part and the second fixing part are fixed to the amplifier mechanism unit. The government will rotate around the government. In addition, when the first fixing part and the second fixing part are fixed so that the lever rotates, the amplification amount may be adjusted according to the distance ratio of the first connecting part and the first fixing part and the distance ratio of the first fixing part and the first pressing part. It is characterized by being.

When the voltage is applied to the first and second piezoelectric elements so that the first pressing portion and the second pressing portion move inward, the third pressing portion moves upward. At this time, the amplification amount is the distance between the supporting portion and the third pressing portion. It is determined according to the ratio and the distance ratio of the first pressing portion and the second pressing portion.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

1 is a schematic perspective view of an amplifier sphere in which a bridge and a lever are mixed according to the present invention, and FIG. 2 is a schematic front view illustrating an amplifier sphere in which a bridge and a lever are mixed according to the present invention.

As shown, according to the amplifier device 100, the bridge and the lever of the present invention is mixed, the bridge 110 is provided to enable amplification in the center; A lever 120 supporting the bridge 110 at both sides; First and second piezoelectric elements 130 connected to the lower end of the bridge 110 and the inner upper part of the lever 120 and capable of varying in length depending on whether the voltage is controlled; And control means for controlling the first and second piezoelectric elements 130. Characterized in that it comprises a.

The bridge 110, the lever 120, and the like may all be manufactured using a metal material or another elastic material having elasticity and restoring force against micro displacement.

The bridge 110 has a rhombus shape and includes a first pressing part 111 and a second pressing part 112 connected to an inner upper portion of the lever 120. In addition, the third pressing portion 113 and the bottom plate is provided on the upper end of the central portion having a rhombic shape and moving upward when voltage is applied to the first and second piezoelectric elements 130 (130a and 130b). It consists of a supporting part 114 which is supported at).

In addition, the first connection portion 121 and the second connection portion 122 constituting the lower end of the lever 120 are connected to the first and second piezoelectric elements 130 (130a and 130b) to form the first and second piezoelectric elements 130. When voltage is applied to 130a and 130b, it moves outward. In addition, the first fixing part 123 and the second fixing part 124 are fixed to an amplifier mechanism unit (not shown).

In addition, the first and second piezoelectric elements 130 are connected to the supporting part 114 of the bridge 110 and the inner upper part of the lever 120, and the length may be changed depending on whether the voltage is controlled. That is, when electrical energy is applied, the first connection portion 121 and the second connection portion 122 are pushed outwards to displace the distance by the displacement generated as a device that generates displacement. Meanwhile, according to the control of the voltage, the first pressing unit 111 and the second pressing unit 112 move inwards, and the third pressing unit 113 moves upwards to adjust the amount of amplification according to each distance ratio. It will be possible.

As described above, the first and second piezoelectric elements 130 include 130a and 130b to control the displacement of the piezoelectric element by adjusting the voltage applied to each piezoelectric element. The control means includes a controller for outputting and controlling each piezoelectric element driving signal according to a user command, and each amplifier for amplifying the driving signal from the controller and inputting the first and second piezoelectric elements 130 to 130a and 130b. And, it is preferable to include a sensor for detecting the movement position of the plate receiving the three-way guided movement to be described later to be able to correct the movement position of the plate according to the feedback signal input from each.

3 is a state diagram schematically showing a state in which the table is moved with high precision through an amplifier mechanism in which a bridge and a lever are mixed according to the present invention.

As shown, the amplifier device 100 is a mixture of the bridge and lever according to the present invention receives the movement from the combination of the bridge 110 and the lever 120 Z-axis (vertical) translational motion, X-axis rotational motion And Y-axis rotational motion, that is, ultra-precise three-way induction motion (3DOF: Z-Translation, Pitch, Motion), and the control means includes an object requiring ultra-precision motion such as a plate having a predetermined thickness. It can be attached.

4 is a diagram illustrating a state in which voltage is applied to a piezoelectric element of an amplifier device in which a bridge and a lever are mixed according to the present invention, and the amount of amplification is adjusted. FIG. 4A illustrates a distance ratio and a first ratio of a first connection part and a first fixing part. Fig. 4B is a configuration diagram showing a state in which the amplification amount is adjusted according to the distance ratio of the first fixing part and the first pressing part, and Fig. 4B is a distance ratio of the supporting part and the third pressing part and the distance ratio of the second pressing part and the third pressing part. The amplification amount is controlled according to the configuration diagram.

Piezoelectric elements usually apply an initial voltage before operation. After that, when the voltage higher than the initial voltage is applied during operation, the piezoelectric element increases in the longitudinal direction, and when the voltage lower than the initial voltage is applied, the piezoelectric element decreases in the longitudinal direction. As a result, it is possible to control such as lengthening or shortening the length of the piezoelectric element.

That is, when voltage is applied to the first and second piezoelectric elements 130 constituting the lever 120, the first connection portion 121 and the second connection portion 122 move outward. That is, when a voltage higher than the initial voltage is applied to the first and second piezoelectric elements 130: 130a and 130b, the first and second piezoelectric elements 130: 130a and 130b extend in the longitudinal direction, and thus, the first connection portion The 121 and the second connection portion 122 move outward to generate a horizontal displacement.

And, when the first fixing part 123 and the second fixing part 124 are fixed to the amplifier mechanism unit, the lever 120 is centered around the first fixing part 123 and the second fixing part 124. To rotate.

In this process, when the first and second fixing parts 123 and 124 are fixed so that the lever rotates about the X axis, the Z axis direction is uniquely determined in the plate plane, but the X axis and Y axis directions are Not like that. Therefore, it is necessary to first specify the X axis, and accordingly, the Y axis direction is determined.

If the direction in which the first piezoelectric element 130a is positioned around the Z axis in the direction of the third pressing unit 113 is set as the X axis, the rotational motion of the X axis is controlled by adjusting the displacement in the Z direction. It can be raised. At this time, when the third pressing unit 113 and the first piezoelectric element 130a are rotated without generating a displacement, the first pressing unit 111 and the second pressing unit 112 move inward and are displaced. (See arrows ① and ② in Fig. 4A). In this way, Y-axis rotational motion is also possible.

In this case, the horizontal displacement required according to the distance ratio L1 of the first connection part 121 and the first fixing part 123 and the distance ratio L2 of the first fixing part 123 and the first pressing part 111. By generating the amplification amount can be adjusted.

On the other hand, when the voltage is applied to the first and second piezoelectric elements 130: 130a and 130b to move the first pressing unit 111 and the second pressing unit 112 inward, the third pressing unit 113 is upper side. To move the translational motion (see arrow ③ in FIGS. 4A and 4B). At this time, when a load is applied from the upper side, the piezoelectric element is compressed to maintain the rigidity of the piezoelectric element, thereby enabling precise driving.

As such, when the third pressing unit 113 implements the translational movement in the Z-axis direction, the amplification amount at this time is the distance ratio L3 between the supporting unit 114 and the third pressing unit 113. ) And the distance ratio L4 between the first pressing part 111 and the second pressing part 112.

That is, when the first pressing unit 111 and the second pressing unit 112 are moved inward, the third pressing unit 113 is raised upward, but the first pressing unit 111 and the second pressing unit When 112 is moved inward by the distance ratio L3 between the supporting portion 114 and the third pressing portion 113, when the supporting portion 114 is fixed, the third pressing portion 113 is moved upward. The first pressing part 111 and the second pressing part 112 are moved by the distance ratio L4.

As a result, a phenomenon occurs in which the first pressing unit 111 and the second pressing unit 112 are amplified than the driving distance.

The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and it is common in the art that various substitutions, modifications, and changes can be made without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.

For example, the amplifier device in which the bridge and the lever according to the present invention are mixed is not only three-way induction motion supporting Z-axis translational movement, X-axis and Y-axis rotational motion, but also existing plate positions that support three-way induction motion. If attached, it could support six-way induction.

According to the amplifier structure of mixing the bridge and the lever according to the present invention as described above, by adopting a structure using a mixture of the bridge and the lever can be used for X, Y-axis drive as well as Z-axis drive to obtain the desired amount of amplification It has an effect.

Another effect of the present invention is to provide precise driving while maintaining the rigidity of the piezoelectric element by applying a compressive force to the piezoelectric element when a load is applied from the upper side.

Claims (7)

A bridge capable of amplification at a central portion thereof; Levers for supporting the bridge at both sides; First and second piezoelectric elements connected to a lower end of the bridge and an inner upper part of the lever, the first and second piezoelectric elements being capable of varying in length depending on whether the voltage is controlled; And Control means provided to electrically control the first and second piezoelectric elements; An amplifier port, comprising a bridge and a lever, characterized in that it comprises a. The method of claim 1, The bridge includes a first pressing portion and a second pressing portion formed in a rhombic shape and connected to an inner upper portion of the lever, a third pressing portion provided at an upper end of the central portion and moving upward, and a supporting portion constituting the lower portion thereof. The amplifier port which mixed the bridge and the lever characterized by the above-mentioned. The method of claim 2, The lever is amplified by mixing the bridge and the lever, characterized in that the first connecting portion and the second connecting portion connected to the first and second piezoelectric elements, the first fixing portion and the second fixing portion fixed to the amplifier mechanism unit Instrument. The method of claim 3, wherein The lever is applied to the first and second piezoelectric elements so that the first connection part and the second connection part move outwards, and the first fixing part and the second fixing part are fixed to the amplifier mechanism unit, when the first , Amplifier bridge mixed with the bridge, characterized in that the rotational movement around the 2 fixed portion. The method of claim 3, wherein When the first fixing part and the second fixing part are fixed so that the lever rotates, the amplification amount can be adjusted according to the distance ratio of the first connecting part and the first fixing part and the distance ratio of the first fixing part and the first pressing part. The amplifier port which mixed the bridge and the lever characterized in that there is. The method of claim 2, When the voltage is applied to the first and second piezoelectric elements so that the first pressing portion and the second pressing portion move inward, the third pressing portion implements the translational movement in the Z-axis direction. Amplifier. The method of claim 2, When a voltage is applied to the first and second piezoelectric elements so that the first pressing part and the second pressing part move inward and the third pressing part moves upward, the amplification amount is a distance ratio between the supporting part and the third pressing part and the first pressing part. An amplifier device in which a bridge and a lever are mixed according to a distance ratio of a part and a second pressing part.

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