KR101617284B1 - a level control device using Piezoelectric actuator - Google Patents

Abstract

The present invention relates to a horizontal plate adjusting apparatus using a piezoelectric element, and in the horizontal plate adjusting apparatus using the piezoelectric element according to the present invention, the horizontal plate adjusting apparatus using the piezoelectric element according to the present invention comprises a base, A fixed portion extending from the base and a notch type hinge at an eccentric position with respect to the fixed portion so that the upper surface of the piezoelectric element portion is in contact with the lower surface of the minor axis, Shaped hinge connected to the long axis end of the direction changing member and the minor axis thereof being connected to four hinge regions for changing and amplifying the longitudinal displacement of the piezoelectric element portion into an angular displacement through a deformation amount transmitting member fixed to the fixing portion, A connecting member whose one end is fixed to each of the long axis edges of the four strain transmitting members, And a cover coupled to the horizontal plate, wherein a maximum deformation amount of the horizontal plate can be adjusted through a gap between the lower surface of the cover and the deformation amount transmitting member .

Description

[0001] The present invention relates to a level control device using a piezoelectric device,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a horizontal plate adjusting apparatus using a piezoelectric element, and more particularly, to a horizontal plate adjusting apparatus capable of adjusting horizontal of a horizontal plate using a piezoelectric element.

The importance of ultra-precise positioning technology is increasing day by day in various fields of industry such as semiconductor technology. In particular, as the development of semiconductor technology has led to the high integration of circuits, the line width used in the latest microprocessor is about 0.18 μm, which is 1/500 of the thickness of the hair. In this case, And the reproducibility of 20 μm is required.

Generally, in the field of ultra precise position control technology, a technique of controlling a position using a piezo effect is used. Such a piezoelectric effect refers to a phenomenon in which a voltage is applied to a surface of a piezoelectric element by applying an external force to a specific crystal, and a displacement or a force is generated when a voltage is applied to the crystal. Piezoelectric phenomenon is applied to ultra precise position control technology, electroacoustic transducer, piezoelectric purification, ultrasonic humidifier and so on.

In particular, multilayer piezoactuators have a strain range of about 10 [mu] m per centimeter, and it is necessary to amplify a small displacement of the piezoelectric element by using a flexible hinge for various applications.

Generally, the displacement amplification mechanism is divided into two methods: a lever-type flexible hinge mechanism and a bridge-type flexible hinge mechanism.

Such a position and angle control system using a multi-layer piezoelectric element includes Application Nos. 10-2009-003728, 10-2004-0062092, and 10-2001-0028892 filed in the Korean Intellectual Property Office.

However, the conventional angle and position control apparatus using a piezoelectric element has difficulty in adjusting the horizontal plate on a three-dimensional plane, and there is a problem in use that it is difficult to manufacture a control apparatus using a motor system in an extremely small size.

It is an object of the present invention to provide a horizontal plate adjusting apparatus using a piezoelectric element, which can be manufactured in a very small size but can be precisely controlled through a piezoelectric element.

A horizontal plate adjusting apparatus using a piezoelectric element according to the present invention comprises a base, four piezoelectric elements vertically installed on the base, a fixed portion extending from the base, and a notched hinge A direction changing member which is fixed through a notch type hinge to the long axis end portion of the direction changing member and whose short axis is fixed to the fixing portion, A connecting member having one end fixed to the longitudinal axis of each of the four deformation transmitting members, and a connecting member having one end connected to the other end of the connecting member, A bottom plate fixed to the center, and a cover having a recessed groove formed on the bottom surface and coupled with the horizontal plate, And the maximum deformation amount of the horizontal plate can be adjusted through the interval between the base deformation amount transmitting members.

The horizontal plate adjusting apparatus using the piezoelectric element according to the present invention can control precisely the control of the posture of the horizontal plate through the hinge region by deforming the four piezoelectric elements, and is advantageous in that it can be manufactured in a very small size.

1 is a side view of a horizontal plate adjusting apparatus using a piezoelectric element according to a preferred embodiment of the present invention.
2 is a plan view of Fig.
3 is a side view of Fig.
4 is an enlarged view of a portion A in Fig.
5 is a side view of a horizontal plate adjusting device using a piezoelectric element according to another preferred embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a side view of a horizontal plate adjusting apparatus using a piezoelectric element according to a preferred embodiment of the present invention.

A horizontal plate adjusting apparatus using a piezoelectric element according to the present invention comprises a base 10, a piezoelectric element 20, a hinge 30 and a horizontal plate 40.

First, the base 10 is a constituent element of a basic frame, and four mounting spaces for mounting the piezoelectric element portions 20 are formed on both sides of the base.

The piezoelectric element unit 20 is preferably composed of multilayer piezoelectric actuators and is installed on the base 10 so that the voltage is applied and the length thereof can be changed vertically.

Here, the horizontal portion of the horizontal plate 40 can be finely adjusted through a change in displacement of the piezoelectric element portion 20 by controlling the voltage applied to the piezoelectric element portion 20 through the control means, A controller for outputting and controlling a piezoelectric element driving signal, and an amplifier for amplifying a driving signal from the controller, wherein a sensor capable of sensing a horizontal state is installed on the horizontal plate for more precise control, And a control circuit capable of controlling a driving signal of the controller according to a signal input from a sensor.

Four hinge regions 30 are provided in the upper portion of the base to change and amplify the longitudinal displacement of the piezoelectric element 20 by angular displacement.

A horizontal plate 40 is provided on each of the four hinge regions through respective connecting members 42. That is, in order to finally adjust the horizontal state of the horizontal plate 40, the four hinge regions are operated through the piezoelectric element portion.

Fig. 2 is a plan view of Fig. 1, and Fig. 3 is a side view of Fig.

3, one end of the connecting member 42 is fixed to the edge of the hinge region 30, and the other end is fixed to the lower center of the horizontal plate 40, It is preferable that the four hinge regions 30 and the horizontal plate 40 are installed at a tilt angle of 45 degrees so that the horizontal state of the flat plate can be easily manipulated.

Next, in more detail on the Hin district,

4 is an enlarged view of a portion A in Fig.

4, the hinge part includes a fixed part 32 extending from the base, and a notch type hinge H1 fixed at an eccentric position with respect to the fixed part 32, so that the upper surface of the piezoelectric element part 20 And a connecting member 42 connected to the end of the long axis 34a of the direction changing member 34 via a notch type hinge H2 and connected to the long axis end 34a of the direction changing member 34. [ And the short shaft includes a deformation amount transmitting member 36 fixed to the fixing portion 32. [

4, when a current is applied to the right piezoelectric element part 20, the piezoelectric element part 20 is vertically expanded and the lower surface of the short axis 34b of the direction conversion element 34 is pushed up .

Here, the short axis 34b of the direction changing member 34 is folded in the form of a curved line to extend downward, and the long axis 34a is moved downward through the hinge point H1.

Next, since the long axis of the direction changing member 34 is connected via the hinge point H2 of the deformation amount transmitting member 36, the fine vertical So that the horizontal state of the horizontal plate 40 can be controlled.

5 is a side view of a horizontal plate adjusting apparatus using a piezoelectric element according to another preferred embodiment of the present invention.

5, a cover 50 formed on a lower surface of a recessed groove 52 to which the horizontal plate is coupled is coupled to the horizontal plate 40, and a lower surface of the cover coupled to the horizontal plate 40 And the distance (h) between the deformation amount transmitting member and the deformation amount transmitting member.

In the process of controlling the horizontal state using the piezoelectric element, there is a risk of breakage when the horizontal plate is excessively inclined in the abnormal operation state due to over current.

In order to eliminate such a danger, the cover is coupled to the horizontal plate to limit the moving distance so that the distance h between the lower surface of the cover and the deformation-transmitting member is not shifted.

As described above, the present invention provides a horizontal plate adjusting apparatus using a piezoelectric element as a main technical idea, and since the above-described embodiments are only one embodiment with reference to the drawings, It should be determined by the range.

10: Base
20: Piezoelectric element part
30: Hin district
32: Fixture
34: direction changing member
36:
40: horizontal plate
42:
50: cover

Claims (4)

A base;
Four piezoelectric elements mounted perpendicular to the base;
A direction changing member which is fixed through a notch type hinge at an eccentric position with respect to the fixing portion and in which the upper surface of the piezoelectric element portion is in contact with the lower surface of the minor axis, Shaped hinge connected to the end of the piezoelectric element part through a notch-shaped hinge, and the short axis of which is changed by the angular displacement of the piezoelectric element part through the deformation-transmitting member fixed to the fixed part;
A connecting member having one end fixed to each of the long axis edges of the four strain transmitting members;
A horizontal plate on which the other end of the connecting member is fixed to the lower center;
And a cover having a recessed groove formed on a lower surface thereof and coupled with the horizontal plate,
Wherein a maximum deformation amount of the horizontal plate is adjustable through a gap between the lower surface of the cover and the deformation amount transmitting member.
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