KR20100073928A - Fabricating apparatus of display device - Google Patents

Fabricating apparatus of display device Download PDF

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Publication number
KR20100073928A
KR20100073928A KR1020080132720A KR20080132720A KR20100073928A KR 20100073928 A KR20100073928 A KR 20100073928A KR 1020080132720 A KR1020080132720 A KR 1020080132720A KR 20080132720 A KR20080132720 A KR 20080132720A KR 20100073928 A KR20100073928 A KR 20100073928A
Authority
KR
South Korea
Prior art keywords
metal substrate
etching
etchant
edge
cleaning
Prior art date
Application number
KR1020080132720A
Other languages
Korean (ko)
Inventor
김성환
임유석
Original Assignee
엘지디스플레이 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지디스플레이 주식회사 filed Critical 엘지디스플레이 주식회사
Priority to KR1020080132720A priority Critical patent/KR20100073928A/en
Publication of KR20100073928A publication Critical patent/KR20100073928A/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles

Abstract

PURPOSE: An apparatus for manufacturing a display device is provided to prevent moving and manufacturing equipment from being damaged by roundly etching the sharp edge of a metal substrate. CONSTITUTION: A support plate supports a metal substrate(110). First and second etchant spray units(160b) surround the edge of the metal substrate. An etchant spray unit includes an etching unit and a cleaning unit. The etching unit sprays the etchant on the edge of the metal substrate. The cleaning unit cleans the etchant and the etched metal material. The first and second etchant spray units include: a first etching head(171a), a second etching head, a first spray nozzle, and a second spray nozzle.

Description

Manufacturing apparatus for display device {FABRICATING APPARATUS OF DISPLAY DEVICE}

The present invention relates to an apparatus for manufacturing a display device capable of etching an edge of a metal substrate.

The display device market has been rapidly changing, focusing on lightweight flat panel displays (FPDs) instead of the Cathode Ray Tubes (CRTs).

Flat panel displays include liquid crystal displays (LCDs), field emission displays (FEDs), plasma displays (PDPs) and organic electroluminescent displays (OLEDs). luminescence Display device).

Since flat panel display manufacturing processes are mostly high temperature processes, glass having excellent heat resistance is used as a substrate. However, the glass substrate has a limitation in thinning its thickness, and even though it is thin, there is no breakage due to lack of durability and flexibility.

Therefore, in recent years, a flexible table that can maintain display performance even when bent like paper, using a thin, durable and flexible material such as metal foil as a substrate instead of a glass substrate that is not durable and flexible. Market values are emerging.

The flexible display device is made of metal foil, which is thinner and lighter than glass, and thus is significantly thinner, lighter and more flexible than conventional displays. In addition, since the flexible display device uses a metal foil or the like, which is cheaper than glass, as a substrate, the flexible display device can be easily used for various purposes compared to a conventional flat panel display. Accordingly, the flexible display device has a bright prospect as the next generation display. In response to this, development of a flexible display device has been actively performed in recent years.

A method of manufacturing a flexible display device includes a process of manufacturing a thin film transistor substrate for forming a thin film transistor as each switching element on a metal substrate, and a common electrode and a color of red, green, and blue facing the metal substrate on which the thin film transistor is formed. The display panel is manufactured by a process of manufacturing a color filter substrate in which a filter is formed corresponding to each pixel, and injecting a liquid crystal between the thin film transistor substrate and the color filter substrate fabricated through the above two processes, and then bonding them together. Complete

In the flexible display device, the edge of the metal substrate is polished prior to fabricating the thin film transistor substrate.

Here, the grinding of the edge of the metal substrate is to prevent damage to the mobile equipment and the manufacturing equipment from the sharp edge region of the metal substrate in the manufacturing process of the display device.

However, in general, the polishing process uses abrasive stone, which has a problem in that the abrasive stone cannot polish the edge of the metal substrate having a high strength.

As a result, the metal substrate that has not been polished has a problem of damaging the moving equipment and the manufacturing equipment by damaging the mobile equipment and the manufacturing equipment as the display device manufacturing process proceeds.

An object of the present invention is to provide an apparatus for manufacturing a display device capable of etching the edge of a metal substrate.

An apparatus for manufacturing a display device according to an embodiment of the present invention,

A support plate for supporting the metal substrate; And first and second etching liquid injection parts surrounding the edges of the metal substrate, wherein the first and second etching liquid injection parts include an etching part for spraying an etching solution on the edge of the metal substrate, and the etching solution and the etching solution. It characterized in that it comprises a cleaning unit for cleaning the metal material.

According to the present invention, the edge etching apparatus of the metal substrate is provided with an etching liquid ejecting part capable of etching the edge of the metal substrate, so that the sharp edge of the metal substrate is etched in a rounded shape prior to the manufacture of the liquid crystal display, thereby the manufacturing process of the display apparatus proceeds. The effect is to prevent damage to mobile equipment and manufacturing equipment.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a cross-sectional view schematically illustrating a unit pixel of a flexible liquid crystal display.

As shown in FIG. 1, in the flexible liquid crystal display, the upper substrate 120 having the color filter and the lower substrate 130 having the array wiring are opposed to each other, and the upper and lower substrates 120 and 130 are disposed between each other. The liquid crystal layer 150 is interposed.

Here, the flexible liquid crystal display device is a reflective display device that does not include a backlight unit and displays the display using external light.

Although not illustrated in detail, a gate electrode 132 extending from a gate wiring (not shown) is formed on the metal substrate 110 on the lower substrate 130, and a gate is formed on the upper front surface of the gate electrode 132. The insulating film 115 is formed.

A source electrode 136 overlapping a portion of the gate electrode 132 and a drain electrode 138 spaced apart from the source electrode 136 are formed on the gate insulating layer 115, and the source electrode 136 is formed on the gate insulating layer 115. It extends from the data line (not shown) that crosses the gate line (not shown) perpendicularly to define the pixel region (P). Here, the semiconductor layer 133 and the ohmic contact layer 134 are sequentially formed between the gate electrode 132 and the source / drain electrodes 136 and 138.

The gate electrode 132, the semiconductor layer 133, the ohmic contact layer 134, and the source / drain electrodes 136 and 138 may be changed in structure by the thin film transistor T.

A passivation layer 145 is formed on the entire upper surface of the source and drain electrodes 136 and 138, and the reflective electrode is in contact with the drain electrode 138 through the drain contact hole CH1 exposing a part of the drain electrode 138. 140 is formed, and a lower alignment layer 148 is formed on the entire upper surface of the reflective electrode 140 to control the alignment direction of the liquid crystal.

Here, the reflective electrode 140 may be composed of one selected from a group of metals having excellent reflectance.

The upper substrate 120 is flexible, and a black matrix pattern 122 is formed on the transparent plastic substrate 10 to block the non-display area at regular intervals. The red, green, and blue color filters correspond to the display area. 124 is formed. Here, the black matrix 122 corresponds to the boundary region for each color.

The common electrode 126 is formed on the red, green, and blue color filters 124, and the upper alignment layer 149 is formed on the common electrode 126 to face the lower alignment layer 148.

As described above, the lower substrate 150 of the flexible liquid crystal display device is etched to etch a sharp edge of the metal substrate 110 before the manufacturing process.

With reference to Figures 2 and 3 to be described in detail the edge grinding process of the metal substrate 110 according to an embodiment of the present invention.

FIG. 2 is a view schematically showing an etching apparatus for etching an edge of a metal substrate according to an embodiment of the present invention, and FIG. 3 is a diagram illustrating a configuration of an etching portion of FIG. 2.

As shown in FIG. 2 and FIG. 3, the edge etching apparatus of the metal substrate 110 according to an embodiment of the present invention may include first and second etching portions 160a, which etch the edge of the metal substrate 110. 160b and a substrate plate 180 supporting the metal substrate 110.

The substrate plate 180 includes a plurality of support pins 181 in contact with the bottom surface of the metal substrate 110 to support the metal substrate 110.

The first and second etching units 160a and 160b may include an etching solution spraying unit 170 for spraying an etching solution to the edge region of the metal substrate 110, and a mixture (waste solution) of the etching solution and the etched metal material. It includes a cleaning unit for cleaning the metal substrate 110.

The etchant injection unit 170 may include a first etching head 171a facing the upper surface of the edge of the metal substrate 110 and a second etching head 171b facing the lower surface of the edge of the metal substrate 110. Include. That is, the first and second etching heads 171a and 171b extend in the direction of the metal substrate 110 and surround upper and lower portions of edges of the metal substrate 110.

The first etching head 171a is provided with a first spray nozzle 173a on a surface corresponding to the upper surface of the edge of the metal substrate 110, and the metal substrate 110 is provided on the second etching head 171b. The second injection nozzle (173b) is provided on a surface corresponding to the lower surface of the edge of the.

In the present invention, the first and second injection nozzles 173a and 173b are limited to one provided in each of the first and second etching heads 171a and 171b, but a plurality of first and second injection nozzles 173a and 173b may be provided. .

The etchant injection unit 170 further includes an exhaust unit 181 for discharging the mixed solution (waste solution) of the etchant of the metal substrate 110 and the etched metal material to the outside, and the etchant and the etched metal material of the etchant. The mixed liquid (waste liquid) is discharged into the exhaust passage 183 through the exhaust portion 181.

Here, the etchant may be used iron chloride, it may be used any one of the etchant (etchant) capable of etching the metal as well as the iron chloride.

The etchant injection unit 170 is provided in the cleaning unit, and the cleaning unit may face the first surface of the etchant injection unit 170 and the upper surface of the edge of the metal substrate 110. And a second cleaning head 162 facing the lower surface of the etchant injection unit 170 and the edge lower surface of the metal substrate 110.

The first cleaning head 161 is provided with a plurality of third spray nozzles 163a on a surface corresponding to the upper surface of the edge of the metal substrate 110, and the second cleaning head 162 includes the metal substrate ( A plurality of fourth injection nozzles 163b are provided on a surface corresponding to the lower surface of the edge of 110.

The third and fourth spray nozzles 163a and 163b are sprayed with a cleaning liquid for cleaning the mixed liquid (waste liquid) of the etchant and the etched metal material.

As described above, the edge etching apparatus of the metal substrate 110 according to the exemplary embodiment of the present invention is provided with etching liquid ejecting units 160a and 160b capable of etching the edge of the metal substrate 110 to manufacture the liquid crystal display device. By previously etching the sharp edges of the metal substrate 110 in the form of rounding, as the manufacturing process of the display device proceeds, damage to the mobile equipment and the manufacturing equipment can be prevented.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

1 is a cross-sectional view schematically illustrating a unit pixel of a flexible liquid crystal display.

2 is a view schematically illustrating an etching apparatus for etching an edge of a metal substrate according to an embodiment of the present invention.

3 is a diagram illustrating a configuration of an etching part of FIG. 2.

Claims (6)

A support plate for supporting the metal substrate; And And first and second etching liquid injection parts surrounding edges of the metal substrate. Each of the etchant ejection units includes an etching unit for injecting an etchant to the edge of the metal substrate, and a cleaning unit for cleaning the etchant and the etched metal material. According to claim 1, The first and second etching liquid injection unit, A first etching head facing an upper surface of the metal substrate; A second etching head facing the bottom surface of the metal substrate; At least one first spray nozzle provided in the first etching head corresponding to an upper surface of the metal substrate; And And at least one or more second spray nozzles provided in the second etching head corresponding to the bottom surface of the metal substrate. The method of claim 2, The first and second etching liquid injection unit further comprises an exhaust unit for discharging the etching liquid and the metal material etched. According to claim 1, And the etching solution is formed of an etchant capable of etching iron chloride or the metal substrate. According to claim 1, And the cleaning part has a structure surrounding the edge of the metal substrate and the etching part. The method of claim 2, The cleaning unit, A first cleaning head facing an upper surface of the metal substrate and the first etching head; A second cleaning head facing the lower surface of the metal substrate and the second etching head; At least one third spray nozzle provided in the first cleaning head corresponding to an upper surface of the metal substrate; And And at least one or more fourth spray nozzles provided in the second cleaning head corresponding to the bottom surface of the metal substrate.
KR1020080132720A 2008-12-23 2008-12-23 Fabricating apparatus of display device KR20100073928A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020080132720A KR20100073928A (en) 2008-12-23 2008-12-23 Fabricating apparatus of display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080132720A KR20100073928A (en) 2008-12-23 2008-12-23 Fabricating apparatus of display device

Publications (1)

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KR20100073928A true KR20100073928A (en) 2010-07-01

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016104827A1 (en) * 2014-12-22 2016-06-30 주식회사 토비스 Double etchant spray nozzle and double-sided etching apparatus equipped with same
KR20210038185A (en) * 2019-09-30 2021-04-07 (주)코텍 Etching device for liquid crystal panel and etching method using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016104827A1 (en) * 2014-12-22 2016-06-30 주식회사 토비스 Double etchant spray nozzle and double-sided etching apparatus equipped with same
KR20210038185A (en) * 2019-09-30 2021-04-07 (주)코텍 Etching device for liquid crystal panel and etching method using the same

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