CN100380202C - Color filter and electro-optical device - Google Patents
Color filter and electro-optical device Download PDFInfo
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- CN100380202C CN100380202C CNB2005101136512A CN200510113651A CN100380202C CN 100380202 C CN100380202 C CN 100380202C CN B2005101136512 A CNB2005101136512 A CN B2005101136512A CN 200510113651 A CN200510113651 A CN 200510113651A CN 100380202 C CN100380202 C CN 100380202C
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Abstract
A color filter ( 200 ) comprises pixels ( 13 ) separated from each other by partitions ( 14 ) formed on a substrate ( 12 ) so as to have a plurality of color elements of ink. Dummy pixels ( 13 ') are formed outside the area in which the pixels ( 13 ) are formed. The amount of ink applied to each of said pixels and the amount of ink applied to each of said dummy pixels are substantially equal. A protective film ( 21 ) covering said pixels ( 13 ) is formed so as to also cover said dummy pixels ( 13 ').
Description
Technical field
The present invention relates to color filter and electro-optical device, particularly about the inhomogeneity color filter and the electro-optical device of the light transmission characteristic that can improve each pixel between pixel.
Background technology
As employed color filter in display device such as color liquid crystal display arrangement, be after forming the refractive power portion of square formation shape on the transparency carrier and having the partition of barrier effect, with ink-jet method colored coating material in partition, this bake drying and curing is at a certain temperature obtained.
In the manufacture method of above-mentioned color filter always, when spuing liquid material, make it fill with the top of the partition to the substrate.By with this bake drying and curing at a certain temperature, its volume is reduced, make the height of the height of dyed layer and partition basic identical.
Yet, in such pseudo-colour filtering, if the liquid level level to the China ink that spues can not be controlled fully, the volume that dried China ink just might take place is excessive and exceed the top of the partition on the substrate, or the volume of dried China ink is too small and become recessed shape.
Even the amount and the concentration of China ink are all identical, but because the difference of drying condition also can produce the poor of the black face in above-mentioned dry back.For example, the back is dry under hot conditions if China ink spues, and then drying is carried out rapidly, and the volume of China ink just has the tendency that diminishes, otherwise under cryogenic conditions when dry, drying is carried out slowly, and the volume of China ink just has the tendency that diminishes hardly.
The deviation of black face so also can produce between the pixel of same substrate.Particularly produce between pixel forms the pixel of pixel and central portion of edge part in zone, the pixel of having removed the central portion after the edge part is then relatively more even.This be considered to since pixel to form the rate of drying of edge part in zone more caused soon than the rate of drying of central portion.The difference of the black face on same substrate like this is to cause colourity inhomogeneous, and the reason of tonal difference is so be undesirable.
Such problem not only can take place in color filter, but also may take place in other electro-optical device.For example in the electron emitting structure that forms using ink-jet method to spray organic EL luminophor solution, also require between pixel, to form uniform luminescent layer.
And then, because the surface of dyed layer and barrier layer may not be smooth, for example on dyed layer and barrier layer, form protective seam, constitute under the situation of liquid crystal indicator as color filter, if superficial layer is smooth inadequately, liquid crystal layer distributes just may be uneven.
Summary of the invention
In view of the above problems, the objective of the invention is to, provide a kind of liquid material that can suppress dry and solidify back quality (volume, surface elevation, and surface) difference takes place, do not have that look inhomogeneous, tone is inhomogeneous and the color filter of brightness irregularities and display device.
And, the present invention also aims to, provide a kind of and can make having an even surface of color filter, form the color filter and the display device thereof of equally distributed liquid crystal layer thereon.
In order to address the above problem, being characterized as of color filter of the present invention comprises: by a plurality of pixels that the partition on the zone is divided each other that form that are formed on substrate, described pixel comprises first dyed layer, and first dyed layer has the color material of some; With a plurality of virtual pixels of dividing each other by partition, described virtual pixel comprises second dyed layer, second dyed layer has the color material of basic identical with the quantity of first dyed layer color material some, described pixel becomes the demonstration key element that works in the image demonstration, and make light in each described pixel to see through characteristic even substantially, described virtual pixel become image show in inoperative key element.
In described color filter, to wish to be formed with virtual pixel in the outside that forms a plurality of described pixel regions, the China ink of giving each described pixel is basic identical with the China ink amount of the China ink of giving each described virtual pixel.
And, also wish around a plurality of described pixel regions of formation, to be formed with virtual pixel, be formed with the diaphragm that covers described pixel and described virtual pixel.
In described color filter, the China ink of wishing to give described pixel is basic identical in the unit area of described substrate with the China ink amount of the China ink of giving described virtual pixel.
And, wish that the described diaphragm that forms covers the zone than the regional more lateral of described formation partition.Also have, wish the substrate that exposed on the zone with the regional more lateral of described formation partition intimate engagement mutually.
And then, being characterized as of color filter of the present invention, comprise: by the pixel that the partition on the zone is divided each other that forms that is formed on substrate, so that comprise the color element of a plurality of China inks, make the photopermeability of each pixel even substantially between each described pixel, described partition comprises inorganic light shield layer and is formed on organic barrier layer at light shield layer top that the most external of described barrier layer extends to the most external of described light shield layer, and described barrier layer and described substrate contacts.
Electro-optical device of the present invention is a feature to be provided with described color filter.In described color filter, and then wish to be provided with to the liquid crystal layer of light selective permeation or to the discharge display part of light selective permeation.
The feature of electro-optical device of the present invention also is, is provided with by the partition that forms on substrate and divided, and has by drop to spue and a plurality of pixels of the luminescent layer that forms, and the characteristics of luminescence of each pixel is even substantially between pixel.
E-machine of the present invention is a feature to be provided with described electro-optical device.
Description of drawings
Fig. 1 is the partial enlarged drawing of the color filter of first embodiment of the invention.
Fig. 2 is the sectional view of the color filter part of Fig. 1 variation,
Fig. 3 is the sectional view of the liquid crystal indicator of electro-optical device in the first embodiment of the invention.
Fig. 4 is the sectional view of described color filter manufacturing process.
Fig. 5 is the sectional view of described color filter manufacturing process.
Fig. 6 is the sectional view of described liquid crystal indicator manufacturing process.
Fig. 7 is the sectional view of described liquid crystal indicator manufacturing process.
Fig. 8 represents the display device in the first embodiment of the invention.(a) being the plane model figure of EL display device, (b) is along the mode chart in AB line cross section in (a).
Fig. 9 is the enlarged drawing of viewing area cross section structure in the display device.
Display device in another embodiment of the invention of Figure 10, i.e. the key concept figure of plasma-type display device.
Figure 11 is the exploded perspective view of plasma-type display device.
Figure 12 is the stereographic map of e-machine example among expression the present invention.
Among the figure: the 200-color filter; The 12-substrate; The 13-pixel; 13 '-virtual pixel; The 14-partition; 20-pigment: the 21-diaphragm; 300-liquid crystal indicator (electro-optical device).
Embodiment
Embodiments of the present invention are described with reference to the accompanying drawings.
(the 1. structure of color filter)
(1-1 first embodiment)
Fig. 1 is the partial enlarged drawing of color filter in the first embodiment of the invention.Fig. 1 (a) is a vertical view, and Fig. 1 (b) is the sectional view along B-B ' line among Fig. 1 (a).
Shown in Fig. 1 (a), color filter 200 is provided with the pixel 13 that is the square formation arrangement on substrate 12, and the border between pixel and the pixel is divided by partition 14.In each pixel 13, import a kind of China ink among red (R), green (G), blue (B) respectively.In this embodiment, the configuration of red, green, blue is to inlay configuration, but also can adopt other configuration mode such as striped configuration, triangular arrangement.
Shown in Fig. 1 (b), color filter 200, be provided with light-transmitting substrate 12, with light transmission partition 14.On the part that does not form partition 14, constitute described pixel 13.Constitute dyed layer 20 by the versicolor China ink that is imported in this pixel 13.At partition 14 and above the dyed layer 20, form diaphragm 21.
Like this, in plane mode, barrier layer 17 forms than light shield layer 16 little circles.That is, around it, leave the width of defined when barrier layer 17 forms, light shield layer 16 is exposed.
Dyed layer 20 is not only in the exposing on the face of substrate 20, and forms in exposing on the face of light shield layer.And the part (seeing through portion) that forms on the face in exposing of substrate 20 has the function of substantive dyed layer.In contrast to this, the part (the non-portion that sees through) in that exposing of light shield layer 16 forms on the face by light shield layer 16 is covered, makes the light from substrate upside and downside that substantial seeing through can not be arranged.
Like this, the non-portion that sees through by forming around dyed layer 20 can make the uniform film thickness that sees through portion in the dyed layer 20.Consequently, can prevent owing to the different tones that cause of part of the thickness of dyed layer etc. are inhomogeneous.Below narrate its reason.The surrounding edge portion of dyed layer 20, i.e. the part that is contacted with barrier layer 17, is compared with other parts degree of the wettability of the surface of barrier layer 17 etc. according to China ink, and its thickness is less or bigger.So, desire to make dyed layer to form uniform thickness comprehensively, say it is difficult technically.But,, overlap with the part of light shield layer 16 because formed thickness is difficult to the surrounding edge portion of uniform dyed layer 20 especially, so can make the unmanageable surrounding edge of thickness portion become non-permeability according to the present embodiment.The membrane thickness unevenness part that becomes the inhomogeneous reason of tone is removed from permeation parts.
So, the width of the exposed portions serve of light shield layer 16, wish and under the situation of the details boundary of the width of the relation of the volume of considering the wetting state of China ink to barrier layer 17, the useful area that sees through portion, China ink and thickness, barrier layer, black accuracy at target etc., to design, for example 1～10 μ m wishes 2～3 μ m especially.
And, since light shield layer 16 expose face, hope can be as mentioned above, the part that have inhomogeneous thickness at dyed layer 20 forms, so wish can be along the surrounding edge portion of dyed layer 20, promptly forms ring-shaped continuous along the surrounding edge portion of light shield layer 16.
And then, in the present embodiment,, be positioned at the surrounding edge inboard of light shield layer 16, promptly owing to inwardly contracting than the side of light shield layer 16 in the side of barrier layer 17, so on light shield layer 16, form step owing to the bottom surface periphery edge of barrier layer 17.As hereinafter described, when dyed layer 20 formed, this step has can prevent that China ink from flowing into the function that sees through portion of adjacent dyed layer.Consequently can prevent the generation of colour mixture in the dyed layer.
In color filter 200, form the neighboring area in the outside in zone in the pixel of a plurality of pixels 13 that are formed with the function of bringing into play pixel, formation has the virtual pixel 13 ' of not bringing into play the dyed layer that shows elemental function, this virtual pixel 13 ' is the part that does not form active square formation element in that narrate in the back and counterpart subtend substrate 38, for make coloured material in the pixel 13 after drying quality evenly and make light in each pixel to see through characteristic almost even between pixel, be provided with pixel 13 in the dyed layer 20 ' of coloured material of dyed layer 20 same amounts.
As shown in the figure owing to compare with other pixel 13, the light shield layer 16 of virtual pixel 13 ' to expose face bigger, promptly since the face (peristome) that exposes of glass substrate 12 diminish, so can easily distinguish with common pixel 13.Owing to surround the barrier layer 17 of virtual pixel 13 ', has identical structure with the barrier layer 17 that surrounds other pixel 13, the thickness of light shield layer 16 is compared fully thin with the thickness of barrier layer 17, thus pixel 13 and virtual pixel 13 ' the China ink that can accept volume much at one.And the picture element density of virtual pixel 13 ' the also pixel 13 with common is identical.Virtual pixel 13 ' for example can substrate surrounding edge portion one side, is divided into pixel 10 row and forms (among the figure be divided into for simplification 2 row pixels).
Also have, in above-mentioned first embodiment, narrated and in virtual pixel 13 ', also formed peristome, but in virtual pixel 13 ', also can not form peristome.
(1-2, second embodiment)
Fig. 2 is the sectional view of the color filter part of Fig. 1 variation.In this color filter, be provided with partition 14, this partition 14 forms on the point of barrier layer 17 in the example with Fig. 1 identical on light shield layer 16, but the cross sectional shape of the outermost part 17 ' in the barrier layer 17 that constitutes partition 14, but with Fig. 1 in routine different.
Particularly, the outermost part 17 ' in the barrier layer 17 forms to such an extent that have the width bigger than other barrier layer 17, has the side part of foretelling at sunset that relates to than light shield layer 16 and also wants the outside directly and substrate 12 contacted parts.Consequently, have between protective seam 21 and the light shield layer 16 at interval, be the state that is not in contact with one another.
Constituting by resin under the situation of barrier layer 17, because the wider width that outermost part 17 ' forms, so the thermal capacity of its Outboard Sections is also bigger.So in the drying of dyed layer 20 during, can suppress to be positioned at the rapid thermal distortion that pixel forms near the dyed layer 20 the outside, zone with oven dry.Near near the dyed layer 20 dried qualities that pixel forms the regional outside and central authorities are are consistent, thereby make optical characteristics homogenising between pixel of each pixel.
Also have, in the example of Fig. 1, the end of protective seam 21 becomes rapid inclination easily, and the unmanageable situation of shape takes place.This is considered to because the protective seam 21 of partition 14 most peripherals among light shield layer 16 and Fig. 1 contacts, and light shield layer 16 is compared with barrier layer 17, and is better caused for the wetting state of protective seam 21.But, in the example of Fig. 2, because at partition 14 most peripherals, protective seam 21 is to be in contactless state with light shield layer 16, so can not produce such problem, can make the inclination of protective seam 21 become steady.
(2. electro-optical device)
Fig. 3 is the sectional view of liquid crystal indicator one example of electro-optical device in first embodiment of the present invention.Here color liquid crystal display arrangement is illustrated.This color liquid crystal display arrangement 300 owing to used above-mentioned color filter 200, carries out so can make the drying of coloured material between pixel and be solidificated under the uniform condition, thereby makes the drying of each pixel between pixel even with the thickness of the film that solidifies the after stain material.And, because color liquid crystal display arrangement 300, used above-mentioned color filter 200, can make protective seam 21 smooth, being evenly distributed of liquid crystal layer 37.Consequently, this color liquid crystal display arrangement 300, the characteristics of luminescence of each pixel is even between pixel, thereby can express the image quality preferable image.
This color liquid crystal display arrangement 300, combined by color filter 200 with the substrate 38 of subtend, between the two, enclose liquid-crystal composition 37 again and constitute.On the medial surface of the subtend substrate 38 of color liquid crystal display arrangement 300, be formed with TFT (thin film transistor (TFT)) element of square formation shape or TFD (thin film diode) element (not shown), with pixel electrode 32.And, as the opposing party's substrate, relative with pixel electrode 32 to the position on, be provided with the color filter 200 that red, green, blue dyed layer 20 in pixel electrode 22 and assortment.
(the 3. manufacture method of color filter and electro-optical device)
Fig. 4 and Fig. 5 are the sectional views of described color filter manufacturing process.Based on these figure, the manufacture method of color filter is described in detail.
(3-1 cleans operation)
Preparation is that the flat substrate that alkali-free glass constituted of 0.7mm, long 38cm, wide 30cm is as substrate 12 (Fig. 4: S1) by thickness.This substrate 12 is used ultrasonic cleaning in aqueous slkali, after pure water rinsing, carry out drying and obtain clean Surface at 120 ℃.And, also wish this transparency carrier 12, can anti-350 ℃ high temperature, be not subject to the erosion of acid, aqueous slkali, and can produce in batches.As the material of transparency carrier 12, except glass substrate, can also use plastic sheeting, sheet plastic etc.
(3-2 black system of battle formations case forms operation)
(3-2a chromium pattern forms operation)
On the surface of substrate 12, obtain containing metal level 16 ' (Fig. 4: S2a) of chromium with sputtering method.Specifically, as target, carry out reactive sputtering, be formed on Cr with chromium
2O
3The structure of superimposed layer chromium.Cr
2O
3With the total average film thickness of chromium be 150nm.Because Cr
2O
3The existence of layer makes the intimate engagement raising of substrate and chromium layer.Form pattern in the zone of defined in the operation that this metal level 16 ' is narrated in the back, have the function of the black battle array that peristome is set.Also have,, except chromium, can also use nickel, tungsten, tantalum, copper, aluminium etc. as the material of black battle array.
(3-2b light protective finish)
Behind substrate implementation hot-dip coating, the drying through 80 ℃, 5 minutes is at optics protective seam R1 (Fig. 4: S2b) of the surface of metal level 16 ' formation positive type.For example the spin coating method with 2000～3000rpm forms optics protective seam OFPR-800 (system should be changed in Tokyo), and the thickness of protective seam is 1.7 μ m.The optics protective seam that on substrate, forms, behind the implementation hot-dip coating, the drying through 80 ℃, 5 minutes.
(3-2c exposure and development)
On the surface of this optics protective seam R1, intimate engagement is drawn the mask of desirable shape pattern to some extent, implements ultraviolet exposure.Then, be impregnated in the alkaline-based developer that contains weight ratio 8% potassium hydroxide,, make optics protective seam R1 form pattern (Fig. 4: S2c) the not optical protection layer removal of exposure part.The formation pattern of peristome can carry out suitable selection in inlaying configuration, triangular arrangement, striped configuration etc.The shape of peristome also is not limited to rectangle, also can be the circle that matches with the ink droplet shape.
(erosion of 3-2d chromium)
Then, use, corrode and remove the metal level 16 ' that exposes, form peristome (Fig. 4: S2d) of image 13 with the etchant of hydrochloric acid as principal ingredient.
(3-2e optics protective seam is peeled off)
And, to the protective seam pattern that obtains by the development of protective seam,, peel off from the chromium film by the soup processing of organic stripper or the polishing of oxygen gas plasma, the chromium pattern of division is exposed on substrate.So just can access light shield layer (black battle array) 16 (Fig. 4: S2e) with defined square formation pattern.The width of light shield layer 16 is about 20 μ m.
Also have, as illustrated in fig. 1, the described virtual pixel 13 ' that pixel is represented is not given with the width formation of about 10 pixels in the peripheral region outside pixel forms the zone.About virtual pixel 13 ', the width of light shield layer 16 is bigger, and the area of peristome diminishes.
(3-3 barrier pattern forms operation)
(3-3a barrier material coating)
And then on this substrate, the transparent alkali that forms negative type with the spin coating method of 2000～3000rpm is photosensitive resin composition 18 (Fig. 4: S3a).
(3-3b exposure and development)
After this photosensitive resin composition 18 being carried out 100 ℃, 20 minutes prebake, use the mask of drawing regulation square formation pattern, implement ultraviolet exposure.To the resin of the part of exposure not, use alkaline-based developer to develop, after pure water rinsing, be rotated drying, carry out 100 ℃, 30 minutes oven dry again
As final drying, the resin part is fully solidified, form barrier layer 17, and form the partition 14 (Fig. 4: S3b) that constituted by light shield layer 16 and barrier layer 17.The effect of this barrier layer 17 is as the barrier that separates each pixel 13 that should give China ink, to prevent the colour mixture of the China ink of adjacent each pixel 13.The thickness average out to 2.5 μ m of this barrier layer 17, width is about 14 μ m.
(3-3c surface treatment)
And then, by substrate 12 and partition 14 are carried out following Cement Composite Treated by Plasma, give substrate 12 with ink affinity, give partition 14 in case China ink.Because the top (barrier layer 17) of partition 14 is made of the insulation organic material, and substrate 12 is to have inorganic material such as glass to constitute, so by the importing fluoro-gas substrate surface is carried out Cement Composite Treated by Plasma, can access above-mentioned effect.Particularly, in the gas ions of capacity mating type is handled, will import gas and flow into reaction chamber, the electrode of a side is continued mutually with substrate 12, the electrode of opposite side then towards the surface of substrate 12, applies voltage.
At first, be that 500SCCM, power are 0.1W/cm at flow as the oxygen that imports gas
2～1.0W/cm
2, pressure is the Cement Composite Treated by Plasma that condition-factory of ltorr carried out 10～30 seconds.Peristome to pixel 13 in this operation is carried out polishing, makes substrate 12 activates of exposing surface, obtains ink affinity.
Then, at fluorocarbons (CF as importing gas
4) flow be that 900SCCM, power are 0.1W/cm
2～1.0W/cm
2, pressure is the Cement Composite Treated by Plasma of carrying out under the condition of ltorr 600～3600 seconds.Descend by the surface energy that can make barrier layer 17 in this operation, make it repel China ink easily.So can when the surface that makes substrate 12 keeps ink affinity, make barrier layer 17 become semi-permanent anti-China ink.
Also have, using fluoride gas to carry out also can using nitrogen fluoride (NF under the situation of Cement Composite Treated by Plasma
3), sulfur fluoride (SF
4) wait and replace fluorocarbons.And, after using oxygen gas plasma to make 17 activation of barrier layer, can also make it recover former water proofing property of adopting by thermal treatment.
By above-mentioned surface treatment procedure, can make the substrate surface upgrading, particularly, hope can be set in the contact angle (wetting angle) of China ink and barrier layer 17 between 30～60 degree, and the contact angle of China ink with substrate 12 is set in below 30 degree.
(the 3-4 dyed layer forms operation)
(importing of 3-4a China ink)
In each pixel 13 that forms described peristome and virtual pixel 13 ', import the China ink of coloured material in the mode of ink-jet, make pixel and virtual pixel be colored as R, G, B (Fig. 5: S4a, 4b, 4c).Because the water proofing property processing has been carried out on the top of partition 14, exceed barrier and flow so can prevent China ink as adjacent peristome, or the mixing mutually of China ink.
In the write head of ink jet type, use accurate magnetic head with piezoelectric effect, in each painted formation portion, optionally spatter spray 7.0 slight (micromicro, 10
-12) the small ink droplet of lift degree.Driving frequency is 14.4kHz, and promptly spuing of each ink droplet is set to 9.5 milliseconds.Head is set to 0.3mm with the distance of target.In order to prevent to form the flight bending of the speed of circling in the air of portion by head to the dyed layer as target, the generation of dripping is confused away in the division that promptly is called as " satellite ", and the voltage of the piezoelectric element of driving head and waveform thereof are more even more important than the rerum natura of ink droplet.So, to press the program of condition enactment waveform in advance, apply three kinds of colors of red, green, blue respectively, form the color matching pattern of defined.
Like this, when on the same substrate of multiple China ink (red, green, blue) importing, dividing in other pixel, three kinds of China inks can be applied simultaneously, carry out prebake after also can in the pixel of the defined of substrate, importing first China ink, carry out prebake after importing second China ink in the pixel of the defined outside importing the pixel of first China ink more afterwards, and then import the 3rd China ink again.
As China ink, for example can use after the Polyurethane resins pigment dispersing, adding is as the cyclohexylamine and the acetic acid butyl of low boiling point solvent, with butyl carbitol acrylate as high boiling solvent, and then the nonionic that adds again as the weight 1% of spreading agent is interfacial agent, and becomes the material that viscosity is 6～8 centipoises.
Inwardly contract than the side of light shield layer 16 in side owing to barrier layer 17 in the present embodiment, so form step on light shield layer.Therefore, when painted formation portion has formed black layer, even the part of China ink layer has exceeded the barrier layer, this Mo Yehui rests on the step that the side constituted that exposes face and barrier layer by light shield layer, can prevent that in adjacent painted formation portion substrate from exposing the inflow on the face.Consequently can prevent the generation of the dyed layer colour mixture that causes owing to the mixing of touching.
Here, even for the described virtual pixel 13 ' of not giving graphical representation, also give China ink with common pixel 13 identical liquid measures.Because the picture element density of virtual pixel 13 ' is identical with the picture element density of common pixel 13, so for the substrate of unit area, the China ink amount that is given is also identical.Can make for the drying condition of the China ink that gives pixel 13 in the color filter even thus.
(3-4b drying process)
Then, the China ink to coating carries out drying.At first, in natural atmosphere, placed 3 hours, dyed layer 20 is finalized the design, on 60 ℃ hot plate, heated 40 minutes afterwards.In three kinds of colors of red, green, blue is not simultaneously, but under the situation about applying in turn respectively (Fig. 5: S4a, 4b, 4c), this prebake operation is to carry out after whenever being coated with a kind of China ink.
In baking oven, be heated to 200 ℃ at last, 30 minutes, dyed layer 20 is cured processing, obtaining thickness is the dyed layer 20 of 1.0 μ m.
(the 3-5. protective seam forms operation)
(3-5a. coating)
After dry the end of a period, on the substrate of the color filter that forms ink film, form protective seam 21 (Fig. 5: S5a).The effect of this protective seam 21 is the flattening surfaces that make wave filter.The formation of protective seam 21 can be adopted spin coating, roller coat, dip coating, ink-jet method etc.For example forming with the spin coating method of 2000～3000rpm that to cover pixel 13 all with partition 14, is the protective seam of 2～3 μ m from the height of substrate 12.Composition as protective seam 21; the inorganic material that can use light-cured resin, thermoset resin, photo-thermal and form etc. with the type resin, by deposition or sputtering method; consider as the transparency under the color filter operating position; so long as the IT that can stand thereafter becomes an operation, oriented film to form the material of operation, can use.
Owing to this protective seam 21 also is to form in order to cover described virtual pixel 13 ', so the surface of protective seam 21 is all smooth, it is even that the distribution of liquid crystal layer also becomes.
And protective seam 21 is with respect to the barrier layer 17 through the partition 14 of water-proofing treatment, and intimate engagement is lower.So, as shown in the figure, wish to form the outside in zone in pixel, form and involve the protective seam 21 that exposes substrate 12.Thus, can heavy seal coat 21 with the intimate engagement of substrate 12, can prevent peeling off of protective seam 21.
(3-5b exposure and development)
Behind protective seam 21 spin coatings, carry out exposure and development, the part of substrate surrounding edge in this protective seam 21 is removed (Fig. 5: S5b).Form the part of taking out the back plane tie in the part of removing.
(3-5c heat treated)
Then, protective seam 21 is heated, make its drying, form color filter 200 in uniform temperature (for example 220 ℃) and regular hour (for example 60 minutes).
(3-6ITO forms operation)
Fig. 6 and Fig. 7 are the sectional views of described liquid crystal indicator manufacturing process.
On the protective seam 21 of color filter 200, with ITO (the Indium Tin Oxide) layer 22 ' of known method such as sputter or deposition formation as electrode layer, this ITO layer all covers protective seam 21, and thickness is 300nm (Fig. 6: S6).And then, on ITO, form by SiO again with the reactive sputtering method
2Constitute, thickness is the dielectric film (not shown) of 10nm.
(3-7ITO corrodes operation)
(3-7a light protection coating)
Then, described ITO layer 22 ' and dielectric film are carried out the photolithograph operation.In this photolithograph operation, at first, with the spin coating method of 2000～3000rpm, the SiO that on substrate, forms
2Applied thickness is protective finish R2 (Fig. 6: S7a) of 1.7 μ m on all surfaces of/ITO film.
(3-7b exposure and development)
, make exposure and development with light face shield (photo mask.), form protecting mask (resist mask) (Fig. 6: S7b) thereafter.
(3-7c corrodes and protective finish is peeled off)
Then, with protective finish R2 as face shield to SiO
2/ ITO film is carried out and is corroded, and after pixel electrode 22 is carried out pattern formation, with aqueous slkali protecting mask is removed (Fig. 6: S7c).
(the 3-8 oriented film forms operation)
Then, form oriented film 26 on the surface of substrate.Oriented film 26 can be the polyimide of 75nm with aniline printing method applied thickness for example, again through 190 ℃ burn till and form (Fig. 6: S8,9).Also carry out same operation not only to color filter 200, and to substrate 38, form oriented film 36 (not shown)s.
(3-9 rubbing operation)
Then, described oriented film is carried out an orientation process (rubbing processing), the liquid crystal molecule of enclosing is later arranged by certain direction.
(the 3-10 spacer scatters operation)
Then, scatter spacer 31 (Fig. 7: S10) at oriented film 26.The particle diameter of spacer is 3.5 μ m.
(3-10 encapsulant printing process)
Then, printing and sealing material 33 (Fig. 7: S11) of surrounding edge portion on protective seam 21.In sealing material printing process, form gap as liquid crystal injecting port in the part of encapsulant 33.In sealing material printing process, can use technology such as serigraphy, after encapsulant 33 printings, burn till 160 ℃ temperature.
(3-12 assembling procedure)
Then, with color filter 200 substrate 38 opposites applying (Fig. 7: S12) with opposite face.
The panel of fitting like this and obtaining is cut into rectangle.Cut off in the operation in this rectangle, becoming liquid crystal panel when the back is cut apart is a state that is listed as, links to each other with rectangle.
(3-13 liquid crystal injection process)
Next, in the gap (gap of color filter 200 and substrate 38) of rectangular faceplate, inject liquid crystal (Fig. 7: S13).At this injection, sealing process, panel is put into the position of the process chamber defined of injection equipment.Then, process chamber is vacuumized, make the gap of clamping between color filter 200 and the substrate 38 become vacuum.Then, move the container that stores liquid crystal, make liquid crystal injecting port be in the state that immerses liquid crystal in the container.In this state, to atmosphere opening, when removing vacuum state, owing to keep vacuum state in the gap of clamping between color filter 200 and the substrate 38, liquid crystal will be inhaled into by liquid crystal injecting port with process chamber.
After the injection of liquid crystal 37 ends like this, liquid crystal injecting port is sealed with the sealant that ultraviolet curable resin constituted.After injection, sealing process finish, the liquid crystal that is adhered on the rectangular faceplate is cleaned.
Then, rectangular panel is cut to single liquid crystal panel.Subsequently, single liquid crystal panel is cleaned, to remove the top glass dust that is adhered to etc.
Then, at the outer surface of color filter 200, attach Polarizer 29 and 39 as shown in Figure 3 respectively with the substrate 38 of opposite face.
And in final inspection operation subsequently,, carry out whole inspections of lighting a lamp or partly lighting a lamp of each pixel by the inspection signal of pliability wiring substrate supply defined, finish liquid crystal indicator 300.
(4.EL display device)
To another example of electro-optical device among the present invention, EL (electroluminescence) display device 301 is illustrated below.Fig. 8 has represented the display device in first embodiment of the present invention.
EL display device in the present embodiment is provided with the transparent base 302 that is made of glass etc., is square formation shape luminous element disposed and hermetic sealing substrate.
(4-1. matrix)
According to the present embodiment, owing to also be formed with functional layer in virtual region, in each pixel, the thickness of the functional layer between the pixel just evenly.Consequently, this EL display device 301, the characteristics of luminescence in each pixel between the pixel is even, can carry out preferable image and represent.
(4-2 circuit component)
And, shown in Fig. 8 (b), be provided with circuit component portion 314 being constituted between light-emitting component portion 311 and the matrix 302 by light-emitting component and barrier layer, this circuit component portion 314 be provided with sweep trace, signal wire, maintenance electric capacity, switch with thin film transistor (TFT), drive with thin film transistor (TFT) 423 etc.
(4-3 negative electrode)
And the negative electrode that forms on an end of negative electrode 312 and the matrix 302 continues mutually with distribution 312a, continues mutually with distribution 305a on the flexible substrates 305 in an end of this distribution.And the drive IC (driving circuit) 306 that is provided with on distribution 305a and the flexible substrates 305 continues mutually.
(4-4 power lead)
And, shown in Fig. 8 a and Fig. 8 b, in the non-display area 302b of circuit component portion 314, dispose power lead 403R, 403G, reach 403B.
(4-5 driving circuit)
Also have,, dispose scan-side driving circuit 405,405 in the both sides of viewing area 302a.This scan-side driving circuit 405,405 is arranged in the circuit component portion 314 of virtual region 302d downside.And then in circuit component portion 314, also be provided with and scan-side driving circuit 405,405 consecutive driving circuits control signal distribution 405a and driving circuit power supply wiring 405b.
(4-6 check circuit)
And then in non-display area 302b, be provided with the check circuit (not shown).By this check circuit, can check the quality of display device in the manufacture process or when dispatching from the factory, defective etc.
(4-7 sealing)
And shown in Fig. 8 b, light-emitting component portion 311 is provided with sealing 303.Sealing portion 303 is made of the sealing resin 603 and the hermetic sealing substrate 604 that apply on the matrix 302.Sealing resin 603 is made of thermoset resin or ultraviolet curable resin etc. more, particularly wishes it is a kind of by thermoset resin, and epoxy resin constitutes.
(all formations of 4-8 viewing area)
Fig. 9 has represented the enlarged drawing of viewing area cross section structure in the device.3 pixels in this Fig. 9, have been represented.Viewing area 301, by the circuit component portion 314 that on matrix, forms circuit such as TFT, with the light-emitting component portion 311 that forms functional layer 410 lamination and constituting in turn.
In this display device, the light by functional layer 410 is sent to matrix 302 sees through circuit component portion 314 and matrix 302, from the downside ejaculation of matrix 302.And the light by functional layer 410 is sent to opposition one side of matrix 302 is then reflected by negative electrode 312, sees through circuit component portion 314 and matrix 302, from the downside ejaculation of matrix 302.
(4-9 circuit component portion)
In circuit component portion 314, form the foundation to protect film 302c that oxide film constituted by the silicon on the matrix 302.On this foundation to protect film 302c, form the island semiconductor film 441 that constitutes by polysilicon.And, on this semiconductor film 441, form source region 441a and discharging area 441b by injecting of high concentration phosphorus ion.Also have, the part that does not import phosphorus becomes channel zone 441c.
And then, in circuit component portion 314, form the transparent gate insulating film 442 that covers foundation to protect film 302c and semiconductor film 441, on gate insulating film 442, form gate electrode 443 (sweep trace).On gate electrode 443 and gate insulating film 442, form the transparent first interlayer dielectric 444a and the second interlayer dielectric 444b.Gate electrode 443 is arranged on the corresponding position of 441c, channel zone with semiconductor film 441.
And, also be formed with and connect first, second interlayer dielectric 444a, 444b, respectively with the source region 441a and the consecutive contact hole 445,446 of discharging area 441b of semiconductor film 441.
Like this, on the second interlayer dielectric 444b, 445 of contact holes that form transparent pixels electrode 411, one sides that are made of ITO etc. with the shape model of defined continue mutually with this pixel electrode 411.
And another contact hole 446 continues mutually with power lead 403.
Do like this, in circuit component portion 314, just form and each pixel electrode 411 consecutive thin film transistor (TFT) 423.
(4-10 light-emitting component portion)
Light-emitting component portion 311, by the functional layer 410 of the lamination separately on a plurality of pixel electrodes 411, adjacent with each pixel electrode 411 and functional layer 410, the negative electrode that forms on partition of being divided by pixel electrode 411 and functional layer 410 412 and the functional layer 410 312 is constituted by main body.Constitute light-emitting component by these pixel electrodes (first electrode) 411, functional layer 410 and negative electrode 312 (counter electrode).
Here, pixel electrode 411 for example can be made of ITO, wishes to be formed on pattern slightly rectangular on the plan view.The length of wishing this pixel electrode 411 is 50～200nm, and special hope is 150nm.Between each pixel electrode 411, be provided with partition 412.
And then organism barrier layer 412b for example wishes that the material that is had thermotolerance, solvent resistance by acrylic resin, polyimide resin etc. is constituted.The thickness of this organism barrier layer 412b, hope is 0.1～3.5 μ m, special hope is 2 μ m.
(4-11 functional layer)
Hole injection/transfer layer 410a when having the function of the hole being injected luminescent layer 410b, also has the function that the hole is carried in the injection/transfer layer 410a of hole.Because such hole injection/transfer layer 410a is arranged between pixel electrode 411 and the luminescent layer 410b, so can improve the luminescence efficiency of luminescent layer 410b, element characteristics such as life-span.And in luminescent layer 410b, the hole of being injected by hole injection/transfer layer 410a and is combined and obtains luminous at luminescent layer by negative electrode 312 injected electrons.Also have, hole injection/transfer layer 410a is except having the par 410a on the pixel electrode 411
1, outside, can also have along the partition 412 formed surrounding edge 410a of portion
2
(4-12 negative electrode)
(4-13 variation)
Also having, in above-mentioned example, by the light that functional layer 410 is sent, is to penetrate (being bottom emission) from the downside of matrix 302.In contrast to this,, constituted, can make the light that sends penetrate (being top-emission) from the side of negative electrode 312 by material transparent as negative electrode 312.
In this case, as material transparent, can use ITO, Pt, It, Ni or Pd etc.The thickness of wishing film is about 75nm, and more wishing can be thinner than this thickness.And 302 of matrixes there is no need to use material transparent.And then 411 of pixel electrodes use high reflecting material.At pixel electrode 411 is under the situation of above-mentioned same anode, in the pixel electrode, for example can use the materials that work function is big, reflectivity is high such as Cr, Fe, Co, Ni, Cu, Ta, W, Au.
On negative electrode 312, form diaphragm.Under the situation of top-emission, wish that diaphragm is even, can make in each pixel the characteristics of luminescence between pixel even.In the present embodiment,, form uniform diaphragm so can form the zone in pixel owing to be provided with virtual pixel.Therefore, the characteristics of luminescence that has between the pixel is certain, the advantage that can well represent.
(plasm display device)
Display device in another embodiment of the invention of Figure 10, i.e. the key concept figure of plasma-type display device.Figure 11 is the exploded perspective view of plasma-type display device.
The display device 500 of the present embodiment and is provided with color filter equally among the embodiment noted earlier, be made of the observation side of color filter 31 configurations.Display device 500 is made of the glass substrate 501 of mutual opposite configuration and color filter 31. and 510 summarys of discharge display part of forming between them.Color filter 31 forms partition 503 and dyed layer 506 on substrate 502, and then the protective seam 507 that covers them is set again constitutes.
On described substrate 501, be formed with the address electrode 511 of striated, also form and cover these address electrodes 511 and the dielectric layer 519 above the substrate 501 with the interval of defined.And then on dielectric layer 519, form between address electrode 511,511, along the dividing wall 515 of each address electrode 511.Also have, (expression is omitted among the figure) in the direction vertical with address electrode 511, also cut apart with the interval of defined in the position of the length direction defined in dividing wall 515.Basically be by the adjacent dividing wall in the address electrode 511 Width left and right sides and with address electrode 511 vertical direction on prolong the dividing wall that is provided with and cut apart, form rectangular zone.Corresponding with this rectangular zone, form arc chamber 516.And, in the inboard of the rectangular region of being divided, form fluorophor 517 by dividing wall 515.
Then, in color filter 31 1 sides, with the perpendicular direction of the address electrode 511 of front on (among Figure 10, for illustrated coordination, the direction of address electrode is with actual different), form the expression electrode 512 of a plurality of striateds with the interval of defined.Also form to cover the dielectric layer 513 of these expression electrodes 512, and then form the diaphragm 514 that is constituted by MgO etc.
Like this, the substrate 502 of described substrate 501 and color filter 31, the opposite is fitted with orthogonal a plurality of address electrode 511 and expression electrode 512 mutually.By to the exhaust of the space segment that surrounded by substrate 501, dividing wall 515 and at the formed diaphragm 514 of color filter 31 1 sides with import inert gas, and form arc chamber 516.Also having, at the formed expression electrode 512 of color filter 31 1 sides, is that each arc chamber is disposed 2 and form respectively.
The abridged AC power continues mutually among address electrode 511 and expression electrode 512 and the figure, by the energising of each electrode, the fluorophor in the discharge part 510 of necessary position is encouraged, and sends white light.Observe by color filter 31 that this is luminous, just can obtain colored expression.
(6. e-machine)
Then, the concrete example to the e-machine that is provided with described display device is illustrated.Because these e-machines have used display device in described each embodiment as display part, so the dry and curing of the coloured material between the pixel can carried out under the condition uniformly, between the pixel in each pixel the dry and thickness that solidifies the after stain material just evenly can express the second best in quality image.
Figure 12 (a) is the stereographic map of expression mobile phone one example.Symbol 600 expression mobile phone body, the display part of described display device has been used in symbol 601 expressions.
Figure 12 (b) is the stereographic map of an example of portable information processors such as expression word processor, notebook computer.
As shown in the figure, used the display part 702 of described display device, be arranged in the signal conditioning package 700.And signal conditioning package 700 also is provided with input parts 701 such as keyboard.
This signal conditioning package 700, be provided with signal conditioning package body 703, this body comprises various circuit such as expression information output source, expression information-processing circuit, clock generating circuit and by the shows signal generating unit that the power circuit of these circuit supply capabilities etc. is constituted.In display device, for example supply of the shows signal that generates according to 701 input informations of input part by the shows signal generating unit, and form display image.
Figure 12 (c) is the stereographic map of Wristwatch-type e-machine one example.Symbol 800 expression wrist-watch bodies, the display part of described display device is used in 801 expressions.
In the manufacturing of these e-machines, formation is provided with the display device of drive IC (driving circuit), these display device is assembled in mobile phone, portable information processor, the Wristwatch-type e-machine etc. to get final product again.
As the e-machine that is assembled with electro-optical device in the present embodiment, be not limited to above-mentionedly, the example that can also enumerate has: e-machines such as the video tape recorder of electronic memo, pager, POS terminal, IC-card, minidisk player, liquid crystal projector and engineering work station, TV, visiting type or direct-view monitor (monitor) type, tiny computer, automobile navigation apparatus, the device that touch panel is set, game machine.
According to the present invention, can controlling liquid shape material dry and solidify the difference of back quality (volume, surface elevation and surface), do not have that irregular colour is even, inhomogeneous, the uneven color filter of luminosity of tone thereby provide.And, according to the present invention, can also provide the uniform color filters that distribute such as liquid crystal layer that diaphragm is smooth, form on it.
Claims (13)
1. color filter comprises:
By a plurality of pixels that the partition on the zone is divided each other that form that are formed on substrate, described pixel comprises first dyed layer, and first dyed layer has the color material of some; With
A plurality of virtual pixels of dividing each other by partition, described virtual pixel comprises second dyed layer, second dyed layer has the color material of basic identical with the quantity of first dyed layer color material some, described pixel becomes the demonstration key element that works in the image demonstration, and make light in each described pixel to see through characteristic even substantially, described virtual pixel become image show in inoperative key element.
2. color filter according to claim 1, be formed with described virtual pixel in the exterior lateral area that forms described pixel region, give the color material of each described pixel some, the quantity of the color material of each described virtual pixel quantity basic and each described color of pixel material is basic identical.
3. color filter according to claim 2, each described virtual pixel is formed with the peristome littler than the peristome of each described pixel.
4. color filter according to claim 2, it is basic identical in each unit of described substrate with the quantity of the color material of giving described virtual pixel to give described color of pixel material.
5. color filter according to claim 1 is formed with described virtual pixel in the exterior lateral area that is formed with described pixel region, and is formed with the diaphragm that covers described pixel and described virtual pixel.
6. color filter according to claim 5, each described virtual pixel is formed with the peristome littler than the peristome of each described pixel.
7. color filter according to claim 5, the described diaphragm of formation also cover the zone in the outside, formation zone of described partition.
8. color filter according to claim 5, the described diaphragm of formation exposes regional intimate engagement mutually with the substrate in the outside, the formation zone of described partition.
9. electro-optical device that comprises the described color filter of claim 1.
10. electro-optical device according to claim 9 on described color filter, also includes the liquid crystal layer of alternative printing opacity.
11. electro-optical device according to claim 9 is characterized in that: on described color filter, also include the discharge display part of alternative printing opacity.
12. e-machine with the described electro-optical device of claim 9.
13. a color filter comprises:
By the pixel that the partition on the zone is divided each other that forms that is formed on substrate, so that comprise the color element of a plurality of China inks, make the photopermeability of each pixel even substantially between each described pixel, described partition comprises inorganic light shield layer and is formed on organic barrier layer at light shield layer top, the most external of described barrier layer extends to the most external of described light shield layer, and described barrier layer and described substrate contacts.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001167483 | 2001-06-01 | ||
| JP2001167484 | 2001-06-01 | ||
| JP2001167484 | 2001-06-01 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB028019539A Division CN1229655C (en) | 2001-06-01 | 2002-05-31 | Color filter and electro-optical device |
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| Publication Number | Publication Date |
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| CN1755457A CN1755457A (en) | 2006-04-05 |
| CN100380202C true CN100380202C (en) | 2008-04-09 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000037972A1 (en) * | 1998-12-21 | 2000-06-29 | Seiko Epson Corporation | Color filter and method of manufacture thereof |
| US6476988B1 (en) * | 1998-03-18 | 2002-11-05 | Seiko Epson Corporation | Thin film forming method, display, and color filter |
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2002
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6476988B1 (en) * | 1998-03-18 | 2002-11-05 | Seiko Epson Corporation | Thin film forming method, display, and color filter |
| WO2000037972A1 (en) * | 1998-12-21 | 2000-06-29 | Seiko Epson Corporation | Color filter and method of manufacture thereof |
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| CN1755457A (en) | 2006-04-05 |
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