KR20090124448A - Scribing apparatus - Google Patents

Abstract

PURPOSE: A scribing apparatus is provided to reduce the work space for the scribing process by forming the scribe line while moving a straight line. CONSTITUTION: The motherboard is arranged in the supporting member(100). The scribing unit forms the scribe line in the mho top of the substrate. The mobile unit(300) transfers the scribing unit according to the arrangement direction of the unit boards formed in motherboard. The mobile unit comprises the first mobile unit(300a) and the second mobile unit(300b). The first mobile unit mobiles the straight line and supports the scribing unit according to the first direction. The first mobile unit is straightly moved according to the backward perpendicular to the second mobile unit in the first direction.

Description

Scribing Device {SCRIBING APPARATUS}

The present invention relates to an apparatus used for manufacturing a flat panel display panel, and more particularly, to a scribing apparatus for forming a scribe line on a mother substrate on which a plurality of unit substrates are formed.

Recently, information processing devices have been rapidly developed to have various types of functions and faster information processing speeds. Such information processing apparatus has a display for displaying the activated information. Conventionally, a cathode ray tube monitor is mainly used as a display, but recently, a light and space-saving thin film transistor-liquid crystal display panel or organic light emitting diodes display The use of such flat panel displays is greatly increasing.

In general, a panel used for a flat panel display or the like is usually manufactured using a brittle substrate, and the panel is roughly classified into a single plate substrate composed of one sheet or a bonded substrate bonded to two substrates.

Since the bonded substrate is processed into small and various sizes, such as a panel for a liquid crystal display of a mobile phone, to a large size such as a panel such as a TV or a display, the bonded substrate is cut into a unit substrate having a predetermined size from a large parent substrate, Used as a panel.

As a method of cutting a mother substrate, there is a method of cutting using a laser beam or a method of cutting using a scribe wheel embedded with fine diamond.

A method of cutting a mother substrate using a laser beam includes a scribing process of irradiating a scribe laser beam along a cutting line of the mother substrate to form a scribe line and quenching the heated scribe line, and a brake along the scribe line. It is made of a braking step of cutting the parent substrate into a unit substrate by irradiating a laser beam for.

A method of cutting a mother substrate using a scribe wheel includes a scribing process of contacting a scribe wheel with a cutting target line of the mother substrate and forming a scribe line having a predetermined depth along the cutting target line, and a mother substrate. A cracking process propagates along a scribe line by applying a physical impact to the breaker to break the parent substrate into a unit substrate.

The present invention provides a scribing apparatus capable of forming scribe lines on a parent substrate while moving the scribing unit linearly along the arrangement direction of the unit substrate without moving the support member supporting the parent substrate. will be.

The object of the present invention is not limited thereto, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a scribing apparatus according to the present invention is a device for performing a scribing process for separating a mother substrate on which a plurality of unit substrates are formed into a unit substrate, wherein the support member on which the mother substrate is placed Wow; A scribing unit for forming a scribe line on the mother substrate; And a moving unit for moving the scribing unit along an arrangement direction of the unit substrates formed on the mother substrate.

In the scribing apparatus according to the present invention having the configuration as described above, the moving unit comprises: a first moving unit which supports the scribing unit to be linearly movable along a first direction; And a second moving unit for linearly moving the first moving unit along a second direction perpendicular to the first direction.

According to the present invention, the working space for the scribing process can be reduced by forming a scribe line while the support member for supporting the parent substrate is fixed and the scribing unit moves linearly.

In addition, according to the present invention, by moving the scribing unit, which is relatively lighter than the support member, it is possible to improve the productivity through shortening of the process time.

Hereinafter, a scribing apparatus according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are assigned to the same components as much as possible, even if shown on different drawings. In addition, in describing the present invention, when it is determined that the detailed description of the related well-known configuration or function may obscure the gist of the present invention, the detailed description thereof will be omitted.

(Example)

1 is a diagram illustrating an example of a mother substrate.

Referring to FIG. 1, the mother substrate 1 may be a panel for a thin film transistor-liquid crystal display (TFT-LCD). The mother board | substrate 1 consists of the 1st mother board | substrate 2 which has a substantially rectangular plate shape, and the 2nd mother board | substrate 3. As shown in FIG. The first mother substrate 2 and the second mother substrate 3 are stacked up and down. A plurality of unit substrates 2a and 3a are formed on the first and second mother substrates 2 and 3, and the unit substrates 2a and 3a are planes of the first and second mother substrates 2 and 3. It may be arranged in a grid shape on the phase. The first mother substrate 2 is a substrate on which a thin film transistor substrate is formed, and the second mother substrate 3 is a substrate on which a color filter substrate is formed. The mother substrate 1 may be a panel for organic light emitting diodes (OLED) display, which is a kind of panel for a flat panel display.

2 is a view schematically showing the configuration of a substrate cutting equipment 10 equipped with a scribing apparatus according to the present invention.

Referring to FIG. 2, the substrate cutting facility 10 is for cutting a parent substrate (reference numeral 1 of FIG. 1) into a plurality of unit substrates, and includes a loading unit 11, a scribing unit 12, and a braking unit. The unit 13 and the unloading unit 14 is included. The loading unit 11, the scribing unit 12, the breaking unit 13, and the unloading unit 14 may be sequentially arranged in a line. The mother substrate 1 flows into the substrate cutting facility 10 through the loading unit 11, and is separated into a plurality of unit substrates sequentially through the scribing unit 12 and the breaking unit 13, and unloading. It flows out of the board | substrate cutting facility 10 through the part 14. FIG.

The scribing unit 12 forms a scribe line along the arrangement direction of the unit substrates on the first mother substrate 2 or the second mother substrate 3 using the scribing apparatus 12a to be described later. do. The breaking part 13 cuts the unit substrates from the mother substrate 1 by applying a force to a scribe line portion formed in the mother substrate 1 using a break bar (not shown).

3 is a perspective view illustrating an example of a scribing apparatus according to the present invention provided in the scribing unit of FIG. 2, and FIG. 4 is a plan view of the scribing apparatus of FIG. 3.

Hereinafter, the first direction I is a direction in which the scribing units 200 are linearly moved by the first moving unit 300 to be described later, and the second direction II is a direction of the scribing apparatus 12a. In the planar arrangement structure, the first moving unit 300 moves in a straight line by the second moving unit 400 in a direction perpendicular to the first direction (I), and the third direction (III) refers to the first direction (I). And the direction perpendicular to the second direction (II). The first direction I and the second direction II correspond to any one of the arrangement directions of the unit substrates 2a and 3a arranged in a lattice shape on the mother substrate 1, respectively.

3 and 4, the scribing apparatus 12a includes a support member 100, scribing units 200 (200a-1, 200a-2, 200b), and moving units 300, 400. . The support member 100 supports the parent substrate 1. The scribing units 200 are in contact with the mother substrate 1 on the support member 100 to form a scribe line in the first direction (I) and a scribe line in the second direction (II). The first mobile unit 300 of the mobile units 300 and 400 linearly moves the scribing units 200 in the first direction I, and the second mobile unit 400 is the first mobile unit 300. Moves linearly in the second direction (II).

The first mobile unit 300a moves the scribing units 200a-1, 200a-2 in the first direction I to adjust the distance between the scribing units 200a-1, 200a-2. The spacing of the scribe lines in the second direction II is adjusted by adjusting the spacing between the scribing units 200a-1 and 200a-2. When the second direction (II) scribe line is formed, the mother substrate 1 is fixed, and the scribing units 200a-1 and 200a-2 are moved in the second direction (II).

The first moving unit 300b linearly moves the scribing unit 200b in the first direction (I). When the scribe line is formed in the first direction (I), the mother substrate 1 is fixed, and the scribing unit 200b is linearly moved in the first direction (I) by the first moving unit 300b. The spacing of the scribe lines in the first direction (I) is adjusted as the first mobile unit 300 moves by the second mobile unit 400.

The support member 100 has an upper plate 120 and a lower plate 140. The upper plate 122 and the lower plate 124 are flat and generally rectangular in shape, and the upper plate 122 is located above the lower plate 124. The parent substrate 1 is placed on the upper plate 122. Top plate 122 has an area that is similar to or greater than the parent substrate 1. A plurality of holes (not shown) connected to the vacuum line (not shown) are formed on the upper surface of the upper plate 124, and the mother substrate 1 may be fixed to the upper plate 124 by vacuum pressure. In addition, the upper plate 122 or the lower plate 124 may additionally be provided with a clamp (not shown) for fixing the parent substrate 1 to the upper plate 122.

The scribing units 200 include first scribing units 200a-1 and 200a-2 and a second scribing unit 200b. The first scribing units 200a-1 and 200a-2 are provided side by side in the first direction (I), and the second scribing unit 200b is the first scribe along the second direction (II). It may be provided on one side of the ice units (200a-1, 200a-2). The first scribing units 200a-1 and 200a-2 form a scribe line in the second direction (II) on the mother substrate 1, and the second scribing unit 200b is the mother substrate 1. In Fig. 1, a scribe line in the first direction (I) is formed.

In the present embodiment, a case where two scribing units 200a-1 and 200a-2 are provided as the first scribing units 200a-1 and 200a-2 will be described as an example. Of course, critical units can be deployed. The first scribing units 200a-1 and 200a-2 are moved in the first direction I by the first mobile unit 300a to be described later to adjust the spacing.

As shown in FIG. 5, the first scribing unit 200a-1 has two scribers 220a-1 and 240a-1 disposed side by side in the first direction I and the first scribing unit 200a-1. The scribing unit 200a-2 has two scribers 220a-2 and 240a-2 arranged side by side in the first direction I and the second scribing unit 200b has the first direction. It has two scribers 220b and 240b arranged side by side in (I). Since the scribers 220a-1, 240a-1, 220a-2, 240a-2, 220b, 240b have the same configuration, the following describes the scribers 220a-1 of one of them. The description of 240a-1,220a-2,240a-2,220b, 240b will be omitted.

FIG. 7 is a perspective view of the scriber of FIG. 5, FIG. 8 is a partial cross-sectional view of the lower end of the scriber of FIG. 7, and FIG. 9 is a plan view of the scribing wheel of FIG. 8.

7 to 9, the scriber 220a-1 has a scribing wheel 222, a support 224, a pressing member 226, and a vibrator 228. The scribing wheel 222 contacts the mother substrate 1 and rotates to form a scribe line on the mother substrate 1 during the scribing process. As the scribing wheel 222, a wheel made of diamond may be used. A circular through hole 222a is formed in the center of the scribing wheel 222, and the edge 222b of the scribing wheel 222 is sharply provided.

The scribing wheel 222 is supported on the support 224. The support 224 has a body 224a and a shaft pin 224b. The lower surface of the body 224a is formed with a groove 225 penetrating the body 224a in one direction. The shaft pin 224b has a long rod shape having a circular cross section. The axial pin 224b is located in the groove 225 in a direction perpendicular to the longitudinal direction of the groove 225. Both ends of the shaft pin 224b are fixed to the body 224a. The shaft pin 224b passes through the through hole 222b formed in the scribing wheel 222. When the scribing wheel 222 is supported by the shaft pin 224b, the scribing wheel 222 is partly located in the groove 225, and part of it protrudes below the support 224.

The pressing member 226 may press the scribing wheel 222 such that the scribing wheel 222 may press the mother substrate 1 with a predetermined force when the scribing wheel 222 contacts the mother substrate 1. Pressurize. In one example, the pressing member 226 is positioned above the support 224 and presses the scribing wheel 222 by pressing the support 224 downward using pneumatic pressure.

The vibrator 228 applies vibration to the scribing wheel 222 during the scribing process. The vibrator 228 is mounted inside the body 224a, and an ultrasonic vibrator may be used as the vibrator 228.

3 and 4, the first moving unit 300a moves the first scribing units 200a-1 and 200a-2 in the first direction I to provide the parent substrate 1. The first scribing units 200a-1 and 200a-2 are aligned with the cut line in the second direction (II) of the image. The first moving unit 300b moves the second scribing unit 200b along the cutting direction line in the first direction I on the mother substrate 1. The linear movement of the first scribing units 200a-1 and 200a-2 and the linear movement of the second scribing unit 200b are guided by the guide member 370.

The first moving unit 300a includes first vertical supports 310, first brackets 330-1 and 330-2, and a first driving member 350. The first vertical supports 310 are disposed to be spaced apart by a predetermined distance in the second direction (II). The guide member 370 is fixedly installed on the upper ends of the first vertical supports 310, and the longitudinal direction of the guide member 370 is aligned in the first direction (I). The upper and lower surfaces of the guide member 370 are provided with grooves 372 and 374 extending along the length direction.

The first scribing unit 200a-1 is coupled to the guide member 370 by the first bracket 330-1, and the first scribing unit 200a-2 is the first bracket 330-2. Is coupled to the guide member 370. Since the first brackets 330-1 and 330-2 have the same structure, only the first bracket 330-1 will be described below. As shown in FIG. 5, the first bracket 330-1 has a support plate 332 and a coupling plate 334. The support plate 332 has a flat rectangular plate shape and is located on one side of the guide member 370. The coupling plate 334 includes a side plate 334a protruding perpendicularly to the support plate 332 from above and below the support plate 332, and an insertion plate 334b inserted into the groove 372 formed in the guide member 370. Have

The first driving member 350 provides a driving force so that the first brackets 330-1 and 330-2 move linearly along the guide member 370. The first drive member 350 has first lead screws 352 and 354 disposed parallel to the guide member 370. As shown in FIG. 6A, the first bracket 330-1 is mounted on the first lead screw 352 so as to be linearly movable, and the first bracket 330-2 is straight on the first lead screw 354. It is mounted to be movable. That is, although the first lead screws 352 and 354 are inserted into the first bracket 330-1, the first lead screw 352 is engaged with the female screw part 335-1 formed in the bracket 330-1. The first lead screw 354 penetrates without contacting the hole 336-1 formed in the first bracket 330-1. Similarly, although the first lead screws 352 and 354 are inserted into the first bracket 330-2, the first lead screw 352 contacts the hole 336-2 formed in the first bracket 330-2. While not penetrating through, the first lead screw 354 meshes with the female screw portion 335-2 formed in the bracket 330-2.

When the first lead screw 352 is driven, the first bracket 330-1 is linearly moved, but the first bracket 330-2 is not moved, and when the first lead screw 354 is driven, the first bracket 330 is driven. -1) is not moved but the first bracket 330-2 is linearly moved. By this driving method, the first scribing unit 200a-1 connected to the first bracket 330-1 and the first scribing unit 200a-2 connected to the first bracket 330-2 are formed. It is moved along the two directions (II), the distance between the first scribing units (200a-1, 200a-2) can be adjusted.

One end of the first lead screw 352 is connected to the first driver 353 to provide a rotational force, and one end of the first lead screw 354 is connected to the first driver 355 to provide the rotational force. As the first and second drivers 353 and 355, a driver such as a motor may be used. Although the assembly including the motor and the lead screw as the first driving member 350 has been described as an example, various drivers that can provide linear driving force to the first brackets 330-1 and 330-2, such as cylinders, may be used. Can be.

As shown in FIG. 5, the first scribing unit 200a-1 is mounted on the support plate 332 of the first bracket 330-1 so as to be movable upward and downward. According to one example, the support plate 332 is formed with slit-shaped guide grooves 331 in the third direction (III), the scribers 220a-1, 240a- of the first scribing unit 200a-1. 1) are respectively coupled to a support shaft (not shown) inserted into the guide grooves 331. The first scribing unit 200a-2 is also connected to the first bracket 330-2 so as to be movable up and down, and the connection structure is the same as that of the first scribing unit 200a-1. Description is omitted.

The first moving unit 300b includes second vertical supports 310 ', a second bracket 330', and a second driving member 350 '. The second vertical supports 310 ′ are disposed to be spaced apart from each other in the first direction I by a predetermined distance. In addition, the second vertical supports 310 ′ are disposed such that an upper end thereof may be fixedly coupled to the guide member 370 fixed to the upper ends of the first vertical supports 310.

The first scribing unit 200b is coupled to the guide member 370 by a second bracket 330 '. Since the second bracket 330 'has the same structure as the first bracket 330-1 described above, a description thereof will be omitted.

As shown in FIG. 4, the second driving member 350 ′ provides driving force so that the second brackets 330 ′ linearly move along the guide member 370. The second drive member 350 ′ has a second lead screw 352 ′ disposed parallel to the guide member 370. As shown in FIG. 6B, the second bracket 330 'is mounted on the second lead screw 352' so as to be linearly movable. That is, the female thread part 335 'and the second lead screw 352' formed in the second bracket 330 'are engaged. By this driving method, the second scribing unit 200b connected to the second bracket 330 'is moved along the first direction (I).

One end of the second lead screw 352 'is connected with a second driver 353' providing a rotational force. As the second driver 353 ', a driver such as a motor may be used. Although the assembly including the motor and the lead screw as the second driving member 350 ′ has been described as an example, various drivers capable of providing a linear driving force to the second bracket 330 ′, such as a cylinder, may be used.

The first scribing unit 200b is connected to the second bracket 330 'so as to be movable up and down, and the connection structure is the same as that of the first scribing unit 200a-1 described above. Is omitted.

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The second moving unit 400 has supports 422 and 424, a guide member 440, and a third drive member (460 in FIG. 4). The supports 422 and 424 are disposed on both sides of the vertical supports 310 and 310 ′ of the first mobile units 300a and 300b, respectively. The driving member 460 linearly moves the vertical supports 310 and 310 ′ of the first moving units 300a and 300b in the second direction II. The drive member 460 has a lead screw 462 and a third driver 464 that provides rotational force thereto. The lead screw 462 is positioned between the support 422 and the support 424 such that its length direction is in the second direction (II), and both ends thereof are coupled to the support 422 and the support 424, respectively. The lead screw 462 meshes with female threads (not shown) formed in the vertical supports 310 and 310 'of the first moving units 300a and 300b, respectively. The third driver 464 is installed on the support 422 or the support 424 and is connected to one end of the lead screw 462. A motor may be used as the third driver 464. Although the assembly including the motor 464 and the lead screw 462 as the driving member 460 has been described as an example, in addition, it is possible to provide linear driving force to the vertical supports of the mobile units, such as a linear motor. Various drivers can be used.

The guide member 440 guides the vertical supports 310 and 310 ′ of the first moving units 300a and 300b to linearly move in the second direction II. The guide member 440 is installed to be parallel to the lead screws 462. For example, the guide member 440 may be provided in a rod shape, and both ends thereof are fixedly coupled to the support 422 and the support 424, respectively. At this time, the guide member 440 is inserted into a hole (not shown) formed in the vertical supports (310, 310 ') of the first mobile unit (300a, 300b).

The operations of the first mobile units 300a and 300b and the second mobile unit 400 described above are controlled by the control unit 400. The controller 400 may include first drivers 353 and 355 of the first mobile unit 300a, a second driver 353 ′ of the first mobile unit 300b, and a third driver of the second mobile unit 400. The operation of 464 is controlled. By the control of the first drivers 353 and 355, the first scribing units 200a-1 and 200a-2 are moved in the first direction I, and the first scribing units 200a-1 and 200a. The spacing between -2) can be adjusted. By the control of the second driver 353 ', the second scribing unit 200b may be moved in the first direction (I). By the control of the third driver 464, the vertical supports 310 and 310 ′ of the first moving units 300a and 300b may be linearly moved in the second direction II.

Referring to the process of manufacturing a flat panel display panel using a substrate cutting equipment having the configuration as described above is as follows.

10 is a flowchart sequentially illustrating a process of manufacturing a flat panel display using a substrate cutting apparatus according to the present invention.

Referring to FIG. 10, a mother substrate is loaded (S 10), and then a scribing process S 20 for a first mother substrate and a scribing process S 30 for a second mother substrate are performed. . In this manner, the scribing process is performed on the first and second mother substrates, and then the braking process is performed (S40). When the parent substrate 1 is separated into a plurality of unit substrates by the braking process, the unit substrates are unloaded (S 60), and the cleaning process is performed on the unit substrates.

Next, a process of performing a scribing process on the mother substrate 1 using the scribing apparatus 12a according to the present invention will be described.

11A to 11K illustrate a process of generating a scribe line on a mother substrate using a scribing apparatus according to the present invention.

The parent substrate 1 is placed on the upper plate 120 of the supporting member 100 (FIG. 11A), and the first moving units 300a and 300b are preset by the second moving unit 400, that is, The first cutting schedule line a of the parent substrate 1 moves to a position aligned with the second scribing unit 200b (FIG. 11B).

Thereafter, in the state where the second scribing unit 200b is aligned with the first cutting schedule line a of the parent substrate 1 along the first direction I, the second of the first moving unit 300b The driver 353 'is driven to move the second scribing unit 200b in one direction of the mother substrate 1. At this time, one of the scribers 220b and 240b of the scribers 220b and 240b of the second scribing unit 200b is moved downward so as to be positioned at a height capable of contacting the mother substrate 1. (FIG. 11C)

In this state, the second driver 353 'of the first moving unit 300b is driven to move the second scribing unit 200b across the mother substrate 1 along the first direction I. FIG. . At this time, a scriber contacting the mother substrate 1 among the scribers 220b and 240b of the second scribing unit 200b forms a crack on the mother substrate 1. A scribing line is formed on the mother substrate 1 by forming cracks continuously along the cutting schedule line a. After the formation of the scribe line, the scribers 220b and 240b of the second scribing unit 200b are moved upwards (FIG. 11D).

The first moving units 300a and 300b are linearly moved in the second direction II by the second driving unit 400. The first moving units 300a and 300b move to a predetermined position, that is, to a position where the second cutting schedule line b of the mother substrate 1 is aligned with the second scribing unit 200b. In addition, one of the scribers 220b and 240b of the scribers 220b and 240b of the second scribing unit 200b is moved downward so as to be positioned at a height capable of contacting the mother substrate 1. (FIG. 11E)

Thereafter, the second driver 353 'of the second moving unit 300b is driven to move the second scribing unit 200b across the mother substrate 1 in the first direction I. At this time, a scriber contacting the mother substrate 1 among the scribers 220b and 240b of the second scribing unit 200b forms a crack on the mother substrate 1. A scribing line is formed on the mother substrate 1 by forming cracks continuously along the cutting schedule line b. After the formation of the scribe line, the scribers 220b and 240b of the second scribing unit 200b are moved upwards (FIG. 11F).

A scribe line is formed on the mother substrate 1 along the remaining cutting lines c and d by repetition of the processes as described above, and then, the first moving unit 300a and 300b is moved to the second moving unit. It is linearly moved in the second direction (II) by 400. When the first mobile units 300a and 300b are moved to a predetermined position, the movement of the first mobile units 300a and 300b is stopped (FIG. 11G).

Thereafter, the drivers 353 and 355 of the first mobile unit 300a are driven to adjust the distance between the first scribing units 200a-1 and 200a-2. The first scribing unit 200a-1 is moved to the predetermined position (that is, the first scribing unit 200a-1 is to be cut by the first moving unit 300a of the mother substrate 1. ), And the first scribing unit 200a-2 is moved to the predetermined position (that is, the first scribing unit 200a-2 is to be cut to the cutting line of the parent substrate 1). position f)). In this case, one of the scribers 220a-1 and 240a-1 of the scribers 220a-1 and 240a-1 of the first scribing units 200a-1 may contact the mother substrate 1. Is moved downward to be positioned at a height, and one of the scribers 220a-2 and 240a-2 of the first scribing units 200a-2 is connected to the mother substrate. It is moved downward to be at a height that can be contacted with (1) (FIG. 11H).

The first moving unit 300a in a state where the first scribing units 200a-1 and 200a-2 are aligned with the cutting schedule lines e and f of the mother substrate 1 along the second direction II. , 300b is linearly moved in the second direction (II) by the second moving unit 400. When the first moving units 300a and 300b are moved to a predetermined position, that is, to a position where a scribe line is formed on the mother substrate 1 along cutting lines e and f of the mother substrate 1, the first movement unit is moved. The movement of 300a and 300b stops (FIG. 11I).

Thereafter, the first scribing units 200a-1 and 200a-2 are driven to drive the drivers 353 and 355 of the first mobile unit 300a so that the first scribing units 200a-1 and 200a-2 are aligned with the cutting lines g and h. Move the units 200a-1 and 200a-2. By the first moving unit 300a, the first scribing unit 200a-1 has a predetermined position (i.e., the first scribing unit 200a-1 has a cut line g of the mother substrate 1). ), And the first scribing unit 200a-2 is moved to the predetermined position (that is, the first scribing unit 200a-2 is to be cut to the cutting line of the parent substrate 1). position), which is aligned to h). In this case, one of the scribers 220a-1 and 240a-1 of the scribers 220a-1 and 240a-1 of the first scribing units 200a-1 may contact the mother substrate 1. Is moved downward to be positioned at a height, and one of the scribers 220a-2 and 240a-2 of the first scribing units 200a-2 is connected to the mother substrate. It is moved downward to be at a height that can be in contact with (1) (FIG. 11J).

The first moving unit 300a in a state where the first scribing units 200a-1 and 200a-2 are aligned with the cutting schedule lines g and h of the mother substrate 1 along the second direction II. , 300b is linearly moved in the second direction (II) by the second moving unit 400. The first mobile unit is moved when the first mobile units 300a and 300b are moved to a predetermined position, that is, a position where a scribe line is formed on the mother substrate 1 along cutting lines g and h of the mother substrate 1. The movement of 300a and 300b stops (FIG. 11K).

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and changes without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited thereto. The scope of protection of the present invention should be interpreted by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

The drawings described below are for illustrative purposes only and are not intended to limit the scope of the invention.

1 is a view showing an example of a mother substrate,

2 is a view schematically showing the configuration of a substrate cutting equipment equipped with a scribing apparatus according to the present invention;

3 is a perspective view showing an example of a scribing apparatus according to the present invention provided in the scribing unit of FIG.

4 is a plan view of the scribing apparatus of FIG.

5 is an enlarged view of a portion “A” of FIG. 3;

6A and 6B are cross-sectional views illustrating a coupling relationship between the brackets and lead screws of FIG. 5;

7 is a perspective view of the scriber of FIG.

8 is a partial cross-sectional view of the lower end of the scriber of FIG.

9 is a plan view of the scribing wheel of FIG. 8;

10 is a flowchart sequentially illustrating a process of manufacturing a flat panel display using a substrate cutting apparatus according to the present invention;

11A to 11K illustrate a process of generating a scribe line on a mother substrate using a scribing apparatus according to the present invention.

<Description of Symbols for Main Parts of Drawings>

1: parent substrate 100: support member

200a-1,200a-2,200b: scribing unit 300a, 300b: mobile unit

400: control unit

Claims (2)

An apparatus for performing a scribing process for separating a parent substrate having a plurality of unit substrates formed into a unit substrate, A support member on which the parent substrate is placed; A scribing unit for forming a scribe line on the mother substrate; And a moving unit to move the scribing unit along an arrangement direction of the unit substrates formed on the mother substrate. The method of claim 1, The mobile unit, A first moving unit which supports the scribing unit to be linearly movable along a first direction; And a second moving unit for linearly moving the first moving unit along a second direction perpendicular to the first direction.

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