KR20090122035A - Cleaning device, method and agent for cleaning conductive member for fabricating organic electro luminescene display device - Google Patents

Abstract

PURPOSE: A cleaning device, a method and an agent for cleaning a conductive member for fabricating an organic electro luminescence display device are provided to separate an organic material attached to the surface of a conductive element or a metal mask by generating a bubble surround the conductive element or the metal mask. CONSTITUTION: A cleaning device, a method and an agent for cleaning a conductive member for fabricating an organic electro luminescence display device includes an electrolytic bath(100), an electrolyte, a terminal, and an electrode. The electrolyte(20) is put inside the electrolytic bath, and the terminal(300) is dipped into the electrolyte and supplies a voltage to the conductive element in which the organic material is adhered. The electrode(400) corresponds to the conductive element and is dipped into the electrolyte.

Description

CLEANING DEVICE, METHOD AND AGENT FOR CLEANING CONDUCTIVE MEMBER FOR FABRICATING ORGANIC ELECTRO LUMINESCENE DISPLAY DEVICE}

Embodiments relate to a cleaning apparatus, a cleaning method, and an electrolytic cleaning chemical for cleaning a conductive member used in a manufacturing process of an organic light emitting display device.

As information processing technology is developed, organic light emitting display devices and the like are widely used.

In order to form the organic light emitting display device, a conductive member such as a metal mask is used. Such a metal mask may be contaminated with an organic material or the like, causing a failure of the organic light emitting display device.

Embodiments provide a cleaning apparatus, a cleaning method, and an electrolytic cleaning chemical for efficiently cleaning a conductive member used in a manufacturing process of an organic light emitting display device.

Cleaning apparatus according to the embodiment is an electrolytic cell; An electrolyte solution contained in the electrolyzer; A terminal immersed in the electrolyte and applying a voltage to the conductive member to which the organic material is attached; Corresponding to the conductive member, and includes an electrode contained in the electrolyte.

According to another embodiment, a cleaning method includes providing a metal mask to which an organic material is attached; Dipping the metal mask in an electrolyte; And applying a voltage to an electrode contained in the metal mask and the electrolyte.

The electrolytic cleaning agent according to another embodiment includes an alkali salt, a water-soluble organic acid salt, an inhibitor for reducing damage to the conductive member, and water.

The conductive member or the metal mask is connected to the terminal to which the voltage is applied, so that the conductive member or the metal mask is immersed in the electrolyte or the electrolytic cleaning agent.

Accordingly, bubbles or the like may be generated around the conductive member or the metal mask to separate the organic material attached to the surface of the conductive member or the metal mask.

Therefore, the cleaning apparatus, the cleaning method, and the electrolytic cleaning agent according to the embodiment can efficiently clean the conductive member used in the manufacturing process of the organic light emitting display device.

1 is a block diagram illustrating an apparatus for cleaning a metal mask used in a manufacturing process of an organic light emitting display device according to an embodiment.

The process of forming an organic electro luminescence display device (hereinafter referred to as an organic EL) includes a process of depositing and patterning various materials on a substrate.

In particular, in order to form the organic EL, an organic light emitting pattern for generating light such as red, green, and blue must be formed on a substrate (eg, a glass substrate).

In this case, a metal mask is disposed on the substrate, and the organic light emitting pattern is formed using the metal mask.

The metal mask is a conductor and is made of inbar or stainless steel. A plurality of hole patterns corresponding to the organic light emitting pattern is formed in the metal mask.

In this case, an organic material may be attached to the metal mask to form an organic light emitting pattern different from the pattern to be formed on the substrate.

Examples of the organic material include residues of photoresists used to manufacture the metal masks, residues of tapes used to wrap the metal masks, and residues that may be attached during migration or cleaning.

Examples of the material used as the photoresist include casein, noblock resin, polyvinylacetate (PVA), polyvinylphenol (PVP), and the like.

In addition, the metal mask may be used several times to form the organic light emitting panel. In this case, a material used as the organic light emitting pattern is attached to the metal mask, which may cause a defect in manufacturing the organic EL.

In addition, various materials may be attached to the metal mask.

Referring to FIG. 1, the cleaning apparatus according to the embodiment includes an electrolytic cell 100, an electrolyte solution 20, a power supply device 200, a terminal 300, and an electrode 400.

The electrolyte 20 is filled in the electrolytic cell 100. The metal mask 10 having the organic material attached thereto is connected to the terminal 300 and immersed in the electrolyte 20.

The electrode 400 is also immersed in the electrolyte 20 corresponding to the metal mask 10.

The power supply device 200 applies a negative voltage to the metal mask 10 and a positive voltage to the electrode.

Alternatively, the power supply device 200 may apply a positive voltage to the metal mask 10 and a negative voltage to the electrode 400.

Accordingly, bubbles are generated on the surface of the metal mask 10, and the organic material attached to the metal mask 10 is electrolytically cleaned by the bubbles.

The electrolyte is an aqueous solution containing an alkali salt, a water-soluble organic acid salt, and an inhibitor.

The alkali salts include at least one of hydroxides, carbonates, silicates or phosphates. Here, salt may refer to an alkali metal such as sodium, potassium or the like or an alkaline earth metal such as calcium and barium or the like. In addition, salts may refer to ammonium and the like.

The alkali salts form strong conductive ions that remove the organic material by electrolysis. In addition, the alkali salt causes the electrolyte solution to have high alkalinity.

The water soluble organic salt includes at least one of citrate, succinate, acetate or glycolate.

The water-soluble organic salt performs a buffer function to prevent the pH of the electrolyte solution from changing rapidly. In addition, the water-soluble organic salt assists in removing the organic material.

In addition, the water-soluble organic salt prevents the hydroxide precipitation of metal ions, and serves to maintain the cleaning effect of the electrolyte solution.

The inhibitor prevents the surface of the metal mask from being damaged by corrosion or overreaction by the electrolyte.

The inhibitor may include thiourea, 123-benzotriazole or pyridine-based compounds. In this case, the pyridine-based compound may be a nitrogen or sulfur compound having an unshared electron pair.

In addition, the electrolyte may include a surfactant and the like. The surfactant has an excellent emulsifying effect and prevents re-adhesion of the organic material.

In detail, the electrolyte may include about 20 to 100 g / l potassium hydroxide, about 7 to 50 g / l potassium citrate and about 0.08 g / l to 5 g / l thiourea.

The power supply device applies a DC voltage to the metal mask to be cleaned through the terminal, and applies a DC voltage to the electrode.

In more detail, the power supply applies a negative voltage to the metal mask and a positive voltage to the electrode.

Alternatively, a positive voltage may be applied to the metal mask and a negative voltage may be applied to the electrode.

The power supply device applies a voltage to the metal mask and the electrode so that a current flows through the metal mask and the electrode.

In more detail, a current having a current density of about 1 to 12 A / dm ² flows through the metal mask and the electrode.

The terminal is electrically connected to the power supply and is connected to the metal mask. The terminal has a tong shape.

The electrode is electrically connected to the power supply, and receives a voltage from the power supply.

Examples of materials that can be used as the electrode include iridium oxide, titanium, platinum or nickel.

When a negative voltage is applied to the metal mask and a positive voltage is applied to the electrode, hydrogen bubbles are generated on the surface of the metal mask in the following manner.

2H ⁺ + 2e → H ₂

In addition, oxygen bubbles are generated on the surface of the electrode in the following manner.

4OH ^- → 4e + O ₂ + 2H ₂ O

At this time, the organic material attached to the metal mask is physically removed by the hydrogen bubbles, and since the electrolyte is alkaline, the organic material is chemically removed by the electrolyte.

In addition, since the hydrogen bubbles are generated twice as much as the oxygen bubbles, and hydrogen ions are removed from the surface of the metal mask, the electrolyte on the surface of the metal mask has a stronger alkalinity than other portions.

Therefore, when a negative voltage is applied to the metal mask, the organic material can be removed more efficiently.

The metal mask may be contaminated by various organic materials. In this case, the cleaning apparatus according to the embodiment may physically and chemically remove the organic material attached to the metal mask by an electrolytic cleaning process.

Therefore, the cleaning apparatus according to the embodiment can more efficiently clean conductive members such as metal masks used for producing organic EL.

In addition, the electrolytic cleaning agent, such as the electrolyte according to the embodiment can be more efficiently cleaning the metal mask.

Although the above description has been made based on the embodiments, these are merely examples and are not intended to limit the present invention. Those skilled in the art to which the present invention pertains may not have been exemplified above without departing from the essential characteristics of the present embodiments. It will be appreciated that many variations and applications are possible. For example, each component specifically shown in the embodiment can be modified. And differences relating to such modifications and applications will have to be construed as being included in the scope of the invention defined in the appended claims.

Experimental Example 1

In Experimental Example 1, experiments were made under the following conditions.

First, the electrolyte solution is in the form of an aqueous solution and contains potassium hydroxide, 10 g / l potassium citrate, and 0.1 g / l thiourea. Here, the potassium hydroxide concentration was changed as shown in Table 1, and the experiment.

In addition, the temperature of the electrolyte solution was performed at room temperature, and a voltage was applied to the metal mask and the electrode such that a current having a current density of ² A / dm ² flowed through the metal mask through the power supply.

The time went for 5 minutes and a negative voltage was applied to the metal mask.

As a metal mask, a metal mask made of Invar was used, and a casein residue was attached to the metal mask.

The results according to Experiment 1 in Table 1 were visually observed through the SEM equipment. The result is expressed as follows.

○ (excellent): more than 99% of casein residues are removed

△ (normal): Casein residues removed from 80% to 99%

× (bad): Casein residue is removed below 80%

sample One 2 3 4 5 6 7 8 9 10 11 12 13 Potassium hydroxide (g / l) 0 One 5 10 15 20 25 30 35 40 45 50 100 result × × △ △ △ ○ ○ ○ ○ ○ ○ ○ ○

Experimental Example 2

In Experimental Example 2, experiments were carried out under the following conditions, according to the examples described above.

First, the electrolyte solution is in the form of an aqueous solution and contains 50 g / l potassium hydroxide, potassium citrate, and 0.1 g / l thiourea. Here, the concentration of potassium citrate was changed as shown in Table 2, and the experiment.

In addition, the temperature of the electrolyte solution was performed at room temperature, and a voltage was applied to the metal mask and the electrode such that a current having a current density of ² A / dm ² flowed through the metal mask through the power supply.

The time went for 5 minutes and a negative voltage was applied to the metal mask.

As a metal mask, a metal mask made of Invar was used, and a casein residue was attached to the metal mask.

The results according to Experiment 2 in Table 2 were visually observed through the SEM equipment. The result is expressed as follows.

○ (excellent): more than 99% of casein residues are removed

△ (normal): Casein residues removed from 80% to 99%

× (bad): Casein residue is removed below 80%

sample One 2 3 4 5 6 7 8 9 10 11 12 13 Potassium Citrate (g / l) 0 One 2 3 4 5 6 7 8 9 10 20 50 result △ △ △ △ △ △ △ ○ ○ ○ ○ ○ ○

Experimental Example 3

In Experimental Example 3, the experiment was conducted under the following conditions, according to the embodiment described above.

Firstly, the electrolyte solution is in the form of an aqueous solution and contains 50 g / l potassium hydroxide, 10 g / l potassium citrate, thiourea. Here, the concentration of thiourea was tested as shown in Table 3.

In addition, the temperature of the electrolyte solution was performed at room temperature, and a voltage was applied to the metal mask and the electrode such that a current having a current density of ² A / dm ² flowed through the metal mask through the power supply.

The time went for 5 minutes and a negative voltage was applied to the metal mask.

As a metal mask, a metal mask made of Invar was used, and a casein residue was attached to the metal mask.

The corrosion state of the metal mast according to Experiment 3 in Table 3 was visually observed through the SEM equipment. The result is expressed as follows.

○ (excellent): no corrosion

△ (normal): Corrosion occurs on some surfaces of the metal mask

× (bad): Corrosion occurs on most surfaces of metal masks

sample One 2 3 4 5 6 7 8 9 10 11 12 13 Thiourea (g / l) 0 0.01 0.02 0.03 0.05 0.08 0.1 0.2 0.5 One 2 3 5 result × △ △ △ △ ○ ○ ○ ○ ○ ○ ○ ○

Experimental Example 4

In Experimental Example 4, experiments were carried out under the following conditions, according to the examples described above.

First, the electrolyte solution is in the form of an aqueous solution and contains 50 g / l potassium hydroxide, 10 g / l potassium citrate, and 0.1 g / l thiourea.

Here, the temperature of the electrolyte was changed as shown in Table 4, and the voltage was applied to the metal mask and the electrode such that a current having a current density of ² A / dm ² flowed through the metal mask through the power supply.

The time went for 5 minutes and a negative voltage was applied to the metal mask.

As a metal mask, a metal mask made of Invar was used, and a casein residue was attached to the metal mask.

The results according to Experiment 4 in Table 4 were visually observed through the SEM equipment. The result is expressed as follows.

○ (excellent): more than 99% of casein residues are removed

△ (normal): Casein residues removed from 80% to 99%

× (bad): Casein residue is removed below 80%

sample One 2 3 4 5 6 7 8 9 10 11 12 On (℃) Room temperature 30 35 40 45 50 55 60 70 80 90 100 result ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

Experimental Example 5

In Experimental Example 5, experiments were carried out under the following conditions, according to the examples described above.

First, the electrolyte solution is in the form of an aqueous solution and contains 50 g / l potassium hydroxide, 10 g / l potassium citrate, and 0.1 g / l thiourea.

Here, the temperature of the electrolyte solution was performed at room temperature, and a voltage was applied to the metal mask and the electrode such that a current having a current density changed as shown in Table 5 flows through the power supply device.

The time went for 5 minutes and a negative voltage was applied to the metal mask. In addition, a metal mask made of Invar was used as the metal mask, and a casein residue was attached to the metal mask.

The results according to Experiment 5 in Table 5 were visually observed through the SEM equipment. The result is expressed as follows.

○ (excellent): more than 99% of casein residues are removed

△ (normal): Casein residues removed from 80% to 99%

× (bad): Casein residue is removed below 80%

sample One 2 3 4 5 6 7 8 9 10 11 12 Current density (A / dm ² ) 0.1 0.2 0.3 0.5 One 1.5 2 2.5 3 5 10 25 result × × × △ △ ○ ○ ○ ○ ○ ○ ○

Experimental Example 6

In Experimental Example 6, experiments were carried out under the following conditions, according to the examples described above.

First, the electrolyte solution is in the form of an aqueous solution and contains 50 g / l potassium hydroxide, 10 g / l potassium citrate, and 0.1 g / l thiourea.

Here, the temperature of the electrolyte solution was performed at room temperature, and a voltage was applied to the metal mask and the electrode so that a current having a current density of ² A / dm ² flows through the power supply device.

The time was progressed for various times as shown in Table 6, the negative voltage was applied to the metal mask. In addition, a metal mask made of Invar was used as the metal mask, and a casein residue was attached to the metal mask.

The results according to Experiment 6 in Table 6 were visually observed through the SEM equipment. The result is expressed as follows.

○ (excellent): more than 99% of casein residues are removed

△ (normal): Casein residues removed from 80% to 99%

× (bad): Casein residue is removed below 80%

sample One 2 3 4 5 6 7 8 9 10 11 12 Time (min) 0.5 One 1.5 2 2.5 3 3.5 4 4.5 5 10 20 result × △ △ △ △ ○ ○ ○ ○ ○ ○ ○

1 is a block diagram illustrating an apparatus for cleaning a metal mask used in a manufacturing process of an organic light emitting display device according to an embodiment.

Claims (12)

Electrolytic cell; An electrolyte solution contained in the electrolyzer; A terminal immersed in the electrolyte and applying a voltage to the conductive member to which the organic material is attached; A cleaning device for cleaning the conductive member corresponding to the conductive member and used in the manufacturing process of the organic light emitting display device including an electrode contained in the electrolyte. The cleaning apparatus of claim 1, wherein the conductive member is a metal mask for forming a pattern, and the organic material includes at least one of polyvinylacetate, casein, noblock resins, and polyvinylphenol. The apparatus of claim 1, wherein the organic material generates at least one of red, green, and blue light. The cleaning apparatus of claim 1, wherein the electrolyte solution includes an alkali salt, a water-soluble organic acid salt, and an inhibitor for reducing damage to the conductive member. The method of claim 4, wherein the alkali salt comprises at least one of hydroxide, carbonate, silicate and phosphate salt, The organic acid salt includes at least one of citrate, succinate, acetate and glycolate; The inhibitor comprises at least one of a thiourea, 123- benzotriazole and a pyridine-based compound. The cleaning apparatus of claim 1, wherein a negative voltage is applied to the terminal, and a positive voltage is applied to the electrode. Providing a metal mask to which an organic material is attached; Dipping the metal mask in an electrolyte; And And applying a voltage to the metal mask and the electrode immersed in the electrolyte. The method of claim 7, wherein in the step of dipping the metal mask in an electrolyte, And the electrolyte solution comprises an alkali salt, a water-soluble organic acid salt, and an inhibitor for reducing damage to the conductive member. 8. The method of claim 7, wherein providing the metal mask Disposing the metal mask on a substrate for forming an organic light emitting display device; Forming a pattern made of the organic material on the substrate using the metal mask; And Removing the metal mask from the substrate. An electrolytic cleaning agent in the form of an aqueous solution for cleaning a conductive member used in an organic light emitting display device manufacturing process comprising an alkali salt, a water-soluble organic acid salt and an inhibitor for reducing damage to the conductive member. The electrolytic cleaning agent according to claim 10, wherein the alkali salt comprises at least one of phosphate among hydroxide, carbonate and silicate, and the organic acid salt includes at least one of citrate, succinate, acetate and glycolate. The electrolytic cleaning agent of claim 10, wherein the inhibitor comprises at least one of a thiourea, 123-benzotriazole, and a pyridine compound.

Images