KR20090105560A - Organic light emitting display device and method of manufacturing the same - Google Patents

Abstract

PURPOSE: An organic electroluminescent display device and a manufacturing method thereof are provided to prevent degradation of an electrical property of an active layer due to a following process by forming an insulation layer as an anti-etching layer. CONSTITUTION: A substrate(100) including a first region and a second region is prepared. A gate electrode(104a) is formed on the substrate of the first region. A first electrode(104b) is formed on the substrate of the second region. A first insulation layer(106) is formed on a top part including the gate electrode and the first electrode. An oxide semiconductor layer is formed on the first insulation layer, and is patterned. An active layer(108a) including a channel region, a source region, and a drain region is formed on the first insulation layer of the top part of the gate electrode. A second electrode(108b) is formed on the first insulation layer of the top part of the first electrode. A second insulation layer is formed on the top part including the active layer and the second electrode. The source region and the drain region are exposed by patterning the second insulation layer. A source electrode and a drain electrode(112a,112b) are connected to the source region and the drain region. A third electrode(112c) is arranged on the second insulation layer of the top part of the second electrode. An organic electroluminescent diode is connected to the source electrode or the drain electrode.

Description

Organic light emitting display device and method of manufacturing the same {Organic light emitting display device and method of manufacturing the same}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic light emitting display device including a thin film transistor and a capacitor, and a method of manufacturing the same. More particularly, the present invention relates to a thin film transistor including an oxide semiconductor as an active layer and a stacked structure connected in parallel. The present invention relates to an organic light emitting display device including a capacitor and a method of manufacturing the same.

The organic light emitting display device is a next generation display device having self-luminous characteristics, and has excellent characteristics in view angle, contrast, response speed, power consumption, and the like, compared to a liquid crystal display device (LCD).

The organic light emitting display device includes an organic light emitting diode comprising an anode electrode, an organic thin film layer, and a cathode electrode, and the organic light emitting diode is connected in a matrix manner between a scan line and a signal line. And a passive matrix method for constituting pixels, and an active matrix method in which an operation of each pixel is controlled by a thin film transistor (TFT) serving as a switch.

In the active matrix organic light emitting display device, a thin film transistor includes an active layer providing a channel region, a source region, and a drain region, usually formed of a semiconductor material such as amorphous silicon or poly-silicon. When the active layer is formed of amorphous silicon, it is difficult to implement a driving circuit that operates at high speed due to low mobility. When the active layer is formed of polysilicon, a separate compensation circuit must be added because of high mobility but nonuniform threshold voltage. There is this.

In addition, the conventional thin film transistor manufacturing method using low temperature poly-silicon (LTPS) has a problem that it is difficult to apply to a large-area substrate because expensive processes such as laser heat treatment and the like is difficult to control characteristics. .

In order to solve this problem, researches using an oxide semiconductor as an active layer have recently been conducted.

Japanese Laid-Open Patent Publication No. 2004-273614 discloses a thin film transistor using an oxide semiconductor containing zinc oxide (ZnO) or zinc oxide (ZnO) as a main component.

An oxide semiconductor containing zinc oxide (ZnO) as a main component is evaluated as an amorphous and stable material. When the oxide semiconductor is used as an active layer, a thin film transistor can be manufactured by a conventional low temperature polysilicon (LTPS) process, and 300 ° C. The process becomes possible even at the following low temperatures.

However, thin film transistors using an oxide semiconductor as an active layer have higher off current than conventional thin film transistors using a low temperature polysilicon as an active layer, and thus process development and characteristic improvement are required to satisfy the electrical characteristics of the device. It is true.

As one method for reducing the influence of leakage current due to high off current, a capacitor having a large capacitance may be used. In order to secure a large capacitance, an area of the capacitor needs to be increased.

SUMMARY OF THE INVENTION An object of the present invention is to provide an organic light emitting display device and a method of manufacturing the same, which can ensure the capacitance of a capacitor without increasing the area.

According to an aspect of the present invention, an organic light emitting display device includes: a substrate including a first region and a second region; A gate electrode formed on the substrate in the first region and a first electrode formed on the substrate in the second region; A first insulating layer formed over the gate electrode and the first electrode; An active layer formed of an oxide semiconductor on the first insulating layer above the gate electrode and including a channel region, a source region, and a drain region; and a second electrode formed of an oxide semiconductor on the first insulating layer above the first electrode. ; A second insulating layer formed over the active layer and the second electrode and patterned to expose the source and drain regions; A source electrode and a drain electrode connected to the source and drain regions, and a third electrode formed on the second insulating layer on the second electrode; And an organic light emitting diode connected to the source electrode or the drain electrode.

According to another aspect of the present invention, an organic light emitting display device includes a substrate including a first region and a second region, a gate electrode formed on the substrate of the first region, and the second region. A first electrode formed on the substrate of; A first insulating layer formed over the gate electrode and the first electrode; An active layer formed of an oxide semiconductor on the first insulating layer on the gate electrode and including a channel region, a source region, and a drain region; A second insulating layer formed over the active layer and patterned to expose the source and drain regions and the first insulating layer on the first electrode; A source electrode and a drain electrode connected to the source and drain regions, and a second electrode formed on the first insulating layer on the first electrode; A third insulating layer formed on the source electrode, the drain electrode, and the second electrode and patterned to expose the source electrode or the drain electrode; A lower electrode formed on the third insulating layer and connected to the source electrode or the drain electrode, and a third electrode disposed on the second electrode; A pixel defining layer formed on an upper portion of the lower electrode and the third electrode and patterned to expose a predetermined portion of the lower electrode; An organic thin film layer formed on the exposed anode electrode; And an upper electrode formed on the organic thin film layer.

According to another aspect of the present invention, there is provided a method of manufacturing an organic light emitting display device, the method including: preparing a substrate including a first region and a second region; Forming a gate electrode on the substrate in the first region, and forming a first electrode on the substrate in the second region; Forming a first insulating layer on the top including the gate electrode and the first electrode; After forming an oxide semiconductor layer on the first insulating layer and patterning, an active layer including a channel region, a source region and a drain region is formed on the first insulating layer on the gate electrode, the active layer on the first electrode Allowing a second electrode to be formed on the first insulating layer; Forming a second insulating layer over the active layer and the second electrode, and patterning the second insulating layer to expose the source region and the drain region; Forming a source electrode and a drain electrode connected to the source and drain regions, and a third electrode disposed on the second insulating layer on the second electrode; And forming an organic light emitting diode connected to the source electrode or the drain electrode.

According to another aspect of the present invention, there is provided a method of manufacturing an organic light emitting display device, the method including: preparing a substrate including a first region and a second region; Forming a gate electrode on the substrate in the first region, and forming a first electrode on the substrate in the second region; Forming a first insulating layer on the top including the gate electrode and the first electrode; Forming an active layer including a channel region, a source region, and a drain region on an oxide semiconductor on the first insulating layer on the gate electrode; Forming a second insulating layer on the active layer, and patterning the second insulating layer to expose the source and drain regions and the first insulating layer on the first electrode; Forming a source electrode and a drain electrode connected to the source and drain regions, and a second electrode disposed on the first insulating layer on the first electrode; Forming a third insulating layer over the source and drain electrodes and the second electrode and patterning the third insulating layer to expose the source electrode or the drain electrode; Forming a lower electrode connected to the source electrode or the drain electrode and a third electrode disposed on the third insulating layer on the second electrode; Forming a pixel defining layer on the lower electrode and the third electrode and patterning the pixel defining layer to expose a predetermined portion of the lower electrode; Forming an organic thin film layer on the lower electrode; And forming an upper electrode on the organic thin film layer.

The present invention forms the active layer of the thin film transistor as an oxide semiconductor layer and allows the oxide semiconductor layer in the channel region to be protected by the insulating layer. By allowing the insulating layer to serve as an etch stop layer, the degradation of the electrical properties of the active layer due to damage occurring in subsequent processes is prevented.

In addition, the present invention allows a capacitor having a structure connected in parallel to be formed in the process of forming a thin film transistor. Capacitors having a stacked structure connected in parallel can secure a desired level of capacitance without increasing the area of the capacitor. Therefore, the resolution can be increased by minimizing the area occupied by the capacitor and increasing the aperture ratio.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. The following embodiments are provided to those skilled in the art to fully understand the present invention, and may be modified in various forms, and the scope of the present invention is limited to the embodiments described below. no.

1 is a cross-sectional view illustrating an organic light emitting display device according to a first embodiment of the present invention.

The substrate 100 made of an insulator includes a thin film transistor forming region T and a capacitor forming region C, and a buffer layer 102 on the substrate 100 of the thin film transistor forming region T and the capacitor forming region C. Is formed.

A gate electrode 104a is formed on the buffer layer 102 of the thin film transistor forming region T, and a first electrode 104b is formed on the buffer layer 102 of the capacitor forming region C, and the gate electrode 104a and The first insulating layer 106 is formed on the upper surface including the first electrode 104b. The first insulating layer 106 is used as the gate insulating layer of the thin film transistor and the first dielectric of the capacitor.

An active layer 108a made of an oxide semiconductor and including a channel region, a source region, and a drain region is formed on the first insulating layer 106 on the gate electrode 104a, and the first insulation on the first electrode 104b is formed. On the layer 106, a second electrode 108b made of an oxide semiconductor is formed.

A second insulating layer 110 is formed on the upper surface including the active layer 108a and the second electrode 108b, and the second insulating layer 110 is exposed so that the active layer 108a of the source region and the drain region is exposed. Holes are formed. The second insulating layer 110 is used as an etch stop layer for protecting the active layer 108a of the channel region and the second dielectric of the capacitor.

On the second insulating layer 110, source and drain electrodes 112a and 112b connected to the active layer 108a of the source and drain regions through contact holes, and a third electrode disposed on the second electrode 108b. 112c is formed. In this case, the third electrode 112c is formed to be connected to the first electrode 104b. Therefore, a capacitor including the first electrode 104b, the first insulating layer 106, and the second electrode 108b, and the second electrode 108b, the second insulating layer 110, and the third electrode 112c. The capacitors are connected in parallel.

An organic light emitting diode is connected to the source electrode or the drain electrode 112a or 112b. The organic light emitting diode includes an anode electrode, an organic thin film layer, and a cathode electrode, and the anode electrode is connected to the source electrode or the drain electrode 112a and 112b. The organic thin film layer has a structure in which a hole transport layer, an organic light emitting layer, and an electron transport layer are stacked, and may further include a hole injection layer and an electron injection layer.

2 is a cross-sectional view for describing an organic light emitting display device according to a second embodiment of the present invention.

The substrate 200 made of an insulator includes a thin film transistor forming region T and a capacitor forming region C, and a buffer layer 202 on the substrate 200 of the thin film transistor forming region T and the capacitor forming region C. Is formed.

The gate electrode 204a is formed on the buffer layer 202 of the thin film transistor forming region T, and the first electrode 204b is formed on the buffer layer 202 of the capacitor forming region C, and the gate electrode 204a and The first insulating layer 206 is formed on the upper surface including the first electrode 204b. The first insulating layer 206 is used as the gate insulating layer of the thin film transistor and the first dielectric of the capacitor.

An active layer 208 made of an oxide semiconductor and including a channel region, a source region, and a drain region is formed on the first insulating layer 206 over the gate electrode 204a. A second insulating layer 210 is formed on the upper surface including the active layer 208, and the second insulating layer 210 is formed on the first layer of the active layer 208 and the first electrode 204b of the source and drain regions. The insulating layer 206 is patterned to expose. The second insulating layer 210 is used as an etch stop layer for protecting the active layer 208 in the channel region.

On the second insulating layer 210, source and drain electrodes 212a and 212b connected to the active layers 208 of the exposed source and drain regions are formed, and the first insulating layer (above the first electrode 204b) The second electrode 212c is formed on the 206. A third insulating layer 316 is formed on the upper surface including the source and drain electrodes 212a and 212b and the second electrode 212c, and the source or drain electrode 212a or the third insulating layer 316 is formed on the top surface. Via holes are formed to expose 212b). The third insulating layer 316 is used as the second dielectric of the capacitor while simultaneously planarizing the surface.

An anode 317a connected to the source electrode or the drain electrode 212a or 212b and a third electrode 317b disposed on the second electrode 212c are formed on the third insulating layer 316 through the via hole. In this case, the third electrode 317b is formed to be connected to the first electrode 204b. Therefore, a capacitor including a first electrode 204b, a first insulating layer 206, and a second electrode 212c, and a second electrode 212c, a second insulating layer 316, and a third electrode 317b. The capacitors are connected in parallel.

The pixel defining layer 318 is formed on the upper surface including the anode electrode 317a and the third electrode 317b, and the pixel defining layer 318 is exposed such that a predetermined portion (light emitting area) of the anode electrode 317a is exposed. Is patterned. The organic thin film layer 319 is formed on the exposed anode electrode 317a, and the cathode electrode 320 is formed on an upper surface of the organic thin film layer 319. The organic thin film layer has a structure in which a hole transport layer, an organic light emitting layer, and an electron transport layer are stacked, and may further include a hole injection layer and an electron injection layer.

In the organic light emitting display device configured as described above, the thin film transistor controls transmission of a signal provided for the operation of the organic light emitting diode, and a capacitor having a parallel structure connected in parallel provides a capacitance for maintaining the signal.

3A to 3E are cross-sectional views illustrating a method of manufacturing an organic light emitting display device according to a first embodiment of the present invention. The present invention will be described in more detail through a manufacturing process.

Referring to FIG. 3A, an insulating substrate 100 having a thin film transistor formation region T and a capacitor formation region C is prepared. First, the buffer layer 102 is formed on the substrate 100 of the thin film transistor forming region T and the capacitor forming region C. Referring to FIG. A metal layer is formed on the buffer layer 102 using Mo, MoW, Al, and the like, and is patterned to form a gate electrode 104a on the buffer layer 102 of the thin film transistor forming region T, and the buffer layer of the capacitor forming region C. The first electrode 104b is formed on the 102. Thereafter, a first insulating layer 106 is formed on the upper surface including the gate electrode 104a and the first electrode 104b. The first insulating layer 106 used as the gate dielectric layer of the thin film transistor and the first dielectric of the capacitor is formed of a silicon oxide film (SiOx) or a silicon nitride film (SiNx), or a silicon oxide film (SiOx) and a silicon nitride film (SiNx). It can be formed in a double structure.

Referring to FIG. 3B, an oxide semiconductor layer is formed on the first insulating layer 106 of the thin film transistor forming region T and the capacitor forming region C, and then patterned to form a first insulating layer on the gate electrode 104a. An active layer 108a including a channel region, a source region and a drain region is formed on the 106, and a second electrode 108b is formed on the first insulating layer 106 above the first electrode 104a. The oxide semiconductor layer is formed of a semiconductor material mainly composed of zinc oxide (ZnO), or a semiconductor material in which zinc oxide (ZnO) is doped with indium (In), gallium (Ga), stanium (Sn), or the like. InZnO (IZO), GaOnZnO (GIZO), or the like.

Referring to FIG. 3C, after the second insulating layer 110 is formed on the top surface including the active layer 108a and the second electrode 108b, the second insulating layer 110 may be exposed to expose the active layer 108a of the source and drain regions. Pattern layer 110.

Referring to FIG. 3D, a metal layer is formed of Mo, MoW, Al, AlAd, AlLiLa, etc. on the second insulating layer 110, and then patterned to form a source electrode and a drain connected to the active layer 108a of the source and drain regions. The electrodes 112a and 112b and the third electrode 112c disposed on the second insulating layer 110 on the second electrode 108b are formed. In this case, the third electrode 112c is formed to be connected to the first electrode 104b to form a capacitor including the first electrode 104b, the first insulating layer 106, and the second electrode 108b, and the second electrode ( 108b), the capacitor including the second insulating layer 110 and the third electrode 112c is connected in parallel.

Referring to FIG. 3E, after the third insulating layer 316 is formed on the upper surface including the source and drain electrodes 112a and 112b and the third electrode 112c, the source or drain electrode 112a or 112b is formed. The third insulating layer 316 is patterned so as to be exposed, and an organic light emitting diode connected to the source electrode or the drain electrode 112a or 112b is formed. That is, after forming the anode electrode 317 connected to the source electrode or the drain electrode 112a or 112b, the pixel defining layer 318 is formed on the anode electrode 317. The pixel defining layer 318 is patterned to expose a predetermined portion (light emitting area) of the anode electrode 317, and then an organic thin film layer 319 is formed on the exposed anode electrode 317, and the organic thin film layer 319 is formed on the exposed pixel electrode 317. The cathode electrode 320 is formed on the substrate. The organic thin film layer 319 may have a structure in which a hole transport layer, an organic light emitting layer, and an electron transport layer are stacked, and further include a hole injection layer and an electron injection layer.

4A to 4E are cross-sectional views illustrating a method of manufacturing an organic light emitting display device according to a second embodiment of the present invention, and the present invention will be described in more detail through a manufacturing process.

Referring to FIG. 4A, an insulating substrate 200 in which the thin film transistor forming region T and the capacitor forming region C are defined is prepared. First, the buffer layer 202 is formed on the substrate 200 of the thin film transistor forming region T and the capacitor forming region C. Referring to FIG. A metal layer is formed on the buffer layer 202 with Mo, MoW, Al, and the like, and then patterned to form a gate electrode 204a on the buffer layer 202 of the thin film transistor formation region T, and the buffer layer of the capacitor formation region C. The first electrode 204b is formed on the 202. Thereafter, a first insulating layer 206 is formed on the upper surface including the gate electrode 204a and the first electrode 204b. The first insulating layer 206 used as the gate insulating layer of the thin film transistor and the first dielectric of the capacitor is formed of a silicon oxide film (SiOx) or a silicon nitride film (SiNx), or a silicon oxide film (SiOx) and a silicon nitride film (SiNx). It can be formed in a double structure.

Referring to FIG. 4B, an oxide semiconductor layer is formed on the first insulating layer 206 of the thin film transistor forming region T and the capacitor forming region C, and then patterned to form a first insulating layer on the gate electrode 204a. An active layer 208 including a channel region, a source region and a drain region is formed on 206. The oxide semiconductor layer is formed of a semiconductor material mainly composed of zinc oxide (ZnO), or a semiconductor material in which zinc oxide (ZnO) is doped with indium (In), gallium (Ga), stanium (Sn), or the like. InZnO (IZO), GaOnZnO (GIZO), or the like.

Referring to FIG. 4C, after the second insulating layer 210 is formed on the upper surface including the active layer 208, the active layer 208 of the source and drain regions and the first insulating layer on the first electrode 204b are formed. The second insulating layer 210 is patterned to expose 206.

Referring to FIG. 4D, a metal layer is formed of Mo, MoW, Al, AlAd, AlLiLa, etc. on the second insulating layer 210, and then patterned to form a source electrode and a drain connected to the active layer 208 of the source and drain regions. The electrodes 212a and 212b and the second electrode 212c disposed on the first insulating layer 206 over the first electrode 204b are formed.

Referring to FIG. 4E, after forming the third insulating layer 316 on the upper surface including the source and drain electrodes 212a and 212b and the second electrode 212c, the source or drain electrode 212a or 212b is formed. The third insulating layer 316 is patterned to expose it. The third insulating layer 316 is used as the second dielectric of the capacitor while simultaneously planarizing the surface.

After the conductive layer is formed on the third insulating layer 316 by ITO or the like, the conductive layer is formed on the anode electrode 317a and the second electrode 212c connected to the source electrode or drain electrode 212a or 212b. The third electrode 317b is formed. In this case, the third electrode 317b is formed to be connected to the first electrode 204b, and includes a capacitor including a first electrode 204b, a first insulating layer 206, and a second electrode 212c, and a second electrode ( 212c), the capacitor including the second insulating layer 316 and the third electrode 317b is connected in parallel.

The pixel defining layer 318 is formed on the upper portion including the anode electrode 317 and the third electrode 317b, and then patterned to expose a predetermined portion (light emitting area) of the anode electrode 317. The organic thin film layer 319 is formed on the exposed anode electrode 317, and the cathode electrode 320 is formed on the organic thin film layer 319. The organic thin film layer 319 may have a structure in which a hole transport layer, an organic light emitting layer, and an electron transport layer are stacked, and further include a hole injection layer and an electron injection layer.

An encapsulation substrate (not shown) for encapsulating the pixel area is disposed on the substrates 100 and 200 on which the organic light emitting display device is formed as described above, and the encapsulation substrate is bonded to the substrates 100 and 200 by the encapsulation material.

As described above, the present invention forms the active layers 104a and 204a of the thin film transistor as an oxide semiconductor layer. When the oxide semiconductor layer is used as the active layers 104a and 204a, the active layers 104a and 204a in the channel region are damaged by plasma during the etching process for forming the source electrodes 112a and 212a and the drain electrodes 112b and 212b. I can wear it. When the oxide semiconductor layer is damaged by the plasma, the surface lattice is broken and oxygen defects are generated. Therefore, the electrical characteristics are deteriorated by the decrease in the resistivity caused by the increase of the concentration of the carrier. Accordingly, the present invention allows the active layers 104a and 204a of the channel region to be protected by the second insulating layers 110 and 210, that is, the second insulating layers 110 and 210 serve as an etch stop layer. As a result, degradation of electrical characteristics due to damage of the active layers 104a and 204a may be prevented.

In addition, the present invention is a capacitor comprising a capacitor consisting of a first electrode 104b, a first insulating layer 106 and a second electrode 108b, a second electrode 108b, a second insulating layer 110 and a third. A parallel structure of a capacitor composed of an electrode 112c, or a capacitor composed of a first electrode 204b, a first insulating layer 206, and a second electrode 212c, a second electrode 212c, and a second insulating layer ( It is formed in a parallel structure of a capacitor consisting of 316 and the third electrode (317b).

The capacitor is composed of a first electrode 104b, a first insulating layer 106, and a second electrode 108b, or a first electrode 204b, a first insulating layer 206, and a second electrode 212c. For example, when the structure is formed only of a structure, when the first insulating layers 106 and 206 are formed of a silicon oxide film having a thickness of 400 mW and a silicon nitride film having a thickness of 800 mW, a capacitance of about 0.392 fF per 1 µm ² can be obtained. In the case where the first insulating layers 106 and 206 are formed of a silicon nitride film having a thickness of 1200 Å, a capacitance of about 0.0473 fF per 1 μm ² can be obtained, and the area of the capacitor must be increased to increase the capacitance. do.

However, in the present invention, by forming the capacitors in a parallel structure as described above, it is possible to secure a predetermined capacitance or more without increasing the area of the capacitor. That is, as the dielectric, when the second insulating layer 110 is formed of polyamide (PA) having a thickness of 5000 kV, a capacitance of about 0.0566 fF per 1 μm ² can be obtained, and the second insulating layer 316 has a thickness of 10000 kPa. When formed with PA, a capacitance of about 0.0283 fF per 1 μm ² can be obtained. Therefore, compared with the case of having one capacitor, it is possible to obtain the effect of reducing the area of about 7 to 14%.

As described above, the preferred embodiment of the present invention has been disclosed through the detailed description and the drawings. The terms are used only for the purpose of describing the present invention and are not used to limit the scope of the present invention as defined in the meaning or claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible from this. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

1 is a cross-sectional view illustrating an organic light emitting display device according to a first embodiment of the present invention.

2 is a cross-sectional view illustrating an organic light emitting display device according to a second embodiment of the present invention.

3A to 3E are cross-sectional views illustrating a method of manufacturing an organic light emitting display device according to a first embodiment of the present invention.

4A to 4E are cross-sectional views illustrating a method of manufacturing an organic light emitting display device according to a second embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

100, 200: substrate 102, 202: buffer layer

104a, 204a: gate electrode 104b, 204b: first electrode

106, 206: First insulating layer 108a, 208: Active layer

108b: second electrode 110, 210: second insulating layer

112a and 212a: source electrode 112b and 212b: drain electrode

112c and 317b: third electrode 316: third insulating layer

317 and 317a: anode electrode 318: pixel defining layer

319: organic thin film layer 320: cathode electrode

Claims (11)

Preparing a substrate including a first region and a second region; Forming a gate electrode on the substrate in the first region, and forming a first electrode on the substrate in the second region; Forming a first insulating layer on the top including the gate electrode and the first electrode; After forming an oxide semiconductor layer on the first insulating layer and patterning, an active layer including a channel region, a source region and a drain region is formed on the first insulating layer on the gate electrode, the active layer on the first electrode Allowing a second electrode to be formed on the first insulating layer; Forming a second insulating layer over the active layer and the second electrode and patterning the second insulating layer to expose the source region and the drain region; Forming a source electrode and a drain electrode connected to the source and drain regions, and a third electrode disposed on the second insulating layer on the second electrode; And And forming an organic light emitting diode connected to the source electrode or the drain electrode. The method of claim 1, wherein the oxide semiconductor layer is formed of zinc oxide (ZnO). The method of claim 2, wherein at least one ion of indium (In), gallium (Ga), and stanium (Sn) is doped into the oxide semiconductor layer. The method of claim 1, wherein the third electrode is formed to be connected to the first electrode. The method of claim 1, wherein the organic light emitting diode comprises: forming a lower electrode connected to the source electrode or the drain electrode; Forming a pixel defining layer on the upper portion including the lower electrode and patterning the semiconductor substrate to expose a predetermined portion of the lower electrode; Forming an organic thin film layer on the lower electrode; And And forming an upper electrode on the organic thin film layer. An organic light emitting display device manufactured by the method of any one of claims 1 to 5. Preparing a substrate including a first region and a second region; Forming a gate electrode on the substrate in the first region, and forming a first electrode on the substrate in the second region; Forming a first insulating layer on the top including the gate electrode and the first electrode; Forming an active layer including a channel region, a source region, and a drain region on an oxide semiconductor on the first insulating layer on the gate electrode; Forming a second insulating layer on the active layer, and patterning the second insulating layer to expose the source and drain regions and the first insulating layer on the first electrode; Forming a source electrode and a drain electrode connected to the source and drain regions, and a second electrode disposed on the first insulating layer on the first electrode; Forming a third insulating layer over the source and drain electrodes and the second electrode and patterning the third insulating layer to expose the source electrode or the drain electrode; Forming a lower electrode connected to the source electrode or the drain electrode and a third electrode disposed on the third insulating layer on the second electrode; Forming a pixel defining layer on the lower electrode and the third electrode and patterning the pixel defining layer to expose a predetermined portion of the lower electrode; Forming an organic thin film layer on the lower electrode; And And forming an upper electrode on the organic thin film layer. The method of claim 7, wherein the oxide semiconductor comprises zinc oxide (ZnO) as a main component. The method of claim 8, wherein at least one ion of indium (In), gallium (Ga), and stanium (Sn) is doped into the oxide semiconductor. The method of claim 7, wherein the third electrode is formed to be connected to the first electrode. An organic light emitting display device manufactured by the method of claim 7.

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