KR20090073476A - Manufacturing apparatus of organic light emitting diodes and manufacturing method of using the same - Google Patents

Abstract

An apparatus and a method for manufacturing an OLED(Organic Light Emitting Diode) device are provided to improve manufacturing efficiency by filling an organic material in a source chamber without interrupting a deposition device. A deposition chamber(110) evaporates an organic material(130) for forming an organic layer in a vacuum condition and at a high temperature. A substrate(140) is mounted on a holder. The substrate is arranged in an upper part of the deposition chamber. A first source chamber and a second source chamber are arranged in a lower part of the deposition chamber. The first and second source chambers are filled with the organic material for forming the organic thin film. A plurality of gates are formed in one side or both sides of the deposition chamber. The first and second source chambers move to the inside or outside of the deposition chamber through a plurality of gates.

Description

Manufacturing apparatus of organic light emitting diodes and manufacturing method of using the same

The present invention relates to an apparatus for manufacturing a semiconductor device and a manufacturing method using the same, and more particularly, to an apparatus for manufacturing an OLED (Organic Light Emitting Diodes) device and a manufacturing method using the same.

As the information society develops, the demand for display devices is increasing in various forms, and in recent years, liquid crystal display devices (LCDs), plasma display panels (PDPs), electro luminescent displays (ELDs), and vacuum fluorescent (VFD) Various flat panel display devices such as displays (OLEDs) and organic light emitting diodes (OLEDs) have been studied, and some of them are already used as display devices in various devices.

Among these flat panel displays, OLED devices are also called organic diodes or organic ELs, and are self-luminous displays that emit light by using electroluminescence, which emits light when a current flows through a fluorescent organic compound.

These OLED devices can be driven at low voltage, can be made thin, and have a wide viewing angle and fast response speed, and unlike LCD, image quality does not change even when viewed from the side, and there is no afterimage on the screen. In addition, the small screen has an advantageous price competitiveness due to the image quality of the LCD and the simple manufacturing process.

In recent years, the use of glass as the substrate material of an OLED device allows the use of a film, which makes it possible to carry a curved display.

These OLED devices have three colors (Red, Green, Blue) independent pixel method, color conversion method (CCM), color filter method in the color display method, and according to the light emitting materials used in the display The passive matrix is divided into passive matrix and active matrix.

An OLED device is a principle in which an energy difference between an anode and a cathode is formed on an organic thin film to emit light by forming an anode film, an organic thin film, and a cathode film on a substrate in order and applying a voltage between the anode and the cathode. That is, the excitation energy remaining while the injected electrons and holes are combined is generated as light to emit light. At this time, since the wavelength of the light generated according to the amount of the organic material and the dopant can be adjusted, it is possible to implement full color.

1 is a view showing the structure of a general OLED device.

Referring to FIG. 1, the OLED device 60 includes an anode 41, a hole injection layer 42, a hole transfer layer 43, and a substrate on the substrate 40. The light emitting layer 44, the electron transfer layer 45, the electron injection layer 46, and the cathode are sequentially stacked.

Here, indium tin oxide (ITO) having a small sheet resistance and excellent permeability is mainly used for the anode 41. The organic thin film is composed of a multilayer of a hole injection layer 42, a hole transport layer 43, a light emitting layer 44, an electron transport layer 45, and an electron injection layer 46 in order to increase luminous efficiency. 44) Alq ₃ , TPD, PBD, m-MTDATA, TCTA and the like are used. As the cathode 47, a LiF-Al metal film is mainly used. In addition, since the organic thin film is very weak to moisture and oxygen in the air, an encapsulation film (not shown) is formed on the top to increase the life of the device.

As described above, organic thin films such as the hole injection layer 42, the hole transport layer 43, the light emitting layer 44, the electron transport layer 45, and the electron injection layer 46 are generally thermally deposited using heat deposition equipment ( thermal deposition).

2 is a view showing a deposition apparatus of an organic thin film according to the prior art.

Referring to FIG. 2, the deposition apparatus 1 of the organic thin film according to the related art includes a deposition chamber 10 and a deposition chamber formed so as to evaporate organic materials contained in the source chamber 20 by heating the inside to a high temperature. It is located in the inner lower end of the 10) consists of a source chamber 20 containing the organic material for forming the organic foil of the OLED device.

In the deposition apparatus 1 according to the prior art, a substrate holder (not shown) is disposed on the inside of the deposition chamber 10, and the substrate 40 of the OLED is mounted on the substrate holder. In this case, the shadow mask is positioned to closely adhere to the substrate 10 adhered to the substrate holder.

Then, when the inside of the deposition chamber 10 is heated to a vacuum state and a high temperature, the organic material 30 contained in the source chamber 20 located at the lower end of the deposition chamber 10 is evaporated. The evaporated organic material 30 is deposited on the substrate 40 to deposit the hole injection layer 42, the hole transport layer 43, the light emitting layer 44, the electron transport layer 45, the electron injection layer 46, and the like. An organic thin film for forming is formed on the substrate 40.

Such a deposition apparatus 1 according to the related art and a manufacturing method for forming an organic thin film using the same, when the organic thin film is formed on a predetermined number of substrates 40, all organic materials contained in the source chamber 20 are exhausted.

Subsequently, in order to form an organic thin film on the substrate 40, as shown in Table 1, the internal temperature of the deposition chamber 10 is lowered to 100 ° C. or less to enable the organic material to be filled, and the source chamber 20 is lowered to the deposition chamber 10. After charging the organic material to the source chamber 20 by leaving the factory, it is formed in the vacuum state of the deposition chamber 10 and the internal temperature is raised to the process temperature to proceed the manufacturing process.

In the deposition apparatus 1 according to the related art and a manufacturing method for forming an organic thin film on the substrate 40 using the same, a deposition process is performed for one week by filling an organic material in the source chamber 20 once. do. As shown in FIG. 3, the operation of the deposition apparatus 1 is stopped between process operation times for forming the organic thin film on the substrate 40, and the organic material is charged into the source chamber 20 to deposit the organic deposition apparatus 1. At least 20 hours is required to form the environment to restart the) has a problem that the manufacturing efficiency of the OLED device is lowered.

The deposition apparatus according to the related art and a manufacturing method of forming an organic thin film on a substrate using the same, the operation of the deposition apparatus is stopped between the operation time of forming the organic thin film on the substrate, and the organic material is filled in the source chamber It takes 20 hours in the step of forming the environment for restarting the deposition apparatus has a problem that the manufacturing efficiency of the OLED device is lowered.

In order to solve the above problems, an OLED device manufacturing apparatus and a manufacturing method using the same according to an embodiment of the present invention by filling the organic material in the source chamber without interruption of the deposition apparatus for depositing an organic thin film on the substrate OLED It aims at improving the manufacturing efficiency of an element.

An apparatus for manufacturing an OLED device according to an embodiment of the present invention for achieving the above object is a vapor deposition chamber for evaporating an organic material for forming an organic thin film by heating the interior in a vacuum state and high temperature, and is mounted on the holder A first source chamber or a second source chamber filled with a substrate disposed at an upper end of the deposition chamber, an organic material for forming an organic foil on the substrate, and provided with a moving means and disposed at an inner lower end of the deposition chamber; And a plurality of gates formed on one side or both sides of the deposition chamber with a plurality of opening and closing means for allowing each of the first and second source chambers to enter and exit the deposition chamber. It is done.

According to an aspect of the present invention, there is provided a method of manufacturing an OLED device, comprising: a first step of arranging a first source chamber filled with a substrate and an organic material in a deposition chamber; A second step of forming an organic thin film on the substrate by evaporating the organic material filled in the first source chamber, and a second source filled with the organic material at a time when the organic material filled in the first source chamber is exhausted. A third step of introducing the chamber into the deposition chamber through a second gate having a plurality of opening and closing means; and after the organic material filled in the first source chamber is completely exhausted, the first source chamber A fourth step of leaving the deposition chamber outside through the first gate having an opening and closing means, and the organic material filled in the second source chamber disposed inside the deposition chamber is exhausted. According to the time of the first source material into the chamber so that wearing the deposition chamber in a fifth step of filling the organic material in the first source chamber characterized in that formed.

An OLED device manufacturing apparatus and a manufacturing method using the same according to an embodiment of the present invention can be filled with an organic material in the source chamber without interruption of the deposition apparatus for forming an organic thin film on the substrate. In this way, when forming an organic thin film on a predetermined number of substrates, the manufacturing time, which previously required 128 hours, was reduced to 80 hours, thereby improving the efficiency of the manufacturing process by 37% compared to the deposition apparatus and manufacturing method according to the prior art. Can be.

Hereinafter, the technical objects and features of the present invention will be apparent from the description of the accompanying drawings and the embodiments. Looking at the present invention in detail.

4 to 6 is a view showing a deposition apparatus of an organic thin film according to an embodiment of the present invention.

4 to 6, the deposition apparatus 100 of the organic thin film according to the embodiment of the present invention heats the interior to a high temperature to evaporate the organic materials contained in the first and second source chambers 120a and 120b. The first and second source chambers 120a and 120b formed in the deposition chamber 110, the first and second source chambers 120a and 120b in which the organic materials for forming the organic thin film of the OLED element are disposed at the lower end of the deposition chamber 110. The first and second source chambers 120a and 120b are alternately put into and out of the deposition chamber 110 without being lowered in the vacuum state and temperature inside the deposition chamber 110 by being formed on one side or both sides of the deposition chamber 110. It comprises a gate (150a, 150b) formed as possible.

In the deposition apparatus 100, a substrate holder (not shown) is disposed above the interior of the deposition chamber 110, and the substrate 140 of the OLED is mounted on the substrate holder. In this case, the shadow mask is positioned to closely contact the substrate 110 adhered to the substrate holder.

The inside of the deposition chamber 110 is heated to a vacuum state and a high temperature, and the organic material 130 contained in the source chambers 120a and 120b located at the lower end of the deposition chamber 110 is evaporated. At this time, the evaporated organic material 130 is deposited on the substrate 140, an organic thin film for forming a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer, etc. on the substrate 140 Will be formed.

As the organic thin film is formed on the substrate 140, the organic materials filled in the source chambers 120a and 120b are exhausted. Deposition apparatus 100 according to an embodiment of the present invention is a plurality of source chambers (120a, 120b) in order to prevent the manufacturing process is interrupted by filling the source chamber with the organic material generated in the deposition apparatus in the prior art described above And a plurality of gates 150a and 150b such that each of the plurality of source chambers 120a and 120b is input and exited into and out of the deposition chamber 110 without changing the process environment of the deposition chamber 110. do.

Here, the first and second source chambers 120a and 120b are provided with a movable means that can move itself, and the second source chamber (in accordance with the time when the organic material filled in the first source chamber 120a is completely consumed) 120b is received into the deposition chamber 110 through the second gate 150b corresponding to the deposition chamber 110.

Each of the plurality of gates 150a and 150b has the source chambers 120a and 120b entering and leaving the deposition chamber 110 as well as the deposition chamber 110 when the source chambers 120a and 120b are entered and exited. In order to prevent changes in the process environment of the (110) is formed in a double structure. That is, separate opening and closing means are provided on each of the outer side and the inner side of the deposition chamber 110. In addition, each of the plurality of gates 150a and 150b is provided with a vacuum pump for forming the inside of the gates 150a and 150b in a vacuum state.

Referring to the driving of the gates 150a and 150b, the first source chamber 120a is disposed in the deposition chamber 110 and the organic thin film forming process on the substrate 140 is performed. When the exhaustion time of the organic material filled in 120a arrives, the second source chamber 120b filled with the organic material is received into the deposition chamber 110. At this time, the first opening and closing means formed on the outer side of the deposition chamber 110 among the plurality of opening and closing means provided in the second gate 150b is opened so that the second source chamber 120b is received in the second gate 150b. . Thereafter, the first opening and closing means is closed, and the inside of the second gate 150b is formed in the same vacuum as the internal environment of the deposition chamber 110 by using the provided vacuum pump. Thereafter, the second opening and closing means formed on the inner side of the deposition chamber 110 is opened so that the second source chamber 120b is received into the deposition chamber 110. Through this, a source chamber filled with an organic material may be always disposed in the deposition chamber 110 without changing the process environment inside the deposition chamber 110 and stopping the process.

After the second source chamber 120b filled with the organic material is introduced into the deposition chamber 110, when the organic material filled in the first source chamber 120a is completely consumed, the first source chamber 120a is It is shipped out of the deposition chamber 110 through the first gate 150a. At this time,

The inside of the first gate 150a is formed in the same vacuum as the internal environment of the deposition chamber 110 by using the vacuum pump provided in the first gate 150a. Thereafter, among the plurality of opening and closing means provided in the first gate 150a, the second opening and closing means formed inside the deposition chamber 110 is opened so that the first source chamber 120a is received in the first gate 150a. . Thereafter, the second opening and closing means is closed, and the first opening and closing means formed on the outer side of the deposition chamber 110 is opened so that the first source chamber 120a is released to the outside of the deposition chamber 110. Through this, the source chamber in which the organic material is exhausted may be released to the outside of the deposition chamber 110 without changing the process environment inside the deposition chamber 110 and stopping the process.

In the first source chamber 120a, the new deposition apparatus 100 is operated while the deposition apparatus 100 is operated so that the organic material charged in the second source chamber 120b may be reinserted into the deposition chamber 110 at a time when the organic material charged in the second source chamber 120b is exhausted. Organic matter is filled. Thereafter, the first source chamber 120a is received into the deposition chamber 110 through the first gate 150a at a time when the organic material filled in the second source chamber 120b is exhausted.

Through such a deposition apparatus 100 and a manufacturing method using the same according to an embodiment of the present invention, a process environment in which an organic material for forming an organic thin film on the substrate 140 may be evaporated at all times inside the deposition chamber 110. 7, the organic thin film may be formed on the substrate 140 without interruption in the manufacturing process using the deposition apparatus 100.

Through this, as shown in Figure 8, when forming an organic thin film on a predetermined number of substrates to reduce the manufacturing time, which was conventionally 128 hours to 80 hours to prepare in comparison with the deposition apparatus and manufacturing method according to the prior art The efficiency of the process can be improved by 37%.

The present invention described above is not limited to the above-described embodiments and the accompanying drawings, and various substitutions, modifications, and changes can be made without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

1 is a view showing the structure of a typical OLED device.

2 is a view showing a deposition apparatus of an organic thin film according to the prior art.

3 is a view showing a manufacturing method and a manufacturing time using the deposition apparatus of the organic thin film according to the prior art.

4 to 6 is a view showing a deposition apparatus of an organic thin film according to an embodiment of the present invention.

7 and 8 are a view showing a manufacturing method and a manufacturing time using the deposition apparatus of the organic thin film according to an embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

1, 100: deposition apparatus 10, 110: deposition chamber

20, 120a, 120b: source chamber 30, 130: organic matter

40, 140: substrate 150a, 150b: gate

Claims (6)

A deposition chamber for evaporating an organic material to form an organic thin film by heating the interior to a vacuum state and a high temperature; A substrate mounted to a holder and disposed at an upper end of the deposition chamber; A first source chamber or a second source chamber filled with an organic material for forming an organic foil on the substrate and provided with a moving means and disposed at an inner lower end of the deposition chamber; And a plurality of gates formed on one side or both sides of the deposition chamber with a plurality of opening and closing means for allowing each of the first and second source chambers to enter and exit the deposition chamber. An OLED device manufacturing apparatus. The method of claim 1, A plurality of opening and closing means formed on each of the plurality of gates, the first opening and closing means formed on an outer side of the deposition chamber; And a second opening / closing means formed in the inner portion of the deposition chamber. The method of claim 2, Each of the plurality of gates comprises a vacuum pump for forming an interior in a vacuum state. A first step of disposing a substrate and a first source chamber filled with an organic material in the deposition chamber; A second step of forming an organic thin film on the substrate by heating the inside of the deposition chamber in a vacuum state and a predetermined temperature to evaporate the organic material filled in the first source chamber; A third step of receiving the second source chamber filled with the organic material into the deposition chamber through the second gate provided with a plurality of opening and closing means in accordance with the timing at which the organic material filled in the first source chamber is exhausted; After the organic material charged in the first source chamber is completely exhausted, a fourth step of leaving the first source chamber outside the deposition chamber through a first gate having a plurality of opening and closing means; A fifth material filling the first source chamber with the organic material so that the first source chamber is reinserted into the deposition chamber at a time when the organic material filled in the second source chamber disposed inside the deposition chamber is exhausted; Method for producing an OLED device, characterized in that it comprises a step. The method of claim 4, wherein In the third step of receiving a second source chamber filled with an organic material into the deposition chamber, Opening the first opening / closing means formed on the outer side of the deposition chamber among the plurality of opening / closing means provided in the second gate to receive the second source chamber into the second gate; After closing the first opening / closing means, forming the inside of the second gate in a vacuum state; And opening the second opening / closing means formed in the deposition chamber inner part of the plurality of opening / closing means to receive the second source chamber into the deposition chamber. The method of claim 5, wherein In the fourth step of leaving the first source chamber exhausted organic matter to the outside of the deposition chamber, Forming a vacuum inside the second gate; Opening the second opening / closing means formed inside the deposition chamber among the plurality of opening / closing means provided in the first gate to receive the first source chamber into the first gate; And closing the second opening / closing means and opening the first opening / closing means formed in the deposition chamber outer side of the plurality of opening / closing means to release the first source chamber to the outside of the deposition chamber. Method for manufacturing an OLED device characterized in that.

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