KR20090053150A - Substrate oscillating apparatus for rapid thermal process - Google Patents

Abstract

In the rapid thermal processing substrate rocking device according to the present invention, the rocking plate 140 is rocked using the rocking motor 102 which is lifted and lowered by the lifting means 101. The swinging motor 102 has a rotation axis divided into a lower center rotation side 103a, an eccentric shaft 103b, and an upper center rotation shaft 103c, and the lower center rotation shaft 103a and the upper center rotation shaft 103c are the motor center shaft. It is on R1 and the eccentric shaft 103b is eccentrically located in the motor central shaft R1 between the lower center rotary shaft 103a and the upper center rotary shaft 103c. The oscillation cam 105 is installed in the eccentric shaft 103b. The swinging plate 140 is formed with a swinging hole 305 into which the swinging cam 105 is fitted. A bearing 105a is installed between the swinging cam 105 and the eccentric shaft 103b so that the swinging cam 105 can rotate independently about the eccentric shaft 103b. According to the present invention, since the substrate can be rotated horizontally and can be horizontally swinged in all directions, the substrate can be uniformly heated.

Rapid Heat Treatment, Oscillation, Rotation, Eccentricity, LM Guide

Description

Substrate oscillating apparatus for rapid thermal process

1 is a view for explaining a conventional substrate rotation type rapid heat treatment apparatus;

2 is a conceptual view illustrating that the substrate is uniformly heated when the substrate is horizontally rotated and the substrate is horizontally swinged in all directions according to the present invention;

3 is a view showing a comparison of heat overlapping intervals in a case where only the horizontal rotation of the substrate and the horizontal rotation and free horizontal fluctuation together;

4 is a view for explaining a substrate rocking apparatus for rapid heat treatment according to the present invention;

5 is a view for explaining an operation process of the substrate rocking apparatus for rapid heat treatment of FIG.

6 is a view from above of FIG. 5;

7 is a view showing a movement trajectory of the rocking plate 140 of FIG.

8 is a view for explaining the four-way horizontal free movement means 130;

9 is a view for explaining the case where the rocking means according to the present invention is installed in the middle of the rocking plate (140).

<Description of reference numbers for the main parts of the drawings>

10: heating lamp 15a, 15b: heat overlapping section

17a, 17b: oxide film 20: substrate

101: lifting means 102: swing motor

103a: lower center pivot 103b: eccentric shaft

103c: upper center pivot 105: rocking cam

105a, 106a: Bearing 106: Centering Cam

110: substrate rotating means 120: base plate

130: four-way horizontal movement means 131, 133: LM guide

131a, 133a: LM rails 131b, 133b: LM block

140: rocking plate 305: rocking hole

306: centering hole

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate oscillation apparatus for rapid heat treatment, and more particularly to a substrate oscillation apparatus for horizontal oscillation of a substrate in all directions.

The most important issue in a rapid heat treatment (RTP) apparatus is heating the substrate to the desired temperature in a short time. However, it must be accompanied by uniform heating of the substrate at this time. In particular, as the substrate is enlarged, such uniform heating is not properly performed, which causes a lot of troubles.

In order to solve the problem of uniform heating of the substrate, an apparatus for horizontally rotating the substrate during the rapid heat treatment has been proposed. 1 is a view for explaining a conventional substrate rotation type rapid heat treatment apparatus.

As shown in FIG. 1A, a plurality of heating lamps 10 in the rapid thermal processing apparatus are disposed adjacent to the substrate 20 relatively close to the upper portion of the substrate 20. Various types of arrangements of the heating lamps 10 have been proposed for uniform heating of the substrate 20. However, no matter what arrangement, the irradiation of light is overlapped as shown in the drawing, resulting in a problem of a heat overlapping section of the substrate 10. do.

Therefore, when the substrate 20 is rotated horizontally, an annular thermal overlapping section 15a is formed as shown in FIG. 1B. If the oxide film is grown on the substrate 20 by the rapid thermal processing apparatus, the thickness of the oxide film 17a becomes thicker along the trajectory of the thermal overlapping section 15a as shown in FIG. 17a) is grown.

As described above, simply rotating the substrate horizontally does not prevent the substrate from being heated unevenly. Therefore, it is necessary to further provide freedom of movement of the substrate to prevent the thermal overlapping section and the non-thermal overlapping section from appearing separately on the substrate.

Accordingly, a technical object of the present invention is to provide a rapid thermal processing substrate rocking device that can solve the problem that the substrate is unevenly heated by horizontally swinging the substrate in all directions.

In accordance with another aspect of the present invention, there is provided a substrate thermal device for rapid thermal treatment.

The rotating shaft is divided into a lower center rotation side, an eccentric shaft, and an upper center rotation shaft, wherein the lower center rotation shaft and the upper center rotation shaft are on a motor center axis, and the eccentric shaft is between the lower center rotation axis and the upper center rotation axis. Oscillating motor located eccentrically in the;

Elevating means for elevating the oscillating motor;

A rocking cam installed on the eccentric shaft; And

And a rocking plate in which a rocking hole into which the rocking cam is fitted is formed and is ultimately connected to the substrate support.

It is preferable that a bearing is installed between the swinging cam and the eccentric shaft so that the swinging cam can rotate independently with respect to the eccentric shaft.

The rocking cam and the rocking hole are preferably in the form of a truncated cone that narrows upward.

A centering cam is preferably installed at the upper center rotation shaft, and in this case, the rocking plate extends upwardly from the rocking hole so that the centering cam can be fitted to form a centering hole.

Preferably, the centering cam and the centering hole have a shape of an inverted truncated cone that is narrowed downward.

It is preferable that a bearing is installed between the centering cam and the upper center rotating shaft so that the centering cam can rotate independently with respect to the upper center rotating shaft.

When the swinging cam is raised and inserted into the swinging hole, the centering cam moves away from the centering hole, and when the centering cam descends and is inserted into the centering hole, the swinging cam is used for the swinging. The rocking cam and the centering cam are installed to be separated under the hole.

The horizontal free moving means is installed on the base plate, and the oscillating plate is preferably mounted on the horizontal free moving means to translate in the horizontal direction.

The horizontal free moving means,

A lower LM guide on which the LM block is placed above the LM rail;

An upper LM guide having an LM block disposed below the LM rail and guiding linear movement in a direction orthogonal to the lower LM guide; And

And a connector connecting the LM block of the lower LM guide and the LM block of the upper LM guide so that the LM block of the lower LM guide and the LM block of the upper LM guide move together as a set.

Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention will be described in detail. The following examples are only presented to understand the content of the present invention, and those skilled in the art will be capable of many modifications within the technical spirit of the present invention. Therefore, the scope of the present invention should not be construed as limited to these embodiments.

2 is a conceptual view illustrating that the substrate is uniformly heated when the substrate is rotated horizontally and the substrate is horizontally swinged in all directions according to the present invention. When the substrate 20 is simply horizontally rotated as shown in FIG. 2A, an annular thermal overlapping section 15a is generated. However, as shown in FIG. 2B, when the substrate 20 is horizontally rotated and random oscillation occurs, thermal overlap occurs uniformly, thereby obtaining a uniform thermal overlapping section 15b.

FIG. 3 is a view showing a comparison between thermal overlapping sections in a case where the substrate is rotated only horizontally and when both horizontal rotation and free horizontal fluctuation are combined. In the case of only horizontal rotation as shown in Fig. 3A, an annular thermal overlapping section 15a is obtained, and thus an oxide film 17a having a non-uniform thickness is grown. However, when the horizontal rotation and the free horizontal fluctuation are combined as shown in FIG. 3B, a uniform thermal overlapping section 15b is obtained, and thus an oxide film 17b having a uniform thickness is grown.

4 is a view for explaining a substrate rocking apparatus for rapid heat treatment according to the present invention.

Referring to FIG. 4, a 4-direction free motion LM block 130 is installed on a support base plate 120, and a swing plate is disposed on the 4-direction horizontal free movement means 130. (oscillation plate, 140) is placed.

On the swinging plate 140, a substrate rotating means 110 for horizontally rotating the substrate about the R3 axis is provided. The substrate rotating means 110 is ultimately connected to the substrate supporting means (not shown) to rotate the substrate supporting means to rotate the substrate horizontally.

The substrate rotating means 110 may be a substrate rotating apparatus of a multi-pole magnetized magnet method already registered as Korean Patent No. 523674 (October 18, 2005), or a substrate rotating apparatus using a maglev motor. In addition, other means may be used as long as it can rotate a substrate such as a general motor, a servo motor, a step motor, and an air motor.

The swinging module includes a lifting means 101, a swinging motor 102, an oscillation CAM 105, a centering cam 106, and the like. The swinging motor 102 is lifted up and down by the lifting means 101.

When the rocking plate 140 is horizontally oscillated by the rocking module, the entire substrate rotation means 110 is horizontally oscillated, and thus the substrate connected to the substrate rotation means 110 is horizontally oscillated. Since the present embodiment is for explaining a process in which the substrate is horizontally rotated and horizontally swinged, the substrate rotating means 110 is installed on the swinging plate 140, and the substrate support is connected to the substrate rotating means 110. Doing. However, the horizontal swing only without the horizontal rotation also falls within the scope of the present invention, in which case it is not necessary to install the substrate rotating means 110 on the swinging plate 140 and the swinging plate 140 is directly on the substrate support means. Will be connected.

The rotation shaft of the swinging motor 102 is divided into a lower center rotation shaft 103a, an eccentric shaft 103b, and an upper center rotation shaft 103c, and the eccentric shaft 103b is the lower center rotation shaft 103a and the upper center rotation shaft 103c. Located in between. The lower center rotation shaft 103a and the upper center rotation shaft 103c are located on the center axis R1 of the motor, but the eccentric shaft 103b is located on the eccentric line R2 which is slightly eccentric from the center axis R1 of the motor.

The swinging cam 105 is installed on the eccentric shaft 103b, and the centering cam 106 is installed on the upper center rotary shaft 103c. A bearing 105a is installed between the swinging cam 105 and the eccentric shaft 103b so that the swinging cam 105 can rotate independently about the eccentric shaft 103b. In addition, a bearing 106a is also provided between the center cam 106 and the upper center rotary shaft 103c so that the center cam 106 can rotate independently with respect to the upper center rotary shaft 103c.

In the swinging plate 140, the swinging hole 305 into which the swinging cam 105 can be fitted and the centering hole 306 into which the centering cam 106 is fitted are perpendicular to the swinging plate 140. Pierced The centering hole 306 and the swinging hole 305 are connected to each other, and the centering hole 306 is located above the swinging hole 305.

The swinging cam 105 has a truncated conical shape that becomes narrower in the upward direction, and the swinging hole 305 also has a truncated truncated shape so that the swinging cam 105 can be fitted together. The centering cam 106 is in the form of an inverted truncated cone narrowing downward, and the centering hole 306 also has the shape of an inverted truncated cone so that the centering cam 106 can be fitted together.

When the swinging cam 150 is raised and fitted into the swinging hole 105, the centering cam 106 is separated from the top of the centering hole 306, and the centering cam 106 descends to lower the centering hole ( When fitted to the 306, the swinging cam 105 is provided with a swinging cam 105 and the centering cam 106 so as to be separated from the bottom of the swinging hole 105.

FIG. 5 is a view for explaining an operation process of the rapid thermal processing substrate rocking apparatus of FIG.

Initially, as indicated by reference numeral A in FIG. 5A, the centering cam 106 is fitted into the centering hole 306, and thus the swinging cam 105 is separated below the swinging hole 305. . At this time, the substrate rotating means 110 and the swinging motor 102 are operated.

The swing cam 105 does not contribute to the movement of the swing plate 140 because the swing cam 105 is separated below the swing hole 305. Since the bearing 106a is installed between the upper center rotation shaft 103c and the center grip cam 106, the center grip cam 106 rotates independently of the upper center rotation shaft 103c, so that the center grip cam 106 is rotated. Even if the swinging motor 102 rotates in the state of being fitted in the centering hole 306, the centering cam 106 also does not contribute to the movement of the swinging plate 140. Accordingly, in the state of FIG. 5A, the substrate is rotated only by the substrate rotating means 110.

Next, lifting and lowering of the swinging motor 102 occurs by the lifting means 101 as shown in FIG. 5B. Then, as indicated by the reference B, the swing cam 105 is fitted into the swing groove 305, and instead, the center cam 106 is separated above the center catch groove 306.

Since the swinging cam 105 and the swinging groove 305 are all in the shape of a truncated cone, the upper and lower widths of the swinging cam 105 are caught by the upper side of the swinging groove 305 so that no further lifting occurs. Do not. Due to the excessive rise of the lifting means 101, the pushing force between the swinging cam 105 and the swinging plate 140 may be excessively taken into consideration, so that the lifting means 101 is cushioned by using an elastic body. What is necessary is just to install an apparatus (not shown). Such a shock absorber may be installed between the lifting means 101 and the swinging motor 102.

In the state of FIG. 5A, since the centering cam 106 is fitted into the centering groove 306, the swing plate 140 is aligned with respect to the center axis R1 of the motor. However, as shown in FIG. 5B, when the centering cam 106 is separated from the centering groove 306 and the swinging cam 150 is inserted into the swinging groove 105, the swinging plate 140 may be eccentric line R2. Sorted by criteria. Therefore, the rocking plate 140 moves horizontally by the rocking radius T1. The swing radius T1 will be the distance between the central axis R1 and the eccentric line R2.

The bearing 105a is provided between the eccentric shaft 103b and the swinging cam 106, so that the swinging cam 160 is out of the eccentric shaft 103b. Therefore, the swinging plate 140 does not move horizontally by the rotation of the swinging motor 102, but only moves the swinging radius T1 horizontally.

When the swing motor 102 continues to rotate in such a state, the eccentric shaft 103b is on the right side, as indicated by reference B in FIG. 5B, and then as indicated by reference C in FIG. 5C. 103c) moves to the left. Then the rocking plate 140 is moved to the left.

5B and 5C are for explaining the division operation, it seems to move horizontally only to the left and right, but considering the continuous operation therebetween, in fact, the horizontal swing motion in all directions as will be described later.

When the heat treatment is completed, the lifting means 101 is lowered as shown in FIG. 5D. The centering cam 106 is then fitted into the centering groove 306 and the swinging cam 105 is separated below the swinging groove 305. Then, the rotation of the eccentric shaft 103b does not participate in the horizontal swing of the swinging plate 140, so that the swing of the substrate ends and returns to the state of FIG. 5A. That is, while the swinging plate 140 deviates from the motor central axis R1 in the swinging process, the centering cam 106 is fitted into the center catching groove 306 to be matched with the motor center axis R1 again.

Of course, since the heat treatment is finished at this time, the rotation of the substrate rotating means 110 is not performed. Since the centering cam 106 and the centering groove 306 are both inverted truncated conical shapes, the centering cam 105 is caught on the lower side of the centering groove 305 and undesirably lowered when a certain amount of descending occurs. Is prevented.

5A to 5D, it can be seen that the horizontal free movement distance in which the rocking plate translates in the horizontal direction is controlled by the amount of eccentricity.

FIG. 6 is a view looking down from the top of FIG. 5 in order to explain that the rocking plate 140 is horizontally swinged by the rotation of the rocking motor 102, and FIG. will be.

Referring to the correspondence of FIGS. 5, 6, and 7, FIG. 6A corresponds to FIG. 5A, FIG. 6B corresponds to FIGS. 5B and S1, FIG. 6D corresponds to FIGS. 5C and S3, and FIG. 6C. Corresponds to a state between the states of FIGS. 5B and 5C, that is, the S2 state. That is, when the swinging motor 102 rotates one turn counterclockwise, the swinging plate 140 swings along the trajectory of S1-> S2-> S3-> S4.

The swing radius T1 of the swinging plate 140 is larger than the gap between the annular thermal overlapping sections 15a shown in FIG. 2A, which is advantageous to cover the thermal voids between the thermal overlapping sections as in FIG. 2B. .

The rotation of the swinging motor 102 does not contribute to the horizontal rotation of the substrate itself but merely to swing the substrate horizontally. The provision of the bearing 105a between the rocking cam 106 and the eccentric shaft 103b is for smoothing the sliding motion between the rocking cam 106 and the rocking plate 140 during this rocking motion.

8 is a view for explaining the four-way horizontal movement means 130, Figure 7a is a cross-sectional view, Figure 7b is a plan view, Figure 7c is for explaining the movement trajectory of the four-way horizontal freedom movement means 130. .

The four-way horizontal freedom moving means 130 has a structure in which two LM guides 131 and 133 installed to move vertically with each other are stacked with the connector 132 interposed therebetween.

The lower LM guide 131 has a structure in which the LM block 131b is placed on the LM rail 131a, and the upper LM guide 133 has the LM block 133b placed below the LM rail 133a. Rescue. The connector 132 is provided between the LM block 131b of the lower LM guide and the LM block 133b of the upper LM guide so that the LM block 131b of the lower LM guide and the LM block 133b of the upper LM guide move together in sets. Are installed in and fixed connecting them.

Therefore, the LM block 131b of the lower LM guide 131 moves horizontally in the X-axis direction, and the LM rail 133a of the upper LM guide 133 moves horizontally in the Y-axis direction so that two-dimensional horizontal motion in the XY direction is achieved. Happens.

When the rocking plate 140 is horizontally moved with the same trajectory as the reference numeral 135a through the four-way horizontal free moving means 130, virtual circular motion 135b is performed. Then, the swinging plate 140 performs horizontal swinging 135c while translationally moving along the virtual circular motion trajectory 135b. Therefore, the swinging plate 140 can swing while being translated, thereby enabling a more uniform heat treatment.

The rocking means in the present invention does not have to be installed at the edge of the rocking plate 140 as shown in FIG. 4 and may be provided in the middle of the rocking plate 140 as shown in FIG. 9.

As described above, according to the present invention, since the substrate can be horizontally rotated and can be horizontally swinged in all directions, the substrate can be uniformly heated.

Claims (13)

The rotating shaft is divided into a lower center rotation side, an eccentric shaft, and an upper center rotation shaft, wherein the lower center rotation shaft and the upper center rotation shaft are on a motor center axis, and the eccentric shaft is between the lower center rotation axis and the upper center rotation axis. Oscillating motor located eccentrically in the; Elevating means for elevating the oscillating motor; A rocking cam installed on the eccentric shaft; And And a rocking plate on which a rocking hole into which the rocking cam is fitted is formed, and which is ultimately connected to the substrate support. The apparatus of claim 1, wherein a bearing is installed between the oscillating cam and the eccentric shaft so that the oscillating cam can rotate independently of the eccentric shaft. The apparatus of claim 1, wherein the swinging cam has a truncated conical shape that becomes narrower in width, and the swinging hole has a truncated conical shape so that the swinging cam is fitted with the swinging cam. . According to claim 1, wherein the centering cam is installed on the upper center rotation shaft, the oscillating plate extending upward from the swinging hole so that the centering cam can be fitted to form a centering hole A substrate swinging device for rapid thermal processing. 5. The method of claim 4, wherein the centering cam is in the form of an inverted truncated cone becomes narrower toward the bottom, the centering hole is also characterized in that the inverted truncated cone shape so that the centering cam can be fitted to fit. A substrate swinging device for rapid thermal processing. 5. The substrate swing apparatus of claim 4, wherein a bearing is provided between the center cam and the upper center pivot so that the center cam can rotate independently of the upper center pivot. 6. . 5. The method of claim 4, wherein when the swinging cam is raised and fitted into the swinging hole, the centering cam moves away from the centering hole, and when the centering cam descends and is inserted into the centering hole, The swinging cam is a substrate swinging device for rapid thermal processing, characterized in that the swinging cam and the centering cam is installed so as to be separated under the swinging hole. The method of claim 1, further comprising a base plate and a horizontal free moving means installed on the base plate, wherein the swinging plate is mounted on the horizontal free moving means to be installed to translate in a horizontal direction, rapid heat treatment Substrate rocking device for The method of claim 8, wherein the horizontal free movement means, A lower LM guide on which the LM block is placed above the LM rail; An upper LM guide having an LM block disposed below the LM rail and guiding linear movement in a direction orthogonal to the lower LM guide; And And a connector connecting the LM block of the lower LM guide and the LM block of the upper LM guide so that the LM block of the lower LM guide and the LM block of the upper LM guide move together in a set. Substrate rocking device for heat treatment. The substrate for rapid thermal processing according to claim 1, wherein a substrate rotating means is provided on the rocking plate, and the substrate support is connected to the substrate rotating means so that horizontal rotation of the substrate is performed by the substrate rotating means. Rocking device. 12. The apparatus of claim 10, wherein the substrate rotating means is a magnetic levitation motor rotating means or a multipolar magnet magnet rotating means. The apparatus of claim 10, wherein the substrate rotating means rotates about a central axis as any one selected from the group consisting of a general motor, a servo motor, a step motor, and an air motor. 10. The apparatus of claim 8, wherein the horizontal free movement distance at which the rocking plate translates in the horizontal direction is adjusted by an eccentric amount.

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