KR20090052329A - 평면형 테이블 표면을 정렬하기 위한 방법 및 디바이스 - Google Patents

평면형 테이블 표면을 정렬하기 위한 방법 및 디바이스 Download PDF

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Publication number
KR20090052329A
KR20090052329A KR1020097003667A KR20097003667A KR20090052329A KR 20090052329 A KR20090052329 A KR 20090052329A KR 1020097003667 A KR1020097003667 A KR 1020097003667A KR 20097003667 A KR20097003667 A KR 20097003667A KR 20090052329 A KR20090052329 A KR 20090052329A
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KR
South Korea
Prior art keywords
table surface
position sensor
height
movement
baseline
Prior art date
Application number
KR1020097003667A
Other languages
English (en)
Korean (ko)
Inventor
미카엘 호엘
Original Assignee
칼 짜이스 인두스트리엘레 메스테크니크 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 칼 짜이스 인두스트리엘레 메스테크니크 게엠베하 filed Critical 칼 짜이스 인두스트리엘레 메스테크니크 게엠베하
Publication of KR20090052329A publication Critical patent/KR20090052329A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0181—Memory or computer-assisted visual determination

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020097003667A 2006-08-24 2007-08-01 평면형 테이블 표면을 정렬하기 위한 방법 및 디바이스 KR20090052329A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006041657A DE102006041657A1 (de) 2006-08-24 2006-08-24 Verfahren und Vorrichtung zum Ausrichten einer ebenen Tischoberfläche
DE102006041657.0 2006-08-24

Publications (1)

Publication Number Publication Date
KR20090052329A true KR20090052329A (ko) 2009-05-25

Family

ID=38658503

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097003667A KR20090052329A (ko) 2006-08-24 2007-08-01 평면형 테이블 표면을 정렬하기 위한 방법 및 디바이스

Country Status (4)

Country Link
JP (1) JP2010502005A (de)
KR (1) KR20090052329A (de)
DE (1) DE102006041657A1 (de)
WO (1) WO2008022693A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101428405B1 (ko) * 2013-08-07 2014-08-07 현대자동차주식회사 차량용 휠얼라이먼트 측정장치, 그를 이용한 측정시스템 및 측정방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101914101B1 (ko) * 2011-06-28 2018-11-02 삼성전자 주식회사 척의 제어 장치 및 방법, 노광 장치 및 그 제어 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3401769B2 (ja) * 1993-12-28 2003-04-28 株式会社ニコン 露光方法、ステージ装置、及び露光装置
JP2728042B2 (ja) * 1995-08-22 1998-03-18 日本電気株式会社 基板アライメント装置
JP3346214B2 (ja) * 1997-03-26 2002-11-18 セイコーエプソン株式会社 結晶性半導体膜の製造方法、およびアニール装置および薄膜トランジスタの製造方法および液晶表示装置用アクティブマトリクス基板
JP2000349043A (ja) * 1999-06-08 2000-12-15 Sumitomo Heavy Ind Ltd 矩形ビーム用精密焦点合せ方法
US7221463B2 (en) * 2003-03-14 2007-05-22 Canon Kabushiki Kaisha Positioning apparatus, exposure apparatus, and method for producing device
US7277188B2 (en) * 2003-04-29 2007-10-02 Cymer, Inc. Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101428405B1 (ko) * 2013-08-07 2014-08-07 현대자동차주식회사 차량용 휠얼라이먼트 측정장치, 그를 이용한 측정시스템 및 측정방법
US9170083B2 (en) 2013-08-07 2015-10-27 Hyundai Motor Company Wheel alignment measuring device for vehicle and measuring system and measuring method using the same

Also Published As

Publication number Publication date
JP2010502005A (ja) 2010-01-21
DE102006041657A1 (de) 2008-03-13
WO2008022693A1 (de) 2008-02-28

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A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application