KR20090000861A - Probe card having pin insert type contact structure - Google Patents

Abstract

A probe card having a pin insert type contact structure is provided to prevent electrical contact fault from generating as electrical contact of a mainboard and a space transformer is converted to a pin insert type. A probe card(10) is composed of a mainboard(20), space transformer(30), fixing frame(40), pin housing(50), space transformer cover(60) and stiffener(70). An interconnection pin(55) is used as communications delivering an electric signal of a space transformer and a mainboard. The both side parts of the interconnection pin are inserted into through holes of a space transformer and a mainboard respectively and electrical connection of the space transformer and mainboard is accomplished. As to the substrate of a disc type. The mainboard is classified into a center through hole domain inserted and connected to the interconnection pin and a circuit configuration domain of the outer portion of the through hole domain.

Description

Probe card having pin insert type contact structure}

1 is a cross-sectional view showing a contact structure of a space transformer and a main board in a probe card according to the prior art.

2 is a bottom perspective view partially disassembled a probe card according to an embodiment of the present invention.

3 is a cross-sectional view of a probe card according to an embodiment of the present invention.

4 is a front view of an interconnect pin in a probe card according to an embodiment of the invention.

5 is a cross-sectional view illustrating a coupling structure of an interconnect pin and a pin housing in a probe card according to an exemplary embodiment of the present invention.

6 is a cross-sectional view illustrating a contact structure between a space transformer and a main board in a probe card according to an exemplary embodiment of the present invention.

7 is a cross-sectional view illustrating a coupling structure of a space transformer cover and a space transformer in a probe card according to an embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

10; Probe card 20; Main board

21; Through hole region 21b; Circuit configuration area

23; Through hole 27; Guide home

30; Space transformer 33; Through hole

37; Guide groove 35; Probe

40; Fixed frame 43; Screw coupling holes

45; Fixing screw 50; Pin housing

53; Pin engagement hole 55; Interconnect pin

57; Guide pin 60; Space Transformer Cover

70; Stiffener

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe card for testing a semiconductor wafer, and more particularly, to a probe card having improved electrical connection structure between a space transformer and a main board.

Integrated circuit chips formed on semiconductor wafers through a wafer fabrication process are classified as good or defective by electrical die sorting (EDS). The electrical property inspection includes testers responsible for generating test signals and determining test results, probe stations for loading and unloading semiconductor wafers, and semiconductor wafers and testers. An inspection apparatus mainly composed of a probe card responsible for electrical connection is mainly used.

In the above-described inspection apparatus, a probe card has a structure in which a probe block made of a ceramic material is fixed on a main board, and a probe is fixed to an epoxy resin by an epoxy resin. . However, such a probe card relies on manual labor by skilled workers to fix the probe in the manufacturing process. Therefore, there is a limit to cope with the tendency that the bond pads of the integrated circuit chip become fine pitch.

In order to solve this problem, a probe card having a structure in which a space transformer having a probe formed on a ceramic substrate is manufactured by using micro electro mechanical systems (MEMS) and contacted with a main board has recently been developed. It is introduced.

1 is a cross-sectional view showing a contact structure of a space transformer and a main board in a probe card according to the related art.

Referring to FIG. 1, the conventional probe card 310 to which the micro precision technology is applied uses an interposer to electrically connect the main board 320 and the space transformer 330. As an interposer, the spring pin 340 which the spring 343 is wound around the outer peripheral surface of the pin 341 is used normally. The electrical contact between the main board 320 and the space transformer 330 is made by the interposer 341. At this time, the repulsive load of the spring 343 is transmitted to the main board 320 and the space transformer 330 to deform mechanically. Causes

In such a conventional probe card, a spring pin having a small spring is used to minimize deformation of the space transformer and the main board. However, in the probe card using the spring pin, the load of the spring may be reduced due to the test environment or the elastic deformation of the spring may not occur normally. As a result, the stroke of the spring pin does not occur normally. Contact failure may occur in which the electrical connection between the transformer and the main board is randomly uncontacted.

An object of the present invention is to provide a probe card that can prevent the occurrence of a poor contact due to the use of the spring pin by electrically connecting the space transformer and the main board without using the spring pin.

In order to achieve the above object, the present invention is a probe card having a space transformer with a probe and a main board coupled to the space transformer, the main board and the space transformer each have a through hole, the main board One side is inserted into the through hole of the other side, and the other side is inserted into the through hole of the space transformer to connect the main board and the space transformer electrically. Provided is a probe card, comprising a pin housing interposed between transformers.

"형상일 수 있다. 그리고 핀 하우징은 상면과 하면을 관통하는 핀 삽입 구멍에 삽입 결합될 수 있다. 핀 삽입 구멍의 형태는 일면으로부터 일정 깊이로 큰 직경의 구간 H_L과 그 하부로 직경이 작은 구간 H_S을 갖는 형태인 것이 바람직하다.In the probe card according to the present invention, it is preferable that the interconnection pin has a shape in which the upper end and the lower end protrude in opposite directions from the interruption part, but the upper and lower end parts protrude from each other. Where the interconnect pin is "

The pin housing can be inserted into a pin insertion hole penetrating the upper and lower surfaces. The shape of the pin insertion hole is a large diameter section H _L from one surface to a certain depth and a small diameter below the pin housing. It is preferable that the shape has a section H _S.

The probe card according to the present invention may further include a space transformer cover for pulling and fixing the pin housing and the space transformer toward the main board. The space transformer cover may be in the form of a rectangular ring formed with four edges surrounding the sides of the space transformer and a jaw pressing the space transformer. In addition, the space transformer cover may include a fixing screw protruding inward to at least one of the four edge portions to press the space transformer laterally.

In addition, the probe card according to the present invention may have a rectangular ring shape surrounding the pin housing and have a fixing frame interposed between the space transformer and the main board. The main board and the space transformer may be pressed in opposite directions with respect to the pin housing so that the interconnect pins may be in close contact with the inner wall of the through hole. Here, the pin housing has a guide pin protruding on at least one of the upper and lower surfaces, the main board and the space transformer may have a guide groove into which the guide pin is inserted.

DETAILED DESCRIPTION Hereinafter, embodiments of a probe card according to the present invention will be described in detail with reference to the accompanying drawings. However, in describing the embodiments, descriptions of technical contents which are well known in the technical field to which the present invention belongs and are not directly related to the present invention will be omitted. This is to more clearly communicate without obscure the core of the present invention by eliminating the unnecessary description.

2 is a bottom perspective view partially disassembled a probe card according to an embodiment of the present invention, Figure 3 is a cross-sectional view of the probe card according to an embodiment of the present invention.

2 and 3, the probe card 10 of the present embodiment includes a main board 20, a space transformer 30, a fixed frame 40, a pin housing 50, a space transformer cover 60, and a stiffener. and a stiffener 70. An interconnect pin 55 is used as a carrier for transmitting electrical signals of the main board 20 and the space transformer 30. Both portions of the interconnection pins 55 are inserted into the through holes 23 and 33 of the main board 20 and the space transformer 30, respectively, so that the main board 20 and the space transformer 30 are electrically connected. Is characteristic.

In detail, the main board 20 is a disk-shaped substrate, which is divided into a central through hole region 21a inserted into and connected to the interconnection pin 55 and a circuit configuration region 21b of an outer portion thereof. Can be. In the through hole region 21a, a plurality of through holes 23 through which the inner wall of the hole is covered with a conductive metal and subjected to via processing are formed. The main board 20 may be made of FR-4, a BT resin, or the like, which is a heat resistant epoxy resin.

The fixed frame 40 in the form of a square ring is coupled to the through hole region 21a of the main board 20. The fixed frame 40 is formed with a plurality of screw engaging holes 43 to penetrate the fixed frame 40 from the side. The screw coupling holes 43 are formed in all four sides of the front, rear, left, and right sides, and are provided in plural in one side portion. The screw engagement holes 43 of the opposite side parts are symmetric with each other. Here, the number and position of the screw coupling holes 43 may be increased or decreased as needed, and may be formed asymmetrically.

Fixing screws 45 protruding inward of the fixing frame 40 by tightening are engaged in the respective screw engagement holes 43. The fixing screw 45 may be one of an appropriate length in consideration of the degree of protrusion into the fixing frame 40. As the fixing screw 45, it is preferable to use a screw without a screw head so that it can be inserted into the screw engagement hole 43, but the bolt occupying space is small, but a screw with a screw head is also possible. Fixing screw 45 may also be replaced with a variety of other fastening members that may protrude inwardly of fixing frame 40, including bolts.

Inside the fixing frame 40 is a pin housing 50 of the insulator material in the form of a square plate. The pin housing 50 has a plurality of pin coupling holes 53 penetrating the upper and lower surfaces. Interconnect pins 55 made of a conductive elastic material are inserted into each pin coupling hole 53. Each of the interconnection pins 55 protrudes up and down the pin housing 50 and is inserted into the through hole 23 of the main board 20 and the through hole 33 of the following space transformer 30. .

The pin housing 50 is adjusted in position of the fixing frame 40 by the fixing screw 45 coupled to the screw engagement hole 43 of the fixing frame 40. The position of the pin housing 50 in the X-axis direction and Y-axis and θ direction is adjusted by appropriately tightening the fixing screws 45 located in all directions of the pin housing 50 to adjust the degree of protruding inward of the fixing frame 40. Can be adjusted. By moving the pin housing 50, the interconnection pin 55 may be in close contact with the inner wall of the through hole of the main board 20.

The space transformer 30 is coupled to the lower portion of the pin housing 50. The space transformer 30 has a structure in which a plurality of probes 35 are fixed to a ceramic substrate. The space transformer 30 has a through hole 33 through which the inside of the hole is via. One end portion of the interconnection pin 55 is inserted into the through hole 33 to be in contact with the inner wall. The probes 35 have one probe end coplanar and are arranged on the wafer at the same position and spacing as the bond pads of the integrated circuit chip. The probe 35 is cantilevered and manufactured using microscopic precision instrument technology. The probe 35 may be attached in various forms such as a circuit pattern formed on the space transformer 30 and solder bonding or intermetallic bonding. The space transformer 30 is preferably made of a non-conductive material having a low coefficient of thermal expansion in order to maintain positional accuracy and flatness of the probe tip.

The space transformer cover 60 has a rectangular ring shape similarly to the fixed frame 40 described above. The jaw 62 is provided to press the space transformer 30. The space transformer cover 60 is fixed by fixing screws 67 fastened at the stiffener 70 side of the main board 20. Fixing screw 67 is fastened to the space transformer 30 through the main board 20 and the fixing frame 40. The fixing screw 67 may be coupled to the main board 20 from the outside of the space transformer cover 60. Of course, the fixing screw 67 may be replaced by another fastening member.

As the fixing screw 67 is tightened, the space transformer cover 60 is pulled toward the main board 20 together with the fixing frame. In this process, the jaw 62 of the space transformer cover 60 presses the space transformer 30 and the pin housing 50 toward the main board 20. As a result, the space transformer 30 and the pin housing 50 may be fixed to the main board 20.

The space transformer cover 60 has a plurality of screwing holes 63 to penetrate the space transformer cover 60 from side to side in the same manner as the fixed frame 40. The screw coupling holes 63 are formed in all four sides of the front, rear, left, and right sides, and a plurality of screw coupling holes 63 are positioned at one side. The screw engagement holes 63 of the opposite side parts are symmetrical with each other, but can also be formed asymmetrically.

Fixing screws 65 protruding into the space transformer cover by tightening are engaged with the respective screw engaging holes 63. The fixing screw 65 may be one of an appropriate length in consideration of the degree of protrusion into the space transformer cover 60. Here, it is preferable to use a screw without a screw head as the fixing screw 65, but a screw with a screw head may be used. The fixing screw 65 can also be replaced with other fastening members, including bolts.

The stiffener 70 is coupled to a surface opposite to the surface on which the pin housing 50 is coupled to the main board 20. The stiffener 70 is tightly coupled to the opposite side of the surface on which the space transformer 30 is installed in the main board 20 to prevent physical deformation of the main board 20. The stiffener 70 may be made of a metal such as SUS, carbon steel, or the like. The stiffener 70 may have a circular center portion corresponding to the probe installation region 21a of the main board 20 and a portion extending radially from the central portion corresponding to the circuit region. Of course, the stiffener 70 may have a variety of other forms. And the stiffener 70 may be coupled to the handle 80 for easy handling.

4 is a front view of an interconnection pin in the probe card according to an embodiment of the present invention, Figure 5 is a cross-sectional view showing a coupling structure of the interconnection pin and the pin housing in the probe card according to an embodiment of the present invention.

"형상으로 형성되어 있으나 그 밖에 다른 형태를 가질 수 있다.As shown in FIG. 4, the interconnection pin 55 protrudes in the opposite direction from the top portion B and the bottom portion C at the stop portion A, but the top portion B and the bottom portion C based on the break portion A. Have a shape in which the protruding positions are shifted from each other. Here, the interconnect pin 55 is "

"It is shaped, but may have other shapes.

And each pin coupling hole 53 formed in the pin housing 50, as shown in Figure 5 has a shape having a large diameter section H _L to a predetermined depth from one surface and a small section H _S in the lower portion. The interconnection pin 55 may be fixed by inserting a lower end portion C into a small diameter section H _S in the pin coupling hole 53. Alternatively, the stopper portion A may be fitted and fixed to a large diameter section H _L.

6 and 7 are cross-sectional views illustrating a contact structure of a space transformer and a main board and a coupling structure of a space transformer cover and a space transformer in a probe card according to an embodiment of the present invention.

6 and 7, in the probe card 10 of the present invention, the interconnection pins 55 may contact the through holes 23 of the main board 20 and the through holes of the space transformer 30. 33) are opposite to each other. That is, the upper portion and the lower portion of the interconnection pin 55 are in close contact with the through-hole inner walls in opposite directions. This is possible by tightening the main board 20 and the space transformer 30 in the direction of the arrow so that the fixing screw 45 of the fixing frame 40 and the fixing screw 65 of the space transformer cover 60 are properly protruded. As a result, a stable contact state of the interconnection pin 55 may be ensured.

The pin housing 50 may have a plurality of guide pins 57 formed on respective surfaces facing the main board 20 and the space transformer 30. Guide grooves 27 and 37 may be formed in the main board 20 and the space transformer 30 corresponding to the guide pins 57. At this time, the guide pin 57 and the guide grooves 27 and 37 are configured to be loosely fitted to each other. Thereby the coupling can be guided while the guide pin 57 is inserted into the guide grooves (27, 37). In this case, the guide pins 57 and the guide grooves 27 and 37 may be loosely fitted so that the horizontal movement of the pin housing 50 and the space transformer 30 is possible to some extent.

In the process of joining, the guide pins 57 are loosely fitted to form the first alignment. In the X-axis and Y-axis directions using fixing screws on four sides of the space transformer cover 60 and the fixing frame 40, the guide pins 57 are aligned. And the interconnection pin 55 may be in close contact with the through hole. By properly adjusting the fixing screws 45 in the opposite position, it is possible to adjust the position of the pin housing 50 in the θ direction. Since the interconnect pin 55 is in contact with the through holes 23 and 33, the influence of the vertically acting load change is small and no deformation of the interconnect pin 55 due to the load occurs.

As described above, according to the probe card of the present invention, the electrical connection between the space transformer and the main board is a pin insert type (Pin Insert Type) contact structure to enable a stable electrical connection regardless of the load change, so that the probe is not contacted However, the occurrence of poor contact can be prevented.

Claims (10)

A probe card comprising a space transformer having a probe installed thereon and a main board to which the space transformer is coupled, wherein the main board and the space transformer each have a through hole. An interconnection pin having one side inserted into and contacting the through hole of the main board and the other side inserted into the through hole of the space transformer, the interconnection pin electrically connecting the main board and the space transformer; And a pin housing interposed between the main board and the space transformer in which the interconnect pin is inserted and fixed. The probe card of claim 1, wherein the interconnection pin has a top portion and a bottom portion protruding in opposite directions from the break portion, but the top portion and the bottom portion protrude from each other based on the break portion. 3. The method of claim 2 wherein the interconnect pin is "

"Probe card characterized in that it is shaped. The probe card of claim 3, wherein the pin housing is inserted into and coupled to a pin insertion hole penetrating through an upper surface and a lower surface. The probe card according to claim 4, wherein the pin insertion hole has a shape having a large diameter section H _L from one surface to a predetermined depth and a section H _S having a small diameter below the pin insertion hole. The probe card of claim 1, further comprising a space transformer cover for pulling and fixing the pin housing and the space transformer toward the main board. 7. The probe card according to claim 6, wherein the space transformer cover has a fixing screw projecting inward to at least one of the four edge portions to press the space transformer laterally. The probe card according to claim 6, further comprising a fixing frame in the form of a square ring surrounding the pin housing and interposed between the space transformer and the main board. The probe card of claim 8, wherein the main board and the space transformer are pressed in opposite directions with respect to the pin housing so that the interconnection pins adhere to the inner wall of the through hole. The probe of claim 9, wherein the pin housing has guide pins protruding from at least one of an upper surface and a lower surface thereof, and the main board and the space transporter each have a guide groove into which the guide pins are inserted. Card.

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