KR20080087670A - Photosensitive composition - Google Patents
Photosensitive composition Download PDFInfo
- Publication number
- KR20080087670A KR20080087670A KR1020080022721A KR20080022721A KR20080087670A KR 20080087670 A KR20080087670 A KR 20080087670A KR 1020080022721 A KR1020080022721 A KR 1020080022721A KR 20080022721 A KR20080022721 A KR 20080022721A KR 20080087670 A KR20080087670 A KR 20080087670A
- Authority
- KR
- South Korea
- Prior art keywords
- group
- photosensitive composition
- atom
- double bond
- pigment
- Prior art date
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 50
- 150000001875 compounds Chemical class 0.000 claims abstract description 34
- 125000004122 cyclic group Chemical group 0.000 claims abstract description 16
- 238000002835 absorbance Methods 0.000 claims abstract description 6
- 125000000962 organic group Chemical group 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 17
- 125000000217 alkyl group Chemical group 0.000 claims description 14
- 125000000623 heterocyclic group Chemical group 0.000 claims description 12
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 12
- 125000001424 substituent group Chemical group 0.000 claims description 12
- 238000004040 coloring Methods 0.000 claims description 10
- 125000005843 halogen group Chemical group 0.000 claims description 7
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 6
- 125000003545 alkoxy group Chemical group 0.000 claims description 5
- 125000002947 alkylene group Chemical group 0.000 claims description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 5
- 150000003568 thioethers Chemical class 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 15
- 239000011159 matrix material Substances 0.000 abstract description 10
- 239000003999 initiator Substances 0.000 abstract description 6
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 5
- 229920005989 resin Polymers 0.000 description 30
- 239000011347 resin Substances 0.000 description 30
- 239000000049 pigment Substances 0.000 description 29
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 27
- -1 oxime compound Chemical class 0.000 description 25
- 239000006229 carbon black Substances 0.000 description 16
- 235000019241 carbon black Nutrition 0.000 description 16
- 229920000647 polyepoxide Polymers 0.000 description 13
- 239000003822 epoxy resin Substances 0.000 description 12
- 239000007787 solid Substances 0.000 description 12
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 10
- 239000012860 organic pigment Substances 0.000 description 9
- 239000002904 solvent Substances 0.000 description 8
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 239000000178 monomer Substances 0.000 description 7
- 239000011342 resin composition Substances 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- 239000004593 Epoxy Substances 0.000 description 6
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 6
- 239000001023 inorganic pigment Substances 0.000 description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 6
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 6
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 5
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 5
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 5
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 5
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 5
- 150000007519 polyprotic acids Polymers 0.000 description 5
- 238000003786 synthesis reaction Methods 0.000 description 5
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 4
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 4
- INQDDHNZXOAFFD-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOC(=O)C=C INQDDHNZXOAFFD-UHFFFAOYSA-N 0.000 description 4
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 4
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 4
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 4
- 125000004018 acid anhydride group Chemical group 0.000 description 4
- 150000008065 acid anhydrides Chemical class 0.000 description 4
- 125000003710 aryl alkyl group Chemical group 0.000 description 4
- 125000003118 aryl group Chemical group 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000003086 colorant Substances 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 4
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 4
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 229930185605 Bisphenol Natural products 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 206010040844 Skin exfoliation Diseases 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000008064 anhydrides Chemical class 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000007334 copolymerization reaction Methods 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 239000002270 dispersing agent Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 150000002430 hydrocarbons Chemical group 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 229920005596 polymer binder Polymers 0.000 description 3
- 239000002491 polymer binding agent Substances 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- 125000004434 sulfur atom Chemical group 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- KMOUUZVZFBCRAM-UHFFFAOYSA-N 1,2,3,6-tetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21 KMOUUZVZFBCRAM-UHFFFAOYSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- IAKGBURUJDUUNN-UHFFFAOYSA-N 2,2-bis(hydroxymethyl)-3-methylbutane-1,4-diol prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(C)C(CO)(CO)CO IAKGBURUJDUUNN-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- JJBFVQSGPLGDNX-UHFFFAOYSA-N 2-(2-methylprop-2-enoyloxy)propyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)COC(=O)C(C)=C JJBFVQSGPLGDNX-UHFFFAOYSA-N 0.000 description 2
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 2
- QTUVQQKHBMGYEH-UHFFFAOYSA-N 2-(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC=NC=N1 QTUVQQKHBMGYEH-UHFFFAOYSA-N 0.000 description 2
- HWSSEYVMGDIFMH-UHFFFAOYSA-N 2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOC(=O)C(C)=C HWSSEYVMGDIFMH-UHFFFAOYSA-N 0.000 description 2
- 229940044192 2-hydroxyethyl methacrylate Drugs 0.000 description 2
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 2
- VFZKVQVQOMDJEG-UHFFFAOYSA-N 2-prop-2-enoyloxypropyl prop-2-enoate Chemical compound C=CC(=O)OC(C)COC(=O)C=C VFZKVQVQOMDJEG-UHFFFAOYSA-N 0.000 description 2
- XOJWAAUYNWGQAU-UHFFFAOYSA-N 4-(2-methylprop-2-enoyloxy)butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCOC(=O)C(C)=C XOJWAAUYNWGQAU-UHFFFAOYSA-N 0.000 description 2
- DBCAQXHNJOFNGC-UHFFFAOYSA-N 4-bromo-1,1,1-trifluorobutane Chemical compound FC(F)(F)CCCBr DBCAQXHNJOFNGC-UHFFFAOYSA-N 0.000 description 2
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 2
- SAPGBCWOQLHKKZ-UHFFFAOYSA-N 6-(2-methylprop-2-enoyloxy)hexyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCCCOC(=O)C(C)=C SAPGBCWOQLHKKZ-UHFFFAOYSA-N 0.000 description 2
- FIHBHSQYSYVZQE-UHFFFAOYSA-N 6-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCOC(=O)C=C FIHBHSQYSYVZQE-UHFFFAOYSA-N 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- JOZALWBFWGMCAU-UHFFFAOYSA-N CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.OCC(C)C(CO)(CO)CO Chemical compound CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.OCC(C)C(CO)(CO)CO JOZALWBFWGMCAU-UHFFFAOYSA-N 0.000 description 2
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- GYCMBHHDWRMZGG-UHFFFAOYSA-N Methylacrylonitrile Chemical compound CC(=C)C#N GYCMBHHDWRMZGG-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 2
- OKKRPWIIYQTPQF-UHFFFAOYSA-N Trimethylolpropane trimethacrylate Chemical compound CC(=C)C(=O)OCC(CC)(COC(=O)C(C)=C)COC(=O)C(C)=C OKKRPWIIYQTPQF-UHFFFAOYSA-N 0.000 description 2
- JUDXBRVLWDGRBC-UHFFFAOYSA-N [2-(hydroxymethyl)-3-(2-methylprop-2-enoyloxy)-2-(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(COC(=O)C(C)=C)COC(=O)C(C)=C JUDXBRVLWDGRBC-UHFFFAOYSA-N 0.000 description 2
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 2
- 125000005428 anthryl group Chemical group [H]C1=C([H])C([H])=C2C([H])=C3C(*)=C([H])C([H])=C([H])C3=C([H])C2=C1[H] 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 239000001055 blue pigment Substances 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 150000001244 carboxylic acid anhydrides Chemical group 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000006231 channel black Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 125000004386 diacrylate group Chemical group 0.000 description 2
- 230000008034 disappearance Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 2
- STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Substances CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 125000002541 furyl group Chemical group 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 125000002883 imidazolyl group Chemical group 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- CDOSHBSSFJOMGT-UHFFFAOYSA-N linalool Chemical compound CC(C)=CCCC(C)(O)C=C CDOSHBSSFJOMGT-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 125000001624 naphthyl group Chemical group 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 238000000016 photochemical curing Methods 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 150000003077 polyols Chemical group 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 2
- 125000004076 pyridyl group Chemical group 0.000 description 2
- 125000000714 pyrimidinyl group Chemical group 0.000 description 2
- 125000000168 pyrrolyl group Chemical group 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000012719 thermal polymerization Methods 0.000 description 2
- 125000001544 thienyl group Chemical group 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- 229940096522 trimethylolpropane triacrylate Drugs 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- VMHYWKBKHMYRNF-UHFFFAOYSA-N (2-chlorophenyl)-phenylmethanone Chemical compound ClC1=CC=CC=C1C(=O)C1=CC=CC=C1 VMHYWKBKHMYRNF-UHFFFAOYSA-N 0.000 description 1
- RYNQKSJRFHJZTK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) acetate Chemical compound COC(C)(C)CCOC(C)=O RYNQKSJRFHJZTK-UHFFFAOYSA-N 0.000 description 1
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 1
- PSGCQDPCAWOCSH-UHFFFAOYSA-N (4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl) prop-2-enoate Chemical compound C1CC2(C)C(OC(=O)C=C)CC1C2(C)C PSGCQDPCAWOCSH-UHFFFAOYSA-N 0.000 description 1
- XLYMOEINVGRTEX-ONEGZZNKSA-N (e)-4-ethoxy-4-oxobut-2-enoic acid Chemical compound CCOC(=O)\C=C\C(O)=O XLYMOEINVGRTEX-ONEGZZNKSA-N 0.000 description 1
- XHXSXTIIDBZEKB-UHFFFAOYSA-N 1,2,3,4,5,6,7,8-octamethylanthracene-9,10-dione Chemical compound CC1=C(C)C(C)=C2C(=O)C3=C(C)C(C)=C(C)C(C)=C3C(=O)C2=C1C XHXSXTIIDBZEKB-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- ONCICIKBSHQJTB-UHFFFAOYSA-N 1-[4-(dimethylamino)phenyl]propan-1-one Chemical compound CCC(=O)C1=CC=C(N(C)C)C=C1 ONCICIKBSHQJTB-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- DOVZUKKPYKRVIK-UHFFFAOYSA-N 1-methoxypropan-2-yl propanoate Chemical compound CCC(=O)OC(C)COC DOVZUKKPYKRVIK-UHFFFAOYSA-N 0.000 description 1
- UERLHASVVYLVKI-UHFFFAOYSA-N 1-propan-2-yl-9h-thioxanthene Chemical compound S1C2=CC=CC=C2CC2=C1C=CC=C2C(C)C UERLHASVVYLVKI-UHFFFAOYSA-N 0.000 description 1
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 1
- OAMHTTBNEJBIKA-UHFFFAOYSA-N 2,2,2-trichloro-1-phenylethanone Chemical compound ClC(Cl)(Cl)C(=O)C1=CC=CC=C1 OAMHTTBNEJBIKA-UHFFFAOYSA-N 0.000 description 1
- CERJZAHSUZVMCH-UHFFFAOYSA-N 2,2-dichloro-1-phenylethanone Chemical compound ClC(Cl)C(=O)C1=CC=CC=C1 CERJZAHSUZVMCH-UHFFFAOYSA-N 0.000 description 1
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
- QRIMLDXJAPZHJE-UHFFFAOYSA-N 2,3-dihydroxypropyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(O)CO QRIMLDXJAPZHJE-UHFFFAOYSA-N 0.000 description 1
- OWPUOLBODXJOKH-UHFFFAOYSA-N 2,3-dihydroxypropyl prop-2-enoate Chemical compound OCC(O)COC(=O)C=C OWPUOLBODXJOKH-UHFFFAOYSA-N 0.000 description 1
- LZWVPGJPVCYAOC-UHFFFAOYSA-N 2,3-diphenylanthracene-9,10-dione Chemical compound C=1C=CC=CC=1C=1C=C2C(=O)C3=CC=CC=C3C(=O)C2=CC=1C1=CC=CC=C1 LZWVPGJPVCYAOC-UHFFFAOYSA-N 0.000 description 1
- DXUMYHZTYVPBEZ-UHFFFAOYSA-N 2,4,6-tris(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 DXUMYHZTYVPBEZ-UHFFFAOYSA-N 0.000 description 1
- ZXDDPOHVAMWLBH-UHFFFAOYSA-N 2,4-Dihydroxybenzophenone Chemical compound OC1=CC(O)=CC=C1C(=O)C1=CC=CC=C1 ZXDDPOHVAMWLBH-UHFFFAOYSA-N 0.000 description 1
- MFUCEQWAFQMGOR-UHFFFAOYSA-N 2,4-diethyl-9h-thioxanthene Chemical compound C1=CC=C2CC3=CC(CC)=CC(CC)=C3SC2=C1 MFUCEQWAFQMGOR-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- QRHHZFRCJDAUNA-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 QRHHZFRCJDAUNA-UHFFFAOYSA-N 0.000 description 1
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- BLLZAHSARJPHSO-UHFFFAOYSA-N 2-[2-(4-ethoxyphenyl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OCC)=CC=C1C=CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 BLLZAHSARJPHSO-UHFFFAOYSA-N 0.000 description 1
- XOPKKHCDIAYUSK-UHFFFAOYSA-N 2-[2-(5-methylfuran-2-yl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound O1C(C)=CC=C1C=CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 XOPKKHCDIAYUSK-UHFFFAOYSA-N 0.000 description 1
- PNDRGJCVJPHPOZ-UHFFFAOYSA-N 2-[2-(furan-2-yl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C=CC=2OC=CC=2)=N1 PNDRGJCVJPHPOZ-UHFFFAOYSA-N 0.000 description 1
- LTHJXDSHSVNJKG-UHFFFAOYSA-N 2-[2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOCCOC(=O)C(C)=C LTHJXDSHSVNJKG-UHFFFAOYSA-N 0.000 description 1
- CQOZJDNCADWEKH-UHFFFAOYSA-N 2-[3,3-bis(2-hydroxyphenyl)propyl]phenol Chemical compound OC1=CC=CC=C1CCC(C=1C(=CC=CC=1)O)C1=CC=CC=C1O CQOZJDNCADWEKH-UHFFFAOYSA-N 0.000 description 1
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 1
- HRJYGQAACVZSEO-UHFFFAOYSA-N 2-chloro-9h-thioxanthene Chemical compound C1=CC=C2CC3=CC(Cl)=CC=C3SC2=C1 HRJYGQAACVZSEO-UHFFFAOYSA-N 0.000 description 1
- 125000004182 2-chlorophenyl group Chemical group [H]C1=C([H])C(Cl)=C(*)C([H])=C1[H] 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SFPNZPQIIAJXGL-UHFFFAOYSA-N 2-ethoxyethyl 2-methylprop-2-enoate Chemical compound CCOCCOC(=O)C(C)=C SFPNZPQIIAJXGL-UHFFFAOYSA-N 0.000 description 1
- FWWXYLGCHHIKNY-UHFFFAOYSA-N 2-ethoxyethyl prop-2-enoate Chemical compound CCOCCOC(=O)C=C FWWXYLGCHHIKNY-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- WDQMWEYDKDCEHT-UHFFFAOYSA-N 2-ethylhexyl 2-methylprop-2-enoate Chemical compound CCCCC(CC)COC(=O)C(C)=C WDQMWEYDKDCEHT-UHFFFAOYSA-N 0.000 description 1
- VHSHLMUCYSAUQU-UHFFFAOYSA-N 2-hydroxypropyl methacrylate Chemical compound CC(O)COC(=O)C(C)=C VHSHLMUCYSAUQU-UHFFFAOYSA-N 0.000 description 1
- FLFWJIBUZQARMD-UHFFFAOYSA-N 2-mercapto-1,3-benzoxazole Chemical compound C1=CC=C2OC(S)=NC2=C1 FLFWJIBUZQARMD-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- YXYJVFYWCLAXHO-UHFFFAOYSA-N 2-methoxyethyl 2-methylprop-2-enoate Chemical compound COCCOC(=O)C(C)=C YXYJVFYWCLAXHO-UHFFFAOYSA-N 0.000 description 1
- HFCUBKYHMMPGBY-UHFFFAOYSA-N 2-methoxyethyl prop-2-enoate Chemical compound COCCOC(=O)C=C HFCUBKYHMMPGBY-UHFFFAOYSA-N 0.000 description 1
- LETDRANQSOEVCX-UHFFFAOYSA-N 2-methyl-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 LETDRANQSOEVCX-UHFFFAOYSA-N 0.000 description 1
- ATTLFLQPHSUNBK-UHFFFAOYSA-N 2-methyl-9h-thioxanthene Chemical compound C1=CC=C2CC3=CC(C)=CC=C3SC2=C1 ATTLFLQPHSUNBK-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- RUMACXVDVNRZJZ-UHFFFAOYSA-N 2-methylpropyl 2-methylprop-2-enoate Chemical compound CC(C)COC(=O)C(C)=C RUMACXVDVNRZJZ-UHFFFAOYSA-N 0.000 description 1
- CFVWNXQPGQOHRJ-UHFFFAOYSA-N 2-methylpropyl prop-2-enoate Chemical compound CC(C)COC(=O)C=C CFVWNXQPGQOHRJ-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- 125000003762 3,4-dimethoxyphenyl group Chemical group [H]C1=C([H])C(OC([H])([H])[H])=C(OC([H])([H])[H])C([H])=C1* 0.000 description 1
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- LKVFCSWBKOVHAH-UHFFFAOYSA-N 4-Ethoxyphenol Chemical compound CCOC1=CC=C(O)C=C1 LKVFCSWBKOVHAH-UHFFFAOYSA-N 0.000 description 1
- BLLOXKZNPPDLGM-UHFFFAOYSA-N 4-[2-[4,6-bis(trichloromethyl)-1,3,5-triazin-2-yl]ethenyl]-n,n-diethyl-3-methylaniline Chemical compound CC1=CC(N(CC)CC)=CC=C1C=CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 BLLOXKZNPPDLGM-UHFFFAOYSA-N 0.000 description 1
- PRFAXWWHJWIUPI-UHFFFAOYSA-N 4-methoxytriazine Chemical compound COC1=CC=NN=N1 PRFAXWWHJWIUPI-UHFFFAOYSA-N 0.000 description 1
- JVERADGGGBYHNP-UHFFFAOYSA-N 5-phenylbenzene-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C(C(=O)O)=CC(C=2C=CC=CC=2)=C1C(O)=O JVERADGGGBYHNP-UHFFFAOYSA-N 0.000 description 1
- MWSKJDNQKGCKPA-UHFFFAOYSA-N 6-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1CC(C)=CC2C(=O)OC(=O)C12 MWSKJDNQKGCKPA-UHFFFAOYSA-N 0.000 description 1
- PQJUJGAVDBINPI-UHFFFAOYSA-N 9H-thioxanthene Chemical compound C1=CC=C2CC3=CC=CC=C3SC2=C1 PQJUJGAVDBINPI-UHFFFAOYSA-N 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- ZBJJDYGJCNTNTH-UHFFFAOYSA-N Betahistine mesilate Chemical group CS(O)(=O)=O.CS(O)(=O)=O.CNCCC1=CC=CC=N1 ZBJJDYGJCNTNTH-UHFFFAOYSA-N 0.000 description 1
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
- LMRAZLQSKIGNFE-UHFFFAOYSA-N C(C1=CC=CC=C1)(=O)C1=CC=CC=C1.C(C)(C)(C)C1=CC=C(C=C1)C(C)=O Chemical class C(C1=CC=CC=C1)(=O)C1=CC=CC=C1.C(C)(C)(C)C1=CC=C(C=C1)C(C)=O LMRAZLQSKIGNFE-UHFFFAOYSA-N 0.000 description 1
- WUIRGUDWPKRGHJ-UHFFFAOYSA-N CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.OCC(CO)(CO)CO Chemical compound CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.CC(=C)C(O)=O.OCC(CO)(CO)CO WUIRGUDWPKRGHJ-UHFFFAOYSA-N 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 1
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 description 1
- 229920002153 Hydroxypropyl cellulose Polymers 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical group C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 1
- OKIZCWYLBDKLSU-UHFFFAOYSA-M N,N,N-Trimethylmethanaminium chloride Chemical compound [Cl-].C[N+](C)(C)C OKIZCWYLBDKLSU-UHFFFAOYSA-M 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229920002873 Polyethylenimine Polymers 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- 241000872198 Serjania polyphylla Species 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical class NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- IAXXETNIOYFMLW-COPLHBTASA-N [(1s,3s,4s)-4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl] 2-methylprop-2-enoate Chemical compound C1C[C@]2(C)[C@@H](OC(=O)C(=C)C)C[C@H]1C2(C)C IAXXETNIOYFMLW-COPLHBTASA-N 0.000 description 1
- SMEGJBVQLJJKKX-HOTMZDKISA-N [(2R,3S,4S,5R,6R)-5-acetyloxy-3,4,6-trihydroxyoxan-2-yl]methyl acetate Chemical compound CC(=O)OC[C@@H]1[C@H]([C@@H]([C@H]([C@@H](O1)O)OC(=O)C)O)O SMEGJBVQLJJKKX-HOTMZDKISA-N 0.000 description 1
- PFRUBEOIWWEFOL-UHFFFAOYSA-N [N].[S] Chemical compound [N].[S] PFRUBEOIWWEFOL-UHFFFAOYSA-N 0.000 description 1
- 229940081735 acetylcellulose Drugs 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- LHMRXAIRPKSGDE-UHFFFAOYSA-N benzo[a]anthracene-7,12-dione Chemical compound C1=CC2=CC=CC=C2C2=C1C(=O)C1=CC=CC=C1C2=O LHMRXAIRPKSGDE-UHFFFAOYSA-N 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 229960003328 benzoyl peroxide Drugs 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 1
- ZCILODAAHLISPY-UHFFFAOYSA-N biphenyl ether Natural products C1=C(CC=C)C(O)=CC(OC=2C(=CC(CC=C)=CC=2)O)=C1 ZCILODAAHLISPY-UHFFFAOYSA-N 0.000 description 1
- 239000002981 blocking agent Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 125000004369 butenyl group Chemical group C(=CCC)* 0.000 description 1
- YFNONBGXNFCTMM-UHFFFAOYSA-N butoxybenzene Chemical group CCCCOC1=CC=CC=C1 YFNONBGXNFCTMM-UHFFFAOYSA-N 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- DFFDSQBEGQFJJU-UHFFFAOYSA-M butyl carbonate Chemical compound CCCCOC([O-])=O DFFDSQBEGQFJJU-UHFFFAOYSA-M 0.000 description 1
- 235000010354 butylated hydroxytoluene Nutrition 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 125000000609 carbazolyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3NC12)* 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 229920003064 carboxyethyl cellulose Polymers 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- CZPLANDPABRVHX-UHFFFAOYSA-N cascade blue Chemical compound C=1C2=CC=CC=C2C(NCC)=CC=1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 CZPLANDPABRVHX-UHFFFAOYSA-N 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 239000012461 cellulose resin Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 125000004803 chlorobenzyl group Chemical group 0.000 description 1
- 125000000068 chlorophenyl group Chemical group 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- 125000001028 difluoromethyl group Chemical group [H]C(F)(F)* 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- XLYMOEINVGRTEX-UHFFFAOYSA-N fumaric acid monoethyl ester Natural products CCOC(=O)C=CC(O)=O XLYMOEINVGRTEX-UHFFFAOYSA-N 0.000 description 1
- NKHAVTQWNUWKEO-UHFFFAOYSA-N fumaric acid monomethyl ester Natural products COC(=O)C=CC(O)=O NKHAVTQWNUWKEO-UHFFFAOYSA-N 0.000 description 1
- 239000006232 furnace black Substances 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- VANNPISTIUFMLH-UHFFFAOYSA-N glutaric anhydride Chemical compound O=C1CCCC(=O)O1 VANNPISTIUFMLH-UHFFFAOYSA-N 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 125000004970 halomethyl group Chemical group 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- FLBJFXNAEMSXGL-UHFFFAOYSA-N het anhydride Chemical compound O=C1OC(=O)C2C1C1(Cl)C(Cl)=C(Cl)C2(Cl)C1(Cl)Cl FLBJFXNAEMSXGL-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 1
- 229920003063 hydroxymethyl cellulose Polymers 0.000 description 1
- 229940031574 hydroxymethyl cellulose Drugs 0.000 description 1
- 239000001863 hydroxypropyl cellulose Substances 0.000 description 1
- 235000010977 hydroxypropyl cellulose Nutrition 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229940119545 isobornyl methacrylate Drugs 0.000 description 1
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 1
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001786 isothiazolyl group Chemical group 0.000 description 1
- 125000000842 isoxazolyl group Chemical group 0.000 description 1
- 239000006233 lamp black Substances 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052976 metal sulfide Inorganic materials 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- DOTMOQHOJINYBL-UHFFFAOYSA-N molecular nitrogen;molecular oxygen Chemical group N#N.O=O DOTMOQHOJINYBL-UHFFFAOYSA-N 0.000 description 1
- CQDGTJPVBWZJAZ-UHFFFAOYSA-N monoethyl carbonate Chemical compound CCOC(O)=O CQDGTJPVBWZJAZ-UHFFFAOYSA-N 0.000 description 1
- 229940074369 monoethyl fumarate Drugs 0.000 description 1
- NKHAVTQWNUWKEO-NSCUHMNNSA-N monomethyl fumarate Chemical compound COC(=O)\C=C\C(O)=O NKHAVTQWNUWKEO-NSCUHMNNSA-N 0.000 description 1
- 229940005650 monomethyl fumarate Drugs 0.000 description 1
- 125000004573 morpholin-4-yl group Chemical group N1(CCOCC1)* 0.000 description 1
- IPGRTXQKFZCLJS-UHFFFAOYSA-N n-(2-hydroxypropyl)prop-2-enamide Chemical compound CC(O)CNC(=O)C=C IPGRTXQKFZCLJS-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 239000003791 organic solvent mixture Substances 0.000 description 1
- 125000002971 oxazolyl group Chemical group 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 125000005004 perfluoroethyl group Chemical group FC(F)(F)C(F)(F)* 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 125000005561 phenanthryl group Chemical group 0.000 description 1
- GRDVGGZNFFBWTM-UHFFFAOYSA-N phenyl 2-methylprop-2-eneperoxoate Chemical compound CC(=C)C(=O)OOC1=CC=CC=C1 GRDVGGZNFFBWTM-UHFFFAOYSA-N 0.000 description 1
- WZESLRDFSNLECD-UHFFFAOYSA-N phenyl prop-2-eneperoxoate Chemical compound C=CC(=O)OOC1=CC=CC=C1 WZESLRDFSNLECD-UHFFFAOYSA-N 0.000 description 1
- 125000000286 phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 125000004193 piperazinyl group Chemical group 0.000 description 1
- 125000003386 piperidinyl group Chemical group 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- BOQSSGDQNWEFSX-UHFFFAOYSA-N propan-2-yl 2-methylprop-2-enoate Chemical compound CC(C)OC(=O)C(C)=C BOQSSGDQNWEFSX-UHFFFAOYSA-N 0.000 description 1
- LYBIZMNPXTXVMV-UHFFFAOYSA-N propan-2-yl prop-2-enoate Chemical compound CC(C)OC(=O)C=C LYBIZMNPXTXVMV-UHFFFAOYSA-N 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 1
- FOWDZVNRQHPXDO-UHFFFAOYSA-N propyl hydrogen carbonate Chemical compound CCCOC(O)=O FOWDZVNRQHPXDO-UHFFFAOYSA-N 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- 125000002568 propynyl group Chemical group [*]C#CC([H])([H])[H] 0.000 description 1
- 125000004309 pyranyl group Chemical group O1C(C=CC=C1)* 0.000 description 1
- 125000003373 pyrazinyl group Chemical group 0.000 description 1
- 125000003226 pyrazolyl group Chemical group 0.000 description 1
- 125000002098 pyridazinyl group Chemical group 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229920003987 resole Polymers 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- HWCKGOZZJDHMNC-UHFFFAOYSA-M tetraethylammonium bromide Chemical compound [Br-].CC[N+](CC)(CC)CC HWCKGOZZJDHMNC-UHFFFAOYSA-M 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- 239000006234 thermal black Substances 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 125000000335 thiazolyl group Chemical group 0.000 description 1
- BRNULMACUQOKMR-UHFFFAOYSA-N thiomorpholine Chemical group C1CSCCN1 BRNULMACUQOKMR-UHFFFAOYSA-N 0.000 description 1
- 125000005033 thiopyranyl group Chemical group 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000001038 titanium pigment Substances 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical class C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D209/00—Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom
- C07D209/56—Ring systems containing three or more rings
- C07D209/80—[b, c]- or [b, d]-condensed
- C07D209/94—[b, c]- or [b, d]-condensed containing carbocyclic rings other than six-membered
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
- G03F7/0295—Photolytic halogen compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
Abstract
Description
본 발명은 광중합 개시제를 함유하는 감광성 조성물에 관한 것으로서, 특히 액정 디스플레이(display)에 있어서의 컬러 필터(color filter), 블랙 매트릭스(black matrix), 스페이서(spacer) 등을 형성하기 위해서 이용되는 감광성 조성물에 관한 것이다.BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a photosensitive composition containing a photopolymerization initiator, and in particular, a photosensitive composition used for forming a color filter, a black matrix, a spacer, and the like in a liquid crystal display. It is about.
감광성 조성물은 광중합성 화합물과 광중합 개시제를 포함하는 것이고, 자외선 등의 광을 조사함으로써 경화되는 것이다. 이 감광성 조성물은 광을 조사한 부분을 경화시킴으로써 소망의 형상의 패턴(pattern)이 얻어지기 때문에, 인쇄판, 포토레지스트(photoresist) 등의 여러 가지의 용도에 이용되어 왔다.The photosensitive composition contains a photopolymerizable compound and a photopolymerization initiator and is cured by irradiating light such as ultraviolet rays. Since this photosensitive composition hardens the part which irradiated light, the pattern of a desired shape is obtained, and it has been used for various uses, such as a printing plate and a photoresist.
특히 액정 표시 장치에 있어서의 블랙 매트릭스는 차광제를 포함하는 감광성 조성물로 형성되지만, 그 차광제의 존재 때문에 감광성 조성물로 형성된 막의 심부에 도달하는 광이 적게 되어, 감광성 조성물의 광경화가 불충분하게 될 가능성이 있다.In particular, the black matrix in the liquid crystal display device is formed of a photosensitive composition containing a light shielding agent, but due to the presence of the light blocking agent, there is a possibility that the light reaching the deep portion of the film formed of the photosensitive composition is reduced, resulting in insufficient photocuring of the photosensitive composition. There is this.
상기 감광성 조성물에 있어서는 광중합 개시제의 성능이 감광성 조성물의 감도를 향상시키는데 있어서 중요한 요소가 된다. 이러한 광중합 개시제로서는 옥 심(oxime)계의 광중합 개시제가 개발되어 있다.(예를 들면, 특허문헌 1∼6 등 참조)In the said photosensitive composition, the performance of a photoinitiator becomes an important factor in improving the sensitivity of a photosensitive composition. As such a photoinitiator, the oxime system photoinitiator is developed. (For example, refer patent documents 1-6 etc.).
특허문헌 1: 일본 특허공표 2004-534797호 공보Patent Document 1: Japanese Patent Publication No. 2004-534797
특허문헌 2: 일본 특허공개 2004-359639호 공보Patent Document 2: Japanese Patent Application Laid-Open No. 2004-359639
특허문헌 3: 일본 특허공개 2005-220097호 공보Patent Document 3: Japanese Patent Laid-Open No. 2005-220097
특허문헌 4: 일본 특허공개 2006-160634호 공보Patent Document 4: Japanese Patent Application Laid-Open No. 2006-160634
특허문헌 5: 일본 특허공표 2006-516246호 공보Patent Document 5: Japanese Patent Publication No. 2006-516246
특허문헌 6: 국제공개 제2006/018405호 팜플렛Patent Document 6: International Publication No. 2006/018405 Pamphlet
그렇지만, 상기 감광성 조성물에 있어서도 새로운 고감도화가 요구되고 있다.However, new high sensitivity is also required in the said photosensitive composition.
본 발명은 상기 과제를 감안하여 이루어진 것이고, 보다 고감도인 감광성 조성물을 제공하는 것을 목적으로 한다.This invention is made | formed in view of the said subject, and an object of this invention is to provide a more sensitive photosensitive composition.
본 발명의 감광성 조성물은 광중합성 화합물과 광중합 개시제를 포함하고,The photosensitive composition of this invention contains a photopolymerizable compound and a photoinitiator,
상기 광중합 개시제는 식 (1)로 표시되는 골격을 가지는 화합물을 함유한다. The photoinitiator contains a compound having a skeleton represented by the formula (1).
(식 (1) 중 A, B, G는 1가의 유기기이고, E는 치환기를 가지고 있어도 좋은 공역 이중 결합성 환상기이다.)(In Formula (1), A, B and G are monovalent organic groups, and E is a conjugated double bond cyclic group which may have a substituent.)
상기와 같이, 특정의 구조를 가지고 365nm에 있어서의 흡광도가 0.3 이상인 광중합 개시제를 이용함으로써, 감광성 조성물의 감도를 향상시킬 수가 있다.As mentioned above, the sensitivity of the photosensitive composition can be improved by using the photoinitiator which has a specific structure and whose light absorbency in 365 nm is 0.3 or more.
본 발명에 의하면, 감도가 높은 광중합 개시제를 이용하고 있기 때문에, 보다 고감도인 감광성 조성물을 제공할 수가 있다.According to this invention, since the photoinitiator with high sensitivity is used, a more sensitive photosensitive composition can be provided.
본 발명의 감광성 조성물은 광중합성 화합물과 광중합 개시제를 포함한다.The photosensitive composition of this invention contains a photopolymerizable compound and a photoinitiator.
상기 광중합 개시제는 식 (1)로 표시되는 골격을 가지고, 365nm에 있어서의 흡광도가 0.3 이상인 화합물을 함유한다.The said photoinitiator has a skeleton represented by Formula (1), and contains the compound whose absorbance in 365 nm is 0.3 or more.
(식 (1) 중 A, B, G는 1가의 유기기이고, E는 치환기를 가지고 있어도 좋은 공역 이중 결합성 환상기이다.)(In Formula (1), A, B and G are monovalent organic groups, and E is a conjugated double bond cyclic group which may have a substituent.)
또한, 이 흡광도는 시마즈제작소주식회사 제조의 흡광 광도계 UV3100을 이용하여, 유기 용제 PGME로 대상의 개시제를 0.0017%로 희석하여 슬릿(slit) 폭 2.0, 샘플링 피치(sampling pitch) 0.5로 측정한 것이다.In addition, this absorbance was measured with the slit width 2.0 and the sampling pitch 0.5 by diluting the target initiator to 0.0017% with the organic solvent PGME using the absorbance photometer UV3100 by Shimadzu Corporation.
상기 감광성 조성물에서는, 조사되는 특정 파장의 광에 대한 감도가 요구되고 있다. 일반적으로는 365nm의 파장을 포함하는 광이 이용되고 있고, 특히 365nm의 광에 대한 감도가 높을 것이 요구된다. 상기 식 (1)로 표시되는 화합물 중에서 도, 365nm에 있어서의 흡광도가 0.3 이상인 화합물을 이용함으로써, 감광성 조성물의 감도를 향상시킬 수가 있다. 특히, 상기 식 (1)로 표시되는 것과 같은 카르바졸(carbazole)기를 가지는 옥심(oxime) 화합물에서는 감도 향상의 효과가 현저하다. 또, 상기 365nm에 있어서의 흡광도는 0.4 이상인 것이 바람직하고, 0.5 이상인 것이 보다 바람직하다.In the said photosensitive composition, the sensitivity with respect to the light of the specific wavelength irradiated is calculated | required. In general, light including a wavelength of 365 nm is used, and particularly, a high sensitivity to light of 365 nm is required. Also in the compound represented by the said Formula (1), the sensitivity of the photosensitive composition can be improved by using the compound whose light absorbency in 365 nm is 0.3 or more. In particular, in the oxime compound which has a carbazole group as represented by said Formula (1), the effect of a sensitivity improvement is remarkable. Moreover, it is preferable that it is 0.4 or more, and, as for the absorbance in said 365 nm, it is more preferable that it is 0.5 or more.
상기 A, G는 -R1, -OR1, -COR1, -SR1, 또는 -NR1R2로 표시되는 기가 바람직하다. 또, B는 -R1, -OR1, -COR1, -SR1, -CONR1R2 또는 -CN인 것이 바람직하다. 상기 R1 및 R2는 각각 독립하여 알킬기, 아릴(aryl)기, 아랄킬(aralkyl)기 또는 복소환기를 나타내고, 이들은 할로겐 원자 및/또는 복소환기로 치환되어 있어도 좋고, 이들 중 알킬기 및 아랄킬기의 알킬렌(alkylene) 부분은 불포화 결합, 에테르결합, 티오에테르(thioether) 결합, 에스테르결합에 의해 중단되어 있어도 좋고, 또 R1 및 R2는 하나로 되어 환을 형성하고 있어도 좋다.A, G is preferably a group represented by -R 1 , -OR 1 , -COR 1 , -SR 1 , or -NR 1 R 2 . Moreover, it is preferable that B is -R <1> , -OR <1> , -COR <1> , -SR <1> , -CONR <1> R <2>, or -CN. R 1 and R 2 each independently represent an alkyl group, an aryl group, an aralkyl group, or a heterocyclic group, which may be substituted with a halogen atom and / or a heterocyclic group, of which an alkyl group and an aralkyl group The alkylene moiety of may be interrupted by an unsaturated bond, an ether bond, a thioether bond, or an ester bond, and R 1 and R 2 may be combined to form a ring.
R1 및 R2로 표시되는 알킬기로서는 탄소수 1 내지 20의 것이 바람직하고, 탄소수 1 내지 5의 것이 보다 바람직하다. 예를 들면 메틸기, 에틸기, 프로필기, 이소프로필기, n-부틸기, 이소부틸기, 제2부틸기, 제3부틸기, 아밀(amyl)기, 이소아밀기, 제3아밀기, 헥실기, 헵틸기, 옥틸기, 이소옥틸기, 2-에틸헥실기, 제3옥틸기, 노닐(nonyl)기, 이소노닐기, 데실(decyl)기, 이소데실기 등의 직쇄상 또는 분기상의 포화 탄화수소기나, 비닐기, 알릴(allyl)기, 부테닐기, 에티닐기, 프로피닐 기 등의 직쇄상 또는 분기상의 불포화 탄화수소기를 들 수 있다. 또, 치환기를 가지고 있어도 좋다. 예를 들면, 메톡시에톡시에틸(methoxyethoxyethyl)기, 에톡시에톡시에틸기, 프로필옥시에톡시에틸기, 메톡시프로필기, 2-(벤즈옥사졸 2'-일)에테닐기 등을 들 수 있다. 그 중에서 상기 A는 메틸기인 것이 바람직하다.As an alkyl group represented by R <1> and R <2> , a C1-C20 thing is preferable and a C1-C5 thing is more preferable. For example, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, second butyl group, third butyl group, amyl group, isoamyl group, third amyl group and hexyl group Linear or branched saturated hydrocarbon groups such as heptyl group, octyl group, isooctyl group, 2-ethylhexyl group, third octyl group, nonyl group, isononyl group, decyl group and isodecyl group; And linear or branched unsaturated hydrocarbon groups such as vinyl group, allyl group, butenyl group, ethynyl group and propynyl group. Moreover, you may have a substituent. For example, a methoxyethoxyethyl group, an ethoxyethoxyethyl group, a propyloxyethoxyethyl group, a methoxypropyl group, the 2- (benzoxazol 2-yl) ethenyl group etc. are mentioned. Among them, A is preferably a methyl group.
R1 및 R2로 표시되는 아릴(aryl)기로서는 탄소수 6 내지 20의 것이 바람직하고, 탄소수 6 내지 10의 것이 보다 바람직하다. 또, 불포화 결합을 함유하고 있어도 좋다. 예를 들면, 페닐기, 톨릴(tolyl)기, 크실릴(xylyl)기, 에틸페닐기, 나프틸기, 안트릴기, 페난트릴기 등을 들 수 있다.As an aryl group represented by R <1> and R <2> , a C6-C20 thing is preferable and a C6-C10 thing is more preferable. Moreover, you may contain an unsaturated bond. For example, a phenyl group, a tolyl group, a xylyl group, an ethylphenyl group, a naphthyl group, an anthryl group, a phenanthryl group, etc. are mentioned.
R1 및 R2로 표시되는 아랄킬(aralkyl)기로서는 탄소수 7 내지 20의 것이 바람직하고, 탄소수 7 내지 12의 것이 보다 바람직하다. 또, 불포화 결합을 함유하고 있어도 좋다. 예를 들면, 벤질기, α-메틸벤질기, α, α-디메틸벤질기, 페닐에틸기, 페닐에테닐기 등을 들 수 있다.As an aralkyl group represented by R <1> and R <2> , a C7-C20 thing is preferable and a C7-C12 thing is more preferable. Moreover, you may contain an unsaturated bond. For example, a benzyl group, the (alpha)-methyl benzyl group, the (alpha), the (alpha)-dimethyl benzyl group, the phenyl ethyl group, the phenylethenyl group, etc. are mentioned.
R1 및 R2로 표시되는 복소환기로서는 질소 원자(N), 유황 원자(S) 및 산소 원자(O)의 적어도 하나의 원자를 포함하는 5원환(five membered ring) 이상, 바람직하게는 5 내지 7원환의 복소환기를 들 수 있다. 이 복소환기에는 축합환이 포함되어 있어도 좋고, 예를 들면 피리딜기, 피리미딜기, 퓨릴(furyl)기, 티오페닐기 등을 들 수 있다.As the heterocyclic group represented by R 1 and R 2 , at least five membered rings including at least one atom of a nitrogen atom (N), a sulfur atom (S) and an oxygen atom (O), preferably 5 to 5 atoms. 7-membered ring heterocyclic group is mentioned. Condensed ring may be contained in this heterocyclic group, For example, a pyridyl group, a pyrimidyl group, a furyl group, a thiophenyl group, etc. are mentioned.
이들 R1 및 R2는 할로겐 원자로 치환되어 있어도 좋다. 예를 들면, 모노플루 오로메틸기, 디플루오로메틸기, 트리플루오로메틸기, 퍼플루오로에틸기, 클로로페닐기, 클로로벤질기 등을 들 수 있다.These R 1 and R 2 may be substituted with a halogen atom. For example, a monofluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a chlorophenyl group, a chlorobenzyl group, etc. are mentioned.
또한 이들 R1 및 R2 중 알킬기 및 아랄킬(aralkyl)기의 알킬렌(alkylene) 부분은 불포화 결합, 에테르결합, 티오에테르(thioether) 결합, 에스테르결합에 의해 중단되어 있어도 좋다.Moreover, the alkylene part of the alkyl group and the aralkyl group of these R <1> and R <2> may be interrupted by an unsaturated bond, an ether bond, a thioether bond, and an ester bond.
또, R1 및 R2가 하나로 되어 형성할 수 있는 환으로서는 복소환을 들 수 있다. 이 복소환으로서는 질소 원자(N), 유황 원자(S) 및 산소 원자(O)의 적어도 하나의 원자를 포함하는 5원환 이상, 바람직하게는 5 내지 7원환의 복소환기를 들 수 있다. 이 복소환기에는 축합환이 포함되어 있어도 좋고, 예를 들면 피페리딘(piperidine)환, 피페라진(piperazine)환, 모르폴린(morpholine)환, 티오모르폴린(thiomorpholine)환 등을 들 수 있다.Moreover, as a ring which R <1> and R <2> becomes one and can form, a heterocyclic ring is mentioned. As this heterocycle, the 5-membered ring or more, preferably the 5-7 membered heterocyclic group containing at least 1 atom of a nitrogen atom (N), a sulfur atom (S), and an oxygen atom (O) is mentioned. Condensed ring may be contained in this heterocyclic group, For example, a piperidine ring, a piperazine ring, a morpholine ring, a thiomorpholine ring, etc. are mentioned.
상기 E는 치환기를 가지고 있어도 좋은 공역 이중 결합성 환상기이다. 이 공역 이중 결합성 환상기로서는 방향환, 또는 N 원자, S 원자, O 원자를 환 내에 가지는 복소환을 들 수 있다. 이 방향환으로서는 예를 들면, 페닐기, 나프틸기, 안트릴(anthryl)기 등을 들 수 있다. 복소환으로서는 예를 들면, 피롤기, 이미다졸릴(imidazolyl)기, 피라졸릴(pyrazolyl)기 등의 질소 함유 5원환기; 피리딜기, 피라지닐기, 피리미딜기, 피리다지닐기 등의 질소 함유 6원환기; 티아졸릴(thiazolyl)기, 이소티아졸릴기 등의 질소 유황 함유기; 옥사졸릴기, 이소옥사졸릴기 등의 질소 산소 함유기; 퓨릴(furyl)기, 피라닐(pyranyl)기 등의 산소 함 유기; 티에닐(thienyl)기, 티오피라닐(thiopyranyl)기 등의 유황 함유기 등을 들 수 있다.E is a conjugated double bond cyclic group which may have a substituent. As this conjugated double bond cyclic group, the aromatic ring or the heterocyclic ring which has N atom, S atom, and O atom in a ring is mentioned. As this aromatic ring, a phenyl group, a naphthyl group, an anthryl group, etc. are mentioned, for example. As a heterocyclic ring, For example, nitrogen containing 5-membered ring groups, such as a pyrrole group, an imidazolyl group, a pyrazolyl group; Nitrogens, such as a pyridyl group, a pyrazinyl group, a pyrimidyl group, and a pyridazinyl group Containing 6-membered ring group; nitrogen-sulfur-containing groups such as thiazolyl group and isothiazolyl group; nitrogen-oxygen-containing groups such as oxazolyl group and isoxazolyl group; furyl group and pyranyl group Oxygen containing organics, such as; Thienyl group, Sulfur containing groups, such as a thiopyranyl group, etc. are mentioned.
상기 E에 있어서의 치환기로서는 -NO2, -CN, -SO2R3, -COR3, -NR4R5, -R6 등을 들 수 있다.Examples of the substituent in E include -NO 2 , -CN, -SO 2 R 3 , -COR 3 , -NR 4 R 5 , and -R 6 .
상기 R3은 각각 독립하여 알킬기를 나타내고, 이들은 할로겐 원자로 치환되어 있어도 좋고, 이들 중 알킬기의 알킬렌 부분은 에테르결합, 티오에테르결합, 에스테르결합에 의해 중단되어 있어도 좋다. 상기 R3에 있어서의 알킬기는 탄소수 1∼5인 것이 바람직하고, 예를 들면 메틸기, 에틸기, 프로필기, 이소프로필기, n-부틸기, 이소부틸기 등을 들 수 있다.R <3> respectively independently represents an alkyl group, These may be substituted by the halogen atom, Among these, the alkylene part of an alkyl group may be interrupted by an ether bond, a thioether bond, and an ester bond. It is preferable that the alkyl group in said R <3> is C1-C5, for example, a methyl group, an ethyl group, a propyl group, isopropyl group, n-butyl group, isobutyl group, etc. are mentioned.
상기 R4 및 R5는 각각 독립하여 수소 원자, 알킬기, 알콕시기를 나타내고, 이들은 할로겐 원자로 치환되어 있어도 좋고, 이들 중 알킬기 및 알콕시기의 알킬렌 부분은 에테르결합, 티오에테르결합, 에스테르결합에 의해 중단되어 있어도 좋고, 또 R4 및 R5는 하나로 되어 환을 형성하고 있어도 좋다. 상기 R4 및 R5에 있어서의 알킬기 또는 알콕시기는 탄소수 1∼5인 것이 바람직하고, 예를 들면 메틸기, 에틸기, 프로필기, 이소프로필기, n-부틸기, 이소부틸기, 메톡시기, 에톡시기, 프로폭시기 등을 들 수 있다.R 4 and R 5 each independently represent a hydrogen atom, an alkyl group, or an alkoxy group, and these may be substituted with halogen atoms, among which the alkylene portion of the alkyl group and the alkoxy group is interrupted by an ether bond, a thioether bond, or an ester bond May be sufficient, and R <4> and R <5> may be united, and may form the ring. It is preferable that the alkyl group or the alkoxy group in said R <4> and R <5> is C1-C5, For example, a methyl group, an ethyl group, a propyl group, isopropyl group, n-butyl group, isobutyl group, a methoxy group, an ethoxy group And propoxy groups.
상기 R6은 일부 또는 전부가 할로겐 원자로 치환된 알킬기이다. 상기 R6에 있어서의 알킬기로서는 탄소수 1∼5인 것이 바람직하고, 예를 들면 메틸기, 에틸기, 프로필기, 이소프로필기, n-부틸기, 이소부틸기 등을 들 수 있다.R 6 is an alkyl group, part or all of which is substituted with a halogen atom. As an alkyl group in said R <6> , a C1-C5 thing is preferable, For example, a methyl group, an ethyl group, a propyl group, isopropyl group, n-butyl group, isobutyl group, etc. are mentioned.
또, 상기 식 (1)로 표시되는 화합물은 α로 표시되는 N 원자와 β로 표시되는 O 원자의 결합 길이(α-β 사이의 결합 길이)가 1.360Å 이상인 것이 바람직하고, 1.365 이상인 것이 보다 바람직하다. α-β 사이의 결합 길이가 1.360Å 이상임으로써 본 발명의 감광성 조성물의 감도를 향상시킬 수가 있다.The compound represented by the formula (1) preferably has a bond length (bond length between α-β) of an N atom represented by α and an O atom represented by β, and more preferably 1.360 GPa or more. Do. When the bond length between α-β is 1.360 kPa or more, the sensitivity of the photosensitive composition of the present invention can be improved.
또한, 상기 식 (1)로 표시되는 화합물은 α로 표시되는 N 원자와 β로 표시되는 O 원자의 결합 차수(α-β 사이의 결합 차수)가 0.965 이하인 것이 바람직하고, 0.960 이하인 것이 보다 바람직하다. α-β 사이의 결합 차수가 0.965 이하임으로써, 본 발명의 감광성 조성물의 감도를 향상시킬 수가 있다.In addition, the compound represented by the formula (1) preferably has a bond order (bond order between α-β) of the N atom represented by α and the O atom represented by β, more preferably 0.965 or less. . When the bond order between α-β is 0.965 or less, the sensitivity of the photosensitive composition of the present invention can be improved.
또한, 상기 결합 길이 및 결합 차수는 분자 모델링 소프트웨어(modeling software) 「CAChe Work System Pro version 6.1.12.33」(후지쯔주식회사)을 사용하여, PM5 파라미터를 이용한 MOPAC로 계산한 값이다.In addition, the said bond length and the bond order are the values computed by MOPAC using PM5 parameter using molecular modeling software "CAChe Work System® Prosersion 6.1.12.33" (Fujitsu Corporation).
상기 α-β 사이의 결합 길이 및 결합 차수는 놀랄 만한 것으로 α 및 β의 양 원자로부터 원자간 거리가 먼 상기 E의 종류에 의해 크게 변화하고 있다. 즉, 이 E의 종류에 의해 α-β 사이의 결합 길이 및 결합 차수가 변화하고, 나아가서는 본 발명의 감광성 조성물의 감도를 향상시키고 있는 것이라고 추측된다.The bond length and the bond order between the?-? Are remarkable, and are greatly changed by the kind of E above which the distance between the atoms of the? And? Atoms is far from each other. That is, it is guessed that the bond length and bond order between (alpha)-(beta) change with this kind of E, and also the sensitivity of the photosensitive composition of this invention is improved.
이 E에 있어서의 공역 이중 결합성 환상기로서는 복소환인 것이 바람직하고, 환 내에 N 원자를 가지는 환상기가 더 바람직하다. 환 내에 N 원자를 가지는 환상기로서는 질소 함유 5원환기 및 질소 함유 6원환기가 바람직하고, 질소 함유 5원환 기가 특히 바람직하다. 이 질소 함유 5원환기로서는 피롤(pyrrole)기가 바람직하다.As a conjugated double bond cyclic group in this E, it is preferable that it is a heterocyclic ring, and the cyclic group which has N atom in a ring is more preferable. As a cyclic group which has N atom in a ring, a nitrogen containing 5-membered ring group and a nitrogen containing 6-membered ring group are preferable, and a nitrogen containing 5-membered ring group is especially preferable. As this nitrogen-containing 5-membered ring group, a pyrrole group is preferable.
또, 상기 E에 있어서의 치환기로서는 N 원자를 가지는 것이 바람직하고, 공역 이중 결합성 환상기의 환에 직접 결합하고 있는 치환기가 보다 바람직하다. 이 공역 이중 결합성 환상기의 환에 직접 결합하고 있는 치환기로서는 상기 -NR4R5를 들 수 있고, 특히 아미노기, 모르폴리노(morpholino)기 등인 것이 바람직하다.Moreover, it is preferable to have N atom as a substituent in said E, and the substituent which is couple | bonded with the ring of a conjugated double bond cyclic group directly is more preferable. Examples of the substituent directly bonded to the ring of the conjugated double bond cyclic group include the above-NR 4 R 5 , and an amino group, a morpholino group, and the like are particularly preferable.
또, 광중합 개시제는 상기 식 (1)로 표시되는 화합물과, 다른 광중합 개시제를 여러 종류 조합하여 이용해도 좋다. 이러한 다른 광중합 개시제로서는 아세토페논, 2, 2-디에톡시아세토페논, p-디메틸아세토페논, p-디메틸아미노프로피오페논, 디클로로아세토페논, 트리클로로아세토페논, p-tert-부틸아세토페논 등의 아세토페논(acetophenone)류나, 벤조페논, 2-클로로벤조페논, p, p'-비스디메틸아미노벤조페논 등의 벤조페논(benzophenone)류나, 벤질, 벤조인, 벤조인메틸에테르, 벤조인이소프로필에테르, 벤조인이소부틸에테르등의 벤조인에테르(benzoin ether)류나, 벤질디메틸케탈, 티옥산텐, 2-클로로티옥산텐, 2, 4-디에틸티옥산텐, 2-메틸티옥산텐, 2-이소프로필티옥산텐 등의 유황 화합물이나, 2-에틸안트라퀴논, 옥타메틸안트라퀴논, 1, 2-벤즈안트라퀴논, 2, 3-디페닐안트라퀴논 등의 안트라퀴논(anthraquinone)류나, 아조비스이소부티로니트릴, 벤조일퍼옥시드, 큐멘퍼옥시드 등의 유기 과산화물이나, 2-머캅토벤조이미달, 2-머캅토벤즈옥사졸, 2-머캅토벤조티아졸 등의 티올(thiol) 화합물이나, 2-(o-클로로페닐)-4, 5-디(m-메 톡시페닐)-이미다졸릴 2량체 등의 이미다졸릴(imidazolyl) 화합물이나, p-메톡시트리아진 등의 트리아진(triazine) 화합물이나, 2, 4, 6-트리스(트리클로로메틸)-s-트리아진, 2-메틸-4, 6-비스(트리클로로메틸)-s-트리아진, 2-[2-(5-메틸퓨란-2-일)에테닐]-4, 6-비스(트리클로로메틸)-s-트리아진, 2-[2-(퓨란-2-일)에테닐]-4, 6-비스(트리클로로메틸)-s-트리아진, 2-[2-(4-디에틸아미노-2-메틸페닐)에테닐]-4, 6-비스(트리클로로메틸)-s-트리아진, 2-[2-(3, 4-디메톡시페닐)에테닐]-4, 6-비스(트리클로로메틸)-s-트리아진, 2-(4-메톡시페닐)-4, 6-비스(트리클로로메틸)-s-트리아진, 2-(4-에톡시스티릴)-4, 6-비스(트리클로로메틸)-s-트리아진, 2-(4-n-부톡시페닐)-4, 6-비스(트리클로로메틸)-s-트리아진 등의 할로메틸(halomethyl)기를 가지는 트리아진(triazine) 화합물, 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)-부탄-1-온 등의 아미노케톤(aminoketone) 화합물을 들 수 있다.Moreover, you may use a photoinitiator combining various types of the compound represented by said formula (1), and another photoinitiator. As such another photoinitiator, acetophenone, such as acetophenone, 2, 2- diethoxy acetophenone, p-dimethyl acetophenone, p-dimethylamino propiophenone, dichloroacetophenone, trichloro acetophenone, and p-tert- butyl acetophenone Benzophenones such as phenones, benzophenone, 2-chlorobenzophenone, p, p'-bisdimethylaminobenzophenone, benzyl, benzoin, benzoin methyl ether, benzoin isopropyl ether, Benzoin ethers such as benzoin isobutyl ether, benzyl dimethyl ketal, thioxanthene, 2-chlorothioxanthene, 2,4-diethylthioxanthene, 2-methylthioxanthene and 2- Sulfur compounds such as isopropyl thioxanthene, anthraquinones such as 2-ethylanthraquinone, octamethylanthraquinone, 1,2-benzanthraquinone, 2,3-diphenylanthraquinone and azobisiso Butyronitrile, benzoylperoxide, Organic peroxides such as menperoxide, thiol compounds such as 2-mercaptobenzoimidal, 2-mercaptobenzoxazole and 2-mercaptobenzothiazole, and 2- (o-chlorophenyl) -4 , Imidazolyl compounds such as 5-di (m-methoxyphenyl) -imidazolyl dimer, triazine compounds such as p-methoxytriazine, and 2, 4, 6- Tris (trichloromethyl) -s-triazine, 2-methyl-4, 6-bis (trichloromethyl) -s-triazine, 2- [2- (5-methylfuran-2-yl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (furan-2-yl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2 -To [2- (4-diethylamino-2-methylphenyl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (3,4-dimethoxyphenyl) Tenyl] -4, 6-bis (trichloromethyl) -s-triazine, 2- (4-methoxyphenyl)- 4,6-bis (trichloromethyl) -s-triazine, 2- (4-ethoxystyryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-n- Triazine compound which has halomethyl group, such as butoxyphenyl) -4 and 6-bis (trichloromethyl) -s-triazine, 2-benzyl 2- dimethylamino-1- (4- And aminoketone compounds such as morpholinophenyl) -butan-1-one.
상기 광중합 개시제는 고형분의 합계 100질량부에 대하여 0.1∼50질량부인 것이 바람직하고, 1∼45질량부인 것이 보다 바람직하다.It is preferable that it is 0.1-50 mass parts with respect to a total of 100 mass parts of solid content, and, as for the said photoinitiator, it is more preferable that it is 1-45 mass parts.
또한, 상기 고형분이라는 것은 본 발명의 감광성 조성물에 있어서, 용제를 제외한 모든 성분의 것이다.In addition, the said solid content is all the components except a solvent in the photosensitive composition of this invention.
광중합성 화합물로서는 에틸렌(ethylene)성 이중 결합을 가지는 화합물이 바람직하고, 구체적으로는 아크릴산, 메타크릴산, 푸마르산, 말레산, 푸마르산모노메틸, 푸마르산모노에틸, 2-히드록시에틸아크릴레이트, 2-히드록시에틸메타크릴레이트, 에틸렌글리콜모노메틸에테르아크릴레이트, 에틸렌글리콜모노메틸에테르메타 크릴레이트, 에틸렌글리콜모노에틸에테르아크릴레이트, 에틸렌글리콜모노에틸에테르메타크릴레이트, 글리세롤아크릴레이트, 글리세롤메타크릴레이트, 아크릴산아미드, 메타크릴산아미드, 아크릴로니트릴, 메타크릴로니트릴, 메틸아크릴레이트, 메틸메타크릴레이트, 에틸아크릴레이트, 에틸메타크릴레이트, 이소부틸아크릴레이트, 이소부틸메타크릴레이트, 2-에틸헥실아크릴레이트, 2-에틸헥실메타크릴레이트, 벤질아크릴레이트, 벤질메타크릴레이트, 에틸렌글리콜디아크릴레이트, 에틸렌글리콜디메타크릴레이트, 디에틸렌글리콜디아크릴레이트, 트리에틸렌글리콜디아크릴레이트, 트리에틸렌글리콜디메타크릴레이트, 테트라에틸렌글리콜디아크릴레이트, 테트라에틸렌글리콜디메타크릴레이트, 부틸렌글리콜디메타크릴레이트, 프로필렌글리콜디아크릴레이트, 프로필렌글리콜디메타크릴레이트, 트리메틸올프로판트리아크릴레이트, 트리메틸올프로판트리메타크릴레이트, 테트라메틸올프로판테트라아크릴레이트, 테트라메틸올프로판테트라메타크릴레이트, 펜타에리쓰리톨트리아크릴레이트, 펜타에리쓰리톨트리메타크릴레이트, 펜타에리쓰리톨테트라아크릴레이트(PTA), 펜타에리쓰리톨테트라메타크릴레이트, 디펜타에리쓰리톨펜타아크릴레이트, 디펜타에리쓰리톨펜타메타크릴레이트, 디펜타에리쓰리톨헥사아크릴레이트(DPHA), 디펜타에리쓰리톨헥사메타크릴레이트, 1, 6-헥산디올디아크릴레이트, 1, 6-헥산디올디메타크릴레이트, 카르도에폭시디아크릴레이트 등의 모노머, 올리고머류; 다가 알코올류와 1염기산 또는 다염기산을 축합하여 얻어지는 폴리에스테르 프리폴리머(prepolymer)에 (메트)아크릴산((meth)acrylic acid)을 반응시켜 얻어지는 폴리에스테르(메트)아크릴레이트, 폴리올기와 2개의 이소시아네이트기를 가지는 화합물 을 반응시킨 후, (메트)아크릴산을 반응시켜 얻어지는 폴리우레탄(메트)아크릴레이트; 비스페놀 A형 에폭시 수지, 비스페놀 F형 에폭시 수지, 비스페놀 S형 에폭시 수지, 페놀 또는 크레졸 노볼락형 에폭시 수지, 레졸형 에폭시 수지, 트리페놀메탄형 에폭시 수지, 폴리카르복실산폴리글리시딜 에스테르, 폴리올폴리글리시딜 에스테르, 지방족 또는 지환식 에폭시 수지, 아민에폭시 수지, 디히드록시벤젠형 에폭시 수지 등의 에폭시(epoxy) 수지와 (메트)아크릴산을 반응시켜 얻어지는 에폭시(메트)아크릴레이트 수지 등을 들 수 있다. 또한 상기 에폭시(메트)아크릴레이트 수지에 다염기산 무수물을 반응시킨 수지도 바람직하게 사용할 수 있다.As a photopolymerizable compound, the compound which has ethylene (ethylene) double bond is preferable, Specifically, acrylic acid, methacrylic acid, fumaric acid, maleic acid, monomethyl fumarate, monoethyl fumarate, 2-hydroxyethyl acrylate, 2- Hydroxyethyl methacrylate, ethylene glycol monomethyl ether acrylate, ethylene glycol monomethyl ether methacrylate, ethylene glycol monoethyl ether acrylate, ethylene glycol monoethyl ether methacrylate, glycerol acrylate, glycerol methacrylate, Acrylic acid amide, methacrylic acid amide, acrylonitrile, methacrylonitrile, methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, isobutyl acrylate, isobutyl methacrylate, 2-ethylhexyl Acrylate, 2-ethylhexyl methacrylate, benzyl arc Ethylene, benzyl methacrylate, ethylene glycol diacrylate, ethylene glycol dimethacrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, triethylene glycol dimethacrylate, tetraethylene glycol diacrylate, tetra Ethylene Glycol Dimethacrylate, Butylene Glycol Dimethacrylate, Propylene Glycol Diacrylate, Propylene Glycol Dimethacrylate, Trimethylol Propane Triacrylate, Trimethylol Propane Trimethacrylate, Tetramethylol Propane Tetraacrylate , Tetramethylol propane tetramethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, pentaerythritol tetraacrylate (PTA), pentaerythritol tetramethacrylate, dipenta Rithritol pentaacrylate, dipentaerythritol Pentamethacrylate, dipentaerythritol hexaacrylate (DPHA), dipentaerythritol hexamethacrylate, 1,6-hexanedioldiacrylate, 1,6-hexanedioldimethacrylate, cardo Monomers and oligomers such as epoxy diacrylate; polyester (meth) obtained by reacting (meth) acrylic acid with a polyester prepolymer obtained by condensation of polyhydric alcohols with monobasic or polybasic acids Polyurethane (meth) acrylate obtained by reacting a acrylate, a compound having a polyol group and two isocyanate groups, and then reacting (meth) acrylic acid; a bisphenol A type epoxy resin, a bisphenol F type epoxy resin, a bisphenol S type epoxy resin , Phenol or cresol novolak type epoxy resin, resol type epoxy resin, triphenol methane type epoxy resin, polycarboxylic acid poly Epoxy (meth) obtained by reacting epoxy resins such as glycidyl esters, polyol polyglycidyl esters, aliphatic or alicyclic epoxy resins, amine epoxy resins, and dihydroxybenzene type epoxy resins with (meth) acrylic acid An acrylate resin etc. are mentioned. Moreover, the resin which made polybasic acid anhydride react with the said epoxy (meth) acrylate resin can also be used preferably.
상기 광중합성 화합물은 에틸렌성 이중 결합을 가지는 수지와 상기 모노머를 조합하는 것이 바람직하다. 이 모노머로서는 에틸렌글리콜디아크릴레이트, 에틸렌글리콜디메타크릴레이트, 디에틸렌글리콜디아크릴레이트, 트리에틸렌글리콜디아크릴레이트, 트리에틸렌글리콜디메타크릴레이트, 테트라에틸렌글리콜디아크릴레이트, 테트라에틸렌글리콜디메타크릴레이트, 부틸렌글리콜디메타크릴레이트, 프로필렌글리콜디아크릴레이트, 프로필렌글리콜디메타크릴레이트, 트리메틸올프로판트리아크릴레이트, 트리메틸올프로판트리메타크릴레이트, 테트라메틸올프로판테트라아크릴레이트, 테트라메틸올프로판테트라메타크릴레이트, 펜타에리쓰리톨트리아크릴레이트, 펜타에리쓰리톨트리메타크릴레이트, 펜타에리쓰리톨테트라아크릴레이트, 펜타에리쓰리톨테트라메타크릴레이트, 디펜타에리쓰리톨펜타아크릴레이트, 디펜타에리쓰리톨펜타메타크릴레이트, 디펜타에리쓰리톨헥사아크릴레이트(DPHA), 디펜타에리쓰리톨헥사메타크릴레이트, 1, 6-헥산디올디아크릴레이트, 1, 6-헥산디올디메타 크릴레이트, 카르도에폭시디아크릴레이트 등의 다관능성 모노머가 바람직하다.It is preferable that the said photopolymerizable compound combines the said monomer and resin which has an ethylenic double bond. As this monomer, ethylene glycol diacrylate, ethylene glycol dimethacrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, triethylene glycol dimethacrylate, tetraethylene glycol diacrylate, tetraethylene glycol dimetha Acrylate, butylene glycol dimethacrylate, propylene glycol diacrylate, propylene glycol dimethacrylate, trimethylol propane triacrylate, trimethylol propane trimethacrylate, tetramethylol propane tetraacrylate, tetramethylol Propane tetramethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, pentaerythritol tetraacrylate, pentaerythritol tetramethacrylate, dipentaerythritol pentaacrylate, di Pentaerythritol pentamethacrylate Ditrate, dipentaerythritol hexaacrylate (DPHA), dipentaerythritol hexamethacrylate, 1, 6-hexanediol diacrylate, 1, 6-hexanediol dimethacrylate, cardoepoxy diacrylate Polyfunctional monomers, such as a rate, are preferable.
상기 광중합성 화합물로서는, 에폭시 화합물과 불포화기 함유 카르복실산의 반응물을 다염기산 무수물과 더 반응시킴으로써 얻어지는 수지를 포함하는 것이 바람직하다. 그 중에서 하기 식 (a1)로 표시되는 화합물이 바람직하다. 식 (a1)로 표시되는 화합물은 그 자체가 광경화성이 높다는 점에서 바람직한 화합물이다.As said photopolymerizable compound, it is preferable to contain resin obtained by making the reaction material of an epoxy compound and an unsaturated group containing carboxylic acid further react with polybasic acid anhydride. Especially, the compound represented by following formula (a1) is preferable. The compound represented by a formula (a1) is a preferable compound by the point which is itself high in photocurability.
여기서, 식 (a1)로 표시되는 화합물의 X는 식 (a2)로 표시되는 기이다.Here, X of the compound represented by Formula (a1) is group represented by Formula (a2).
로 표시되는 기, R1a는 각각 독립하여 수소 원자, 탄소수 1∼6의 탄화수소기, 할로겐 원자를 나타내고, R2a는 각각 독립하여 수소 원자 또는 메틸기를 나타내고, W는 단결합, 또는 하기 식 (a3)으로 표시되는 기를 나타내고, The groups represented by R 1a each independently represent a hydrogen atom, a hydrocarbon group of 1 to 6 carbon atoms and a halogen atom, and R 2a each independently represents a hydrogen atom or a methyl group, and W represents a single bond or the following formula (a3) Represents a group represented by
Y는 디카르복실산 무수물의 산 무수물기를 제외한 잔기, Z는 테트라카르복실산 2무수물의 산 무수물기를 제외한 잔기이고, m은 0∼20의 정수이다.)Y is a residue except the acid anhydride group of dicarboxylic anhydride, Z is a residue except the acid anhydride group of tetracarboxylic dianhydride, and m is an integer of 0-20.)
또, 상기 Y로서는, 예를 들면 무수 말레산, 무수 호박산, 무수 이타콘산, 무수프탈산, 무수 테트라히드로프탈산, 무수 헥사히드로프탈산, 무수 메틸엔도메틸렌테트라히드로프탈산, 무수 클로렌드산(chlorendic anhydride), 메틸테트라히드로 무수프탈산, 무수 글루타르산이라고 하는 디카르복실산 무수물에서 카르복실산 무수물기(-CO-O-CO-)를 제외한 잔기를 들 수 있다.Moreover, as said Y, for example, maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methylendomethylenetetrahydrophthalic anhydride, chlorendic anhydride, The residue remove | excluding the carboxylic anhydride group (-CO-O-CO-) from the dicarboxylic anhydride called methyltetrahydro phthalic anhydride and glutaric anhydride is mentioned.
또, 상기 Z로서는, 예를 들면 무수 피로멜리트산(pyromellitic anhydride), 벤조페논테트라카르복실산 2무수물, 비페닐테트라카르복실산 2무수물, 비페닐에테르테트라카르복실산 2무수물 등의 테트라카르복실산 2무수물(tetracarboxylic dianhydride)에서 2개의 카르복실산 무수물기를 제외한 잔기 등을 들 수 있다.Moreover, as said Z, tetracarboxyl, such as pyromellitic anhydride, benzophenone tetracarboxylic dianhydride, a biphenyl tetracarboxylic dianhydride, and a biphenyl ether tetracarboxylic dianhydride, for example. And residues excluding two carboxylic acid anhydride groups from tetracarboxylic dianhydride.
상기 에틸렌성 이중 결합을 가지는 수지의 산가는 수지 고형분에 10mg KOH/g 이상 150mg KOH/g 이하인 것이 바람직하고, 보다 바람직하게는 70mg KOH/g 이상 110mg KOH/g 이하이다. 수지의 산가를 10mg KOH/g 이상으로 함으로써 현상액에 대한 충분한 용해성이 얻어지고, 또 산가를 150mg KOH/g 이하로 함으로써 충분한 경화성을 얻을 수 있고, 표면성을 양호하게 할 수가 있다.The acid value of the resin having an ethylenic double bond is preferably 10 mg KOH / g or more and 150 mg KOH / g or less, more preferably 70 mg KOH / g or more and 110 mg KOH / g or less in the resin solid content. By setting the acid value of the resin to 10 mg KOH / g or more, sufficient solubility in the developer is obtained, and by setting the acid value to 150 mg KOH / g or less, sufficient curability can be obtained and the surface property can be improved.
또, 에틸렌성 이중 결합을 가지는 수지의 중량평균분자량은 1000 이상 40000 이하인 것이 바람직하고, 보다 바람직하게는 2000 이상 30000 이하이다. 중량평균분자량을 1000 이상으로 함으로써 내열성, 막 강도를 향상시킬 수가 있다. 또, 40000 이하로 함으로써 현상액에 대한 충분한 용해성을 얻을 수 있다.Moreover, it is preferable that the weight average molecular weights of resin which has an ethylenic double bond are 1000 or more and 40000 or less, More preferably, they are 2000 or more and 30000 or less. By setting the weight average molecular weight to 1000 or more, heat resistance and film strength can be improved. Moreover, sufficient solubility with respect to a developing solution can be obtained by setting it as 40000 or less.
상기 광중합성 화합물은 고형분의 합계 100질량부에 대하여 50∼99.9질량부의 범위로 함유되는 것이 바람직하다. 함유량을 50질량부 이상으로 함으로써 충분 한 내열성, 내약품성을 기대할 수 있다.It is preferable that the said photopolymerizable compound is contained in 50-99.9 mass parts with respect to 100 mass parts in total of solid content. When the content is 50 parts by mass or more, sufficient heat resistance and chemical resistance can be expected.
상기 광중합성 화합물은 착색제를 함유하고 있어도 좋다. 상기 착색제로서는 예를 들면, 컬러 인덱스(color index)(C. I.; The Society of Dyers and Colourists사 발행)에 있어서 안료(Pigment)로 분류되어 있는 화합물, 구체적으로는 하기와 같은 컬러 인덱스(C. I.) 번호가 붙어 있는 것을 들 수가 있다. 이 착색제는 단독으로 이용해도 좋고, 색조를 조정하기 위해서 2종 이상을 혼합하여 이용해도 좋다.The said photopolymerizable compound may contain the coloring agent. As the colorant, for example, a compound classified as a pigment in a color index (CI; issued by The Society Society of Dyers and Colourists), and specifically the following color index (CI) number There is a thing attached. This coloring agent may be used independently, and in order to adjust color tone, you may mix and use 2 or more types.
C. I. 피그먼트 옐로우(pigment yellow) 1(이하, 「C. I. 피그먼트 옐로우」는 동일하므로 번호만 기재한다.), 3, 11, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 55, 60, 61, 65, 71, 73, 74, 81, 83, 86, 93, 95, 97, 98, 99, 100, 101, 104, 106, 108, 109, 110, 113, 114, 116, 117, 119, 120, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 166, 167, 168, 175, 180, 185; CI pigment yellow 1 (hereinafter, "CI pigment yellow" is the same, so only numbers are listed.), 3, 11, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 55, 60, 61, 65, 71, 73, 74, 81, 83, 86, 93, 95, 97, 98, 99, 100, 101, 104, 106, 108, 109, 110, 113, 114, 116, 117, 119, 120, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 166, 167, 168, 175, 180, 185;
C. I. 피그먼트 오렌지(pigment orande) 1(이하, 「C. I. 피그먼트 오렌지」는 동일하므로 번호만 기재한다.), 5, 13, 14, 16, 17, 24, 34, 36, 38, 40, 43, 46, 49, 51, 55, 59, 61, 63, 64, 71, 73; CI pigment orange 1 (hereinafter "CI pigment orange" is the same, so only numbers are listed.), 5, 13, 14, 16, 17, 24, 34, 36, 38, 40, 43, 46, 49, 51, 55, 59, 61, 63, 64, 71, 73;
C. I. 피그먼트 바이올렛(pigment violet) 1(이하, 「C. I. 피그먼트 바이올렛」은 동일하므로 번호만 기재한다.), 19, 23, 29, 30, 32, 36, 37, 38, 39, 40, 50; C. I. pigment violet 1 (hereinafter, "C. I. pigment violet" is the same, so only numbers are listed.), 19, 23, 29, 30, 32, 36, 37, 38, 39, 40, 50;
C. I. 피그먼트 레드(pigment red) 1(이하, 「C. I. 피그먼트 레드」는 동일 하므로 번호만 기재한다.), 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14, 15, 16, 17, 18, 19, 21, 22, 23, 30, 31, 32, 37, 38, 40, 41, 42, 48:1, 48:2, 48:3, 48:4, 49:1, 49:2, 50:1, 52:1, 53:1, 57, 57:1, 57:2, 58:2, 58:4, 60:1, 63:1, 63:2, 64:1, 81:1, 83, 88, 90:1, 97, 101, 102, 104, 105, 106, 108, 112, 113, 114, 122, 123, 144, 146, 149, 150, 151, 155, 166, 168, 170, 171, 172, 174, 175, 176, 177, 178, 179, 180, 185, 187, 188, 190, 192, 193, 194, 202, 206, 207, 208, 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 242, 243, 245, 254, 255, 264, 265; CI pigment red 1 (hereinafter, "CI pigment red" is the same, so only numbers are listed.), 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14, 15, 16, 17, 18, 19, 21, 22, 23, 30, 31, 32, 37, 38, 40, 41, 42, 48: 1, 48: 2, 48: 3, 48: 4, 49: 1, 49: 2, 50: 1, 52: 1, 53: 1, 57, 57: 1, 57: 2, 58: 2, 58: 4, 60: 1, 63: 1, 63: 2, 64: 1, 81: 1, 83, 88, 90: 1, 97, 101, 102, 104, 105, 106, 108, 112, 113, 114, 122, 123, 144, 146, 149, 150, 151, 155, 166, 168, 170, 171, 172, 174, 175, 176, 177, 178, 179, 180, 185, 187, 188, 190, 192, 193, 194, 202, 206, 207, 208, 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 242, 243, 245, 254, 255, 264, 265;
C. I. 피그먼트 블루(pigment blue) 1(이하, 「C. I. 피그먼트 블루」는 동일하므로 번호만 기재한다.), 2, 15, 15:3, 15:4, 15:6, 16, 22, 60, 64, 66; CI pigment blue 1 (hereinafter "CI pigment blue" is the same, so only number is listed.), 2, 15, 15: 3, 15: 4, 15: 6, 16, 22, 60, 64, 66;
C. I. 피그먼트 그린(pigment green) 7, C. I. 피그먼트 그린 36, C. I. 피그먼트 그린 37; C. I. pigment green 7, C. I. pigment green 36, C. I. pigment green 37;
C. I. 피그먼트 브라운(pigment brown) 23, C. I. 피그먼트 브라운 25, C. I. 피그먼트 브라운 26, C. I. 피그먼트 브라운 28; C. I. pigment brown 23, C. I. pigment brown 25, C. I. pigment brown 26, C. I. pigment brown 28;
C. I. 피그먼트 블랙(pigment black) 1, 피그먼트 블랙 7.C. I. Pigment Black 1, Pigment Black 7.
또, 블랙 매트릭스(black matrix)를 형성하는 경우에는 착색제로서 차광재를 이용한다. 이 차광재로서는 차광층으로 했을 때에 충분한 차광률을 가지고 있으면 특히 한정되는 것은 아니고, 예를 들면 흑색 안료를 들 수 있다. 이 흑색 안료로서는 카본 블랙(carbon black), 티타늄 블랙(titanium black), 페릴렌 블랙(perylene black) 등을 들 수 있다.In addition, when forming a black matrix, a light shielding material is used as a coloring agent. The light shielding material is not particularly limited as long as it has a sufficient light shielding rate when the light shielding layer is used, and for example, a black pigment may be mentioned. Carbon black, titanium black, perylene black, etc. are mentioned as this black pigment.
차광재로서는 카본 블랙이나 티타늄 블랙을 이용하는 것이 바람직하다. 이 외에 Cu, Fe, Mn, Cr, Co, Ni, V, Zn, Se, Mg, Ca, Sr, Ba, Pd, Ag, Cd, In, Sn, Sb, Hg, Pb, Bi, Si 및 Al 등의 각종 금속 산화물, 복합 산화물, 금속 황화물, 금속 황산납 또는 금속 탄산염 등의 무기 안료도 이용할 수가 있다.As the light shielding material, it is preferable to use carbon black or titanium black. In addition, Cu, Fe, Mn, Cr, Co, Ni, V, Zn, Se, Mg, Ca, Sr, Ba, Pd, Ag, Cd, In, Sn, Sb, Hg, Pb, Bi, Si, Al, etc. Inorganic pigments such as various metal oxides, complex oxides, metal sulfides, metal lead sulfates, or metal carbonates.
카본 블랙으로서는 채널 블랙(channel black), 퍼니스 블랙(furnace black), 서멀 블랙(thermal black), 램프 블랙(lamp black) 등 공지의 카본 블랙을 이용할 수가 있지만, 특히 채널 블랙은 차광성이 뛰어나기 때문에 바람직하게 이용할 수가 있다. 또, 수지 피복 카본 블랙을 이용할 수도 있다. 구체적으로는 카본 블랙과 카본 블랙 표면에 존재하는 카르복실기, 히드록실기, 카르보닐기와 반응성을 가지는 수지를 혼합하고, 50∼380도에서 가열하여 얻은 수지 피복 카본 블랙이나, 물-유기 용제 혼합계 또는 물-계면활성제 혼합계에 에틸렌성 모노머를 분산시키고, 중합 개시제의 존재 하에서 라디칼 중합 또는 라디칼 공중합시켜 얻은 수지 피복 카본 블랙 등을 들 수 있다. 이 수지 피복 카본 블랙은 수지 피복이 없는 카본 블랙에 비하여 도전성이 낮기 때문에, 액정 디스플레이 등의 컬러 필터로서 이용한 경우에 전류의 누설이 적고, 신뢰성이 높은 저소비 전력의 디스플레이를 형성할 수 있다.As the carbon black, known carbon blacks such as channel black, furnace black, thermal black and lamp black can be used, but in particular, the channel black has excellent light shielding properties. It can use preferably. Moreover, resin coated carbon black can also be used. Specifically, a resin-coated carbon black obtained by mixing a carbon black with a resin having reactivity with a carboxyl group, a hydroxyl group, a carbonyl group present on the surface of the carbon black, and heating at 50 to 380 degrees, or a water-organic solvent mixture system or water The resin coating carbon black etc. which were obtained by disperse | distributing an ethylenic monomer to a surfactant mixed system and radical polymerization or radical copolymerization in presence of a polymerization initiator are mentioned. Since the resin-coated carbon black has lower conductivity than carbon black without resin coating, when used as a color filter such as a liquid crystal display, leakage of electric current is small and a low power consumption display with high reliability can be formed.
또, 차광재로서 상기의 무기 안료에 보조 안료로서 유기 안료를 가해도 좋다. 유기 안료는 무기 안료의 보색을 나타내는 것을 적절히 선택하여 가함으로써 다음과 같은 효과가 얻어진다. 예를 들면, 카본 블랙은 불그스름한 흑색을 나타낸다. 따라서, 카본 블랙에 보조 안료로서 적색의 보색인 청색을 나타내는 유기 안료 를 가함으로써 카본 블랙의 붉은 기가 사라져 전체로서 보다 바람직한 흑색을 나타낸다.Moreover, you may add an organic pigment as an auxiliary pigment to said inorganic pigment as a light shielding material. The following effects are acquired by selecting and adding an organic pigment suitably which shows the complementary color of an inorganic pigment. For example, carbon black has a reddish black color. Therefore, by adding the organic pigment which shows blue which is a red complementary color to carbon black as an auxiliary pigment, the red group of carbon black disappears and it shows more preferable black as a whole.
차광재에 있어서의 유기 안료는 무기 안료와 유기 안료의 총합 100질량부에 대해서, 유기 안료를 10∼80질량부의 범위로 이용하면 바람직하고, 보다 바람직하게는 유기 안료가 20∼60질량부이고, 가장 바람직하게는 유기 안료가 20∼40질량부이다.As for the organic pigment in a light-shielding material, it is preferable to use an organic pigment in the range of 10-80 mass parts with respect to a total of 100 mass parts of an inorganic pigment and an organic pigment, More preferably, it is 20-60 mass parts, Most preferably, it is 20-40 mass parts of organic pigments.
상기의 무기 안료 및 유기 안료는 안료를 분산제를 이용하여 적당한 농도로 분산시킨 용액을 이용할 수가 있다. 예를 들면, 무기 안료로서는 미쿠니색소 제조의 카본 분산액 CF 블랙(카본 농도 20% 함유), 미쿠니색소 제조의 카본 분산액 CF 블랙(고저항 카본 24% 함유), 미쿠니색소 제조의 티타늄 블랙 분산액 CF 블랙(흑티타늄 안료 20% 함유)을 들 수가 있다. 또, 유기 안료로서는 예를 들면, 미쿠니색소 제조의 블루 안료 분산액 CF 블루(블루 안료 20% 함유), 미쿠니색소 제조의 바이올렛 분산액(바이올렛 안료 10% 함유) 등을 들 수가 있다.As the inorganic pigment and the organic pigment, a solution obtained by dispersing the pigment at an appropriate concentration using a dispersant can be used. For example, as an inorganic pigment, the Mikuni pigment | dye carbon dispersion CF black (containing 20% of carbon concentration), the Mikuni pigment | dye carbon dispersion CF black (containing 24% of high resistance carbon), the Mikuni pigment | dye titanium black dispersion CF black ( 20% of black titanium pigment). Moreover, as an organic pigment, the Mikuni pigment | dye blue pigment dispersion CF blue (containing 20% of blue pigment), the Mikuni pigment | dye violet dispersion liquid (containing 10% of violet pigment), etc. are mentioned, for example.
또, 분산제로서는 폴리에틸렌이민계, 우레탄 수지계, 아크릴 수지계의 고분자 분산제가 바람직하게 이용된다.Moreover, as a dispersing agent, the polymer dispersing agent of a polyethyleneimine system, a urethane resin system, and an acrylic resin system is used preferably.
착색재를 포함하는 경우, 본 발명에 관계되는 감광성 조성물은 고형분 100질량부 중에 착색재를 1∼70질량부의 범위로 함유하는 것이 바람직하고, 20∼60질량부의 범위로 함유하는 것이 보다 바람직하다.When it contains a coloring material, it is preferable to contain a coloring material in the range of 1-70 mass parts in 100 mass parts of solid content, and, as for the photosensitive composition which concerns on this invention, it is more preferable to contain in the range of 20-60 mass parts.
착색재를 상기 총합 100질량부 중에 1질량부 이상으로 함으로써, 형성되는 착색 패턴의 착색 성능을 향상시킬 수가 있다.By making a coloring material 1 mass part or more in 100 mass parts of said totals, the coloring performance of the coloring pattern formed can be improved.
한편, 착색재의 조성비를 70질량부 이하로 함으로써, 소정 파장의 광선을 조사했을 때에 경화 불량을 일으키는 것을 억제할 수가 있다.On the other hand, by making the composition ratio of a coloring material into 70 mass parts or less, it can suppress that hardening hardening arises when irradiating the light ray of a predetermined wavelength.
또, 특히 착색재로서 차광재를 이용하는 경우에는, 형성되는 막의 막 두께 1μm당의 OD(Optical Density)값이 3.5 이상, 바람직하게는 4.0 이상이 되도록 조정하는 것이 바람직하다. 막 두께 1μm당의 OD값이 3.5 이상이면, 액정 디스플레이의 블랙 매트릭스에 이용한 경우에 충분한 표시 콘트라스트(contrast)를 얻을 수 있고, 필요한 성능이 얻어진다. 이 차광제로서는 카본 블랙이 바람직하다.Moreover, when using a light shielding material especially as a coloring material, it is preferable to adjust so that OD (Optical_Density) value per 1 micrometer of film thickness of the film formed may be 3.5 or more, Preferably it is 4.0 or more. When the OD value per film thickness of 1 μm is 3.5 or more, sufficient display contrast can be obtained when used for the black matrix of the liquid crystal display, and the required performance is obtained. As this light-shielding agent, carbon black is preferable.
특히 본 발명의 감광성 조성물에 있어서는, 차광제를 이용한 경우에도 광중합 개시제로서 상기 (1)로 표시되는 화합물을 이용하고 있기 때문에, 종래와 비교하여 높은 감도를 얻을 수 있다. Especially in the photosensitive composition of this invention, since the compound represented by said (1) is used as a photoinitiator even when a light shielding agent is used, high sensitivity can be acquired compared with the former.
또한 본 발명의 감광성 조성물은 결합제로서 고분자 바인더(binder)를 함유해도 좋다. 이 고분자 바인더는 호환성, 피막 형성성, 현상성, 접착성 등 개선 목적에 따라 적의 선택하면 좋다.Moreover, the photosensitive composition of this invention may contain a polymeric binder as a binder. What is necessary is just to select this polymer binder suitably according to the improvement objectives, such as compatibility, film formation property, developability, and adhesiveness.
상기 고분자 바인더로서는, 구체적으로 아크릴산, 메타크릴산, 메틸아크릴레이트, 메틸메타크릴레이트, 에틸아크릴레이트, 에틸메타크릴레이트, 프로필아크릴레이트, 프로필메타크릴레이트, 이소프로필아크릴레이트, 이소프로필메타크릴레이트, n-부틸아크릴레이트, n-부틸메타크릴레이트, tert-부틸아크릴레이트, tert-부틸메타크릴레이트, 2-히드록시에틸아크릴레이트, 2-히드록시에틸메타크릴레이트, 2-히드록시프로필아크릴레이트, 2-히드록시프로필메타크릴레이트, 벤질아크릴레이트, 벤질메타크릴레이트, 페녹시아크릴레이트, 페녹시메타크릴레이트, 이 소보닐아크릴레이트, 이소보닐메타크릴레이트, 글리시딜메타크릴레이트, 스티렌, 아크릴아미드, 메타크릴아미드, 아크릴로니트릴, 메타크릴로니트릴 등에서 선택된 단량체를 공중합시켜 얻어진 것이나, 측쇄에 카르복실기를 가지는 산성 셀룰로스 변성물, 폴리에틸렌옥시드, 폴리비닐피롤리돈, 아크릴로니트릴, 염화비닐, 염화비닐리덴의 공중합체, 염화비닐리덴, 염소화 폴리올레핀, 또는 염화비닐과 초산비닐의 공중합체, 폴리초산비닐, 아크릴로니트릴과 스티렌의 공중합체, 아크릴로니트릴과 스티렌, 부타디엔의 공중합체, 폴리비닐알킬에테르, 폴리비닐알킬케톤, 폴리스티렌, 폴리아미드, 폴리우레탄, 폴리에틸렌테레프탈레이트이소프탈레이트, 아세틸셀룰로스 및 폴리비닐부티랄 등을 들 수가 있다. 특히 알칼리성 수용액에서의 현상성을 개선하기 위해서 아크릴산, 메타크릴산 등의 카르복실기를 가지는 단량체를 공중합 성분으로 하여 사용하는 것이 좋다. 상기 아크릴산, 메타크릴산 등은 공중합 성분 중 5∼40질량%의 범위가 바람직하다. 또, 카르복시메틸셀룰로스, 카르복시에틸셀룰로스, 카르복시프로필셀룰로스나, 히드록시메틸셀룰로스, 히드록시에틸셀룰로스, 히드록시프로필셀룰로스의 히드록실기에 다염기산 무수물을 반응시킨 셀룰로스 수지도 바람직하게 이용할 수가 있다.Specifically as the polymer binder, acrylic acid, methacrylic acid, methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, propyl acrylate, propyl methacrylate, isopropyl acrylate, isopropyl methacrylate , n-butyl acrylate, n-butyl methacrylate, tert-butyl acrylate, tert-butyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylamide Late, 2-hydroxypropyl methacrylate, benzyl acrylate, benzyl methacrylate, phenoxy acrylate, phenoxy methacrylate, isobornyl acrylate, isobornyl methacrylate, glycidyl methacrylate, A monomer selected from styrene, acrylamide, methacrylamide, acrylonitrile, methacrylonitrile, etc. Obtained by combining with an acidic cellulose modified product having a carboxyl group in its side chain, polyethylene oxide, polyvinylpyrrolidone, acrylonitrile, vinyl chloride, copolymer of vinylidene chloride, vinylidene chloride, chlorinated polyolefin, or vinyl chloride Copolymer of vinyl acetate, polyvinyl acetate, copolymer of acrylonitrile and styrene, copolymer of acrylonitrile and styrene, butadiene, polyvinyl alkyl ether, polyvinyl alkyl ketone, polystyrene, polyamide, polyurethane, polyethylene tere Phthalate isophthalate, acetyl cellulose, polyvinyl butyral, etc. are mentioned. In order to improve developability in especially alkaline aqueous solution, it is good to use the monomer which has carboxyl groups, such as acrylic acid and methacrylic acid, as a copolymerization component. As for said acrylic acid, methacrylic acid, the range of 5-40 mass% is preferable in a copolymerization component. Moreover, the cellulose resin which made polybasic acid anhydride react with the hydroxyl group of carboxymethylcellulose, carboxyethyl cellulose, carboxypropyl cellulose, hydroxymethyl cellulose, hydroxyethyl cellulose, and hydroxypropyl cellulose can also be used preferably.
또, 본 발명에 관계되는 감광성 조성물은 희석을 위한 용제나, 열중합 금지제, 소포제, 계면활성제 등을 첨가하는 것으로 해도 좋다.Moreover, the photosensitive composition which concerns on this invention may add a solvent for dilution, a thermal polymerization inhibitor, an antifoamer, surfactant, etc.
여기서, 감광성 조성물에 첨가 가능한 용제로서는 벤젠, 톨루엔, 크실렌, 메틸에틸케톤, 아세톤, 메틸이소부틸케톤, 시클로헥산온, 메탄올, 에탄올, 프로판올, 부탄올, 헥산올, 시클로헥산올, 에틸렌글리콜, 디에틸렌글리콜, 글리세린, 에틸렌 글리콜모노메틸에테르, 에틸렌글리콜모노에틸에테르, 프로필렌글리콜모노메틸에테르, 프로필렌글리콜모노에틸에테르, 디에틸렌글리콜모노메틸에테르, 디에틸렌글리콜모노에틸에테르, 디에틸렌글리콜디메틸에테르, 디에틸렌글리콜디에틸에테르, 3-메톡시부틸아세테이트(MA), 3-메틸-3-메톡시부틸아세테이트, 프로필렌글리콜모노메틸에테르프로피오네이트, 프로필렌글리콜모노에틸에테르아세테이트, 프로필렌글리콜모노에틸에테르프로피오네이트, 탄산메틸, 탄산에틸, 탄산프로필, 탄산부틸 등을 들 수 있다. 그 중에서 3-메톡시부틸아세테이트는 광중합성 화합물, 광중합 개시제에 대하여 뛰어난 용해성을 나타냄과 아울러, 착색재 등의 불용성 성분의 분산성을 양호하게 하기 때문에 바람직하다. 상기 용제는 고형분의 농도가 1∼50질량%가 되도록 조정하는 양이 바람직하고, 5∼30질량%가 되도록 조정하는 양인 것이 보다 바람직하다.Here, as a solvent which can be added to the photosensitive composition, benzene, toluene, xylene, methyl ethyl ketone, acetone, methyl isobutyl ketone, cyclohexanone, methanol, ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, diethylene Glycol, glycerin, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene Glycoldiethyl ether, 3-methoxybutyl acetate (MA), 3-methyl-3-methoxybutyl acetate, propylene glycol monomethyl ether propionate, propylene glycol monoethyl ether acetate, propylene glycol monoethyl ether propionate Methyl carbonate, ethyl carbonate, propyl carbonate, butyl carbonate, and the like. have. Among them, 3-methoxybutyl acetate is preferable because it shows excellent solubility with respect to a photopolymerizable compound and a photoinitiator, and makes dispersibility of insoluble components, such as a coloring material, favorable. It is preferable that it is the quantity adjusted so that the said solvent may be 1-50 mass% in concentration of solid content, and it is more preferable that it is an quantity adjusted so that it may become 5-30 mass%.
또, 열중합 금지제로서는 히드로퀴논(hydroquinone), 히드로퀴논모노에틸에테르 등, 소포제로서는 실리콘계, 불소계 화합물 등, 계면활성제로서는 음이온계, 양이온계, 비이온계 등의 종래 공지의 것을 첨가할 수 있다.Moreover, as a thermal polymerization inhibitor, conventionally well-known things, such as anionic, cationic, and nonionic, can be added as surfactant, such as a silicone type and a fluorine-type compound, such as hydroquinone and hydroquinone monoethyl ether.
또, 본 발명에 관계되는 감광성 수지 조성물을 이용하여 패턴(pattern)을 형성할 때에는, 후술하듯이 기판 상에 본 발명에 관계되는 감광성 수지 조성물을 도포·건조시켜 막을 형성한다. 이때의 도포성의 개선, 광경화 후의 물성 개선을 위해서, 상기 성분에 더하여 결합제로서 고분자 바인더를 더 함유시켜도 좋다. 결합제는 상용성, 피막 형성성, 현상성, 접착성 등 개선 목적에 따라 적의 선택하면 좋다.Moreover, when forming a pattern using the photosensitive resin composition concerning this invention, a film is formed by apply | coating and drying the photosensitive resin composition concerning this invention on a board | substrate as mentioned later. In order to improve the applicability at this time and to improve the physical properties after photocuring, a polymer binder may be further contained as a binder in addition to the above components. The binder may be appropriately selected depending on the purpose of improvement such as compatibility, film formability, developability, adhesiveness, and the like.
본 발명에 관계되는 감광성 수지 조성물의 제조 방법으로서는, 상술의 각 성분을 교반기로 혼합함으로써 얻어진다. 또한, 얻어진 혼합물이 균일한 것이 되도록 필터를 이용하여 여과해도 좋다. As a manufacturing method of the photosensitive resin composition which concerns on this invention, it is obtained by mixing each above-mentioned component with a stirrer. Moreover, you may filter using a filter so that the obtained mixture may be uniform.
[패턴의 형성방법][Formation method]
이하, 본 발명에 관계되는 감광성 수지 조성물을 이용하여 패턴을 형성하는 방법을 설명한다.Hereinafter, the method of forming a pattern using the photosensitive resin composition concerning this invention is demonstrated.
먼저, 감광성 수지 조성물을 기판 상에 롤 코터(roll coater), 리버스 코터(reverse coater), 바 코터(bar coater) 등의 접촉 전사형 도포 장치나 스피너(spinner)(회전식 도포 장치), 커텐플로우 코터(curtain flow coater) 등의 비접촉형 도포 장치를 이용하여 도포한다.First, the photosensitive resin composition is applied onto a substrate by a contact transfer type coating device such as a roll coater, reverse coater, bar coater, spinner (rotary coating device), curtain flow coater ( It is applied by using a non-contact type coating device such as curtain flow coater).
이 감광성 수지 조성물을 도포 후 건조시켜 용제를 제거한다. 건조 방법은 특히 한정되지 않고, 예를 들면 (1) 핫플레이트(hot plate)로 80℃ 내지 120℃, 바람직하게는 90℃ 내지 100℃의 온도에서 60초간 내지 120초간 건조시키는 방법, (2) 실온에서 수시간 내지 수일 방치하는 방법, (3) 온풍 히터나 적외선 히터 중에 수십분 내지 수시간 넣어 용제를 제거하는 방법의 어느 방법을 이용해도 좋다.After apply | coating this photosensitive resin composition, it dries and removes a solvent. The drying method is not particularly limited, and for example, (1) a method of drying for 60 seconds to 120 seconds at a temperature of 80 ° C to 120 ° C, preferably 90 ° C to 100 ° C with a hot plate, (2) You may use the method of leaving for several hours to several days at room temperature, (3) the method of removing a solvent by putting in a warm air heater or an infrared heater for several tens of minutes or several hours.
다음에, 네가티브(negative)형의 마스크(mask)를 개재하여, 자외선, 엑시머 레이저(excimer laser)광 등의 활성 에너지선을 조사하여 부분적으로 노광한다. 조사하는 에너지 선량은 감광성 수지 조성물의 조성에 따라서 다르지만, 예를 들면 30mJ/cm2 내지 2000mJ/cm2 정도가 바람직하다. Next, through a negative mask, active energy rays, such as an ultraviolet-ray and an excimer laser light, are irradiated and partially exposed. Although the energy dose to irradiate changes with the composition of the photosensitive resin composition, about 30 mJ / cm <2> -2000mJ / cm <2> is preferable, for example.
다음에, 노광 후의 막을 현상액에 의해 현상함으로써 소망의 형상으로 패터닝(patterning)한다. 현상 방법은 특히 한정되지 않고, 예를 들면 침지법, 스프레이(spray)법 등을 이용할 수가 있다. 현상액으로서는 모노에탄올아민(monoethanolamine), 디에탄올아민, 트리에탄올아민 등의 유기계의 것이나, 수산화나트륨, 수산화칼륨, 탄산나트륨, 암모니아, 4급 암모늄염 등의 수용액을 들 수 있다.Next, the film | membrane after exposure is developed with a developing solution, and patterning is carried out in a desired shape. The image development method is not specifically limited, For example, an immersion method, a spray method, etc. can be used. Examples of the developer include organic solvents such as monoethanolamine, diethanolamine and triethanolamine, and aqueous solutions such as sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia and quaternary ammonium salts.
다음에, 현상 후의 패턴을 200℃ 정도에서 포스트베이크(postbake)함으로써 패턴을 형성한다. 또, 형성된 패턴을 전면 노광하는 것이 바람직하다.Next, a pattern is formed by postbake the pattern after development at about 200 degreeC. Moreover, it is preferable to expose the formed pattern to the whole surface.
이 형성된 패턴은 스페이서(spacer), 블랙 매트릭스(black matrix), 컬러 필터(color filter), 잉크젯(ink jet)용 격벽으로서도 사용할 수가 있다.The formed pattern can also be used as a spacer, a black matrix, a color filter, and an ink jet partition.
실시예Example
다음에, 본 발명에 관계되는 감광성 조성물의 실시예에 대해서 설명한다.Next, the Example of the photosensitive composition concerning this invention is described.
<광중합성 화합물><Photopolymerizable compound>
(수지 합성예 1)(Resin synthesis example 1)
에틸렌성 불포화 결합을 가지는 광중합성 화합물로서 수지 1을 합성하였다.Resin 1 was synthesized as a photopolymerizable compound having an ethylenically unsaturated bond.
먼저, 500ml 4구 플라스크(flask) 중에 비스페놀플루오렌(bisphenol fluorene)형 에폭시 수지 235g(에폭시 당량 235)과 테트라메틸암모늄클로라이드 110mg, 2, 6-디-tert-부틸-4-메틸페놀 100mg 및 아크릴산 72.0g을 넣고, 이것에 25ml/분의 속도로 공기를 불어넣으면서 90∼100℃에서 가열 용해시켰다. 이어서, 용액이 백탁(白濁)인 상태대로 서서히 승온하고, 120℃로 가열하여 완전 용해 시켰다. 여기서 용액은 점차 투명 점조로 되었지만 그대로 교반을 계속하였다. 이 사이 산가를 측정하고, 1.0mg KOH/g 미만이 될 때까지 가열 교반을 계속하였다. 산가가 목표에 이를 때까지 12시간을 요하였다. 그리고 실온까지 냉각하여, 무색 투명으로 고체상의 식 (a4)로 표시되는 비스페놀플루오렌형 에폭시아크릴레이트를 얻었다. First, 235 g of bisphenol fluorene type epoxy resin (epoxy equivalent 235), 110 mg of tetramethylammonium chloride, 100 mg of 2,6-di-tert-butyl-4-methylphenol and acrylic acid in a 500 ml four-necked flask 72.0 g was added, and it melt | dissolved at 90-100 degreeC, blowing air into this at a rate of 25 ml / min. Subsequently, the solution was gradually warmed to a cloudy state, heated to 120 ° C, and completely dissolved. The solution gradually became a clear viscous solution, but stirring was continued as it was. The acid value was measured during this time, and heating and stirring were continued until it became less than 1.0 mg KOH / g. It took 12 hours to reach the goal. Then, it cooled to room temperature and obtained the bisphenol fluorene type epoxy acrylate represented by solid formula (a4) as colorless and transparent.
다음에, 이와 같이 하여 얻어진 상기의 비스페놀플루오렌형 에폭시아크릴레이트 307.0g에 3-메톡시부틸아세테이트 600g을 가하여 용해시킨 후, 벤조페논테트라카르복실산 2무수물 80.5g 및 브롬화테트라에틸암모늄 1g을 혼합하고, 서서히 승온하여 110∼115℃에서 4시간 반응시켰다. 산 무수물기의 소실을 확인한 후 1, 2, 3, 6-테트라히드로무수프탈산 38.0g을 혼합하고, 90℃에서 6시간 반응시켜 수지 1을 얻었다. 산 무수물기의 소실은 IR 스펙트럼에 의해 확인하였다.Next, 600 g of 3-methoxybutyl acetate is added to and dissolved in 307.0 g of the bisphenol fluorene type epoxy acrylate thus obtained, and then 80.5 g of benzophenone tetracarboxylic dianhydride and 1 g of tetraethylammonium bromide are mixed. It heated up gradually and made it react at 110-115 degreeC for 4 hours. After confirming the disappearance of the acid anhydride group, 38.0 g of 1, 2, 3, 6-tetrahydrophthalic anhydride was mixed and reacted at 90 ° C for 6 hours to obtain Resin 1. Disappearance of the acid anhydride group was confirmed by IR spectrum.
이 수지 1은 식 (a1)에 나타내는 화합물에 상당한다. 또한, 이 수지 1은 3-메톡시부틸아세테이트로 고형분 농도 50질량%로 조정하였다.This resin 1 is corresponded to the compound shown by Formula (a1). In addition, this resin 1 was adjusted to 50 mass% of solid content concentration with 3-methoxybutyl acetate.
(수지 합성예 2)(Resin synthesis example 2)
에피코트 YX4000H(재팬에폭시레진사 제조, 에폭시 당량 192)를 400g, 트리페닐포스핀 4g, 아크릴산 153g, 3-메톡시부틸아세테이트 600g을 혼합하여 90∼100℃ 에서 반응시켰다. 그 후 다염기산 무수물로서 1, 2, 3, 6-테트라히드로무수프탈산 40g 및 비페닐테트라카르복실산 2무수물 360g을 가하고 더 반응시킴으로써 수지 2를 얻었다. 이 수지 2는 GPC로 측정한 질량평균분자량이 7000이고, 산가가 90mg KOH/g이었다.400 g, 4 g of triphenylphosphines, 153 g of acrylic acid, and 600 g of 3-methoxybutyl acetate were mixed with Epicoat YX4000H (manufactured by Japan Epoxy Resin Co., Ltd.) and reacted at 90 to 100 ° C. Then, Resin 2 was obtained by adding 40 g of 1, 2, 3, 6- tetrahydro phthalic anhydride and 360 g of biphenyl tetracarboxylic dianhydrides as a polybasic acid anhydride, and also making it react. This resin 2 had a mass average molecular weight of 7000 as measured by GPC, and an acid value of 90 mg KOH / g.
이 수지 2는 식 (a1)에 나타내는 화합물에 상당한다. 또한, 이 수지 2는 3-메톡시부틸아세테이트로 고형분 농도 50질량%로 조정하였다.This resin 2 is corresponded to the compound shown by Formula (a1). In addition, this resin 2 was adjusted to 50 mass% of solid content concentration with 3-methoxybutyl acetate.
(수지 합성예 3)(Resin synthesis example 3)
수지 합성예 2에 있어서 에피코트 YX4000H에 대신하여, 하기 식 (a5)로 표시되는 디시클로펜타디엔(dicyclopentadiene)형 에폭시 수지(에폭시 당량 283)를 500g 이용한 외에는 동일하게 하여 수지 3을 합성하였다. 이 수지 3의 분자량은 4500이었다. 또한, 이 수지 3은 3-메톡시부틸아세테이트로 고형분 농도 50질량%로 조정하였다. Resin 3 was synthesize | combined similarly except having used 500 g of dicyclopentadiene type epoxy resins (epoxy equivalent 283) represented by following formula (a5) instead of epicoat YX4000H in resin synthesis example 2. The molecular weight of this resin 3 was 4500. In addition, this resin 3 was adjusted to 50 mass% of solid content concentration with 3-methoxybutyl acetate.
<광중합 개시제><Photoinitiator>
식 (1)에 있어서, A, B, G, E의 기가 표 1에 나타내는 것을 이용하였다.In Formula (1), what the group of A, B, G, E shows in Table 1 was used.
(실시예, 비교예)(Example, Comparative Example)
본 실시예 및 비교예에 관계되는 감광성 조성물에 대해서, 표 2에 나타내는 조성으로 조제하였다. 또한, 용제는 3-메톡시부틸아세테이트:시클로헥산온=70:30(질량비), 또한 감광성 조성물의 고형분 농도가 18질량%가 되도록 조정하였다. 이 조성의 혼합물을 교반기로 2시간 혼합하고, 5μm 멤브레인 필터(membrane filter)로 여과하여 감광성 조성물을 얻었다.About the photosensitive composition which concerns on a present Example and a comparative example, it prepared by the composition shown in Table 2. In addition, the solvent was adjusted so that 3-methoxybutyl acetate: cyclohexanone = 70: 30 (mass ratio) and solid content concentration of the photosensitive composition might be 18 mass%. The mixture of this composition was mixed with the stirrer for 2 hours, and it filtered with the 5 micrometer membrane filter, and obtained the photosensitive composition.
*1 카본 블랙 25질량%, 용제: 3-메톡시부틸아세테이트, 미쿠니색소사 제조* 1 25 mass% carbon black, a solvent: 3-methoxybutyl acetate, the Mikuni dye company
*2 각 수지는 수지 합성예에서 나타낸 대로 고형분 50%가 되도록 조정한 것을 이용하였다.* 2 Each resin used what was adjusted so that it might become 50% of solid content as shown in the resin synthesis example.
*3 디펜타에리쓰리톨헥사아크릴레이트* 3 dipentaerythritol hexaacrylate
*4 펜타에리쓰리톨테트라아크릴레이트* 4 pentaerythritol tetraacrylate
얻어진 감광성 조성물을 두께 1mm의 청정한 표면을 가지는 유리 기판 상에 스핀 코터(spin coater)(TR25000: 토쿄오카(주) 제조)를 이용하여 건조 막 두께가 1.2μm가 되도록 도포하고, 90℃에서 2분간 건조시켜 감광성 조성물의 막(감광층)을 형성하였다. 다음에 이 막에 네가티브 마스크(negative mask)를 개재하여 자외선을 선택적으로 조사하였다. 그 후 0.5질량% 탄산나트륨 수용액으로 25℃, 60초간 스프레이(spray) 현상함으로써 선폭 20μm의 라인(line)을 포함하는 블랙 매트릭스 패턴을 형성하였다. 그 후 220℃-30min 순환식 오븐(oven)에서 포스트베이크(postbake)를 하였다. 제조된 각 블랙 매트릭스의 막 두께는 1.0μm였다.The obtained photosensitive composition was applied onto a glass substrate having a clean surface having a thickness of 1 mm using a spin coater (TR25000: manufactured by Tokyooka Co., Ltd.) so as to have a dry film thickness of 1.2 μm, and at 90 ° C. for 2 minutes. It dried and formed the film | membrane (photosensitive layer) of the photosensitive composition. Next, this film was selectively irradiated with ultraviolet rays through a negative mask. Thereafter, a black matrix pattern including a line having a line width of 20 μm was formed by spray development at 25 ° C. for 60 seconds with an aqueous 0.5 mass% sodium carbonate solution. Thereafter, postbake was performed in a 220 ° C.-30 min circulating oven. The film thickness of each produced black matrix was 1.0 μm.
또, 제조된 각 블랙 매트릭스에 대해서, OD 측정 장치 D-200 II(그레타그마크베스사 제조)로 측정한 바 OD값은 4.0이었다. Moreover, about each produced black matrix, when it measured with OD measuring apparatus D-200II (made by Gretagmark-Bess company), OD value was 4.0.
상술한 바와 같이 하여 얻어진 상기 각 실시예 및 각 비교예의 블랙 매트릭스 패턴의 평가(패턴의 직진성, 벗겨짐, 잔사)의 결과를 표 3에 나타낸다.Table 3 shows the results of evaluation (pattern straightness, peeling, residue) of the black matrix pattern of each of the above-mentioned Examples and Comparative Examples obtained as described above.
또한, 감도 평가를 위해 노광량을 10∼180mJ/cm2까지 5mJ씩 스텝(step)으로 늘려가고 상기 조건에서 현상을 하였다. 또, 「Bias+1.0μm」로 하여, 20μm 마스크(mask)에 대해서 형성되는 블랙 마스크 패턴(black mask pattern)의 선폭이 20μm+1μm가 되는 노광량을 평가하였다. 본 발명에 있어서의 감광성 조성물은 네가티브 타입 레지스트(negative type resist)이기 때문에, 노광량이 많을수록 CD(Critical Dimension)가 커진다. 통상, 양산상 목적이 되는 선폭은 마스크 선폭+1∼2μm이다. 보다 저노광량으로 패터닝(patterning)할 수 있으면 노광 시간을 단축하는 것이 가능하게 되어 라인(line)의 작업처리량(throughput)을 향상시킬 수가 있다.In addition, the exposure was increased in steps of 5 mJ up to 10 to 180 mJ / cm 2 for sensitivity evaluation, and development was carried out under the above conditions. Moreover, as "Bias + 1.0 micrometer", the exposure amount which the line | wire width of the black mask pattern formed with respect to a 20 micrometer mask becomes 20 micrometer + 1 micrometer was evaluated. Since the photosensitive composition in the present invention is a negative type resist, the larger the exposure amount, the larger the CD (Critical Dimension). Usually, the line width for mass production purposes is mask line width + 1-2 micrometers. When the patterning can be performed at a lower exposure amount, the exposure time can be shortened, thereby improving the throughput of the line.
판정의 결과, 실시예에서 얻어진 패턴은 OD값이 4.0이고, 차광성이 높은데도 불구하고, 노광량이 65mJ/cm2에 있어서도 직선성이 뛰어나고, 잔사나 기판과의 벗겨짐은 확인되지 않았다. 한편, 각 비교예에서는 저노광량에 있어서 패턴 벗겨짐이 많고 직진성도 좋지 않았다. 또, Bias+1μm의 값은 비교예에서는 노광량이 95mJ/cm2보다 작아지면 선폭이 목표값과 비교하여 가늘게 되어 바람직하지 않은 것이었다.As a result of the determination, even though the pattern obtained in the Example had an OD value of 4.0 and the light shielding property was high, the linearity was excellent even when the exposure amount was 65 mJ / cm 2 , and no peeling off of the residue or the substrate was confirmed. On the other hand, in each comparative example, there existed many pattern peelings in the low exposure amount, and the straightness was also not good. In the comparative example, the value of Bias + 1 μm was undesirable because the line width became thinner than the target value when the exposure amount was smaller than 95 mJ / cm 2 .
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007082777A JP4855312B2 (en) | 2007-03-27 | 2007-03-27 | Photosensitive composition |
JPJP-P-2007-00082777 | 2007-03-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080087670A true KR20080087670A (en) | 2008-10-01 |
KR100973109B1 KR100973109B1 (en) | 2010-07-29 |
Family
ID=39913531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080022721A KR100973109B1 (en) | 2007-03-27 | 2008-03-12 | Photosensitive composition |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4855312B2 (en) |
KR (1) | KR100973109B1 (en) |
TW (1) | TWI432899B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5422244B2 (en) * | 2009-04-01 | 2014-02-19 | 東洋インキScホールディングス株式会社 | Photosensitive coloring composition and color filter |
JP2021192068A (en) * | 2018-08-30 | 2021-12-16 | 昭和電工株式会社 | Photosensitive resin composition, black column spacer and image display device |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2003294034A1 (en) * | 2002-12-03 | 2004-06-23 | Ciba Specialty Chemicals Holding Inc. | Oxime ester photoinitiators with heteroaromatic groups |
JP2004359639A (en) | 2003-06-06 | 2004-12-24 | Asahi Denka Kogyo Kk | Oxime ester compound and photopolymerization initiator containing the same |
JP2005220097A (en) * | 2004-02-06 | 2005-08-18 | Asahi Denka Kogyo Kk | Oxime ester compound having thiophene structure and photopolymerization initiator containing the compound |
US7759043B2 (en) * | 2004-08-18 | 2010-07-20 | Ciba Specialty Chemicals Corp. | Oxime ester photoinitiators |
JP4633582B2 (en) * | 2005-09-06 | 2011-02-16 | 東京応化工業株式会社 | Photosensitive composition |
KR101370818B1 (en) * | 2006-12-20 | 2014-03-07 | 미쓰비시 가가꾸 가부시키가이샤 | Oxime ester compound, photopolymerization initiator, photopolymerizable composition, color filter, and liquid crystal display device |
-
2007
- 2007-03-27 JP JP2007082777A patent/JP4855312B2/en active Active
-
2008
- 2008-03-12 KR KR1020080022721A patent/KR100973109B1/en active IP Right Grant
- 2008-03-26 TW TW097110865A patent/TWI432899B/en active
Also Published As
Publication number | Publication date |
---|---|
JP4855312B2 (en) | 2012-01-18 |
TWI432899B (en) | 2014-04-01 |
KR100973109B1 (en) | 2010-07-29 |
TW200839445A (en) | 2008-10-01 |
JP2008242089A (en) | 2008-10-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100805863B1 (en) | Photosensitive Composition | |
KR100829768B1 (en) | Photosensitive composition | |
JP5744528B2 (en) | Colored photosensitive resin composition for touch panel, touch panel, and display device | |
KR100818226B1 (en) | Photosensitive Composition and Black Matrix | |
JP4745110B2 (en) | Photosensitive composition and color filter formed with the photosensitive composition | |
KR100860432B1 (en) | Black photosensitive composition | |
TWI649622B (en) | Photosensitive resin composition | |
JP5096814B2 (en) | Colored photosensitive composition | |
JP4745146B2 (en) | Colored photosensitive resin composition | |
KR20090034774A (en) | Multifunctional thiol compound-containing photosensitive resin composition for black resist, black matrix for color filter using the same, and color filter | |
KR20130084277A (en) | Colored photosensitive resin composition, color filter and liquid crystal display | |
KR20150055417A (en) | Colored Photosensitive Resin Composition | |
KR20070027446A (en) | Photosensitive composition | |
KR20170111342A (en) | Colored photosensitive resin composition, color filter and image display device produced using the same | |
JP2008003299A (en) | Colored photosensitive resin composition | |
TWI377441B (en) | ||
KR101962481B1 (en) | A colored photosensitive resin composition, color filter and display device comprising the same | |
JP2009173560A (en) | Oxime ester-based compound and photosensitive composition | |
JP2010262027A (en) | Colored radiation-sensitive composition, color filter and color liquid crystal display element | |
KR100973109B1 (en) | Photosensitive composition | |
JP2008052069A (en) | Colored photosensitive resin composition | |
JP5336274B2 (en) | Colored photosensitive resin composition and oxime photopolymerization initiator | |
JP7359559B2 (en) | Light-shielding film, photosensitive resin composition for obtaining the same, and method for producing light-shielding film | |
KR20150077930A (en) | Photosensitive resin composition | |
KR20150081553A (en) | Photosensitive resin composition |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20130705 Year of fee payment: 4 |
|
FPAY | Annual fee payment |
Payment date: 20150618 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20160616 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20170616 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20180628 Year of fee payment: 9 |