KR20080082225A - A transfer robot for specific environment - Google Patents

Abstract

A transfer robot for a vacuum environment is provided to relieve a bellows from an excessive load by allowing the bellow only to block an air flow between inner and outer portions of a vacuum chamber and elevate the vacuum chamber. A flange unit(300) is fixed on an implementation hole at a bottom of a vacuum chamber. A through-hole is formed at a center of the flange unit. A robot support can(330) is implemented downwards from the bottom below the flange unit. First and second vertical transfer axes(400,410) are vertically arranged to be parallel to each other, while penetrating the through-hole of the flange unit. An elevation guiding barrel(500) includes a pressure ring and a barrel, and a support ring and is implemented inside the robot support can. A bellows(550) is arranged to surround the elevation guiding barrel. An upper end of the bellows is tightly coupled with the flange unit, while a lower end thereof is tightly coupled with the support ring. A transfer axis support member(600) includes a small outer diameter unit and a large outer diameter unit. First and second vertical transfer axis driving motors(700,710) rotate the first and second vertical transfer axes separately from each other in the transfer axis support member. A support member rotating unit rotates the first and second vertical transfer axes driving motor and the transfer axis support member. An elevator includes a support member rotating unit and an elevating motor. The first and second vertical transfer axis driving motors, the support member rotating unit, and the elevator are implemented in the robot support can.

Description

A conveyer robot for vacuum environment work {A TRANSFER ROBOT FOR SPECIFIC ENVIRONMENT}

1 is a perspective view of a robot for a vacuum environment according to the prior art.

2 is a plan view of the robot shown in FIG.

3 is a cross-sectional view of the leader line "A-A" shown in FIG.

4 is a perspective view showing the internal structure of the slide mechanism base of the robot for the vacuum environment shown in FIG.

5 is an external perspective view of a robot for working in a vacuum environment according to the present invention.

6 is an external perspective view of the first and second conveying means in FIG.

FIG. 7 is a perspective view illustrating a state of the robot for working in a vacuum environment in FIG.

FIG. 8 is a perspective view illustrating the inside of the robot support cylinder in a state in which the robot support barrel is not shown, and viewed from the rear side of the robot shown in FIG. 5.

FIG. 9 is a cross-sectional view of the robot shown in FIG. 6 vertically and viewed from the front, showing a state in which it is installed on the bottom wall of the vacuum chamber; FIG.

10 is a cross-sectional view according to another embodiment of FIG. 9.

11 is a detailed cross-sectional view showing an internal configuration of the transmission shaft support cylinder shown in FIGS. 9 and 10.

12 is a sectional view showing a part of the configuration of the lifting means according to the present invention.

<Description of the symbols for the main parts of the drawings>

200: vacuum chamber

210: bottom wall

211: installation worker

300: flange portion

310: through hole

330: robot support container

400,410: first and second vertical transmission shaft

440,450: first and second conveying means

500: lifting and lowering towing cylinder

510: pressure ring portion

520: tube part

530: support ring

550: Bellows

600: transmission shaft support

610: marginalized neck

620: step

630: external neck

640,650: first and second vertical transmission shaft insertion hole

660: magnetic fluid real step

700,710: First and second vertical transmission shaft drive motor

800: support rotating means

810: support rotary motor

900: descent means

910: lifting motor

The present invention relates to a transfer robot for working in a vacuum environment, and more particularly, based on blocking the communication of air to prevent the vacuum chamber from being polluted from the outside, and changing the installation position of the up and down stretchable bellows and the magnetic fluid real stage. It is possible to remove the load applied to the bellows by placing a magnetic fluid real end inside the bellows and limiting the bellows to only the function of blocking air communication between the inside and outside of the vacuum chamber and the functions involved in lifting and lowering. It relates to a transport robot for working in a vacuum environment.

In general, the transfer robot for vacuum operation employs a seal structure which does not contaminate the vacuum chamber or the vacuum chamber. As the seal structure, the bellows ensures the sealing property for the movement of the arm in the up and down direction. In addition, a seal structure is known in which the magnetic fluid seal is used to secure the seal against the rotation of the arm.

As an example, there is a vacuum environment robot, which is Japanese Patent Application Laid-Open No. 2001-237294, with reference to the drawings. Figs. 1 to 4 show a vacuum environment robot according to the first embodiment. The mechanism 1 is equipped with the 1st slide mechanism 3 and the 2nd slide mechanism 3 'which have the handling parts 4 and 4' for mounting and conveying a workpiece | work in a vacuum environment space.

Each of these slide mechanisms 3 and 3 'is provided freely by the linear guide 30 in the upper part of the slide mechanism base 2. As shown in FIG.

Here, the workpiece is targeted at the wafer, and the handling portions 4 and 4 are provided with grooves slightly larger than the outer dimensions of the wafer, so that the wafers are dropped into the grooves and the thicker edges are supported and conveyed. It is composed.

In addition, each of the handling portions 4 and 4 'is disposed in the vertical direction, so that the support arm 5 of the upper handling portion 4 does not interfere with the movement of the lower handling portion 4'. It is formed in a spherical shape avoiding the conveyance area of the workpiece.

Since the mechanical structures of the 1st slide mechanism 3 and the 2nd slide mechanism 3 'are the same, it demonstrates mainly about the 1st slide mechanism 3 below.

These mechanisms are installed on the tables and are assigned corresponding numbers.

The slide mechanism 3 is driven by magnetic coupling between the vacuum environment space in which the workpiece is conveyed and the partition wall 21 separating the transfer drive system mounting space of the slide mechanism 3, and the external mover 61. ) And a magnet coupling (6) composed of an internal mover (62).

The outer mover 61 is fixed to the lower part of the support arm 5, and the support arm 5 is fixed on the linear block 30a of the linear guide 30. The inner mover 62 is the slide mechanism base ( 2) It is provided in the inside of the slide mechanism base 2 between the partitions 21 of the upper nonmagnetic substance.

Each of the external mover 61 and the internal mover 62 is provided with a plurality of permanent magnets inside, and is configured to operate integrally with the partition wall 21 interposed therebetween by magnetic coupling.

The internal mover 62 is slidably installed by a linear guide 7 provided inside the slide mechanism base 2, and is configured to move in the same line as the external mover 61.

Conventionally, the drive system of the slide mechanism 3 is a belt drive system.

Pulleys are provided at both ends of the slide mechanism base (2) in the slide direction, and a belt (1) is mounted between the pulleys, and a part of the belt (1) is joined by the coupling member (63). It is coupled to the internal mover 62.

The drive pulleys (2) provided near the center of the slide mechanism base (2) are engaged with the belt (81), and both sides of the drive pulley (2) are used to ensure this engagement and to adjust the tension of the belt (81). An idler ８3 is provided.

This drive pulley (2) is provided at the tip of the transmission shaft (4) installed through the support shaft (or pivot) supporting the slide mechanism support (2). It is comprised so that it may be driven by the slide motor (# 5) provided in the lower part.

Moreover, the slide mechanism base 2 is being fixed to the upper part of the base support shaft which consists of spline shafts.

This expected support shaft is supported by the spline nut (# 2) so that it can move upward and downward, and is comprised so that it may be driven up and down by the lifting mechanism 11 provided in the lower part of the spline nut support cylinder 100. The sphere 11 is constituted by the ball screw 111a and the motor 112, and the ball screw nut 111b is fixed to the elevating plate 113 fixed to the lower portion of the expected support shaft. A support member 115 held by the support 114 is installed at the lower end of the cylinder 100, and the ball screw support 111c is fixed to the support member 115, and a pulley (below) is provided at the bottom of the ball screw 111a. 116).

The support member 115 is provided with a lifting motor 112 for driving the ball screw 111a, and a pulley 117 is provided on the output shaft of the lifting motor 112, and the pulley 117 and the ball screw ( 111a) The belt 118 is attached between the pulleys 116 provided in the lower end.

On the other hand, the upper end of the spline nut support cylinder 100 is rotatably supported by the cross roller bearing 101, and the pulley 102 is provided in the side wall of the support cylinder.

The outer ring of the cross roller bearing 101 is fixed to the robot support cylinder 103. A ring-shaped permanent magnet 121 and a pole piece 122 are provided on the inner wall of the robot support cylinder 103.

On the outer circumferential surface of the pivot shaft opposite to this, the magnetic shaft 123 made of magnetic material is rotatably installed with the gas-flat nut support cylinder 100, and the pole piece 122 and the magnetic shaft 124 The minute gap 123 is formed, and a magnetic fluid is injected into the gap 123 to form the magnetic fluid chamber mechanism 12, and rotatably blocks the inside of the vacuum chamber and the outside of atmospheric pressure.

In order to improve the pressure resistance, the four pieces of the pole piece 112 and the permanent magnet 121 are provided. Moreover, the bellows 104 which can be stretched up and down the magnetic shaft 123 and the lower surface of the slide mechanism base 2 are provided. The slide mechanism base 2 can be lifted and lowered while blocking the vacuum chamber Ｖ from the outside.

The disk-shaped flange 103a for fixing to the vacuum chamber bottom wall is provided in the upper part of the said robot support cylinder 103. As shown in FIG.

A turning mechanism 13 including a turning motor 130 for turning the robot mechanism 1 is provided on the lower surface of the flange 103a, and a pulley 131 is provided on the output shaft of the turning motor 130.

Moreover, the reducer 132 is provided in the lower surface of the flange 103a, and the pulleys 133 and 134 are provided in the input shaft and the output shaft of this reducer 131, respectively.

Between the pulley 131 and the pulley 133 and between the pulley 134 and the pulley 102, the belt 135, 136 is mounted, respectively, the driving force of the turning motor 130 is to reduce the speed reducer 132 It drives the pulley 102 provided in the side wall of the spline nut support cylinder 100, and makes the robot mechanism 1 pivotable.

Next, the operation of the robot configured as described above will be described. [0038] To operate the slide mechanism 3, the slide motor 85 provided below the expected support shaft is driven, and the rotational force is pulley 86 provided on the output shaft. ), The belt 87 is used, and is transmitted to the pulley 88 provided at the lower end of the transmission shaft 84, and the driving shaft pulley 82 is rotated using the transmission shaft 84. The rotational force of the driving pulley 82 causes the belt 81 mounted on the pulley provided on the upper wall of the slide mechanism base 2 to be moved. Thereby, the internal mover 62 in which a part of the belt 81 is fixed is fixed. Is moved to the slide.

When the inner mover 62 is moved, the outer mover 61 coupled by the magnetic force is also integrated and the handling portion 4 provided on the slide mechanism 3 slides to move. Further, the stop position in the slide direction is controlled by a rotary encoder provided on the opposite side of the output shaft of the slide motor 85.

In this way, the slide mechanism 3 can simply and reliably shield the drive system mounting space from the specific environmental space in order to drive the inside of the slide mechanism base 2 with the partition wall 21 therebetween. have.

In addition, the structure can be simplified compared to the Scara robot.

As for the operation of the elevating mechanism 11, when the elevating motor 112 is driven, the ball screw 111a rotates using the belt 118 mounted between the pulley 117 and the pulley 116. The ball screw nut 111b fixed to the elevating plate 113 is moved to elevate the elevating plate 113. As a result, the expected supporting shaft 9 fixed to the elevating plate 113 is also moved and the expected supporting shaft (Iii) The slide mechanism base 2 provided on the upper side moves up and down.

Moreover, the stop position of the up-down direction is comprised so that it may be controlled by the rotary encoder built in the opposite side of the output shaft of the lifting motor 112. As shown in FIG.

In this way, when the lifting mechanism 11 is installed, when receiving the workpiece that cannot be moved up or down or placed on the pin, the handling portion 4 is inserted into the lower portion of the workpiece, and the lifting mechanism 11 is in that state. ) And the handling part 4 is retracted in the state which mounted the workpiece | work on the handling part 4, and the workpiece | work was received.

In order to mount the workpiece on the base or the pin, the reverse operation may be performed.

Next, with regard to the operation of the swing mechanism 13, when the swing motor 130 is driven, the driving force is applied to the reduction gear 132 by using the belt 135 and the pulley 133 from the pulley 131 provided on the output shaft. Delivered.

Then, the rotational force of the turning motor 130 is decelerated at a speed suitable for rotating the robot mechanism 1, and by using the pulley 134 installed on the output shaft of the reducer 132, the side wall of the spline nut supporting cylinder 100 is used. The pulley 102 installed is driven and the robot mechanism 1 is rotated.

That is, as the pulley 102 installed on the sidewall of the spline nut support cylinder 100 is driven to rotate, the spline nut support cylinder 100 is also rotated, so that the magnetic shaft 124 is also rotated, and as a result, the magnetic body The telescopic bellows 104 connecting the upper side of the shaft 124 and the lower surface of the sublimation mechanism base 2 also rotates, eventually turning the robot mechanism 1 including the slide mechanism 2.

In addition, the stop position in the swing direction is configured to be controlled by a rotary encoder built on the opposite side of the output shaft of the swing motor 130.

Thus, by providing the turning mechanism 13, conveyance between the processing units arrange | positioned radially with respect to a robot is attained.

By the way, the vacuum environment robot according to the prior art had the following problems.

In the prior art, the outer peripheral surface of the pivot shaft (9) is provided with a magnetic shaft (124), which is a magnetic body, and a spline nut support cylinder (100) rotatably installed therein, and the lower end of the hollow pivot shaft (9) It is fixed to the elevating plate 113 and the upper end is fixed to the lower surface of the slide mechanism base (2), it is connected to the upper portion of the magnetic shaft 124 and the lower side of the slide mechanism base (2) by an elastic bellows (104) Since the pulley 102 is installed on the side wall of the spline nut support cylinder 100 that has received the rotational force of the turning motor 130, the pulley installed on the side wall of the spline nut support cylinder 100 is rotated. As the 102 is driven to rotate, the spline nut support cylinder 100 is also rotated, so that the magnetic shaft 124 is also rotated, so that the upper portion of the magnetic shaft 124 and the base of the lift mechanism 2 are rotated. If The connecting and extending bellows 104 is also rotated together, and eventually the robot mechanism 1 including the slide mechanism 2 is pivoted, and the hollow pivot shaft 9 is also provided with a lifting motor 112 installed thereunder. It rotates with the lifting mechanism 11 including the slide motor 85.

However, in the related art, the driving force of the swinging motor 130 is the robot mechanism 1 and the elevating mechanism 11 including the first and second slide mechanisms 3 and 3 'through the expandable bellows 104. And the bellows for rotating the robot mechanism 1 including the first and second slide mechanisms 3 and 3 'and the elevating mechanism 11 together. There is a problem that the load that 104 receives is large. When the load received by the bellows 104 exceeds a certain limit, the connection portion between the bellows 104 between the upper portion of the magnetic shaft 124 and the lower surface of the sublimation mechanism base 2 is broken or the bellows 104 itself is broken. Therefore, there is a problem in that the inside of the chamber V may not be maintained in a vacuum state because external air is introduced into the chamber V into the magnetic shaft 124.

The present invention was created to solve the above problems, the vacuum chamber is based on blocking the communication of the air so as not to be polluted from the outside, and changing the installation position of the up and down flexible bellows and the magnetic fluid real end, A magnetic fluid real end is placed inside the bellows, and the bellows is configured to be limited to the function of blocking air communication between the inside and outside of the vacuum chamber and the function involved in raising and lowering so that the load applied to the bellows can be removed. It is an object to provide a transport robot for working in a vacuum environment.

The transport robot for vacuum environment operation according to the present invention for achieving the above object is a gas tightly fixed to the installation hole formed in the bottom wall of the vacuum chamber and a flange portion having a predetermined size in the center; A robot support tube installed on a lower surface of the flange portion in a downward direction of the bottom wall; A pair of first and vertically arranged parallel to the through-holes of the flange portion, the upper portion of which is located in the vacuum chamber, the lower portion of which is located in the robot support cylinder, has a vertical length and is arranged in parallel; A second vertical transmission shaft; A pressurizing ring portion inserted into the upper and lower portions of the through hole and rotatably inserted therein; a pressurizing ring portion extending from the lower side of the robot support cylinder; and a support ring portion formed at the lower end of the tubular portion. An elevating towing cylinder installed in the interior of the; It is installed so as to surround the elevating towing cylinder, the upper end is airtightly coupled to the flange portion, the lower end up and down elastic bellows is hermetically coupled to the support ring; The outer diameter portion is rotatably inserted and lowered into the cylindrical portion, and the outer diameter portion is rotatably raised and lowered into the through-hole having the marginal diameter portion and the stepped step so that the pressure ring is in close contact, the first And a first and second vertical transmission shaft insertion holes through which the second vertical transmission shaft is rotatably inserted, are formed in the vertical direction, and have a magnetic fluid real end that blocks air communication between the vacuum chamber and the robot support cylinder therein. An axial support; First and second vertical transmission shaft driving motors configured to individually rotate the first and second vertical transmission shafts in the transmission shaft support; Support rotating means having a support rotating motor for rotating said first and second vertical transmission shaft drive motors and said transmission shaft support body with respect to said elevating traction cylinder; Lifting means having a support rotating means including the support rotating motor, the first and second vertical transmission shaft drive motor, the elevating traction cylinder, the elevating shaft support, and the elevating motor to elevate the bellows together; And a first and second vertical transmission shaft drive motors, a support rotating means having the support rotating motor, and a lifting means are installed in the robot support cylinder.

Hereinafter, with reference to the accompanying drawings, preferred embodiments of the transfer robot for vacuum operation according to the present invention will be described in detail.

FIG. 5 is an external perspective view of a robot for working in a vacuum environment according to the present invention, FIG. 6 is an external perspective view of a robot carrying the first and second conveying means in FIG. 5, and FIG. 7 is a robot for working in a vacuum environment in FIG. 5. Figure 8 is a perspective view showing a state viewed from the bottom, Figure 8 is a perspective view showing a state seen from the rear side of the robot shown in FIG. FIG. 9 is a cross-sectional view of the robot shown in FIG. 6, which is vertically cut and viewed from the front, showing a state in which it is installed on the bottom wall of the vacuum chamber, FIG. 10 is a cross-sectional view according to another exemplary embodiment of FIG. 9, and FIG. 11 is FIG. And a detailed sectional view showing an internal configuration of the transmission shaft support cylinder shown in FIG. 10, and FIG. 12 is a sectional view showing a part of the configuration of the lifting means according to the present invention.

As shown, the robot for working in a vacuum environment according to the present invention, the flange portion 300, the robot support cylinder 300, the first and second vertical transmission shaft 400, 410, and the lifting and lowering traction Support rotating means having a cylinder (500), a bellows (550), a transmission shaft support (600), first and second vertical transmission shaft drive motors (700) (710), and a support rotation motor (810) ( And a lifting means 900 having a lifting motor 910.

Hereinafter, a detailed configuration of the robot for vacuum operation according to the present invention will be described.

First, as shown in FIGS. 9 and 10, the flange part 300 is hermetically fixed to the installation hole 211 formed in the bottom wall 210 of the vacuum chamber 200, and has a predetermined size through-hole 310 at the center thereof. Has

The flange 300 is hermetically fixed to the bottom wall 210 so that air communication between the vacuum chamber 200 and the outside is blocked by using an O-ring 301 and a fastening bolt (not shown). do.

Next, the robot support cylinder 330 is provided on the lower surface of the flange portion 300 in the downward direction of the bottom wall 210.

In addition, the first and second vertical transmission shafts 400 and 410 are vertically arranged in parallel with each other through the through hole 310 of the flange portion 300, and an upper portion thereof is positioned in the vacuum chamber 200. The lower portion is located in the robot support cylinder 330, has a vertical length up and down, and consists of a pair arranged in parallel.

Next, the elevating traction cylinder 500, the upper and lower end of the pressing hole 510 is inserted into the through hole 310 and rotatably rotatable, the pressing ring 510 to the robot support cylinder 330 It consists of a cylindrical portion 520 extending to the lower side of the, and a support ring portion 530 formed in the lower end of the cylindrical portion 520, is installed in the robot support cylinder 330.

In addition, the bellows 550 is made of a flexible material up and down, is installed to surround the elevating towing cylinder 500, the upper end is hermetically coupled to the flange portion 300, the lower end is the support ring portion 530 Is confidentially combined.

Here, a space is formed between the bellows 550 and the elevating traction cylinder 500, and the space maintains the vacuum in the same way as the vacuum in the vacuum chamber 200.

The reason is that there is a space between the bellows 550 and the elevating traction cylinder 500 through the gap between the through hole 310 of the flange portion 300 and the outer diameter portion 630 of the carrier support shaft 600 described later. This is because it is in communication with the vacuum chamber 200.

In addition, the outside air does not flow into the space between the bellows 550 and the elevating traction cylinder 500 because the lower end of the bellows 550 is hermetically coupled to the support ring 530.

Next, the transmission shaft support 600, as shown in Figs. 9 and 10 and 11, the marginal diameter portion 610 is inserted into the cylinder portion 520 so as to be lifted and lowered, and the pressure The outer diameter portion 630 having the marginal diameter portion 610 and the stepped stepped portion 620 so as to be in close contact with the ring portion 510 is inserted into the through hole 310 so as to be lifted and lowered and rotated. The first and second vertical transmission shaft insertion holes 640 and 650 through which the two vertical transmission shafts 400 and 410 are rotatably inserted are vertically penetrated, and the vacuum chamber 200 and the robot are supported therein. It has a magnetic fluid real end 660 to block air communication between the cylinders (330).

Here, the magnetic fluid real stage 600, between the inner surface of the first, second vertical transmission shaft insertion holes 640, 650 and the outer surface of the first, second vertical transmission shafts 400, 410 Installed in the first and second vertical transmission shaft insertion holes 640 and 650 to block air communication between the vacuum chamber 200 and the robot support cylinder 330.

Since the magnetic fluid real stage 660 is a commonly used technical means such as the magnetic fluid seal mechanism 12 mentioned above, detailed structure description will be omitted in the present invention.

On the other hand, by installing a separate outer case 670 surrounding the outside of the transmission shaft support 600 of the present invention, the magnetic fluid real end 660 between the outer case 670 and the transmission shaft support 600. By installing, it is possible to block the air communication between the vacuum chamber 200 and the robot support cylinder (330).

Here, the transmission shaft support 600 may be configured to be rotatable with respect to the outer case 670 via the bearing 680.

In addition, the present invention, as shown in Figure 10, the guide hole 351 of a constant diameter is formed through the central portion so as to communicate vertically with the through hole 310, the guide fixedly coupled to the upper surface of the flange portion 300 The upper end of the bellows 550 through the ring unit 350 is hermetically coupled to the lower surface of the guide ring 350, and the elevating traction cylinder 500 and the transmission shaft support 600 are guide holes ( 351 may be configured to be rotatably inserted and lowered.

On the other hand, in the present invention, as mentioned in the prior art, the first and second conveying means 440, 450 having the same action and configuration as the slide mechanism 3 is provided, which is the first and second The conveying means 440 and 450 are installed with the height difference on the upper portions of the first and second vertical transmission shafts 400 and 410 positioned in the vacuum chamber 200, for example, a workpiece such as a wafer. It is mounted and conveyed to another position. The configuration of the first and second conveying means 440 and 450 is the same as in the prior art, and description thereof will be omitted.

Meanwhile, the first and second vertical transmission shaft driving motors 700 and 710 of the configuration according to the present invention may move the first and second vertical transmission shafts 400 and 410 within the transmission shaft support 600. Allow them to rotate individually.

Here, the driving force of the first and second vertical transmission shaft driving motors 700 and 710 is a lower end of the first and second vertical transmission shafts 400 and 410 and the first and second vertical transmission shaft driving motors ( The motor shafts 701 and 711 of the 700 and 710 are enabled by coupling means 730 and 740 which enable mutual power transmission.

Since the coupling means 730 and 740 are made of the same components, only the configuration of the coupling means 730 will be described.

That is, the coupling means 730 is a rotating body 731 is inserted into the motor shaft 701 is rotated with it, a power transmission rod 732 bolted to the upper surface of the rotating body 731, and the transmission shaft It consists of a coupler 733 connecting the portion of the first vertical transmission shaft 400 and the portion of the power transmission rod 732 protruding to the lower side of the support 600.

Therefore, when power is applied to the first vertical transmission shaft driving motor 700 to drive the motor shaft 701, the motor shaft 701 is rotated, thereby rotating the rotor 731, the power transmission rod 732, and the coupler 733. Through this, the first vertical transmission shaft 400 is rotated in the first vertical transmission shaft insertion hole 640 of the transmission shaft support 600.

Eventually, when the first vertical transfer shaft 400 is rotated in the first vertical transfer shaft insertion hole 640, the first transfer means 440 is operated to mount a workpiece such as a wafer in the vacuum chamber 200. Can be moved to a desired position.

Here, the description that the first conveying means 440 is driven as the first vertical transmission shaft 400 is rotationally driven is conventionally described as a first slide mechanism having a handling portion 4 as the transmission shaft 84 is rotated ( The same operation as in 3) will be omitted.

Meanwhile, the first and second vertical transmission shaft driving motors 700 and 710 are inserted into and fixed to the mounter 770 that is rotatably installed in the support ring 530. It is installed in a structure.

Even if the first and second vertical transmission shaft drive motors 700 and 710 are suspended from the mounter 770 as described above, the above-mentioned lifting and lowering traction cylinder 500 supports the transmission shaft support 600. Because of the structure, the lifting and lowering traction cylinder 500 can sufficiently support the load of the drive motors 700 and 710.

Here, the mounter 770 has a structure that surrounds the above-described rotating body 731, and the rotating body 731 is rotatably installed in the mounting unit 770.

Next, the support rotating means 800 of the components of the present invention, the first and second vertical transmission shaft drive motors 700, 710 and the transmission shaft support (with respect to the lifting and lowering towing cylinder 500) It comprises a support rotation motor 810 to rotate 600.

The support rotating means 800 is installed on the lower side of the robot support cylinder 330, and is largely composed of a support rotating motor 810 and a fixed frame 820 for fixing the support rotating motor 810. have.

The support rotary motor 810 is installed on the upper surface of the fixed frame 820 so that the motor shaft is directed downward, the motor shaft passes through the fixed frame 820 and protrudes to the lower surface.

A pulley 811 is provided on a motor shaft of the support rotary motor 810 on the lower surface of the fixed frame 820.

The upper surface of the fixed frame 820 and the lower surface of the first and second vertical transmission shaft driving motors 700 and 710 are spaced apart by a predetermined distance up and down.

A shaft portion 821 penetrates up and down in the center of the fixing frame 820 is rotatably installed through the bearing 821a. The shaft portion 821 protrudes a predetermined length to the lower surface of the fixing frame 820. A predetermined length protrudes to the upper surface of the fixing frame 820.

The pulley 822 is fixed to the shaft portion 821 protruding from the lower surface of the fixing frame 820, and transmits the rotational force of the pulley 811 rotated by the support rotation motor 810 by a belt 823. The shaft portion 821 is rotated.

In addition, the shaft portion 821 protruding from the upper surface of the fixed frame 820 is sandwiched between the first and second vertical transmission shaft driving motors 700 and 710 described above to drive the first and second vertical transmission shafts. The motor 700, 710 itself is rotated, which causes the mounter 770, the coupling means 730, and the transmission shaft support 600 to be rotatable in the lifting and lowering towing cylinder 500. The second conveying means 440, 450 is to be able to turn the whole to a specific position.

Finally, the lifting means 900, which is a component of the present invention, the support rotating means 800 including the support rotating motor 810 and the first and second vertical transmission shaft drive motors 700 and 710 ) And the elevating traction cylinder 500, the transmission shaft support 600 and the bellows 550 is configured to be raised and lowered together.

In more detail, the lifting means 900 has a structure similar to the lifting mechanism 11 of the prior art.

That is, as shown in Figures 8 and 12, the elevating motor 910 is installed on the lower side wall of the robot support cylinder 330 to face upward, and the elevating motor 910 A pulley 912 installed on the motor shaft 911, a vertical frame 331 vertically installed on the inner surface of the robot support cylinder 330, and a vertical direction rotable inside the vertical frame 331. The ball screw member 332 is supported, and is screwed to the ball screw member 332, and one side supports the lower surface of the support ring 530, and the other side is LM guide means (not shown) in the vertical frame 331. It consists of a lifting body 333 guided by, a pulley 332a which is installed below the ball screw member 332, and a belt 334 connecting the pulley 912 and the pulley 332a with each other. have.

When the motor shaft 911 is rotated, the rotational force of the pulley 912 is transmitted to the pulley 332a through the belt 334, which causes the ball screw member 332 to rotate in the axial direction, and eventually the ball screw The rotational force of the member 332 is changed by the linear motion of the lifting and lowering of the lifting body 333.

Therefore, the lifting and lowering traction cylinder 550 can be raised as the lifting and lowering body 333 moves up and down.

On the other hand, the present invention is further provided with an auxiliary guide means for guiding the auxiliary lifting during the lifting motion of the lifting body 333 constituting the above-mentioned lifting means 900.

9 and 7, the auxiliary guide means extends 830 and 831 protruding to one side and the other upper surface of the fixing frame 820 constituting the support rotating means 800, respectively; Auxiliary vertical frame 335 vertically installed on the inner surface of the robot support cylinder 330 corresponding to the extension portions 830 and 831, and an auxiliary LM guide on the inner surface of the auxiliary vertical frame 335. While lifting and lowering through 336, the auxiliary lifting body 337 is fixed to the bottom surface of the support ring part 530 and is integrally connected to the extension parts 830 and 831.

Here, the auxiliary LM guide 336 is composed of a guide rod 336a of a constant length and a moving body 336b linearly moving in the longitudinal direction along the outer circumference of the guide rod 336a, the extension portion 830 Both the upper side and the auxiliary lifting body 337 of the 831 are integrally connected to one side and the other side of the movable body 336b.

Therefore, when the motor shaft 911 is rotated in one direction, the rotational force of the pulley 912 through the belt 334 is transmitted to the pulley 332a, thereby the ball screw member 332 is rotated in the axial direction, Eventually, the rotational force of the ball screw member 332 is changed by the lifting motion of the lifting body 333. Subsequently, as the lifting body 333 moves up and down, the lifting traction cylinder 500 may be raised. In addition, since the auxiliary lifting and lowering body 337 is fixed to the lower surface of the support ring portion 530 of the elevating towing cylinder 500, all the components of the support rotating means 800 of the present invention are raised together. At this time, the bellows 500 of the present invention is in a compressed state. As a result, the height of the first and second conveying means 440 and 450 in the vacuum chamber 200 can be increased.

Here, when the motor shaft 911 is rotated in the opposite direction, the rotational force of the pulley 912 through the belt 334 is transmitted to the pulley 332a, which causes the ball screw member 332 to rotate in the axial direction As a result, the rotational force of the ball screw member 332 is changed to the lifting motion of the lifting body 333. Subsequently, as the lifting body 333 descends, the lifting traction cylinder 500 can be lowered. In addition, since the auxiliary lifting and lowering body 337 is fixed to the lower surface of the support ring portion 530 of the elevating towing cylinder 500, all the components of the support rotating means 800 of the present invention are lowered together. At this time, the bellows 500 of the present invention is in an elongated state. As a result, the height of the first and second conveying means 440 and 450 in the vacuum chamber 200 can be lowered.

Here, since the bellows 500 according to the present invention performs a function of blocking air communication between the inside and the outside of the vacuum chamber and a function related to lifting and lowering, unlike the related art, it is possible to eliminate the load applied to the bellows. It becomes possible.

Meanwhile, the first and second vertical transmission shaft drive motors 700 and 710 and the support rotating means 800 including the support rotating motor 810 and the lifting means 900 which are the configurations of the present invention described so far. ) Is installed in the robot support cylinder (330).

As described above, according to the transfer robot for working in the vacuum environment according to the present invention, the vacuum chamber is based on blocking the communication of the air so as not to be polluted from the outside, and the installation position of the vertically expandable bellows and the magnetic fluid real stage is changed. However, the magnetic fluid real stage is placed inside the bellows, and the bellows is configured to be limited to only the function of blocking the air communication between the inside and outside of the vacuum chamber and the function involved in lifting and lowering to remove the load on the bellows. It becomes possible.

Claims (3)

A flange portion 300 that is hermetically fixed to the installation hole 211 formed in the bottom wall 210 of the vacuum chamber 200 and has a through hole 310 of a predetermined size in the center thereof; A robot support barrel (330) installed on a lower surface of the flange portion (300) in a downward direction of the bottom wall (210); It is disposed in parallel to the vertical through the through hole 310 of the flange portion 300, the upper part is located in the vacuum chamber 200, the lower part is located in the robot support cylinder 330, the upper and lower constant length A pair of first and second vertical transmission shafts 400 and 410 disposed in parallel; A pressurizing ring part 510 rotatably inserted and lowered in the through hole 310 in the upper end part; a tubular part 520 extending to the lower side of the robot support cylinder 330 in the pressurizing ring part 510; A lifting traction cylinder 500 formed of a support ring 530 formed at a lower end of the cylinder 520 and installed inside the robot support 330; It is installed to surround the elevating towing cylinder 500, the upper end is airtightly coupled to the flange portion 300, the lower end up and down elastic bellows 550 is hermetically coupled to the support ring 530; The through-hole having a marginal diameter portion 610 that is inserted into the tubular portion 520 to be raised and lowered and rotated, and the marginal diameter portion 610 and the stepped stepped portion 620 to be in close contact with the pressure ring 510. An external diameter portion 630 is rotatably inserted and lowered in 310, and the first and second vertical transmission shafts 400 and 410 are rotatably inserted into the first and second vertical transmission shafts. Balls 640 and 650 are formed to penetrate in the vertical direction, the transmission shaft support 600 having a magnetic fluid real end 660 to block air communication between the vacuum chamber 200 and the robot support cylinder 330 therein Wow; First and second vertical transmission shaft driving motors 700 and 710 for respectively rotating the first and second vertical transmission shafts 400 and 410 in the transmission shaft support 600; Support rotating means having a support rotating motor 810 to rotate the first and second vertical transmission shaft drive motors 700 and 710 and the transmission shaft support 600 with respect to the elevating towing cylinder 500 800; A support rotating means 800 including the support rotating motor 810, the first and second vertical transmission shaft driving motors 700 and 710, the lifting and lowering traction cylinder 500, and the transmission shaft support 600. And an elevating means 900 having an elevating motor 910 for elevating the bellows 550 together. The first and second vertical transmission shaft drive motors 700 and 710, the support rotating means 800 including the support rotating motor 810, and the raising and lowering means 900 are the robot support cylinder 330. A transport robot for working in a vacuum environment, characterized in that it is installed in). The method of claim 1, The magnetic fluid real stage 600 is installed between the inner surface of the first and second vertical transmission shaft insertion holes 640 and 650 and the outer surface of the first and second vertical transmission shafts 400 and 410. And the first and second vertical transmission shaft insertion holes 640 and 650 block the air communication between the vacuum chamber 200 and the robot support cylinder 330. The method of claim 1, The bellows 550 of the bellows 550 is formed through a guide ring 350 fixedly coupled to an upper surface of the flange part 300 so that a guide hole 351 having a constant diameter is formed through the center part so as to communicate vertically with the through hole 310. The upper end is hermetically coupled to the lower surface of the guide ring 350, The lifting and lowering traction cylinder (500) and the transmission shaft support (600) is a transport robot for a vacuum environment, characterized in that the lifting and lowering is inserted into the guide hole (351).

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