KR20080078223A - Auto probe apparatus of detecting defect of liquid crystal display panel and method for detecting defect using the apparatus - Google Patents

Abstract

An auto probe inspection apparatus for liquid crystal panels and a method thereof are provided to prevent actual defects from being excessively detected by detecting the foreign substances attached on the top, bottom, inner surfaces of a liquid crystal panel and to reduce an outflow of defects in a post process by automatically and simultaneously detecting overall defects. An auto probe inspection apparatus(100) comprises a liquid crystal panel(140), a light irradiation part, a photographing part, and a data comparing and processing part. The light irradiation part includes the first laser(110) and the second laser(120) which respectively are arranged above and under the liquid crystal panel. The photographing part, composed of one or more cameras, photographs the liquid crystal panel. The data comparing and processing part compares and processes the defect data obtained through the photographing part.

Description

AUTO PROBE APPARATUS OF DETECTING DEFECT OF LIQUID CRYSTAL DISPLAY PANEL AND METHOD FOR DETECTING DEFECT USING THE APPARATUS}

1 is a flowchart showing a manufacturing process sequence of a general liquid crystal display device.

Figure 2 is a perspective view showing a general liquid crystal panel inspection device.

3 is a plan view schematically showing an auto probe inspection device of a liquid crystal panel according to the present invention.

FIG. 4 is a schematic diagram illustrating a foreign material detection process using an auto probe inspection apparatus of a liquid crystal panel according to the present invention, illustrating a foreign material detection process located on upper and lower surfaces of a liquid crystal panel through upper and lower laser scanning.

FIG. 5 is a schematic diagram illustrating a foreign material detection process using an auto probe inspection apparatus of a liquid crystal panel according to the present invention, illustrating a fixing for detecting a foreign material located on an inner surface of a liquid crystal panel. FIG.

6 is a flowchart illustrating a process of processing a liquid crystal panel after foreign material detection using an auto probe inspection apparatus of a liquid crystal panel according to the present invention.

-Code description of main parts of drawing-

100: auto probe inspection device 110: first laser

120: second laser 130: camera

140: liquid crystal panel 151: color filter substrate

153: black matrix 155: color filter layer

157: common electrode 161: liquid crystal layer

171: array substrate 180: computer system 191: backlight A, B, C: foreign matter (defect)

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an auto probe device for a liquid crystal panel, and more particularly, to an auto probe inspection device and an inspection method for a liquid crystal panel capable of effectively detecting foreign substances adhering to the upper, lower, and inner surfaces of the liquid crystal panel. It is about.

Recently, with the rapid development of the information society, the necessity of flat panel displays having excellent characteristics such as thinness, light weight, and low power consumption has emerged. It is excellent and is being actively applied to laptops and desktop monitors.

In general, a liquid crystal display device arranges two substrates on which the field generating electrodes are formed so that the surfaces on which the two electrodes are formed face each other, and moves the liquid crystal molecules by the electric field generated between the two substrates. It is a device that expresses an image.

A general manufacturing process of such a liquid crystal display device will be described with reference to FIG. 1 as follows.

1 is a flowchart illustrating a manufacturing process procedure of a general liquid crystal display device.

Referring to FIG. 1, a general liquid crystal display device includes a step (S10) of forming a stacked structure of an upper substrate and a lower substrate, a step of manufacturing a liquid crystal cell (S20), and an auto probe inspection of an LCD panel. It is produced through the step (S30) and the module process (S40).

In general, in the inspection of the liquid crystal panel, the operator performs a lighting test by using an auto probe (AP) inspection device or by using a microscope to check the existence of disconnection and point defects of the liquid crystal panel line. Perform the test.

The apparatus for inspecting the liquid crystal panel is a liquid crystal supply unit for supplying a liquid crystal panel, which is normally inspected, an inspection unit for actually inspecting, and a liquid crystal panel supplied from the liquid crystal panel supply unit and for loading the supplied liquid crystal panel into the inspection unit. It includes a conveying device.

An auto probe inspection apparatus of a general liquid crystal panel including these components will be described with reference to FIG. 2.

 2 is a perspective view schematically showing an auto probe inspection apparatus of a general liquid crystal panel.

Referring to FIG. 2, an auto probe inspection apparatus 50 of a general liquid crystal panel is largely composed of a liquid crystal panel inspection unit 61, a liquid crystal panel supply device 71, and a computer system (not shown).

Here, the liquid crystal panel inspection unit 61 is a liquid crystal which is a test object disposed in the microscope 63, moving means 65 and 67 for moving the microscope horizontally or vertically, and a microscope vertical movement guide (not shown) and the inspection unit. Panel 81.

In addition, the microscope 63 has a structure capable of moving up, down, left and right by using the horizontal and vertical moving means (65, 67).

The liquid crystal panel 81 is connected to the auto probe inspection device 50 of the liquid crystal panel through a pad 69 formed on the lower substrate of the liquid crystal panel.

Although not shown, the auto probe inspection device 50 of the liquid crystal panel includes a jig (not shown) for connecting the liquid crystal panel 81 to the inspection device 50.

In addition, the liquid crystal panel supply unit 71 includes a liquid crystal panel supply unit body and a liquid crystal panel supply unit 73.

In addition, a computer system (not shown) is connected to the liquid crystal panel inspecting unit 61 to transmit driving signals and the like according to various driving conditions of the liquid crystal panel 81.

The auto probe inspection apparatus 50 of the conventional liquid crystal panel applies a driving signal suitable for each model of the liquid crystal panel 81 to be inspected, and then displays a specific screen on the liquid crystal panel 81 to display a liquid crystal panel 81. Determine whether the drive is normal or not.

By the way, when the screen of the liquid crystal panel to which a signal is applied is first visually observed in the liquid crystal panel inspection device 50, and defects such as point defects are found, the microscope 63 is placed in a defective position such as the point defects. The microscope (63) makes a detailed observation.

However, such a conventional liquid crystal panel auto probe inspection device has a problem that it is difficult to distinguish point defects caused by foreign matters attached to the upper or lower surface of the liquid crystal panel and foreign matters formed inside the liquid crystal panel during visual observation or microscope observation. have.

In particular, in the case of a point defect caused by a foreign material attached to the upper or lower surface of the liquid crystal panel, it can be solved by cleaning the upper or lower surface of the liquid crystal panel. However, the defects caused by the foreign matter formed inside the liquid crystal panel are real defects. ), There is a problem of generating an actual defect.

In addition, defects such as PD / LD / stain are leaked out by detecting defects due to the visual inspection of the worker, and there are many difficulties in visual inspection by the worker as the model is enlarged.

In the case of PD and LD, after the designation of the posterior group, the human body visually inspects the defect and judges whether it is good or bad.

When PD candidate group is designated, PD overdetection due to foreign material inspection on the front / rear of the panel is detected.

Accordingly, the present invention has been made to solve the above-mentioned problems of the prior art, the object of the present invention can prevent the excessive detection of the actual defect through the detection of foreign matter on the upper and lower surfaces of the liquid crystal panel, and at the same time the entire defect The present invention provides an automatic probe inspection apparatus and inspection method for a liquid crystal panel which can automatically detect defects, thereby reducing outflow of defects in a later process.

In addition, another object of the present invention is to provide an automatic probe inspection apparatus and inspection method of a liquid crystal panel that can facilitate the cause analysis of the previous process due to the automatic generation of coordinates and regions of defects.

Auto probe inspection apparatus of the liquid crystal panel according to the present invention for achieving the above object is a liquid crystal panel; A photographing unit photographing the liquid crystal panel; A light irradiation unit disposed above and below the liquid crystal panel; And a data comparison processing unit for transmitting defect data obtained through the photographing unit.

Auto probe inspection apparatus of the liquid crystal panel according to the present invention for achieving the above object is a liquid crystal panel; A plurality of cameras for photographing the liquid crystal panel; First and second lasers disposed on upper and lower sides of the liquid crystal panel and irradiating light onto upper and lower surfaces of the liquid crystal panel; And a computer system for transmitting defect data obtained through the plurality of cameras.

Auto probe inspection method of the liquid crystal panel according to the present invention for achieving the above object comprises the steps of providing a liquid crystal panel; Selectively irradiating light onto the upper, lower and inner surfaces of the liquid crystal panel; Photographing the upper, lower and inner surfaces of the liquid crystal panel to selectively determine foreign substances located on the upper, lower and inner surfaces of the liquid crystal panel; And inspecting a bad state of the liquid crystal panel by comparing the selectively determined foreign material data with each other.

Auto probe inspection method of the liquid crystal panel according to the present invention for achieving the above object comprises the steps of providing a liquid crystal panel; Irradiating light onto upper and lower surfaces of the liquid crystal panel; Photographing the upper and lower surfaces of the liquid crystal panel during the light irradiation to selectively determine first foreign material data positioned on the upper and lower surfaces of the liquid crystal panel; Transmitting the determined first foreign material data to a data processor; Injecting light from the backlight under the liquid crystal panel toward the liquid crystal panel, photographing second foreign material data located on the upper, lower, and inner surfaces of the liquid crystal panel and transmitting the second foreign material data to the data processing unit; Comparing the first foreign material data and the second foreign material data to detect foreign material data that do not match each other; And classifying whether the detected foreign material data is less than or equal to a desired reference value and inspecting whether the liquid crystal panel is good or bad.

Hereinafter, an auto probe inspection apparatus and an inspection method of a liquid crystal panel according to the present invention will be described in detail with reference to the accompanying drawings.

3 is a plan view schematically showing an auto probe inspection apparatus of a liquid crystal panel according to the present invention.

FIG. 4 is a schematic diagram illustrating a foreign material detection process using an auto probe inspection apparatus of a liquid crystal panel according to the present invention. FIG. 4 is a diagram illustrating a foreign material detection process located on upper and lower surfaces of a liquid crystal panel through upper and lower laser scanning. .

FIG. 5 is a schematic diagram illustrating a foreign material detection process using an auto probe inspection apparatus of a liquid crystal panel according to the present invention, and illustrates a process of detecting a foreign material located on an inner surface of a liquid crystal panel.

Referring to FIG. 3, the auto probe inspection apparatus 100 of the liquid crystal panel according to the present invention detects foreign substances by scanning the upper and lower surfaces of the liquid crystal panel 140, respectively, and the first and second lasers 110 and 120. And the camera 130 for continuously photographing the upper and lower surfaces of the panel according to a predetermined time when scanning the upper and lower surfaces of the liquid crystal panel 140 using the first and second lasers 110 and 120. And a computer system 180 for comparing and processing foreign material detection data on the upper and lower surfaces of the liquid crystal panel 140 obtained by photographing according to a predetermined time.

Here, the lasers 110 and 120 are light sources for generating light, and are disposed above and below the liquid crystal panel 140 to scan the entire upper and lower surfaces of the panel in the short axis direction or the major axis direction. That is, the scanning proceeds from the left side to the right side or the bottom side to the upper side of the upper and lower surfaces of the panel, and may be scanned in any direction.

In addition, since the light generated from the laser (110, 120) is scattered by the foreign material (A, B) on the upper and lower surfaces, the foreign material (A, B) position on the upper and lower surfaces by the laser (110, 120) Can be determined.

Meanwhile, the liquid crystal panel 140 is formed between the color filter substrate 151 and the array substrate 171 which are coupled to face each other, and the substrates, and the liquid crystal 161 which generates phase transition according to a change in temperature or a change in concentration. )

The liquid crystal panel 140 is largely manufactured through an array process, a color filter process, a liquid crystal cell process, and a module process.

Here, the array process is a plurality of gate wirings (not shown) arranged in one direction with a predetermined interval on the array substrate 171, which is a glass substrate, and a plurality of arranged at regular intervals in a direction perpendicular to the respective gate wirings. And a plurality of thin film transistors (not shown) and pixel electrodes (not shown) respectively formed in the data lines (not shown) and the matrix pixel areas defined by the gate lines and the data lines.

In addition, the color filter process may include a black matrix layer 153, a color filter layer 155, and a common electrode for blocking light reaching a portion of the color filter substrate 151, which is a glass substrate, except for the pixel region. 157 is formed. In this case, the common electrode 157 may be formed on the lower glass substrate 171 according to the driving mode of the liquid crystal panel.

On the other hand, the camera 130 is movable up, down, left, and right of the liquid crystal panel 140, and can observe the entire area of the liquid crystal panel 140, but the size of the liquid crystal panel 140 is large Because a single camera cannot see the whole thing, multiple cameras can be used.

3 and 4, the computer system 180 determines the defect positions A and B of the liquid crystal panel 140 observed through the camera 130 and drives the liquid crystal panel 140. It is configured to transmit a signal.

At this time, the computer system 180, as shown in Figure 4, when the liquid crystal panel 140 is turned off foreign matter (located on the upper and lower surfaces of the liquid crystal panel 140 by the upper and lower lasers 110, 120 ( A and B) are determined.

Referring to FIG. 5, the computer system 180 of the auto probe inspection apparatus 100 of the liquid crystal panel transmits a driving signal to the liquid crystal panel 140, and provides a backlight (below the liquid crystal panel 140). When light is sent from the liquid crystal panel 140 to the liquid crystal panel 140 and the liquid crystal panel 140 is driven, the total defect positions A, B, and C on the upper, lower, and inner surfaces of the liquid crystal panel 140 through the camera 130. And c) for comparison.

In this way, the actual defects are generated in the liquid crystal panel 140 by eliminating foreign matters A and B on the upper and lower surfaces of the liquid crystal panel 140 at the entire defect positions A, B, and C of the liquid crystal panel 140. The real defect (C) can be determined.

Here, the actual defect (C) is a defect due to foreign matter generated inside the liquid crystal panel 100 and cannot be removed by a simple cleaning process.

Although not shown in the drawings, the auto probe inspection apparatus 100 of the liquid crystal panel according to the present invention includes a pin (not shown) of a jig (not shown) on a pad portion (not shown) formed at an edge of the liquid crystal panel 140. Electrical contact with

In this case, the jig (not shown) allows the driving signal sent from the computer system 180 to be transmitted to the liquid crystal panel 140 through the circuit board part to drive the liquid crystal panel 140. That is, the jig simply serves to electrically connect the pad portion of the liquid crystal panel 140 and the circuit board portion.

In addition, the circuit board unit (not shown) converts the signal transmitted to the jig (not shown) according to the driving conditions for each model of the liquid crystal panel 140 to be sent to the drive signal sent from the computer system 180. Do it.

Then, the entire defect position of the liquid crystal panel according to the light-off or lighting of the liquid crystal panel 140 is detected through the camera 130.

That is, the liquid crystal panel 140 displays a screen such as a black mode, a white mode, a red mode, a green mode, or a blue mode according to a specific screen required for the test, for example, the type of the test to be performed on the liquid crystal panel 140. Examine the normal operation and whether there are any defects to find out the total defect location (A, B, C).

First, referring to FIGS. 3 and 4, the liquid crystal panel 140 is formed by using lasers 110 and 120 provided on upper and lower sides of the liquid crystal panel 140 in a state where power is not applied to the liquid crystal panel 140. ) Scan the entire time for a certain time.

In addition, when the liquid crystal panel 140 is scanned through the lasers 110 and 120, the camera 130 photographs the liquid crystal panel 140 every predetermined time and is located on the upper and lower surfaces of the liquid crystal panel 140. (E.g., A, B in FIG. 4).

At this time, the cameras 130 are positioned on the upper and lower surfaces of the liquid crystal panel 140 by the light irradiated through the upper and lower lasers 110 and 120 of the liquid crystal panel 140. Detects through).

That is, when the laser (110, 120) is irradiated with light irradiated toward the liquid crystal panel 140, the scattered light is generated in the foreign material (A, B) attached to the upper and lower surfaces of the liquid crystal panel 140 The upper and lower surfaces of the liquid crystal panel 140 can determine the foreign material (A, B) position.

Meanwhile, referring to FIGS. 3 and 5, while the power is applied to the liquid crystal panel 140, light is driven through the backlight 191 by driving the backlight 191 provided under the liquid crystal panel 140. It is incident to the liquid crystal panel 140 side.

In this case, defects are disposed on the upper and lower surfaces of the liquid crystal panel 140 at the predetermined time using the camera 130 without using the lasers 110 and 120 provided on the upper and lower sides of the liquid crystal panel 140. For example, A, B, and C) of FIG. 5 are detected.

Through the camera 130, foreign materials A, B, and C are respectively positioned on the upper and lower surfaces and the inner surface of the liquid crystal panel 140 by the light emitted through the backlight 191 under the liquid crystal panel 140. Detect.

That is, when light emitted from the backlight 191 toward the liquid crystal panel 140 is emitted, scattered light is generated from foreign materials A, B, and C attached to upper, lower, and inner surfaces of the liquid crystal panel 140. It is possible to determine the position of the foreign material (A, B, C) on the upper, lower and inner surfaces of the liquid crystal panel 140.

As described above, in the foreign materials A, B, and C attached to the upper, lower, and inner surfaces of the liquid crystal panel 140 while the liquid crystal panel 140 is driven, the liquid crystal panel 140 is not driven. When the detected foreign materials A and B are erased, the actual defect C causing the actual defect in the liquid crystal panel 140 may be determined.

On the other hand, the principle of determining the defect position of the liquid crystal panel using the auto probe inspection apparatus of the liquid crystal panel configured as described above will be described with reference to FIGS.

First, although not shown in the drawing, a liquid crystal panel 140 for detecting a foreign material of the liquid crystal panel is manufactured. In this case, in the liquid crystal panel 140, the array substrate 171 and the color filter substrate 151 are positioned to face each other, and the liquid crystal 161 is filled between the array substrate 171 and the color filter substrate 151. have.

The process of forming a TFT array on the array substrate 171 is a process of fabricating a thin film transistor on a substrate by repeating a deposition process, a hotolithography process, and an etching process.

On the other hand, the process of forming a color filter array on the color filter substrate 151 is a process of forming a black matrix layer 263 so that light is shielded to the portion except the pixel region, and using a dye or pigment To form red, green, and blue color filter layers 265, and after forming the color filter layers 265, indium tin oxide (ITO) as a transparent material. The process of forming the common electrode 267 is performed. In this case, the common electrode 267 may be formed on the array substrate 171 according to the driving mode of the liquid crystal panel.

Thereafter, after forming the liquid crystal panel 140, the liquid crystal panel 140 is loaded into the auto probe inspection apparatus 100 according to the present invention in order to inspect the existence of a defect in the liquid crystal panel 140.

Subsequently, although not shown in the drawing, the auto probe inspection apparatus 100 of the liquid crystal panel is electrically connected to a pin (not shown) of a jig (not shown) at a pad portion (not shown) formed at an edge of the liquid crystal panel 140. Contact with.

In this case, the jig (not shown) allows the driving signal sent from the computer system 180 to be transmitted to the liquid crystal panel 140 through the circuit board part to drive the liquid crystal panel 140. That is, the jig simply serves to electrically connect the pad portion of the liquid crystal panel 140 and the circuit board portion.

In addition, the circuit board unit (not shown) converts the driving signal sent from the computer system 180 to the jig (not shown) by converting the signal according to the driving conditions for each model of the liquid crystal panel 140 to be inspected. Do it.

Then, the entire defect position of the liquid crystal panel according to the light-off or lighting of the liquid crystal panel 140 is determined through the camera 130.

That is, the liquid crystal panel 140 displays a screen such as a black mode, a white mode, a red mode, a green mode, or a blue mode according to a specific screen required for the test, for example, the type of the test to be performed on the liquid crystal panel 140. Examine the normal operation and whether there are any defects to find out the total defect location (A, B, C).

First, referring to FIGS. 3 and 4, the liquid crystal panel 140 is formed by using lasers 110 and 120 provided on upper and lower sides of the liquid crystal panel 140 in a state where power is not applied to the liquid crystal panel 140. ) Scan the entire time for a certain time.

In addition, when the liquid crystal panel 140 is scanned through the lasers 110 and 120, the camera 130 photographs the liquid crystal panel 140 every predetermined time and is located on the upper and lower surfaces of the liquid crystal panel 140. (For example, A and B in Fig. 3) is detected.

At this time, the camera 130 is located on the foreign material (A, B) positions respectively located on the upper and lower surfaces of the liquid crystal panel 140 by the light irradiated through the upper and lower lasers 110 and 120 of the liquid crystal panel 140. Detect through

That is, when the laser (110, 120) is irradiated with light irradiated toward the liquid crystal panel 140, the scattered light is generated in the foreign material (A, B) attached to the upper and lower surfaces of the liquid crystal panel 140 The upper and lower surfaces of the liquid crystal panel 140 can determine the foreign material (A, B) position.

Meanwhile, referring to FIGS. 3 and 5, in the state where power is applied to the liquid crystal panel 140, light is driven through the backlight 191 by driving the backlight 191 provided under the liquid crystal panel 140. It is incident to the liquid crystal panel 140 side.

In this case, without using the lasers 110 and 120 provided on the upper and lower sides of the liquid crystal panel 140, defects are disposed on the upper and lower surfaces of the liquid crystal panel 140 at the predetermined time using the camera 130. For example, A, B, and C) of FIG. 5 are detected.

Through the camera 130, foreign materials A, B, and C are respectively positioned on the upper and lower surfaces and the inner surface of the liquid crystal panel 140 by the light emitted through the backlight 191 under the liquid crystal panel 140. Detect.

That is, when light emitted from the backlight 191 toward the liquid crystal panel 140 is emitted, scattered light is generated from foreign materials A, B, and C attached to upper, lower, and inner surfaces of the liquid crystal panel 140. It is possible to determine the position of the foreign material (A, B, C) on the upper, lower and inner surfaces of the liquid crystal panel 140.

As described above, in the foreign materials A, B, and C attached to the upper, lower, and inner surfaces of the liquid crystal panel 140 while the liquid crystal panel 140 is driven, the liquid crystal panel 140 is not driven. When the detected foreign materials A and B are erased, the actual defect C causing the actual defect in the liquid crystal panel 140 may be determined.

Meanwhile, a method of determining a defect position of the liquid crystal panel using the auto probe inspection apparatus of the liquid crystal panel according to the present invention configured as described above will be described with reference to FIGS. 3 to 6.

6 is a flowchart illustrating a process of processing the liquid crystal panel after the detection of the foreign matter using the auto probe inspection apparatus of the liquid crystal panel according to the present invention.

Referring to FIG. 6, a liquid crystal panel 140 including an array substrate on which a TFT array is formed, a color filter substrate on which a color filter array is formed, and a liquid crystal formed therebetween is loaded into the auto probe inspection apparatus 100 of the liquid crystal panel.

In this case, the process of forming a TFT array on the array substrate 171 is a process of manufacturing a thin film transistor on a substrate by repeating a deposition process, a hotolithography process, and an etching process.

On the other hand, the process of forming a color filter array on the color filter substrate 151 is a process of forming a black matrix layer 263 so that light is shielded to the portion except the pixel region, and using a dye or pigment To form red, green, and blue color filter layers 265, and after forming the color filter layers 265, indium tin oxide (ITO) as a transparent material. The process of forming the common electrode 267 is performed. In this case, the common electrode 267 may be formed on the array substrate 171 according to the driving mode of the liquid crystal panel.

Subsequently, the foreign material inspection step of the auto probe inspection device 100 is divided into a state in which no power is applied to the liquid crystal panel and a foreign material inspection in a state where power is applied.

First, the entire area of the liquid crystal panel 140 is scanned using the upper and lower lasers 110 and 120 without power applied to the liquid crystal panel 140. In this case, the up and down laser scanning process may be performed simultaneously or sequentially.

Then, while scanning the liquid crystal panel through the laser, the camera 130 determines the foreign matter (for example, A, B) attached to the upper and lower surfaces of the liquid crystal panel 130 a plurality of times at predetermined times. .

At this time, the number of determinations using the camera 130 can be changed as necessary, but this number is performed during the scanning time using a laser.

Thus, foreign material (A, B) data detected by the camera 130 is transmitted to the computer system 180 while the laser (110, 120) is scanning.

Subsequently, in a state where power is applied to the liquid crystal panel 140, the light emitted from the backlight 191 disposed under the liquid crystal panel 140 is not operated without operating the upper and lower lasers 110 and 120. Incident on 140.

Subsequently, the liquid crystal panel 140 is photographed a plurality of times at predetermined times using the camera 130 to detect foreign substances (for example, A, B, and C) positioned on the upper, lower, and inner surfaces of the liquid crystal panel 140. Detect. In this case, the detection frequency using the camera 130 may be changed as necessary.

The foreign material (A, B, C) data of the upper, lower, and inner surfaces of the liquid crystal panel 140 detected by the camera 130 using the light emitted through the backlight 191 together with the driving of the liquid crystal panel 140. Is sent to the computer system 180.

Subsequently, comparing the first foreign material data (A, B) and the second foreign material data (A, B, C) and erasing them from each other clearly identifies the actual defect (C) causing the actual defect inside the liquid crystal panel 140. Will be determined.

Then, if the accurately detected actual defect C is determined to be less than the desired reference value, the liquid crystal panel is determined to be a good product and put into the subsequent process.

However, if the actual defect (C) detected correctly is determined to be higher than the desired reference value, it is disposed of or repaired.

As described above, the present invention has been described with reference to the embodiment shown in the drawings the auto probe inspection apparatus and inspection method of the liquid crystal panel, but this is only an example, those of ordinary skill in the art It will be appreciated that various modifications and other equivalent embodiments are possible from this.

Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

As described above, the auto probe inspection apparatus and inspection method of the liquid crystal panel according to the present invention have the following effects.

Auto probe inspection apparatus and inspection method of the liquid crystal panel according to the present invention using a laser disposed on the upper and lower sides of the liquid crystal panel while scanning the liquid crystal panel using a camera to detect foreign substances attached to the upper and lower surfaces of the panel, the laser After detecting foreign materials located on the upper, lower, and inner surfaces of the liquid crystal panel by using the light of the backlight without using the laser beam, the foreign materials are finally compared to each other to finally determine the actual defect in the liquid crystal panel.

Therefore, the auto probe inspection apparatus and inspection method of the liquid crystal panel according to the present invention can prevent the actual defects from being excessively detected by detecting foreign substances on the upper, lower and inner surfaces of the panel, and can automatically detect all defects simultaneously. This can reduce the outflow of defects in the post-process.

In addition, the automatic probe inspection apparatus and inspection method of the liquid crystal panel according to the present invention facilitates the cause analysis of the previous process due to the automatic generation of coordinates and regions of the defect.

Claims (28)

A liquid crystal panel; A photographing unit photographing the liquid crystal panel; A light irradiation unit disposed above and below the liquid crystal panel; And And a data comparison processing unit for comparing and processing defect data obtained through the photographing unit. The apparatus of claim 1, wherein the photographing unit comprises a camera. The apparatus of claim 2, wherein the camera is at least one camera. The apparatus of claim 1, wherein the light irradiator comprises a laser. The apparatus of claim 4, wherein the laser scans the entire upper and lower regions of the liquid crystal panel by dividing the laser. The apparatus of claim 1, wherein the data comparison processing unit comprises a computer system. The apparatus of claim 1, wherein the photographing unit detects foreign substances on upper, lower, and inner surfaces of the liquid crystal panel. 8. The apparatus of claim 7, wherein foreign substances on the upper and lower surfaces of the liquid crystal panel are discriminated by the light irradiation unit and the photographing unit. The apparatus of claim 7, wherein foreign matters on the upper, lower, and inner surfaces of the liquid crystal panel are detected by a photographing unit. 2. The apparatus of claim 1, wherein the data processor discriminates and distinguishes foreign materials located on the upper, lower, and inner surfaces of the liquid crystal panel. The apparatus of claim 1, wherein the inspection apparatus further comprises a driving signal unit for applying a driving signal to the liquid crystal panel. The apparatus of claim 1, wherein the photographing unit photographs by dividing the entire area of the liquid crystal panel into a plurality of areas or defining and photographing one area. A liquid crystal panel; At least one camera photographing the liquid crystal panel; First and second lasers disposed on upper and lower sides of the liquid crystal panel and irradiating light onto upper and lower surfaces of the liquid crystal panel; And And a computer system for comparing and processing defect data obtained through the camera. 15. The apparatus of claim 13, wherein the first and second lasers divide the entire upper and lower regions of the liquid crystal panel into a plurality of regions to continuously scan the first and second lasers. The apparatus of claim 13, wherein the plurality of cameras detect foreign substances located on the upper, lower, and inner surfaces of the liquid crystal panel. 16. The apparatus of claim 15, wherein foreign substances on the upper and lower surfaces of the liquid crystal panel are detected by the first and second lasers and the camera. 16. The apparatus of claim 15, wherein foreign substances on upper, lower, and inner surfaces of the liquid crystal panel are detected by a backlight and a camera. Providing a liquid crystal panel; Selectively irradiating light onto upper, lower, and inner surfaces of the liquid crystal panel; Photographing the upper, lower and inner surfaces of the liquid crystal panel to selectively determine foreign substances located on the upper, lower and inner surfaces of the liquid crystal panel; And And comparing the foreign material data determined selectively to inspect the defective state of the liquid crystal panel. 19. The liquid crystal panel of claim 18, wherein the irradiating of the light is performed by using first and second lasers disposed above and below the liquid crystal panel or by injecting light from the backlight to the liquid crystal panel. To check the auto probe. 20. The method of claim 19, wherein the first and second lasers scan the entire upper and lower surfaces of the liquid crystal panel. 21. The method of claim 20, wherein foreign matters on the upper and lower surfaces of the liquid crystal panel are determined by photographing the upper and lower surfaces of the liquid crystal panel during the scanning. 19. The method of claim 18, wherein the foreign material located on the inner surface is determined by camera imaging when the backlight is disposed under the liquid crystal panel. 19. The method of claim 18, wherein the comparison processing of the selective foreign material data is performed by a data comparison processing unit in a computer system. The liquid crystal display of claim 23, wherein the data comparison processing unit of the computer system compares foreign material data located on the upper, lower and inner surfaces of the liquid crystal panel when the liquid crystal panel is driven with foreign material data located on the upper and lower surfaces of the liquid crystal panel when the liquid crystal panel is not driven. An auto probe inspection method for a liquid crystal panel, characterized by determining the actual degree of defect in the liquid crystal panel. Providing a liquid crystal panel; Irradiating light onto upper and lower surfaces of the liquid crystal panel; Photographing the upper and lower surfaces of the liquid crystal panel during the light irradiation to selectively detect first foreign material data positioned on the upper and lower surfaces of the liquid crystal panel; Transmitting the detected first foreign matter data to a data processor; Injecting light from the backlight under the liquid crystal panel toward the liquid crystal panel, photographing second foreign material data located on the upper, lower, and inner surfaces of the liquid crystal panel and transmitting the second foreign material data to the data processing unit; Comparing the transmitted first foreign material data and the second foreign material data to determine foreign material data that do not coincide with each other; And And classifying whether the determined foreign material data is less than or equal to a desired reference value and inspecting whether the liquid crystal panel is defective. 26. The method of claim 25, wherein the light irradiation step scans the entire upper and lower regions of the liquid crystal panel by first and second lasers. 27. The method of claim 25, wherein the liquid crystal panel is photographed by one or a plurality of cameras. 28. The method of claim 27, wherein the photographing of the liquid crystal panel is performed at least several times.

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