KR20080067561A - Pedestal heater block of cvd - Google Patents

Abstract

A pedestal heater block for chemical vapor deposition is provided to reduce process errors and to lengthen a lifetime of a heater block by preventing leakage and improving disconnection of a heater. A substrate is loaded on a surface of a base block(110). A connective path connected to a gas hole is formed in the base block. A vacuum pipe(160) is coupled with the base block and includes a protrusive part coupled with a groove part of the base block to absorb the substrate. A gas supply pipe(170) is connected to the connective path of the base block and includes a protrusive part coupled with the groove part of the base block. A temperature sensor pipe(180) is connected to the base block separated from the gas supply pipe. A sheath heater(150) is positioned at a heater loading groove of the base block to couple a heater cover with a contact part of the heater loading groove.

Description

Pedestal Heater Block for Chemical Vapor Deposition {PEDESTAL HEATER BLOCK OF CDD}

The present invention relates to a pedestal heater block for chemical vapor deposition, and more particularly, the vacuum adsorption and transport of the substrate loaded in the vacuum chamber during the chemical vapor deposition process of the semiconductor manufacturing process to the process progress position and maintaining a constant reaction temperature It relates to a chemical vapor deposition pedestal heater block for supplying a moving gas.

Indium oxide: An indium tin oxide (ITO) thin film made of tin oxide is a transparent electrode in flat panel display fields such as plasma display panels (PDPs), liquid crystal displays (LCDs), organic light emitting displays (OLEDs), and solar cells. It is widely used as.

These ITO transparent electrodes have been developed by various physical property studies since SnO ₂ , In ₂ O ₃ transparent conductive films [US 2564706, 2564708, 2564987, 2118795] have been developed. The ITO thin film used for such an ITO transparent electrode is conventionally formed by depositing mainly on a substrate using physical vapor deposition (PVD), such as sputtering or thermal evaporation. However, this physical vapor deposition method has a problem in mass production on a large area substrate.

Therefore, recently, chemical vapor deposition or atomic layer deposition (ALD) has been proposed as an alternative to overcome the limitations of the physical vapor deposition, and some schools and research institutes have been studied. Here, chemical vapor deposition is deposited through a process such as adsorption and decomposition on a heated substrate by simultaneously injecting vaporized thin film raw materials into a process chamber through a carrier gas or a liquid delivery system (LDS). The thin film is deposited according to the principle described below. Meanwhile, the atomic layer deposition method deposits a thin film by injecting vaporized thin film materials alternately in a pulse form to induce a surface reaction.

Important characteristics of the raw material compounds used in such vapor deposition include high vapor pressure, liquid compounds, vaporization temperature and thermal stability during storage, ease of handling, easy reactivity with reactants in the process, simple deposition mechanisms and by-product removal. Ease of use and the like. In addition, in the case of the ITO thin film, since the deposition of the complex oxide form must be performed, the process conditions such as the deposition temperature in each process must be identical or similar.

In the conventional petestal heater block 1, which is a heat source for raising a substrate to a process position in a chamber in which chemical vapor deposition is performed, a substrate (not shown) is placed on a surface thereof and a vacuum is formed as shown in FIG. A base block 10, on which adsorption and deposition is performed, a block back cover 20 coupled to the rear of the base block 10, the base block 10, and a block back cover 20 are chambers (not shown). External rod 40, the inner rod 30 for elevating the base block 10 and the block back cover 20, a sheath heater for heating the base block 10, 50), the vacuum pipe 60 for fixing the substrate by vacuum adsorption, the temperature of the gas supply pipe 70 for supplying gas to prevent film deposition of the substrate edge and the temperature of the base block 10 can be sensed. Temperature sensor wave that the temperature sensor passes through It consists of a loop (80).

The vacuum pipe 60, the gas supply pipe 70 and the temperature sensor pipe 80 are guide blocks 64 to the pipe bodies 62, 72, 82 as shown in (a), (b) of FIG. , 74, 84) and pipe (66, 76, 86) with the O-ring interposed on the tip to be fixed to the equipment side fastening portion (not shown in the drawing) machined from stainless steel and then welded (W) Each structure is manufactured using an extrusion pipe, and the base block 10 is welded by manual welding.

And the sheath heater 50 is inserted into the heater mounting groove 16 formed by processing the heater pattern on the base block 10, as shown in Figure 3 (a), (b) after the heater mounting groove The projection 18 of (16) and the skin (heater sheath) of the sheath heater 50 were welded (W) and fixed.

And the vacuum pipe 60 is performed by welding (W) when connecting to the base block 10, as shown in Figure 4 and is directly welded (W) to the pipe body 62 of Figure 6 A defect such as a crack appears in the welded part of (d), which causes leaks.

In addition, the gas supply pipe 70 is spaced apart by a predetermined interval as shown in FIG. 5 and connected to the gas hole 12 provided with the gas hole cover 14 so as to be sealed at the top thereof. The welding is carried out through the connecting pipe 16a.

However, the vacuum pipe 60, the gas supply pipe 70 and the temperature sensor pipe 80 are welded (W) using aluminum extruded pipe bodies 62, 72, and 82 to prevent weld stress and thermal stress in the pipe weld. There was a problem that caused the crack caused by the crack problem.

In addition, since the sheath heater 50 has a thin skin (heater sheath) thickness, the thickness of the skin is uneven and the welding stress remains on the skin during welding. As a result, thermal stress is added during the process and the block back cover 20 is applied. As shown in FIGS. 6 (a) and 6 (b), the corrosion phenomenon occurred on the surface of the sheath due to the corrosive gas flowing through the holes 22.

That is, since the welding directly to the skin over the entire sheath heater 50 inserted into the base block 10, a lot of stress (Stress) is left in the heater sheath.

In addition, since the inside of the heater block and the chamber are connected to each other by the holes 22 of the petestal heater block 1, when the corrosive gas is introduced into the sheath heater 50 during the process, the surface stress is concentrated. In the concentrated portion, corrosion occurs as shown in FIG. 6 (b), which causes a problem of disconnection and leakage of the sheath heater 50.

Furthermore, the vacuum pipe 60 and the gas supply pipe 70 are directly welded to the surface of the pipe bodies 62 and 72, as shown in Figs. Cracks are likely to occur due to thermal stress as shown in FIGS. 6 (c) and 6 (d), which causes leaks and prevents maintaining the degree of vacuum inside the chamber, and the gas supply pipe 70. In order to couple to the base block 10, the welding (W) points to the five places because the welding directly to the pipe body 72, there was a problem that all are vulnerable to cracks.

In addition, since the pipe fastening parts 66, 76, 86 and the equipment-side fastening part have different materials, the thread of the aluminum pipe fastening parts 66, 76, 86 is relatively different when the fastening / removing of the equipment is repeated. As it was soft, there was a problem in that the wear life is reduced.

The present invention has been made in order to solve the above problems, the object is to prevent the cracks of the weld by varying the material, processing method, welding method of the various pipes, the heater sheath by covering with a heater cover processed in the siege heater It improves the corrosion caused by the leak and improves the occurrence of leakage and poor heater disconnection, thereby improving productivity by reducing process defects caused by the leak, extending the life of the heater block, and reducing equipment maintenance time. It is to provide a pedestal heater block for chemical vapor deposition that can be provided with a fastening portion is made of the same material and separately to reduce the wear.

In order to achieve the above object, the present invention, a pedestal heater block, the substrate is seated on the surface of the base block which is formed in the connection passage is connected to the gas hole formed to be spaced therein; A vacuum pipe coupled to the base block to form a stepped portion at one end to which vacuum pressure is transmitted to suck the substrate in a vacuum to couple the stepped portion to the groove portion of the base block; A gas supply pipe forming a stepped portion at one end connected to a connection passage of the base block spaced apart from the vacuum pipe to couple the stepped portion to the groove portion of the base block; A temperature sensor pipe connected to the base block spaced apart from the gas supply pipe; And a sheath heater positioned in the heater mounting groove formed in the base block and coupling a contact portion between the heater cover provided on the base and the heater mounting groove. It is made by including, by connecting the gas hole formed in the base block by a connecting passage formed inside the base block to reduce the cost and easy processing and the vacuum pipe, gas supply pipe and temperature sensor pipe to the base block When fixing to the crack, the cracks are generated by welding stress and thermal stress, and the leak problem can be solved.The leak is generated while improving the corrosion phenomenon generated by the heater sheath by covering the sheath heater with a heater cover. And the heater disconnection defect is improved.

The pedestal heater block for chemical vapor deposition according to the present invention is different from the material, processing method, and welding method of various pipes to suppress weld cracking, and is covered by a heater cover processed to the sheath heater to cause corrosion of the heater sheath. Improves leakage and poor heater disconnection, improving productivity by reducing process defects caused by leaks, extending the life of heater blocks, and reducing equipment maintenance time. In addition, it is provided separately to have an effect of extending the life due to reduced wear.

Hereinafter, with reference to the accompanying drawings, the chemical vapor deposition pedestal heater block of the present invention will be described with reference to an embodiment as follows.

Chemical vapor deposition pedestal heater block 110 according to an embodiment of the present invention is a base block 110, block back cover 120, the inner rod 130, the outer rod 140 as shown in FIG. ), A sheath heater 150, a vacuum pipe 160, a gas supply pipe 170, and a temperature sensor pipe 180.

Here, since the block back cover 120, the inner rod 130, the outer rod 140 and the sheath heater 150 have the same structure and function as those of the conventional art, detailed description thereof will be omitted.

Meanwhile, in the present invention, the junction of the sheath heater 150, the vacuum pipe 160, the gas supply pipe 170 and the temperature sensor pipe 180 to the base block 110 and the block back cover 120 are all electron beams. It is performed by welding W or the like.

The base block 110 has a gas hole 112 sealing the gas hole cover 114 on the surface to which the block back cover 120 is coupled at a predetermined interval and touches the gas hole 112. Gun drill) to connect the hole in the horizontal direction through the connecting passage 118 through. Here, both ends of each of the connection passages 118 block the inlet and then weld (W) to seal the inside.

The base block 110 has a heater mounting groove 116 formed on the surface to which the block back cover 120 is coupled to have a pattern shape of the sheath heater 150, and the vacuum pipe 160 and the supply gas are formed. Groove portions 119a and 119b to which the lower extensions 168 and 178 of the pipe 170 can be coupled by welding W are formed, respectively.

The vacuum pipe 160 and the gas supply pipe 170 are formed by processing the whole aluminum rolled material as shown in FIG. 8 (a) to prevent leakage from occurring at the connection site, and to contact the base block 110. A groove having an O-ring is formed at one side thereof, and the pipe coupling parts 166 and 176 coupled to the equipment side coupling part at one end of the pipe body 162 and 172, and the block back cover 120 and the inner rod 130. Pipe guide blocks 164 and 174 fixed by welding (W) and rear extensions 168 and 178 coupled to the base block 110 to weld (W) the pipe body 162. , 172) Do not apply stress to the part.

And the temperature sensor pipe 180 is formed by processing the aluminum rolled material as shown in Figure 8 (b) as a whole to prevent the leakage occurs at the connection site, and the equipment side fastening at one end of the pipe body 182 A pipe coupling part 186 coupled to the part, a pipe guide block 184 fixed by welding (W) to the block back cover 120 and the inner rod 130, and coupled to the base block 110. An extension 188 is provided to prevent stress from being applied to the pipe main body 182 during welding (W). A stepped portion 180a is formed at the pipe fastening portion 186.

As shown in FIG. 9, the sheath heater 150 is positioned in the heater mounting groove 116 of the base block 110, and then the heater cover 116a processed to correspond to the heater mounting groove 116. It is mounted on the upper part and welds (W) the contact area with the heater mounting groove 116 so as not to directly damage or weld stress to the sheath heater 150, and also corrosive flows into the heater block 100. The sheath heater 150 may be protected from corrosion by not being exposed to the gas.

In addition, by heating the cover (116a) without welding (W) to the skin of the sheath heater 150 as in the prior art can increase the thermal efficiency of the heater, it is possible to prevent the corrosion phenomenon generated on the skin. .

In addition, it is possible to prevent a heater leak by preventing the corrosion phenomenon occurring on the skin of the sheath heater 150, it is possible to prevent the disconnection of the heating heating wire.

As shown in FIG. 10, the vacuum pipe 160 forms a jaw (not shown in the drawing) at an extension part 168 that is one end thereof when the vacuum pipe 160 is coupled to the groove part 118b of the base block 110. And by connecting the connection portion between the jaw and the groove portion 118b by electron beam welding (W) it is directly applied to the pipe body 162 to prevent cracking.

As a result, since welding (W) is not directly performed on the pipe main body 162, cracks may be prevented from occurring due to welding stress and thermal stress in the weld portion.

The supply gas pipe 170 is an extension part that is one end as a coupling portion when the supply gas pipe 170 is coupled to the groove portion 118a connected to the connection passage 118 of the base block 110 in the orthogonal direction. By forming a jaw (not shown in the drawing) at 178 and joining the connection portion between the jaw and the groove 118a by electron beam welding (W), stress is directly applied to the pipe main body 172 to generate cracks. prevent.

As a result, since welding (W) is not directly performed on the pipe main body (172), cracks may be prevented from being generated by welding stress and thermal stress in the welding portion, and the welding (W) point is removed by removing the conventional internal connection pipe. It is reduced to three places and is designed in such a structure that no one is directly welded (W) to the pipe body 172, thereby reducing the occurrence of leaks by eliminating the portion that is the main cause of the leak.

Therefore, the pedestal heater block for chemical vapor deposition according to the present invention processes the vacuum pipe 160, the gas supply pipe 170 and the temperature sensor pipe 180 by integral aluminum rolled material to prevent the occurrence of leakage at the connection portion.

The heater cover 116a is covered by the sheath heater 150 provided in the heater mounting groove 116 of the base block 110, and then a contact portion is welded to increase the thermal efficiency of the heater. Corrosion phenomenon can be prevented. Furthermore, by preventing corrosion from occurring on the skin of the sheath heater 150, the leakage of the heater may be prevented and the disconnection of the heating heating wire may be prevented.

In addition, when the vacuum pipe 160 is coupled to the base block 110, the contact portion between the jaw and the groove 119b of the base block 110 is welded (W) instead of directly to the pipe body 162. By joining, cracks can be prevented from occurring due to welding stress and thermal stress in the weld portion during welding W. FIG.

When the supply gas pipe 170 is also coupled to the base block 110, the contact portion between the jaw and the groove 119a of the base block 110 is welded (W) without being directly connected to the pipe body 172. By joining, cracks can be prevented from being generated by welding stress and thermal stress in the welding portion during welding (W), and a connection passage formed through the drill of the connection of the gas hole 112 of the base block 110 ( 118), it is possible to obtain a leak prevention effect due to cost reduction, easy maintenance, and reduction of the welding (W) point.

Chemical vapor deposition pedestal heater block according to another embodiment of the present invention is not shown in the drawing, but the base block 110, block back cover, inner rod, outer rod, sheath heater, vacuum pipe 260 as in the previous embodiment , The gas supply pipe 270 and the temperature sensor pipe 280, except for the vacuum pipe 260, the gas supply pipe 270 and the temperature sensor pipe 280 are the same as those of the previous embodiment. Its structure and function will not be described in detail.

Here, the lower ends of the vacuum pipe 260 and the gas supply pipe 270 are inserted into the groove portions 119b and 119a formed in the base block 110, and are electron beam welded, and formed in the block back cover 120. The lower end of the temperature sensor pipe 280 is inserted into the groove portion is being welded electron beam.

Here, when the lower end of the vacuum pipe 260 and the gas supply pipe 270 is welded to the groove portions 119b and 119a, the lower end portion 266 of the vacuum pipe 260 and the gas supply pipe 270. , 276, respectively, an extension 286 of the temperature sensor pipe 280 when the lower end of the temperature sensor pipe 280 is welded to a groove formed in the block back cover 120. On the chin is formed.

12A and 12B, the vacuum pipe 260 is formed by processing the aluminum rolled material as a whole to prevent leakage at the connection site, and at one end contacting the equipment side fastening part (not shown). While being fixed to the pipe body 262, a groove having an O-ring is formed at the tip thereof, and the screw part is changed to SUS304, which is stainless steel, which is the same material as that of the equipment-side fastening part, to be applied. The unit 290 is provided.

That is, the vacuum pipe 260 is coupled to the upper end of the fixing member 300 of the fastening portion 290 and formed through the center of the penetrating through the gun drill pipe body 262 and the pipe body 262 extending in the longitudinal direction The lower end portion 266 inserted into the groove part and welded to the base block 110 at one end thereof, and the pipe extending from the diameter of the pipe body 262 while being fixed by welding to the block back cover and the inner rod. The guide block 264 and the intermediate end extension 268 which are welded after being inserted into the groove 119b of the base block 110 are provided to prevent stress from being applied to the pipe body 262 when welding.

Here, the fastening part 290 is coupled to the vacuum pipe 260 by the spiral fastening when the vacuum pipe 260 is coupled to the equipment side fastening portion, the fixing member 300 and the connecting member 310 It is composed by subdividing into.

The fixing member 300 has a first step having a diameter extending from the second step 304 so that the second step 304 is formed to be inserted into and extends at one end of the pipe main body 262 in a step shape. The jaw 306 is integrally formed at the end of the first step 302 and the first step 302, and a through hole 302a is formed to be connected to the inside of the pipe main body 262.

Here, a groove is formed in the inner wall of the jaw 306 so as to insert an O-ring provided to maintain the seal on the contact surface when coupled to the equipment side fastening portion.

The connecting member 310 has a through hole 312 is formed in the center so as to be inserted into the first step 302 in the step shape is not separated by the jaw 306 of the fixing member 300 at one end A spiral 314 is formed to be coupled to the equipment side fastening part by a spiral, and a nut 316 that can be supported by a tool or the like is integrally formed while the diameter of the upper end is extended to the other end.

As a result, the connecting member 310 supports the jaw 306 of the fixing member 300 while being spirally fastened to the equipment side fastening part, thereby detaching the vacuum pipe 260 from the equipment side fastening part. This is possible.

As shown in FIGS. 13A and 13B, the gas supply pipe 270 is formed by processing an aluminum rolled material as a whole to prevent leakage at a connection site, and at one end of the pipe main body 262 in contact with the equipment side fastening part. Is fixed to the end is formed with a groove is provided with an O-ring at the end of the spiral fastening type 290 to improve the wear phenomenon by applying a screw thread to the stainless steel SUS304 material of the same material as the equipment side fastening portion It is provided.

That is, the gas supply pipe 270 is coupled to the upper end of the fixing member 300 of the fastening part 290 and formed through the center of the pipe through a drill drill and extending in the longitudinal direction and the pipe body (272) A rear guide portion 276 coupled to the equipment side fastening portion at one end of the lower portion 272 and a pipe guide block extending from the diameter of the pipe body 272 while being fixed by welding to the block back cover and the inner rod ( 274 and the intermediate end extension 278 which is welded after being inserted into the groove 119a of the base block 110 to prevent stress from being applied to the pipe body 272 when welding.

Here, the fastening part 290 is coupled to the gas supply pipe 270 by a spiral fastening when the gas supply pipe 270 is fixed to the base block 110, the fixing member 300 and the connecting member Subdivided into 310, it is comprised.

The fixing member 300 has a first step having a diameter extending from the second step 304 so that the second step 304 is formed to be inserted into and extends at one end of the pipe main body 272 in a step shape. The jaw 306 is integrally formed at the end of the 302 and the first step 302, and a through hole 302a is formed to be connected to the penetrated interior of the pipe body 272.

Here, the inner wall of the jaw 306 is formed with a groove is inserted into the O-ring is provided to maintain the sealing when coupled to the equipment side fastening portion.

The connecting member 310 has a through hole 312 is formed in the center to be inserted into the first step 302 in the step shape, but is not separated by the jaw 306 of the fixing member 300 and the other end A spiral 314 is formed to be coupled to the spiral of the equipment-side fastening portion and is coupled to the spiral, and a nut 316 is integrally formed at the bottom thereof to support a tool or the like during the fastening.

Here, the connecting member 310 may be formed only of the spiral 314 made of stainless steel or the whole of stainless steel.

As a result, while the connecting member 310 supports the jaw 306 of the fixing member 300 by applying a spiral fastening to the equipment side fastening part, the gas supply pipe 270 is connected to the equipment side fastening part. Desorption is possible.

On the other hand, the lower end of the pipe body 274 inserted into the second step 304 in the gas supply pipe 270 is formed to extend further than the lower end of the vacuum pipe 260.

The temperature sensor pipe 280 is formed by processing the aluminum rolled material as shown in Figure 14a and 14b as a whole to prevent the leakage occurs at the connection site, the screw portion is made of stainless steel material of the same material as the fastening portion It is provided with a spiral fastening type fastening portion 290 'to improve the wear phenomenon by applying to change to the SUS304 material.

That is, the temperature sensor pipe 280 is coupled to the upper end of the fixing member 300 'of the fastening portion 290' and formed through the center by a gun drill, but extending in the longitudinal direction and the pipe body 282 and the pipe body An extension part 286 coupled to the equipment side fastening part at one end of the part 282, and a pipe guide block 284 extending from the diameter of the pipe body 282 while being fixed by welding to the inner rod, Do not apply stress to the pipe body 282 when doing.

Here, the fastening portion 290 'is coupled to the temperature sensor pipe 280 by the spiral fastening when the temperature sensor pipe 280 is fixed to the equipment side fastening portion, the fixing member 300' It is comprised by the member 310 '.

The fixing member 300 ′ has a first step having a diameter extending from the second step 304 ′ and having a second step 304 ′ formed to be inserted into one end of the pipe body 282 and extending in a stepped shape. A jaw 306 'is integrally formed at the end of the step 302' and the first step 302 ', and a through hole 302a' is formed to be connected to the inside of the pipe body 282.

The connecting member 310 ′ has a stepped shape in which a through hole 312 ′ is formed to be inserted into the first step 302 ′ at a center thereof, but is not separated by the jaw 306 ′ of the fixing member 300 ′. The spiral 314 ′ is formed at the bottom to be helically fastened to the equipment side fastening portion, and a nut 316 ′ is integrally formed at the bottom thereof to support a tool or the like at the time of fastening while the diameter thereof is expanded.

As a result, the connecting member 310 'supports the jaw 306' of the fixing member 300 'and spirally fastens to the equipment side fastening part, thereby applying the temperature sensor pipe 280 to the equipment side. Detachable from the fastening part.

Therefore, in the present invention, when the vacuum pipe 260, the gas supply pipe 270 and the temperature sensor pipe 280 is fastened and fixed to the equipment-side fastening portion, the aluminum pipe vacuum pipe 260, gas supply pipe 270 And a part of the temperature sensor pipe 280 fixed to the equipment side fastening part so that the same spiral material as the helix of the equipment side fastening part is formed, and then fastened to be worn due to the difference between the aluminum material and the stainless material. The problem of shortening can be solved.

In the detailed description of the present invention described above with reference to the preferred embodiment of the present invention, the scope of protection of the present invention is not limited to the above embodiment, and those skilled in the art of the present invention It will be understood that various modifications and changes can be made in the present invention without departing from the spirit and scope of the invention.

1 is a schematic diagram showing a conventional pedestal heater block.

Figure 2 is a schematic diagram showing before and after coupling of the vacuum pipe, the gas supply pipe and the temperature sensor pipe that is a component of the pedestal heater block.

3 is a side view illustrating a state in which a sheath heater is fixed to a base block that is a component of the pedestal heater block.

4 is a side view illustrating a state in which a vacuum pipe is coupled to the base block.

5 is a side view illustrating a state in which a gas supply pipe is coupled to the base block.

6 is a reference picture showing a state in which a crack is generated in the corrosion and welding of the sheath heater.

7 is a schematic diagram illustrating a pedestal heater block for chemical vapor deposition according to an embodiment of the present invention.

8 is a schematic diagram illustrating a vacuum pipe, a gas supply pipe, and a temperature sensor pipe that are components of the pedestal heater block.

9 is a side view illustrating a state in which a sheath heater is fixed to the base block that is a component of the pedestal heater block.

10 is a side view illustrating a state in which a vacuum pipe is coupled to the base block.

11 is a side view illustrating a state in which a gas supply pipe is coupled to the base block.

12A and 12B are exploded views and coupling views illustrating a vacuum pipe in a pedestal heater block for chemical vapor deposition according to another exemplary embodiment of the present invention.

13A and 13B are exploded views and coupling views illustrating a gas supply pipe in the pedestal heater block for chemical vapor deposition.

14A and 14B are exploded views and coupling views illustrating a temperature sensor pipe in the chemical vapor deposition pedestal heater block.

<Description of Symbols for Major Parts of Drawings>

100: pedestal heater block

110: base block

112: gas hall

116: heater mounting groove

116a: heater cover

118: connecting passage

120: Block back cover

150: sheath heater

160, 260: vacuum pipe

170, 270: gas supply pipe

180, 280: temperature sensor pipe (T / C pipe)

290, 290 ': Fastener

300, 300 ': holding member

310, 310 ': connecting member

Claims (9)

In pedestal heater block, A base block on which a substrate is mounted on a surface thereof, and a connection passage is formed to which gas holes formed to be spaced apart from each other are formed; A vacuum pipe coupled to the base block to form a stepped portion at one end to which vacuum pressure is transmitted to suck the substrate in a vacuum to couple the stepped portion to the groove portion of the base block; A gas supply pipe forming a stepped portion at one end connected to a connection passage of the base block spaced apart from the vacuum pipe to couple the stepped portion to the groove portion of the base block; A temperature sensor pipe connected to the base block spaced apart from the gas supply pipe; And A sheath heater positioned in the heater mounting groove formed in the base block and coupling a contact portion between the heater cover provided on the base block and the heater mounting groove; Chemical vapor deposition pedestal heater block comprising a. The method of claim 1, And the vacuum pipe, the gas supply pipe and the temperature sensor pipe are integrally formed and processed to prevent the occurrence of leakage during the welding connection with the base block and the block back cover. The method of claim 2, wherein the connecting passage, Pedestal heater block for chemical vapor deposition, characterized in that the gas hole penetrates in the horizontal direction by a gun drill and the seal is welded through both ends thereof. The method of claim 3, wherein The vacuum pipe, the gas supply pipe and the temperature sensor pipe coupled to the base block and the block back cover are chemical vapor deposition pedestal heater block, characterized in that the electron beam welding. The method of claim 1, The vacuum pipe, the gas supply pipe and the temperature sensor pipe are formed in the same material as the spiral of the fastening part of the equipment side separately on one end of the pipe body which is integrally formed and formed to prevent leakage when connecting to the fastening part of the equipment. Chemical vapor deposition pedestal heater block, characterized in that the coupling is provided. The method of claim 5, wherein the fastening portion, A fixing member having a rear end inserted into and fixed to one end of the pipe main body in a stepped shape, and having a front end contacting the equipment side fastening portion; It is inserted so as not to be separated by the jaw formed on the front end of the fixing member while the spiral is formed so that the front end is screwed to the equipment side fastening portion, characterized in that it consists of a step-shaped connecting member is integrally formed with a nut at the rear end Pedestal heater block for chemical vapor deposition. The method according to claim 4 or 5, The vacuum pipe, the gas supply pipe and the temperature sensor pipe is a pedestal heater block for chemical vapor deposition, characterized in that formed of aluminum rolled material. The method of claim 4, wherein The vacuum pipe, the gas supply pipe and the temperature sensor pipe are chemical vapor deposition pedestal heater block, characterized in that at least one extension is formed integrally with the base block and the block back cover. The method of claim 7, wherein The vacuum pipe, the gas supply pipe and the temperature sensor pipe is a chemical vapor deposition pedestal heater block, characterized in that at least one extension is formed integrally with the block back cover.

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