KR20080037121A - Film forming material supplying apparatus - Google Patents

Abstract

This invention provides a film forming material supplying apparatus that can evenly supply a film forming material to three or more ring hearths. The film forming material supplying apparatus is a vacuum vapor deposition apparatus in which a film forming material supplied from a film forming material supply chamber for storing a large amount of a film forming material, which can withstand continuous operation for a long period of time, is evaporated on a ring hearth within a film formation chamber to form a film on a substrate being transferred over the hearth. The film forming material supplying apparatus is characterized in that three or more ring hearths are juxtaposed in the widthwise direction of the substrate to be transferred, and, in a middle ring hearth excluding at least both end ring hearths, the film forming material is supplied by an electromagnetic vibration feeder which can regulate the amount of the film forming material supplied.

Description

Film Forming Material Supply Device {FILM FORMING MATERIAL SUPPLYING APPARATUS}

The present invention relates to a film forming material supply apparatus, and more particularly, to a film forming material supply apparatus for quantitatively supplying a film forming material from a film forming material supply chamber to a ring hearth of a film formation chamber in a vacuum deposition apparatus.

Discharge electrodes are formed on the front glass substrate serving as a panel of the plasma display panel (PDP) used for plasma TVs, and a magnesium oxide (MgO) film is formed to protect the discharge electrodes. With the recent widespread use of plasma TVs, the demand for panels is rapidly increasing, and accordingly, the production capacity is also required for the vacuum deposition apparatus for MgO film formation.

As the MgO supply apparatus in the conventional vacuum deposition apparatus for MgO film formation, what is shown by FIG. 21 is known. Referring to FIG. 21, a conveying means 128 is provided at the upper part of the deposition chamber 120 of the vacuum deposition apparatus to carry in and take out the substrate G on which the electrode is formed in a horizontal position, and below the glass substrate G. In the present invention, two ring hearts 150 for evaporating MgO pellets, which are the material of the protective film, are arranged together with the pierce tube 151 for generating an electron beam. In addition, a film forming material supply chamber 110 is provided above both sides of the film forming chamber 120, and a second supply means for feeding MgO pellets into the film forming chamber 120 is installed in the film forming material supply chamber 110. The film forming material supply chamber 120 is connected via a gate valve 113. In the deposition chamber 120, a rotary cylindrical feeder 141 serving as a first supply means for supplying MgO pellets to the ring hearth 150 is provided. The film forming chamber 120 is evacuated by the vacuum pump 109, and the film forming material supply chamber 110 is evacuated by a vacuum pump (not shown). In addition, MgO pellets are supplied in the form of a particulate or columnar shape (for example, 5-6 mm in diameter and 3-5 mm in height).

However, in recent years, with the increase in the size of glass substrates, it is necessary to provide three ring-shaped 150 in the film formation chamber 120 as shown in FIG. Above these, as shown in FIG. 22, glass substrate G is conveyed perpendicularly to the drawing by the conveying means 128, and in order to supply the film forming material MgO pellets to the ring ring 150 in the center. Even if the film forming material supply apparatus such as the ring-shaped 150 at both ends is provided, the film forming material supply chamber 110 and the rotating cylindrical feeder 141 are not affected as shown in the drawing without affecting the glass substrate G. Cannot be installed.

On the other hand, Japanese Unexamined Patent Publication No. 2003-321768 discloses three ring-shaped columns arranged in a column shape are sequentially rotated and heated by an electron gun, and a plurality of substrates held in a circular substrate holder are rotated above them, and thus, from Ring Haas. An apparatus for depositing a film forming material is described. The ring-shaped feedstock is supplied to these ring-hass by a linear feeder. As a result, the film forming material can be equally supplied to the three ring furnaces. As in the present invention, it is not an apparatus for conveying the upper side of the ring-hase in which the substrate is arranged downward, in a predetermined direction, and no controllability is described in the linear feeder.

Patent Document 1: Japanese Patent Application Laid-Open No. 2003-321768

Patent Document 2: Japanese Patent Application Laid-Open No. 2000-199050

In view of the above-described problems, the present invention is capable of supplying the film-forming material to the ring haas in the middle of the ring haas except for the ring haas at both ends with respect to the ring haas arranged in the width direction of the substrate to be transferred. An object of the present invention is to provide a film-forming material supply apparatus capable of supplying film-forming materials evenly to the hearth.

The above problems are directed to a vacuum deposition apparatus for forming a film on a substrate to be transported upward by evaporating a film forming material supplied from a film forming material supply chamber containing a large amount of film forming material to withstand continuous operation for a long time on a ring hearth in a film forming chamber. The ring haas are provided in three or more in the width direction of the substrate to be transported, and the supply of the film forming material to the ring haas in the middle excluding at least both ring haas is provided by an adjustable electromagnetic vibration feeder. It is solved by the film forming material supply device of the vacuum deposition apparatus.

Moreover, the above subject is vacuum deposition which forms a film | membrane on the board | substrate conveyed upward by evaporating the film forming material supplied from the film forming material supply chamber which accommodates a large quantity of film forming materials withstanding continuous operation for a long time on the ring heart | region in the film forming chamber. In the apparatus, at least three ring haas are arranged in the width direction of the substrate to be conveyed, and at least the ring haas except at both ends of the ring haas is supplied by an electromagnetic vibration feeder capable of adjusting the supply amount of the film forming material. In the film forming material supply chamber at both ends, a film forming material hopper for discharging the film forming material downward and the film forming material discharged from the film forming material hopper are weighed to receive a predetermined amount of the film forming material. A metering hopper and a predetermined amount of the film forming material discharged from the metering hopper are received and discharged downward. Is a funnel hopper and a vacuum is installed in the deposition chamber is provided with a fixed quantity transfer device for receiving the film forming material discharged from the funnel hopper to supply to the ring Haas at a predetermined feed rate below It is solved by the film forming material supply device of the vapor deposition apparatus.

1 is a front sectional view of a film forming apparatus according to a first embodiment of the present invention.

Fig. 2 is a longitudinal sectional view of the film forming material supply chamber in the same apparatus.

3 is a plan view of a film forming material supply apparatus according to the first embodiment of the present invention.

FIG. 4 is a view seen from the [4]-[4] line direction in FIG. 2; FIG.

FIG. 5 is a view seen from the [5]-[5] line direction in FIG. 2; FIG.

6 is a cross-sectional view conceptually illustrating the movement and metering of MgO pellets by opening and closing the first outlet of the first optical sensor and the film forming material hopper and opening and closing of the metering hopper second outlet;

Fig. 7 is a view showing a rotating cylindrical feeder and a ring hearth in the film formation chamber, Fig. 7-A is a partially omitted plan view, and Fig. 7-B is a partially broken side view.

Fig. 8 is a sectional view showing the action of the rotary cylindrical feeder.

Fig. 9 is a partial schematic perspective view conceptually showing a film forming material supply device comprising three hoppers in a film forming material supply chamber and a rotating cylindrical feeder in a film forming chamber.

10 is a plan view of an electromagnetic vibrating feeder applied to an embodiment of the present invention.

11 is the same side view.

FIG. 12 is a sectional view taken along the line [12]-[12] in FIG. 10; FIG.

FIG. 13 is a sectional view taken along the line [13]-[13] in FIG. 12; FIG.

14 is the same front view.

15 is a graph showing a relationship between a coil current value and an MgO conveyance amount in an electromagnetic vibration feeder.

Fig. 16 is a side view of the case where three steps of electromagnetic vibration feeders are aligned with each step provided.

17 is a partial side view illustrating the coil vacuum seal of the same electromagnetic vibrating feeder.

18 is a graph showing the relationship between the particle size of MgO to be conveyed and the frequency of splash occurrence.

Fig. 19 is a side view showing a case where a metal net is installed in a trough.

20 is a schematic plan view showing a modification of the film forming apparatus.

21 is a sectional front view of a film forming apparatus of a conventional example.

FIG. 22 is a sectional front view showing a case where three ring haas are placed together in FIG. 21; FIG.

* Description of the sign *

10: film forming material supply chamber 11: film forming material hopper

12: 1st discharge port 13: 1st rotating shaft

14: first opening and closing arm 15: insertion plug

16: first air cylinder 17: pipe-shaped heater

20: deposition chamber 21: metering hopper

22: second outlet 23: second rotating shaft

25: cover plate 26: second air cylinder

27a + 27b: first optical sensor 30: inflow guide

31: funnel hopper 32: outlet line

33: trough 34: expectation

35: plate spring 37: coil

41: rotary cylindrical feeder 42: cylindrical container

43: ribbon screw 44: axis of rotation

47: motor 48: reducer

49: supply chute 50: ringhas

F: electronic vibrating feeder S: metal mesh

The film forming material supply apparatus of the present invention can be fixed to a vacuum deposition apparatus having a structure as shown in Fig. 22 of a conventional example, as shown in Fig. 1, and is formed in the film forming material supply apparatus for ring-hass at both ends. The material supply chamber is shown by FIGS. That is, FIG. 2 is a longitudinal cross-sectional view schematically showing the film forming material supply chamber 10, and FIG. 3 is a plan view of the film forming material supply chamber 10. 4 is sectional drawing of the [4]-[4] line direction in FIG. 2, and FIG. 5 is sectional drawing of the [5]-[5] line direction in FIG.

Referring to FIG. 2, the film forming material hopper 11 is disposed inside the film forming material supply chamber 10, and the metering hopper 21 and the metering hopper 21 are directly under the first outlet 12 of the film forming material hopper 11. A funnel hopper 31 is provided directly below the second outlet 22, and the bottom discharge pipe 32 of the funnel hopper 31 is inserted into the deposition chamber 20. The film forming material supply chamber 10 is evacuated by the vacuum pump 9. 2, 3, and 5, the film-forming material supply chamber 10 is dripped (down) from the ceiling 1 and into the MgO pellet which is a film-forming material in the film-forming material hopper 11. Twelve pipe heaters 17 are provided as if rushing. In addition, a heater is wound around the outer wall of the metering hopper 21. In addition, with reference to FIGS. 2-4, the lid | cover 1 is provided with the injection | throwing-in lid 4 which opens when MgO pellets are thrown into the film forming material hopper 11.

The cylindrical first outlet 12 of the film-forming material hopper 11 is a cylindrical portion fixed to the front end side of the flat plate portion 14p of the first opening / closing arm 14 rotated by the first pivot shaft 13 ( 15b) and the insertion plug 15 which becomes the cone-shaped part 15a of the same diameter on it are inserted and closed from the bottom, and the insertion plug 15 is opened by pulling out the downwards. Moreover, the 2nd discharge port 22 of the metering hopper 21 is closed by abutting the cover plate 25 rotated by the 2nd rotating shaft 23 from the lower side, and the cover plate 25 This is opened by breaking down. And with reference to FIG. 4, the 1st rotating shaft 13 which opens and closes the 1st outlet 12 of the film forming material hopper 11 is driven by the air cylinder 16, and with reference to FIG. 5, the metering hopper The second rotating shaft 23 which opens and closes the second outlet 22 of 21 is driven by the air cylinder 26.

The film forming material hopper 11 can accommodate an amount of MgO pellets capable of continuously operating the vacuum deposition apparatus, for example, for two weeks or more. While the second outlet 22 of the bottom of the metering hopper 21 is closed, the first outlet 12 of the upper film forming material hopper 11 is opened to receive the discharged MgO pellets, but the amount to be received is always a constant amount. do. That is, referring to FIG. 2, the metering hopper 21 includes light emitting elements 27a mounted on one side wall of the side walls facing each other at a predetermined height, and light receiving elements 27b mounted on the other side wall. The 1st optical sensor 27a + 27b is provided, and the quantity of MgO pellets received from the film forming material hopper 11 increases, and light emission of the 1st optical sensor 27a + 27b is carried out by the MgO pellets. When the light from the element 27a to the light receiving element 27b is blocked, the blocking is detected and the first outlet 12 of the film forming material hopper 11 is closed. The amount of MgO pellets metered into the metering hopper 21 is an amount suitable for the supply amount to the rotating cylindrical feeder 41 mentioned later in the film-forming chamber 20.

The funnel-shaped hopper 31 which exists directly below the second outlet 22 of the metering hopper 21 receives the MgO pellets discharged from the metering hopper 21 without scattering and is installed in the film formation chamber 20 as it is. It is a hopper for leading to the rotary cylindrical feeder 41, and the bottom part is not opened and closed, and the vertical discharge pipe 32 attached to the bottom part is inserted into the film formation chamber 20 as described above.

6 shows the opening and closing of the first optical sensor 27a + 27b and the film forming material hopper 11, the first outlet 12, and the opening and closing of the second outlet 22 of the metering hopper 21. A partially omitted perspective view schematically showing the discharge and metering of pellets. That is, Fig. 6-A shows that the first outlet 12 of the film forming material hopper 11 is closed, the MgO pellets are accommodated in the film forming material hopper 11, and the first optical sensor 27a for measurement. The second outlet 22 of the metering hopper 21 to which + 27b) is mounted is closed, and FIG. 6-B shows that the first pivot shaft 13 has a first opening / closing arm 14 and an insertion plug 15. Is rotated downward to open the first outlet 12 of the film-forming material hopper 11 to discharge the MgO pellets to the metering hopper 21 at the lower side, and FIG. 6-C shows that the metering hopper 21 The surface level of the Mg0 pellets is increased, and the light beam from the light emitting element 27a of the first optical sensor 27a + 27b to the light receiving element 27b is blocked, thereby rotating the first rotating shaft 13 in the reverse direction. The insertion plug 15 into the first outlet 12 of the film-forming material hopper 11 to close it, and after receiving a certain amount of MgO pellets, the second pivot shaft 23 opens the cover plate 25. Rotate Down By this, a certain amount of MgO pellets measured in the film forming material hopper 11 is discharged to the upstream end of the inflow guide 30 in the lower film formation chamber 20 via the funnel hopper 31. Indicates.

FIG. 7: is a figure which shows the rotating cylindrical feeder 41 shown with the ring-haze 50 installed in the film-forming chamber 20, FIG. 7-A is a partially top view, and FIG. 7-B is a partially broken side view to be. As shown in Fig. 7-B, the rotary cylindrical feeder 41 is a ribbon-like screw 43 attached to the inner circumferential surface of the cylindrical container 42 which is rotated by tilting the shaft center, and the rotating shaft of the cylindrical container 42 ( 44 is supported on the bracket 46 via the bearing 45. The inner volume of the cylindrical container 42 is larger than the amount of MgO pellets in the metering hopper 21. And the rotating shaft 44 is driven by the motor 47 and decelerated by the reducer 48 to rotate. The rotating shaft 44 is inclined at an angle of 55 degrees with respect to the horizontal plane. As shown in FIG. 8, the MgO pellets in the cylindrical container 42 on which the ribbon-shaped screw 43 is mounted are transferred upward along the lowest part of the inner wall surface of the cylindrical container 42 to be rotated. It is sent out from the lowest part of the upper edge of the ordinary container 42.

Moreover, although not shown in figure, the 2nd optical sensor which monitors the rotation speed of the rotating shaft 44 is provided in proximity to the rotating shaft 44. As shown in FIG. The amount of MgO pellets supplied from the rotating cylindrical feeder 41 to the ring heart 50 is calculated by the rotation speed of the rotating shaft 44. When the supply amount reaches a predetermined value, the second outlet 22 of the metering hopper 21 ), The MgO pellets are discharged to the rotary cylindrical feeder 41 via the funnel hopper 31.

Furthermore, in the vicinity of the downstream side of the rotary cylindrical feeder 41, a supply chute 49 for receiving the MgO pellets sent out from the cylindrical container 42 of the rotary cylindrical feeder 41 and feeding them to the ring hearth 50. Is installed. That is, one end side of the supply chute 49 is adjacent to surround the upper end edge of the rotating cylindrical container 42, and the other end side extends and extends to just above the ring heart 50. In addition, it is a partial schematic perspective view which shows the film-forming material supply chamber 10, the rotating cylindrical feeder 41, and the ring-half 50, and is referring to FIG. 9 which is a figure which shows the film-forming material supply apparatus of embodiment of this invention, In the film formation chamber 20 into which the discharge pipe 32 at the bottom of the upper hopper 31 is inserted, an inflow guide 30 positioned under the discharge pipe 32 to guide the MgO pellets to the rotary cylindrical feeder 41 is provided. It is provided, the downstream end of the inflow guide 30 is installed so that it can be opened at a slight interval above the rotating cylindrical container 42. Further, the supply chute 49 is provided downstream of the rotary cylindrical feeder 41.

Next, the electromagnetic vibration feeder F used as a means for supplying the film forming material in the film forming material supply chamber 10 as described above to the center ring hearth 50 will be described. As shown in FIGS. 10-14, the base 34 is arrange | positioned under the normal trough 33, and is couple | bonded with this by the pair of plate spring 35 inclined, and the trough 33 Is fixed to the tow attachment member 36 by a bolt. Under the attachment member 36, the electromagnetic coil 37 is fixed to the base 34 described above. When an alternating current is supplied to the electromagnetic coil 37, an alternating magnetic absorption force is generated between the fixed core 38 and the movable core 39 with reference to FIG. 17, and a pair of plate springs 35 are inclinedly disposed. The row 33 vibrates (FIG. 12), and the MgO on the trough 33 is conveyed in the arrow P direction (FIG. 12).

15 shows the relationship between the coil current value and the MgO conveyance amount. This is made with the average value of 10 measurements, and the certainty is quite high. When the coil current value is taken as the horizontal axis and enlarged, it can be seen that the MgO conveyance amount (kg / hr) is almost linearly increased. As a result, it is understood that the amount of MgO conveyance can be easily adjusted by changing the magnitude of the variable resistor, for example, through the current flowing through the coil. As a result, the ring harness 50 at both ends is supplied from the film forming material supply device 10. However, if the coil current values are adjusted to be equal to these supply amounts, MgO can be supplied to the three ring harness 50 evenly. Can be.

18 is a graph showing the relationship between MgO pellet particle diameter X (mm) vs. splash incidence (pieces per minute), where the acceleration voltage of the electron gun is 20kv, the deposition rate 3.6nm / s, and the electron gun emission current 200mA. In the case of MgO particle diameter X of 0.8-1.5 in diameter, the frequency of splash occurrence is 1.2, whereas MgO particle size X is 0 in diameter of 1-3, 2-3 and 4-5. Therefore, as shown in FIG. 19, when the metal mesh (for example, punching metal; S) is provided in the trough 33 as a classification means, and the hole diameter shall be 1 mm or 1.5 mm or less, the particle size below it MgO can be excluded, eliminating most of the splash.

In FIG. 19, 52 is a guide cylinder for collect | recovering MgO separated from the hole of the metal mesh S. In FIG. Below this, the collecting box 53 for accommodating MgO with a small particle diameter is provided.

In addition, instead of installing the metal mesh S of FIG. 19, if the trough 33 is slightly upward with respect to the conveying direction j of the material, MgO having small particles is transferred by a known vibration action. The lower part of the floor is gradually occupied, and these are collected at the right end with respect to the drawing of the trough 33, so it is sufficient to install the collecting box 53 at the right end.

Although the sealing mechanism of the electromagnetic coil 37 is shown in FIG. 17, the casing 40 is attached to the base 34 through the sealing g so that the coil 37 may be enclosed. Although not shown in the base 34, a lead wire is provided through which a through hole is provided (of course inside the sealing g) to supply a current flowing through the electromagnetic coil 37, and although not shown, the electromagnetic coil 37 is not shown. The cooling pipe for cooling) is inserted through the same through hole.

The electromagnetic coil 37 is manufactured in a known manner, but a varnish is impregnated into the outer insulating material, for example, to ensure insulation. When a current flows through this coil 37 in a vacuum, it naturally generates heat and becomes high temperature. As a result, the vacuum atmosphere is contaminated by varnish and other evaporates, which adversely affects the film formation in the film formation chamber 20. Therefore, as described above, the coil 37 is preferably insulated from the vacuum atmosphere by the casing 40. However, depending on the structure of the coil 37 or the heating temperature of the coil, the casing 40 to be sealed may be omitted to expose the film formation chamber 20.

The embodiment of the film forming material supply apparatus of the present invention is configured as described above, and the operation thereof will be described next.

1 to 5, in FIG. 2, the film forming material hopper 11 of the film forming material supply chamber 10 is inserted into the conical portion 15a by the first cylindrical outlet 12 of the bottom. Is inserted and the first outlet 12 is in a closed state, and the film forming material hopper is accommodated in the film forming material hopper 11 in an amount of MgO pellets capable of continuous operation for two weeks or more of the vacuum deposition apparatus. In the heating state by the pipe heater 17 inserted into the MgO pellet in (11), the film-forming material supply chamber 10 is evacuated by the vacuum pump 9 to be contained in the MgO pellet. The excess water shall be removed sufficiently. In addition, it is assumed that the metering hopper 21 is closed with the second outlet 22 and accommodates a predetermined amount of MgO pellets. Furthermore, also in the film formation chamber 20 which vacuum-exhausted using FIG. 9, the MgO pellet of a certain amount is accommodated in the cylindrical container 42 of the rotating cylindrical feeder 41, and the rotating cylindrical feeder 41 is carried out. And ring haus 50 is actuated.

In the deposition chamber 20, the MgO pellets in the cylindrical container 42 of the rotating cylindrical feeder 41 rotated by the inclined rotating shaft 44 are described with reference to FIG. 7 -B. Similarly, the ring which raises the inner peripheral surface by the ribbon-like screw 43, is quantitatively discharged from the lowest part of the upper edge, and rotates through the supply chute 49 at a low rotational speed (for example, one rotation per hour). It is supplied evenly on the hearth 50, and evenly forms the MgO vapor deposition film in the board | substrate in the film-forming chamber 20. FIG. And since the rotation speed of the rotating cylindrical feeder 41 and the rotating shaft 44 is monitored by the 2nd optical sensor, since the supply amount from the cylindrical container 42 to the ring-haul 50 is calculated, when a supply amount reaches | attains a predetermined value, 2 The air cylinder 26 is driven to rotate the second pivot shaft 23 to rotate all of the cover plates 25 to open the second outlet 22 of the metering hopper 21, and thus from the metering hopper 21 The MgO pellets are discharged and received in the funnel hopper 31, and are rotated through the inlet guide 30 of the deposition chamber 20 from the discharge pipe 32 which is vertical to the bottom of the funnel hopper 31. 41) It is discharged into the cylindrical container 42. Since the volume of the cylindrical container 42 is made larger than the amount of MgO pellets in the metering hopper 21, it does not flow out from the cylindrical container 42.

When the cover plate 25 of the weighing hopper 21 is opened and a predetermined time elapses, the second air cylinder 26 is started, and the second pivot shaft 23 is rotated in the reverse direction, so that the cover plate 25 is weighed. The second outlet 22 of 21 is closed. Subsequently, referring also to FIG. 6, the first air cylinder 16 is driven to rotate the first pivot shaft 13 together with the first opening / closing arm 13, and the first outlet 12 of the film-forming material hopper 11. ) Is inserted from the first outlet 12 and the MgO pellets are discharged from the film forming material hopper 11 to the weighing hopper 21 by their own weight. As time passes, the surface level of the MgO pellets contained in the metering hopper 21 is increased, but the light-receiving elements (A) from the light emitting element 27a of the first optical sensor 27a + 27b are received by the contained MgO pellets. When the blocking of the light beam reaching 27b) is detected, the first air cylinder 16 is driven in the reverse direction so that the insertion plug 15 is inserted into the first outlet 12 so that the first of the film forming material hopper 11 is inserted. The outlet 12 is closed. At this time, the conical surface of the conical portion 15a of the insertion plug 15 is closed against the lower end of the cylindrical first outlet 12, but between the lower end of the first outlet 12 and the conical surface of the conical portion 15a. The insertion plug 15 may be stopped at a distance smaller than the MgO pellet size. In this way, a predetermined amount of MgO pellets is accommodated in the metering hopper 21. Thereafter, the same operation is repeated, and the film formation of the MgO film on the substrate G by the film forming material supplying device is continuously performed for a long time.

In addition to the insertion plug 15 described above, the cylindrical portion (corresponding to 15b of FIG. 2) and the conical portion (corresponding to 15a of FIG. 2) having a smaller diameter are formed, and the cylindrical portion (corresponding to 15b of FIG. 2). ) The gap between the outer circumferential surface and the inner surface of the first outlet 12 may be an insertion plug (corresponding to 15 in FIG. 2) that is smaller than the MgO pellet size. In this way, since the MgO pellets do not drop the gap, the flat portion 14p of the first opening / closing arm 14 having the lower end of the first outlet 12 and the insertion plug (equivalent to 15 in FIG. 2) is fixed. MgO pellets are not sandwiched between and. In addition, a conical insertion plug having a bottom surface having the same diameter as the bottom of the insertion plug 15, or a conical insertion plug having a bottom surface having the same diameter as the bottom surface of the slightly smaller diameter insertion plug (equivalent to Fig. 2). It can be adopted.

In addition, according to the present invention, MgO is supplied from the electromagnetic vibration feeder F to the ring haas 50 in the center of the ring haas 50 arranged in parallel. As shown in FIG. 1, the board | substrate G which should be formed is conveyed at right angles to the parallel direction, and does not make apparatus height larger like these film formation material supply chambers 10 of both sides, and is lower than these. Since the electromagnetic vibrating feeder F is provided in Fig. 1, the device structure does not cause any problem, and as described with reference to Fig. 15, when the coil current value is changed to 0.4 to 0.7 A as shown in Fig. 15, for example, the MgO conveyance amount It has been experimentally confirmed that (kg / hr) changes almost linearly. In particular, the graph of FIG. 15 was measured from the average value of 10 measurements, and its certainty is quite high. If this graph is stored as a function in the storage device of the control device, the coil current value is adjusted to be equal to the supply amount from the film forming material supply chambers 10 on both sides by using this relationship, so that both sides of the ring ring 50 in the center can be adjusted. It can be supplied in the same quantity.

As mentioned above, although the Example of this invention was described, of course, this invention is not limited to these, A various deformation | transformation is possible for it based on the technical idea of this invention.

For example, in the above-mentioned embodiment, although three ring-half 50 was provided in parallel, you may make it add many more ring-hass together. In the above embodiment, three ring Haas are applied to supply the MgO to the electromagnetic ring feeder F to the center ring Haas 50, but in the case of three or more, all the Ring Haas except the ring Haas at both ends. You may make it supply to the electromagnetic vibration feeder F. FIG.

In addition, the ring hearth 50 at both ends may be supplied to the electromagnetic vibration feeder F instead of the above-mentioned rotary cylindrical feeder 41. Further, even at the most upstream end of the electromagnetic vibration feeder, MgO may be supplied from devices such as the film forming material supply chambers 10 on both sides in FIG. 1. Of course, MgO may be supplied to the electromagnetic vibrating feeder instead of the usual hopper.

20 shows a variant of the present invention, in which case the rotating cylindrical feeders 41 on both sides are omitted, and instead the electromagnetic vibrating feeders F1, F3, F4 face the outlets to the Langhas 50. Excreted. The upstream side ends of the electromagnetic vibration feeders F1 and F4 at both ends are disposed such that the downstream side ends of the same electromagnetic vibration feeders F2 and F5 are positioned with a step above. Of course, the upstream end of the electromagnetic vibration feeder F2, F3, F5 may be provided with a hopper or a film forming material supply chamber 10 as shown in Fig. 1 to accommodate MgO. In this case, the characteristics of the electromagnetic vibration feeder can be fully utilized. The height of the whole film forming apparatus can be made slightly lower than the above-described embodiment. As shown in Fig. 20, the vacuum chamber space having a step of the electromagnetic vibrating feeder and limited by the excavation connection in the right angle or the inclined direction can be effectively used.

In the width direction of the substrate to which the ring-hase is transferred, three or more are arranged side by side, even when the substrate to be formed is transferred above them, the film-forming material can be uniformly supplied to each ring-hase to form a uniform film on the substrate. You can do it.

Claims (8)

A vacuum evaporation apparatus for forming a film on a substrate to be transported upward by evaporating a film forming material supplied from a film forming material supply chamber accommodating a large amount of film forming material that withstands continuous continuous operation for a long time. Three or more Haas is provided in the width direction of the said board | substrate to be conveyed, The vacuum ring characterized by supplying the supply amount of the said film forming material to the ring Haas of the middle except the ring Haas at least at both ends by an adjustable electromagnetic vibration feeder. Film forming material supply apparatus of the vapor deposition apparatus. The apparatus of claim 1, wherein the electromagnetic vibrating feeder comprises a linear tow and an electromagnetic coil for driving the vibrating feeder. 3. An apparatus for supplying a film forming material according to claim 2, wherein a classifying means is provided in the electromagnetic vibrating feeder. 4. The film forming material supply apparatus according to claim 3, wherein a metal net is provided in the trough of the electromagnetic vibration feeder. The coil main body of the electromagnetic coil is fixed by vacuum sealing with respect to the base of the electromagnetic vibration feeder by an airtight casing, and an electric lead wire for supplying power to the electromagnetic coil is inserted into the base. And a cooling medium supply pipe and a discharge pipe of a cooling coil are led to the atmospheric side to cool the electromagnetic coil body. 3. An apparatus for supplying a film forming material according to claim 2, wherein the conveying amount of the film forming material is adjusted by changing the magnitude of the current flowing through the electromagnetic coil body. The film forming material supply apparatus according to claim 1, wherein the electromagnetic vibrating feeder comprises a plurality of electromagnetic vibrating feeder units provided with each step. A vacuum deposition apparatus for forming a film on a substrate to be transported upward by evaporating a film forming material supplied from a film forming material supply chamber accommodating a large amount of film forming material to withstand a long period of continuous operation, on a ring hearth in a film forming chamber. In the forming material supply chamber, a film forming material hopper, a metering hopper which receives a certain amount of film forming material discharged from the film forming material hopper, and a funnel hopper which receives the film forming material discharged from the metering hopper and discharges it downwards The film forming chamber is provided with a quantitative transfer means for supplying the film forming material discharged from the funnel-like hopper at a feed rate determined by the ring hearth, and three or more arranged in the width direction of the substrate to be transferred in the film forming chamber. The film forming material is supplied to the middle ring hearth except the ring hearth at least both ends of the ring hearth. A film forming material supply apparatus for a vacuum deposition apparatus, characterized in that an electromagnetic vibration feeder is used as the metering means.

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