JP3567570B2 - Vibration equipment - Google Patents

Description

[0001]
[Industrial applications]
The present invention relates to a vibration device.
[0002]
[Prior art and its problems]
FIGS. 4 and 5 show a conventional vibration device, which is indicated by (1) as a whole, and has a pair of vibrating parts feeders 2A and 2B on a substrate 4 and linear vibrations connected thereto via a gap s. Feeders 3A and 3B are arranged close to each other. Since the vibrating parts feeders 2A and 2B have the same configuration, and the linear vibrating feeders 3A and 3B also have the same configuration, only one vibrating parts feeder 2A and one linear vibrating feeder 3A will be described with reference to FIG. Then, in FIG. 4, a bowl B of the vibrating parts feeder 2A is provided, and a spiral track 5 is formed therein. A movable core 6 is formed on the bottom of the bowl B, and is connected to a lower base plate 7 by a leaf spring 8 disposed at an equal angular interval. An E-shaped electromagnet 10 around which a coil 9 is wound is fixed on the base plate 7, and faces the movable core 6 with a gap g. The electromagnetic torsional vibration drive unit includes the movable core 6, the base plate 7, the coil 9, and the electromagnet 10. The electromagnetic vibration drive unit is covered by a cylindrical cover 11.
[0003]
The vibrating parts feeder 2A configured as described above is supported on the substrate 4 by the vibration isolating rubber 3, but the discharge end 5a of the spiral track 5 formed in the bowl B is formed linearly. This is connected to the linear vibration feeder 3A with a gap s, but is also configured in a known manner, and the linear trough 15 is connected to the base 16 by a pair of front and rear inclined leaf springs 7. A movable core 18 hanging downward is fixed to the bottom of the trough 10, and an electromagnet 24 around which an electromagnetic coil 19 is wound is fixed to the base 16. Linear vibration feeder 3 A Is constructed as described above, but the whole is supported on the base 4 by the vibration-proof rubber 21. The vibrating parts feeders 2A and 2B and the linear vibrating feeders 3A and 3B are configured as described above. As shown in FIG. 5, they are arranged symmetrically and in close proximity to each other. From the troughs 15 of the feeders 3A and 3B, the components are aligned and discharged one by one onto the belt conveyor 30. The belt conveyor 30 has a belt 31 wound thereon. The belt 31 is supported on the base 4 via a gantry 32. Each linear vibration feeder 3A is mounted on the belt 31 wound therearound. A part discharged from the trough 15 of the 3B, which may be a heterogeneous part, is discharged from the trough 15 at a predetermined timing, and is discharged from the trough 15 on the upstream side by some combination device (not shown). 5 is combined with the components discharged from the trough 15 of the linear vibration feeder 3B disposed on the downstream side, and is supplied upward in FIG. 5 by the belt conveyor 31, or the number of supply is doubled for components of the same type. To be supplied to the next process.
[0004]
The vibrating parts feeder 2A and the linear vibrating feeder 3A are provided with electromagnets 10 and 20 on which electromagnetic coils 9 and 19 are wound, respectively. A variable frequency power supply 34 and 35 are connected to a commercial AC power supply (60 Hz or 50 Hz) 33, respectively. In connection with the vibrating parts feeder 2A (only one is shown and described), this output generates an alternating magnetic attraction force and the bowl B performs torsional vibration. In the linear vibrating feeder 3A, the trough 15 is in the direction indicated by the arrow. To perform a linear vibration. Components (for example, transistors) are transferred along the spiral track 5 formed in the bowl B and transferred to the trough 15 via the gap S. The parts are supplied to the next process in a predetermined posture by the trough 15 of the linear vibration feeder 3A.
[0005]
The variable frequency power supplies 34 and 35 have inverters and voltage adjusting means, but the resonance frequencies of the vibrating parts feeder 2A and the linear vibrating feeder 3A fix the weight of the movable part including the bowl B and the trough 15 and the torsional vibration driving part. The resonance frequency is determined by the total spring constant of the leaf spring 8 coupled to the base block and the bowl B, and the total spring constant of the pair of front and rear leaf springs 17. It is designed to be near half or full wave, ie 50 Hz, 60 Hz or 100 Hz, and also 120 Hz. By adjusting a knob formed on the front panel of the variable frequency power supply 34 so as to be substantially equal to the resonance frequency, the amplitude is set to a value near the maximum value. The same applies to the linear vibration feeder 3A. Therefore, each is driven at a drive frequency close to the resonance frequency, and a predetermined process is performed with the power being minimized.
[0006]
FIG. 6 shows details of the variable frequency power supply 34 (the same configuration is also used for the variable frequency power supply 35) of the conventional example. An ON / OFF switch 202, a frequency adjustment knob 203, and a voltage adjustment knob 204 are provided on the front panel. Is provided. These are connected to a frequency conversion device, for example, an inverter or a voltage regulator built in the casing, and the rotation of the frequency adjustment knob 203 and the voltage adjustment knob 204 is adjusted so that the drive current output to the output line L is adjusted. The frequency and voltage can be adjusted and are supplied to the electromagnetic coil 9. As a current, a commercial AC power supply 33 is connected. As is well known, the AC frequency of the commercial AC power supply 33 is 50 Hz or 60 Hz, and in the conventional example, the frequency is changed by full-wave rectification.
[0007]
In this conventional example, as shown in FIG. 8, a shaking nameplate I is attached to the peripheral surface of the bowl B. This has a known configuration, and scale lines 303 are printed at equal pitches on a base plate 302 made of paper, and amplitude indicating lines 304a and 304b are formed in a V-shape on the left and right of a line orthogonal to this. ing. The user views the amplitude nameplate I while adjusting the frequency adjustment knob 203 to drive the vibration parts feeder 2A near the resonance frequency. When the frequency adjustment knob 203 is rotated in a direction in which the frequency f of the driving power output from the output line L increases, that is, when the frequency f is changed in a direction indicated by an arrow b 'as shown in FIG. The width A fluctuates as shown, and f ₀ Is the resonance frequency. In this conventional example, f ₁ Set to. This does not have to be strictly a predetermined value, but may be any value close to the predetermined value. ₀ And drive frequency f ₁ The ratio is generally designated as λ, and this value is set around 1.01 (that is, 101 Hz if the commercial AC frequency is 50 Hz). The amplitude here is A ₁ However, if this amplitude is too large for the bowl B, the height of the voltage output to the output line L is reduced by adjusting the rotation of the voltage adjustment knob 204. On the other hand, if the voltage is too small, the height of the voltage is increased. Therefore, the user can also set the desired amplitude by observing the amplitude nameplate shown in FIGS. 8 and 9. That is, as shown in FIG. 9, the scale line 303 is attached so as to be parallel to the torsional vibration direction, and the amplitude display lines 304a and 304b intersecting with the scale line 303 are bands P and Q with afterimages. The amplitude of the bowl can be measured depending on which of the scale lines 303 intersects with the vertex A ′ of the overlapping portion 305 or the position between the scale lines.
[0008]
When a large number of parts are put into the bowl B, the load on the vibrating parts feeder 2A increases and the amplitude decreases. In this case, however, the amplitude nameplate I is observed by adjusting the voltage adjustment knob 204. However, it may be adjusted manually so as to obtain a desired amplitude. Even if the bowl B is experimentally unloaded or the parts are supplied, the resonance frequency f ₀ Has been found to change little. Therefore, once the drive frequency f near the resonance frequency is ₁ If you set it to, you do not need to adjust it later.
[0009]
However, the vibrating parts feeder 2A performs the function of adjusting the various components (the adjusting means is not shown) as is well known. However, if the supply state to the linear vibration feeder 3A is in the overflow state, the variable frequency power supply is used. The power supply from 34 is stopped. As a result, the vibration parts feeder 2A performs transient vibration as shown in FIG. That is, after the drive is stopped, it oscillates with a large amplitude at the resonance frequency. That is, since the power is stopped in a pulsed or stepwise manner, the vibration is made with a large amplitude by the resonance frequency component included in the Fourier series. This vibration is transmitted to the substrate 4 though the vibration damping rubber 3 is applied, and further transmitted to the trough 15 via the vibration damping rubber 21. Therefore, although not a large force, the amplitude in the steady state may be disturbed and the alignment state of the components in the trough 15 may be impaired. When the overflow state is released, the electric power is supplied again from the variable frequency power supply 34. Similarly, since the electric power is applied stepwise as shown in FIG. do. This is transmitted to the substrate 4 and transmitted to the trough 15 of the linear vibration feeder 3A in the same manner as described above. Therefore, a similar problem occurs.
[0010]
As described above, the vibrating parts feeder 2A and the linear vibrating feeder 3A are driven by the variable frequency power supplies 34 and 35 at the drive frequencies close to the designed resonance frequency, respectively. , That is, if it is a full wave, it is driven near twice this frequency. Also, in the design, since the resonance frequency is designed to be a resonance frequency close to twice the AC frequency, the driving frequencies of the vibrating parts feeder 2A and the linear vibrating feeder 3A are both full-wave or half-wave. Even if there is, the driving frequency is very close, for example, if both are full waves, the vibration parts feeder 2A is driven at 123 Hz and the linear vibration feeder 3A is driven at 119 Hz. Although this difference is 4 Hz, it is very close, so as shown in FIG. 11, as shown in FIG. 11, from the vibrating parts feeder 2A to the linear vibrating feeder 3A to the vibrating parts feeder 2A via the base 4 as described above. However, the vibration is transmitted. This causes a 4 Hz humming phenomenon. The amplitude of the bowl B of the vibrating parts feeder 2A and the trough 15 of the linear vibrating feeder 3A is small, even in a steady state. Vibration was performed at a predetermined amplitude by the adjustment, and the amplitude fluctuates in a waveform as shown in FIG. 11 due to a growling phenomenon. Therefore, the components in the bowl B of the vibrating parts feeder 2A and on the trough 15 of the linear vibrating feeder 3A become faster or slower without being transported at a uniform speed. This may result in incorrect alignment.
[0011]
In view of the above-described problems, the present applicant provides a method for controlling a vibration device that can reliably perform a predetermined operation by vibration and completely prevent a groaning operation and an audible groaning of the predetermined operation. A first vibrator connected to a commercial AC power supply or a first variable frequency power supply, and a second vibrator disposed near the first vibrator and connected to a second variable frequency power supply for the purpose of The first vibrator is driven at the first drive frequency obtained by adjusting the frequency of the commercial AC power supply or the first variable frequency power supply, and the second vibrator is driven by the second variable frequency power supply. The present invention has proposed a method for controlling a vibrating device, characterized in that a driving is performed at a second driving frequency by adjusting a frequency power supply, and the first driving frequency is sufficiently separated from the second driving frequency. Wish Hei 7-245581).
[0012]
With the above configuration, the vibration parts feeder 2A and the linear vibration feeder 3 A In FIG. 5, the vibrating parts feeders 2A and 2B are standardized and have almost the same resonance frequency. Therefore, only the groan phenomenon between the vibrating parts feeder 2A and the linear vibrating parts feeder 3A has been described above. It must be set to a certain driving frequency that is far from the resonance frequency of the vibrating parts feeder 2B. The same applies to the linear vibration feeder 3B connected thereto. In this case, one pair of the vibrating parts feeder 2A and the linear vibrating feeder 3A can be driven near the resonance frequency while minimizing the electric power. However, this one pair also has the following disadvantages. There is.
[0013]
That is, as shown by A in FIG. 12, the linear parts are transferred from the linear track 5a, which is the discharge end of the vibrating parts feeder 2A, to the trough 15 of the linear vibrating feeder 3A through the gap s. The amplitudes a and b are set substantially equal, and the component is, for example, an elongated strip-shaped component m. ₁ In this case, the signal is transferred to the trough 15 of the linear vibration feeder 3A in the same posture through the track section 5a, and is also transferred rightward by the same vibration in the same posture (m ₂ And m ₃ As described above, since the driving frequencies of the vibrating parts feeder 2A and the linear vibrating feeder 3A are set to be greatly deviated, even if the amplitude is the same, that is, a in FIG. Even if it is “≒ b”, the phase of the vibration is different when transferring from the track portion 5a to the trough 15 due to the different drive frequency, and the vibration of the track portion 5a is temporarily in a state shown by a solid line. Then, the phase of the vibration of the trough 15 is in the phase as shown by b '. That is, the track 5a is in a state of moving diagonally upward, and the trough 15 is in a state of moving diagonally downward. As a matter of course from the vibration transport theory, there is a point where the vertical component becomes 1 G or more during this vibration, but the track portion 5A and the trough 15 receive a periodic shock at these vibration frequencies. This timing is different, and in FIG. ₂ Since the part transferred by the symbol 'is a long part, the part is in a posture as shown when passing through the gap S. The timing of the front end portion, that is, the portion receiving the impact force of the trough 15 of the linear vibration feeder 3A is different from the timing of the rear end portion of the track portion 5A receiving the impact force. The back surface of this part m ″ does not always abut completely in parallel with the track 5A and the transfer surface of the trough 15, and as shown in FIG. In some cases, the front and back may be reversed by a certain angle around the central axis in the longitudinal direction, and if these forces are large, the front and back may be reversed in the vibration part feeder 2A. The part to be detected and turned upside down by appropriate sorting means and transferred from the track portion 5a to the trough 15 of the linear vibration feeder 3A is the trough 1 of the linear vibration feeder 3A. In being upside down m ₃ As indicated by ', there is a case where the paper is transferred face-down to the next step, that is, onto the belt conveyor 30. In this case, for example, if some combination is performed on the conveyor 30 by a combination device (not shown), this may not be performed or some trouble may occur in the next process of the belt conveyor 30.
[0014]
[Problems to be solved by the invention]
The present invention has been made in view of the above-described problem, and can surely maintain the posture of components supplied to the next process, and can use a pair of vibrating parts feeders having almost the same resonance frequency for standardization. It is another object of the present invention to provide a vibrating device that can be driven with a minimum power, that is, almost in a resonance state, and that can prevent a howling phenomenon.
[0015]
[Means for solving the problem]
The above object is to provide a first vibrator comprising a first vibrating parts feeder (2A) and a first linear vibrating feeder (3A) connected to an outlet of the first vibrating parts feeder (2A). When;
A second vibrating parts feeder (2B) disposed close to the first vibrating parts feeder (2A), and a second linear part connected to an outlet of the second vibrating parts feeder (2B). A second vibrator comprising a vibrating feeder (3B);
The first vibrator and the second vibrator Respectively Support via anti-vibration members (3, 3, 21, 21) First and second sub-boards (40A) (40B) Vibration equipment consisting of And ,
The first vibrating parts feeder (2A) and the first linear vibrating feeder (3A) have a first resonance frequency substantially equal to each other, and a first drive substantially equal to the first resonance frequency. A first variable frequency power supply (50) for driving said first vibrating parts feeder (2A) and said first linear vibrating feeder (3A) at a frequency;
The second vibrating parts feeder (2B) and the second linear vibrating feeder (3B) have a second resonance frequency substantially equal to each other, and a second drive substantially equal to the second resonance frequency. A second variable frequency power supply (50) for driving said second vibrating parts feeder (2B) and said second linear vibrating feeder (3B) at a frequency;
Said First and second sub-boards (40A) (40B) Are each a second vibration isolating member (42) Through Support on common substrate (41) As a result, the mass of each of the sub-boards (40A) (40B) is sufficiently large and the spring constant of the second vibration isolating member (42) is sufficiently small, and is far higher than the first and second resonance frequencies. A vibration device characterized in that a vibration isolating system having a low resonance frequency is formed.
[0016]
[Action]
The first and second vibrators are arranged close to each other, and are standardized and manufactured so as to have almost the same resonance frequency by the first and second variable frequency power sources, respectively. Even if driven at a resonance frequency, there is no groan between them. Therefore, if the desired amplitude is set in both the first vibrator and the second vibrator, the desired amplitude is obtained. transfer Each part is transferred at a speed, and the transfer speed does not increase or decrease as in the related art. In addition, the first or second Vibrating parts feeder If you repeat ON / OFF, When starting and stopping Vibrates greatly at the resonance frequency and the first or second Linear vibration feeder There was a case where the vibration of the body was disturbed and the original function was lost. Or sub-board Can be prevented by the anti-vibration mechanism.
[0017]
【Example】
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0018]
In the drawing, the same reference numerals are given to portions corresponding to the vibration device of the conventional example, and detailed description thereof will be omitted.
[0019]
In FIG. 1, the vibration device of the present embodiment is indicated by 100 as a whole, and the vibration parts feeder 2A and the linear vibration feeder 3A (the same applies to the other vibration parts feeder 2B and the linear vibration feeder 3A, so only one of them will be described. Is different from the conventional one, and is supported on a sub-substrate 40A as a mass body via anti-vibration rubbers 3 and 21. Further, this sub-substrate 40A has a sub-substrate 40A having a large mass on a common substrate 41. It is supported via a vibration isolating rubber 42 to support it. The vibration isolation system is constituted by the sub-substrate 40A and the vibration isolating rubber 42. Since the mass of the sub substrate 40A is sufficiently large, the resonance system formed by this and the vibration isolating rubber 42 has a sufficiently low resonance frequency. .
[0020]
In this embodiment, the variable frequency power supply 50 for the vibrating parts feeder 2A and the linear vibrating feeder 3A is configured as shown in FIG. 3, and the controller main body 50 includes an inverter as in the conventional example. Has a regulator or a variable resistor internally as a voltage adjusting means. The output frequency of the built-in inverter is adjusted by a knob 53, and the output line L is adjusted by a pair of knobs 54a and 54b by a pair of internal voltage adjusting means. ₁ , L ₂ The output of the vibration parts feeder 2A and the same output of the linear vibration feeder 3A are generated. Further, a commercial AC frequency power supply 51 of, for example, 50 Hz is connected to the input side.
[0021]
The embodiment of the present invention is configured as described above. Next, this operation will be described.
[0022]
When a power knob 52 as an ON / OFF switch of the controller main body 50 is pressed, a drive current having a frequency set at that time is applied to a line L. ₁ , L ₂ To the electromagnet 10 of the vibrating parts feeder 2A and the electromagnet 20 of the linear vibrating feeder 3A. As a result, the vibrating parts feeder 2A and the linear vibrating feeder 3A vibrate in the same manner as in the related art. . Although not shown, by reading the amplitude of the ball B, the resonance frequency is set to a frequency close to the resonance frequency. It should be noted that the driving frequency f slightly higher than the resonance frequency f ₁ Is set to If the amplitude at this time is not desired as the amplitude of the vibrating parts feeder 2A, the current flowing through the coil 9 of the electromagnet 10 is adjusted by adjusting one of the voltage adjusting knobs 54a, and the reading plate is adjusted to a predetermined amplitude. Read I and adjust.
[0023]
On the other hand, the trough 15 of the linear vibration feeder 3A also vibrates at the same frequency as the vibration parts feeder 2A, but in this vibration system, the number and thickness of the pair of front and rear leaf springs 17 are changed or By attaching an adjustment weight to the base 16, the frequency is adjusted to a frequency close to the resonance frequency of the vibration parts feeder 2A. Even if the resonance frequency is not strictly adjusted with the same precision as that of the vibrating parts feeder 2A, the load on the trough 15 is sufficiently small and the power consumption thereof is sufficiently small, so that there is almost no problem.
[0024]
As described above, the vibrating parts feeder 2A and the linear vibrating feeder 3A perform torsional vibration and linear vibration. a Are supplied to the trough 15 of the linear vibration feeder 3A in a desired posture through the component m. As shown in FIG. ₁ Is m toward the downstream side _Two , M _Three As shown by, the vibration is transferred on the trough 15 without changing its front and back. This is adjusted by the controller body 50 to the same drive frequency in the frequency adjustment knob 53. In addition, since the frequency is adjusted at a frequency close to the resonance frequency, the phase difference between the force and the vibration is reduced due to vibration engineering. Although it has a phase difference of π / 2, it vibrates at almost the same phase at the same frequency as shown by a and b. As a result, even if the component m is elongated as described above, the component in the aligned state in the vibrating part feeder 2A moves on the trough 15 in the same posture and is supplied to the next step.
[0025]
Furthermore, according to the present embodiment, since the vibration parts feeder 2A and the linear vibration feeder 3A are mounted on the common sub-base 40A (the other is 40B), the vibration parts feeder 2A and the linear vibration feeder 3A are transmitted from the vibration parts feeder 2A to the linear vibration feeder 3A. Vibration force is sufficiently attenuated and is driven at the same drive frequency as the linear vibration feeder 3A, so that there is no groan vibration as described in the prior art. When the components overflow, the current flowing through the coil 9 is stopped. As a result, a transient phenomenon as shown in FIG. 10 occurs. However, the larger vibration at the time of starting and stopping is sufficiently attenuated by the sub-base 40A and the vibration-proof rubber 42 and becomes substantially zero, so that the linear vibration is reduced. There is almost no effect on the trough 15 of the feeder 3A, and the components arranged thereon are supplied to the next process without disturbing the posture.
[0026]
Further, according to the present invention, each pair of the vibrating parts feeders 2A and 2B and the linear vibrating feeders 3A and 3B are mounted on the common base 41 by the sub-substrates 40A and 40B and the vibration-proof rubber 42. Therefore, the vibration parts feeders 2A and 2B are standardized and have almost the same resonance frequency, and the other vibration parts feeder 2B and the linear vibration feeder 3B are also controlled by the controller 53 as shown in FIG. The vibrations are generated in the same manner as the other vibrating parts feeder 2A and the linear vibrating feeder 3A, but the resonance frequencies are not always the same although standardized, and there is a slight difference. For example, the resonance frequency of one vibrating parts feeder 2A may be 111 Hz and the other vibrating parts feeder 2B may be 113 Hz. In such a case, the humming phenomenon has conventionally occurred due to the difference of 2 Hz. However, the sub-bases 40A, which are separated from each other, are provided on the common base 41 as masses via vibration-proof rubber 42. Since it is supported via 40B, the mass of the sub-bases 40A and 40B is sufficiently large, Anti-vibration rubber 42 Are sufficiently small, the vibrating parts feeders 2A and 2B vibrate greatly when the parts are in an overflow state independently at the time of starting and stopping at that time, as in the prior art. However, this is hardly transmitted to the other vibrating parts feeder 2B or 2A by the vibration isolating masses 40A and 40B and the vibration isolating rubber 42 set to a much lower resonance frequency. Therefore, despite the fact that the vibrating parts feeders 2A and 2B are driven in a substantially resonant state, the transfer speed increases due to the groaning phenomenon, for example, the parts on the spiral in the bowl B grow due to the groaning phenomenon. Since they are transferred at a uniform transfer speed without being reduced, they are reliably subjected to a predetermined alignment or feeding operation, and are transferred from the track portion 5a to the troughs 15 of the linear vibration feeders 3A and 3B in a predetermined posture. As described above, they are supplied one by one without disturbing their posture.
[0027]
Although the embodiments of the present invention have been described above, the present invention is, of course, not limited thereto, and various modifications can be made based on the technical idea of the present invention.
[0032]
【The invention's effect】
As described above, according to the vibrating device of the present invention, even if a standardized vibrator having a resonance frequency almost equal to that of the vibrator is arranged in close proximity to the vibrating device, the growling phenomenon that has conventionally occurred can be prevented. Since the vibration force transmitted from one vibrator to the other vibrator through the common base can be reduced to almost zero, the original operation of each vibrator is not impaired.
[Brief description of the drawings]
FIG. 1 is a side view of a vibration device according to the present invention.
FIG. 2 is a plan view of the same.
FIG. 3 is a control circuit applied to the embodiment.
FIG. 4 is a side view of a conventional vibration device.
FIG. 5 is a plan view of the same.
FIG. 6 is a circuit diagram of a controller applied to the conventional example.
FIG. 7 is a chart for explaining the same operation.
FIG. 8 is a front view of an amplitude nameplate attached to the peripheral side surface of the bowl B of the vibrating parts feeder for further explaining the same operation.
FIG. 9 is a front view showing the state of the same width nameplate when the bowl B is vibrated.
FIG. 10 is a chart for further explaining the same operation.
FIG. 11 is a chart for further explaining the same operation.
FIG. 12 is an enlarged side view showing a situation when parts are transferred from a vibrating parts feeder to a linear vibrating feeder in the conventional example, wherein A shows a correct transfer, and B shows a defective transfer. .
[Explanation of symbols]
2A Vibrating parts feeder
2B Vibrating parts feeder
3A linear vibration feeder
3B linear vibration feeder
40A Sub-board
40B Sub-board
41 substrate
42 Anti-vibration rubber

Claims (2)

A first vibrator comprising a first vibrating parts feeder and a first linear vibrating feeder connected to an outlet of the first vibrating parts feeder;
A second vibrator, comprising: a second vibrating parts feeder disposed close to the first vibrating parts feeder; and a second linear vibrating feeder connected to an outlet of the second vibrating parts feeder. When;
First, a vibrating device and a second sub-substrate supporting via vibration isolating members respectively to the first vibrator and the second vibrator,
The first vibrating parts feeder and the first linear vibrating feeder have a first resonance frequency substantially equal to each other, and at a first drive frequency substantially equal to the first resonance frequency, A first variable frequency power supply for driving the vibrating parts feeder and the first linear vibrating feeder;
The second vibrating parts feeder and the second linear vibrating feeder have a second resonance frequency substantially equal to each other, and the second vibration frequency is substantially equal to the second resonance frequency. A vibration part feeder and a second variable frequency power supply for driving the second linear vibration feeder;
The first and second sub-boards are each supported by a common board via a second anti-vibration member, and the mass of each of the sub-boards is sufficiently large and the spring constant of the second anti-vibration member is sufficient. A vibration isolator having a resonance frequency that is much smaller than the first and second resonance frequencies. The first and second variable frequency power supplies each have an inverter and first and second voltage adjusting means, and the first and second drive frequencies are respectively adjusted by the adjustment of the inverter to the first and second resonance frequencies. And the amplitudes of the first and second vibrating parts feeders and the first and second linear vibrating feeders are respectively set to desired values by the first and second voltage adjusting means. The vibration device according to claim 1 , wherein

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