KR20080011571A - 유기 발광 표시 장치 제조용 마스크 - Google Patents
유기 발광 표시 장치 제조용 마스크 Download PDFInfo
- Publication number
- KR20080011571A KR20080011571A KR1020060072073A KR20060072073A KR20080011571A KR 20080011571 A KR20080011571 A KR 20080011571A KR 1020060072073 A KR1020060072073 A KR 1020060072073A KR 20060072073 A KR20060072073 A KR 20060072073A KR 20080011571 A KR20080011571 A KR 20080011571A
- Authority
- KR
- South Korea
- Prior art keywords
- mask
- light emitting
- organic light
- emitting display
- manufacturing
- Prior art date
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (4)
- 적어도 하나 이상의 단위 마스크를 포함하고,상기 단위 마스크가그의 최외곽에 위치하는 더미 홈과,상기 더미 홈에 의해 둘러싸여 배치되는 주 개구부를 포함하는 유기 발광 표시 장치 제조용 마스크.
- 제1 항에 있어서,상기 더미 홈이 0 보다 크고 상기 주 개구부의 높이보다 작은 높이를 가지는 유기 발광 표시 장치 제조용 마스크.
- 제2 항에 있어서,상기 더미 홈의 높이가 상기 주 개구부 높이의 30 내지 80% 정도인 유기 발광 표시 장치 제조용 마스크.
- 제1 항에 있어서,스테인레스 스틸, 니켈, 니켈 합금, 니켈-코발트 합금 등의 얇은 금속판으로 이루어지는 유기 발광 표시 장치 제조용 마스크.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060072073A KR100814818B1 (ko) | 2006-07-31 | 2006-07-31 | 유기 발광 표시 장치 제조용 마스크 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060072073A KR100814818B1 (ko) | 2006-07-31 | 2006-07-31 | 유기 발광 표시 장치 제조용 마스크 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080011571A true KR20080011571A (ko) | 2008-02-05 |
KR100814818B1 KR100814818B1 (ko) | 2008-03-20 |
Family
ID=39340082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020060072073A KR100814818B1 (ko) | 2006-07-31 | 2006-07-31 | 유기 발광 표시 장치 제조용 마스크 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100814818B1 (ko) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103014618A (zh) * | 2012-12-25 | 2013-04-03 | 唐军 | 蒸镀用掩模板及其制造方法 |
US8656859B2 (en) | 2010-03-17 | 2014-02-25 | Samsung Display Co., Ltd. | Mask and mask assembly having the same |
US9666837B2 (en) | 2013-07-08 | 2017-05-30 | Samsung Display Co., Ltd | Mask for deposition |
US9847484B2 (en) | 2015-05-19 | 2017-12-19 | Samsung Display Co., Ltd. | Mask and method of manufacturing display device by using the same |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102024853B1 (ko) | 2012-09-03 | 2019-11-05 | 삼성디스플레이 주식회사 | 단위 마스크 및 마스크 조립체 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002060927A (ja) | 2000-08-10 | 2002-02-28 | Toray Ind Inc | 薄膜パターン成膜用マスク |
JP4173722B2 (ja) * | 2002-11-29 | 2008-10-29 | 三星エスディアイ株式会社 | 蒸着マスク、これを利用した有機el素子の製造方法及び有機el素子 |
JP4506214B2 (ja) | 2003-03-13 | 2010-07-21 | 東レ株式会社 | 有機電界発光装置およびその製造方法 |
KR20060129899A (ko) * | 2005-06-13 | 2006-12-18 | 엘지전자 주식회사 | 평판 표시소자용 마스크 |
-
2006
- 2006-07-31 KR KR1020060072073A patent/KR100814818B1/ko active IP Right Grant
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8656859B2 (en) | 2010-03-17 | 2014-02-25 | Samsung Display Co., Ltd. | Mask and mask assembly having the same |
CN103014618A (zh) * | 2012-12-25 | 2013-04-03 | 唐军 | 蒸镀用掩模板及其制造方法 |
US9666837B2 (en) | 2013-07-08 | 2017-05-30 | Samsung Display Co., Ltd | Mask for deposition |
US9847484B2 (en) | 2015-05-19 | 2017-12-19 | Samsung Display Co., Ltd. | Mask and method of manufacturing display device by using the same |
Also Published As
Publication number | Publication date |
---|---|
KR100814818B1 (ko) | 2008-03-20 |
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