KR20080004764A - Vacuum evaporation coater - Google Patents

Abstract

A vacuum vapor deposition system is provided to obtain a uniform coated film by a coating thickness compensation unit which includes a movable mask separated under a rotating plate at a predetermined distance. A vacuum vapor deposition system includes a coating chamber, a rotating frame(150), a rotating plate(160), and a coating thickness compensation unit(231). The rotating frame is installed and rotated at an inside of the coating chamber. The rotating plate is installed and rotated against the rotating frame. The rotating plate has a vaporized material at a lower surface thereof. The coating thickness compensation unit includes a movable mask(234). The movable mast is moved to be separated under the rotating plate. The coating thickness compensation unit is fixed at the rotating frame. The plural rotating plates are installed, and the coating thickness compensation unit is corresponded to each rotating plate. A center portion of the rotating plate is positioned at the same diameter of the rotating frame. A gap between the neighbored rotating plates is same.

Description

Vacuum Evaporation Coater

1 is a cross-sectional view schematically showing the internal structure of a conventional vacuum evaporator according to the prior art,

Figure 2 is a perspective view briefly showing a rotating plate structure of a conventional vacuum evaporator according to the prior art,

3 is a cross-sectional view schematically showing the internal structure of the vacuum evaporator according to the present invention;

Figure 4a is a perspective view of a rotary frame briefly showing a state in which the movable coating thickness correction apparatus is attached in the vacuum deposition machine according to the present invention,

4B is a front view of FIG. 4A,

Figure 5a is a cross-sectional view taken along the line A-A of Figure 4b to show the attachment means of the mobile coating thickness correction device,

FIG. 5B is a cross-sectional view taken along the line B-B in FIG. 4B.

<Explanation of symbols for the main parts of the drawings>

100: vacuum evaporator 101: vacuum evaporator

110: coating chamber 120: door

130: exhaust port 140: electron gun

150: rotating frame 160: rotating plate

170: rotary frame drive device 180: rotary frame rotary shaft

190: rotating plate rotating shaft 210: rotating plate driving device

220: lens 230: fixed coating thickness correction device

231: movable coating thickness compensator 232: attachment plate

233: support 234: mask

235: magnetic plate 236: protrusion

237: coupling groove 238: coupling plate

240: volts

The present invention relates to a vacuum evaporator having a movable coating thickness compensator. More particularly, the present invention relates to a vacuum evaporator having a coating thickness compensator including a mask fixed to a rotating frame and rotating at a predetermined distance below a rotating plate to which a deposit is attached.

Recently, there is a growing demand for high functional optical products having optimal optical characteristics for various fields of the optical system such as anti-reflective coating of camera lenses, high reflectivity coating such as mirrors for laser resonators, band pass filters or interference filters.

These highly functional optics can contain single metals such as Cr, Al, Cu, Ag, oxides such as Al ₂ O ₃ , SiO ₂ , TiO ₂ , ZnO ₂ , or compounds such as TiN, Si ₃ N ₄ , MgF ₂ . It is manufactured by coating a single layer or multiple layers on glass or a polymer substrate in thousands of nm units.

Metal coating is generally performed using a vacuum evaporator. As a result of the coating process, deposits such as lenses (hereinafter referred to as lenses) that have undergone a series of processes such as injection, cutting, and washing and drying are vacuumed. Phosphorus is mounted on a rotating plate inside the vacuum evaporator to rotate. At this time, the coating material is melt-evaporated from the electron gun inside the vacuum evaporator to be deposited on the surface of the lens to form a coating film and coating the lens.

1 is a cross-sectional view schematically showing the internal structure of a conventional vacuum evaporator according to the prior art, and FIG. 2 is a perspective view briefly showing a rotating plate structure of the conventional vacuum evaporator according to the prior art.

The vacuum evaporator 100 according to the prior art includes a coating chamber 110 having a predetermined space therein, the front of the coating chamber 110 is provided with a door 120 to be opened and closed and the vacuum forming apparatus (not shown) The exhaust port 130 is connected to the).

The bottom portion of the coating chamber 110 is equipped with an electron gun 140 for melting and evaporating the coating material, the disk-shaped rotary frame 150 is mounted on the ceiling portion of the coating chamber 110 can be rotated Is fitted. That is, the rotary frame rotating shaft 180 is provided at the center of the rotary frame 150 is connected to the rotary frame driving device 170, such as a motor and a reducer provided in the upper portion of the coating chamber 110. Rotating frame 150 is rotated around. The rotating frame 150 is rotatably mounted with a rotating plate 160 to which a plurality of lenses 220 to be coated are attached.

Four rotating plates 160 are mounted on the lower surface of the rotating frame 150 in a disk shape, the center of each of the rotating plate 160 is located on the same radius of the rotating frame 150, and adjacent rotating plates 160 are equally spaced. Mounted so as to be spaced apart. In addition, the rotating frame 150 is provided with a rotating plate driving device 210 such as a motor and a reducer at a position corresponding to the center of the rotating plate 160, and each rotating plate 160 is a rotating plate rotating shaft connected to the rotating plate driving device 210. Rotate around 190.

Therefore, the rotating plate 160 rotates by rotating about the rotating plate rotating shaft 190 while rotating about the rotating frame rotating shaft 180.

The vacuum evaporator 100 having a general structure as described above is a rotary plate 160 that melts and evaporates the coating material from the electron gun 140 mounted on the bottom portion of the coating chamber 110 at a constant speed in the ceiling portion of the coating chamber 110. The lens 220 is coated by forming a coating film having a predetermined thickness by being deposited on the lens 220 mounted on the lens).

In addition, in order to prevent the coating film thickness of the plurality of lenses 220 mounted on each of the rotating plates 160 from being unevenly formed while the rotating plate 160 rotates, the coating chamber 110 is compensated by dispersing the evaporation material. Fixed coating thickness correction device 230 is attached to the inner wall of the).

However, due to the characteristics of the coating material used for coating the lens 220, a difference in the distribution of coating thicknesses of the high refractive material and the low refractive material occurs, and furthermore, the rotating plate 160 to which the lens 220 is attached rotates and rotates at the same time. Therefore, the coating amount is different depending on the position of the lens 220 mounted on the rotating plate 160. Therefore, by the fixed coating thickness correction device 230 fixedly attached to the side of the coating chamber 110, the thickness of the coating film so that a uniform coating film is formed on each lens 220 mounted on the rotating plate 160 rotating and revolving. There was a problem that cannot be corrected.

Moreover, the fixed position of the coating thickness compensator 230 must maintain a high degree of precision, the fixed coating thickness compensator 230 according to the prior art has a length of approximately the radius of the chamber or more and the end of the coating chamber 110 It is fastened to the wall by a bolt 240 is fixed. In this configuration, if an installation error occurs in the fixed end when the fixed coating thickness compensator 230 is replaced or reattached after detaching from the coating chamber 110, the other end due to the length of the coating thickness compensator 230 The amount of movement of the phosphorus tip is large, so that the positioning of the coating thickness compensator 230 is not easy. That is, it is very difficult to fix the coating thickness correcting device 230 in the correct position, the fixing work takes a long time and the coating work process is delayed.

Accordingly, an object of the present invention is to provide a vacuum evaporator capable of obtaining a uniform coating film by including a coating thickness compensator configured to include a movable mask positioned at a predetermined distance below the rotating plate. There is this.

In order to achieve this object, the vacuum evaporator according to the present invention includes a coating chamber, a rotating frame rotatably installed in the coating chamber, a rotating plate rotatably installed with respect to the rotating frame, and a deposit attached to the lower surface thereof; It includes a coating thickness correction device including a mask to move to be spaced apart below the rotating plate.

The coating thickness correction apparatus may be fixed to the rotating frame. In this case, a plurality of the rotating plate is installed, the coating thickness correction device is preferably installed corresponding to the rotating plate, respectively. It is more preferable that each of the rotating plates has the center of the rotating plate on the same radius of the rotating frame and the same spacing between the adjacent rotating plates.

The coating thickness correcting device is preferably formed in the longitudinal direction of the mask extends in a direction perpendicular to the line connecting the rotation axis of the rotating frame and the rotating plate to each other.

The coating thickness correction device is preferably formed in the longitudinal direction of the mask extends in the radial direction of the rotating plate.

The coating thickness correction device may be fixed to the rotating frame by a magnetic force. At this time, one of the coating thickness correction device and the rotating frame is formed with a protrusion, and the other one of them is preferably formed with a coupling groove in which the protrusion is aligned.

Preferably, the rotating frame and the rotating plate rotate at different speeds.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. First of all, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are used as much as possible even if displayed on different drawings.

3 is a cross-sectional view schematically showing the internal structure of the vacuum evaporator according to the present invention, Figure 4a is a perspective view of a rotating frame briefly showing a state in which the movable coating thickness correction apparatus is attached in the vacuum evaporator according to the present invention, 4B is a front view of FIG. 4A.

As described in the related art, the vacuum evaporator 101 according to the present invention includes a coating chamber 110 having a predetermined space formed therein, and doors 120 and exhaust ports 130 formed at front and rear surfaces of the coating chamber 110, respectively. ). The rotating frame 150 is rotatably mounted on the ceiling portion of the coating chamber 110 and the electron gun 140 is provided on the bottom portion to melt-evaporate the coating material. A plurality of, for example, four rotary plates 160 are rotatably attached to the lower surface of the rotary frame 150, and the rotary frames 150 and the rotary plate 160 are respectively rotated shafts 180 and 190 as described in the related art. Since the rotary plate 160 rotates about the rotary plate rotating shaft 190 and revolves about the rotary frame rotating shaft 180. At this time, the center of the rotating plate 160 is located on the same radius of the rotating frame 150, it is installed so as to be spaced apart between the adjacent rotating plate 160. In this case, the rotary shafts 180 and 190 are driven by the rotary frame and the rotary plate driving device 170 and 210, respectively, so that the rotary frame 150 and the rotary plate 160 rotate.

Accordingly, the vacuum evaporator 101 according to the present invention is deposited and coated on the surface of the lens 220 mounted on the rotating plate 160 to which the coating material which is melt-evaporated by the electron gun provided in the bottom portion of the coating chamber 110 is rotated. This is the structure made.

At this time, in order to prevent the non-uniformity of the amount of coating according to the position of each lens 220 is attached to the lower surface of the rotary frame 150 is a movable coating thickness correction device 231 that rotates with the rotary frame 150 is attached. .

The movable coating thickness compensator 231 includes a square plate-shaped attachment plate 232 attached to the rotating frame 150, a support 233 extending downward from the attachment plate 232 with a predetermined length, and the supporter ( One end is fixed to the 233 is composed of a mask 234 positioned substantially horizontally spaced apart from the rotating plate 160 by a predetermined distance.

As shown in FIG. 4A, the movable coating thickness compensator 231 according to the present invention is attached by the same number as the number of the rotating plates 160 mounted on the rotating frame 150 to correspond to the respective rotating plates 160. In one embodiment of the present invention shown in the drawings, the rotating plate 160 and the movable coating thickness correction device 231 are provided four, but the number is not limited to three or five, otherwise.

In addition, as shown in FIG. 4B, the attachment position of the movable coating thickness compensator 231 is perpendicular to a line connecting the rotary shafts of the rotary frame 150 and the rotary plate 160 to the longitudinal direction of the mask 234. 160 is attached to be in the radial direction, it is preferable that the attachment form of each of the rotating plate 160 and the movable coating thickness compensator 231 attached to correspond to each other is preferably the same. This is because when the mask 234 is installed in this way, when the plurality of rotating plates 160 are attached to the rotating frame 150, the mask 234 may be fixed in the free space between the rotating plates 160.

The vacuum evaporator 101 having the movable coating thickness compensator 231 having the above structure is a structure that more uniformly corrects the coating thickness between the lenses 220 for coating. This is due to the difference in refractive index due to the difference in the refractive index of the nature of the coating material is melt evaporated from the electron gun 140, the difference in the coating amount of the portion close to the coating thickness correction device and the other, but the movable coating thickness correction device 231 is a rotary frame ( Since the plurality of lenses 220 mounted on the rotating plate 160 rotate with 150, the movement of approaching and approaching the coating thickness compensator 231 is repeated with a short period, so that the coating is uniform throughout. Because this is done. In particular, when the rotating frame 150 and the rotating plate 160 are rotated at different speeds, the plurality of lenses 220 mounted on the rotating plate 160 are more evenly affected by the coating thickness compensator 231, thereby making it more uniform. One coating can be made.

Compared with the fixed coating thickness compensator 231 according to the prior art shown in Figure 1, the movable coating thickness compensator 231 according to the present invention is attached to each of the rotating plate 160, each lens 220 By increasing the number of times of proximity with the movable coating thickness correction device 231, the coating thickness nonuniformity of the lens 220 in each rotating plate 160 is corrected, and the rotating plate 160 and the movable coating thickness correction device 231 Since it is installed on the rotating frame 150 to rotate about the rotating frame rotating shaft 180 in the coating chamber 110, the non-uniform thickness of the coating of the lens 220 between each rotating plate 160 is also a structure to be corrected.

FIG. 5A is a cross-sectional view taken along the line A-A of FIG. 4B to show the attachment means of the movable coating thickness compensator, and FIG. 5B is a cross-sectional view taken along the line B-B of FIG. 4B.

Mobile coating thickness correction device 231 according to an embodiment of the present invention is a structure that is attached to the rotary frame 150 by using a magnet to be fixed at the correct position during removal and replacement.

5A and 5B, a magnet plate 235 having a protrusion 236 is attached to an upper surface of the attachment plate 232 of the movable coating thickness compensator 231, and coupled to a lower surface of the rotary frame 150. The coupling plate 238 having the groove 237 is attached thereto. At this time, the magnetic plate 235 including the protrusion 236 is inserted into the coupling groove 237, so that the movable coating thickness correction device 231 is fixed to the rotary frame 150 by magnetic force.

The shape of the protrusion 236 of the magnet plate 235 is preferably formed in a hemispherical shape such that the vertical cross-sectional shape is circular and the cross-sectional area of the upper end portion is reduced, and the shape of the coupling groove 237 is the protrusion 236 and the magnet plate. The 235 is formed to correspond to the shape of the magnet plate 235 including the protrusion 236 to be inserted into the fitting.

At this time, since the protrusion 236 is formed in a wedge shape whose cross-sectional area decreases toward the upper end portion, the shape of the protrusion 236 and the coupling groove 237 may be changed if the shape of the protrusion 236 is easy to insert even if a tolerance in the dimension occurs. will be. In addition, according to an embodiment of the present invention, the protrusion 236 is configured to be formed with three protrusions 236 for highly precise positioning, but the number of the protrusions 236 is not limited thereto and may be various. There will be.

On the other hand, instead of attaching the magnet plate 235 on the upper surface of the attachment plate 232, the entire attachment plate 232 may be configured as a magnet plate having a protrusion 236, and also separate from the rotary frame 150 Without attaching the coupling plate 238, the coupling groove 237 is formed on the lower surface of the rotary frame 150 may be configured to be coupled to the protrusion 236.

As described above, the movable coating thickness compensator 231 according to the present invention is fixed to the rotary frame 150 by the combination of the protrusion 236 and the coupling groove 237 through magnetic force, thereby making it easy to remove or replace. This is a structure that can be precisely defined.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and changes without departing from the essential characteristics of the present invention.

For example, in the above-described embodiment, the rotary frame driving device 170 and the rotary plate driving device 210 for rotating the rotary frame 150 and the rotary plate 160 are installed independently, but not limited thereto. By using a single drive device can rotate the rotating frame 150 and the rotating plate 160 at the same time. At this time, in order to change the rotational speed thereof, it is preferable that the gear ratios of the gears connected to the rotating frame 150 and the rotating plate 160 are different from each other.

In addition, the coating thickness correcting device has been described as moving fixed to the rotating frame 150, it is not fixed to it can be rotated relative to the rotating plate 160 while moving along the rotating plate 160 by a separate device.

As described above, according to the present invention, the vacuum evaporator is provided with a coating thickness correction device including a mask fixed to the rotating frame and rotating at the same angular speed as the rotating frame and positioned below the rotating plate at a predetermined distance. There is an effect of uniformly correcting the coating thickness formed on the lens. In addition, by fixing the coating thickness correction device to the rotating frame through a magnet, it is easy to remove and replace, and highly precise position can be defined when reassembling, thereby reducing the fixing time of the coating thickness correction device.

Claims (9)

With coating chamber, A rotating frame rotatably installed in the coating chamber; A rotating plate rotatably installed with respect to the rotating frame and having a deposition object attached to a lower surface thereof; Coating thickness correction apparatus including a mask to move to be spaced apart below the rotating plate Vacuum evaporator comprising a. The method of claim 1, The coating thickness correction apparatus is a vacuum evaporator, characterized in that fixed to the rotating frame. The method of claim 2, The rotating plate is installed a plurality The coating thickness correction apparatus is a vacuum evaporator, characterized in that installed in correspondence with the rotating plate. The method of claim 3, wherein The rotary plate is a vacuum evaporator, characterized in that the center of the rotary plate is located on the same radius of the rotary frame and the spacing between the adjacent adjacent rotary plates are equally installed. The method of claim 3, wherein The coating thickness correction apparatus is a vacuum evaporator, characterized in that the longitudinal direction of the mask is formed extending in a direction perpendicular to the line connecting the rotation axis of the rotating frame and the rotating plate to each other. The method according to any one of claims 1 to 5, The coating thickness correction apparatus is a vacuum evaporator, characterized in that the longitudinal direction of the mask is formed extending in the radial direction of the rotating plate. The method according to any one of claims 1 to 5, The coating thickness correcting apparatus is a vacuum evaporator, characterized in that fixed to the rotating frame by a magnetic force. The method of claim 7, wherein Any one of the coating thickness correction device and the rotary frame is formed with a projection, and the other one of them is a vacuum evaporator characterized in that the coupling groove is formed is inserted into the projection is aligned. The method according to any one of claims 1 to 5, The rotary frame and the rotating plate is characterized in that the vacuum evaporator, which rotates at different speeds.

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