KR20040041992A - Lens the back coating check structure of a vacuum mult coater for lens coating - Google Patents
Lens the back coating check structure of a vacuum mult coater for lens coating Download PDFInfo
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- KR20040041992A KR20040041992A KR1020020070107A KR20020070107A KR20040041992A KR 20040041992 A KR20040041992 A KR 20040041992A KR 1020020070107 A KR1020020070107 A KR 1020020070107A KR 20020070107 A KR20020070107 A KR 20020070107A KR 20040041992 A KR20040041992 A KR 20040041992A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Abstract
Description
본 발명은 렌즈에 다층막 반사방지코팅 작업을 행하는 진공증착기에 관한 것으로, 더욱 상세하게는 진공증착기의 일정공간내에 전자총이 장착되는 코팅쳄버와, 이 코팅쳄버의 상단부분에 장착되는 코팅렌즈장착회전판에 다수의 렌즈를 장착하여 일정속도로 회전되도록 하면서 전자총으로부터 빔의 조사로 증착물질을 용융시켜 증발된 증착물질이 코팅렌즈장착회전판에 장착된 렌즈전면에 코팅되도록 함에 있어서의 특히 코팅렌즈장착회전틀에 장착된 렌즈의 뒷면으로 코팅물질이 달라붙지 않도록 하기 위한 것으로, 즉 렌즈의 뒷면에 원하지 않는 코팅을 방지함으로써, 렌즈 코팅의 불량률을 저감시키어 생산성을 향상시킬 수 있는 렌즈코팅용 진공증착기의 렌즈이면코팅방지 구조에 관한 것이다.The present invention relates to a vacuum evaporator for performing a multi-layer antireflection coating on a lens, and more particularly to a coating chamber in which an electron gun is mounted in a predetermined space of a vacuum deposition machine, and a coating lens mounting rotating plate mounted on an upper portion of the coating chamber. In particular, in the coating lens mounting rotary frame in which the deposition material is melted by the irradiation of the beam from the electron gun so that the vaporized deposition material is coated on the front surface of the lens mounted on the coating lens mounting rotating plate while mounting a plurality of lenses. This is to prevent the coating material from sticking to the back of the attached lens, that is, to prevent unwanted coating on the back of the lens, thereby reducing the defect rate of the lens coating and improving the productivity of the lens coating vacuum backside of the lens coating machine. It is about prevention structure.
일반적으로, 광픽업렌즈의 제조공정은 광픽업렌즈 사출물을 사출성형하는 사출공정을 거치게 되고, 또한 상기 사출단계에서 사출된 광픽업렌즈 사출물로부터 광픽업렌즈를 절단하는 절단공정을 거치게 된다.In general, the manufacturing process of the optical pickup lens is subjected to an injection molding process for injection molding the optical pickup lens, and also a cutting process for cutting the optical pickup lens from the optical pickup lens injection molded in the injection step.
또한 상기 절단공정을 거친 후, 세척 등의 일련의 과정을 거쳐서 광픽업렌즈를 렌즈코팅용 진공증착기의 코팅렌즈장착회전틀에 장착하며, 코팅렌즈장착회전틀이 회전토록하면서 진공증착기 내부는 진공상태를 유지하며, 전자총으로부터 전자빔을 증착물질에 조사하여 이때 발생하는 열로 용융, 증발된 코팅화합물이 진공증착기 쳄버의 내부에서 확산되어 렌즈의 표면에 증착되도록 하여, 광픽업렌즈에 코팅막이 증착되어 렌즈에 코팅이 행하여지게 되고, 코팅이 완료된 광픽업렌즈를 검사하여 불량품이 없는 렌즈만을 선별하여 스틱트레이에 적재하여 출하하게 된다.In addition, after the cutting process, the optical pickup lens is mounted on the coating lens mounting rotary frame of the vacuum coating machine for lens coating through a series of processes such as washing, while the coating lens mounting rotary frame rotates so that the inside of the vacuum deposition machine is in a vacuum state. The electron beam is irradiated onto the deposition material from the electron gun, and the coating compound, which is melted and evaporated by the heat generated at this time, is diffused inside the vacuum vapor deposition chamber and deposited on the surface of the lens. The coating is performed, and the optical pickup lens that has been coated is inspected, and only the lens having no defective product is selected and loaded on the stick tray.
상기 렌즈에 코팅을 행하는 렌즈코팅용 진공증착기(100)는 도 1에 나타낸 바와 같이 일정공간의 코팅쳄버(110)가 형성되고, 또한 이 코팅쳄버(110)의 위는 지붕은 평면으로 형성되고, 상기 코팅쳄버(110)의 앞부분에 도어(300)가 개폐되도록 되어 있으며, 후방에는 진공발생장치(도시생략)와 연결된 배기구(200)가 형성되어 있다.In the vacuum coating apparatus 100 for coating the lens, a coating chamber 110 of a predetermined space is formed as shown in FIG. 1, and the roof of the coating chamber 110 is formed in a plane. The door 300 is opened and closed at a front portion of the coating chamber 110, and an exhaust port 200 connected to a vacuum generator (not shown) is formed at a rear side thereof.
또한, 상기 코팅쳄버(110)의 바닥부분에는 구동원(도시생략)에 의하여 코팅화합물용융 증발되는 전자총(400)이 장착되고, 또한 상기 코팅쳄버 상부에는 볼록한 구면형상을한 돔형의 코팅렌즈장착회전판(120)을 올려놓을 수 있는 코팅렌즈장착회전틀(500)이 모터 및 감속기구 등의 구동원(510)과 연결되어 중심축을 중심으로 일정한 속도로 회전가능하게 장착되며, 또한 상기 코팅렌즈장착회전판(120)에는 렌즈를 장착할 수 있는 렌즈장착구멍(도시생략)이 등간격으로 뚫려져 있으며, 이 렌즈장착구멍들은 렌즈가 끼워져 맞춤되어 고정이 유지될 수 있는 구조로 되어 있다.In addition, the bottom portion of the coating chamber 110 is equipped with an electron gun 400 which is melt-evaporated coating compound by a driving source (not shown), and the dome-shaped coating lens mounting rotary plate having a convex spherical shape on the coating chamber ( The coating lens mounting rotary frame 500 that can put 120 is connected to a driving source 510 such as a motor and a deceleration mechanism so as to be rotatable at a constant speed about a central axis, and the coating lens mounting rotating plate 120 is also provided. The lens mounting holes (not shown) for attaching the lens are drilled at equal intervals, and the lens mounting holes have a structure in which the lens is fitted and fitted to maintain the fixing.
코팅쳄버(110)의 바닥부분에 장착되는 전자총(400)은 코팅화합물의 코팅입자를 증발시키어, 일정속도로 회전되는 상기 코팅렌즈장착회전틀(500)의 렌즈로 조사하게 된다.The electron gun 400 mounted on the bottom portion of the coating chamber 110 evaporates the coating particles of the coating compound and irradiates the lens of the coating lens mounting rotary frame 500 which is rotated at a constant speed.
상기 코팅렌즈장착회전판(120)은 코팅쳄버 상부 천장에 중심축을 중심으로 회전되도록 되어 있기 때문에, 코팅렌즈장착회전판(120)은 코팅쳄버 상부의 공간 내에서 코팅쳄버(110)의 벽체(111)와 떨어져야 회전이 가능하고, 또한코팅쳄버(110)내에서는 전자총(400)으로부터 조사되는 코팅입자를 전체의 렌즈에 일정한 두께의 코팅막이 이루어져야 하는 관계로 전자총(400)에서 증발된 코팅입자가 바로 코팅렌즈장착회전판(120)에 바로 조사토록 도 1 과 같이 설치하고 있다.Since the coating lens mounting rotating plate 120 is rotated about a central axis on the ceiling of the coating chamber, the coating lens mounting rotating plate 120 is formed in the space above the coating chamber and the wall 111 of the coating chamber 110. The coating particles evaporated from the electron gun 400 are coated lenses because the coating particles irradiated from the electron gun 400 must be formed on the entire lens in the coating chamber 110. The mounting rotary plate 120 is installed as shown in FIG. 1 so as to be irradiated immediately.
위와 같이 코팅쳄버(110)의 전자총(400)에서 증발된 코팅물질 입자가 코팅렌즈장착회전판(120)에 바로 조사되어 코팅렌즈장착회전판(120)에 장착된 렌즈 전면에 다층막 반사방지코팅을 행할 수 있으나, 도 1에 나타낸 바와 같이 구조상 생기는 코팅렌즈장착회전틀(500)의 원둘레면과 코팅쳄버(110)의 쳄버벽체(111)와의 틈(t) 사이로 전자총(400)으로부터 증발되어 나온 코팅입자가 직, 간접으로 튀어 올라가 코팅렌즈장착회전판(120)에 장착된 렌즈의 뒷면에 원하지 않는 코팅막이 형성되는 현상을 일으키어 렌즈의 불량품을 유발하여 결국은 생산성을 떨어뜨리는 요인이 되었다.As described above, the coating material particles evaporated from the electron gun 400 of the coating chamber 110 are directly irradiated onto the coating lens mounting rotating plate 120 to perform multilayer antireflection coating on the front surface of the lens mounted on the coating lens mounting rotating plate 120. However, as shown in FIG. 1, the coated particles evaporated from the electron gun 400 between the circumferential surface of the coated lens mounting rotary frame 500 and the chamber wall 111 of the coating chamber 110 are formed. Protruding directly or indirectly, the phenomenon that the unwanted coating film is formed on the back of the lens mounted on the coating lens mounting rotary plate 120 caused a defective product of the lens, eventually reducing the productivity.
본 발명은 상기 문제를 해소하기 위한 것으로, 진공증착기내의 상부에 중심축을 중심으로 회전되는 코팅렌즈장착회전판의 둘레면과 코팅쳄버의 쳄버벽체와의 틈을 없애기 위하여 상기 코팅렌즈장착회전판의 둘레면 바로 아래에 상기 코팅렌즈장착회전판과 코팅쳄버의 쳄버벽체와의 틈이 형성되어 있는 부분의 전체에 걸쳐서 코팅방지판을 형성하며, 이 코팅방지판은 코팅쳄버의 쳄버벽체, 도어의 벽면 및 배기구의 벽체면에 걸쳐서 평활하게 장착함으로써, 상기 코팅렌즈장착회전판의 회전에 간섭을 주지 않고 코팅렌즈장착회전판의 바로 아래의 각 벽체 및 벽면과의 틈을 최소화하는 것으로 전자총의 코팅입자가 코팅렌즈장착회전판의 이면으로의 이동을원천적으로 방지하여 렌즈의 불량률을 현저하게 줄여 생산성의 향상시키어 원가를 저렴하게 할 수 있는 렌즈코팅용 진공증착기의 렌즈이면코팅방지 구조를 제공하고자 한다.The present invention is to solve the above problems, in order to eliminate the gap between the circumferential surface of the coating lens mounting rotary plate and the chamber wall of the coating chamber rotated about the central axis in the upper portion of the vacuum deposition machine immediately A coating prevention plate is formed over the entire portion where the gap between the coating lens mounting rotating plate and the chamber wall of the coating chamber is formed, which is the chamber wall of the coating chamber, the wall of the door and the wall of the exhaust port. By smoothly mounting across the surface, the particles of the electron gun can be coated on the back surface of the coating lens mounting rotating plate to minimize the gap between each wall and the wall immediately below the coating lens mounting rotating plate without interfering with the rotation of the coating lens mounting rotating plate. By preventing the movement to the source, the defect rate of the lens is remarkably reduced and the productivity is improved by reducing the cost. If the lens of the vacuum coating machine for the lens coating can be provided to provide a coating preventing structure.
본 발명은 일정공간의 코팅쳄버의 아래에 전자총이 장착되고, 상기 코팅쳄버의 상부에 구동원에 의하여 회전가능한 코팅렌즈장착회전판이 장착되며, 상기 코팅쳄버의 전방에 도어가 개폐토록되고, 후방에 진공장치와 연결된 배기구가 설치되는 렌즈코팅용 진공증착기에 있어서, 상기 코팅렌즈장착회전판의 원둘레면 아래에 코팅방지판이 장착되어, 전자총으로부터 증발된 코팅입자가 상기 코팅렌즈장착회전판의 둘레면과 쳄버벽체 사이의 공간을 통하여 코팅렌즈장착회전판의 이면으로 통과되어 렌즈뒷면에 증착되는 것을 차단함을 기본특징으로 한다.The present invention is equipped with an electron gun under the coating chamber of a predetermined space, the coating lens mounting rotary plate rotatable by a drive source is mounted on the upper portion of the coating chamber, the door is opened and closed in front of the coating chamber, the vacuum in the rear In the vacuum coating machine for the lens coating is provided with an exhaust port connected to the device, a coating prevention plate is mounted under the circumferential surface of the coating lens mounting rotary plate, so that the coating particles evaporated from the electron gun between the circumferential surface of the coating lens mounting rotary plate and the chamber wall It passes through the back of the coating lens mounting rotating plate through the space of the block to be deposited on the back of the lens as a basic feature.
상기 코팅방지판은 상기 코팅쳄버의 쳄버벽체, 도어의 벽면 및 배기구의 벽체면에 걸쳐서 형성되어 코팅입자가 코팅렌즈장착회전틀의 이면으로 통과되어 렌즈뒷면에 증착되는 것을 차단하게 된다.The anti-coating plate is formed over the chamber wall of the coating chamber, the wall surface of the door and the wall surface of the exhaust port to block the coating particles from passing through the rear surface of the coating lens mounting rotary frame and being deposited on the rear surface of the lens.
도 1 은 종래의 일반 렌즈코팅용 진공증착기의 종단면도,1 is a longitudinal sectional view of a conventional vacuum coating machine for lens coating;
도 2 는 본 발명의 렌즈코팅용 진공증착기의 종단면도,Figure 2 is a longitudinal sectional view of the vacuum coating machine for lens coating of the present invention,
도 3 은 본 발명의 렌즈코팅용 진공증착기의 횡단면도,3 is a cross-sectional view of the vacuum coating machine for lens coating of the present invention,
도 4 는 본 발명의 렌즈코팅용 진공증착기의 도어를 개방한 상태의 요부확대 사시도.Figure 4 is an enlarged perspective view of the main portion of the lens coating vacuum evaporator of the present invention in the open state.
* 도면의 주요부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings
100 : 진공증착기 110 : 코팅쳄버100: vacuum evaporator 110: coating chamber
111 : 쳄버벽체 120 : 코팅렌즈장착회전틀111: chamber wall 120: coating lens mounting rotary frame
200 : 배기구 210 : 벽체면200: exhaust port 210: wall surface
300 : 도어 330 : 벽면300: door 330: wall
400 : 전자총 500 : 코팅렌즈장착회전틀400: electron gun 500: rotating frame for coating the lens
600 : 코팅방지판600: coating prevention plate
진공증착기(100)는 앞서 설명한 바와 같이 도 2 에 나타낸 바와 같이 일정공간의 코팅쳄버(110)가 형성되고, 또한 이 코팅쳄버(110)의 코팅쳄버 상부에 평활면을 형성시키고, 상기 코팅쳄버(110)의 앞부분에 도어(300)가 개폐되도록 되어 있으며, 후방에는 진공발생장치(도시생략)와 연결된 배기구(200)가 형성되어 있다.As described above, the vacuum evaporator 100 has a coating chamber 110 having a predetermined space as shown in FIG. 2, and also forms a smooth surface on the coating chamber upper portion of the coating chamber 110, and the coating chamber ( The door 300 is opened and closed at the front of the 110, and an exhaust port 200 connected to the vacuum generator (not shown) is formed at the rear.
상기 도어(300)는 도 3에 나타낸 바와 같이 도어힌지(310)를 중심으로 회전가능하게 장착되어 있고, 상기 도어힌지(310)의 대향하는 쪽에는 도어핸들(320)이장착되어 도어를 파지하여 열 수 있고, 또한 도어(300)를 잠글 수 있도록 되어 있다.The door 300 is rotatably mounted around the door hinge 310 as shown in FIG. 3, and a door handle 320 is mounted on an opposite side of the door hinge 310 to grip the door. The door 300 can be opened and the door 300 can be locked.
또한, 상기 코팅쳄버(110)의 바닥부분에는 구동원(도시생략)의 조작 의하여 코팅화합물을 진공상태에서 용융하여 증발시켜 진공증착을 행하는 증발원인 전자총(400)이 장착되고, 또한 코팅쳄버(110) 위쪽으로 볼록한 일정한 구면을 가지며, 코팅렌즈장착회전판(120)을 지지하는 코팅렌즈장착회전틀(500)이 모터 및 감속기구 등의 구동원(510)과 연결되어 중심축을 중심으로 일정한 속도로 회전가능하게 장착되며, 또한 상기 코팅렌즈장착회전판(120)에는 렌즈를 장착할 수 있는 렌즈장착구멍(도시생략)이 등간격으로 뚫려져 있으며, 이 렌즈장착구멍들은 렌즈가 끼워맞춤되어 고정이 유지될 수 있는 구조로 되어 있다.In addition, the bottom portion of the coating chamber 110 is equipped with an electron gun 400, which is an evaporation source for melting and evaporating the coating compound in a vacuum state and performing vacuum deposition by operating a driving source (not shown), and also coating chamber 110. The coating lens mounting rotary frame 500 supporting the coated lens mounting rotary plate 120 is connected to a driving source 510 such as a motor and a deceleration mechanism so as to be rotated at a constant speed about the central axis. In addition, the coating lens mounting rotary plate 120 is provided with a lens mounting hole (not shown) for mounting the lens at equal intervals, and the lens mounting holes are fitted to the lens can be maintained fixed It is structured.
코팅쳄버(110)의 바닥부분에 장착되는 전자총(400)은 진공중에서 코팅화합물의 코팅입자를 증발(발생)시키어, 일정속도로 회전되는 상기 코팅렌즈장착회전판(120)에 장착된 렌즈표면으로 조사되어 코팅막을 형성하게 된다.The electron gun 400 mounted on the bottom of the coating chamber 110 evaporates (generates) the coating particles of the coating compound in a vacuum, and irradiates the lens surface mounted on the coating lens mounting rotating plate 120 rotated at a constant speed. To form a coating film.
상기 코팅렌즈장착회전판(120)은 코팅쳄버 상부의 천장에 중심축을 중심으로 회전되도록 되어 있는 코팅렌즈장착회전틀(500)에 지지되어 있고, 코팅렌즈장착회전판(120)은 코팅쳄버(110)의 벽체(111)와 떨어져야 회전하도록 설치되며, 또한 코팅쳄버(110)내에서는 전자총(400)으로부터 조사되는 코팅입자를 전체의 렌즈에 일정한 두께로 코팅막이 이루어지도록 한다.The coating lens mounting rotary plate 120 is supported on the coating lens mounting rotary frame 500 is to be rotated about the central axis on the ceiling of the coating chamber upper, the coating lens mounting rotary plate 120 of the coating chamber 110 It is installed so as to rotate away from the wall 111, and also in the coating chamber 110, the coating film irradiated from the electron gun 400 to the coating film to a certain thickness of the entire lens.
특히, 본 발명은 도 2 및 도 4에 나타낸 바와 같이 상기코팅렌즈장착회전판(120)둘레면의 아래에 코팅방지판(600)이 장착되어, 전자총(400)으로부터 증발되는 코팅입자가 상기 코팅렌즈장착회전틀(500)의 둘레면과 코팅쳄버의 쳄버벽체(111) 사이 공간을 통과하여 코팅렌즈장착회전틀(500)의 이면으로 돌아서 코팅렌즈장착회전판(120)에 장착된 렌즈의 뒷면에 코팅막이 증착되는 것을 방지하도록 하고 있다.In particular, the present invention is a coating preventing plate 600 is mounted below the surface of the coating lens mounting rotary plate 120, as shown in Figure 2 and 4, the coating particles evaporated from the electron gun 400 the coating lens The coating film on the back of the lens mounted on the coating lens mounting rotating plate 120 by passing through the space between the circumferential surface of the mounting rotating frame 500 and the chamber wall 111 of the coating chamber to the back of the coating lens mounting rotating frame 500. This is to prevent deposition.
상기 코팅방지판(600)은 얇은 스테인레스판으로써, 도 3에 나타낸 바와 같이 상기 코팅쳄버(110)의 쳄버벽체(111), 도어(300)의 벽면(330) 및 배기구(200)의 벽체면(210)에 걸쳐서 형성되어 마치 코팅쳄버(110)를 상하로 구획하듯이 형성되어 있으며, 이 코팅방지판(600)은 코팅렌즈장착회전판(120)의 둘레면 끝단과 상기 코팅쳄버(110)와의 틈을 없애므로써, 전자총(400)의 코팅입자가 코팅렌즈장착회전틀(500)의 이면으로 통과하는 것을 저지하게 된다.The coating prevention plate 600 is a thin stainless plate, as shown in FIG. 3, the chamber wall 111 of the coating chamber 110, the wall surface 330 of the door 300, and the wall surface of the exhaust port 200 ( It is formed over 210 as if partitioning the coating chamber 110 up and down, the coating prevention plate 600 is a gap between the end of the circumferential surface of the coating lens mounting rotary plate 120 and the coating chamber 110 By eliminating the, the coating particles of the electron gun 400 is prevented from passing through the back of the coating lens mounting rotary frame 500.
또한 상기 코팅방지판(600)은 도 4에 나타낸 바와 같이 상기 코팅쳄버(110)의 쳄버벽체(111)에 볼트너트 등의 고정수단(도시생략)에 의하여 고정되는 띠형상의 고정브라켓(610)에 지지브라켓(620)들이 등간격으로 지지되어 코팅방지판(600)을 떠 받쳐 고정하고 있다.In addition, the coating preventing plate 600 is a belt-shaped fixing bracket 610 that is fixed to the chamber wall 111 of the coating chamber 110 by fixing means (not shown) such as bolt nuts as shown in FIG. The support brackets 620 are supported at equal intervals to hold and fix the coating preventing plate 600.
그리고, 상기 도어(300)의 벽면(330) 및 배기구의 벽체면(210)에도 도시하지 않았으나, 코팅방지판(600)을 지지하여 고정할 수 있는 브라켓 등의 고정수단에 의하여 고정되도록 한다.In addition, although not shown in the wall surface 330 of the door 300 and the wall surface 210 of the exhaust port, it is to be fixed by a fixing means such as a bracket for supporting and fixing the anti-coating plate 600.
이상과 같이 본 발명은 진공증착기내에 중심축을 중심으로 회전되는 코팅렌즈장착회전판의 둘레면과 코팅쳄버의 쳄버벽체와의 틈을 없애기 위하여 상기 코팅렌즈장착회전판의 둘레면 바로 아래에 상기 돔과 코팅쳄버의 쳄버벽체와의 틈이 형성되어 있는 부분의 전체에 걸쳐서 코팅방지판을 형성하며, 이 코팅방지판은 코팅쳄버의 쳄버벽체, 도어의 벽면 및 배기구의 벽체면에 걸쳐서 평활하게 장착함으로써, 상기 코팅렌즈장착회전판의 회전에 간섭을 주지 않고 코팅렌즈장착회전판의 바로 아래의 각 벽체 및 벽면과의 틈을 최소화하는 것으로 전자총으로부터 증발되어 온 코팅입자가 코팅렌즈장착회전틀의 이면으로의 이동을 원천적으로 방지하여 렌즈의 불량률을 현저하게 줄여 생산성의 향상시키어 원가를 저렴하게 할 수 있다.As described above, the present invention provides the dome and the coating chamber directly below the circumferential surface of the coating lens mounting swivel plate to eliminate the gap between the circumferential surface of the coating lens mounting swivel plate and the chamber wall of the coating chamber rotated about the central axis in the vacuum deposition machine. The coating prevention plate is formed over the whole part where the gap with the chamber wall of the chamber is formed, and this coating prevention plate is smoothly mounted over the chamber wall of the coating chamber, the wall surface of the door and the wall surface of the exhaust port. By minimizing the gap between the wall and the wall directly below the coating lens mounting plate without interfering with the rotation of the lens mounting plate, the coating particles evaporated from the electron gun are moved to the back side of the coating lens mounting frame. It is possible to reduce the defect rate of the lens significantly, thereby improving productivity and reducing the cost.
Claims (2)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020020070107A KR20040041992A (en) | 2002-11-12 | 2002-11-12 | Lens the back coating check structure of a vacuum mult coater for lens coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020020070107A KR20040041992A (en) | 2002-11-12 | 2002-11-12 | Lens the back coating check structure of a vacuum mult coater for lens coating |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100794672B1 (en) * | 2006-07-06 | 2008-01-14 | (주)인텍 | Vacuum Evaporation Coater |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR910003143A (en) * | 1989-07-01 | 1991-02-27 | 베.-데. 밧텐슈라그, 에. 투테 | Lens holders for use in high vacuum deposition systems or sputtering systems |
| KR930019573A (en) * | 1992-03-06 | 1993-10-18 | 이희신 | Lens coating device |
| KR20020052424A (en) * | 2000-12-26 | 2002-07-04 | 이종만 | Coating apparatus for pick-up lenses and coating method for the same |
| KR200304460Y1 (en) * | 2002-11-12 | 2003-02-15 | 이희신 | Variable coating thickness revise device of a vacuum mult coater for lens coating |
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2002
- 2002-11-12 KR KR1020020070107A patent/KR20040041992A/en active IP Right Grant
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR910003143A (en) * | 1989-07-01 | 1991-02-27 | 베.-데. 밧텐슈라그, 에. 투테 | Lens holders for use in high vacuum deposition systems or sputtering systems |
| KR930019573A (en) * | 1992-03-06 | 1993-10-18 | 이희신 | Lens coating device |
| KR20020052424A (en) * | 2000-12-26 | 2002-07-04 | 이종만 | Coating apparatus for pick-up lenses and coating method for the same |
| KR200304460Y1 (en) * | 2002-11-12 | 2003-02-15 | 이희신 | Variable coating thickness revise device of a vacuum mult coater for lens coating |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100794672B1 (en) * | 2006-07-06 | 2008-01-14 | (주)인텍 | Vacuum Evaporation Coater |
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