KR20080001800A - Cassette transporting system and transporting method using the same - Google Patents

Abstract

A cassette transfer system and a transfer method using the same are provided to enable self-transfer of cassettes between a loader and an unloader without a help of a separate transfer unit such as a CTV(Cassette Transfer Vehicle), thereby carrying the cassettes quicker and corrector and minimizing the possibilities of generating a foreign substance. A cassette transfer system comprises process equipment(52), a loader(62), an unloader(72), a cassette moving path(80), and an up/down unit(100). The process equipment, the loader, and the unloader are disposed on the same plane. The cassette moving path has a first vertical space(84a), a second vertical space(84b), and a horizontal space(86). The first vertical space is toward a vertical down direction from the loader. The second vertical space is toward a vertical down direction from the unloader. The horizontal space connects the first and the second vertical spaces in a lower height than the process equipment. The up/down unit is mounted within the cassette moving path and carries cassettes(C) between the loader and the unloader by ascent and descent in the first and second vertical spaces and traveling along the horizontal space.

Description

Cassette transporting system and transporting method using the same

1 is a schematic diagram of a typical cassette transfer system.

Figure 2 is a schematic diagram of a cassette transport system according to the present invention.

Figure 3 is a side view of the up-down unit of the cassette transfer system according to the present invention.

Figure 4 is a plan perspective view for explaining a method of driving the hatch of the cassette transfer system according to the present invention.

<Description of the symbols for the main parts of the drawings>

52: process equipment 62: loader

62,64: first and second loader 72: unloader

74, 76: first and second unloader 80: cassette movement path

82: first vertical space 82a, 82b: first and second loader vertical space

84: second vertical space

84a, 84b: first and second unloader vertical space

86: horizontal space 100: up-down unit

102: driving unit 106,108: post frame

110: up-down plate 120: lift means

122: driving means 124: lift frame

130: hatch

The present invention relates to a cassette transfer system and a cassette transfer method using the same, and more particularly, a separate transfer means such as a cassette transfer vehicle (CTV) in transferring a cassette between a loader and an unloader. The present invention relates to a cassette transfer system capable of self-transfer without the help of a cassette and a cassette transfer method using the same.

In line with the recent full-scale informatization era, the display field for displaying a large amount of data by electric signal information as a visual image has also been rapidly developed. In response, a flat panel display device having advantages of light weight, thinness, and low power consumption has been developed. Panel Display Device (FPD), Liquid Crystal Display (LCD), Plasma Display Panel (PDP), Field Emission Display (FED), Electroluminescent Display ( Electro luminescence Display device (ELD) has been introduced to quickly replace the existing cathode ray tube (CRT).

These common flat panel display devices have a common display element as a plate display panel for direct image realization, which represents a form in which two substrates are bonded side by side with an inherent layer of fluorescent or polarizing material interposed therebetween. Recently, an active matrix type, in which pixels, which are basic units of image expression, are arranged in a matrix on a flat panel display panel, and each is individually controlled by a switching element such as a thin film transistor (TFT), has been developed. It is widely used because of its excellent video reproducibility and color reproduction.

On the other hand, most of the manufacturing process of the general flat panel display device is carried out for the substrate, for example, a thin film deposition (deposition) to form a thin film of a predetermined material on the surface of the substrate, photolithography (exposed photo lithography), By removing the exposed portions of the thin film, etching is patterned several times, followed by numerous processes such as cleaning, bonding, and cutting. For each of these processes, the substrates are transferred to dedicated process equipment for the process, in particular a cassette containing a plurality of substrates to reduce the time and effort required to transport and store the individual substrates. In the current manufacturing process of flat panel display devices, it is used as a minimum unit for transporting and storing substrates.

In addition, a cassette transfer vehicle (CTV) is used as a separate unmanned transfer means for transporting such a cassette, and a kind of self-driving force by a rail guided vehicle (RGV) or a controller that moves along a rail as a kind thereof is used. For example, AGV (Automatic Guided Vehicle) that moves the designated path is typical. In addition, LGV (Laser Guided Vehicle) by laser navigation system is used.

1 is a schematic view showing a cassette transport mechanism in a general flat panel display manufacturing apparatus, wherein a loader c and a loader 4 as a seating point of a cassette c before and after process equipment 2 performing a predetermined process are respectively loaded. ) Is provided, one side of them passes the CTV movement path (L). Accordingly, when the actual cassette C containing the substrate is loaded into the loader 4 by the CTV 8 traveling on the CTV movement path L, the substrate therein is transferred to the process equipment 2, and the loader The empty cassette C of (4) is again conveyed to the unloader 6 by the CTV 8, and the processed substrate in the process equipment 2 is transferred to the empty cassette C of the unloader 6; It is stored. The seal cassette C of the unloader 6 is thus conveyed by the CTV 8 to the loader of another process equipment.

As a result, the cassette (C) transfer between the loader (4) and the unloader (6) in the general cassette transfer mechanism is dependent on the CTV (8), which leads to various problems. That is, unnecessary time is wasted when the CTV 8 does not arrive properly, and in particular, when the empty cassette C of the loader 4 cannot be delivered to the unloader 6 in a timely manner, the substrate is accumulated in the process equipment. This leads to a decrease in yield and process delay. In addition, the transfer of the cassette (C) between the loader (4) and the unloader (6) and the CTV (8) is a separate robot with a large movement, etc., the CTV (8) and also the loader (4) and unloader (6) In addition, it shows a long copper wire between each process equipment (2), the possibility of foreign particles such as particles (particles) is a great threat to product reliability.

Accordingly, the present invention has been made to solve the above problems, and provides a cassette transfer system and a cassette transfer method using the same, which is capable of self-transfer without the aid of a separate transfer means such as CTV in the cassette transfer between the loader and the unloader. Its purpose is to present a specific way to transport cassettes more quickly and accurately and to minimize the possibility of foreign substances such as particles.

The present invention to achieve the above object, the present invention is the process equipment and loader and unloader disposed on the same plane; A cassette moving path including a first vertical space facing vertically downward from the loader, a second vertical space pointing vertically downward from the unloader, and a horizontal space connecting the first and second vertical spaces at a lower level than the process equipment Wow; It is provided in the cassette moving path, and provides a cassette transport system including an up-down unit for moving the cassette in the first and second vertical space and traveling along the horizontal space to carry the cassette between the loader and the unloader. .

At this time, the up-down unit, the driving unit which runs along the floor of the first and second vertical space and horizontal space; A pair of post frames erected on opposite sides of the traveling unit; And an up-down plate which is lifted horizontally across the pair of post frames and on which the cassette is seated.

In addition, the rails provided along the bottom of the first and second vertical space and horizontal space; Further comprising a plurality of wheels mounted to the lower end of the running portion and in close contact with the rail, the up-down unit is characterized in that it runs along the rail, the elevating from the upper surface of the down plate and the elevating the cassette horizontally It characterized in that it further comprises a plurality of lifting means, which are respectively attached to the boundary between the loader and the first vertical portion and the boundary between the unloader and the second vertical portion, as long as the distance between them is opened or closed It further comprises a hatch of the jaw.

In addition, the pair of hatches are each sliding horizontally, when the distance between the pair of hatches as close as possible, between the smaller than the width of the cassette between and secures a space for the plurality of lift means can pass through And when the spacing between the jaws hatches as far as possible, the spacing therebetween is larger than the cassette width. In this case, the height of the pair of post frames is lower than the horizontal space, the maximum height of the up-down plate is lower than the hatch of each pair, the maximum height of the plurality of lift means is characterized in that higher than the hatch of each pair .

In addition, the loader and the unloader is characterized in that each provided with at least two along the longitudinal direction of the horizontal portion.

In addition, the present invention provides a cassette transfer method using a cassette transfer system according to the above description, comprising: placing a cassette in which a substrate is stored in the loader; Bringing the substrate in the cassette into the process equipment; After the up-down unit descends while supporting the cassette in the first vertical space, moves along the horizontal space, and then ascends in the second vertical space to position the cassette in the unloader; It provides a cassette transfer method comprising the step of receiving a substrate in the processing equipment in the cassette.

In addition, a cassette transfer method using a cassette transfer system according to the above description, the method comprising the steps of closing the hatch of the loader and seating the cassette containing the substrate; The up-down plate and the lift means of the up-down unit located in the first vertical space are respectively lifted up to support the cassette; The hatch of the loader is opened and the updown plate and the lift means of the updown unit are respectively descended to the maximum; The up-down unit traveling along the horizontal space to reach the second vertical space, and the hatch of the unloader position is opened; The up-down plate and the lift means are respectively lifted up; The hatch of the unloader is closed, and the up-down plate and the lift means are respectively lowered to provide a cassette transport method comprising the step of seating the cassette on the hatch of the unloader.

In addition, the present invention is a cassette transfer method for transferring the cassette between the loader and the unloader placed on the same horizontal plane as the process equipment, vertically lowering the cassette of the loader and moving vertically downward of the unloader at a lower height than the process equipment It provides a cassette transfer method that is then vertically raised by the unloader.

Hereinafter, the present invention will be described in more detail with reference to the drawings.

Attached 2 is a schematic diagram showing a cassette transfer system according to the present invention, which can identify the process equipment 52 and the loader 62 and the unloader 72 disposed on the same plane.

The dual process equipment 52 is any equipment that performs a flat panel display manufacturing process, and may be any kind of processing by carrying out a substrate when the substrate in the cassette C is loaded. The loader 62 and the unloader 72 are portions in which the cassette C is seated, and the seal cassette C in which the substrate is accommodated is mounted in the loader 62 to process the substrate therein. To the unloader 72, and the empty cassette C is seated in the unloader 72 to store the substrate to be taken out from the process equipment 52, and the process equipment 52 and the loader ( Between the 62 and the unloader 72 may be provided with a separate substrate transfer means, such as a robot.

On the other hand, in the above-described process, when all the substrates in the seal cassette (C) seated on the loader 62 is brought into the process equipment 52 becomes a blank cassette (C), which is transported to the unloader 72, In particular, the present invention proceeds its own transportation without the aid of a separate transport means such as CTV for carrying the cassette (C) between the loader 62 and the unloader 72, in particular the movement path of the cassette (C) Characterized in that the height is located below the loader 62 and the unloader 72, including the process equipment (52).

To this end, the first vertical space 82 facing vertically downward from the loader 62, the second vertical space 84 facing vertically downward from the unloader 72, and at a height lower than the process equipment 52 A horizontal space 86 is provided which connects the first and second vertical spaces 82 and 84, and these first and second vertical spaces 82 and 84 and the horizontal space 86 are connected to the cassette movement path 80. Are utilized. In addition, the cassette movement path 80 is mounted with the up-down unit 100 which is moved along the longitudinal direction of the lifting and lifting in the first and second vertical space (82,84) and the horizontal space 86, thereby loading The cassette C of the 62 is transferred from the first vertical space 82 to the up-down unit 100 and then via the horizontal space 86 to the unloader 72 through the second vertical space 84. Delivered.

Each will be described in detail with reference to the separately mentioned drawings and FIG. 2.

First, Figure 3 is a side view showing a preferred aspect of the cassette transfer system according to the present invention.

As can be seen, the cassette transport system according to the present invention is applicable to the case where the quantity of the loader 62 and the unloader 72 is two or more, for example, two loader 62 and the unloader 72 each. The case provided is shown. For convenience, when divided into the first and second loaders 64 and 66 and the first and second unloaders 74 and 76, preferably the first and second loaders 64 and 66 are process equipment 52. Two first vertical spaces 82 (arranged in a line with the first and second unloaders 74 and 76, and vertically downward from the first and second loaders 74 and 76, respectively) For convenience, it is divided into first and second loader vertical spaces 82a and 82b) and two second vertical spaces 84 (downwardly convenience) from the first and second unloaders 84a and 84b, respectively. The first and second unloader vertical spaces 84a and 84b) are all connected by one horizontal space 86.

Therefore, the up-down unit 100 that runs along the horizontal space 86 and is capable of lifting in the first and second loader vertical spaces 82a and 82b and the first and second unloader vertical spaces 84a and 84b is used. Thus, the cassettes C of the first and / or second loaders 82a and 82b can be freely transported to the first and / or second unloaders 84a and 84b. In this case, the first and second loader vertical spaces 82a and 82b, the first and second unloader vertical spaces 84a and 84b and the horizontal space 86 do not necessarily exist in a straight line, but the up-down unit 100 In order to shorten the driving line of the and transport the stable cassette (C) is advantageously arranged in a straight line as shown in the figure.

The rails 90 may be laid along the bottom of the cassette movement path 80 so as to reduce vibrations and impacts due to poor flatness, which may be all vertical spaces 82 and 84 and horizontal spaces. 86, that is, the first and second loader vertical spaces 82a and 82b, the first and second unloader vertical spaces 84a and 84b, and the entire floor of the horizontal space 86.

In addition, the first and second loaders 64 and 66, the first and second loader vertical spaces 82a and 82b, and the first and second unloaders 74 and 76 and the first and second unloader vertical spaces ( At the boundary of 84a and 84b, a set of hatches 130 are opened or closed in a manner that the distance between them is closer or closer to each other, each of which is an up-down unit with the role of a support end directly supporting the cassette C. It serves as a gate through which the cassette C passes during vertical movement of the cassette C by 100. Therefore, when the hatch 130 of each pair is opened at maximum distance, the gap therebetween is larger than the width of the cassette C, and when the hatch 130 of each pair is closed as close as possible, the gap therebetween is Although smaller than the width, in particular in the latter case each hatch 130 is not closed and provides a predetermined space.

This is described in more detail in the relevant section.

Next, FIG. 4 is a view illustrating an up-down unit mounted in a cassette movement path. In FIG. 3, a side surface of the cassette C in the moving direction of the cassette C and a front surface thereof are shown in FIG. 4.

As shown, the up-down unit 100 of the substrate transfer system according to the present invention includes a traveling part 102 seated at the bottom of the cassette movement path 80 and a pair of post frames 106 and 108 standing upright from both sides thereof facing each other. And an up-down plate 110 that is horizontally elevated along each longitudinal direction while connecting the pair of post frames 106 and 108. A plurality of wheels 104 closely attached to the rail 90 attached along the bottom of the cassette moving path 80 is mounted at the lower end of the dual driving part 102, and the cassette is seated on the up-down plate 110. .

In other words, the up-down unit 100 moves the cassette C vertically by moving up and down of the up-down plate 110 together with the traveling by the driving unit 102. The driving unit 102 includes a plurality of wheels 104. A power source such as a motor capable of rotating the motor, and power transmission means such as a speed reducer and a timing belt. In addition, a chain circulating through a servo motor or the like may be built in the inner longitudinal direction of each of the pair of post frames 106 and 108, and the up-down plate 110 may include each of these post frames 106 and 108. ) It is mounted to connect the circulation chain inside and it is lifted up and down while keeping level.

On the other hand, since the up-down unit 100 of the substrate transfer system according to the present invention runs along the horizontal space 86, the maximum height of the pair of post frames 106 and 108 is limited to a lower range than the horizontal space 86, and consequently up-down The maximum lift height of the plate 110 is also limited to the horizontal space 86 or less. However, the up-down plate 110 receives the cassette C seated on the hatch 130 of the first and second loaders 64 and 66, and the hatch 130 of the first and second unloaders 74 and 76. In order to load and unload the cassette C, the cassette C needs to be raised to a point higher than the hatch 130.

Accordingly, the up-down plate 110 is provided with a separate lift means 120, which is separately lifted from the upper surface of the up-down plate 110 via a driving means 122 (see FIG. 3, same as below) such as a cylinder. A plurality of lift bars 124 may be included. At this time, the number of the lift bar 124 is preferably made of at least four or more to support the stable cassette (C), the interval between them between the hatch 130 closed within a range smaller than the width of the cassette (C) It can be secured as long as it can pass through a certain space of.

In this regard, referring together to FIGS. 2-4 and FIG. 5, which shows a planar structure for an arbitrary hatch 130, the first and second loaders 64 and 66 and the first and second loaders 64 and 66 are reserved as previously described. A set of hatches 130 provided at the boundary between the first and second loader vertical spaces 82a and 82b and the first and second unloader vertical spaces 74 and 76 and the first and second unloader vertical spaces 84a and 84b. In case of closing as close as possible, a certain space (T) needs to be secured between them. At this time, the predetermined space is for the plurality of lift bars 124 to pass through.

That is, in the cassette transport system according to the present invention, the cassette C is seated on the closed hatch 130 of the first or second loaders 64 and 66, and the up and down of the up-down unit 100 located vertically downward thereof. After the plate 110 is maximized, the plurality of lift bars 124 are separately raised from the upper surface thereof to raise and support the cassette C on the hatch 130 to a certain degree, and then the hatch 130 is fully opened. The up-down plate 110 and the lift bar 124 are respectively lowered so that the overall height of the up-down unit 100 is adjusted to be lower than the horizontal space 86. On the other hand, the first or second unloaders 74 and 76 mount the cassette C on the respective hatches 130 in the opposite manner.

In addition, as shown, the hatch 130 of each jaw can be opened and closed in a sliding manner, for this purpose, a separate opening and closing means 132 such as a cylinder is connected to the back of each jaw hatch 130, each jaw hatch (130) The cassette bracket 134 is mounted on the upper surface of the cassette C to stably engage with the bottom shape of the cassette C.

2 to 5 mentioned above summarizes the cassette transfer method of the cassette transfer system according to the present invention.

First, a seal cassette C in which a substrate for processing is housed is placed in either or both of the first and second loaders 64 and 66. At this time, the hatch 130 of the loader (64, 66) is a gap between the smaller than the width of the cassette (C), so that the cassette (C) can be stably seated, and at the same time secure a certain space therebetween. .

Subsequently, the substrate accommodated in the cassettes C of the first and / or second loaders 64 and 66 is brought into the process equipment 52 so that any one of the cassettes C of the second loader 66 is empty. Becomes Accordingly, the up-down unit 100 arrives in the second loader vertical spaces 82a and 82b, and the plurality of lift bars 124 are hatched through separate lifts of the lift means 120 following the rise of the up-down plate 110. The cassette C is raised and supported by a certain amount through the constant space T of the 130.

Next, the hatch 130 is wider than the width of the cassette C, and the height of the entire up-down unit 110 is lower than the height of the horizontal space 86 through the separate lowering of the up-down plate 110 and the lift means 124. . Next, while traveling along the rail 90 by the running unit 102 of the up-down unit 100 and passes through the horizontal space 86, the first unloader 72, optionally the first of the first unloader 74 Arrive at the unloader vertical space 84a.

At this time, the hatch 130 of the first unloader vertical space 84a is wider than the width of the cassette C, and the up-down plate 110 and the lift means 124 of the up-down unit 100 are respectively raised to the maximum. (C) is raised higher than the hatch (130). Subsequently, when the hatch 130 is closed to provide a predetermined space T therebetween, the up-down plate 110 and the lift means 124 of the up-down unit 100 are lowered, respectively, and the cassette C is placed on the hatch 130. Put it up.

Accordingly, the processed substrate in the process equipment 52 is carried in the empty cassette C of the second unloader 74.

The present invention as described above provides a cassette transfer system capable of self transfer without the aid of a separate transfer means such as a CTV in cassette transfer between the loader and the unloader and a cassette transfer method using the same. It can be, and there is an effect that can minimize the possibility of foreign substances, such as particles.

Claims (12)

Process equipment and loaders and unloaders arranged on the same plane; A cassette moving path including a first vertical space facing vertically downward from the loader, a second vertical space pointing vertically downward from the unloader, and a horizontal space connecting the first and second vertical spaces at a lower level than the process equipment Wow; An up-down unit mounted in the cassette moving path and capable of moving up and down in the first and second vertical spaces and traveling along the horizontal space to carry the cassette between the loader and the unloader; Cassette transfer system comprising a. The method of claim 1, The up-down unit, A driving unit which runs along the first and second vertical spaces and the horizontal space floor; A pair of post frames erected on opposite sides of the traveling unit; An up-down plate that is horizontally elevated across the pair of postframes and on which the cassette is seated Cassette transfer system comprising a. The method of claim 2, Rails installed along the first and second vertical and horizontal spaces; A plurality of wheels mounted at a lower end of the driving part and closely rotating along the rail; The substrate transport system further comprises, the up-down unit is driven along the rail. The method of claim 2, And a plurality of lift means for lifting up and down the cassette by lifting up and down from an upper surface of the up-down plate. The method of claim 4, wherein And a set of hatches which are respectively attached to the boundary of the loader and the first vertical portion and to the boundary of the unloader and the second vertical portion, the hatches being opened or closed at a distance or close to each other. The method of claim 5, And said pair of hatches each slide horizontally. The method of claim 5, When the spacing between the jaw hatches is as close as possible, there is a space smaller than the width of the cassette between them and a space through which the plurality of lift means can pass, and when the spacing between the jaw hatches is as far apart as possible A cassette transfer system, wherein an interval is greater than the cassette width. The method according to claim 5 or 6, The height of the pair of postframes is lower than the horizontal space, the maximum lift height of the up-down plate is lower than the hatch of each pair, the maximum lift height of the plurality of lift means is higher than the hatch of each pair. The method of claim 1, And at least two loaders and unloaders, respectively, along the lengthwise direction of the horizontal portion. A cassette transfer method using a cassette transfer system according to any one of claims 1 to 7, wherein Placing a cassette containing a substrate in the loader; Bringing the substrate in the cassette into the process equipment; After the up-down unit descends while supporting the cassette in the first vertical space, moves along the horizontal space, and then ascends in the second vertical space to position the cassette in the unloader; The substrate in the processing equipment is accommodated in the cassette Cassette transfer method comprising a. A cassette transfer method using a cassette transfer system according to any one of claims 7 to 7, 9, Closing the hatch of the loader and seating a cassette containing a substrate; The up-down plate and the lift means of the up-down unit located in the first vertical space are respectively lifted up to support the cassette; The hatch of the loader is opened and the updown plate and the lift means of the updown unit are respectively descended to the maximum; Moving the up-down unit along the horizontal space to reach the second vertical space, and opening the hatch of the unloader position; The up-down plate and the lift means are respectively lifted up; The hatch of the unloader is closed, and the up-down plate and the lift means are respectively lowered to seat the cassette on the hatch of the unloader. Cassette transfer method comprising a. A cassette transfer method for transferring a cassette between a loader and an unloader placed on the same horizontal plane as a process equipment, And vertically lowering the cassette of the loader and then moving vertically downward of the unloader at a height lower than that of the processing equipment, and then vertically raising the cassette.

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