KR20070090346A - Rf shielded bellows - Google Patents

Abstract

A flexible coupler for a vacuum chamber is provided to maintain a constant contact pressure of a spring finger without forming layer by maintaining a tensile force on the spring finger by using a spring and to have small internal resistance in the path of electrical beam. A ring-like first flange(110) is connected to a first vacuum chamber. A ring-like first flange(120) is connected to a second vacuum chamber. A bellows(130) elastically couples the first flange with the second flange. A vacuum state is generated in the bellows. One end of a pipe-like inner tube(140) is coupled with an inner side of the first flange in a length direction. First ends of connecting bars(111), which are elongated in a length direction from the first flange to an interface between the inner tube and the bellows, are fixed on the first flange. A ring-like guide(112) is fixed at second ends of the connecting bars. A ring-like clamp(155) is arranged to move an outer periphery of the inner tube in a length direction along the connecting bar. The clamp is elastically supported to be apart from the guide. One end of a spring finger(150) is fixed on the second flange, while the other end thereof is coupled with a lower end of the clamp. The spring finger is slidingly contacted with a lower portion of the guide and an end portion of the inner tube by the clamp.

Description

Vacuum Box Coupling Device {RF Shielded Bellows}

1 and 2 is a partial cross-sectional perspective view showing the elongation and retraction of the conventional sliding guide and the spring finger joint, respectively,

Figure 3 and Figure 4 is a perspective view showing the elongation and contraction state of each other conventional pressing plate type joint device,

5 is an enlarged cross-sectional view showing a pressing plate portion shown in FIG.

Figure 6 is a partial cross-sectional perspective view showing a tension spring finger type coupling device according to a first embodiment of the present invention,

Figure 7 is a partial cross-sectional perspective view showing a connection state of the spring finger and the inner tube of the flexible joint shown in Figure 6,

8 is an exploded perspective view of a part of the tension spring finger coupling device shown in FIG.

9 and 10 are partial cross-sectional views for explaining the contracted and stretched state operation of the flexible joint shown in FIG. 6, respectively.

11 is a partial cross-sectional perspective view showing a tension spring finger type coupling device according to a second embodiment of the present invention,

12 is a perspective view showing the inner tube shown in FIG.

13 is a main portion perspective view showing a connection state of the spring finger and the inner tube shown in FIG.

14 and 15 are partial cross-sectional views for explaining the extension and contraction operation of the flexible coupling device shown in FIG.

<Description of the symbols for the main parts of the drawings>

100, 200 ... Flanges 100a ... clearance

110, 210 ... First flange 111, 211 ... Connecting rod

111a ... Connecting rod insertion hole 112 ... Guide

113, 213 ... Spring 120, 220 ... 2nd Flange

130, 230 ... corrugated pipe 140, 240 ... inner pipe

150, 250 ... spring finger 155, 255 ... clamp

212 ... spring supporter 245a, 245b ... fitting hole

The present invention relates to a vacuum box coupling device, and more particularly, to provide tension to a spring finger, to prevent the electrical breakdown by maintaining a constant contact pressure without generating a stair, and the flow of surface current The present invention relates to a vacuum box coupling device having improved structure.

Generally, a vacuum box is a device required in a linear accelerator, a storage ring, etc. of a large radiation accelerator facility, each of which ranges from several meters to several tens of meters. The passage is formed so that electron bunches can flow at almost the speed of light, and these vacuum boxes are connected by RF shielded bellows after a plurality of them are installed at predetermined positions.

At this time, the flexible coupling device must maintain the cross-sectional shape of the electron passage formed in each vacuum box as much as possible even during operation, and the surface current can flow smoothly without electrical disconnection between each other.

This is because when the cross-sectional shape of the electron path changes rapidly or excessive stairs are generated, the internal resistance of the electron beam path increases, which causes problems in operation. In addition, the surface current induced on the inner surface of the vacuum chamber by the high-speed movement of the electron masses. If (Image Current) is not manufactured to flow smoothly, a local spark may occur, causing damage to the functional part, or parts of the contact moving part may stick together by cold welding, which may cause serious damage. to be.

In addition, the flexible coupling device needs to heat the vacuum box in order to obtain ultra-high vacuum inside the vacuum box during installation and maintenance work, in which the flexible coupling device absorbs the expansion of the vacuum box by heating. Or it must be manufactured to protect the various devices mounted externally.

As the flexible coupling device, a sliding guide and a spring finger type coupling device as shown in FIGS. 1 and 2 have been conventionally employed.

First, referring to FIG. 1, a conventional sliding guide and a spring finger joint 10 have a sliding guide 14 and a spring finger 15 that slides inside the corrugated pipe 13. It is the simplest and most commonly used form made to absorb the change in the length of the vacuum box (not shown) connected to the left and right by installing the.

The conventional sliding guide and the spring finger joint 10 is positioned between one vacuum box and another adjacent vacuum box, and serves to connect them in a vacuum state, respectively. The first flange 11 and the first flange 11 is connected to the corrugated pipe 13 with the second flange 12 connected to the other vacuum box on the other side.

Here, the inside of the corrugated pipe 13 connecting the first flange 11 and the second flange 12, one end of the pipe-shaped sliding guide coupled to the inner peripheral surface of the first flange 11 in a horizontal direction ( 14 and a spring finger having a pipe shape, one end of which is inserted into the other end of the sliding guide 14 to make sliding line contact, and the other end of which is fixed to the inner circumferential surface of the second flange 12 in a horizontal direction. 15) is installed.

At this time, a plurality of slits 15a are formed at one end of the spring finger 15 in a lengthwise direction and are divided into a plurality of finger units 15b, and a protrusion (at the front end of each finger unit 15b). 15c) is formed.

Here, the finger unit 15b of the spring finger 15 is provided with an elastic force to bend outwards, so that the semi-circular protrusion 15c and the sliding guide of the spring finger 15 are elastically lined. The contact force can be improved, and the joint device 10 can smoothly move by extension and contraction.

Here, the sliding guide 14 and the spring finger 15 is in the form of the surface contact by inserting the spring finger 15 into the interior of the sliding guide 14, on the contrary, to the outer peripheral surface of the sliding guide 14 After contacting the spring finger 15, a metal spring may be wound around the contact portion to improve the contact force between the sliding guide 14 and the spring finger 15.

FIG. 2 is a view showing a state in which the joint apparatus shown in FIG. 1 is in a contraction state, that is, FIG. 1 is a state in a stretched state, and FIG. 2 is in a contracted state.

At this time, the shrinkage of the coupling device 10, the spring finger 15 is moved deep into the inner side of the sliding guide 14 with almost no change in the cross section is shortened the overall horizontal length.

By the way, in the conventional sliding guide 14 and the spring finger 15 type joint device 10, since the semi-circular protrusion 15c protrudes at each distal end of the spring finger 15, the stairway is unnecessary on the inner surface. Is formed, which causes a problem that the electron beam passage internal resistance becomes large and the surface current flows partially.

In the prior art, since the spring finger 15 is composed of a plurality of finger units 15b to which elastic force is applied, it is difficult to accurately maintain the contact force of the spring finger 15, and the sliding guide 14 Even if a slight eccentric occurs between the spring finger 15 and the spring, the change in contact pressure is large. have.

In addition, the conventional sliding guide 14 and the spring finger 15 of the joint device 10, the electrical breakdown is likely to occur due to bending deformation or vibration during operation, as well as the operation failure, spark generation due to electrical disconnection This may cause mechanical damage.

In addition, the conventional sliding guide 14 and the spring finger 15 of the joint device is easy to be deformed to the internal parts of the device during transportation and installation, a plurality of finger units 15b in the corner can be entangled with each other, There is a problem that cannot have a complicated cross-sectional shape other than a circle or an ellipse.

Accordingly, a pressure plate type joint apparatus 20 of a type which is partially improved to solve the problem of forming a stair of the conventional sliding guide 14 and the joint apparatus 10 of the spring finger system 15 is illustrated in FIG. 3 and FIG. Figure 4 is a cross-sectional perspective view showing the state at the time of elongation and contraction of the pressing plate type joint apparatus, Figure 5 is an enlarged cross-sectional view showing the pressing plate portion shown in FIG.

Referring to FIG. 3, the conventional pressing plate type joint apparatus 20 is formed by connecting a first flange 21 and a second flange 22 with a corrugated pipe 23 interposed therebetween, and the corrugated pipe 23. The inner tube 24 is coupled to the first flange 21 and the protrusion 24a is formed at the distal end thereof, and one end of the inner tube 24 has one end on the outer circumferential side thereof. A plurality of slits 26a are formed at the other end thereof, and the spring fingers 25 made of a plurality of finger units 25b are in line contact with the protrusions 24a of the inner tube 24.

At this time, the pressing plate 26 for transmitting a constant force is provided on the outer surface of the spring finger 25 with respect to the spring finger 25 for sliding.

Looking in detail with respect to the pressing plate 26 that serves as the pressing role, referring to Figure 4 showing when the pressing plate type joint device 20 is contracted, the pressing plate 26 is a plurality of one end of each It is coupled to the first flange 21, the other end is formed to be inclined in the overall direction to elastically press the outer peripheral side of the plurality of finger units 25b in line contact with the protrusion (24a) of the inner tube (24). It is.

FIG. 5 is a view showing the pressing plate 26 pressing the outer surface of the spring finger 25 in sliding contact with the inner tube 24. Referring to the drawings, the pressing plate 26 is in contact with the outer circumferential side of the inner tube 24. The spring finger 25 may slide left and right between the pressing plate 26 and the inner tube 24 while being elastically linearly contacted with the inner tube 24 by the pressing plate 26.

Accordingly, in the pressing plate type coupling device 20, the finger unit 25b of the spring finger 25 contacts the protrusion 24a of the inner tube 24 with a constant force, so that the surface current can flow smoothly. .

However, the pressing plate type coupling device 20, like the sliding guide and the spring finger type coupling device 10, a step of an unnecessary shape is formed on the inner surface at the protrusion 24a portion of the inner tube 20, As a result, the surface current flows longer, and electrical breakage is easily caused by bending motion or vibration.

In addition, the pressing plate type joint device 20 is difficult to manufacture and install the pressing plate 26, it is very difficult to maintain a constant pressure, there is a problem that the manufacturing cost increases, and besides, other than the circle or ellipse In the case of producing a complicated cross-sectional shape, there is a problem in that the pressing plate 26 and the finger unit 25b of the spring finger 25 are entangled.

Therefore, the present invention has been devised in view of the problems of the prior art, and the present invention has a constant internal shape and does not generate unnecessary stairs on the inner surface, so that the internal resistance of the electron beam passage is very low, and the surface current flows smoothly. To provide a flexible joint device.

Another object of the present invention is to form a gap at the tip of the inner tube and to impart a tensile force to the spring finger passing through the gap, thereby preventing electrical disconnection during vibration and extension and contraction during operation, the contact pressure of the spring finger It is to provide a vacuum box flexible coupling device that can keep a constant.

Another object of the present invention is that both ends of the spring finger is connected to the clamp and the flange to maintain a constant internal shape, and also easy to manufacture a vacuum joint flexible device that is easy to manufacture in complex cross-sectional shapes other than circles or ellipses To provide.

Other objects and advantages of the invention will be described below and will be appreciated by the embodiments of the invention. In addition, the objects and advantages of the present invention can be realized by the means and combinations indicated in the claims.

In order to achieve the above object, according to a first aspect of the present invention, the vacuum box coupling device of the present invention, the annular first flange connected to one side of the vacuum box; An annular second flange connected to another adjacent vacuum box; A corrugated pipe positioned between the first flange and the second flange and elastically connecting the first flange and the second flange and having a plurality of corrugations formed therein to maintain the interior in a vacuum state; An inner tube located inside the corrugated pipe and having one end coupled to the inner side of the first flange in a pipe shape; A plurality of connecting rods having one end fixed to the first flange and the other end extending longitudinally between the inner tube and the corrugated pipe from the first flange; An annular guide fixed to the other end of the plurality of connecting rods and having a lower end forming a gap between the inner end of the inner tube; An annular clamp movably installed in the longitudinal direction along the connecting rod and being elastically supported in a direction away from the guide; One end is fixed to the second flange, the other end is connected to the lower end of the clamp through the gap, by the elastically supported clamp includes a spring finger which is in sliding contact with the lower end of the guide and the front end of the inner tube. It is characterized by.

Here, it may further include an elastic member inserted into the connecting rod between the clamp and the guide to provide a tension force to the spring finger.

In addition, the surface corresponding to the gap is preferably curved surface so that the spring finger is in surface contact with the lower end of the guide and the front end of the inner tube, respectively.

In addition, the inner diameter of the guide is characterized by forming an inner diameter substantially the same as the inner diameter of the inner tube.

In addition, the spring finger may be formed in the longitudinal direction of the plurality of slits.

According to a second aspect of the present invention, a vacuum box coupling device of the present invention includes: an annular first flange connected to one side vacuum box; An annular second flange connected to another adjacent vacuum box; A corrugated pipe positioned between the first flange and the second flange and elastically connecting the first flange and the second flange and having a plurality of corrugations formed therein to maintain the interior in a vacuum state; An inner tube positioned inside the corrugated pipe, one end of which is coupled in a longitudinal direction to the inside of the first flange in a pipe shape, and a plurality of fitting holes formed at the other end thereof; A plurality of connecting rods having one end fixed to the first flange and the other end extending longitudinally between the inner tube and the corrugated pipe from the first flange; An annular clamp movably installed in the longitudinal direction along the connecting rod and being elastically supported in a direction away from the guide; One end is fixed to the second flange for sliding contact with the inner tube, the other end is characterized in that it comprises a spring finger passing through the insertion hole.

Here, the plurality of fitting holes are preferably formed with a plurality of first fitting holes and a plurality of second fitting holes alternately.

The apparatus may further include an elastic member inserted into a connecting rod between the clamp and a spring supporter formed at the other end of the connecting rod to provide a tension force to the spring finger.

In addition, the spring finger may be formed in the longitudinal direction of the plurality of slits.

The flexible joint device according to the present invention, by forming a gap at the tip of the inner tube and imparting a tensile force to the spring finger passing through the gap, it is possible to prevent electrical disconnection during vibration and stretching and contraction during operation, The contact pressure of the spring finger can be kept constant.

In addition, the vacuum-coupled coupling device according to the present invention has a constant internal shape and does not generate unnecessary stairways on the inner surface, so that the internal resistance of the electron beam passage is very low, and the surface current flows smoothly.

(Example)

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

6 is a cross-sectional perspective view showing a tension spring finger type flexible device according to a first embodiment of the present invention, Figure 7 is a cross-sectional perspective view showing a connection state of the spring finger and the inner tube of the flexible device shown in FIG. 8 is a cross-sectional exploded perspective view showing the tension spring finger type coupling device shown in FIG.

9 and 10 are cross-sectional views showing when the flexible joint shown in FIG. 6 is contracted and extended in the longitudinal direction.

First, referring to FIG. 6, the flexible joint apparatus 100 according to the first embodiment of the present invention includes a first flange 110 connected to one side vacuum box (not shown) and another adjacent vacuum box (not shown). ) And a corrugated pipe 130 connecting the second flange 120 and the first flange 110 and the second flange 120.

In addition, the flexible joint apparatus 100 according to the first embodiment of the present invention includes an inner tube 140 having one end connected to the first flange 110 and one end of the first flange inside the corrugated pipe 130. Coupled to the 110 and provided with a plurality of annular guide 112 at the other end, for example, four connecting rods 111, one end is in sliding contact with the inner tube 140, the second flange 120 It is connected to the other end is provided with a spring finger 150, which is fixed to the other end coupled to the annular clamp 155 is axially coupled to the connecting rod 111.

In addition, a spring 113 is inserted into the outer circumferential surface of the connecting rod 111 between the clamp 155 and the guide 112.

Here, the spring 113 is applied to the force to widen the distance between the clamp 155 and the guide 112 by pushing the clamp 155 located on the outside of the inner tube 140 to the left, this force is the total ductility It acts as a force to reduce the length of the device 100.

Accordingly, the flexible coupling device 100 may maintain the spring finger 150 coupled between the clamp 155 and the second flange 120 in tension, as well as the flexible coupling device 100. It can absorb and absorb the shock caused by the contraction and expansion of the longitudinal direction.

The first flange 110 and the second flange 120 are each positioned between the adjacent vacuum box in a substantially annular shape, one end of the first flange 110 is flanged to one end of the one side vacuum box, the One end of the second flange 120 is flange-coupled with another adjacent vacuum box.

The other end of the first flange 110 and the other end of the second flange 120 are fixed to both sides of the corrugated pipe 130, respectively, and the corrugated pipe 130 has a plurality of corrugations formed in a circumferential direction. As a result, the distance between the first flange 110 and the second flange 120 may be absorbed as the length deviation increases and decreases.

The inner tube 140 is located inside the corrugated tube 130, and the outer peripheral side surface of one end is substantially fixed to the inner side of the first flange 110 in a pipe shape.

The connecting rod 111 is located in the longitudinal direction between the inner tube 140 and the corrugated pipe 130, one end is fixed to the first flange 110 in the longitudinal direction, the other end one end of the spring 113 In contact with the portion can prevent the separation of the spring 113, and the annular guide 112 that can provide a contact pressure to the spring finger 150 is integrally provided.

The spring finger 150 is a thin metal material as shown in FIG. 8 and is substantially pipe-shaped to correspond to the inner tube 140, and has a length at an intermediate portion in order to flexibly respond to a change in length of the flexible coupling device 100. A plurality of slits 150a are formed in the direction.

In addition, one end of the spring finger 150 is fixed in the longitudinal direction to the second flange 120 and the other end is fixed to the clamp 155, the spring finger 150 is shown in Figure 9 The outer peripheral side surface of the inner tube 140 passes through the gap 100a between the tip portion of the inner tube 140 and the guide 112.

At this time, the clamp 155 is an annular shape formed in a predetermined width in the center direction, the inner circumferential surface is fixed to the outer peripheral side surface of the other end of the spring finger 150, and the width direction side in Figure 8 and 9 As shown in the drawing, a plurality of connecting rod insertion holes 111a into which the connecting rod 111 may be inserted are formed.

In addition, the clamp 155 is movable in the longitudinal direction along the connecting rod 111 and the widthwise one side surface is fixed to the other end of the spring 113 to receive the elastic force of the spring 113, It is possible to elastically pull the spring finger 150 to maintain the spring finger 150 in a taut state.

On the other hand, a gap 100a is formed between the inner peripheral surface direction end of the guide 112 and the other end of the inner tube 140, the inner peripheral surface direction end of the guide 112 and the other end of the inner tube 140, respectively It is made of a curved surface so that the spring finger 150 is in surface contact with the inner circumferential end of the guide 112 and the outer circumferential surface of the inner tube 140, respectively, when passing between the gap (100a).

In addition, since the lower end of the guide 112 is set to have an inner diameter that is approximately equal to the inner diameter of the inner tube 140, the inner shape is constant, and the inner circumferential end of the guide 112 and the other end of the inner tube 140. Since the spring finger 150 passes through the gap 110a therebetween and is connected to the inner tube 140, a substantial stairway is not generated. As a result, the internal resistance of the electron beam passage is very low, and the surface current flows smoothly.

9 and 10 will be described the operation of the vacuum box coupling device according to the first embodiment of the present invention.

9 is a view showing a free state before the installation of the flexible coupling device 100, the flexible coupling device 100 has a force to extend in the direction of the first flange 110, the compression spring 113 Indicates a state in which the overall length is shortened.

FIG. 10 is a view illustrating a case in which the flexible coupling device 100 of the present invention is installed by pulling the first and second flanges 110 and 120 to be connected to respective vacuum boxes, and compared with FIG. 9. As the length of the 100 is increased, it can be seen that the compressive force acts on the spring 113 to narrow the distance between the clamp 155 and the guide 112.

In this case, when the distance between the first flange 110 and the second flange 120 of the flexible coupling device 100 increases, the clamp 155 is attached to the compression spring 113 by the first flange 110. The restoring force to push in the direction is acting, so that the spring finger 150 is always kept taut by pushing the clamp 155 to which the one end of the spring finger 150 is coupled in the direction of the first flange 110. do.

In addition, the tension force is applied to the spring finger 150 by the restoring force of the spring 113, the spring finger 150 passing between the gap (100a) formed between the guide 112 and the inner tube 140. ), The inner circumferential side is forced to form a linear state, and the outer circumferential side is the contact pressure which presses the inner circumferential side of the guide 112 in proportion to the restoring force of the spring 113, respectively. It can act to maintain the tension.

Accordingly, the flexible coupling device 100 according to the first embodiment of the present invention can adjust the contact pressure of the spring finger 150 by adjusting the force of the spring 113, the spring finger 150 and It is easy to prevent electrical disconnection of the inner tube 140.

11 is a cross-sectional perspective view showing a tension spring finger type coupling device according to a second embodiment of the present invention, FIG. 12 is a perspective view showing an inner tube shown in FIG. 11, and 13 is a spring finger and an inner tube shown in FIG. Is a perspective view showing the connection state of the.

First, referring to FIG. 11, the tension spring finger type coupling device 200 according to the second embodiment of the present invention firstly includes the flexible coupling device 100 according to the first embodiment of the present invention shown in FIG. 6. The spring finger 150 has a structure of the same principle as the structure to pull in the longitudinal direction to maintain the tensile force.

The flexible coupling device 200 according to the second embodiment of the present invention includes a first and second flanges 210 and 220 connected to a vacuum box, the first flange 210 and the second flange ( It includes a corrugated pipe 230 is located between the 220 to connect.

An inner tube 240 connected to the first flange 210 and one end for sliding contact with the inner tube 240 are fixedly coupled to the second flange 220 inside the corrugated pipe 230, and the other end is connected to the connecting rod. A spring finger 250 coupled to the clamp 255 coupled to the shaft 211 is provided, and the outer circumferential side of the spring finger 250 elastically responds to a change in length of the flexible coupling device 200. In addition, a plurality of slits 250a are formed in the longitudinal direction to be easily inserted into the fitting holes 245a and 245b (see FIG. 12).

In addition, the flexible coupling device 200 of the second embodiment, one end is coupled to the first flange 210 and the other end is provided with a spring stopper 212, for example, four connecting rods 211 and the A spring 213 is fitted between the clamp 255 and the spring stopper 212 to the connecting rod 211.

Here, the flexible coupling device 200 according to the second embodiment of the present invention is compared with the flexible coupling device 100 of the first embodiment shown in Figure 6, the first and second flanges 210, 220, corrugated pipe ( 230, the spring 213, the spring finger 250 and the clamp 255 are similar in structure so that a detailed description thereof will be omitted.

In the flexible joint device 200 according to the second embodiment of the present invention, the inner tube 240 is located inside the corrugated pipe 230, and has an outer circumferential side at one end thereof in a substantially pipe shape with the first flange 210. It is fixed to the inner side in the longitudinal direction.

At this time, the other end of the inner tube 240 is formed with a plurality of first fitting holes 245a of a predetermined length spaced apart from each other in the circumferential direction, as shown in Figure 12, in the first fitting holes 245a The second fitting hole 245b of a predetermined length is formed to be shifted in the longitudinal direction with respect to the longitudinal direction.

Here, in the first fitting hole 245a and the second fitting hole 245b, as shown in FIG. 13, the other end of the slit 250a of the spring finger 250 is inside the inner tube 240. The other ends of the spring fingers 250 which are respectively inserted in the outward direction and passed through the first fitting hole 245a and the second fitting hole 245b and extend in an outer circumferential direction of the inner tube 240. Coupling is fixed at (255).

Accordingly, the flexible coupling device 200 according to the second embodiment of the present invention contacts the spring finger 250 with the inner tube 240 as in the flexible coupling device 100 of the first embodiment. The guide 112 for setting the pressure becomes unnecessary.

Thus, in the flexible coupling device 200 according to the second embodiment of the present invention, one end of the connecting rod 211 is fixedly coupled to the inner circumferential side of the first flange 210 in the longitudinal direction, and the other end of the spring 213. It is preferable that the spring stopper 212 is integrally provided with one end of the c) to prevent the spring 213 from coming off.

14 and 15 will be described the operation of the vacuum box coupling device according to a second embodiment of the present invention.

FIG. 14 shows a free state before the flexible coupling device 200 is installed between the vacuum chambers, and the flexible coupling device 200 has a force to extend in the direction of the first flange 210. FIG. In 213, the overall length is shortened.

FIG. 15 is a view illustrating a case in which the first and second flanges 210 and 220 of the flexible coupling device 200 are installed by being connected to respective vacuum boxes, and the flexible coupling device 200 may include the first flange 210. The distance between the clamp 255 and the spring stopper 212 is shortened by the said spring 213 which has the force which tries to stretch in the () direction.

At this time, the flexible coupling device 200 provides a force to pull the spring finger 250, the restoring force of the spring 213 is coupled to the clamp 255 in the direction of the first flange (210) The spring finger 250 may be kept taut.

In the flexible coupling device 200 according to the second embodiment of the present invention configured as described above, the spring fingers 250 are inserted after the first and second fitting holes 245a and 245b are formed in the inner tube 240. In order to provide tension to the spring finger 250, a spring 213 is installed between the clamp 255 and the spring supporter 212, the inner tube 240 in the longitudinal direction change due to shrinkage and tension during operation Since unnecessary stairway does not occur in the connection portion between the spring finger 250 and the spring finger 250, the internal resistance of the electron beam passage is very small, and thus the surface current flows smoothly.

In addition, the flexible coupling device 200 of the present invention can maintain a constant internal shape, by maintaining a tension on the spring finger 250 through the spring 213, the spring stopper 212 and the spring finger ( Electric disconnection due to bending or vibration generated during eccentricity or operation between the 250 is reduced, and the contact pressure of the spring finger 250 can be kept constant.

The vacuum box coupling device of the present invention made as described above provides the following effects.

First, since unnecessary stairway does not occur, electrical disconnection can be prevented, and the internal resistance of the electron beam passage is very small, thereby facilitating the flow of surface current.

Second, by maintaining the tension on the spring finger through the spring, it is possible to maintain a constant contact pressure of the spring finger during the eccentricity between the guide and the spring finger or the tension and contraction of the flexible joint.

Third, the internal shape can be kept constant, and the production is easy even with a complicated cross-sectional shape other than a circle or an ellipse.

Fourth, since the spring finger is brought into contact with the tension, the spring finger can be easily contacted with the spring finger, thereby significantly reducing breakage due to bending or vibration during operation.

Fifth, it is easy to transport and install.

As mentioned above, although this invention was demonstrated by the limited embodiment and drawing, this invention is not limited by this, The person of ordinary skill in the art to which this invention belongs, Of course, various modifications and variations are possible within the scope of the claims to be described.

Claims (9)

An annular first flange connected to one side vacuum box; An annular second flange connected to another adjacent vacuum box; A corrugated pipe positioned between the first flange and the second flange and elastically connecting the first flange and the second flange and having a plurality of corrugations formed therein to maintain the interior in a vacuum state; An inner tube located inside the corrugated pipe and having one end coupled to the inner side of the first flange in a pipe shape; A plurality of connecting rods having one end fixed to the first flange and the other end extending longitudinally between the inner tube and the corrugated pipe from the first flange; An annular guide fixed to the other end of the plurality of connecting rods and having a lower end forming a gap between the inner end of the inner tube; An annular clamp movably installed in the longitudinal direction along the connecting rod and being elastically supported in a direction away from the guide; One end is fixed to the second flange, the other end is connected to the lower end of the clamp through the gap, by the elastically supported clamp includes a spring finger which is in sliding contact with the lower end of the guide and the front end of the inner tube. Vacuum box ductility device, characterized in that. The apparatus of claim 1, further comprising an elastic member inserted into the connecting rod between the clamp and the guide to provide a tension force to the spring finger. The apparatus according to claim 1, wherein the surface corresponding to the gap is curved so that the spring fingers make surface contact with the lower end of the guide and the tip of the inner tube, respectively. The apparatus of claim 1, wherein the inner diameter of the guide forms an inner diameter substantially the same as the inner diameter of the inner tube. The apparatus of claim 1, wherein the spring fingers have a plurality of slits formed therebetween in the longitudinal direction. An annular first flange connected to one side vacuum box; An annular second flange connected to another adjacent vacuum box; A corrugated pipe positioned between the first flange and the second flange and elastically connecting the first flange and the second flange and having a plurality of corrugations formed therein to maintain the interior in a vacuum state; An inner tube positioned inside the corrugated pipe, one end of which is coupled in a longitudinal direction to the inside of the first flange in a pipe shape, and a plurality of fitting holes formed at the other end thereof; A plurality of connecting rods having one end fixed to the first flange and the other end extending longitudinally between the inner tube and the corrugated pipe from the first flange; An annular clamp movably installed in the longitudinal direction along the connecting rod and being elastically supported in a direction away from the guide; And a spring finger having one end fixed to the second flange and the other end inserted into the fitting hole for sliding contact with the inner tube. The apparatus of claim 6, wherein the plurality of fitting holes are formed by alternately forming a plurality of first fitting holes and a plurality of second fitting holes. The apparatus of claim 6, further comprising an elastic member inserted into a connecting rod between the clamp and a spring supporter formed at the other end of the connecting rod to provide a tension force to the spring finger. 7. The apparatus as claimed in claim 6, wherein the spring fingers have a plurality of slits formed in the middle thereof in the longitudinal direction.

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