CN111812702A - A low-impedance beam position detector and method of making the same - Google Patents

A low-impedance beam position detector and method of making the same Download PDF

Info

Publication number
CN111812702A
CN111812702A CN202010857892.2A CN202010857892A CN111812702A CN 111812702 A CN111812702 A CN 111812702A CN 202010857892 A CN202010857892 A CN 202010857892A CN 111812702 A CN111812702 A CN 111812702A
Authority
CN
China
Prior art keywords
contact finger
position detector
main cavity
contact
beam position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010857892.2A
Other languages
Chinese (zh)
Other versions
CN111812702B (en
Inventor
王安鑫
田塞克
聂小军
随艳峰
何俊
刘磊
朱东辉
陈佳鑫
贺华艳
余洁冰
王广源
于永积
宁常军
张俊嵩
刘仁洪
康玲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of High Energy Physics of CAS
Spallation Neutron Source Science Center
Original Assignee
Institute of High Energy Physics of CAS
Spallation Neutron Source Science Center
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of High Energy Physics of CAS, Spallation Neutron Source Science Center filed Critical Institute of High Energy Physics of CAS
Priority to CN202010857892.2A priority Critical patent/CN111812702B/en
Publication of CN111812702A publication Critical patent/CN111812702A/en
Application granted granted Critical
Publication of CN111812702B publication Critical patent/CN111812702B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T7/00Details of radiation-measuring instruments
    • G01T7/005Details of radiation-measuring instruments calibration techniques
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
    • G06F30/10Geometric CAD
    • G06F30/17Mechanical parametric or variational design
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
    • G06F30/20Design optimisation, verification or simulation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/30Nuclear fission reactors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Geometry (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Evolutionary Computation (AREA)
  • Computer Hardware Design (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • General Engineering & Computer Science (AREA)
  • Computational Mathematics (AREA)
  • Mathematical Analysis (AREA)
  • Mathematical Optimization (AREA)
  • Pure & Applied Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

The invention discloses a low-impedance beam position detector and a manufacturing method thereof, wherein the detector comprises contact fingers, a main cavity barrel, corrugated pipes and C-shaped springs, the contact fingers are respectively arranged at two ends of the main cavity barrel, the corrugated pipes are respectively arranged on the peripheries of the joints of the contact fingers and the main cavity barrel, a spring mounting groove is arranged between the outer side of each contact finger and the inner side of each corrugated pipe, and the C-shaped springs are arranged in the spring mounting grooves. The manufacturing method mainly comprises the steps of simulation analysis, part processing, assembly forming and performance detection. The invention is improved and optimized on the basis of the traditional double-finger type shielding structure, can realize smooth and stable transition of an irregular inner cavity and excellent high-frequency conductivity, effectively reduces leakage of a high-order mode, and reduces impedance.

Description

一种低阻抗束流位置探测器及其制作方法A low-impedance beam position detector and method of making the same

技术领域technical field

本发明涉及高能物理技术领域,特别涉及一种低阻抗束流位置探测器及其制作方法。The invention relates to the technical field of high-energy physics, in particular to a low-impedance beam position detector and a manufacturing method thereof.

背景技术Background technique

束流轨道稳定性是现代同步辐射光源关键性能指标之一,它直接影响加速器性能以及实验线站同步光的质量和稳定性。束流位置探测器(Beam Position Monitor,简称BPM)一般具有四个电极,通过采集每个电极上的感应信号来计算束流质心位置,作为束流位置和轨道测量的仪器,要求分辨率达到0.1μm,机械稳定性达到50nm。环境中的噪声振动(~100nm)和周边加速器设备振动均会影响束流轨道的稳定性,因此BPM应采用特殊的独立支撑结构、两端设计波纹管以减少周边环境的振动传递,同时提供安装所必要的空间和误差补偿,吸收烘烤和运行时的热膨胀及变化量。Beam orbit stability is one of the key performance indicators of modern synchrotron radiation sources, which directly affects the performance of accelerators and the quality and stability of synchrotron beams at experimental line stations. The Beam Position Monitor (BPM) generally has four electrodes. The position of the beam centroid is calculated by collecting the induced signal on each electrode. As an instrument for beam position and orbit measurement, the resolution is required to reach 0.1 μm, the mechanical stability reaches 50nm. The noise and vibration in the environment (~100nm) and the vibration of the surrounding accelerator equipment will affect the stability of the beam trajectory. Therefore, the BPM should adopt a special independent support structure and design bellows at both ends to reduce the vibration transmission of the surrounding environment, and provide installation at the same time. Necessary space and error compensation to absorb thermal expansion and variation during bake-out and operation.

BPM波纹管必须具有高频(RF)屏蔽机构,其一般由电阻很小的金属丝或金属条构成,和束流真空室截面形成一致的包络,两端和束流真空室保持良好的电接触,桥接波纹管的波纹状结构,构成镜像壁电流的直接通路,达到消除类腔结构、降低阻抗、减小高次模(HOM)泄露及束流不稳定性的目的。同时,金属条之间的缝隙作为包络内外的气体通道,便于波纹状结构内的气体抽出。The BPM bellows must have a high-frequency (RF) shielding mechanism, which is generally composed of metal wires or metal strips with low resistance, forming a consistent envelope with the beam vacuum chamber section, and maintaining good electrical contact with the beam vacuum chamber at both ends. The corrugated structure of the bridging bellows forms a direct path for the mirrored wall current to eliminate the cavity-like structure, reduce impedance, reduce higher-order mode (HOM) leakage and beam instability. At the same time, the gaps between the metal strips serve as gas channels inside and outside the envelope, which facilitates the extraction of the gas in the corrugated structure.

现有的波纹管屏蔽弹簧指结构主要有单指型、双指型和金属网格套等几种,每一类结构都有其自身特点和应用范围。针对同步辐射光源增强器位置具有束流截面不规则、空间小、束流方向长度短、波纹管压缩量大等特点,同时,波纹管屏蔽弹簧指结构在工程上的应用还需要满足径向错位和轴向偏转,需要具备导电性能好、接触力均匀稳定、以及阻抗低的要求,双指型屏蔽结构由接触指提供电流通路,弹簧指提供接触力,相比单指型其接触力基本不变,电阻保持恒定,同时将高温区和高应力区分开,减小了损坏的可能,相比网格套结构其阻抗更低,因此更适合在此处应用。The existing bellows shielding spring finger structures mainly include single-finger type, double-finger type, and metal mesh sleeves, and each type of structure has its own characteristics and application scope. The position of the synchrotron radiation light source intensifier has the characteristics of irregular beam cross section, small space, short beam direction length, and large bellows compression. At the same time, the application of the bellows shielding spring finger structure in engineering also needs to meet the radial dislocation and axial deflection, it needs to have good electrical conductivity, uniform and stable contact force, and low impedance. The two-finger shielding structure provides the current path by the contact finger, and the spring finger provides the contact force. Compared with the single-finger type, the contact force is basically lower. change, the resistance remains constant, and at the same time, the high temperature area and the high stress are separated, which reduces the possibility of damage, and has a lower impedance than the mesh sleeve structure, so it is more suitable for this application.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于克服现有技术的不足,提供一种低阻抗束流位置探测器,该结构的探测器可实现不规则内腔光滑平稳过渡和优秀的高频导电性能,有效减小高次模泄露,降低阻抗。The purpose of the present invention is to overcome the deficiencies of the prior art, and provide a low-impedance beam position detector, the detector of this structure can realize smooth and smooth transition of irregular inner cavity and excellent high-frequency conductivity, and effectively reduce the high-order mode leakage, reducing impedance.

本发明的另一目的在于提供一种上述低阻抗束流位置探测器的制作方法。Another object of the present invention is to provide a manufacturing method of the above-mentioned low-impedance beam position detector.

本发明的技术方案为:一种低阻抗束流位置探测器,包括接触指、主腔筒、波纹管和C型弹簧,主腔筒的两端分别设有接触指,各接触指和主腔筒的连接处外周分别设有波纹管,接触指的外侧与波纹管的内侧之间留有弹簧安装槽,弹簧安装槽内设置C型弹簧。其中,采用C型弹簧压紧接触指,减小径向尺寸,在不规则束流截面上获得更均匀稳定的接触力,优于100±20g;同时,通过接触指与C型弹簧的紧密接触滑动,可保证设备在轴向补偿和径向偏移、旋转时的导电性能,屏蔽波纹管的类腔结构,实现低阻抗要求。The technical scheme of the present invention is: a low-impedance beam current position detector, comprising a contact finger, a main cavity cylinder, a bellows and a C-type spring, the two ends of the main cavity cylinder are respectively provided with contact fingers, each contact finger and the main cavity Bellows are respectively arranged on the outer periphery of the connection of the cylinder, spring installation grooves are left between the outer sides of the contact fingers and the inner sides of the bellows, and C-shaped springs are arranged in the spring installation grooves. Among them, the C-type spring is used to press the contact finger to reduce the radial size, and a more uniform and stable contact force is obtained on the irregular beam section, which is better than 100±20g; at the same time, the close contact between the contact finger and the C-type spring is used. Sliding can ensure the electrical conductivity of the device during axial compensation, radial offset and rotation, and shield the cavity-like structure of the bellows to achieve low impedance requirements.

所述波纹管的内侧还设有弹簧固定环,弹簧固定环的一端延伸至与主腔筒相接,在接触指与主腔筒的相接处外侧,弹簧固定环的内侧形成弹簧安装槽;C型弹簧设于弹簧安装槽内,且C型弹簧的弧形内侧顶紧于接触指与主腔筒的相接凸台处。The inner side of the bellows is also provided with a spring fixing ring, one end of the spring fixing ring extends to connect with the main cavity cylinder, and a spring installation groove is formed on the inner side of the spring fixing ring on the outside of the connection between the contact finger and the main cavity cylinder; The C-shaped spring is arranged in the spring installation groove, and the arc-shaped inner side of the C-shaped spring is pressed against the contacting boss of the contact finger and the main cavity cylinder.

所述接触指的端部外周还设有外套筒,外套筒一端与波纹管的端部焊接,外套筒另一端设有刀口法兰,刀口法兰的内腔加工有圆锥面,可保证与接触指之间平滑过渡从而降低阻抗。The outer circumference of the end of the contact finger is also provided with an outer sleeve, one end of the outer sleeve is welded with the end of the bellows, the other end of the outer sleeve is provided with a knife-edge flange, and the inner cavity of the knife-edge flange is processed with a conical surface, which can be Ensures a smooth transition with the contact fingers to reduce impedance.

所述主腔筒的外侧还连接有安装支撑块,各刀口法兰的外周还连接有波纹管支撑块,安装支撑块和波纹管支撑块之间设有支撑螺杆。An installation support block is also connected to the outer side of the main cavity cylinder, a bellows support block is also connected to the outer periphery of each knife edge flange, and a support screw is arranged between the installation support block and the bellows support block.

所述接触指的内腔截面呈椭圆形,接触指的外侧面上分布有多个翅片。The cross section of the inner cavity of the contact finger is oval, and a plurality of fins are distributed on the outer side of the contact finger.

所述主腔筒的内腔截面呈椭圆形,主腔筒的外周分布有带纽扣电极的穿墙子,各穿墙子位于两个波纹管之间的同一横截面上。The inner cavity section of the main cavity tube is oval, and the outer circumference of the main cavity tube is distributed with wall penetrations with button electrodes, and each wall penetration is located on the same cross section between the two bellows.

所述C型弹簧的截面呈C型状,卷制成型后形成椭圆形的环状结构。The cross section of the C-shaped spring is C-shaped, and an elliptical annular structure is formed after being rolled and formed.

此外,在上述结构的低阻抗束流位置探测器装配时,为保证焊接可靠性,各波纹管两端分别焊接有过渡桥连,过渡桥连与主腔筒或外套筒相接。In addition, when assembling the low-impedance beam position detector of the above structure, in order to ensure welding reliability, transition bridges are welded at both ends of each bellows respectively, and the transition bridges are connected to the main cavity cylinder or the outer sleeve.

上述低阻抗束流位置探测器的制作方法,包括以下步骤:The manufacturing method of the above-mentioned low-impedance beam position detector includes the following steps:

(1)仿真模拟分析:分别采用CST软件模拟分析和ANSYS软件模拟分析,构建探测器的低阻抗物理结构模型,并优化接触指结构和内腔结构;再通过ANSYS软件优化接触指的轴向伸缩量、径向偏移量和旋转偏移角度;获得接触指和内腔结构的最优尺寸参数;(1) Simulation analysis: Use CST software simulation analysis and ANSYS software simulation analysis respectively to build the low-impedance physical structure model of the detector, and optimize the contact finger structure and cavity structure; then use ANSYS software to optimize the axial expansion and contraction of the contact finger amount, radial offset and rotational offset angle; obtain the optimal size parameters of the contact finger and lumen structure;

(2)零件加工:根据步骤(1)优化后得到的探头模型,分别加工主腔筒、刀口法兰、C型弹簧、接触指和波纹管;(2) Parts processing: According to the probe model obtained after the optimization in step (1), the main cavity cylinder, the edge flange, the C-type spring, the contact finger and the bellows are processed respectively;

(3)装配成型:对加工成型后的各零部件进行装配、调试并焊接固定;(3) Assembling and forming: Assemble, debug and weld and fix the parts after processing and forming;

(4)性能检测:对成型后的探头整体分别进行氦质谱真空检漏、抽极限真空、尺寸测量、阻抗测量和温升测量。(4) Performance testing: The whole formed probe is subjected to helium mass spectrometry vacuum leak detection, ultimate vacuum extraction, size measurement, impedance measurement and temperature rise measurement.

所述步骤(1)中,优化后的接触指指宽为2.39mm,指缝宽度为0.31mm;优化后所得到波纹管的轴向伸缩量为±4mm,径向偏移量为±1mm,旋转偏移角度为±0.5°。In the step (1), the optimized contact finger width is 2.39mm, and the finger slit width is 0.31mm; the axial expansion and contraction amount of the bellows obtained after optimization is ±4mm, and the radial offset is ±1mm, The rotation offset angle is ±0.5°.

所述步骤(2)中,对各零件进行加工时,主腔筒和刀口法兰分别通过数控加工中心进行加工,完成后采用三坐标测量仪采点的检测方式进行精度验证,确保达到精度要求后,对主腔筒和刀口法兰的内腔面分别进行抛光处理;In the step (2), when each part is processed, the main cavity barrel and the edge flange are processed by the CNC machining center respectively, and after completion, the detection method of the three-coordinate measuring instrument is used to verify the accuracy to ensure that the accuracy requirements are met. After that, polish the inner cavity surfaces of the main cavity cylinder and the knife edge flange respectively;

C型弹簧采用模具冲压成型,然后通过运动平台搭载数显精密拉力计进行接触力测试;The C-type spring is formed by die stamping, and then the contact force test is carried out through the motion platform equipped with a digital display precision tension gauge;

接触指采用线切割加工,然后利用模具压制截面成型,获得椭圆形截面,最后对接触指表面进行镀金处理(经过镀金处理的接触指具有更好的导电性,同时也可防止接触指和C型弹簧之间产生原子渗透粘合),然后通过应变片在运动平台上实现反复伸缩、偏移和旋转运动,进行应力、变形和疲劳测试;The contact finger is processed by wire cutting, and then the cross-section is formed by pressing the mold to obtain an elliptical cross-section. Finally, the surface of the contact finger is gold-plated (the gold-plated contact finger has better conductivity, and it can also prevent the contact finger and C type. Atomic penetration bonding is generated between the springs), and then repeated expansion, deflection and rotation motions are realized on the motion platform through the strain gauges, and stress, deformation and fatigue tests are carried out;

其中,波纹管采用市面同类设备通用的波纹管即可。Among them, the corrugated pipe can use the common corrugated pipe of similar equipment in the market.

本发明相对于现有技术,具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

本低阻抗束流位置探测器是在传统双指型屏蔽结构的基础上进行改进和优化,可实现不规则内腔光滑平稳过渡和优秀的高频导电性能,有效减小高次模泄露,降低阻抗。The low-impedance beam position detector is improved and optimized on the basis of the traditional two-finger shielding structure, which can realize smooth and smooth transition of irregular cavity and excellent high-frequency conductivity, effectively reduce the leakage of high-order modes, reduce impedance.

本低阻抗束流位置探测器及其制作方法中,通过优化接触指的指宽和指缝宽度,可有效减小高次模泄露,降低阻抗;通过采用C型弹簧的结构压紧接触指,从而减小径向尺寸,在不规则束流截面上获得更稳定的接触力,同时,通过镀金处理使接触指获得更好的导电和耐磨性能,避开与C型弹簧之间的原子渗透导致粘合。In the low-impedance beam position detector and the manufacturing method thereof, by optimizing the finger width and finger slit width of the contact finger, the leakage of the high-order mode can be effectively reduced, and the impedance can be reduced; Thereby reducing the radial size and obtaining a more stable contact force on the irregular beam cross section. At the same time, the contact finger obtains better electrical conductivity and wear resistance through gold plating, avoiding atomic penetration with the C-type spring. cause adhesion.

本低阻抗束流位置探测器的制作方法中,通过对接触指结构变形和BPM整体阻抗分析,择优选择合适的C型弹簧和接触指结构尺寸,利用波纹管轴向长度补偿和径向偏移、旋转补偿时获得低阻抗的方式,不仅能较好的获得此种不规则束流截面的屏蔽弹簧指制造方法,同样也适用更多的异型或规则截面、异型弧面的薄壁真空管的屏蔽弹簧指制造方法。In the manufacturing method of the low-impedance beam position detector, the structural deformation of the contact finger and the overall impedance of the BPM are analyzed, and the appropriate C-type spring and contact finger structure size are selected optimally, and the axial length compensation and radial offset of the bellows are used. The method of obtaining low impedance during rotation compensation can not only better obtain the shielding spring finger manufacturing method of this irregular beam cross-section, but also apply to the shielding of thin-walled vacuum tubes with more special-shaped or regular cross-sections and special-shaped curved surfaces. Spring refers to the manufacturing method.

附图说明Description of drawings

图1为本低阻抗束流位置探测器的整体结构示意图。FIG. 1 is a schematic diagram of the overall structure of the low-impedance beam position detector.

图2为图1所示低阻抗束流位置探测器的俯视图。FIG. 2 is a top view of the low impedance beam position detector shown in FIG. 1 .

图3为图2的A-A方向截面视图。FIG. 3 is a cross-sectional view taken along the line A-A of FIG. 2 .

图4为图3的B-B方向截面视图。FIG. 4 is a cross-sectional view taken along the line B-B in FIG. 3 .

图5为图2的C-C方向截面视图。FIG. 5 is a cross-sectional view taken along the C-C direction of FIG. 2 .

图6为单个接触指的结构示意图。FIG. 6 is a schematic structural diagram of a single contact finger.

图7为接触指的径向截面示意图。FIG. 7 is a schematic view of a radial cross-section of a contact finger.

图8为C型弹簧的结构示意图。FIG. 8 is a schematic structural diagram of a C-type spring.

图9为C型弹簧的径向截面示意图。FIG. 9 is a schematic diagram of a radial cross-section of a C-shaped spring.

图10为图9的D-D局部截面视图。FIG. 10 is a partial cross-sectional view along line D-D of FIG. 9 .

上述各图中,各附图标记所示部件如下:1为接触指,2为主腔筒,3为波纹管,4为C型弹簧,5为弹簧固定环,6为外套筒,7为刀口法兰,8为安装支撑块,9为波纹管支撑块,10为支撑螺杆,11为过渡桥连),12为带纽扣电极的穿墙子。In the above figures, the parts shown by the reference numerals are as follows: 1 is the contact finger, 2 is the main cavity cylinder, 3 is the bellows, 4 is the C-shaped spring, 5 is the spring fixing ring, 6 is the outer sleeve, and 7 is the outer sleeve. Knife-edge flange, 8 is an installation support block, 9 is a bellows support block, 10 is a support screw, 11 is a transition bridge), and 12 is a wall penetration with button electrodes.

具体实施方式Detailed ways

下面结合实施例,对本发明作进一步的详细说明,但本发明的实施方式不限于此。The present invention will be further described in detail below with reference to the examples, but the embodiments of the present invention are not limited thereto.

实施例1Example 1

本实施例一种低阻抗束流位置探测器,其结构如图1至图5所示,包括接触指1、主腔筒2、波纹管3和C型弹簧4,主腔筒的两端分别设有接触指,各接触指和主腔筒的相接处外周分别设有波纹管,接触指的外侧与波纹管的内侧之间留有弹簧安装槽,弹簧安装槽内设置C型弹簧。其中,采用C型弹簧结构压紧接触指,减小径向尺寸,在不规则束流截面上获得更均匀稳定的接触力,优于100±20g;同时,通过接触指与C型弹簧的紧密接触滑动,可保证设备在轴向补偿和径向偏移、旋转时的导电性能,屏蔽波纹管的类腔结构,实现低阻抗要求。A low-impedance beam position detector in this embodiment has a structure as shown in Figures 1 to 5, including a contact finger 1, a main cavity cylinder 2, a bellows 3 and a C-shaped spring 4. The two ends of the main cavity cylinder are respectively Contact fingers are provided, bellows are respectively arranged on the outer periphery of the junction of each contact finger and the main cavity cylinder, spring installation grooves are left between the outer sides of the contact fingers and the inner side of the bellows, and C-shaped springs are arranged in the spring installation grooves. Among them, the C-shaped spring structure is used to compress the contact fingers, reducing the radial size and obtaining a more uniform and stable contact force on the irregular beam section, which is better than 100±20g; at the same time, through the tight contact between the contact fingers and the C-shaped spring Contact and sliding can ensure the electrical conductivity of the device during axial compensation, radial offset and rotation, shield the cavity-like structure of the bellows, and achieve low impedance requirements.

波纹管的内侧还设有弹簧固定环5,弹簧固定环的一端延伸出至与主腔筒相接,在接触指与主腔筒的相接处外侧,弹簧固定环的内侧形成弹簧安装槽(如图3或图5所示);C型弹簧设于弹簧安装槽内,且C型弹簧的弧形内侧顶紧于接触指与主腔筒的相接凸台处。The inner side of the bellows is also provided with a spring fixing ring 5. One end of the spring fixing ring extends out to connect with the main cavity cylinder. On the outside of the junction between the contact finger and the main cavity cylinder, the inner side of the spring fixing ring forms a spring installation groove ( As shown in Figure 3 or Figure 5); the C-type spring is arranged in the spring installation groove, and the arc-shaped inner side of the C-type spring is pressed against the contacting boss of the contact finger and the main cavity cylinder.

接触指的端部外周还设有外套筒6,外套筒一端和波纹管的端部焊接,外套筒另一端设有刀口法兰7,刀口法兰的内腔加工有圆锥面(如图3或图5所示),本实施例中斜角的倾斜比例小于1:10,可保证与接触指之间平滑过渡从而降低阻抗。The outer periphery of the end of the contact finger is also provided with an outer sleeve 6, one end of the outer sleeve is welded with the end of the bellows, the other end of the outer sleeve is provided with a knife-edge flange 7, and the inner cavity of the knife-edge flange is processed with a conical surface (such as 3 or 5), in this embodiment, the inclination ratio of the bevel angle is less than 1:10, which can ensure a smooth transition with the contact finger and thus reduce the impedance.

如图1所示,主腔筒的外侧还连接有安装支撑块8,各刀口法兰的外周还连接有波纹管支撑块9,安装支撑块和波纹管支撑块之间设有支撑螺杆10。As shown in FIG. 1 , an installation support block 8 is connected to the outer side of the main cavity, and a bellows support block 9 is also connected to the outer periphery of each blade flange. A support screw 10 is provided between the installation support block and the bellows support block.

如图6或图7所示,接触指的内腔截面呈椭圆形,接触指的外侧面上分布有多个翅片。本实施例中,接触指的外侧面上分布有39个翅片,指宽(即翅片宽度)为2.39mm,指缝宽度(即相邻两个翅片之间的距离)为0.31mm,接触指的壁厚为0.2mm,接触指的表面镀金以降低电阻率、提高电接触性能、避开与C型弹簧之间的原子渗透导致粘合,同时提升耐磨性能,减少因摩擦产生的金属或其氧化物灰尘离子,以避免影响真空性能。As shown in FIG. 6 or FIG. 7 , the cross section of the inner cavity of the contact finger is oval, and a plurality of fins are distributed on the outer surface of the contact finger. In this embodiment, 39 fins are distributed on the outer surface of the contact finger, the finger width (ie the width of the fins) is 2.39mm, the width of the finger slit (ie the distance between two adjacent fins) is 0.31mm, The wall thickness of the contact finger is 0.2mm. The surface of the contact finger is plated with gold to reduce the resistivity, improve the electrical contact performance, avoid the atomic penetration between the C-type spring and lead to adhesion, and at the same time improve the wear resistance and reduce the friction caused by friction. Metal or its oxide dust ions to avoid affecting vacuum performance.

如图1或图2所示,主腔筒的内腔截面呈椭圆形,主腔筒的外周分布有穿墙子接头12,各穿墙子接头位于两个波纹管之间的同一横截面上。本实施例中,主腔筒的外侧呈直径为61.9mm的圆柱状;主腔筒的内腔呈椭圆形,其内径短轴为30mm,内径长轴为36mm,主腔筒与接触指相接处的壁厚为0.7mm;主腔筒的两端结构对称,主腔筒与接触指的触点位置,椭圆形内腔的倒角为30°,利用倒角的过渡作用可有效改变结构突变,从而降低阻抗。As shown in Fig. 1 or Fig. 2, the section of the inner cavity of the main cavity is oval, and the outer circumference of the main cavity is distributed with wall-penetrating sub-joints 12, and each wall-penetrating sub-joint is located on the same cross-section between the two corrugated pipes . In this embodiment, the outer side of the main cavity cylinder is cylindrical with a diameter of 61.9mm; the inner cavity of the main cavity cylinder is oval, the short axis of the inner diameter is 30mm, the long axis of the inner diameter is 36mm, and the main cavity cylinder is connected with the contact fingers The wall thickness is 0.7mm; the two ends of the main cavity cylinder are symmetrical in structure, the contact position of the main cavity cylinder and the contact finger, the chamfer of the elliptical cavity is 30°, and the transition effect of the chamfer can effectively change the structural mutation , thereby reducing the impedance.

如图8至图10所示,C型弹簧的截面呈C型状,卷制成型后形成椭圆形的环状结构。本实施例中,通过弹簧安装槽的宽度将C型弹簧的弹力大小控制在100±20g。C型弹簧的宽度为2.6mm,C型弹簧的厚度为0.09mm,卷制成型后的截面呈椭圆形,与接触指的外部形状对应,其弹力的大小也可根据实际得到的测试结果建立与变形的对应关系。As shown in FIGS. 8 to 10 , the cross-section of the C-shaped spring is C-shaped, and an elliptical annular structure is formed after rolling. In this embodiment, the elastic force of the C-shaped spring is controlled to be 100±20g by the width of the spring installation groove. The width of the C-type spring is 2.6mm, and the thickness of the C-type spring is 0.09mm. Correspondence with deformation.

波纹管可沿轴向进行拉伸或压缩,也可在径向上或旋转方向上产生一定的偏移,本实施例中,波纹管的轴向伸缩量±4mm,径向偏移量为±1mm,旋转偏移角度为±0.5°,该变化主要针对接触指,需要保证接触指不疲劳失效,同时保证电接触性能,波纹管虽也有此要求,但是不影响电性能,主要考虑疲劳失效破坏真空。The bellows can be stretched or compressed in the axial direction, and can also have a certain offset in the radial direction or the rotation direction. In this embodiment, the axial expansion and contraction of the bellows is ±4mm, and the radial offset is ±1mm , the rotation offset angle is ±0.5°. This change is mainly for the contact fingers. It is necessary to ensure that the contact fingers do not fatigue failure, and at the same time ensure the electrical contact performance. Although the bellows also has this requirement, it does not affect the electrical performance. The main consideration is fatigue failure and vacuum damage. .

此外,在上述结构的低阻抗束流位置探测器安装时,为进一步稳定设备结构,各波纹管两端分别与主腔筒、外套筒的相接之处还设有过渡桥连11。In addition, when the low-impedance beam position detector of the above structure is installed, in order to further stabilize the structure of the device, transition bridges 11 are also provided where the two ends of each bellows connect with the main cavity cylinder and the outer sleeve respectively.

实施例2Example 2

本实施例提供一种实施例1所述低阻抗束流位置探测器的制作方法,包括以下步骤:This embodiment provides a method for manufacturing the low-impedance beam position detector described in Embodiment 1, including the following steps:

(1)仿真模拟分析:分别采用CST软件模拟分析和ANSYS软件模拟分析,构建探测器的低阻抗物理结构模型,并优化接触指的结构(根据实际需要,优化的参数包括接触指的指宽、指缝宽度)和内腔结构(主腔筒台阶和各处圆角或倒角的角度等),从而尽量获得低阻抗结果对应的数据;再通过ANSYS软件优化接触指的长度、宽度和厚度实现轴向伸缩量、径向偏移量和旋转角度;获得接触指和内腔结构的最优尺寸参数;(1) Simulation analysis: Use CST software simulation analysis and ANSYS software simulation analysis respectively to build a low-impedance physical structure model of the detector, and optimize the structure of the contact finger (according to actual needs, the optimized parameters include the finger width of the contact finger, Finger slit width) and inner cavity structure (main cavity cylinder steps and angles of rounded or chamfered corners, etc.), so as to obtain data corresponding to low impedance results as much as possible; and then optimize the length, width and thickness of the contact fingers through ANSYS software to achieve Axial expansion, radial offset and rotation angle; obtain the optimal size parameters of the contact finger and inner cavity structure;

其中,在接触指结构的优化过程中,CST模拟结果显示接触指指宽越宽、指缝越小,阻抗相应就越小;而ANSYS模拟结果则显示接触指越长、指宽越窄、厚度越薄,最大主应力越小,但也可能引起大变形,导致内腔椭圆不规则或尺寸不均匀变化增大阻抗,同时指缝太小也影响抽真空速率;因此需要综合两种分析结果,优选接触指各尺寸;Among them, in the optimization process of the contact finger structure, the CST simulation results show that the wider the contact finger width and the smaller the finger gap, the smaller the impedance is; while the ANSYS simulation results show that the longer the contact finger, the narrower the finger width, the smaller the thickness The thinner it is, the smaller the maximum principal stress is, but it may also cause large deformation, resulting in irregular ellipse of the lumen or non-uniform change in size to increase the impedance, and too small finger slit also affects the vacuum pumping rate; therefore, it is necessary to combine the two analysis results, The preferred contact finger dimensions;

本实施例中,优化后的接触指指宽为2.39mm,指缝宽度为0.31mm,优化后所得到波纹管及其屏蔽结构可以保证轴向伸缩量±4mm,径向偏移量±1mm,旋转角度±0.5°;In this embodiment, the optimized contact finger width is 2.39 mm, and the finger slit width is 0.31 mm. The optimized corrugated tube and its shielding structure can ensure that the axial expansion and contraction amount are ±4 mm, and the radial offset is ±1 mm. Rotation angle ±0.5°;

(2)零件加工:根据步骤(1)优化后得到的探测器模型,分别加工主腔筒、刀口法兰、C型弹簧、接触指和波纹管;(2) Parts processing: According to the detector model obtained after the optimization in step (1), the main cavity cylinder, the edge flange, the C-type spring, the contact finger and the bellows are processed respectively;

对各零件进行加工时,主腔筒和刀口法兰分别通过数控加工中心进行加工,完成后采用三坐标测量仪采点的检测方式进行精度验证,确保达到精度要求后,对主腔筒和刀口法兰的内腔面分别进行抛光处理;When processing each part, the main cavity barrel and the knife edge flange are processed by the CNC machining center respectively. After completion, the detection method of the three-coordinate measuring instrument is used to verify the accuracy. After ensuring that the accuracy requirements are met, the main cavity barrel and the knife edge The inner cavity surface of the flange is polished separately;

C型弹簧采用模具冲压成型,然后通过运动平台搭载数显精密拉力计进行接触力测试;测试时,通过建立接触力与弹簧变形关系,根据测试结果对应结构设计,调整弹簧安装槽的深度以保证弹簧接触力;The C-type spring is formed by die stamping, and then the contact force test is carried out through the motion platform equipped with a digital display precision tension meter; during the test, the relationship between the contact force and the spring deformation is established, and the depth of the spring installation groove is adjusted according to the test results corresponding to the structural design to ensure spring contact force;

接触指采用线切割加工,然后对接触指表面进行镀金处理,完成后利用模具对压制截面成型,获得椭圆形截面,最后通过应变片在运动平台上实现反复伸缩、偏移和旋转运动,进行应力、变形和疲劳测试,根据测试结果确定加工工艺的最佳温度、时间等参数以保证接触指使用寿命。。The contact finger is processed by wire cutting, and then the surface of the contact finger is plated with gold. After completion, the pressed section is formed with a mold to obtain an elliptical section. Finally, the strain gauge is used to realize repeated expansion and contraction, offset and rotation on the moving platform to carry out stress. , deformation and fatigue test, according to the test results to determine the best temperature, time and other parameters of the processing technology to ensure the service life of the contact finger. .

其中,波纹管采用市面同类设备通用的波纹管即可。Among them, the corrugated pipe can use the common corrugated pipe of similar equipment in the market.

(3)装配成型:对加工成型后的各零部件进行装配并焊接固定;(3) Assembling and forming: Assemble and weld the parts after processing and forming;

其中,先将刀口法兰与接触指采用氩弧焊固定,焊接后抛光焊缝保证光滑过渡,使用模具校行检测椭圆形截面,完成后初步装配C型弹簧;然后通过搭载组合运动平台工装调节单边刀口法兰相对于主腔筒的轴向长度±4mm、径向偏移1mm、旋转角度±0.5°,并检测其变形、应力和疲劳寿命(可剖切后测试),使其满足要求后,采用氩弧焊方式焊接;再依次焊接主腔筒与带纽扣电极的穿墙子、法兰与波纹管;最后焊接主腔筒与安装支撑块,从而完成探测器的装配工作;Among them, the knife-edge flange and the contact finger are first fixed by argon arc welding, and the welding seam is polished after welding to ensure a smooth transition, the ellipse section is detected by the mold calibration, and the C-type spring is preliminarily assembled after completion; The axial length of the unilateral knife-edge flange relative to the main cavity is ±4mm, the radial offset is 1mm, and the rotation angle is ±0.5°, and its deformation, stress and fatigue life are detected (can be cut and tested) to meet the requirements After that, use argon arc welding; then weld the main cavity cylinder and the wall penetration with button electrodes, flanges and bellows in sequence; finally weld the main cavity cylinder and the installation support block to complete the assembly of the detector;

(4)性能检测:对装配后的探测器整体分别进行氦质谱真空检漏、抽极限真空、尺寸测量、阻抗测量和温升测量;其中,通过三坐标测量仪进行尺寸测量,通过阻抗测量平台进行阻抗测量,通过热测试装置进行温升测量。(4) Performance testing: Perform helium mass spectrometry vacuum leak detection, ultimate vacuum extraction, size measurement, impedance measurement and temperature rise measurement on the assembled detector as a whole. Impedance measurements were made, and temperature rise measurements were made by means of a thermal test device.

如上所述,便可较好地实现本发明,上述实施例仅为本发明的较佳实施例,并非用来限定本发明的实施范围;即凡依本发明内容所作的均等变化与修饰,都为本发明权利要求所要求保护的范围所涵盖。As described above, the present invention can be well realized, and the above-mentioned embodiments are only preferred embodiments of the present invention, and are not intended to limit the scope of implementation of the present invention; It is covered by the scope of protection of the claims of the present invention.

Claims (10)

1. The low-impedance beam position detector is characterized by comprising contact fingers, a main cavity barrel, a corrugated pipe and a C-shaped spring, wherein the contact fingers are arranged at two ends of the main cavity barrel respectively, the corrugated pipe is arranged on the periphery of the joint of each contact finger and the main cavity barrel respectively, a spring mounting groove is reserved between the outer side of each contact finger and the inner side of the corrugated pipe, and the C-shaped spring is arranged in the spring mounting groove.
2. The low impedance beam position detector of claim 1, wherein a spring fixing ring is further disposed inside the bellows, one end of the spring fixing ring extends to be connected to the main chamber cylinder, and a spring mounting groove is formed inside the spring fixing ring outside a connection point of the contact finger and the main chamber cylinder; the C-shaped spring is arranged in the spring mounting groove, and the arc inner side of the C-shaped spring is tightly propped against the connecting boss of the contact finger and the main cavity barrel.
3. The low impedance beam position detector of claim 1, wherein an outer sleeve is further provided around the end of the contact finger, the end of the corrugated tube at one end of the outer sleeve is welded, a knife-edge flange is provided at the other end of the outer sleeve, and the inner cavity of the knife-edge flange is machined with a conical surface.
4. The low impedance beam position detector of claim 3, wherein the outside of the main chamber cylinder is further connected with a mounting support block, the periphery of each knife-edge flange is further connected with a bellows support block, and a support screw is arranged between the mounting support block and the bellows support block.
5. The low impedance beam position detector of claim 1, wherein the contact finger has an elliptical cross-section and a plurality of fins are distributed on the outer side of the contact finger.
6. The low impedance beam position detector of claim 1, wherein the cross section of the inner cavity of the main cavity cylinder is elliptical, wall penetrating devices with button electrodes are distributed on the periphery of the main cavity cylinder, and each wall penetrating device is located on the same cross section between the two corrugated pipes.
7. The low impedance beam position detector of claim 1, wherein the cross section of the C-shaped spring is C-shaped, and an elliptical ring-shaped structure is formed after rolling.
8. The method for manufacturing the low impedance beam position detector of any one of claims 1 to 7, characterized by comprising the following steps:
(1) simulation analysis: respectively adopting CST software simulation analysis and ANSYS software simulation analysis to construct a low-impedance physical structure model of the detector and optimize the structures of the contact fingers and the inner cavity; then optimizing a contact finger structure by ANSYS software to realize axial expansion amount, radial offset and rotary offset angle; obtaining optimal size parameters of the contact fingers and the inner cavity structure;
(2) processing parts: respectively processing a main cavity cylinder, a knife edge flange, a C-shaped spring, a contact finger and a corrugated pipe according to the probe model obtained after optimization in the step (1);
(3) assembling and forming: assembling, debugging and welding and fixing the machined and molded parts;
(4) and (3) performance detection: and performing helium mass spectrum vacuum leak detection, ultimate vacuum pumping, size measurement, impedance measurement and temperature rise measurement on the whole formed probe.
9. The method for manufacturing a low impedance beam current position detector according to claim 8, wherein in the step (1), the contact finger width after optimization is 2.39mm, and the finger slit width is 0.31 mm; the axial expansion amount of the corrugated pipe and the shielding structure of the corrugated pipe obtained after optimization is +/-4 mm, the radial offset is +/-1 mm, and the axial rotation offset angle is +/-0.5 degrees.
10. The manufacturing method of the low impedance beam position detector according to claim 8, wherein in the step (2), when each part is processed, the main cavity cylinder and the knife-edge flange are respectively processed through a numerical control processing center, after the processing, a detection mode of a three-coordinate measuring instrument sampling point is adopted for precision verification, and after the precision requirement is met, the inner cavity surfaces of the main cavity cylinder and the knife-edge flange are respectively polished;
the C-shaped spring is punched and formed by a die, and then a digital display precision tension meter is carried on a motion platform to carry out contact force test;
the contact finger is processed by linear cutting, then gold plating treatment is carried out on the surface of the contact finger, a mould is utilized to shape the pressed section to obtain an oval section, and finally repeated stretching, deviation and rotation motion is realized on a motion platform through a strain gauge to carry out stress, deformation and fatigue test.
CN202010857892.2A 2020-08-24 2020-08-24 Low-impedance beam position detector and manufacturing method thereof Active CN111812702B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010857892.2A CN111812702B (en) 2020-08-24 2020-08-24 Low-impedance beam position detector and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010857892.2A CN111812702B (en) 2020-08-24 2020-08-24 Low-impedance beam position detector and manufacturing method thereof

Publications (2)

Publication Number Publication Date
CN111812702A true CN111812702A (en) 2020-10-23
CN111812702B CN111812702B (en) 2022-07-12

Family

ID=72860673

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010857892.2A Active CN111812702B (en) 2020-08-24 2020-08-24 Low-impedance beam position detector and manufacturing method thereof

Country Status (1)

Country Link
CN (1) CN111812702B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113514868A (en) * 2021-04-13 2021-10-19 中国科学院近代物理研究所 Electrode assembly and detector for beam position measurement of high-current accelerator
CN114236602A (en) * 2021-12-17 2022-03-25 中国工程物理研究院流体物理研究所 Design method of beam calibration device
CN116133225A (en) * 2022-09-08 2023-05-16 中国科学院近代物理研究所 Method for making ultra-thin-walled metal-lined vacuum chamber

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070090346A (en) * 2006-03-02 2007-09-06 주식회사 벡트론 Vacuum box
WO2013021104A1 (en) * 2011-08-08 2013-02-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Instrument for measuring length, and method and device for controlling the size of a fuel rod
CN208239629U (en) * 2018-05-28 2018-12-14 东莞中子科学中心 An exciter for accelerator beam measurement
CN208351009U (en) * 2018-06-15 2019-01-08 东莞中子科学中心 Beam position detector for accelerator
CN111208554A (en) * 2020-03-13 2020-05-29 中国科学院上海高等研究院 An X-beam position measuring detector and its measuring method
CN111208157A (en) * 2020-01-16 2020-05-29 散裂中子源科学中心 Beam shielding system applied to multi-station switching second neutron beam switch

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070090346A (en) * 2006-03-02 2007-09-06 주식회사 벡트론 Vacuum box
WO2013021104A1 (en) * 2011-08-08 2013-02-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Instrument for measuring length, and method and device for controlling the size of a fuel rod
CN208239629U (en) * 2018-05-28 2018-12-14 东莞中子科学中心 An exciter for accelerator beam measurement
CN208351009U (en) * 2018-06-15 2019-01-08 东莞中子科学中心 Beam position detector for accelerator
CN111208157A (en) * 2020-01-16 2020-05-29 散裂中子源科学中心 Beam shielding system applied to multi-station switching second neutron beam switch
CN111208554A (en) * 2020-03-13 2020-05-29 中国科学院上海高等研究院 An X-beam position measuring detector and its measuring method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113514868A (en) * 2021-04-13 2021-10-19 中国科学院近代物理研究所 Electrode assembly and detector for beam position measurement of high-current accelerator
CN114236602A (en) * 2021-12-17 2022-03-25 中国工程物理研究院流体物理研究所 Design method of beam calibration device
CN116133225A (en) * 2022-09-08 2023-05-16 中国科学院近代物理研究所 Method for making ultra-thin-walled metal-lined vacuum chamber
CN116133225B (en) * 2022-09-08 2023-08-04 中国科学院近代物理研究所 Method for making ultra-thin-walled metal-lined vacuum chamber

Also Published As

Publication number Publication date
CN111812702B (en) 2022-07-12

Similar Documents

Publication Publication Date Title
CN111812702B (en) Low-impedance beam position detector and manufacturing method thereof
US8429979B2 (en) Capacitance type pressure sensor
EP2393172A1 (en) Spark plug
CN107907263B (en) Capacitive pressure sensor with electrode suspended at single end
EP3258557A1 (en) Spark plug
CN208351009U (en) Beam position detector for accelerator
CN107843379B (en) Capacitive pressure sensor with assembled fixed electrode
CN112217175A (en) Preparation method of cable joint cold-pressed sleeve with temperature sensing function
CN111710442A (en) A large tokamak vacuum chamber non-circular channel ultra-high vacuum sealing flange structure
CN208239629U (en) An exciter for accelerator beam measurement
CN212311191U (en) Laser welding positioning tool for machining process of vibrating cylinder pressure sensor assembly
JP7379257B2 (en) Gas sensor assembly method and cylindrical body
CN113514868B (en) Electrode assembly and detector for measuring beam position of high current accelerator
CN109752601B (en) Device for measuring dynamic characteristics of wall surface charges of discharge chamber of ion thruster
JP2009008229A (en) Bellows type extensible pipe joint
JP6195643B1 (en) Pressure sensor
CN115971753B (en) Assembly mold and assembly method for centering high-frequency components of traveling wave tubes
US9160146B2 (en) Spark plug
RU2140674C1 (en) Method for manufacturing fuel elements and arranging them in fuel assemblies
CN111786328B (en) Flange plate for fixing space traveling wave tube high-voltage cable
CN119069324B (en) A method for testing insulating ceramics, X-ray tubes and secondary electrons
CN214212728U (en) Double-acting expanding mandrel for manufacturing nuclear fuel assembly framework
Brochard et al. RF Fingers for the new ESRF-EBS storage ring
TW201814298A (en) Coaxial probe structure
JP3189510B2 (en) Assembling method of electron gun cathode structure

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant