KR20070066627A - Apparatus for opening/closing a chemical container - Google Patents

Abstract

An apparatus for opening and closing a chemical liquid container is provided to prevent a foreign substance from entering into the chemical liquid container by installing a suction apparatus for sucking the foreign substance by force. An opening and shutting member(200) is coupled to a stopper(120) to open and shut it. A suction apparatus(300) sucks a foreign substance generated upon opening and shitting the stopper by force. The suction apparatus includes a suction member(310) and a suction pump(320). The suction member is separated from a circumference of the outside of the stopper to wrap the stopper. Plural suction holes(312) are formed on the suction member. The suction holes are formed on an opposite surface to the stopper to suck the foreign substance. The suction pump is connected to the suction member.

Description

Opening and closing device of chemical container {APPARATUS FOR OPENING / CLOSING A CHEMICAL CONTAINER}

1 is a configuration diagram schematically showing the opening and closing device of the chemical liquid container according to an embodiment of the present invention.

<Description of Symbols for Main Parts of Drawings>

100: chemical liquid container 110: chemical liquid

120: stopper 200: opening and closing member

210: protrusion 300: suction device

310: suction member 312: suction hole

320: suction pump

The present invention relates to an opening and closing device, and more particularly to an opening and closing device of a chemical liquid container for opening and closing the stopper of the container containing the chemical liquid used in the substrate processing apparatus.

In general, manufacturing a semiconductor device requires a number of unit processes such as an ion implantation process, a deposition process, a photo process, and an etching process. Among these unit processes, a photo-lithography process is a process for forming a desired pattern on a substrate.

The photographing process uniformly applies a photosensitive material such as a photoresist to the surface of the substrate after cleaning and drying, and performs an exposure process according to a specific pattern on a photomask formed in a predetermined layout on the applied photoresist. The process of forming in a required pattern by removing unnecessary site | part of the photosensitive film which were used by the developing solution.

Among them, the photoresist coating process is performed by pumping the photosensitive material supplied to the pump from the chemical liquid container in which the photosensitive material such as photoresist is stored to the nozzle side, and spraying the photosensitive material on the substrate through the nozzle. When the photoresist stored in the chemical container is exhausted by repeating this process, the chemical container should be replaced, and the stopper of the chemical container is opened and closed by manual operation.

However, when the stopper of the unused chemical liquid container is opened for the replacement of the chemical liquid container, foreign substances attached to the cap of the chemical liquid container enter the chemical liquid container, which causes a defect in the process, thereby increasing the yield and productivity of the semiconductor device manufacturing process. There was a problem that was degraded.

Therefore, the present invention was created to solve the problem in view of the problems with the conventional opening and closing device of the conventional chemical liquid container as described above, the object of the present invention to prevent foreign substances from entering the chemical liquid container when replacing the chemical container. It is for providing the opening and closing device of the chemical liquid container which can be done.

In order to achieve the above object, the opening and closing device of the chemical liquid container according to the present invention, in the opening and closing device of the chemical liquid container for opening and closing the stopper of the chemical liquid container filled with the opening and closing member coupled to the stopper to open and close the stopper; ; And a suction device for forcibly suctioning foreign substances generated during opening and closing of the stopper.

In the opening and closing device of the chemical liquid container according to the present invention having the configuration as described above, the suction device is provided so as to surround the stopper at a predetermined distance from the outer circumference of the stopper, the foreign matter on the opposite surface to the stopper A suction member having a plurality of suction holes for suctioning the suction member; It is preferable to include; a suction pump connected to the suction member.

According to one aspect of the invention, the chemical is preferably a photoresist (Photoresist).

Hereinafter, an opening and closing device of a chemical container according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are assigned to the same components as much as possible, even if shown on different drawings. In addition, in describing the present invention, when it is determined that the detailed description of the related well-known configuration or function may obscure the gist of the present invention, the detailed description thereof will be omitted.

(Example)

1 is a configuration diagram schematically showing the opening and closing device of the chemical liquid container according to an embodiment of the present invention.

Referring to FIG. 1, the chemical liquid 110 is filled inside the chemical liquid container 100. The chemical liquid container 100 may be filled with a photosensitive material such as a photoresist or various other chemical liquids. An opening (not shown) is formed on the upper side of the chemical liquid container 100 filled with the chemical liquid 110 so that the chemical liquid can be distributed. The stopper 120 is coupled to the opening (not shown) to seal the inside of the chemical liquid container 100.

If the chemical liquid stored in the chemical container is exhausted by repeating the substrate treatment process using the chemical liquid, the chemical liquid container should be replaced. At this time, the stopper 120 of the chemical liquid container 100 is opened or closed by a manual operation or an opening and closing member 200 such as an auto-opener. Unevenness (not shown) is formed on the outer circumference of the stopper 120, and a protrusion inserted into the uneven groove portion (not shown) of the stopper 120 on an opposite surface of the opening / closing member 200 corresponding to the stopper 120 ( 210 is formed. The opening and closing member 200 is installed to surround the outer circumference of the stopper 120 in a state in which the protrusion 210 is inserted into the uneven groove of the stopper 120. Thus, when the opening-closing member 200 is installed in the stopper 120, and the opening-closing member 200 is rotated by the drive apparatus (not shown), the opening-and-closing member 200 will open the stopper 120 of the chemical container 100. Open and close by rotating in forward or reverse direction.

However, at this time, the foreign matter adhering to the stopper 120 of the chemical liquid container 100 may enter the chemical liquid container 100. If the foreign substance enters the chemical liquid container 100, the process is poor in the substrate processing process using the chemical liquid. This will occur. In order to prevent this, the present invention provides a suction device 300 for forcibly suctioning foreign substances generated during opening and closing of the stopper 120.

The suction device 300 has a suction member 310 and a suction pump 320 connected to the suction member 310 to pump foreign substances. The suction member 310 is installed to surround the stopper 120 spaced a predetermined distance from the circumference of the stopper 120. In addition, a plurality of suction holes 312 are formed in the suction member 310 to suck foreign substances generated when opening and closing the stopper 120. Suction holes 312 are formed on a surface facing the outer periphery of the stopper 120, the shape of the suction holes 312 may be provided in a variety of forms, such as circular or oval. As described above, foreign substances generated when opening and closing the stopper are sucked through the suction holes 312 formed in the suction member 310, and the suctioned foreign substances are discharged through the suction pump 320.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and changes without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

As described above, according to the present invention, by installing a suction device for forcibly suctioning the foreign substances generated when opening and closing the stopper of the chemical liquid container, by preventing the foreign substances from entering into the chemical liquid container, generated by the foreign substances contained in the chemical liquid Process defects can be prevented in advance, thereby improving the yield and productivity of the semiconductor manufacturing process.

Claims (3)

In the opening and closing device of the chemical liquid container for opening and closing the stopper of the chemical liquid container filled with the chemical liquid, An opening and closing member coupled to the stopper to open and close the stopper; Opening and closing device of the chemical liquid container comprising a; suction device for forcibly suctioning foreign substances generated when opening and closing the stopper. The method of claim 1, The suction device, A suction member installed to surround the stopper at a predetermined distance from an outer circumference of the stopper and having a plurality of suction holes formed on the opposite surface of the stopper to suck the foreign matter; Opening and closing device of the chemical liquid container comprising a; suction pump connected to the suction member. The method of claim 2, Opening and closing device of the chemical liquid container, characterized in that the chemical liquid is a photoresist.

Images