KR20070065634A - Automatic guided system - Google Patents

Abstract

An automatic transferring system is provided to monitor an AGV moving image cassettes in an LCD manufacturing line by wirelessly receiving vibration history information from a vibration sensor installed in the AGV. The AGV(70) is equipped with the vibration sensor for detecting vibration. A repeater(80) receives vibration detection signal wirelessly transmitted from the AGV. A monitoring terminal(90) makes the vibration detection information received from the repeater into a database, and enables a manager to monitor the vibration detection information and a working state of the AGV by outputting the vibration detection information and the working state of the AGV. The vibration sensor is installed to a part close to a steering wheel of the AGV. The AGV transmits the vibration detection information to the repeater continuously, periodically, or in generation of the vibration over a predetermined level.

Description

Unmanned Return System {Automatic Guided System}

1 is an exemplary view showing an example in which an unmanned carrier is used in a liquid crystal display processing line in a clean room.

2 is an external configuration diagram of a conventional unmanned transport vehicle.

3 is an exemplary view of a work map mounted on a conventional unmanned transport vehicle.

4 is an exemplary view of an access floor installed on the floor of a clean room.

5 is a configuration diagram of one embodiment of an unmanned transport system according to the present invention.

6 is a flowchart illustrating a method of operating an unmanned carrier system according to the present invention.

Figure 7 is an exemplary view of a screen output from the monitoring terminal applied to the present invention.

8 is a view showing the internal configuration of an embodiment of an unmanned carrier vehicle applied to the present invention.

9 is an exemplary view in which the vibration sensor is mounted on an unmanned transport vehicle applied to the present invention.

<Explanation of symbols for main parts of the drawings>

10: stocker 20: process equipment

30, 70: unmanned carrier 40: rail

41: Spart Mark 31: Robot Arm

32: bumper 33: emergency stop switch

34: charging terminal 35: emergency stop button

60: access floor 80: relay device

90: monitoring terminal

The present invention relates to an unmanned conveying system, and more particularly, to an unmanned conveying system capable of monitoring an unmanned conveying vehicle (AGV) for moving various cassettes in a process line of a liquid crystal display (LCD).

In general, a liquid crystal display (hereinafter referred to as "LCD") is a typical flat panel display that displays an image by adjusting an amount of light beam transmission to correspond to an image signal. In particular, LCDs are in a trend of widening their application range due to features such as light weight, thinness, and low power consumption. According to this trend, LCDs are being used as display devices for office automation devices and notebook computers. In addition, LCDs are progressing toward larger screens and lower power consumption in response to user demands.

On the other hand, the liquid crystal panel of the liquid crystal display device includes a thin film transistor substrate (TFT substrate) (hereinafter, simply referred to as a thin film transistor substrate) for receiving a driving signal, and a color filter substrate (C / F substrate) including a color filter layer (hereinafter, referred to as a thin film transistor substrate). , Simply referred to as a color filter substrate) and a liquid crystal layer interposed between the thin film transistor substrate and the color filter substrate.

The manufacturing process of the liquid crystal display device having the above structure is largely divided into three processes, a substrate manufacturing process, a cell manufacturing process, and a module process.

First, the substrate manufacturing process is divided into a process of manufacturing a thin film transistor substrate using a cleaned glass substrate and a process of manufacturing a color filter substrate. The process of manufacturing a thin film transistor substrate includes a signal line and a plurality of substrates on a lower glass substrate. A thin film transistor and a pixel electrode are manufactured. The color filter substrate manufacturing process is a process of sequentially manufacturing a black matrix, a color filter layer, and a common electrode (ITO) on an upper glass substrate.

Next, a cell process is a process of manufacturing a liquid crystal display cell by bonding a thin film transistor substrate and a color filter substrate and injecting liquid crystal therebetween, wherein the cell process is again an alignment layer forming process, a rubbing process, and a cell gap. It consists of many unit processes such as a cell gap forming process, an assembly process, a cell cutting process, a liquid crystal injection process, and a polarizing film attachment process.

Finally, the module process is a process of connecting the liquid crystal panel and the signal processing circuit part, and the module process is also made of a number of unit processes.

On the other hand, the manufacturing process of the liquid crystal display device consisting of a number of unit processes as described above is generally performed in a clean room, a plurality of substrates having one process is once loaded in a cassette (Automatic Carrier) Automatic guided vehicles (AGVs) are transferred to another process unit in the cleanroom.

In other words, an unmanned transport vehicle is used to supply substrates used in the LCD manufacturing process to various process equipments. Unlike the general vehicles, the unmanned transport vehicle is an electric energy source as a power source considering environmental pollution prevention in a clean room. Use

1 is an exemplary view showing an example in which an unmanned transport vehicle is used in a liquid crystal display process line in a clean room, FIG. 2 is an external configuration diagram of a conventional unmanned transport vehicle, and FIG. An example of a map. 4 is an exemplary view of an access floor installed on the floor of a clean room.

That is, as shown in Figure 1, the process line (clean room) of the conventional liquid crystal display device is a means for moving the cassette containing the substrate to the various process equipment 20, each process equipment required for each process equipment Unmanned carrier 30, rail 40 consisting of a spot mark 41 installed on the floor of the clean room for use as a recognition means for the movement of the unmanned carrier and a plurality of cassettes for managing It is configured to include a stocker (10).

Each of the process equipments 20 are installed in front of the rail 40 formed of a spot mark, and the unmanned transport vehicle 30 moves each process equipment 20 along the rail 40. It serves to transport the cassette required for each process equipment (20).

That is, the unmanned transport vehicle 30 stops by moving to the position where each process equipment 20 is located on the rail 40 and then loads the cassette on which the substrate is loaded into each process equipment, or each Unloading from the process equipment.

To this end, as shown in FIG. 2, an unmanned transport vehicle 30 is provided with a robot arm 31, and the cassette 50 loaded on the unmanned transport vehicle 30 is drawn out by the robot arm. Each process equipment 20 is loaded. Then, each process equipment 20 performs a process on the substrate loaded in the cassette transferred from the unmanned carrier 30, the substrate is completed is loaded again in the cassette 50 after the unmanned carrier 30 ) Is moved to the next process equipment 20.

At this time, the unmanned transport vehicle 30 is for unattended transfer of cassettes to the various process equipments 20 in a clean room, and prevents collisions with each process equipment 20 and facilities in the clean room. To this end, various sensors, buttons, and the like are mounted as shown in FIG. 2.

That is, the unmanned transport vehicle 30, as shown in Figure 2, the robot arm 31 for loading and unloading the cassette 50 into the process equipment, the collision detection sensor for detecting a collision with various obstacles , Bumper 32 for emergency stop in impact, emergency stop switch 33 for emergency stop in impact, charging terminal 34 for charging power required for unmanned carriers, emergency stop for emergency stop It includes a stop button 35 and a frame for mounting the various components, and although not shown in the drawings, a steering wheel and a spot mark of the rail are installed on the lower surface of the frame. It further includes a spark mark detection sensor for detecting).

At this time, the collision detection sensor, the positioning sensor 36 for determining the position of the unmanned carrier, the optical sensor 37 for detecting contact with various process equipment and obstacle detection for detecting other obstacles The sensor 38 etc. are used.

On the other hand, the control unit (IC) for controlling the various sensors and components inside the unmanned transport vehicle 30, a drive unit for driving the steering wheel and the robot arm 31 under the control of the controller and necessary A storage unit for storing various kinds of information is provided.

Particularly, the storage unit stores a work map of the unmanned transport vehicle 30 as shown in FIG. 3. The work map is a program in which the unmanned transport vehicle 30 sets a path and work content to be moved. After it is created by the manager, it is stored in the storage unit of the unmanned vehicle 30 and executed by the controller.

That is, the work map stores information on the spot mark 41 and the work information to be performed on the rail 40 on which the unmanned vehicle is to be moved. The information of 41) is read by the spot mark detection sensor, and the cassette is loaded or unloaded into the preset process equipment 20 while moving along the spot mark 41 set in the work map.

Meanwhile, as described above, the various processes are performed in a clean room, and the air flowing into the clean room maintains the inside of the clean room as a clean space by repeating a filter.

In addition, the floor of the clean room is used to connect a plurality of access floor (Access Floor) 60 composed of pieces as shown in Figure 4 in order to facilitate the cleaning and clean maintenance, the access floor (A A spot mark 41 is attached to the upper surface of the / F) 60 at a predetermined interval so that the unmanned transport vehicle moves while recognizing the spot mark 41 as described above.

However, the access floor (A / F) is composed of each piece, and as shown in Figure 4, the access floor (A) damaged by the movement of the unmanned carrier 30, other process equipment or people / F) 61 may be displaced from adjacent access floors A / F, whereby a step may occur.

At this time, the adjustment wheel of the unmanned transport vehicle traveling on the access floor (A / F) 61 where the step is generated is caught in the stepped portion, and thus, the process line is stopped when the unmanned transport vehicle cannot be moved. In addition, there is a problem that the unmanned carrier may be damaged. In addition, in such a case, there is a problem in that an unexpected vibration is applied to the cassette loaded on the unmanned transport vehicle, thereby damaging the glass substrate.

On the other hand, in addition to the problems caused by the access floor (A / F) as described above, the unmanned transport vehicle over the entire section due to the breakage of the steering wheel itself (for example, screw breakage and loosening, etc.) of the unmanned transport vehicle An abnormal vibration may occur, or an abnormal vibration occurs in an unmanned transport vehicle due to an abnormality and an overload of a motor gain value of a driving unit, and thus the unmanned transport vehicle leaves a predetermined path or the like. There is a problem that the glass substrate may be damaged.

However, in the related art, since there was no system capable of automatically detecting or monitoring the problems before the problems as described above, the administrator had to solve the problem by directly extracting only the unmanned unmanned carrier.

Accordingly, an object of the present invention for solving the above problems, an unmanned conveying system capable of wirelessly receiving and monitoring vibration occurrence history information from an unmanned conveying vehicle equipped with a sensor capable of detecting various vibrations. To provide.

In order to achieve the above object, an unmanned conveying system according to an embodiment of the present invention, an unmanned conveying vehicle equipped with a vibration sensor capable of detecting vibration; A relay device for receiving vibration detection information wirelessly transmitted from the unmanned carrier; And a monitoring terminal for outputting a database of the vibration detection information transmitted from the relay device and outputting the vibration detection information and the work state of the unmanned carrier vehicle so that an administrator can monitor the vibration detection information.

In addition, in the present invention, the vibration sensor is characterized in that it is mounted on the portion adjacent to the steering wheel (Steering Wheel) of the lower surface of the unmanned transport vehicle.

In addition, in the present invention, the unmanned carrier vehicle, the vibration detection information detected from the vibration sensor is continuously transmitted to the relay device through a wireless communication, or periodically transmitted or a predetermined vibration of a predetermined value or more It is characterized in that the transmission only when this occurs.

In addition, in the present invention, the unmanned transport vehicle, its own identification number, the time information to which the vibration detection information is transmitted, the spot mark information located at the location where the vibration detection information is transmitted, the traveling position of the unmanned transport vehicle At least one of information, node information, and access floor information may be transmitted to the relay device.

In addition, in the present invention, the unmanned carrier is an input unit for receiving a variety of information from the manager; A collision detector for detecting collision with various facilities in the clean room; Vibration detection unit for detecting the abnormal vibration of the unmanned carrier; An output unit for outputting various state information; A storage unit for storing various kinds of information necessary for driving of the unmanned carrier; A driving unit for driving a steering wheel and a robot arm; A control unit for controlling the operation of each unit and the communication between each unit; A transmission unit for wirelessly transmitting vibration detection information from the vibration detection unit under control of the controller; And a rail detector for detecting a spot mark of the rail.

In addition, in the present invention, the monitoring terminal outputs an abnormal vibration detection warning message for the unmanned carrier or a specific node when the abnormal vibration detection information is transmitted several times or periodically during driving of a specific unmanned carrier. When the abnormal vibration information is repeatedly received in the unmanned carriers passing through the node), the abnormal vibration detection warning message for the node is output.

Other objects and features of the present invention in addition to the above objects will become apparent from the description of the embodiments with reference to the accompanying drawings.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

5 is a configuration diagram of an unmanned conveying system according to an embodiment of the present invention, FIG. 6 is a flowchart illustrating a method of operating an unmanned conveying system according to the present invention, and FIG. 7 is a screen output from a monitoring terminal applied to the present invention. This is an example of.

First, as shown in FIG. 5, the unmanned transport system according to the present invention includes an unmanned transport vehicle 70 equipped with a vibration detection sensor capable of detecting vibration of an unmanned transport vehicle itself, and wirelessly transmitted from the unmanned transport vehicle. It includes a relay device 80 for receiving the vibration detection information and a monitoring terminal 90 for the database of the vibration detection information transmitted from the relay device or for monitoring the working status of the unmanned carrier.

The unmanned carrier vehicle 70 is equipped with a vibration sensor so as to detect abnormal vibrations generated during driving, and transmits the vibration detection information detected from the vibration sensor to the relay device 80 through wireless communication. Done. In this case, the transmission of the vibration detection information as described above may be continuously performed or periodically performed during the time that the unmanned carrier 70 is traveling in the clean room, or only when abnormal vibration is substantially generated. May be performed. Hereinafter, for convenience of description, the unmanned carrier will continuously transmit the vibration detection information. However, in order to prevent unnecessary power consumption and waste of communication resources, the vibration detection information should be transmitted only when abnormal vibration is substantially generated. It is desirable to. On the other hand, the internal configuration and the external configuration of the unmanned carrier 70 is described in detail with reference to FIGS.

The relay device 80 is for relaying the radio signal. That is, the vibration detection information wirelessly transmitted from the unmanned carrier 70 is received by the relay device 80, and the relay device 80 receives the vibration detection information transmitted as a radio signal from the monitoring terminal 90. To send).

The monitoring terminal 90 is for monitoring the vibration detection information received through the relay device 80, a personal computer (PC) that is currently widely used for office, etc. can be used, but the monitoring as described above The program must be installed in advance, and must be provided with a communication interface to enable communication with the relay device 80. On the other hand, the monitoring terminal 90 is to store the vibration detection information received from the relay device 80 by database for each unmanned vehicle 70, information stored in the database is stored in the monitoring terminal 90 May be unmanned carrier information, time information at which vibration detection information is transmitted, spot mark information at a location where vibration detection information is transmitted, or driving position information of an unmanned carrier.

Referring to Figure 6 describes how to monitor the vibration of the unmanned carrier vehicle in the unmanned conveying system according to the present invention having the above configuration as follows.

First, the unmanned carrier vehicle 70 performs the loading or unloading of a cassette while moving the rail 40 according to a preset work map in the clean room (602).

During the operation, the unmanned transport vehicle 70 continuously transmits vibration detection information (604). In this case, the vibration detection information transmitted includes not only abnormal vibration information generated by the above-mentioned problems but also normal vibration information according to normal work performance. Meanwhile, as described above, the present invention may transmit the vibration detection information only when abnormal vibration information is generated, and the unmanned carrier vehicle 70 may transmit the vibration detection information only when vibration information of a certain limit or more is detected. It may be. In this case, the unmanned carrier 70 transmits not only the vibration detection information but also its identification number, the spot mark information of the position for transmitting the vibration detection information, the transmission date and time, or its own driving position information. Can be.

The vibration detection information wirelessly transmitted by the above process is received through the relay device 80 and then transmitted to the monitoring terminal 90 (606).

The monitoring terminal 90 stores the received information for each unmanned carrier (608).

On the other hand, the monitoring terminal 90 outputs the vibration detection information stored for each unmanned carrier in accordance with the monitoring request signal from the administrator. In this case, the monitoring terminal 90 shows the identification number of the unmanned carrier, the spatter mark information (node) of the position where the vibration detection information is transmitted, the intensity of vibration (Hz), the reception date and time as shown in FIG. It can be provided through the same output screen, the administrator can determine which unmanned vehicle 70 is causing abnormal vibration through the above information, each specific unmanned vehicle to which specific access floor 60 or node ( It is possible to determine whether abnormal vibration is occurring at the node).

That is, the manager can determine whether the unmanned vehicle itself is abnormal through the monitoring results as well as whether or not the specific access floor in the clean room is damaged or not. Car repairs or repairs of damaged access floors are performed in advance.

In this case, the present invention may allow the monitoring terminal 90 to output the monitoring information according to the monitoring request signal of the administrator as described above, but if the abnormality exceeding a predetermined criterion occurs, the information is automatically sent to the administrator. You can also let them know.

That is, when abnormal vibration detection information is transmitted several times or periodically during the driving of a specific unmanned vehicle, the abnormal vibration detection information may be output to an administrator through a warning message, and the specific access floor 60 or node Even when abnormal vibration information is repeatedly received in the unmanned carriers passing through), the above warning message may be output to the manager.

At this time, in the case of an unmanned transport vehicle in which abnormal vibrations are detected throughout the entire section regardless of a specific section, a self-defect occurs, and the manager recovers the unmanned transport vehicle, such as a steering wheel, a traveling motor, and a caster ( In the meantime, the defective parts are replaced beforehand.

In addition, if abnormal vibration detection information is received from all unmanned carriers passing through a specific access floor 60, a node, or a spat mark, a problem such as a step is generated at the specific location, so that an administrator may select the specific location. By checking, do you remove the obstacles that interfere with the driving of the unmanned carrier or replace the access floor (60).

8 is a diagram illustrating an internal configuration of an embodiment of an unmanned carrier vehicle applied to the present invention, and FIG. 9 illustrates an example of mounting a vibration sensor to an unmanned carrier vehicle applied to the present invention. At this time, the unmanned transport vehicle applied to the present invention shown in Figs. 8 and 9 is an improvement for applying the conventional unmanned transport vehicle shown in Fig. 2 to the present invention.

That is, as shown in FIG. 8, the unmanned transport vehicle 70 applied to the present invention has a collision for detecting collision with an input unit 71 for receiving various information from a manager and various facilities in a clean room. Detecting unit 72, vibration detection unit 73 for detecting the abnormal vibration of the unmanned carrier, output unit 74 for outputting various state information, storing a variety of information necessary for driving of the unmanned carrier A storage unit 75 for driving, a steering unit 78 for driving a steering wheel and a robot arm, a controller 76 for controlling the operation of each unit and communication between the units, and the vibration sensing unit And a transmitter 77 for wirelessly transmitting vibration detection information from the controller, and a rail detector 79 for detecting a spot mark of the rail.

The input unit 71 is for receiving various information or control signals from an administrator, and the emergency stop button 35 mentioned in the description of FIG. 2 may be included therein.

The collision detection unit 72 is to prevent the unmanned carrier from colliding with the process equipment or various facilities in the clean room, and various collision detection sensors mentioned in the description of FIG. 2 may be included therein. .

The vibration detection unit 73 is for detecting that the unmanned transport vehicle abnormally vibrates due to an abnormality of the unmanned transport vehicle itself, or the unmanned transport vehicle abnormally vibrates due to the generation of a step of an access floor, and the like. It can be implemented through. In this case, the vibration sensor may be a variety of vibration detection sensors that are currently used in general, as shown in Figure 9, the vibration of the unmanned carrier is the strongest to detect the vibration most accurately It is preferably mounted near the steering wheel, which is the position where it can be.

9 illustrates a state in which the vibration detecting sensor 73-1 is mounted between two adjustment wheels on the front side of the three adjustment wheels of the unmanned transport vehicle 70. That is, (a) and (b) of FIG. 9 show side and front surfaces of the unmanned transport vehicle 70 applied to the present invention, respectively, between two adjustment wheels 78-1 and 78-2 on the front side. Shows a state in which the vibration sensor 73-1 is mounted.

However, the present invention is not limited to that the vibration sensor 73-1 is mounted at the position as described above, so that the vibration sensor is mounted near one adjustment wheel 78-3 on the rear side. It may be mounted on a specific position of the lower surface of the unmanned vehicle, irrespective of the adjustment wheels 78-1, 78-2, 78-3. At this time, the vibration sensor 73-1 is connected to the control unit 76, and transmits the detected vibration information to the control unit 76.

The output unit 74 is for allowing the user to directly check driving information of the unmanned vehicle, and may be implemented as a liquid crystal display (LCD) or the like around the emergency stop button 35.

The storage unit 75 is for storing various types of information for driving of the unmanned carrier, and may store information on the work map as described above, control information for each unit, identification numbers of the unmanned carrier, and the like. have.

The driving unit 78 is for driving the adjusting wheels 78-1, 78-2, 78-3 or the robot arm, and includes the adjusting wheels and a motor.

The transmitter 77 is to wirelessly transmit the vibration detection information transmitted from the vibration detector 73 under the control of the controller 76, and various wireless devices currently used generally may be used.

The rail detector 79 detects the spot mark to determine a moving path of the unmanned carrier, and the controller according to the signal detected by the rail detector 79 and the work map. The 76 controls the number of rotations and the rotational direction of the drive unit 78 to determine the travel path of the unmanned transport vehicle 70. That is, the unmanned carrier stores information about the spar marks disposed on its movement path in the form of the work map, and then determines a driving route by comparing the work map with the spat marks attached to an access floor. will be. In this case, the spot mark may be a magnetic material or the like capable of performing simple communication with the rail detector 79.

Lastly, the controller 76 is to control the respective units, and controls the driving unit by comparing the spot mark information transmitted from the rail detector 79 with the work map information to control the driving route of the unmanned carrier vehicle. When various collision detection information is transmitted from the collision detection unit 72, the driving unit 78 may be controlled to stop driving or turn the driving direction, and from the vibration detection unit 73. The transmitted vibration detection information may be transmitted to the relay device 80 through the transmitter 77 through a wireless network. At this time, the method for transmitting the vibration detection information is executed by the controller in accordance with a program that is set in the storage unit.

That is, when programmed to transmit at any time, the control unit 76 directly transmits the vibration detection information received from the vibration detecting unit 73 through the transmitting unit 77.

In addition, when it is programmed to transmit only when an abnormal vibration of a predetermined value or more occurs, the controller 76 analyzes the vibration detection information received from the vibration detecting unit 73 only when it is determined to be equal to or greater than a predetermined value. The vibration detection information is transmitted through the transmitter 77. That is, since a certain amount of vibration is generated in a general driving process, the controller transmits the corresponding vibration detection information only for the vibration that exceeds the usual vibration.

The unmanned conveying system according to the present invention as described above is to systematically calculate the replacement cycle and maintenance time of the driving shaft motor or the adjusting wheel of the unmanned conveying vehicle by monitoring the abnormal vibration caused by the defect of the unmanned conveying vehicle itself. The effect is that you can.

 In addition, the present invention monitors the abnormal vibration of the unmanned transport vehicle caused by the step of the access floor and the like so that the access floor can be repaired, thereby preventing defects of the unmanned transport vehicle due to the step of the access floor. The effect is that you can.

In addition, the present invention has the effect that it is possible to perform the replacement and repair in advance, so that the entire process line can be maintained continuously, it is possible to efficiently operate the process line.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (6)

An unmanned carrier vehicle equipped with a vibration sensor capable of detecting vibration; A relay device for receiving vibration detection information wirelessly transmitted from the unmanned carrier; And And a monitoring terminal for outputting a database of the vibration detection information transmitted from the relay device, and outputting the vibration detection information and the work status of the unmanned transport vehicle so that an administrator can monitor the vibration detection information. The method of claim 1, The vibration sensor, And an unmanned conveying system mounted on a portion of the lower surface of the unmanned conveying vehicle adjacent to a steering wheel. The method of claim 1, The unmanned carrier, The unmanned sensing device may transmit the vibration sensing information detected from the vibration sensing sensor to the relay device continuously or periodically or wirelessly when a vibration of a predetermined value or more occurs. Conveying system. The method of claim 1, The unmanned carrier, Own identification number, time information on which vibration detection information is transmitted, spot mark information located where vibration detection information is transmitted, driving position information of unmanned vehicle, node information, access floor Floor) Unmanned conveying system, characterized in that for transmitting at least one of the information to the relay device. The method of claim 1, The unmanned carrier, An input unit for receiving various information from an administrator; A collision detector for detecting collision with various facilities in the clean room; Vibration detection unit for detecting the abnormal vibration of the unmanned carrier; An output unit for outputting various state information; A storage unit for storing various kinds of information necessary for driving of the unmanned carrier; A driving unit for driving a steering wheel and a robot arm; A control unit for controlling the operation of each unit and the communication between each unit; A transmission unit for wirelessly transmitting vibration detection information from the vibration detection unit under control of the controller; And Unmanned conveying system including a rail detector for detecting a spot mark of the rail. The method according to any one of claims 1 to 5, The monitoring terminal, When abnormal vibration detection information is transmitted several times or periodically during the driving of a specific unmanned vehicle, an abnormal vibration detection warning message for the unmanned carrier is output or repeatedly in unmanned carriers passing through a specific node. And when abnormal vibration information is received, outputting an abnormal vibration detection warning message for the node.

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