KR100983573B1 - Stalker system and cassette control method - Google Patents

Abstract

The present invention relates to a stocker system for temporarily storing a cassette having a plurality of substrates stored therein before being supplied to respective equipment performing the process, and a method of controlling the cassette when the cassette is received. The present invention is a shelf that accommodates a cassette containing a substrate; Receiving and leaving port provided to unload the cassette from the outside; A stacker that unloads the cassette between the shelf and the storage port and the shipping port; And it is provided in the stocking port, and provides a stocker system comprising a sensor for checking the quality of the alignment of the substrate accommodated in the cassette received from the outside. In addition, the present invention also provides a method of controlling the stocker system to prevent the substrate protruding from the cassette from colliding with the stacker working in the stocker when it enters the stocker.

LCD, Board, Cassette, Stocker, Stacker, Shelf, Protrusion, Board Alignment, Calibration

Description

Stocker system and method for controlling the same for putting a cassette into the same}

1 is an exploded perspective view showing a part of a general liquid crystal display panel;

2 is a schematic diagram for explaining a general cassette conveying system;

3 is a perspective view showing a part of the stocker of the cassette conveyance system of FIG. 2;

4 is a schematic view for explaining a cassette conveying system according to the present invention;

5 is a front view showing the automatic conveying device of FIG.

6a is a schematic plan view of a stocker system according to the invention;

FIG. 6B is a cross-sectional view taken along the line A-A 'of FIG. 6A;

7 is a perspective view schematically showing the stacker of the stocker system of FIGS. 6A and 6B;

8 is a flow chart illustrating an embodiment of a control method of a stocker system according to the present invention;

FIG. 9A is a flow chart illustrating an embodiment of step S 300 in the flow chart of FIG. 8; And

FIG. 9B is a flowchart illustrating another embodiment of step S 300 in the flowchart of FIG. 8.

Explanation of symbols on the main parts of the drawings

101: first host 102: second host

103: third host 104: fourth host

105: fifth host 150: cassette

200: equipment 300: automatic conveying device

400: stalker 401: wearing port

402: delivery port 410: shelf

450: sensor 500: stacker

The present invention relates to an LCD manufacturing equipment, and more particularly, to a stocker system for temporarily storing a cassette containing a plurality of substrates before supplying the equipment to perform the process and a method of controlling the cassette when the cassette is received. It is about.

As the information society develops, the demand for display devices is increasing in various forms. In response to this, various flat panel display devices such as liquid crystal display (LCD), plasma display panel (PDP), electro luminescent display (ELD), and vacuum fluorescent display (VFD) have been studied. It is used as a device.                         

Among them, LCDs, which are excellent in image quality and have advantages of light weight, thinness, and low power consumption, are currently replacing CRTs (Cathode Ray Tubes) for mobile image display devices such as monitors of notebook computers. In addition to the use of the mobile display device described above, the LCD has been developed and spread in various ways such as a monitor of a television and a desktop computer for receiving and displaying broadcast signals.

Such a liquid crystal display may be classified into a liquid crystal panel displaying an image and a driving unit for applying a driving signal to the liquid crystal panel. Herein, the structure of the liquid crystal panel will be briefly described. The liquid crystal panel includes a first and second substrates 1 and 2 and a first and second substrates 1 and 2 bonded together with a space as shown in FIG. 1. , 2) and a liquid crystal layer 3 injected therebetween.

Here, the first substrate 1 (TFT array substrate) includes a plurality of gate lines 4 arranged in one direction at regular intervals and at regular intervals in a direction perpendicular to the respective gate lines 4. A plurality of data lines 5, a plurality of pixel electrodes 6 formed in a matrix form in each pixel region P defined by crossing the gate lines 4 and the data lines 5, and A plurality of thin film transistors T, which are switched by signals of the gate lines 4 and transfer the signals of the data lines 5 to the pixel electrodes 6, are formed.

The second substrate 2 (color filter substrate) includes a black matrix layer 7 for blocking light in portions other than the pixel region P, and R, G, and B (Red) for expressing color colors. , Green, Blue) The color filter layer 8 and the common electrode 9 for realizing an image are formed. Of course, in the transverse electric field type liquid crystal display device, the common electrode is formed on the first substrate.

The liquid crystal display device having the above structure includes a process of manufacturing a thin film transistor array on the first substrate 1, a process of manufacturing a color filter array on the second substrate 2, and a first substrate and a second substrate ( 1, 2) bonding, the process of injecting and sealing the liquid crystal between the two bonded substrates, the process of testing and repairing each liquid crystal panel injected with liquid crystal, and the back of the good liquid crystal panel It is manufactured through a process of manufacturing a liquid crystal display module by mounting a light or the like and a driving circuit.

As described above, the substrate is subjected to the various processes described above to be completed as a liquid crystal display device. However, in order to increase work efficiency at the production site, as illustrated in FIG. 2, equipment 20a and 20b for performing each process on the substrate 1 using an automatic transfer vehicle 30 may be used. I am carrying it in the field. At this time, in order to increase the efficiency of the automatic conveying apparatus 30 conveying the substrate 1, several substrates 1 are stored in one cassette 10 and then the automatic conveying apparatus 30 Is carried.

Thus, the automatic transfer device 30 reciprocates between the stocker 40 temporarily stored with the cassette 10 as shown in FIG. 2 and the equipment 20a and 20b performing the process. The cassette 10 is conveyed from the stocker 40 to the respective equipments 20a and 20b and from each of the equipment 20a and 20b to the stocker 40. To this end, a rail 11 is provided at the bottom of the production line to guide the automatic transfer device 30 to move along a predetermined path.                         

Here, the stocker 40 is provided to effectively solve the buffering problem of the cassette 10 transportation caused by the substrate processing capability and processing time of the equipments 20a and 20b performing the respective processes are different. Will be.

As shown in FIG. 3, the stocker 40 includes a plurality of shelves 41 for storing the cassette 10 and a receiving port 42 for storing the cassette 10 in the stocker 40. A stacker 45 for transporting the cassette 10 while reciprocating between the stocking port, the stocking port, and the shelf for shipping the cassette 10 to the automatic conveying device 30; stacker) is provided.

Here, the shelves 41 are generally arranged in two rows, and a rail 44 for guiding the movement of the stacker 45 is provided between the rows. Therefore, when a cassette conveying command is transmitted to the stacker 45, the stacker 45 loads the cassette 10 in the receiving port 42 and the leaving port 43 or the shelf 41. It will then move along the rail 44 to the destination and unload the cassette 10 to the goods receipt and delivery ports 42, 43 or the shelf 41 at the destination.

When the stocker 40 is provided as described above, the cassette 10 containing the substrate processed by any one device is stored in the stocker 40, and the cassette 10 stored in the stocker 40 is transferred to another equipment. Because of this, the buffering problem can be effectively solved.

By the way, in the process of automatically conveying a cassette using the cassette conveyance system, the substrate often protrudes from the cassette 10 without maintaining the state correctly stored in the cassette 10. This is because the substrate is pushed out together with the robot arm when the robot arm stores the substrate in the cassette 10 and then exits from the cassette 10, or the cassette 10 is unloaded by the automatic transfer device 30 or the like. The substrate is caused by various causes such as the substrate being pushed out of the cassette 10 due to vibration and shock generated when being transported.

In this case, when the stacker 45 works in the stocker 40, the arm of the stacker 45 collides with the substrate accommodated in the cassette 10, thereby causing the substrate to be broken. This not only causes debris of the broken substrate to adhere to other substrates, leading to defective products, but also creates a problem of significantly lowering productivity because the conveying system must be stopped and cleaned.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problem, and is intended to prevent damage to the stacker working in the stocker when the substrate protruding from the cassette is received in the stocker.

In one embodiment of the present invention for achieving the above object, a shelf that accommodates a cassette containing a substrate; Receiving and leaving port provided to unload the cassette from the outside; A stacker that unloads the cassette between the shelf and the storage port and the shipping port; And it is provided in the stocking port, and provides a stocker system comprising a sensor for checking the alignment status of the substrate accommodated in the cassette received from the outside.

Here, the sensor may be provided at at least one of the upper, lower, and side portions of the wearing port. Then, the sensor checks whether the substrate protrudes beyond the tolerance range from the cassette.

The wearing port may include a wearing point at which the cassette received from the outside is seated, an access point at which the stacker unloads the cassette, and a lower portion of the receiving port, and the shipping point and the access point are provided. It may comprise a conveyor for carrying the cassette. Here, the sensor may be provided at the wearing point or the access point.

On the other hand, in another aspect of the present invention for achieving the above object, if the cassette is accommodated in the receiving port, the sensor provided in the receiving port to check the substrate alignment state accommodated in the cassette (S 100); Comparing the checked data with a preset tolerance range to determine whether the substrate is aligned (S 200); (c) correcting the alignment state of the substrate accommodated in the cassette when the alignment state of the substrate is poor (S 300); And (d) if the alignment of the substrate is good provides a control method of the stocker system at the time of wearing the cassette comprising the step (S 400) the stacker accommodates the cassette on the shelf.

Here, the step (S 300), (S 311) stopping the stacker when the alignment state of the substrate is poor, and (S 312) correct the alignment state of the substrate in the state that the cassette is accommodated in the receiving port It can be done including the step.                     

On the other hand, in the step (S 300), if the alignment state of the (S) substrate is poor, moving the cassette so as to be accessible from the outside, (c21) correcting the alignment state of the substrate from the outside, and and (c31) repositioning the cassette on which the substrate is aligned to the receiving port.

DETAILED DESCRIPTION Hereinafter, embodiments of the present invention in which the above object can be specifically realized are described with reference to the accompanying drawings. In describing the embodiments, the same names and symbols are used for the same components, and additional description thereof will be omitted below.

First, the cassette conveying system to which the stocker system according to the present invention is applied will be described with reference to FIG.

The first host 101 is an uppermost host that receives from the operator a conveyance command for moving the cassette 150. When a worker inputs a return command to the first host 101, the first host 101 transmits the return command to the second host 102 and the third host 103.

The second host 102 communicates with the first host 101 and the third host 103 and controls the equipment 200 to perform any process. The return command sent from the first host 101 to the second host 102 is transmitted to the equipment 200.

The third host 103 communicates with the first host 101 and the second host 102 and controls the fourth host 104 and the fifth host 105. The return command transmitted from the first host 101 to the third host 103 is transmitted to the fourth host 104 and the fifth host 105.                     

The fourth host 104 communicates with the third host 103 and controls the operation of the automatic guided vehicle 300. Of course, the transfer command received by the fourth host 104 is transmitted to the automatic transfer device 300.

The fifth host 105 communicates with the third host 103 and controls a stocker 400 that stores a plurality of cassettes 150 on which a plurality of glasses are mounted. Of course, the return command received at the fifth host 105 is transmitted to the stocker 400.

Meanwhile, the automatic conveying apparatus 300 controls the cassette 150 from the equipment 200 to the receiving port 401 of the stocker 400 and the stocker under the control of the fourth host 104. It returns to the other equipment 200 from the delivery port 402 of 400. FIG. Here, the fourth host 104 controls at least one or more automatic conveying apparatuses 300, and each of the automatic conveying apparatuses 300 is provided to the automatic conveying apparatus 300 according to the command of the fourth host 104. A controller for controlling each component of the device is provided.

As shown in FIG. 5, the automatic conveying apparatus 300 travels a predetermined section under a control of the controller, and according to a guide of a rail (not shown) provided at the bottom of the production line. And, it is provided on one side, for example, the upper portion of the traveling portion 310, and comprises a mounting portion 320 on which the cassette 150 is loaded. Here, a plurality of wheels 311 driven by the driving motor is provided at the lower end of the driving unit 310.

In addition, the mounting unit 320 is provided with a guide block 321 for guiding the cassette 150 to be accurately mounted and fixing the mounted cassette 150 so as not to move when the traveling unit 310 is moved. .

Meanwhile, the automatic conveying apparatus 300 may further include an arm 330 for loading and unloading the cassette 150 to the mounting unit 320. Here, the arm 330 is mounted on the upper portion of the running portion 310 and the main shaft 331 that can move or rotate in the vertical direction, and the slider mounted on the main shaft 331 can be stretched in the horizontal direction 335.

When the arm 330 is provided in the automatic conveying apparatus 300 as described above, the automatic conveying apparatus 300 may draw the cassette 150 in the equipment 200 and the delivery port 402 of the stocker 400. The loading unit 320 may be directly loaded or the cassette 150 loaded on the mounting unit 320 may be unloaded to the receiving port 401 of the equipment 200 and the stocker 400.

However, the arm 330 is not provided in the automatic conveying apparatus 300, and a separate arm may be provided in the vicinity of the stocker 400 and the equipment 200 to load or unload the cassette 150. something to do.

On the other hand, the automatic conveying device 300, when conveying the cassette 150, it should be able to be located exactly in front of the storage port 401 and the storage port 402, or the equipment 200 of the stocker (400).

To this end, the automatic conveying apparatus 300 is provided with a first sensor 340 as shown in FIG. 5, and the equipment 200 and the stocker 400 are provided with a mark plate 250 as shown in FIG. 4. , 405 is provided. In this case, the first sensor 340 reads the mark plates 250 and 405 so that the automatic conveying device 300 receives the receiving port 401 and the leaving port 401 of the equipment 200 or the stocker 400. 402) to help position them correctly.

In addition, the automatic conveying device 300 accurately positioned in front of the equipment 200 or stocker 400 and the equipment 200 or stocker 400 so as to smoothly and accurately load and unload the cassette 150. Must be able to communicate

To this end, the automatic conveying apparatus 300 is further provided with a second sensor 350 to communicate with the equipment 200 or the stocker 400 and to help the accurate unloading operation as shown in FIG.

Meanwhile, before the stocker 400 supplies the cassettes 150 on which the substrates of which process is completed to other equipment that performs the next process, the substrate processing capability and the processing time of the equipments that perform each process. In order to solve the buffering (buffering) problem caused by the difference of the, is a facility for temporarily storing the cassette 150. Therefore, the cassettes 150 on which substrates which have been finished in a certain process are mounted are temporarily stored in the stocker 400 and then supplied to other equipment which performs another process.

The stocker 400, which performs the above function, includes a plurality of shelves 410 in which the cassettes 150 are stored, and a stacker 500 that unloads the cassette 150 in the stocker 400. ) Is provided.                     

Here, the shelves 410 are arranged in a plurality of rows with a predetermined interval from each other, for example, two may be provided and arranged side by side with each other. Each shelf 410 is provided with a plurality of storage spaces 411 for storing one cassette 150.

In addition, the shelf 410 has a receipt port 401 and a delivery port 402, which can be unloaded from the cassette 150 by the automatic conveying apparatus 300 as shown in FIG. 6A. It is provided.

When the goods receipt port 401 and the goods release port 402 are provided as described above, the automatic conveying apparatus 300 stocks the cassette 150 containing the substrate processed by the equipment 200 through the goods receipt port 401. The cassette 150 stored in the stocker 400 or stored in the stocker 400 may be shipped to the outside through the delivery port 402.

However, here, the receipt port 401 and the delivery port 402 are provided with two points, respectively, as shown in FIG. 6A. In more detail, in the case of the goods receipt port 401, the goods receipt point 401a for the automatic conveying device 300 to approach the outside to wear the cassette 150 and the stacker 500 approach the cassette ( An access point 401b for unloading 150 is provided. In addition, in the case of the delivery port 402, the stacker 500 approaches and unloads the cassette 150, and the automatic conveying apparatus 300 approaches the cassette 150 from the outside. A shipping point 402a to be shipped is provided.

The goods receipt port 401 and the goods delivery port 402 are each provided with a conveyor (not shown), which conveys the cassette 150 seated at the goods receipt point 401a to the access point 401b. The cassette 150 seated on the access point 402b is transferred to the delivery point 402a. Here, as shown in FIG. 6A, the conveyor can easily store the cassette 150 on the shelf 410 or unload the cassette 150 to the port 401 or the warehouse. It may be rotated about 90 degrees within the port 402.

On the other hand, in the stocker 400 according to the present invention, the receiving port 401 is provided with a sensor 450 to determine whether the substrate in the cassette 150 is projected to the outside. The sensor 450 is provided on at least one of the upper, lower, and side portions of the receiving port 401, and checks whether the substrate is accommodated in the cassette 150. Examples of installation and operation of such a sensor 450 are as follows.

The sensor 450 may include a light emitting unit and a light receiving unit. In this case, one of the light emitting unit and the light receiving unit may be disposed above the access point 401b of the receiving port 401, and the other may be the access point. It may be provided at the bottom of the (401b). Of course, the light emitting unit and the light receiving unit may be provided at the wearing point 401a, respectively.

When the substrate is completely stored in the cassette 150, the light emitted from the light emitting part reaches the light receiving part. Therefore, when the amount of light transmitted to the light receiver is greater than or equal to a preset reference value, the controller (not shown) controlling the stocker 400 determines that the substrate alignment state in the cassette 150 is good.

On the other hand, when some substrates protrude from the cassette 150, the light emitted from the light emitting portion may not reach the light receiving portion by the protruding substrate. Accordingly, the amount of light transmitted to the light receiving unit is less than or equal to the set reference value, and accordingly, the controller determines that the substrate is in poor alignment because some substrates protrude beyond the tolerance range.

However, the structure of the sensor 450 is not limited to the above, and it is sufficient to have a structure capable of measuring whether an object, ie, a substrate, exists at a specific position, that is, a position outside the tolerance range of the protrusion of the substrate.

Meanwhile, the shelf 410 may be further provided with a passive port 403 as shown in FIG. 6A, in addition to the storage space 411, the receiving port 401, and the leaving port 402. The manual port 403 is for when an error occurs in the conveying system, the operator can put the cassette 150 into the stocker 400 through the manual port 403 or can be shipped to the outside of the stocker 400. .

On the other hand, the stacker 500 is disposed between the shelves 410, the cassette 150 while traveling between the storage port 401 and the storage port 402, and the storage space 411 of the shelf 410 Unloading. An example of such a stacker 500 is well illustrated in FIG. 7. Hereinafter, the stacker 500 will be described in more detail with reference to the stacker 500.

As shown in FIG. 7, the stacker 500 includes a traveling part 510 for reciprocating along a rail 420 disposed between shelves 410, and an arm 520 for unloading a cassette 150. And, and comprises a crane 530 for moving the arm 520 in the vertical direction.                     

First, the driving unit 510 is provided with a driving wheel 511 installed to engage the rail 420, as shown in Figure 6b and 7, the driving wheel 511 is a driving motor (not shown) Rotation force is received by the pulley (not shown) and the timing belt (not shown) to rotate.

The arm 520 is provided at the upper portion of the driving unit 510, and the cassette 150 is unloaded to the shelf 410, the storage port 401, and the delivery port 402 in the stocker 400. .

This, the arm 520 is a horizontal linear motion to move forward or backward toward the shelf 410 while the length is stretched, a rotary motion to rotate in a horizontal position, and a vertical linear motion to move up and down by the crane 530 can do.

To this end, the arm 520 has a multi-joint structure that can be unfolded or folded, and can rotate about the axis of the motor 521 of FIG. 6B in a folded state. Thus, the arm 520 may unload the cassette 150 by accessing both shelves 410 located at both sides of the stacker 500.

On the other hand, the crane 530 is built on the running portion 510 serves to move the arm 520 up and down. To this end, the crane 530 is provided with a motor (not shown), a sprocket 531, a chain 533, and a shaft 535.

Here, the shaft 535 is vertically erected on the running portion 510, one side of the arm 520 is slidably coupled. The sprocket 531 is connected to the motor of the crane 530 by a chain 533 and rotates, and the arm 520 is connected to the chain 533.                     

Accordingly, when the motor of the crane 530 rotates, the chain 533 moves according to the guide of the sprocket 531, and the arm 520 is raised or lowered accordingly. In this case, the shaft 535 guides the lifting movement of the arm 520 stably.

On the other hand, the following describes a process in which the cassette 150 is conveyed by the cassette conveying system to which the stocker system according to the present invention having the above structure is applied. In addition, the method according to the present invention for controlling the stocker system when the cassette 150 is received in the stocker 400 will be described together.

First, when an operator confirms the ID of the cassette 150 to be conveyed and then inputs a conveyance command of the cassette 150 to the first host 101, the first host 101 transmits the second host. The transfer command is issued to 102 and the third host 103.

The second host 102 having received the return command forwards it to the equipment 200, and the third host 103 forwards it to the fourth host 104 and the fifth host 105. In addition, the fourth host 104 transmits the conveyance command to the automatic conveyance device 300, and the fifth host 105 transmits the conveyer command to the stocker 400.

The stocker 400 receiving the conveyance command instructs the stacker 500 to unload the cassette 150 stored in the storage space 411 and transport the cassette 150 to the delivery port 402. Then, the driving unit 510 of the stacker 500 moves along the rail 420 to a position where the corresponding storage space 411 is located.

In addition, the crane 530 moves the arm 520 vertically to the position of the storage space 411 in which the cassette 150 is stored, and if necessary, the arm 520 has a corresponding storage space 411. Rotate to look at the shelf (410).

When the arm 520 is disposed in front of the storage space 411 in which the cassette 150 is stored, the arm 520 is unfolded and the cassette 150 is loaded on the arm 520. When the cassette 150 is loaded, the arm 520 is folded, and the driving unit 510 moves to the delivery port 402 along the rail 420.

When the stacker 500 reaches the delivery port 402, the crane 530 lowers the arm 520, and the arm 520 moves the cassette 150 to the access point 402b of the delivery port 402. Unload on.

Then, as shown in FIG. 6A, the cassette 150 is rotated by the conveyor (not shown) and then transferred to the delivery point 402a, and the automatic conveying device that receives the conveying command from the fourth host 104 ( 300 moves in front of the delivery port 402 of the stocker 400 and loads the cassette 150 placed at the delivery point 402a into the mounting unit 320.

In this case, the automatic conveying device 300 is correctly positioned in front of the delivery port 402 with the help of the first sensor 340, the cassette 150 is received with the help of the second sensor 350. The loading unit 320 is loaded.

Then, the automatic conveying apparatus 300 loading the cassette 150 from the delivery port 402 moves to the equipment 200 and supplies the cassette 150 to the equipment 200.

On the other hand, the cassette 150 containing the substrate that passed through any process in the equipment 200 is received in the stocker 400 again before being transported to another equipment to perform the next process. To this end, the fourth host 104 issues a conveyance command to the automatic conveying apparatus 300, and after the automatic conveying apparatus 300 loads the cassette 150 from the equipment 200, the stocker 400. Go to the receiving port (401).

The automatic conveying apparatus 300 stopped in front of the receiving port 401 unloads the cassette to the receiving point 401a of the receiving port 401. (S 10) The cassette 150 received at the receiving point 401a. ) Is transported by the conveyor to the access point 401b, and rotates about 90 degrees in the access point 401b.

Then, the sensor 450 provided in the receiving port 401 checks the alignment state of the substrate accommodated in the cassette 150. For this purpose, for example, as described above, the light emitting part of the sensor 450 emits light toward the light receiving part.

At this time, if the substrate is well aligned in the cassette 150, a large amount of light is input to the light receiving portion. However, when the substrate is poorly aligned, such as some substrates protruding from the cassette 150, a small amount of light or no light is input to the light receiving unit.

Therefore, the controller of the stocker 400 determines whether the substrate is aligned, based on the information checked by the sensor 450. In this case, the controller compares the checked information with a preset tolerance range.

To this end, the control unit compares, for example, a voltage converted to correspond to the intensity of light input to the light receiving unit with a voltage range corresponding to a preset tolerance range of a substrate, so that the voltage corresponds to the voltage range. If it belongs to the alignment state of the substrate is good, if the voltage is out of the voltage range, it is determined that the alignment state of the substrate is poor.

On the other hand, if the alignment state of the substrate is poor as a result of the determination, as shown in Figure 8, the alignment state of the substrate accommodated in the cassette 150 is corrected. Here, the alignment state of the substrate may be calibrated immediately in the receiving port 401 or after being drawn out of the stocker 400. Hereinafter, each example will be described.

First, the case where the substrate is aligned in the receiving port 401 will be described. If the controller determines that the substrate is in poor alignment, the controller stops the stacker 500 working in the stocker 400. (S 311) At this time, an alarm may be generated so that an operator may easily know.

When an alarm occurs and the stacker 500 stops, the worker enters the stocker 400 and corrects the substrate alignment of the cassette 150 in the receiving port 401. (S 312) Alignment of the substrate is performed manually, as described above, but may be automatically performed without being limited thereto. In this case, the receiving port 401 should be provided with a separate calibration arm that can stand in the vertical direction and can push the substrate into the cassette 150 while advancing toward the cassette 150.

On the other hand, when the alignment of the substrate is completed, the operator releases the error alarm occurred in the stocker 400 and operates the stacker 500 normally.

Next, the case where the substrate is aligned outside the receiving port 401 will be described. If the controller determines that the substrate is in poor alignment, the cassette 150 is moved to a position accessible from the outside. (S321) As described above, the cassette 150 may be accessed from the outside by the manual port 403 and the delivery port 402.

Therefore, for this purpose, the control unit controls the stacker 500 to access the cassette 150 in the access point 401b of the receiving port 401 and the access point 402b of the manual port 403 or the leaving port 402. Move to).

On the other hand, in addition to the manual port 403 and the shipping port 402, the receiving port 401 can also be accessed from the outside. In this case, therefore, the conveyor may move the cassette 150 from the access point 401b to the wearing point 401a.

When the cassette 150 is moved to a position accessible from the outside as described above, the operator corrects the alignment state of the substrate from the outside. (S 322) On the other hand, when the sensor 450 is provided at the receiving point 401a of the receiving port 401, an operator directly touches the substrate of the cassette 150 from the outside without moving the cassette 150. You can sort.

Once the substrate is aligned, the cassette 150 is reloaded into the access point 401b of the receiving port 401 by the stacker 500 or the conveyor. (S 323)

On the other hand, there can be a variety of methods for correcting the alignment of the substrate as described above. By the way, when the alignment state of the substrate is poor, when the cassette 150 is moved to the stacker 500 or the conveyor, there is a possibility that the substrate that protrudes to the outside may be damaged. Therefore, when the alignment of the substrate is poor, it would be more desirable to stop the operation of the stocker system, correct it, and then resume the operation.                     

When the substrate is aligned by the above method, the sensor 450 checks the alignment state of the cassette 150 again, and when the alignment state of the substrate is good, the stacker 500 moves to the receiving port 401. Then, after unloading the cassette 150 at the access point 401b, the cassette 150 is moved along the rail 420, and finally, the cassette 150 is stored in the storage space 411 of the designated shelf 410.

Meanwhile, the present invention is not limited thereto, and when the substrate is aligned, the stocker system is immediately restarted, and the stacker 500 is loaded at any one of the receiving port 401, the leaving port 402, or the manual port 403. Unloaded cassette 150 may be unloaded and stored on shelf 410.

Although several embodiments have been described above, it will be apparent to those skilled in the art that the present invention may be embodied in many other forms without departing from the spirit and scope thereof.

Accordingly, the described embodiments are to be considered as illustrative and not restrictive, and all embodiments within the scope of the appended claims and their equivalents are included within the scope of the present invention.

As described above, according to the stocker system and the control method thereof, it is possible to prevent the substrate from being stored in the shelf while protruding from the cassette. Therefore, it is possible to prevent the stacker's arm and the protruding substrate from colliding when the stacker is working in the stocker. Therefore, it is possible to effectively prevent the breakage of the substrate and the contamination of other substrates by the broken substrate pieces, and thus the occurrence of defective products and the decrease in productivity.

Claims (9)

A shelf accommodating a cassette containing a substrate; Receiving and leaving port provided to unload the cassette from the outside; A stacker that unloads the cassette between the shelf and the storage port and the shipping port; And And a sensor provided at the receiving port and checking whether the substrate is aligned in the cassette received from the outside. The method of claim 1, The sensor, the stocker system, characterized in that provided in at least one of the upper, lower, and side portions of the receiving port. The method according to claim 1 or 2, And the sensor checks whether the substrate protrudes from the cassette beyond the tolerance range. The method according to claim 1 or 2, The wearing port is A wearing point at which the cassette is received from the outside, An access point for the stacker to unload the cassette, and And a conveyor provided at a lower portion of the receiving port, the conveyor carrying the cassette while traveling between the receiving point and the access point. The method of claim 4, wherein The sensor is a stocker system, characterized in that provided in the wearing point. The method of claim 4, wherein The sensor is provided with the stocker system, characterized in that the access point. When the cassette is accommodated in the storage port, the sensor provided in the storage port checks the alignment state of the substrate stored in the cassette (S 100); Comparing the checked data with a preset tolerance range to determine whether the substrate is aligned (S 200); (c) correcting the alignment state of the substrate accommodated in the cassette when the alignment state of the substrate is poor (S 300); And (d) a stacker storing the cassette on a shelf when the substrate is in a good alignment state (S 400). The method of claim 7, wherein The (S 300) step, (S 311) stopping the stacker if the substrate is in poor alignment, and (S 312) A control method of the stocker system when the cassette is received, comprising the step of correcting the alignment of the substrate in a state that the cassette is stored in the receiving port. The method of claim 7, wherein The (S 300) step, (S 321) if the alignment state of the substrate is poor, moving the cassette so as to be accessible from the outside, (S 322) correcting the alignment of the substrate from the outside, and (S 323) Control method of the stocker system when receiving the cassette comprising the step of placing the cassette aligned the substrate back to the receiving port.

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