KR101085454B1 - Transferring System Having Airtight Cassette - Google Patents

Abstract

A hermetic cassette transfer system is disclosed. The sealed cassette transfer system of the present invention includes a plurality of shelf portions on which substrates are stacked, at least one fan filter unit for purifying air in an internal space in which the plurality of shelf portions are disposed, and at least one A hermetic cassette having a rack pick-up terminal and a stocker pick-up terminal which are electrically connected to the fan filter unit for supplying power to the fan filter unit; A stocker device having a stocker power supply terminal which contacts the stocker pick-up terminal during loading of the closed cassette and supplies power to the stocker pick-up terminal, and transfers the closed cassette; And a plurality of cassette shelves each having a sealed cassette loaded and stored therein, and a rack power supply terminal which is provided on each of the plurality of cassette shelves and contacts the pickup pickup for the rack and supplies power to the pickup pickup terminal when the sealed cassette is loaded. Characterized in that it comprises a. According to the present invention, while maintaining the cleanliness of the cassette internal space in which the substrate is stored at the required cleanliness, the maintenance cost and installation cost of the entire clean room can be significantly reduced as compared with the prior art.

Cassette, Transfer System, Cleanliness, Fan Filter Unit, Opening and Closing Door Unit, Substrate, LCD

Description

Transferring System Having Airtight Cassette

The present invention relates to a hermetic cassette conveying system, and more particularly, to maintain the cleanliness of the cassette internal space in which the substrate is stored to the required cleanliness, while significantly reducing the maintenance cost and installation cost of the entire clean room as compared with the prior art. To a closed cassette transfer system.

The cassette transfer system refers to an overall system for transferring a cassette in which a plurality of substrates are stacked and stored. The substrate may be a liquid crystal display (LCD) substrate, a plasma display panel (PDP) substrate, an organic light emitting diodes (OLED) substrate, or the like, or may be a semiconductor wafer. However, for convenience of explanation, hereinafter, the LCD substrate will be described as a substrate.

As is widely known, an LCD substrate injects a liquid crystal, which is an intermediate material between a solid and a liquid, between two thin upper and lower glass substrates, and generates contrast by changing the arrangement of liquid crystal molecules by the electrode voltage difference of the upper and lower glass substrates. It is a device using a kind of optical switch phenomenon to display. LCD substrates are now widely used in various display devices such as electronic clocks, electronic calculators, TVs, notebook PCs, electronic products, automobiles, aircraft speed displays, and driving systems.

On the other hand, in order for an LCD substrate to be actually used in the above-described display apparatus, it must go through a number of processes, which are performed in a clean room in which a certain degree of cleanliness is maintained.

In such a clean room, a cassette transport system for storing or transferring cassettes in which a plurality of LCD substrates are stacked and stored is provided. In the cassette transfer system, the cassette transfers several substrates at once, thereby improving the transfer efficiency of the substrate.

Cassette conveying systems generally include a cassette in which a plurality of substrates are stored, a rack in which a plurality of cassettes are stored, and a stocker device for transporting cassettes onto or out of a cassette. . By such a configuration, the storage and transfer efficiency of the LCD substrate can be improved.

However, in the case where fine particles, dust, etc. exist in a space where the LCD process proceeds, that is, in a clean room, the LCD process is generally clean because a fatal defect may occur during the LCD process on the substrate. It should be managed in a clean environment of class 10 or less, and therefore, each device of the cassette transport system should also be made of devices capable of maintaining cleanness class 10 or less. Here, class 10, which is a numerical value representing cleanliness, represents the number of particles in a unit space, and the numerical value and the pollution degree of the clean room are proportional to each other.

Therefore, in order to maintain the overall cleanliness of the clean room below class 10, a plurality of air purifiers must be installed in various parts of the clean room as well as a stocker device for transferring and taking out cassettes or a rack for storing cassettes. Various devices installed or operated in the clean room, including the clean room, must be designed and manufactured to maintain such cleanliness.

Therefore, there is a need for the development of a cassette having a new structure and a transfer system having the same structure, which can reduce the cost of installation and maintenance of a clean room.

It is an object of the present invention to provide a hermetic cassette conveying system which can maintain the cleanliness of the cassette internal space in which a substrate is stored at the required cleanliness while significantly reducing the maintenance and installation costs of the entire clean room as compared with the prior art.

The object is, according to the present invention, a plurality of shelf units on which the substrate is loaded, at least one fan filter unit for purifying air in the internal space in which the plurality of shelf units are arranged, and the at least A hermetic cassette including a rack pick-up terminal and a stocker pick-up terminal which are electrically connected to the fan filter unit to supply power to one fan filter unit; A stocker device having a stocker power supply terminal that contacts the stocker pick-up terminal when the closed cassette is loaded to supply power to the stocker pick-up terminal, and transfers the closed cassette; And a plurality of cassette shelves each of which the sealed cassettes are loaded and stored, and a plurality of cassette shelves respectively provided on the plurality of cassette shelves and contacting the pickup pickup terminals for supplying power to the rack pickup terminals when the sealed cassettes are loaded. It is achieved by a hermetic cassette conveying system, characterized in that it comprises a rack having terminals.

Here, the first access detection sensor provided in the rack, for detecting the access to the rack of the sealed cassette loaded in the stocker device; And a controller configured to turn off the power supply to the stocker power supply terminal of the stocker device based on the information detected by the first access sensor.

The rack may further include a seating detection sensor for each rack provided on the cassette shelf to detect the seating of the sealed cassette.

A second access sensor provided in the rack, the second approach detecting sensor detecting the approach of the stocker device when the stocker device approaches the rack to unload the sealed cassette loaded on the cassette shelf; The controller may turn off the power supply to the rack power supply terminal of the rack based on the information detected by the second access sensor.

The stocker device may further include a stocker detecting sensor for detecting the seating of the sealed cassette.

The hermetic cassette may be provided adjacent to the fan filter unit and further include an auxiliary power supply for selectively supplying power to the fan filter unit.

The sealed cassette includes: a housing having a rack pickup terminal and a stocker pickup terminal at a lower surface thereof, and a plurality of shelf parts spaced apart from each other in a height direction in an inner space; And an open / close door unit coupled to an open side of the housing to selectively open or shield an inner space of the housing, wherein the at least one fan filter unit is adjacent to the plurality of shelves. Can be coupled to.

The lower surface of the housing is provided with a first installation groove and a second installation groove recessed from the surface, the pick-up terminal for the stocker is installed on the inner side of the first installation groove and the pickup terminal for the rack is the second installation groove It may be installed on the inner side of the.

The first installation groove may be provided on the lower surface of the housing more inward than the second installation groove.

The opening and closing door unit is detachably coupled to the housing, the opening and closing door for selectively opening or shielding the inner space of the housing; And it may include a drive motor for generating a driving force for opening or closing the opening and closing door.

The open door may be provided with a shutter of a sliding type to adjust the opening degree of the inner space of the housing.

The stocker device may include a stocker body disposed adjacent to the rack and movable along the ground; And a fork coupled to the stocker body so as to move up and down, the fork handling the sealed cassette to load the sealed cassette on the rack or to unload the sealed cassette from the rack. The power supply terminal may be provided to protrude from the top surface of the fork.

In addition, the above object, according to the present invention, a plurality of shelf parts for each loading the substrate in the inner space is arranged to be spaced apart from each other in the height direction, one side is equipped with at least one fan filter unit for purifying the air in the inner space A housing; A stocker pick-up terminal provided in the housing and electrically connected to a stocker power supply terminal provided in the stocker device to supply power to the fan filter unit when the housing is loaded into the stocker apparatus for transporting the substrate; And a rack pick-up terminal provided in the housing and electrically connected to a rack power supply terminal provided in the cassette shelf to supply power to the fan filter unit when the housing is loaded into the cassette shelf of the rack each storing the housing. Also achieved by a sealing cassette, characterized in that it comprises a.

Here, the detachable coupling to the housing, and may further include an auxiliary power supply for selectively supplying power to the fan filter unit.

The lower surface of the housing is provided with a first installation groove and a second installation groove recessed from the surface, the pick-up terminal for the stocker is installed on the inner side of the first installation groove and the pickup terminal for the rack is the second installation groove It may be installed on the inner side of the.

The first installation groove may be provided on the lower surface of the housing more inward than the second installation groove.

It is coupled to the open one side of the housing further comprises an opening and closing door unit for selectively opening or shielding the inner space of the housing, wherein the at least one fan filter unit is adjacent to the plurality of shelf parts of the other side of the housing Can be coupled to.

In addition, the above object, according to the present invention, a plurality of shelf housings each for loading a substrate in the inner space cassette housing disposed to be spaced apart from each other in the height direction; The cassette housing is disposed therein, one side of the housing for mounting at least one fan filter unit for purifying the air in the internal space; The stocker is provided in the hermetic housing, and the hermetic housing is electrically connected to a stocker power supply terminal provided in the stocker device to supply power to the fan filter unit when the hermetic housing is loaded into the stocker device for transporting the substrate. Pickup terminal; And a power supply terminal for a rack provided in the cassette shelf to supply power to the fan filter unit when the sealing housing is loaded into a cassette shelf of a rack for storing the sealing housing, respectively. It is also achieved by a sealed cassette characterized in that it comprises a pickup terminal for the rack connected to.

According to the present invention, while maintaining the cleanliness of the cassette internal space in which the substrate is stored to the required cleanliness, it is possible to significantly reduce the maintenance cost and installation cost of the entire clean room as compared with the conventional.

In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings which illustrate preferred embodiments of the present invention and the contents described in the accompanying drawings.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference numerals in the drawings denote like elements.

Prior to the drawings, the substrate stored in the hermetic cassette of the present invention may be a liquid crystal display (LCD) substrate, a plasma display panel (PDP) substrate, an organic light emitting diodes (OLED) substrate, or the like. It may also be a wafer. However, for convenience of description, in the following embodiment, the LCD substrate will be described as a substrate.

1 is a view for explaining the overall configuration of the sealed cassette conveying system according to an embodiment of the present invention, Figure 2 is a partial enlarged view of the cassette showing the state of the sealed cassette is loaded on the cassette shelf of the rack. 3 is a perspective view of the hermetic cassette shown in FIG. 1, FIG. 4 is a perspective view of the hermetic cassette shown in FIG. 3 viewed from another direction, and FIG. 5 is a view of the gap between the hermetic cassette shown in FIG. 1 and the fork of the stocker device. 6 is a view for explaining the coupling relationship, Figure 6 is a view for explaining the internal structure of the sealed cassette shown in FIG.

As shown in these figures, the hermetic cassette conveying system 1 according to an embodiment of the present invention is a hermetic type for storing a plurality of substrates G (see FIG. 6) in an environment of cleanness class 10 or less. A rack 70 having a cassette 10, a plurality of cassette shelves 71 on which the sealed cassette 10 is seated and supported, and loading the sealed cassette 10 with the cassette shelf 71. Or a stocker device 80 for unloading the hermetic cassette 10 from the rack 70.

First, the rack 70 in which the sealed cassette 10 is stacked in the height direction will be described. As shown in FIG. 1, the rack 70 according to the present embodiment has both sides of the stocker device 80 interposed therebetween. Is provided in, due to this structure can be stored a plurality of closed cassette 10 can increase the storage efficiency of the sealed cassette (10).

The rack 70 includes a plurality of cassette shelves 71 into which the sealed cassette 10 is loaded. The upper surface of the cassette shelf 71 supplies power to the fan filter unit 30 of the sealed cassette 10 to be described later. Rack power supply terminals 73 (see Fig. 2) for supplying are provided respectively. Therefore, when the sealed cassette 10 is loaded on the cassette shelf 71, the rack power supply terminal 73 contacts the rack pickup terminal 13 of the sealed cassette 10, which will be described later, and thus, the controller (not shown). When power is supplied from the power supply terminal 73 for the rack to the fan filter unit 30 of the hermetic cassette 10, the fan filter unit 30 of the hermetic cassette 10 can be driven, and thus the hermetic cassette 10 Cleanliness in the housing 11 can be maintained at class 10 or less.

Meanwhile, as described in detail with reference to FIGS. 1 and 5, the stocker device 80 includes a stocker body 81 and a stocker body 81 provided to be movable in a horizontal direction along a rail (not shown) formed on the ground. A fork 82 coupled to the elevating cassette for handling the closed cassette 10 for loading the closed cassette 10 to the cassette shelf 71 or for removing the sealed cassette 10 from the cassette shelf 71. And a stocker power supply terminal 84 for supplying power to the fan filter unit 30 of the sealed cassette 10 which is provided to protrude on the upper end surface of the fork 82.

By such a configuration, the sealed cassette 10 loaded on the fork 82 can be easily loaded (loaded) on the selected cassette shelf 71 or unloaded (taken out) from the cassette shelf 71. However, the stocker device 80 continues to the fan filter unit 30 of the hermetic cassette 10 so that the inside of the housing 11 of the hermetic cassette 10 can maintain the cleanliness of class 10 even during the transfer operation. Can supply power. However, at this time, the power supply of the stocker device 80 to the hermetic cassette 10 is controlled by a controller (not shown), which will be described later in detail.

On the other hand, the internal environment of the hermetic cassette 10 for storing the substrate (G) as described above should be maintained below the cleanliness class 10. Thus, conventionally, in order to maintain such an environment, a method of maintaining a space formed by the clean room by using a plurality of air purifiers in the clean room itself to a cleanness class 10 or less has been applied. However, in order to maintain the whole clean room below the cleanliness class 10, various devices and equipments operating in the clean room including the rack and the stocker should also be kept below the cleanliness class 10. And there was a problem that the cost of installation and maintenance of the facility is expensive.

However, since the sealed cassette 10 of the present embodiment stores the substrate G in an environment of cleanliness class 10 or less by the fan filter unit 30, the inside of the clean room is maintained at a value of cleanliness class 1000 or less. Therefore, various apparatuses and facilities that operate in a clean room including the stocker device 80 and the rack 70 may be designed and manufactured to maintain the cleanliness class 1000 or less, unlike the related art. This can reduce overall installation and maintenance costs in the clean room.

Meanwhile, as shown in FIGS. 3 to 6, the sealed cassette 10 according to the present embodiment includes a plurality of shelf portions 12 (see FIG. 6) on which a plurality of substrates G are stacked, and a plurality of insides thereof. The shelf part 12 is a housing 11 which is arranged to be spaced apart from each other in the height direction, a pair of fan filter unit 30 that is detachably coupled to the housing 11 to adjust the cleanliness of the inside of the housing 11 and The opening and closing door unit 20 is detachably coupled to an opening formed at one side of the housing 11 to selectively open and close the housing 11.

In addition, as shown in detail in FIGS. 2 and 5, the sealed cassette 10 is installed on the inner surface of the first installation groove 16 recessed inward from the lower surface of the housing 11 to be described later. Stalker pick-up terminal 15 electrically connected to the stocker power supply terminal 84 of the device 80 and recessed inwardly from the bottom surface of the housing 11 adjacent to the stocker pick-up terminal 15 It is further provided with a rack pickup terminal 13 installed on the inner side of the second installation groove 17 and electrically connected to the rack power supply terminal 73 of the above-described cassette shelf 71.

Among the configurations of the hermetic cassette 10, the plurality of shelf parts 12 will be described. As shown in detail in FIG. 6, the plurality of shelf parts 12 have a height direction in the interior of the housing 11. It has a structure that is stacked.

Each shelf portion 12 includes a plurality of support pins 14 on which the substrate G is partially supported, whereby the substrate G can be stably supported on each shelf portion 12. Since G) is substantially in point contact with the support pin 14, the process of loading or unloading the substrate G onto the shelf 12 may be smoothly performed.

The housing 11 is a basic outer frame of the sealed cassette 10 according to the present embodiment, and a pair of fan filter units 30 are coupled to one side thereof, and an opening / closing door unit 20 is coupled to the other side thereof.

The opening / closing door unit 20 is a part which is opened when the substrate G is loaded or unloaded on the shelf 12 in the housing 11 and is shielded when there is no loading or unloading operation of the substrate G. Removably coupled to one side of the housing (11).

As shown in FIG. 4, the opening / closing door unit 20 of the present embodiment may be detachably coupled to an open opening of the housing 11 to selectively open / close the door 21 and the opening / closing door 21. A driving motor (not shown) for generating a driving force for opening and closing is provided.

Here, the method of opening or closing the opening / closing door 21 may be variously applied, but the opening / closing door 21 of the present embodiment may be provided as a shutter of a sliding type that can adjust the opening degree. Therefore, the opening and closing door 21 can adjust the opening degree by the drive motor, thereby to maintain the cleanliness of the interior of the housing 11 according to the internal conditions of the clean room. However, in the present exemplary embodiment, the opening / closing door 21 is provided as a sliding shutter 231, but may be provided as an air conditioner-type door that rotates and opens in each section, or one axis It may be provided as a blind roll type door wound around the center, or may be provided as an elevator door type door that is sequentially overlapped.

On the other hand, as described above, the fan filter unit 30 is a part that maintains the internal space of the housing 11 in an environment of cleanness class 10 or less by purifying the air in the internal space of the housing 11, such a fan. The filter unit 30 may include a filter to prevent particles, such as air, from being introduced into the housing 11.

The fan filter unit 30 may be detachably coupled to an opening formed through the other side of the housing 11 so as to face the opening / closing door unit 20, as shown in detail in FIG. 3. The fan filter unit 30 is provided in pairs to improve the air purification efficiency.

On the other hand, in order to drive the fan filter unit 30, as described above, power must be supplied to the fan filter unit 30. Therefore, the first mounting groove 16 and the second mounting groove 17 of the housing 11, as shown in detail in Figures 2 and 5, for the stocker for supplying power to the fan filter unit 30 A pickup terminal 15 and a rack pickup terminal 13 are provided respectively.

Here, the stocker pick-up terminal 15 and the rack pick-up terminal 13 are respectively provided inside the first and second mounting grooves 16 and 17, that is, the recessed portion is disposed below the lower surface of the housing 11 to allow the stocker to be stocked. There is no risk of collision between the pick-up terminal 15 and the rack pick-up terminal 13 during the operation of devices such as the stocker device 80, and thus the stocker pick-up terminal 15 and the rack pick-up terminal 13 are damaged. Can be prevented.

As described above, the stocker pick-up terminal 15 is a portion electrically connected to the stocker power supply terminal 84 provided to protrude from the upper surface of the fork 82 of the stocker device 80, and the rack pick-up terminal 15. 13 is a part electrically connected to the power supply terminal 73 for the rack provided to protrude on the cassette shelf 71 of the rack (70).

Therefore, when the sealed cassette 10 is transported by the stocker device 80, the fan filter unit 30 continuously maintains the electrical connection between the stocker power supply terminal 84 and the stocker pick-up terminal 15. Drive to keep the inside of the housing 11 clean, and also the rack power supply terminal 73 and the rack pickup terminal even when the sealed cassette 10 is stored in each cassette shelf 71 of the rack 70. Since the 13 maintains the electrical connection with each other, the fan filter unit 30 may be continuously driven to keep the inside of the housing 11 clean.

Here, the rack pick-up terminal 13 and the stocker pick-up terminal 15 have different positions provided on the lower surface of the housing 11 as described above. That is, as shown in FIG. 5, the stocker pick-up terminal 15 is installed in the first installation groove 16 recessed more inward than the second installation groove 17 on the lower surface of the housing 11. The pickup terminal 13 for the rack is installed in the second installation groove 16 on the outside. This is because the fork 82 of the stocker device 80 of the present embodiment is provided to have a smaller width than the cassette shelf 71 of the rack 70. Therefore, when the fork 82 of the stocker device 80 and the cassette shelf 71 of the rack 70 are provided in different forms, the stocker pick-up terminal 15 and the rack pick-up terminal 13 may be adapted to the shape. Of course, it may be provided in the housing 11 so that.

Meanwhile, the closed cassette 10 is loaded from the stocker device 80 into the cassette shelf 71 of the rack 70 by the handling of the fork 82 or the sealed cassette 10 from the cassette shelf 71 of the rack 70. In order to control the power supply when unloading), the hermetic cassette conveying system 1 of the present embodiment is installed in the rack 70 and approaches the hermetic cassette for loading in the cassette shelf 71 of the rack 70. A first approach detection sensor (not shown) sensing 10 and a stocker device installed in the rack 70 and approaching to unload the sealed cassette 10 from the cassette shelf 71 of the rack 70 ( The second power supply sensor (not shown) for detecting the fork 82 of the 80 and the power supply of the above-described power supply terminals 73 and 84 through the information obtained from the first and second access detection sensors. It further includes a control unit (not shown) for controlling.

Here, the first approach sensor and the second approach sensor may be manufactured separately and installed in the rack 70, but the first approach sensor and the second approach sensor of the present embodiment are also provided with one sensor. Hereinafter, the first approach detection sensor and the second approach detection sensor will be described by referring to the approach detection sensor without classifying them.

The proximity sensor is adjacent to the cassette shelf 71 with the fork 82 of the stocker device 80 loading the sealed cassette 10 on its upper surface in order to load the sealed cassette 10 in the rack 70. Approach to the control unit, the detected information is transmitted to the control unit. The control unit continues to the stocker power supply terminal 84 by turning off the power supply to the stocker power supply terminal 84 of the stocker device 80 in which the sealed cassette 10 is unloaded based on the transmitted information. To prevent power supply.

In addition, the proximity sensor transmits the detected information to the control unit when the stocker device 80 approaches to unload the closed cassette 10 of the cassette shelf 71. The control unit prevents continuous power supply to the rack power supply terminal 73 by turning off the power supply to the rack power supply terminal 73 based on the transmitted information.

On the other hand, although not shown, each of the cassette shelf 71 of the rack 70 and the fork 82 of the stocker device 80 is provided with a seating detection sensor (not shown) for detecting the seating of the sealed cassette (10). These seating detection sensors are mounted on the sealed cassette 10 by automatically turning on the power supply to each of the power supply terminals 73 and 84 immediately after or after a predetermined time is detected. To allow the fan filter unit 30 to be driven. In addition, these seating detection sensors detect the unloading of the hermetic cassette 10 to supply power by automatically turning off the power supply to the respective power supply terminals 73 and 84 when the hermetic cassette 10 is unloaded. This is prevented from being made continuously. However, in the present embodiment, the seating detection sensor detects loading and unloading of the sealed cassette 10, and thus, the power supply to the power supply terminals 73 and 84 is automatically turned on. Based on the information detected by the controller described above may control the power supply to the power supply terminals (73, 84).

On the other hand, when an abnormality occurs in the power supply terminals 73 and 84 and the pick-up terminals 13 and 15 of the present embodiment, power is not supplied to the fan filter unit 30 so that the internal space of the sealed cassette 10 may be reduced. There may be cases where the cleanliness cannot be maintained below class 10.

Thus, although not shown, the sealed cassette 10 of the present embodiment further includes an auxiliary power supply (not shown) for supplying power to the fan filter unit 30 in a preliminary situation. The auxiliary power supply is provided with a battery, it can be detachably coupled to the housing has the advantage of easy use.

In the following, an operation method of the closed cassette transfer system 1 having such a configuration will be described.

First, a case in which the sealed cassette 10 loaded on the fork 82 of the stocker device 80 is transferred to the cassette shelf 71 of the rack 70 will be described. The stocker device 80 may include a rail provided on the ground. After moving (not shown) to set the horizontal position of the stocker device 80 with respect to the rack 70, the fork 82 is moved up and down relative to the stocker main body 81 in the height direction of the rack to proceed The fork 82 loaded with the sealed cassette 10 is placed on the cassette shelf 71 of the 70.

During this operation, the fan filter unit 30 of the hermetic cassette 10 is operated so that the inside of the hermetic cassette 10 can maintain a state of cleanness class 10 or less, and the stocker power supply terminal provided in the fork 82. Power is supplied to the stocker pick-up terminal 15 of the sealed cassette 10 via 84.

Thereafter, the closed cassette 10 loaded in the fork 82 by the handling of the fork 82 is loaded into the cassette shelf 71 of the rack 70. At this time, the access sensor installed in the rack 70 detects the approach of the sealed cassette 10 and transmits the detected information to the control unit, the control unit power to the stocker power supply terminal 84 of the stocker device (80). Feeding allows the closed cassette 10 to be turned off before loading into the cassette shelf 71 of the rack 70.

When the closed cassette 10 is seated on the cassette shelf 71, the seating detection sensor installed on the cassette shelf 71 detects the seating of the sealed cassette 10, and after a predetermined time elapses or immediately after the preset time, By automatically turning on the power supply to the power supply terminal 73 for the rack so that the fan filter unit 30 of the hermetic cassette 10 seated on the cassette shelf 71 can be driven. Therefore, the cleanliness of the internal space of the housing 11 in which the substrate G is stored can be maintained at class 10 or less.

On the contrary, when the sealed cassette 10 is transferred from the cassette shelf 71 to the fork 82 by the operation of the stocker device 80, the proximity sensor detects the approach of the fork 82 and then detects the detected information. Transmission to the control unit allows the control unit to turn off the power supply to the rack power supply terminal 73 of the cassette shelf 71.

When the closed cassette 10 is seated on the fork 82 of the stocker device 80, the seating detection sensor installed on the fork 82 detects the seating of the sealed cassette 10, and immediately after or after a predetermined time elapses. By automatically turning on the power supply for the stocker power supply terminal 84 of the fork 82 so that the fan filter unit 30 of the hermetic cassette 10 seated on the fork 82 can be driven. . Therefore, the cleanliness of the internal space of the housing 11 in which the substrate G is stored can be maintained at class 10 or less.

As described above, according to the present exemplary embodiment, the fan filter unit 30 is directly installed in the sealed cassette 10 in which the substrate G is stored, and the sealed cassette 10 is mounted in the stocker device 80 and the rack 70. In this case, the fan filter unit 30 can be operated so that the internal space of the sealed cassette 10 in which the substrate G is stored can be maintained at a required cleanliness class, for example, cleanliness class 10 or less. As a result, the maintenance cost and installation cost of the entire clean room can be reduced compared to the conventional ones, thereby reducing the overall production cost.

In the above-described embodiment, it has been described above that the sealed cassette has one housing, but it is obvious that the sealed cassette may have a housing having a different configuration. In more detail, the sealed cassette of the above-described embodiment has a configuration in which a plurality of shelf parts are disposed in the housing and fan filter units are mounted on both sides of the housing, and the door door unit is mounted. However, the sealed cassette has a plurality of shelf parts inside. It may be provided in a configuration comprising a cassette housing disposed in the, and a housing for enclosing the cassette housing once more for sealing and the fan filter unit and the closing door unit is mounted on both sides.

In the above-described embodiment, it has been described that the internal space of the housing in which the substrate is stored should be maintained at or below the cleanliness class 10. However, this is only one embodiment. It is self-evident.

As described above, the present invention is not limited to the described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the present invention, which will be apparent to those skilled in the art. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

1 is a view for explaining the overall configuration of the hermetic cassette transfer system according to an embodiment of the present invention.

FIG. 2 is a partially enlarged view of FIG. 1 illustrating a state where a closed cassette is loaded on a cassette shelf of a rack.

3 is a perspective view of the hermetic cassette shown in FIG. 1.

4 is a perspective view of the sealed cassette shown in FIG. 3 viewed from another direction.

5 is a view for explaining the coupling relationship between the closed cassette shown in Figure 1 and the fork of the stocker device.

6 is a view for explaining the internal structure of the sealed cassette shown in FIG.

* Explanation of symbols for the main parts of the drawings

1: hermetic cassette transfer system 10: hermetic cassette

13: Pickup terminal for rack 15: Pickup terminal for stocker

20: opening and closing door unit 21: opening and closing door

30: fan filter unit 70: rack

71: cassette shelf 73: power supply terminal for the rack

80: stocker device 81: stocker body

82: fork 84: power supply terminal for the stalker

Claims (18)

Supply power to a plurality of shelf units on which substrates are stacked, at least one fan filter unit for purifying air in an internal space in which the plurality of shelf units are disposed, and the at least one fan filter unit. A sealed cassette having a rack pick-up terminal and a stocker pick-up terminal electrically connected to the fan filter unit to be provided; A stocker device having a stocker power supply terminal contacting the stocker pick-up terminal when the closed cassette is loaded to supply power to the stocker pick-up terminal, and transferring the closed cassette; And A plurality of cassette shelves each of which the sealed cassette is loaded and stored, and a rack power supply terminal which is provided on the plurality of cassette shelves respectively and contacts the rack pickup terminal when the sealed cassette is loaded to supply power to the rack pickup terminal; It includes a rack having a The stocker device, A stocker body provided adjacent to the rack and movable along the ground; A fork coupled to the stocker body to move up and down and for handling the sealed cassette to load the sealed cassette on the rack or to unload the sealed cassette from the rack, The stocker power supply terminal is characterized in that it is provided to protrude on the top surface of the fork. The method of claim 1, A first approach detection sensor provided in the rack and sensing an access to the rack of the sealed cassette loaded in the stocker device; And And a control unit for turning off a power supply to the stocker power supply terminal of the stocker device based on the information detected by the first approach detecting sensor. 3. The method of claim 2, Sealing cassette transport system characterized in that it further comprises a seating detection sensor for the rack provided on each of the cassette shelf of the rack for detecting the seating of the hermetic cassette. 3. The method of claim 2, A second access sensor provided in the rack, the second approach detecting sensor detecting the approach of the stocker device when the stocker device approaches the rack to unload the sealed cassette loaded on the cassette shelf; , The control unit is a closed cassette transfer system, characterized in that for turning off the power supply to the power supply terminal for the rack of the rack based on the information detected by the second access detection sensor. 5. The method of claim 4, And a stocker detecting sensor provided in the stocker device, the stocker detecting sensor for detecting the seating of the hermetic cassette. The method of claim 1, The hermetic cassette is provided adjacent to the fan filter unit, characterized in that it further comprises an auxiliary power supply for selectively supplying power to the fan filter unit. The method of claim 1, The sealed cassette, A housing having a rack pick-up terminal and a stocker pick-up terminal on a lower surface thereof, and a plurality of shelf parts spaced apart from each other in a height direction in an inner space; And  It is coupled to the open one side of the housing further comprises an opening and closing door unit for selectively opening or shielding the inner space of the housing, And the at least one fan filter unit is coupled to the other side of the housing so as to be adjacent to the plurality of shelf parts. The method of claim 7, wherein The lower surface of the housing is provided with a first installation groove and a second installation groove recessed from the surface, the pick-up terminal for the stocker is installed on the inner side of the first installation groove and the pickup terminal for the rack is the second installation groove Sealed cassette transfer system, characterized in that installed on the inner side of the. The method of claim 8, And the first installation groove is disposed closer to the fan filter unit side than the second installation groove on the lower surface of the housing. The method of claim 7, wherein The opening and closing door unit, An opening / closing door detachably coupled to the housing and selectively opening or shielding an inner space of the housing; And Sealing cassette transport system comprising a drive motor for generating a driving force for opening or closing the opening and closing door. The method of claim 10, The opening and closing door is a closed cassette transfer system, characterized in that provided with a sliding shutter (shutter) to adjust the opening degree of the inner space of the housing. delete delete delete delete delete delete delete

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