KR100676824B1 - Panel transferring apparatus - Google Patents

Abstract

A panel transfer apparatus is provided to easily transfer a panel cassette and accurately control a position of the panel cassette by simplifying a process of transferring the panel cassette. A cassette load chamber(30) has a cassette accommodation portion(31) accommodating a panel cassette(25). A stage(40) is provided on the cassette accommodation portion to support the panel cassette. A transfer unit(50) is provided on the cassette receiving portion to transfer the stage between a loading position and an unloading position. A rotation unit(70) is interposed between the transfer unit and the stage to rotate the stage around a transfer direction of the transfer unit. A sensor(60) is provided in the cassette accommodation portion to detect the panel cassette.

Description

Panel Transfer Unit {PANEL TRANSFERRING APPARATUS}

1 is a side cross-sectional view of a panel transporting apparatus according to the present invention;

Figure 2a is a plan sectional view of the cassette receiving portion;

Figure 2b is a side view showing the transfer unit and the rotation unit,

3a and 3b is a side cross-sectional view showing the panel transfer,

4 is a flowchart illustrating a loading process of a panel transfer process.

Explanation of symbols on the main parts of the drawings

10: panel feeder

20 Panel 25 Panel cassette

27: cassette door

30: cassette rod chamber 31: cassette receiving portion

33: loading door 35: discharge door

40: stage

50: transfer unit 51: first transfer unit

53: second transfer unit 55: servo motor

57: Ball screw 58: LM guide

59: LM block 60: sensor

70: rotation unit 75: stalker

80: panel transfer unit 81: arm

85: vacuum drive unit 90: cold air supply unit

91; Blower Fan 93: Radiator

The present invention relates to a panel conveying apparatus, and more particularly, to a panel conveying apparatus which is simple to convey a panel cassette and can adjust the position of the panel cassette.

A liquid crystal display device used for an LCD TV or the like has a liquid crystal panel in which an image is formed, a backlight unit disposed behind the liquid crystal panel to supply light to the liquid crystal panel, and a chassis for accommodating and supporting the liquid crystal panel and the backlight unit. The liquid crystal panel has a thin film transistor panel, a color filter panel, and a liquid crystal layer injected between both panels. Glass panels, such as thin film transistor panels, go through various processes such as deposition and etching.

A panel transfer device for transferring panels in such a process includes a panel cassette accommodating a plurality of panels, a cassette loader accommodating the panel cassette, and a stocker for loading and unloading the panel cassette into the cassette loader. A load lock chamber for accommodating the panel to form the same atmosphere as the process atmosphere, an indexer for carrying the panel between the cassette rod and the load lock chamber, and performing the process with the load lock chamber. It has a transfer driving part such as a robot that transfers panels between process chambers.

The prior art having such a configuration has a complicated structure in which a panel is transported through a cassette loader, an indexer, a load lock chamber, and has a problem in that a space occupied by the transport device is large. Thus, in the related art, in view of the recent trend in that the size of the display device is enlarged and the panel is also enlarged, the panel transfer device becomes more complicated, and thus there is a concern that the installation space and cost thereof increase relatively.

Accordingly, it is an object of the present invention to provide a panel conveying apparatus which is simple in conveying a panel cassette and which can adjust the position of the panel cassette.

According to the present invention, there is provided a panel conveying apparatus for conveying a panel cassette containing a plurality of panels, comprising: a cassette rod chamber having a cassette accommodating portion for accommodating the panel cassette; A stage provided at the cassette accommodating part to support the panel cassette; A transfer unit provided in the cassette accommodating unit for transferring the stage between a loading position and a discharge position of the panel cassette; A rotation unit provided between the transfer unit and the stage to rotate the stage using a transfer direction of the transfer unit as a rotation axis; A sensor provided at the cassette accommodating part to detect the panel cassette; And a control unit for controlling the transfer unit and the rotation unit by comparing the detected position of the panel cassette and the target position of the panel cassette sensed by the sensor.

Here, the transfer unit is a first transfer unit provided so that the stage can be transferred in a straight line between the loading position and the discharge position, and a second transfer for transferring the stage in the transverse direction in the transfer direction of the first transfer unit It may include a unit.

In addition, the first conveying unit and the second conveying unit each of the ball screw to change the rotational movement to a linear movement; A servo motor coupled to the ball screw to transmit rotational force; A linear motor guide provided in parallel with the ball screw; It includes an LM block sliding in engagement with the LM guide and coupled to the stage portion, the control unit may include controlling the servo motor.

In addition, a stocker (loader) for loading and unloading the panel cassette in the loading position; And a panel transfer part having an arm for transferring the panel to a process chamber which supports the panel from a discharge position of the cassette accommodating part subjected to a predetermined vacuum pressure and proceeds the process.

In addition, two or more sensors may be provided.

Hereinafter, a printed circuit board according to an embodiment of the present invention will be described with reference to the accompanying drawings.

Panel transfer apparatus 10 according to the present invention, as shown in Figures 1 and 2, a panel cassette 25 that accommodates a plurality of panels 20; A cassette rod chamber 30 having a cassette accommodating portion 31 for accommodating the panel cassette 25; A stage 40 provided in the cassette accommodating part 31 to support the panel cassette 25; and a stage 40 provided in the cassette accommodating part 31 to transfer the stage 40 between the loading position and the discharging position of the panel cassette 25. A transfer unit 50; A rotation unit 70 provided between the transfer unit 50 and the stage 40 to rotate the stage 40 using the transfer direction of the transfer unit 50 as the rotation axis; A sensor 60 provided in the cassette accommodating part 31 to detect the panel cassette 25; And a control unit for controlling the transfer unit 50 and the rotation unit 70 by comparing the detection position of the panel cassette 25 sensed by the sensor 60 with the target position of the panel cassette 25. In addition, the panel conveying apparatus 10 includes a stocker 75 for loading and unloading the panel cassette 25 in a stowed position, and the panel (from the discharge position of the cassette accommodating portion 31 subjected to a predetermined vacuum pressure). 20 may include a panel transfer part 80 having an arm 81 for transferring the panel 20 to a process chamber for carrying out the process.

As shown in FIG. 1, the panel 20 is accommodated in the panel cassette 25 and performs a predetermined process by the arms 81 of the panel transfer unit 80 to be described later from the panel cassette 25. Transferred to a chamber (not shown). The panel 20 includes not only a thin film transistor panel made of glass used for an LCD TV but also a color filter substrate.

The panel cassette 25 has a rectangular parallelepiped shape for accommodating a plurality of panels, and has a cassette door 27 provided at one side thereof to allow the panel 20 to enter and exit. In addition, the panel cassette 25 may be provided in various shapes according to the shape of the panel 20 accommodated therein.

Cassette door 27, as shown in Figure, the panel 20 is provided on one side of the panel cassette 25 to be accessible. In addition, the cassette door 27 may include a driving unit such as an air cylinder (not shown) capable of opening and closing the cassette door 27. In addition, the control unit may control the cassette door 27 to be opened after a predetermined vacuum pressure is formed in the cassette accommodating part 31 to be described later. Thus, the panel 20 accommodated in the panel cassette 25 may be prevented from coming into contact with foreign matter, and the panel 20 may be prevented from being damaged due to the high speed transfer of the panel cassette 25.

The cassette rod chamber 30 has the cassette accommodating part 31 which accommodates the panel cassette 25, as shown to FIG. In addition, the cassette rod chamber 30 may include a vacuum driving unit 85 for forming a predetermined vacuum pressure, such as a process chamber. In addition, the cassette rod chamber 30 may include a cold air supply unit 90 for cooling the wall surface of the cassette accommodating part 31 so as to lower the temperature atmosphere in which the high temperature of the cassette accommodating part 31 is maintained.

As shown in FIG. 1, the cassette accommodating part 31 includes a stacking door 33 which allows the panel cassette 25 to enter and exit the stocker 75 on one side, and an arm of the panel transfer part 80 on the other side. 81 has a discharge door 35 through which the panel 20 can enter and exit the panel 20 from the panel cassette 25. In addition, the cassette accommodating part 31 may include a sensor 60 capable of sensing the panel cassette 25.

The loading door 33 is provided on one side of the cassette accommodating portion 31 to allow the panel cassette 25 to enter and exit as shown in FIG. 1. The control unit may control the loading door 33 to be opened after the vacuum pressure of the cassette accommodating part 31 is released.

The discharge door 35 is provided in the cassette accommodating part 31 so that the panel 20 may go in and out, as shown in FIG. The control unit may control the discharge door 35 to be opened when the cassette accommodating part 31 reaches a predetermined vacuum pressure.

The cassette accommodating part 31 coupled to the loading door 33 and the discharge door 35 may include a sealing member (not shown) for sealing the cassette accommodating part 31 to maintain a predetermined vacuum pressure. to be.

The stage 40 is provided in the cassette accommodating part 31 and supports the panel cassette 25, as shown in FIG. 1 and FIG. In addition, the stage 40 is provided in a rectangular plate shape, but may vary according to the shape of the panel cassette 25 according to the shape of the panel 20. In addition, the stage 40 is coupled to the rotation unit 70 to be described later, the panel cassette 25 can be rotated with respect to the axial direction of the transfer direction of the transfer unit 50.

The transfer unit 50 is provided in the cassette accommodating part 31, as shown in FIG. 2, to transfer the stage 40 between the loading position and the discharge position. In addition, the transfer unit 50 includes a first transfer unit 51 which allows the stage 40 to be transferred in a straight line between the loading position and the discharge position, and the stage (in the transverse direction to the transfer direction of the first transfer unit 51). And a second transfer unit 53 for conveying 40. In addition, the transfer unit 50 has a ball screw 57 for changing the rotational movement to a linear movement, and a servo motor 55 coupled to the ball screw 57 to transmit the rotational force. In addition, the transfer unit 50 may include a linear motor (LM) guide 58, and one side of the transfer unit 50 is slidably engaged with the LM guide 58, and the other side may include an LM block 59 coupled to the stage 40. have. In addition, the transfer unit 50 may optionally employ a known transfer means such as a linear motor.

In the stowed position, the panel cassette 25 supported by the stage 40 is loaded and unloaded into the stocker 75 to be described later. The stacking position is close to the stacking door 33 of the cassette housing portion 31.

In the discharge position, the arm 81 of the panel transfer part 80 supporting the panel 20 accommodated in the panel cassette 25 pulls the panel 20 out of the panel cassette 25 and transfers it to the predetermined process chamber. The discharge position is close to the discharge door 35 of the cassette accommodating portion 31.

As shown in FIG. 2A, the first transfer unit 51 is provided such that the stage 40 is linearly transferred between the loading position and the discharge position. In addition, as described above, the first transfer unit 51 may include a servo motor 55, an LM guide 58, and the like. In addition, as shown in FIG. 2A, the first transfer unit 51 is disposed above the second transfer unit 53, but the position may be changed.

As shown in FIG. 2A, the second transfer unit 53 is provided to transfer the stage 40 in the transverse direction to the transfer direction of the first transfer unit 51. In addition, as described above, the second transfer unit 53 may include a servo motor 55, an LM guide 58, and the like.

As shown in FIG. 2B, the rotation unit 70 is provided between the transfer unit 50 and the stage 40 to rotate the stage 40 using the transfer direction of the transfer unit 50 as the rotation axis. In addition, the rotation unit 70 has a rotation drive unit (not shown) for driving to adjust the angle of the stage 40. The rotation driving unit may include a step motor coupled to the stage 40 to drive the stage 40 to rotate based on the transfer direction of the transfer unit 50 as an axis. In addition, the rotation driving unit may be selectively used as a known rotation means such as a motor, a worm, a worm gear, an angle adjusting member which is used in a side mirror of an automobile or the like to electrically adjust the angle of the side mirror.

Accordingly, the position of the panel cassette 25 can be adjusted not only in the transverse direction of the conveying direction and the conveying direction, but also by rotating the conveying direction as the rotation axis.

The sensor 60 is provided in the cassette accommodating part 31 so as to detect the panel cassette 25, as shown in Figs. 1 and 2A. In addition, the sensor 60 detects an indicator (not shown) displayed to recognize the position of the panel cassette 25, and detects the X coordinate, the Y coordinate, and the inclined angle θ of the panel cassette 25. It has at least two to calculate. In addition, the sensor 60 may selectively employ a known sensor such as a vision sensor.

The controller (not shown) controls the transfer unit 50 and the rotation unit 70 by comparing the detection position of the panel cassette 25 detected by the sensor 60 with the target position of the panel cassette 25.

Thus, by comparing the target position and the detection position of the panel cassette 25 at the discharge position, the panel cassette 25 is positioned within a predetermined range, so that the panel 20 can be transferred to a relatively accurate position in a subsequent process.

The stocker 75 loads and unloads the panel cassette 25 in a stowed position, as shown in FIG. In addition, the stocker 75 draws the panel cassette 25 from the cassette rod chamber 30 and carries the panel cassette 25 in the next process.

As shown in FIG. 1, the panel transfer unit 80 is a process chamber for supporting the panel 20 from the discharge position of the cassette accommodating part 31 subjected to a predetermined vacuum pressure to proceed the process. It has an arm 81 for conveying.

1 and 3, the vacuum driving unit 85 may be provided with a predetermined vacuum pressure in the cassette accommodating part 31 in an atmosphere such as a process chamber in which the panel 20 is transferred to perform a process. Make sure

The cold air supply unit 90 supplies the heat transferable cold air to the wall of the cassette accommodating part 31 so as to cool the atmosphere of the cassette accommodating part 31, as shown in FIG. 2A. In addition, the cold air supply unit 90 includes a cooling fan 91 for circulating cold air, a compression pump (not shown) for compressing a refrigerant, and a radiator 93. Thus, the atmosphere of the cassette accommodating portion 31 can be cooled quickly.

With this configuration, the operation of the panel transfer apparatus according to the present invention will be described with reference to FIGS. 3 and 4.

First, look at the loading process of the panel cassette 25 as follows. The stacking door 33 of the cassette accommodating portion 31 is opened. The panel cassette 25 accommodated in the stocker 75 is loaded on the stage 40 located at the stacking position of the cassette accommodating portion 31 (see Fig. 3A). The stage 40 supports the cassette receiving portion 31 and is transported to the discharge position by the first transfer unit 51 and the second transfer unit 53. At this time, the control unit controls the stacking door 33 of the cassette accommodating unit 31 to be closed. In the control unit, the detection position of the panel cassette 25 supported by the stage 40 transferred to the discharge position is calculated based on the detection signals of the markers detected by the two or more sensors 60. This calculation uses various known methods and detailed descriptions are omitted. In addition, the control unit compares the set target position and the detection position of the panel cassette 25 to compare whether or not it falls within the error range. If it is not within the error range, the controller controls the first transfer unit 51, the second transfer unit 53, and the rotation unit 70 so that the detection position of the stage 40 falls within the error range from the target position. do. The control unit compares the target position and the detection position of the panel cassette 25 and operates the vacuum driving unit 85 so that a predetermined vacuum pressure can be formed in the cassette accommodating portion 31 when entering the error range. Thus, the cassette cassette 25 may be transported in the cassette accommodating portion 31 and a vacuum pressure may be formed, thereby simplifying the apparatus and the position of the transferred panel cassette 25 is detected and compared. The position of 25 can be adjusted. When a predetermined vacuum pressure is formed, the discharge door 35 and the cassette door 27 are opened, and the arm 81 of the panel transfer part 80 supports the panel 20 of the panel cassette 25 so that the panel cassette 25 ), The panel 20 is taken out (see FIG. 3B). The drawn panel 20 is seated in a predetermined position of the process chamber.

Next, the panel 20 which has undergone a predetermined process is transferred to the panel cassette 25 by the arm 81 of the panel conveying unit 80 in the process chamber. The controller may control the operation of the cold air supply unit 90 as necessary in this process. By repeating this process, when all the panels 20 of the panel cassette 25 have completed the process, the vacuum of the cassette accommodating part 31 is released when the panel cassette 25 is loaded on the panel cassette 25. The stage 40 is conveyed from the discharge position to the loading position by the first and second transfer units 51 and 53. When the stage 40 is located at the loading position, the control unit controls the loading door 33 to be opened. The stocker 75 unloads the panel cassette 25 supported by the stage 40.

Therefore, according to the present invention, the cassette cassette is accommodated by the panel cassette, and thus the position of the panel cassette can be adjusted by comparing the detected position and the target position, thereby simplifying a complicated transfer process and also adjusting the position of the panel cassette. Can be. Accordingly, the panel transfer time can be reduced, and the space of the panel transfer device is relatively small, thereby reducing economic costs such as clean room management costs.

As described above, according to the present invention, there is provided a panel transfer device which is simple to transfer the panel cassette and which can adjust the position of the panel cassette.

Claims (5)

In the panel conveying apparatus for conveying a panel cassette containing a plurality of panels, A cassette rod chamber having a cassette accommodating portion for accommodating the panel cassette; A stage provided at the cassette accommodating part to support the panel cassette; A transfer unit provided in the cassette accommodating unit for transferring the stage between a loading position and a discharge position of the panel cassette; A rotation unit provided between the transfer unit and the stage to rotate the stage using a transfer direction of the transfer unit as a rotation axis; A sensor provided at the cassette accommodating part to detect the panel cassette; And a control unit for controlling the transfer unit and the rotation unit by comparing the detection position of the panel cassette sensed by the sensor with a target position of the panel cassette. The method of claim 1, The transfer unit includes a first transfer unit provided so that the stage can be transferred in a straight line between the stacking position and the discharge position, and a second transfer unit that transfers the stage in a transverse direction to a transfer direction of the first transfer unit. Panel transfer apparatus comprising a. The method of claim 2, The first transfer unit and the second transfer unit are respectively A ball screw for turning the rotational movement into a linear movement; A servo motor coupled to the ball screw to transmit rotational force; A linear motor guide provided in parallel with the ball screw; It includes an LM block sliding in engagement with the LM guide and coupled to the stage portion, A control unit is a panel transfer device, characterized in that for controlling the servo motor. The method of claim 1, A stocker for loading and unloading the panel cassette to the stowed position; And a panel transfer unit having an arm for transferring the panel from a discharge position of the cassette accommodation portion subjected to a predetermined vacuum pressure to a process chamber for carrying out the process by supporting the panel. The method of claim 1, Panel transfer device, characterized in that provided with at least two sensors.

Images