KR20060125561A - Method for manufacturing a prism - Google Patents

Abstract

A method for manufacturing a prism is provided to improve polishing angle accuracy by performing polishing on the basis of a reference surface, which is a portion of exposed dielectric multilayer film. Both sides of large and small substrates are polished in a flat panel polishing process(S1). Dielectric multilayer films are formed on two surfaces of the large and small substrates to form a grown film surface and a non-grown film surface(S2). The large substrate and the small substrate are laminated in turn, to form a laminated glass structure, in which a stepped shape is formed in the with direction and both sides of the large substrate are exposed as reference surfaces in the longitudinal direction(S3). The laminated glass structure is cut in the slant direction of the stepped shape by a size greater than one side of a prism, so that plural glass structures are formed(S4). Two cut surfaces of the glass structures are polished(S5). The glass structures are cut in the vertical direction by a size greater than one side of the prism, so that plural rectangular glass structures are formed(S7). The cut surfaces are polished on the basis of the reference surfaces(S8). The opposite surface is polished on the basis of the polished surface(S9). The rectangular glass structure is cut at equal intervals in the normal direction to the polished surface, so that plural prisms are obtained(S11).

Description

Prism manufacturing method {METHOD FOR MANUFACTURING A PRISM}

1 is a flowchart showing a flow of a process of the present invention,

2 is a perspective view of a prism,

3 is a perspective view of a large substrate and a small substrate,

4 is a perspective view of a laminated glass body,

5 is a front view and a side view of the laminated glass body;

6 is a perspective view of the multiple glass body,

7 is a perspective view of a rectangular glass body,

8 is a perspective view and an enlarged view of the jig.

※ Explanation of code for main part of drawing

1: large substrate 2: small substrate

3: dielectric multilayer film 4: laminated glass body

5: multiple glass 6: rectangular glass

7: jig B: reference plane

C: film forming surface N: non-film forming surface

The present invention relates to a method of manufacturing a prism.

As a component of an optical system represented by an optical pickup apparatus, for example, there is a polarizing beam splitter. The polarizing beam splitter is an optical element that separates the laser light emitted from the light source into reflected light and transmitted light. One of the reflected light or the transmitted light is directed to the optical disk, and the other light is APC (Auto Power Control) for detecting the intensity of the laser light. Toward the light receiving element. Since the reflected light reflected by the polarizing beam splitter is generally reflected at an angle of 90 degrees, the polarization splitting film constituting the polarizing beam splitter is arranged to form an angle of 45 degrees with respect to the optical axis. Therefore, a cube-shaped prism is used as the polarizing beam splitter, and the polarizing separator is formed on the prism at an angle of 45 ° with respect to the optical axis.

Patent Document 1 discloses a method of manufacturing an optical device (prism) in which a polarization separator is formed at a predetermined angle. In patent document 1, after preparing several laminated glass by laminating | stacking these same plate glass in step shape, the laminated body is cut | disconnected into a divided laminated body, repeating lamination | stacking and cutting of a divided laminated body, and performing a final prism Getting In this case, in order to obtain an optical device in which a polarization separator is formed at a predetermined angle inside the prism, the divided laminates in which the laminate is cut along the inclined side walls having an angle corresponding to the inclination angle of the polarization separator are aligned in a stepped shape.

[Patent Document 1]

Japanese Patent Application Laid-Open No. 2000-199810

By the way, the dielectric multilayer film (polarization separation film referred to in patent document 1) formed in the finally produced prism must be formed with very high angle accuracy with respect to the incident surface of light. Therefore, when manufacturing a prism, a dielectric multilayer film must be formed with very high angular accuracy. However, in the invention of Patent Document 1, it is difficult to satisfy the high angle accuracy required for the prism.

That is, in the invention of Patent Literature 1, when laminating a plurality of plate glass and divided laminates, an adhesive agent is applied and adhered between the plate glass. At this time, an error of thickness may occur with the adhesive of each layer. Since the adhesive is laminated over a plurality, the thickness error of the adhesive of each layer accumulates. In addition, since the lamination and cutting of the plate glass and the divided laminate are repeatedly performed, the cumulative error is further accumulated and a cutting error occurs during cutting, so that the final prism contains a very large error. . Moreover, although the plate glass and the laminated partition are arranged in a step shape along the inclined wall, cutting errors may occur at the time of lamination or cutting, and there may be an error in the inclined side wall itself.

The above error affects the possibility that a very large error may occur in the inclination angle of the film formed inside the finally produced prism. Therefore, since high-precision angle precision cannot be ensured, it is very difficult in the invention of patent document 1 to form a dielectric multilayer film in a prism with high angle precision.

Accordingly, an object of the present invention is to provide a method of manufacturing a prism for producing a prism having a high angular precision.

The method of manufacturing a prism of the present invention is a method of manufacturing a prism in which a dielectric multilayer film is formed at a predetermined angle. A planar duplex polishing step of polishing both sides of a small substrate having a dimension smaller than that of the large substrate to give a plan view and parallelism of both the large substrate and the small substrate; A dielectric multilayer film forming step of forming a film formation surface and a non-film formation surface by forming a dielectric multilayer film on any two surfaces of both surfaces of the small substrate; and alternately bonding the film formation surface and the non-film formation surface to the large substrate and the small substrate. In the width direction so as to be shifted by a predetermined interval in the width direction so as to have a step shape, and the length of the large substrate A substrate bonding step of stacking both ends in this direction to be exposed as a reference plane to obtain a laminated glass body, and cutting the laminated glass body at intervals equal to or greater than the length of one side of the prism in a direction parallel to the stepped slope. Multi-layered glass body cutting step of obtaining a multiple glass body, multi-layered glass body double-sided polishing step of polishing two cut surfaces cut in the laminated glass body cutting step of the multilayer glass body on both sides to give a plan view and parallelism of the two cut surfaces; A multiple glass cutting process for cutting a glass body at intervals equal to or greater than the length of one side of the prism in a direction perpendicular to the polishing surface, to obtain a plurality of rectangular glass bodies, and the multiple cutting on the basis of the reference planes formed at both ends of the rectangular glass body First fabric for grinding the cut surface cut in the vitreous cutting process A second rectangular vitreous polishing step of polishing a surface opposite to this surface on the basis of the square vitreous polishing step, the surface polished in the first rectangular vitreous polishing step, and the rectangular vitreous polished in the rectangular vitreous polishing step And a rectangular glass body cutting step of obtaining a plurality of prisms by cutting at equal intervals in a direction perpendicular to the polishing surface polished in the multiple vitreous double-sided polishing step or the rectangular glass body polishing step. .

According to the manufacturing method of the prism of this invention, when laminating | stacking a large board | substrate and a small board | substrate, it laminates so that both ends of a large board | substrate may protrude more than a small board | substrate in the depth direction. Since both the large substrate and the small substrate are subjected to surface polishing in advance on both sides, and the flatness and parallelism are shown, such a polished surface is always exposed as a reference surface. And high angle precision can be achieved by grinding | polishing based on a reference plane.

Here, the large substrate and the small substrate are subjected to surface polishing on both sides, but after that, a dielectric multilayer film is formed on both surfaces of the large substrate, and a dielectric multilayer film is not formed on both surfaces of the small substrate. In this case, since the dielectric multilayer film is always formed on the exposed reference surface (protruding surface of the large substrate), polishing can be performed on the basis of the surface on which the dielectric multilayer film is formed. Therefore, it is possible to manufacture a prism having a very high accuracy of angular accuracy with respect to the surface on which the dielectric multilayer film is formed.

In addition, the present invention can also be applied to forming a dielectric multilayer film on both surfaces of a small substrate instead of both surfaces of a large substrate and a small surface polished surface. At this time, since the dielectric multilayer film is not formed on the large substrate, the dielectric multilayer film is not always formed on the exposed reference plane. Therefore, polishing is performed using the surface on which the dielectric multilayer film is not formed as a reference surface. In this case, the surface on which the dielectric multilayer film of the finally produced prism is formed becomes the opposite surface passed through the reference surface and the adhesive. For this reason, since it is necessary to manage the thickness of an adhesive agent with high precision, angular precision may fall slightly compared with making into the reference surface the surface in which the said dielectric multilayer film is formed by that much. However, even if the surface on which the dielectric multilayer film is formed is not used as the reference plane, the polishing of the reference plane with the high-precision planarity and parallelism remains unchanged. Therefore, even in this case, a prism having high angular precision can be manufactured. have.

The present invention can also be applied to forming a dielectric multilayer film on one surface of a large substrate and a small substrate, respectively. At this time, a multilayer dielectric film is formed on one surface of the exposed reference surface, but a dielectric layer film is not formed on the opposite surface. Therefore, a rectangular glass body having a reference plane on which a dielectric multilayer film is formed and a rectangular glass body having a reference plane not formed on each film are generated at a ratio of half. However, the surface where the dielectric multilayer film is not formed may be slightly deteriorated in angular accuracy. However, since the polishing is performed with respect to the double-faced polished surface as a reference surface, a prism having high angular precision can be produced.

In this case, although the angle accuracy is slightly different, unevenness may occur. For this reason, a dielectric multilayer film is formed on one surface of the large substrate and the small substrate, respectively, but the front surface is formed on one surface of the small substrate. A dielectric multilayer film is formed on one surface of the large substrate in the same region as the small substrate (the same region as the region bonded to the small substrate in the region of the large substrate when the laminated glass body is formed). For this reason, the above nonuniformity can be eliminated because the surface on which the dielectric multilayer film is not always formed becomes the reference plane.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described according to the flowchart of FIG. 2 is a finally produced prism 10. The prism 10 of this embodiment is a cube-type optical element of one side length, and the dielectric multilayer film 3 is formed at an angle of 45 ° with respect to the optical axis. In this embodiment, the diagonal length (the long side of the surface on which the dielectric multilayer film 3 is formed) of each surface of the prism 10 is defined as the diagonal length PD of the prism 10 (= PL × √2). do. In addition, an antireflection film having an antireflection function is formed on each surface of the prism 10.

First, as shown in FIG. 3, two or more types of flat board | substrates (substrates, such as a glass substrate) of a different shape are prepared. FIG. 3A shows a large substrate 1 having a long side (width) of LX1, a short side (inner length) of LY1, and a thickness of LZ1. 3B shows a small substrate 2 having a width of LX1, a depth of LY2 (LY2 to LY1), and a thickness of LZ1. In addition, since the finally produced prism 10 is produced by laminating and cutting the large substrate 1 and the small substrate 2, the width LX1, the depth LY1, and the thickness ( The width LX1, the inner length LY2, and the thickness LZ1 of the LZ1 and the small substrate 2 are longer than (1 / √2) times the length PL of one side of all the prism 10. .

As an initial process, both surfaces of the prepared large-size board | substrate 1 and the small board | substrate 2 are surface-polished by lapping etc. (step S1). By the surface polishing, both surfaces of the large substrate 1 and the small substrate 2 can exhibit high planarity and parallelism. Then, the dielectric multilayer film 3 is formed on both surfaces of the large substrate 1 (step S2). At this time, in this embodiment, as shown to FIG. 3 (a) and FIG. 3 (b), the both sides by which the dielectric multilayer film 3 of the large sized substrate 1 was formed was defined as film-forming surface C, and the small board | substrate 2 Both surfaces of the surface are defined as the non-film forming surface (N).

Next, a plurality of large substrates 1 and 2 small substrates 2 are alternately stacked to obtain a laminated glass body 4 (step S3). The laminated glass body 4 is fitted such that the large substrate 1 and the small substrate 2 are bonded by an adhesive material and the film forming surface C and the non-film forming surface N of each substrate are bonded as shown in FIG. 4. It is laminated by pasting. 5 (a) and 5 (b) are front and side views of FIG. 4, but the large substrate 1 and the small substrate 2 are laminated so that the whole becomes a step shape by shifting a predetermined interval in the width direction, In the longitudinal direction, both ends of the large substrate 1 are laminated so as to protrude from the small substrate 2. 4, 5 (a) and 5 (b) show a laminated glass body 4 in which three large substrates 1 and two small substrates 2 are laminated, of course, The number of sheets can be arbitrary. As shown in Fig. 5A, the large substrate 1 and the small substrate 2 are laminated at the same width as the thickness LZ1 of each substrate in the width direction. Therefore, the stepped inclination angle of the laminated glass body 4 forms an angle of 45 degrees. 4 and 5 (b), both ends of the large substrate 1 protrude the same as the small substrate 2, respectively (that is, as shown in FIG. 5 (b)). 1/2 × (LY1-LY2) " equally protrudes at both ends. &Quot; The protruding portion of the film formation surface C is exposed. Here, in this embodiment, the exposed part of the film-forming surface C is the reference surface B (as shown to FIG. 5 (b), the reference surface B is formed in both surfaces of the protruding part of the large substrate 1). It is defined as. The film formation surface C has a high plan view and parallelism, and since the reference plane B is part of the film formation surface C, the reference plane B also has a high plan view and parallelism. Although apparent in subsequent steps, the prism 10 in which the dielectric multilayer film 3 is formed with very high angular precision (45 °) can be obtained by performing the polishing process on the basis of the reference plane B. This is described later.

And the laminated glass body 4 is cut | disconnected by the wire saw etc. at predetermined intervals in the direction parallel to the said stepped inclination along the broken line of FIG. 4, or at an angle of 45 degrees with respect to the end surface ( Step S4). By this cutting, a plurality of multiple glass bodies 5 as shown in FIG. 6 (a) can be obtained. The cutting interval of the laminated glass body 4 at this time adds the grinding | polishing value (alpha) to the diagonal PD of the prism 10 as shown in FIG. This is described later.

As will be apparent here in the subsequent steps, the cut surfaces 5A, 5B of the multiplied glass body 5 (two cut surfaces when the laminated glass body 4 is cut at the time when the multiplied glass body 5 is generated in step S4): If 6 (a) shows that the upper surface and the lower surface) have high planarity and parallelism, the cut surfaces 5A and 5B constitute one surface of the prism 10 and the opposite surface. However, the top views of the cut surfaces 5A and 5B of the multiplicity of glass bodies 5 after being cut in step S4 are not guaranteed. Accordingly, the cut surfaces 5A and 5B of the multiple glass body 5 are polished to form the polished surfaces 5C and 5D as shown in Fig. 6B (step S5). By such polishing, the polishing surfaces 5C and 5D can exhibit high planarity and parallelism, and can constitute one surface and the opposite surface of the prism 10, respectively. At this time, the polishing glass 5 is polished so that the distance between the polishing surfaces 5C and 5D of the polishing glass 5 after polishing is equal to the length PL of one side of the prism 10. Thereby, two surfaces of the prism 10 can be comprised strictly.

By the way, the thickness of the multiple glass body 5 (the space | interval of the polishing surface 5C and 5D) becomes thin by the grinding | polishing of step S5. Therefore, the laminated glass body 4 in step S4 is cut at a cutting interval with a margin in advance in anticipation of the polishing value by polishing. Specifically, the laminated glass body 4 is cut at intervals obtained by adding the polishing value α to the diagonal length PD of the prism 10, thereby polishing the polishing value to produce a plan view of the multiplied glass body 5. Give out

In addition, in step S4, the cutting | disconnection of the laminated glass body 4 is not the interval which added the grinding | polishing value to the length PL of one side of the prism 10, but the interval which added the grinding | polishing value to the diagonal length PD of the prism 10. The reason why the cutting was performed is because the length of the shorter side of the end surface of the multiple glass body 5 corresponds to the diagonal length PD of the prism 10.

The end surfaces 5E, 5F of the polished multiplicity glass body 5 shown in FIG. 6B are made of a part of the large substrate 1 or the small substrate 2 at the top and bottom of the laminated glass body 4. Since the large-scale board | substrate 1 and the small board | substrate 2 which comprise the laminated glass body 4 show the high-precision planarity and parallelism in step S1, it is possible to refer to the end faces 5E and 5F of the multiple glass body 5 as a reference. Can be. Therefore, by cutting the cut surfaces 5A and 5B with respect to the end surfaces 5E and 5F, the angle formed between the polished surfaces 5C and 5D and the film formation surface C on which the dielectric multilayer film 3 is formed is 45 ° high. Can be formed with angular precision.

Next, an antireflection film is formed on the polished surfaces 5C and 5D of the polished multiplicity of glass 5 (step S6). As described above, since the polishing surfaces 5C and 5D of the multiplicity of glass bodies 5 form one surface of the prism 10, an antireflection film is formed at this point. Since the several prism 10 is produced from the multiple glass body 5, when the anti-reflective film is formed previously, the anti-reflective film of the several prism 10 will be formed at once.

Then, the multiple glass 5 having the antireflection film formed thereon is cut at predetermined intervals in a direction perpendicular to the polishing surfaces 5C and 5D as shown by the broken line in Fig. 6B (step S7). This cutting produces a plurality of rectangular glass bodies 6 shown in Fig. 7A.

When cutting the multiple glass body 5 here, cut | disconnected surface 6A, 6B (two cutting surfaces at the time of cutting the multiple glass body 5) similarly to the case where the laminated glass body 4 was cut | disconnected: FIG. Is shown as a side surface and the opposite surface] is not guaranteed. The cut surfaces 6A and 6B constitute one surface of the prism 10 and the opposite surface, provided that high planarity and parallelism are guaranteed. However, the flatness and parallelism are not guaranteed when the multiple glass body 5 is cut | disconnected. Therefore, in order to polish the cut surfaces 6A and 6B to give a plan view and parallelism of both surfaces, the rectangular glass body 6 must be generated in consideration of the polishing value. Therefore, when cutting the multiple glass body 5, it cuts with the space which added the grinding | polishing value (beta) to the length PL of one side of the prism 10. However, since the cutting of the multiple vitreous body 5 of step S7 is performed in the direction parallel to the surface of the prism 10, it is not the diagonal length PD of the prism 10, but the length of one side of the prism 10. In addition to (PL), cutting is performed at intervals ensuring only the polishing value?.

By the way, it is necessary to polish the cut surfaces 6A and 6B to produce a plan view and parallelism of both surfaces after polishing, but at this time, both surfaces after polishing need to be polished to form a strictly 45 ° angle with respect to the film formation surface C. . Therefore, polishing is performed on the basis of the reference plane B exposed at both ends of the rectangular glass body 6. Since the reference surface B is a part of the film formation surface C, and the film formation surface C has high planarity and parallelism, when polishing is performed based on the reference surface B, the surface after polishing is the film formation surface C. And can form an angle of strictly 45 °.

First, as shown in Fig. 7B, the cut surface 6A of the rectangular glass body 6 is polished to obtain the polished surface 6C (step S8: first rectangular glass body polishing step). An example of the jig used when performing this grinding | polishing is shown in FIG. As shown in Fig. 8A, side walls 7S are provided on both sides of the jig 7, and mounting portions 7P for mounting both ends of the rectangular glass body 6 on each side wall 7S. ) Are formed in plurality. A cutout part is formed in the mounting part 7P, and the protrusion part P (part in which the reference plane B is exposed among the both ends of the rectangular glass body 6) is hold | maintained in the cutout part. The cutout part of the mounting part 7P is comprised from the vertical surface 7PA and the slope 7PB, and the angle between the slope 7PB and the bottom surface 7B of the jig 7 is comprised so that it may become 45 degrees strictly. Moreover, the angle of the vertical surface 7PA and the slope 7PB is also comprised so that it may become 45 degrees strictly. The cutout portion of the mounting portion 7P has a shape of a right angled isosceles triangle, and the height of the vertical surface 7PA is smaller than the length PL of one side of the prism 10. In addition, the shape of the mounting part 7P of the jig 7 is supposed to maintain the angle with high precision, and the space | interval between the side wall part 7S provided in both sides of the jig 7 is the inside of the small board | substrate 2. It is assumed that it is substantially the same as the length dimension LY2 (substantially configured to be slightly longer than the depth dimension LY2 so that the rectangular glass body 6 can be mounted). As shown in FIG. 8 (b), the relief groove 7N is formed in the mounting portion 7P in order to protect the edge of the protrusion P of the rectangular glass body 6 mounted on the mounting portion 7P.

The protrusion P of the rectangular glass body 6 is mounted on the mounting portion 7P. FIG. 8B is a cross-sectional view showing that the cut surface 6A of the rectangular glass body 6 is mounted so as to be an upper surface. Among the protrusions P of the rectangular glass body 6, the polishing surface 5D is mounted so as to abut the vertical surface 7PA so that the reference plane B abuts against the slope 7PB of the mounting portion 7P. The angle formed between the slope 7PB of the mounting portion 7P and the bottom surface 7B of the jig 7 is guaranteed with an accuracy of 45 °, and the reference plane B and the polished surface 5D of the rectangular glass body 6 are guaranteed. ) Is also 45 degrees. Therefore, the protrusion P of the rectangular glass body 6 is fitted to the mounting part 7P strictly. On the other hand, the interval between the cut surfaces 6A and 6B of the rectangular glass body 6 is formed slightly longer than the length PL of one side of the prism 10, so that the cut surface 6A is the upper surface 7U of the side wall portion 7S. It is in a state slightly raised than). Therefore, the cut surface 6A of the raised prism 10 is polished, but such polishing is performed until it is equal to the length PL of one side of the prism 10. At this time, by polishing to the position of the ridgeline of the reference surface B, the polishing can be performed until it becomes equal to the length PL of one side of the prism 10. Thereby, as shown in FIG.7 (b), the part of the rectangular glass body 6 which was the large board | substrate 1 can obtain the thing of the rectangular shape of a right-sided isosceles triangle (two sides of a right-angle sandwiching PL).

Next, the cut surface 6B is polished (second rectangular glass body polishing: step S9). At this point, among the rectangular glass bodies 6, the polishing surfaces 5C, 5D, and 6C are finished with high angle accuracy with respect to the film formation surface C. As shown in FIG. Therefore, the remaining cut surface 6B is polished on the basis of the polished surface 6C to form the polished surface 6D as shown in Fig. 7C. In addition, since the polishing surfaces 5C, 5D, and 6C are all finished with high angle accuracy with respect to the film formation surface C, not only the polishing surface 6C, but any one surface, any two surfaces, Alternatively, the polishing surface 6D may be formed on the basis of all the surfaces. As described above, the rectangular glass body 6 can be finished with high angle accuracy so that all surfaces of the polishing surfaces 5C, 5D, 6C, and 6D form one surface of the prism 10.

In addition, since the jig | tool 7 mentioned above is an example to the last, and the gist of this invention is grind | polished based on the reference surface B which is a part of film-forming surface C, the jig 7 is shown in FIG. It is not limited to this. Therefore, arbitrary things can be applied as long as it is possible to grind on the reference surface B as a reference. And the grinding | polishing based on the grinding | polishing surfaces 5C, 5D, and 6C was demonstrated when grind | polishing the cut surface 6B. For example, the jig | tool which can grind | polish based on the reference surface B is prepared, It is also possible to grind the cut surface 6B by such a jig.

Since the antireflection film has not yet been formed on the polishing surfaces 6C and 6D, an antireflection film is formed on both surfaces (step S10), and the polishing surfaces 5C, 5D, 6C, as shown by the broken line in FIG. 6D) the cutting is performed at equal intervals in the vertical direction (step S11). The cutting interval at this time is cut so as to be equal to the length PL of one side of the prism 10. Thereby, the prism 10 which has the high angle precision of the length PL of one side as shown in FIG. 2, and the dielectric multilayer film 3 is formed in the angle of 45 degrees can be obtained.

As described above, the present invention prepares a large substrate and a small substrate, which are two kinds of substrates having the same width and thickness and different depth dimensions, and depositing a dielectric multilayer film on one surface thereof, thereby alternately forming a plurality of large substrates and small substrates. Every single layer. At this time, since both ends of the large substrate protrude from the small substrate in the depth direction, part of the surface on which the dielectric multilayer film is formed is always exposed as a reference surface, so that polishing is performed based on this reference surface to achieve high angle accuracy. You can make

In addition, since the prism 10 of embodiment mentioned above has the shape of a cube and demonstrates that the surface in which the dielectric multilayer film 3 is formed is 45 degrees, the large board | substrate 1 and the small board | substrate 2 are explained. Is laminated at the same width as the thickness LZ1 of the substrate in the width direction. That is, the stepped angle is 45 ° by shifting the LZ1 in the width direction, but the stepped angle is formed at an angle different from 45 ° when the gap is shifted from the width direction other than LZ1. In step S4, if the laminated glass body 4 is cut in a direction parallel to the stepped inclination, but the stepped angle is formed at an angle different from 45 °, the dielectric multilayer film formed on the finally produced prism 10 is formed. The surface on which (3) is formed can be made into an angle different from 45 degrees. Moreover, the shape of the prism 10 can also be made different from a cube. Also at this time, although the angle is different from 45 °, the dielectric multilayer film 3 is formed on the prism 10 with high angular accuracy.

In the present invention, the optical pickup device has been described by way of example. However, the present invention is not limited thereto, and any dielectric multilayer film is formed on the cube-type prism at a predetermined angle. For example, it is applicable also to the dichroic prism as an optical component which comprises the liquid crystal projector which performs color separation and color synthesis. As a dichroic prism, a cube-shaped prism is used, and a dichroic film that separates reflection and transmission by the wavelength of incident light is formed at an angle of 45 ° with respect to the optical path. Therefore, this invention can be applied also to such a dichroic prism.

The prism manufacturing method of this invention can manufacture the prism which has high angular precision.

Claims (5)

In the prism manufacturing method which manufactures the prism in which the dielectric multilayer film is formed in a predetermined angle, Both surfaces of the large substrate, which is a flat substrate, and the small substrate having the same width and thickness as the large substrate and having a shorter depth dimension than the large substrate, are polished to plan a plan view of both surfaces of the large substrate and the small substrate. And a planar double-sided polishing process for producing parallelism, A dielectric multilayer film deposition process of forming a film formation surface and a non-film formation surface by forming a dielectric multilayer film on any two surfaces of both the large substrate and the small substrate polished in the flat plate double-side polishing step; A step of alternately bonding the large substrate and the small substrate so that the film forming surface and the non-film forming surface are bonded to each other, so as to be stepped by shifting a predetermined interval in the width direction, and in the inner length direction of the large substrate. A substrate bonding step of laminating so that the tip is exposed as a reference plane to obtain a laminated glass body; A laminated glass body cutting step of cutting the laminated glass body at intervals equal to or greater than the length of one side of the prism in a direction parallel to the stepped inclination to obtain a plurality of multiple glass bodies; A multi-layered glass body double-sided polishing step of performing double-side polishing of the two cut surfaces cut in the laminated glass body cutting step of the multi-layered glass body to give a plan view and parallelism of the two cut surfaces; A multiple vitreous body cutting step of cutting the multiple vitreous bodies at intervals equal to or greater than the length of one side of the prism in a direction perpendicular to the polishing surface to obtain a plurality of rectangular vitreous bodies; A first rectangular vitreous polishing step of grinding the cut surface cut in the multiple vitreous cutting step, based on the reference plane formed at both ends of the rectangular vitreous body; A second rectangular vitreous polishing step of polishing a surface opposite to this surface based on the surface polished in the first rectangular vitreous polishing step; The plurality of prisms are formed by cutting the rectangular glass body polished in the rectangular glass body polishing step at equal intervals in a direction perpendicular to the polishing surface polished in the multi-layered glass body polishing step or the polishing surface polished in the rectangular glass body polishing step. Method for producing a prism comprising a rectangular glass body cutting step to obtain a. The method of claim 1, In the substrate bonding step, the large substrate and the small substrate are shifted by the thickness of the substrate in the width direction so that the step shape is 45 °. The method of claim 1, In the first rectangular glass body polishing step, both ends of the rectangular glass body are supported by a jig having a vertical surface having a height equal to the length of one side of the prism and a slope formed at an angle of 45 ° with the vertical surface, and the rectangular glass body The manufacturing method of the prism characterized by grinding the cut surface cut | disconnected in the said multiple vitreous cutting process to the height of the said vertical surface. The method of claim 1, The method of manufacturing a prism according to the second rectangular glass body polishing step, wherein the surface not polished in the first rectangular glass body polishing step is polished based on the reference plane. The method of claim 1, In the method of manufacturing the prism, an antireflection film is formed on two polishing surfaces polished in the multiple vitreous polishing step after the multiple vitreous polishing step, The antireflection film is formed on the polishing surface polished in the first and second rectangular glass body polishing steps after the second rectangular glass body polishing step.

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