JPH0566303A - Manufacture of polarized light separating prism - Google Patents
Manufacture of polarized light separating prismInfo
- Publication number
- JPH0566303A JPH0566303A JP22986891A JP22986891A JPH0566303A JP H0566303 A JPH0566303 A JP H0566303A JP 22986891 A JP22986891 A JP 22986891A JP 22986891 A JP22986891 A JP 22986891A JP H0566303 A JPH0566303 A JP H0566303A
- Authority
- JP
- Japan
- Prior art keywords
- prism
- cut
- polarization separation
- cut surface
- dummy substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- Optical Elements Other Than Lenses (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は偏光分離プリズムの製造
方法に関する。光通信又は光伝送の分野においては、光
アイソレータ等の光デバイスの構成要素として偏光分離
プリズムがよく使用される。偏光分離プリズムは、入射
した光を偏光面が互いに直交する偏光成分に分離して、
これらの偏光成分を異なる光路で出射させるためのもの
である。偏光分離プリズムを備えた光デバイスの低価格
化や品質の均一化を行う上で大量生産に適した偏光分離
プリズムの製造方法が模索されている。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a polarization separation prism. In the field of optical communication or optical transmission, a polarization separation prism is often used as a constituent element of an optical device such as an optical isolator. The polarization splitting prism splits the incident light into polarization components whose polarization planes are orthogonal to each other,
It is for emitting these polarization components in different optical paths. A method for manufacturing a polarization splitting prism suitable for mass production is being sought in order to reduce the cost and make the quality of an optical device including the polarization splitting prism uniform.
【0002】[0002]
【従来の技術】従来の一般的な偏光分離プリズムの構成
例を図2に示す。この偏光分離プリズムは、三角プリズ
ム2,4の斜面間に偏光分離膜6を介在させてこれらを
一体化して構成されている。2. Description of the Related Art An example of the structure of a conventional general polarization separation prism is shown in FIG. This polarization separation prism is configured by interposing a polarization separation film 6 between the slopes of the triangular prisms 2 and 4 and integrating them.
【0003】このような偏光分離プリズムの従来の製造
方法としては、三角プリズム2,4のいずれか一方の斜
面上に誘電体多層膜等からなる偏光分離膜6を予め形成
しておき、偏光分離膜が形成されている三角プリズムと
偏光分離膜が形成されていない三角プリズムとを光学接
着剤により一体化する方法が一般的である。As a conventional method of manufacturing such a polarization separation prism, a polarization separation film 6 made of a dielectric multilayer film or the like is previously formed on one of the slopes of the triangular prisms 2 and 4, and polarization separation is performed. A general method is to integrate a triangular prism on which a film is formed and a triangular prism on which a polarization separation film is not formed with an optical adhesive.
【0004】[0004]
【発明が解決しようとする課題】ところで、偏光分離プ
リズムの構成要素となる三角プリズムの製造方法として
は、ガラス材を加熱して半溶融状態でプレスしてから研
磨加工する方法や、最近では平板ガラスから複数の三角
プリズムを得る方法(特開平2−154203号)が公
知である。By the way, as a method of manufacturing a triangular prism which is a constituent element of a polarization separation prism, a method of heating a glass material to press it in a semi-molten state and then polishing it, and recently, a flat plate A method of obtaining a plurality of triangular prisms from glass (JP-A-2-154203) is known.
【0005】しかしながら、例えばこれらの方法により
製造された三角プリズムを用いて偏光分離プリズムを上
述の従来方法により製造する場合、接着の際の三角プリ
ズムの位置ずれや接着剤の塗布量のばらつき等に起因し
て品質が不均一になる、或いはプリズムが小型化するに
つれて製造作業性が悪化し低価格化が困難になるという
問題が生じている。このように従来方法は大量生産に適
した方法ということはできない。However, when the polarization separating prism is manufactured by the above-mentioned conventional method using the triangular prisms manufactured by these methods, for example, the positional deviation of the triangular prism at the time of bonding and the variation of the coating amount of the adhesive are caused. Due to this, there arises a problem that the quality becomes non-uniform, or the manufacturing workability deteriorates as the prism becomes smaller, and it becomes difficult to reduce the price. Thus, the conventional method cannot be said to be suitable for mass production.
【0006】本発明はこのような事情に鑑みて創作され
たもので、大量生産に適した偏光分離プリズムの製造方
法を提供することを目的としている。The present invention was created in view of such circumstances, and an object thereof is to provide a method of manufacturing a polarization separation prism suitable for mass production.
【0007】[0007]
【課題を解決するための手段】本発明の偏光分離プリズ
ムの製造方法は、複数のプリズム用平板の一方の主面に
それぞれ偏光分離膜を形成する第1のステップと、上記
複数のプリズム用平板を上記偏光分離膜が同じ側になる
ように積層して相互に接着する第2のステップと、上記
複数のプリズム用平板を上記主面に対して45°傾斜し
た平面にて切断し、この第1の切断面を鏡面研磨する第
3のステップと、上記複数のプリズム用平板を上記第1
の切断面に垂直で且つ該第1の切断面における上記偏光
分離膜の露出辺に平行な平面にて切断し、この第2の切
断面を鏡面研磨する第4のステップと、上記複数のプリ
ズム用平板を上記第2の切断面に垂直で且つ該第2の切
断面における上記偏光分離膜の露出辺を含む平面にて切
断し、この第3の切断面を鏡面研磨する第5のステップ
とをこの順に経るようにしたものである。A method of manufacturing a polarization separation prism according to the present invention comprises a first step of forming a polarization separation film on one main surface of a plurality of prism flat plates, and a plurality of the prism flat plates. Is laminated so that the polarization separation films are on the same side, and they are adhered to each other, and the plurality of prism flat plates are cut at a plane inclined at 45 ° with respect to the main surface. The third step of mirror-polishing the cut surface of No. 1 and the first flat plate for prisms
And a plurality of prisms, the fourth step of cutting along the plane perpendicular to the cut surface of the first cut surface and parallel to the exposed side of the polarization separation film in the first cut surface, and polishing the second cut surface to a mirror surface. A fifth step of cutting the flat plate perpendicular to the second cut surface and a plane including the exposed side of the polarization separation film in the second cut surface, and mirror-polishing the third cut surface; Are to be processed in this order.
【0008】[0008]
【作用】本発明方法によると、偏光分離プリズムの大量
生産が可能になり、品質の安定化、低価格化を実現する
ことができるようになる。According to the method of the present invention, it becomes possible to mass-produce the polarization separation prism, and it becomes possible to stabilize the quality and reduce the cost.
【0009】[0009]
【実施例】以下本発明の望ましい実施例を説明する。図
1は本発明の実施例における偏光分離プリズムの製造手
順の説明図である。まず、図1(A)に示すように、ガ
ラス(例えばBK7)等からなるプリズム用平板12の
一方の主面に誘電体多層膜等からなる偏光分離膜14を
形成する。プリズム用平板12の大きさ及び枚数は製造
すべき偏光分離プリズムの個数に応じて設定される。ま
た、プリズム用平板12の厚みは、切断及び研磨しろを
考慮して、製造すべき偏光分離プリズムの形状が例えば
立方体である場合には、その一辺の寸法の1/√2倍よ
りも僅かに大きく設定される。The preferred embodiments of the present invention will be described below. FIG. 1 is an explanatory view of a manufacturing procedure of a polarization separation prism in the embodiment of the present invention. First, as shown in FIG. 1A, a polarization separation film 14 made of a dielectric multilayer film or the like is formed on one main surface of a prism flat plate 12 made of glass (for example, BK7). The size and number of the prism flat plates 12 are set according to the number of polarization separation prisms to be manufactured. Further, in consideration of cutting and polishing margins, the thickness of the prism flat plate 12 is slightly smaller than 1 / √2 times the dimension of one side when the shape of the polarization separation prism to be manufactured is, for example, a cube. Largely set.
【0010】次いで、それぞれ一方の主面に偏光分離膜
14が形成されたプリズム用平板12を、図1(B)に
示すように、偏光分離膜14が同じ側になるように積層
して相互に光学接着剤により接着する。この実施例で
は、製造歩留りを高めるために、プリズム用平板12を
その厚みに相当する幅だけずらして積層している。Next, as shown in FIG. 1 (B), the prism flat plates 12 each having a polarization separation film 14 formed on one main surface are laminated so that the polarization separation films 14 are on the same side. It is adhered to by an optical adhesive. In this embodiment, in order to increase the manufacturing yield, the prismatic flat plates 12 are stacked with a shift corresponding to the thickness thereof.
【0011】そして、この積層されたプリズム用平板1
2を上述の主面に対して45°傾斜した平面15にて切
断し、この第1の切断面を鏡面研磨する。研磨方法とし
ては、ダイヤモンドホイール(粒度600〜800)を
用いた方法を採用可能である(以下同様)。Then, the laminated flat plate 1 for prisms is used.
2 is cut at a plane 15 inclined by 45 ° with respect to the above-mentioned main surface, and the first cut surface is mirror-polished. As a polishing method, a method using a diamond wheel (grain size 600 to 800) can be adopted (the same applies hereinafter).
【0012】次いで、図1(C)に示すように、前述の
第1の切断面(符号19)を切断用のダミー基板16に
仮接着し、第1の切断面19に垂直で且つダミー基板1
6と偏光分離膜14の接触辺18を含む平面20にて各
プリズム用平板12を切断する。そして、この第2の切
断面についても鏡面研磨しておく。Next, as shown in FIG. 1C, the above-mentioned first cut surface (reference numeral 19) is temporarily adhered to the dummy substrate 16 for cutting, and is perpendicular to the first cut surface 19 and is a dummy substrate. 1
The flat plate 12 for each prism is cut along a plane 20 including the contact side 18 of the polarization separation film 14 and the polarizing plate 6. Then, the second cut surface is also mirror-polished.
【0013】この場合、ダミー基板16を切断により分
離してダミー基板の分離片を取り除く前に鏡面研磨を行
ってもよいし、ダミー基板16については分離せずに、
ダミー基板を取り除いてから鏡面研磨を行ってもよい。In this case, the dummy substrate 16 may be separated by cutting and mirror polishing may be performed before removing the separated pieces of the dummy substrate, or the dummy substrate 16 may not be separated,
Mirror polishing may be performed after removing the dummy substrate.
【0014】この実施例において、ダミー基板16と偏
光分離膜14の接触辺18を含む平面にて切断を行って
いるのは、切断された部分の端部からも偏光分離プリズ
ムを得ようとするためである。従って、このような製造
歩留りの向上を考慮しないときには、ダミー基板16と
偏光分離膜14の接触辺18に平行で且つこの接触辺1
8を含まない平面にて切断を行ってもよい。In this embodiment, the cutting is performed on the plane including the contact side 18 of the dummy substrate 16 and the polarization separation film 14 in order to obtain the polarization separation prism even from the end of the cut portion. This is because. Therefore, when the improvement of the manufacturing yield is not taken into consideration, the contact side 1 is parallel to the contact side 18 between the dummy substrate 16 and the polarization separation film 14.
You may cut | disconnect on the plane which does not include 8.
【0015】また、本実施例において、第1の切断面1
9をダミー基板16に仮接着しているのは、ダミー基板
16と偏光分離膜14の接触辺18を含む平面にて切断
を行う場合に、この接触辺18の近傍の部分においてプ
リズム用平板12が破損することを防止するためであ
る。In the present embodiment, the first cut surface 1
9 is temporarily adhered to the dummy substrate 16 when the cutting is performed on the plane including the contact side 18 between the dummy substrate 16 and the polarization separation film 14 and the prism flat plate 12 is provided in the vicinity of the contact side 18. This is to prevent the breakage.
【0016】しかる後、前述の切断部分についてダミー
基板16を取り除いて、図1(D)に示すように、この
切断部分を鏡面研磨された第2の切断面にてもう一つの
ダミー基板22に仮接着する。そして、第2の切断面に
垂直で且つ第2の切断面における偏光分離膜14の露出
辺24を含む平面26にてプリズム用平板を切断し、こ
の第3の切断面を鏡面研磨する。Thereafter, the dummy substrate 16 is removed from the above-mentioned cut portion, and this cut portion is formed into another dummy substrate 22 by the mirror-polished second cut surface as shown in FIG. 1 (D). Temporarily bond. Then, the prism flat plate is cut along a plane 26 which is perpendicular to the second cut surface and includes the exposed side 24 of the polarization separation film 14 on the second cut surface, and the third cut surface is mirror-polished.
【0017】ここで、第2の切断面をダミー基板22に
仮接着して切断を行っているのは、図1(C)の工程に
おいてダミー基板16を用いた理由と同じ理由による。
このような一連の工程を経て互いに分離されたブロック
をプリズム片30と称することにする。このプリズム片
30は、ダミー基板22から取り外した状態で、その四
つの主面を鏡面研磨されているので、そのまま偏光分離
プリズムとして使用することができる。The reason why the second cut surface is temporarily adhered to the dummy substrate 22 for cutting is the same as the reason why the dummy substrate 16 is used in the step of FIG. 1C.
The blocks separated from each other through such a series of steps will be referred to as prism pieces 30. This prism piece 30 can be used as it is as a polarization separation prism because its four main surfaces are mirror-polished in a state of being removed from the dummy substrate 22.
【0018】このプリズム片30よりもさらに小型な立
方体形状の偏光分離プリズムを得ようとする場合には、
プリズム片30を第3の切断面に垂直で且つ互いに所定
の間隔を隔てた平面28にて切断し、この第4の切断面
を鏡面研磨するようにすればよい。こうすることによ
り、図1(E)に示すような立方体形状の偏光分離プリ
ズム32を得ることができる。When it is desired to obtain a cubic polarization splitting prism which is smaller than the prism piece 30,
The prism piece 30 may be cut along a plane 28 perpendicular to the third cut surface and separated from each other by a predetermined distance, and the fourth cut surface may be mirror-polished. By doing so, it is possible to obtain the polarization splitting prism 32 having a cubic shape as shown in FIG.
【0019】尚、本実施例においては、図1(A)及び
図1(B)に示したように、一方の主面にそれぞれ偏光
分離膜が形成された複数のプリズム用平板を積層してい
るが、この方法によらなくとも大量生産に適した偏光分
離プリズムの製造が可能である。即ち、両方の主面にそ
れぞれ偏光分離膜が形成されたプリズム用平板と、いず
れの主面にも偏光分離膜が形成されていないプリズム用
平板とを交互に積層した後に、第3のステップ以降のス
テップを実施するようにした方法も実質的に本発明方法
と同一である。In this embodiment, as shown in FIGS. 1 (A) and 1 (B), a plurality of prism flat plates each having a polarization splitting film formed on one main surface are laminated. However, it is possible to manufacture a polarization separation prism suitable for mass production without using this method. That is, after alternately laminating a prism flat plate having a polarization separation film formed on both main surfaces and a prism flat plate having no polarization separation film formed on any of the main surfaces, the third step and subsequent steps are performed. The method adapted to carry out the steps of is substantially the same as the method of the present invention.
【0020】[0020]
【発明の効果】以上説明したように、本発明によると、
大量生産に適した偏光分離プリズムの製造方法の提供が
可能になるという効果を奏する。その結果、品質が均一
でしかも低価格化が可能な偏光分離プリズムを提供する
ことをできるようになる。As described above, according to the present invention,
It is possible to provide a method for manufacturing a polarization separation prism suitable for mass production. As a result, it is possible to provide a polarization separation prism that has uniform quality and can be manufactured at low cost.
【図1】本発明の実施例における偏光分離プリズムの製
造手順の説明図である。FIG. 1 is an explanatory diagram of a manufacturing procedure of a polarization separation prism in an example of the present invention.
【図2】偏光分離プリズムの構成例を示す斜視図であ
る。FIG. 2 is a perspective view showing a configuration example of a polarization separation prism.
12 プリズム用平板 14 偏光分離膜 16,22 ダミー基板 12 Flat plate for prism 14 Polarization separation film 16, 22 Dummy substrate
Claims (4)
にそれぞれ偏光分離膜(14)を形成する第1のステップ
と、 上記複数のプリズム用平板(12)を上記偏光分離膜(14)が
同じ側になるように積層して相互に接着する第2のステ
ップと、 上記複数のプリズム用平板(12)を上記主面に対して45
°傾斜した平面(15)にて切断し、この第1の切断面を鏡
面研磨する第3のステップと、 上記複数のプリズム用平板(12)を上記第1の切断面(19)
に垂直で且つ該第1の切断面における上記偏光分離膜(1
4)の露出辺に平行な平面(20)にて切断し、この第2の切
断面を鏡面研磨する第4のステップと、 上記複数のプリズム用平板(12)を上記第2の切断面に垂
直で且つ該第2の切断面における上記偏光分離膜(14)の
露出辺(24)を含む平面(26)にて切断し、この第3の切断
面を鏡面研磨する第5のステップとをこの順に経ること
を特徴とする偏光分離プリズムの製造方法。1. A first step of forming a polarization separation film (14) on one main surface of each of a plurality of prism flat plates (12); The second step of laminating so that 14) are on the same side and adhering them to each other;
A third step of cutting along the inclined plane (15) and mirror-polishing the first cut surface, and the plurality of prism flat plates (12) above the first cut surface (19)
And the polarization splitting film (1
A fourth step of cutting along a plane (20) parallel to the exposed side of 4) and mirror-polishing the second cut surface, and the plurality of prism flat plates (12) on the second cut surface. A fifth step of cutting at a plane (26) which is vertical and includes the exposed side (24) of the polarization separation film (14) in the second cut surface, and mirror-polishs the third cut surface. A method for manufacturing a polarization separation prism, which is characterized in that the steps are performed in this order.
第2の切断面をダミー基板(22)に仮接着して行われるこ
とを特徴とする請求項1に記載の偏光分離プリズムの製
造方法。2. The method according to claim 1, wherein the cutting in the fifth step is performed by temporarily adhering the second cut surface to a dummy substrate (22).
記第1の切断面(19)をダミー基板(16)に仮接着した状態
で、該ダミー基板(16)と上記偏光分離膜(14)の接触辺(1
8)を含む平面にて行われることを特徴とする請求項1又
は2に記載の偏光分離プリズムの製造方法。3. In the cutting in the fourth step, the dummy substrate (16) and the polarization splitting film (14) are prepared with the first cutting surface (19) temporarily adhered to the dummy substrate (16). Contact edge of (1
The method for manufacturing a polarization separation prism according to claim 1 or 2, which is performed on a plane including 8).
に、得られたプリズム片(30)を上記第3の切断面に垂直
な平面(28)にて切断し、この第4の切断面を鏡面研磨し
て、立方体形状の偏光分離プリズム(32)を得るようにし
たことを特徴とする請求項1乃至3のいずれかに記載の
偏光分離プリズムの製造方法。4. The prism piece (30) obtained after passing through the first to fifth steps is cut along a plane (28) perpendicular to the third cut surface, and the fourth cut surface is obtained. 4. The method for producing a polarization separation prism according to claim 1, wherein the cube-shaped polarization separation prism (32) is obtained by mirror polishing.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22986891A JPH0566303A (en) | 1991-09-10 | 1991-09-10 | Manufacture of polarized light separating prism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22986891A JPH0566303A (en) | 1991-09-10 | 1991-09-10 | Manufacture of polarized light separating prism |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0566303A true JPH0566303A (en) | 1993-03-19 |
Family
ID=16898964
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22986891A Withdrawn JPH0566303A (en) | 1991-09-10 | 1991-09-10 | Manufacture of polarized light separating prism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0566303A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4429080C1 (en) * | 1994-08-17 | 1996-02-08 | Technoglas Neuhaus Gmbh | Process for the production of prisms, in particular microprisms |
WO2000057235A3 (en) * | 1999-03-19 | 2001-02-15 | Etec Systems Inc | Multi-beam scanner including a dove prism array |
US6998003B2 (en) | 1996-11-01 | 2006-02-14 | Unaxis Balzers Aktiengesellschaft | Optical element and its manufacturing process |
US7361250B2 (en) * | 2003-11-12 | 2008-04-22 | Nidec Sankyo Corporation | Prism, method of producing a prism, and optical head apparatus using a prism |
CN113534303A (en) * | 2021-06-22 | 2021-10-22 | 浙江蓝特光学股份有限公司 | Method for processing cemented prism |
-
1991
- 1991-09-10 JP JP22986891A patent/JPH0566303A/en not_active Withdrawn
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4429080C1 (en) * | 1994-08-17 | 1996-02-08 | Technoglas Neuhaus Gmbh | Process for the production of prisms, in particular microprisms |
WO1996005525A1 (en) * | 1994-08-17 | 1996-02-22 | Technoglas Neuhaus Gmbh | Process for manufacturing prisms, in particular microprisms and beam splitters |
US6998003B2 (en) | 1996-11-01 | 2006-02-14 | Unaxis Balzers Aktiengesellschaft | Optical element and its manufacturing process |
WO2000057235A3 (en) * | 1999-03-19 | 2001-02-15 | Etec Systems Inc | Multi-beam scanner including a dove prism array |
US7361250B2 (en) * | 2003-11-12 | 2008-04-22 | Nidec Sankyo Corporation | Prism, method of producing a prism, and optical head apparatus using a prism |
CN113534303A (en) * | 2021-06-22 | 2021-10-22 | 浙江蓝特光学股份有限公司 | Method for processing cemented prism |
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