KR20060102094A - Apparatus and method of clamping mask for organic electro luminescence display device - Google Patents

Abstract

The present invention relates to an apparatus and method for clamping a mask for an organic light emitting display device capable of improving the accuracy of mask stretching.

A clamping apparatus for a mask for an organic electroluminescent display device of the present invention comprises: a mask for selectively transmitting a deposit to form a thin film on a substrate; A stretching device disposed around the mask to stretch the mask; A reference master positioned below the mask and presenting a reference for the degree of stretching of the mask, wherein the reference master includes a substrate on which organic electroluminescent arrays are to be formed, and at least one opaque freeze formed on one side of the substrate It is characterized by including an in mark.

Description

Clamping apparatus and method for masks for organic light emitting display devices {APPARATUS AND METHOD OF CLAMPING MASK FOR ORGANIC ELECTRO LUMINESCENCE DISPLAY DEVICE}

1 is a view showing one pixel of a conventional organic electroluminescent display device.

2 is a diagram for explaining a process in which a mask is stretched by a mask clamping device.

3 is a plan view showing a mask clamping device in the present invention.

4 illustrates the mask and the master in detail.

5 is a view showing an organic electroluminescent display device formed using a mask formed by a mask clamping device according to the present invention.

   <Explanation of symbols for the main parts of the drawings>

2,102: substrate 4,104: anode electrode

108: partition 10,110: organic light emitting layer

10c: light emitting layer 122, 112: cathode electrode

63,163: Gripper 171: Power Tree Lever

169: power transmission unit 167: ball screw box

166: motor 60160: mask

85,185: Master 186: Align Mark

61,161: reference point

The present invention relates to an organic electroluminescent display device, and more particularly, to an apparatus and method for clamping a mask for an organic electroluminescent display device.

Recently, various flat panel display devices that can reduce weight and volume, which are disadvantages of cathode ray tubes, have emerged. Such flat panel displays include a liquid crystal display, a field emission display, a plasma display panel, and an organic electroluminescence display. Etc.

Among these, organic EL display devices are self-luminous devices that emit phosphors by recombination of electrons and holes, and are classified into inorganic ELs using inorganic compounds and organic ELs using organic compounds. Such an EL display device has an advantage that the response speed is as fast as that of a cathode ray tube compared to a passive light emitting device requiring a separate light source such as a liquid crystal display device. In addition, the EL display element has many advantages such as low voltage driving, self-luminous, thin film type, wide viewing angle, fast response speed, high contrast, and the like, and is expected to be the next generation display device.

1 is a cross-sectional view showing a general organic EL cell structure for explaining the light emission principle of an organic EL display element. The organic EL cell has an organic light emitting layer 10 positioned between the anode electrode 4 and the cathode electrode 12, and the organic light emitting layer 10 includes an electron injection layer 10a, an electron transport layer 10b, and a light emitting layer 10c. ), A hole transport layer 10d, and a hole injection layer 10e.

When a voltage is applied between the anode electrode 4 and the cathode electrode 12, electrons generated from the cathode electrode 12 move toward the light emitting layer 10c through the electron injection layer 10a and the electron transport layer 10b. In addition, holes generated from the anode electrode 4 move toward the light emitting layer 10c through the hole injection layer 10e and the hole transport layer 10d. Accordingly, in the light emitting layer 10c, light is generated by collision and recombination of electrons and holes supplied from the electron transport layer 10b and the hole transport layer 10d, and the light is emitted to the outside through the anode electrode 4. To display an image.

Meanwhile, the light emitting layer 10c of the conventional organic EL display device is formed by a thermal deposition and vacuum deposition process using a grill mask, and the grill mask used at this time is manufactured by a separate process and then used by a mask clamp device. After stretching to the desired size and fixed to the mask frame is used to form the light emitting layer (10c).

2 is a view for explaining a stretching process of the mask by the mask gripping device.

First, after the mask 60 is loaded into a predetermined system, the mask 60 is aligned in an area where the glyph 63 for stretching the mask 60 is located by vertical movement. Then, the gripper 63 is advanced to bite the mask 60.

Thereafter, the mask 60 is stretched using a plurality of points 61 provided on the mask 60 and a master 85 positioned below the mask 60.

This will be described in more detail as follows.

The master 85 has an alignment mark 86 on the outer side thereof to serve as a criterion for the degree of stretching of the mask 60. That is, when the mask 60 is stretched, the mask 60 is stretched so that the plurality of reference points 61 of the mask 60 correspond to the alignment mark 86 of the master 85. After that, when the reference point 61 of the mask 60 and the alignment mark 86 of the master 85 are matched with the camera 95 positioned on the mask 60, the stretching is stopped. After that, the stretched mask 60 is fixed to the mask frame having a rectangular frame shape and then used for depositing a deposit.

On the other hand, in such a conventional stretching device, even if the alignment mark 86 of the master 85 and the point 61 of the mask 60 are positioned correctly, the accuracy of the stretching of the mask 60 is somewhat due to the process deviation between each other. Will fall.

That is, the master 85 is manufactured by a separate manufacturing process so that the master 85 itself has a predetermined error. By stretching the mask 60 with respect to the master 85 having such an error, the stretched mask 60 has a significantly large error. As a result, the formation position of the deposit in the actual deposition process using the mask 60 is incorrect. Accordingly, a method for improving the accuracy of stretching the mask 60 is required.

Accordingly, an object of the present invention is to provide a clamping apparatus and method for a mask for an organic light emitting display device capable of improving the accuracy of mask stretching.

In order to achieve the above object, the clamping device of the mask for an organic electroluminescent display device according to the present invention comprises a mask for selectively transmitting the deposit to form a thin film on the substrate; A stretching device disposed around the mask to stretch the mask; A reference master positioned below the mask and presenting a reference for the degree of stretching of the mask, wherein the reference master includes a substrate on which organic electroluminescent arrays are to be formed, and at least one opaque freeze formed on one side of the substrate It is characterized by including an in mark.

The substrate includes a strip-shaped transparent electrode; An opaque electrode is formed to improve conductivity of the transparent electrode, and the opaque alignment mark is formed of the same material as the opaque electrode.

At least one reference point is provided outside the mask, and the reference point is aligned to face the opaque alignment marks when the mask is stretched.

The clamping method of the mask for an organic electroluminescent display device according to the present invention comprises the steps of providing a mask for forming a thin film on the substrate by selectively transmitting the deposit; Preparing a substrate on which a thin film pattern and an opaque align mark are formed and on which a predetermined deposit is to be deposited using the mask; And stretching the mask based on the position of the opaque align mark formed on the substrate.

The thin film pattern of the substrate may include a strip-shaped transparent electrode and an opaque electrode for improving conductivity of the transparent electrode, and the opaque alignment marks may be simultaneously formed of the same material as the opaque electrode.

The stretching of the mask may include matching a position of a reference point provided on the mask to the opaque alignment mark by stretching the mask.

Other objects and features of the present invention in addition to the above object will be apparent from the description of the embodiments with reference to the accompanying drawings.

Hereinafter, exemplary embodiments of the present invention will be described with reference to FIGS. 3 to 5.

3 is a view showing a part of an apparatus for manufacturing an organic EL display device according to an embodiment of the present invention, that is, a part of a mask clamping device.

The mask clamping device 130 shown in FIG. 3 is located on the long side and short side of the mask 160 to supply power to the glyph 163 and the mask 160 to bite the mask 160. A power transmission unit 169 positioned between the power supply unit 165 and the power supply unit 165 and the gripper 163 to transfer the power supplied from the power supply unit 165 to the gripper 163. Equipped. Such a mask clamp device 130 is supported by a clamp die (not shown).

About 10 glippers 163 are arranged on the long side of the mask 60 and about 8 on the short side, for example. The gripper 163 is also equipped with an adjustment screw for adjusting the frictional resistance of the gripper 163.

The power supply unit 165 includes a plurality of motors 166 connected to the power transmission unit 169 and three motors 166 connected to the power transmission unit 169 so as to be arranged at each side of the mask 160, respectively. It is comprised by the ball screw box 167 which converts the rotational motion of 166 into linear motion.

The power transmission unit 169 is formed by a combination of a power tree lever 171 and a plurality of power tree levers 171, and each power tree lever 171 has a plurality of branches 172. ) Is a combination of

The mask 160 is a grill mask used for forming the light emitting layer of the organic EL display device and includes an effective region 160a and an invalid region 160b except for the effective region 160a. In the effective region 160a of the mask 160, a plurality of array regions P1 for selectively transmitting the formation regions of the light emitting layer for implementing R, G, and B are formed. A mask (a mask) is formed outside the effective region 160a. 160 A number of points 161 are formed that provide a reference during stretching. That is, the user sets the degree of stretching of the mask 160 based on the plurality of points 161 displayed on the mask 160, and then stretches the mask 160 with a force having a corresponding size. The non-effective area 60b is an outer area excluding the effective area 60a so as to be bitten by the glyph 163 so as to receive the tensile force first when stretching.

As shown in FIG. 4, a master 185 is provided at the bottom of the mask 160 to present a criterion of the degree of stretching when the mask 160 is stretched.

In the present invention, a substrate on which an actual deposit is to be formed is used as the mask 160 unlike the conventional art.

Referring to Figure 4 specifically describes the master in the present invention as follows.

As the master 185, a mother substrate on which a plurality of arrays P1, that is, a plurality of organic electroluminescent arrays are formed, is used. In the array P1 of the mother substrate, an opaque conductive metal pattern or the like for improving the conductivity of the data line 104 and the data line 104 is formed. In addition, an alignment mark 186 made of an opaque metal is formed on the outer side of the substrate.

The degree of stretching of the mask 160 is controlled using the reference point 161 of the mask 160 and the alignment mark 186 of the master 185.

That is, when the mask 160 is stretched, the mask 160 is stretched so that the reference point 161 of the mask 160 corresponds to the alignment mark 186 of the master 185. Thereafter, the reference point 161 of the mask 160 and the alignment mark 186 of the master 185 are checked using the camera 195 positioned at the top of the mask 160. By using the mother substrate directly in the stretching process of the mask 160, the error of stretching of the mask 160 can be considerably reduced.

As described above, in the present invention, the accuracy of stretching of the mask 160 may be improved by using the substrate to be subjected to the actual deposition process as the reference master 185 in the stretching process of the mask 160.

Hereinafter, the clamping operation and method of the mask using the mask clamping device 130 illustrated in FIGS. 3 and 4 will be described.

First, the mask 160 is loaded into a given system and then aligned with the region where the glyph 163 is located by vertical motion. Thereafter, the gripper 163 moves forward to clamp the mask 160, and the motor 166 is driven to convert the rotational motion of the motor 166 into a linear motion by the ball screw box 167, thereby driving power. It is transmitted to the glyph 163 via this power transmission unit 169.

At this time, when the power transmission unit 169 received the power of the motor 166 is reversed, the gripper 163 is reversed, and accordingly, the gripper 163 clamps the mask 160 to clamp the mask 160. ) Is stretched. In this case, the mask 160 is stretched until the reference point 161 of the mask is matched with the alignment mark 186 of the master 185 positioned below it. As such, the stretched mask 160 is fixed to a mask frame and used for the deposition of certain deposits on the substrate used as the master 185.

The mask 160 thus formed is used when forming a thin film of the organic EL display element. For example, at least one of the light emitting regions implementing at least one of red, green, and blue may be selectively exposed to form an organic material on a predetermined substrate.

5 is a perspective view showing an organic EL display device formed using the apparatus for manufacturing an organic electroluminescent display device according to the present invention.

In the organic EL display device illustrated in FIG. 5, the first electrode (or anode electrode) 104 and the second electrode (or cathode electrode) 112 are formed on the substrate 102 in a direction crossing each other.

The first electrode 104 is formed on the substrate 102 spaced apart by a predetermined interval. On the substrate 102 on which the first electrode 104 is formed, an insulating film (not shown) having an opening for each EL cell EL region is formed. On the insulating layer, a partition 108 for separating the organic light emitting layer 110 and the second electrode 112 to be formed thereon is positioned. The partition 108 is formed in a direction crossing the second electrode 104 and has a reverse taper structure in which the upper end portion has a wider width than the lower end portion. On the insulating film on which the partition 108 is formed, the organic light emitting layer 110 and the second electrode 112 made of an organic compound are sequentially deposited on the entire surface. As shown in FIG. 1, the organic light emitting layer 110 is formed by stacking a hole injection layer 10e, a hole transport layer 10d, a light emitting layer 10c, an electron transport layer 10b, and an electron injection layer 10a.

Here, in the light emitting layer 10c of the organic light emitting layer, light emitting layers for R, G, and B are sequentially formed by using the mask 160 stretched using the manufacturing apparatus of the present invention.

As described above, the apparatus and method for clamping a mask for an organic light emitting display device according to the present invention uses a substrate to be subjected to the actual deposition process as a master in the stretching process of the mask. Accordingly, the error of the stretching of the mask can be considerably reduced, thereby improving the accuracy of the stretching of the mask.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (6)

A mask for selectively transmitting the deposit to form a thin film on the substrate; A stretching device disposed around the mask to stretch the mask; A reference master positioned below the mask and presenting a reference for the degree of stretching of the mask, The reference master is And a substrate on which organic electroluminescent arrays are to be formed, and at least one opaque alignment mark formed on one side of the substrate. The method of claim 1, The substrate is A strip-shaped transparent electrode; An opaque electrode is formed to improve conductivity of the transparent electrode, And the opaque align mark is formed of the same material as the opaque electrode at the same time. The method of claim 1, At least one reference point is provided outside the mask, And the reference point is aligned to face the opaque alignment marks when the mask is stretched. Selectively permeating the deposit to provide a mask for forming a thin film on the substrate; Preparing a substrate on which a thin film pattern and an opaque align mark are formed and on which a predetermined deposit is to be deposited using the mask; And stretching the mask based on a position of an opaque alignment mark formed on the substrate. The method of claim 4, wherein The thin film pattern of the substrate includes a strip-shaped transparent electrode and an opaque electrode for improving the conductivity of the transparent electrode, The opaque alignment mark is clamping method of a mask for an organic light emitting display, characterized in that formed simultaneously with the same material as the opaque electrode. The method of claim 4, wherein Stretching the mask And matching the position of the reference point provided in the mask with the opaque alignment mark by stretching the mask.

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