KR20060047121A - Recovery device of chemical agents - Google Patents

Abstract

The present invention relates to a chemical collection device,

A plurality of tanks used as means for sucking and discharging the leaked chemicals are built-in, and a vacuum line and a pressurizing line for supplying a vacuum pressure or an air pressure to one side of the tank are connected to each other and at the same time A suction body connected to a suction line for suction of the discharge line and a discharge line for discharging the chemical to the drum, the suction main body having a control board for controlling the chemical suction to the tank and the discharge of the chemical to the drum;

A drum connected to the tank through the discharge line to store chemicals discharged from each tank; Characterized in that,

Collect chemicals from accidents such as leaks or spills due to leakage of chemicals used in semiconductor manufacturing or LCD manufacturing plants or their careless handling, and reprocessing the collected chemicals by filtering It relates to a chemical collection device that can be reused throughout the process.

Drum, Suction Body, Tank, Neutralizer Tank, Suction Tube, Spray Gun, Control Board, Ejector,

Description

Recovery device of chemical agents

1 is a schematic diagram showing a process of the device of the present invention;

Figure 2 is another embodiment of the device of the present invention.

Explanation of symbols for main parts of the drawings

1: caster, 10: drum,

11: sensor, 20: suction body,

23: control board, 24: ejector,

25, 26, 59, 60: vacuum valve, 27, 28: suction valve,

29, 30, 57, 58: pressure valve, 33, 34: tank,

40: suction line, 42: suction line,

43: discharge line, 50, 51: neutralizer tank,

52, 53: on-off valve, 54: connection line,

55: spray gun, 100: supply line,

101: branch supply line, 102: first branch supply line,

103: vacuum line, 104: first press line,

105: second pressurized line, 106: first vacuum line,

S1 ~ S8: level sensor,

The present invention relates to a device for collecting chemicals, and more particularly, to chemicals generated from accidents such as leaks or spills due to leakage of chemicals used in semiconductor manufacturing or LCD manufacturing plants or their careless handling. A device for collecting leaked chemicals for collecting chemicals.

Generally, acid or alkaline chemicals used in semiconductor manufacturing or LCD manufacturing plants are used, and such chemicals often leak from the manufacturing apparatus or leak or spill due to careless handling.

When such an accident occurs, conventionally, a neutralizing agent is administered and collected using cotton-type suction towels such as neutralization and towels.

By the way, depending on the type of chemicals used, but strong acid or strong alkaline, if necessary, the neutralizing agent is used after the neutralization process or they are collected using a suction towel.

Such collection is inhaled according to the amount of neutralizer to be collected, that is, the amount of chemicals to be collected is increased, and the collection of chemicals is directly exposed to the collector because the worker is manually made through a medium called a suction towel. There is a problem.

In addition, the collection of these chemicals is through a method of inhalation using a medium called a suction towel, so a suction towel that inhales chemicals is absolutely necessary, and the amount of use of the inhalation towel continues to occur. Because it contains the same, it causes enormous cost and incineration or landfill when it is processed, and it causes the problem of environmental pollution, and also because the chemical is inhaled by the suction towel, it is impossible to collect the chemical because it cannot be reused. have.

The present invention is intended to solve this conventional problem.

The present invention is to enable the safe collection, reuse by filtering the collected chemicals through the above-mentioned problem.

Hereinafter, the present invention will be described in detail with reference to FIGS. 1 and 2 as follows.

First, in order to understand the present invention, the present invention may be more easily understood by a process in which the present invention operates under the assumption that chemicals are leaked from a manufacturing plant.

That is, the apparatus of the present invention is configured to be easily moved to the accident place at all times by installing the caster (1) in the lower portion of the apparatus of the present invention so as to be mobile.

And the apparatus of the present invention is composed of a drum 10 and the suction main body 20.

The upper part of the suction main body 20 is configured with a flexible hose 21 which can receive compressed air from the outside, and the connector 22 is installed in front of the suction main body 20 to receive the compressed air. Make sure

And the flexible hose 21 is connected to the supply line 100, the control line 23 is installed in the supply line 100 therein the opening or closing of each of the plurality of valves described in the following A plurality of control valves (not shown) for controlling the air to be supplied for the purpose is built in a state interlocked with the valve.

The branch supply line 101 is branched to the supply line 100, and the branch supply line 101 is branched to the first branch supply line 102 and the first pressurizing line 104.

The first branch supply line 102 is connected to the injector 24, and the ejector 24 is formed with a vacuum line 103 connected to the first and second tanks 33 and 34 to be rearranged. The vacuum pressure is applied to the vacuum line 103 while discharging the compressed air supplied to the first branch supply line 102 to the outside.

The first and second tanks 33 and 34 are means for temporarily storing chemicals and supplying them back to the drum 10. The vacuum lines 103 and the vacuum tanks 103 are disposed on the tanks 33 and 34, respectively. A first pressurizing line 104 is connected to each other, and the vacuum line 103 is formed with first and second vacuum valves 25 and 26 for intermittent vacuum pressure, and the first pressurizing line 104 First and second pressure valves 29 and 30 are formed to interrupt the supply of compressed air.

In addition, the first and second tanks 33 and 34 are provided with a plurality of level sensors S1 to S4 for detecting the full water level and the low water level of the chemical, and the sensing information of the level sensors S1 to S4 is provided on the control board. It is supplied to 23.

On the other hand, the lower side of the first and second tanks 33 and 34, the suction line 40 for sucking chemicals and the discharge line 43 for discharging a predetermined amount of chemicals to the drum (10) Is connected.

A flexible hose 41 is connected to the end of the suction line 40, and a suction pipe 42 for sucking chemicals is formed at the end of the flexible hose 41.

A flexible hose 44 having a predetermined length is also connected to the end of the discharge line 43, and the flexible hose 44 is connected to the upper portion of the drum 10 so as to be separated from the first or second tanks 33 and 34. The discharged chemical is to be filled in the drum (10).

In addition, the drum 10 is provided with a water level sensor 11 for detecting the water level to prevent the overflow of the chemical, the detection information of the water level sensor 11 is supplied to the control board 23 to the control board 23 is used as information to control each valve.

Although FIG. 1 illustrates that the first and second tanks 33 and 34 are installed, one tank or two or more tanks may be installed and used as necessary.

Referring to the operation of the present invention configured as described above are as follows.

Compressed air is supplied to the supply line 100, and a part of the compressed air is supplied to the ejector 24 through the branch supply line 101 and the first branch line 102, and the ejector 24 is formed by the ejector 24. The vacuum pressure is applied to the vacuum line 103 while discharging the compressed air introduced into the first branch line 102 to the outside.

In this state, when the user inputs a predetermined operation key to collect the leaked chemicals, the control board 23 opens the first vacuum valve 25 and the first suction valve 27 to open the first tank ( 33) is connected to the suction pipe 42, and when the operator touches the suction pipe 42 to the chemical, the chemical is sucked through the suction pipe 42 and stored in the first tank (33).

When the chemical collected in the first tank 33 reaches the full water level and is detected by the first level sensor S1, the control board 23 stops the chemical collection operation to the first tank 33 and the second tank. Each valve is controlled such that the chemical collected in the first tank 33 is discharged to the drum 10 while being controlled to be continued to 34.

To this end, the control board 23 turns off the first vacuum valve 25 and the first suction valve 27 so that no further chemicals can flow into the first tank 33 and the second vacuum valve 26. And the second suction valve 28 to control the chemicals flowing into the suction pipe 42 to be collected by the second tank 34, and at the same time, the first pressure valve 29 and the first discharge valve 31. The chemicals collected in the first tank 33 are discharged to the drum 10 through the discharge line 43 by the air pressure supplied through the first pressure line 104 to be discharged and recovered.

When the chemical is discharged from the first tank 33 and the low water level is sensed by the second sensor S2, the control board 23 turns off the first pressure valve 29 and the first discharge valve 31 so that the chemicals are discharged. The control board 23 is controlled so that the air pressure is not supplied to the first tank 33, and when the full water level of the chemical recovered to the second tank 34 is detected by the third level sensor S3. The vacuum valve 26 and the second suction valve 28 are turned off to prevent chemicals from flowing into the second tank 34, and the control board 23 is again equipped with the first vacuum valve 25 and the first suction valve. (27) is opened to allow the chemical to be sucked into the first tank (33).

In addition, the control board 23 turns on the second pressure valve 30 and the second discharge valve 32 to turn on the collected chemicals stored in the second tank 34 by air pressure. Is to be discharged and recovered.

When the full water level is detected by the sensor 11 installed in the drum 10 by the recovery operation, the control board 23 turns off the second pressure valve 30 and the second discharge valve 32. A predetermined alarm signal is output so that the user can replace the drum 10 with a new one.

As described above, the present invention alternately operates the plurality of tanks 33 and 34 to simultaneously perform the suction operation of the chemical and the operation of discharging the sucked chemical to the drum, thereby quickly and quickly leaking the chemical to the drum (10). ) Will be able to recover.

2 shows another embodiment of the present invention,

A plurality of neutralizing tanks (50, 51) is installed inside the suction body (20), and the neutralizing agent filled in the neutralizing tanks (50, 51) is sprayed onto the leaked chemicals through the spray gun (55). I would have to.

To this end, the first vacuum line 106 branched from the vacuum line 103 is connected to the respective neutralizer tanks 50 and 51, and the second pressure line branched from the first pressure line 104 ( 105, a third vacuum valve 59 and a fourth vacuum valve 60 are formed in the first vacuum line 106 to control the vacuum pressure, and the second pressurizing line 105 has air. A third pressure valve 57 and a fourth pressure valve 58 for controlling the pressure are formed.

The neutralizers discharged from the neutralizer tanks 50 and 51 are connected to the output guns of the first and second neutralizer tanks 50 and 51 and the spray gun 55 by the connection line 54. It was allowed to spray through.

Another embodiment of the present invention configured as described above is as follows.

The first and second neutralizing tanks 50 and 51 may be filled with a neutralizing agent.

That is, when the third vacuum valve 59 is opened by the control of the control board 23, a vacuum pressure is generated in the first neutralizing tank 50, and in this state, the spray gun 55 is placed in the neutralizing agent storage tank. When the neutralizing agent is sucked through the spray gun 55 is filled into the first neutralizing tank 55, this filling operation is carried out until the high water level is detected by the fifth sensor (S5).

Then, the neutralizing agent can be filled in the second neutralizing tank 51 through the same process.

When the neutralizing agent is sprayed through the spray gun 55 while the first and second neutralizing tanks 51 are filled with the neutralizing agent, it is understood that the control board 23 controls the third connected to the first neutralizing tank 50. The pressure valve 57 is opened, whereby the air pressure is supplied to the first neutralizer tank 50 and the neutralizer is supplied to the spray gun 55 through the connection line 54 and sprayed.

If the low water level is detected by the sixth level sensor S6 during the spraying operation of the neutralizing agent, the control board 23 turns off the third pressure valve 57 and then opens the fourth pressure valve 58 to open the second neutralizing tank. The neutralizer stored in the 51 is to be sprayed through the spray gun (55).

As described above, another embodiment of the present invention may recover the leaked chemicals using the first and second tanks 33 and 34 as well as the first and second neutralizing tanks for chemicals requiring neutralizing agents. Since the neutralizer stored in 50, 51 can be used by spraying through the spray gun 55, the operator does not have to manually recover the leaked chemicals.

As described above, the present invention quickly collects and collects chemicals generated by accidents such as leaks or spills due to leakage of chemicals used in semiconductor manufacturing or LCD manufacturing plants or their careless handling. It is possible to reuse the chemicals through reprocessing through filtering, and also to prevent the contamination by chemicals because the worker does not have to remove the chemicals by hand. You can expect.

Claims (5)

A plurality of tanks used as means for sucking and discharging the leaked chemicals are built-in, and a vacuum line and a pressurizing line for supplying a vacuum pressure or an air pressure to one side of the tank are connected to each other and at the same time A suction body connected to a suction line for suction of the discharge line and a discharge line for discharging the chemical to the drum, the suction main body having a control board for controlling the chemical suction to the tank and the discharge of the chemical to the drum; A sensor for detecting the full water level of the chemical, a drum connected to the tank through the discharge line to store the chemical discharged from each tank, the drum having the sensor installed on the top; Collection device for chemicals, characterized in that consisting of. According to claim 1, wherein the vacuum line, the pressurization line, the suction line and the suction line is provided with a line intermittent valve, the control board controls the respective valves to inhale and suck chemicals into a plurality of tanks Collecting device of the chemical, characterized in that for controlling the chemical to be discharged to the drum. The apparatus of claim 1 or 2, wherein the control board controls the chemical suction and discharge operations to each tank to be alternately performed. According to claim 1, wherein the suction body stores a certain amount of neutralizing agent, and further comprises a plurality of neutralizing tanks in a state in which the pressure line is connected, the outlet side of the neutralizing tank spray gun for the injection of the neutralizing agent in the connection line Collection device for chemicals, characterized in that connected by. The apparatus of claim 4, wherein the first vacuum line branched from the vacuum line is connected to the neutralizer tank to suck the neutralizer through the spray gun to fill the neutralizer tank.

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