KR20060027983A - Robot for transporting substrate and substrate transporting method using thereof - Google Patents

Abstract

The present invention relates to a substrate transfer robot capable of stably adsorbing and gripping a substrate having a shape deformation such as a curved surface due to a high temperature process during the manufacturing process of a flat panel display device and a substrate transfer method using the same.

To this end, the present invention specifically includes a kit bar provided with a connection hole along an upper surface thereof and having a vacuum flow path communicating the connection hole therein with at least one of them arranged side by side; Tilt the vacuum pads and the vacuum pads that are seated along the upper surface of the basket bar in a state where the vacuum holes in one-to-one correspondence with each connection hole are vertically penetrated and the bottom surface contacting the upper surface of the basket bar is spherical. A vacuum suction port having a bracket which secures the upper surface of the basket bar to a load; It provides a substrate transfer robot having a hand portion including a frame connecting the end of the basket bar.

Vacuum suction cup, pad, curved surface, bracket, packing member

Description

Board for transporting substrate and substrate transporting method using same             

1 is a perspective view of a typical substrate transfer robot.

Figure 2 is an enlarged perspective view of the vacuum suction port of the typical substrate transfer robot.

3 is a cross-sectional view taken along the line III-III of FIG.

Figure 4 is a perspective view of a substrate transfer robot according to the present invention.

Figure 5 is an exploded perspective view of the vacuum suction port of the substrate transfer robot according to the present invention.

6 is a cross-sectional view taken along the line VI-VI of FIG. 4.

<Description of Symbols for Main Parts of Drawings>

2: substrate 110: body portion

120: arm portion 130: hand portion

132: frame 134: catch bar

135: vacuum flow path 135a: connection hole

136: vacuum suction port 138: alignment sensor

140: vacuum pad 141: bottom surface

142: Benin Hall 144: annular hook end                 

146: bracket 147:

148: insertion hole 150: screw

152: packing member

The present invention relates to a substrate transfer robot and a substrate transfer method using the same, and more particularly, a substrate capable of stably adsorbing and grasping a substrate having a shape deformation such as a curved surface by a high temperature process during a manufacturing process of a flat panel display device. It relates to a transfer robot and a substrate transfer method using the same.

As the society enters the information age, the display field for processing and displaying a large amount of information is rapidly developing, and in response to this, various kinds of reputations with excellent characteristics such as thinning, light weight, and low power consumption have been developed. Flat Panel Display device (FPD) has been introduced.

At present, these flat panel displays are widely welcomed by various display devices such as computer monitors, TVs, and large screens, while rapidly replacing existing cathode ray tubes (CRTs). Liquid crystal display device (LCD), plasma display panel device (PDP), field emission display device (FED), and electroluminescence display device (ELD).

On the other hand, these flat panel display devices are usually formed on a transparent insulating substrate such as glass via a unique layer of light emitting or polarizing material, and recently, in particular, after arranging pixels, which are basic units of image expression, in a matrix manner, An active matrix type having a one-to-one correspondence with a switching element such as a thin film transistor (TFT) to independently control each pixel has been spotlighted for its excellent resolution and video performance.

In this case, the manufacturing process of the flat panel display device includes a thin film deposition process for forming a thin film layer of a predetermined material on a substrate, a photolithography process for exposing a selected portion for patterning the thin film in a desired form, and the exposed portion. Etching process to remove and implement a thin film pattern of the desired shape is repeatedly included, in addition, numerous processes such as cutting, including cleaning.

Substrates, which are objects in the manufacturing process of these flat panel display devices, are each transported to various various flat panel display manufacturing equipments that perform the corresponding process. A transfer robot is used.

1 is a perspective view showing a general substrate transfer robot, a body portion 10 that can be moved up and down, and an arm portion 20 that is installed and contracted and extended in a plane thereof and the arm portion 20. It may be divided into a hand part 30 which is attached to the end and grips the substrate 2 directly.                         

The double hand part 30 includes a frame 32 having a predetermined length connected to an end of the arm part 20, and a plurality of catch bars 34 extending from the vertical side by side in a vertical direction. The bar 2 has a fork shape, and lifts up the substrate 2 as if it is supported by a plurality of catch bars 34 through the associated operation of the arm part 20 and the body part 10, and then transports it to a desired place. Can be set.

At this time, there is a plurality of vacuum suction holes 36 capable of forming a vacuum for stable gripping of the substrate 2 along the upper surfaces of the respective catch bars 34, and a catch bar biased toward the frame 32 separately. 34) The upper surface is provided with at least one alignment sensor 38 to check the alignment of the substrate.

Therefore, when the substrate 2 is seated on the upper surface of the plurality of basket bars 34, the vacuum suction port 36 creates a vacuum to be closely adsorbed and gripped, and the substrate 2 is correctly aligned using the alignment sensor 38. After confirming it, carry it to the intended place.

In this case, the vacuum suction hole 36 which plays a key role in the stable transfer of the substrate will be described in more detail with reference to FIGS. 2 and 3, wherein FIG. 2 illustrates any one vacuum suction hole 36. 3 is an enlarged perspective view, and FIG. 3 is a cross-sectional view taken along line III-III of FIG. 2.

First, as shown, the general vacuum bar 34 has a vacuum flow path 35 connected to an external pressure reducing means such as a pump through the longitudinal direction, and the connection hole 35a communicating therewith is respectively the kit bar 34. A plurality is provided along the upper surface.

In addition, the vacuum suction port 36 may have a vacuum pad 40 having a circular cube shape having a predetermined height having a flat upper and lower surfaces so as to support the substrate 2 in a state where the vacuum suction hole 36 is seated on the upper surface of the catch bar 34. While the edge of the vacuum pad 40 may be divided into brackets 46 closely coupled to the upper surface of the cassette bar 34, the double vacuum pad 40 may be a polyetheretherketone, which is a thermoplastic resin having a large heat resistance. : PEEK) material, the height of which is about 4mm, the annular engaging end 44 is protruded laterally along the lower side of the side, and one-to-one correspondence with the connecting hole 35a of the catch bar 34 in the direction of the center A through hole 42 is provided.

In addition, the bracket 46 has a flange shape in which an insertion hole 48 having a diameter large enough to cover the annular locking end 44 of the vacuum pad 40 at the center thereof is vertically penetrated. After placing the vacuum pad 40 on the upper surface of the basket bar 34 so that the connection hole 35a of the cassette bar 34 and the vacuum hole 42 of the vacuum pad 40 are in one-to-one correspondence, the bracket 46 As the vacuum pad 40 passes through the insertion hole 48, the annular locking end 44 covers the bracket 46 so as to be caught by the edge of the insertion hole 48, and then penetrates through the upper edge of the bracket 46. By fastening a plurality of screws 50 inserted into the basket bar 34, the vacuum suction holes 36 are fixed to the basket bar 34.

In this case, the O-ring 52 may be additionally interposed to connect the vacuum hole 42 of the vacuum pad 40 and the connection hole 35a of the kit bar 34 without a play.

When the substrate 2 is seated on the vacuum pad 40, a negative pressure is applied to the vacuum flow path 35 and the connection hole 35a and the vacuum hole 42 communicating with the vacuum flow path 35 using an external pressure reducing means. The surface of the board | substrate 2 is vacuum-sucked and is hold | maintained closely.                         

On the other hand, the manufacture of a general flat panel display device includes a number of high temperature processes including chemical vapor deposition, the substrate (2) subjected to these high temperature processes, the shape is partially deformed by heat, so that a gentle curve appears on a part of the surface such as crying or bending. .

This phenomenon is intensified as the size of the substrate is enlarged according to the large area of the flat panel display device. However, even if the surface of the substrate is curved, the process is not impossible afterwards. Due to the load, the degree of bending may become more severe, and as a result, the rigid vacuum grip is difficult, so that the substrate alignment is misaligned or even broken away from the hand 30 during transportation.

This is caused by the vacuum suction port 36, in particular the vacuum pad 40.

That is, as described above, the general vacuum pad 40 has a flat circular cuboid shape at the top and bottom thereof, and thus, when the curvature appears on a part of the surface of the substrate 2 as shown by a virtual line in FIG. The surface is not completely adhered to the upper surface of the vacuum pad 40, and as a result, a gap is generated between the vacuum holes 42 and vacuum suction is impossible.

This has a disadvantage in that the stable transport of the substrate 2 is difficult.

The present invention has been made to solve the above problems, a flat substrate, as well as substrates that are bent on the surface such as crying or bending by high temperature process can also be stably vacuum-grip to transport the substrate more safely It is an object of the present invention to provide a substrate transfer robot which can be used and a substrate transfer method using the same.

The present invention is provided with a connection bar is provided with a connecting hole along the upper surface in order to achieve the above object and a vacuum passage for communicating the connection hole therein is formed at least one side by side; Tilt the vacuum pads and the vacuum pads that are seated along the upper surface of the basket bar in a state where the vacuum holes in one-to-one correspondence with each connection hole are vertically penetrated and the bottom surface contacting the upper surface of the basket bar is spherical. A vacuum suction port having a bracket which secures the upper surface of the basket bar to a load; It provides a substrate transfer robot having a hand portion including a frame connecting the end of the basket bar.

At this time, the vacuum pad is characterized in that the polyether ether ketone material.

In addition, the vacuum suction port further includes a tube-shaped packing member having a stretchable upper and lower ends respectively inserted into the vacuum hole and the connection hole to tightly connect them, and the packing member is made of rubber.

In addition, it further includes an annular engaging end projecting laterally along the lower side of the vacuum pad, wherein the bracket is penetrated by the vacuum pad and the insertion hole covering the annular engaging end is provided up and down to provide the side of the vacuum pad. It is characterized in that the cover is coupled to cover the upper surface of the basket bar, the bracket is characterized in that the screw coupled to the basket bar.

The arm unit further includes at least one alignment sensor provided at one edge of the basket toward the frame to sense an alignment state of the substrate, and one end connected to the middle of the frame to contract and extend. The other end of the arm portion is characterized in that it further comprises a body portion to be elevated.

In addition, the present invention is a substrate transfer method using the substrate transfer robot as described above, when the substrate is seated on the vacuum suction port of the hand portion, the vacuum pad is inclined along the curved surface of the substrate so that the vacuum hole is free from the back of the substrate. Close contact; Provided is a substrate transfer method comprising the step of vacuum-adsorbing the substrate by applying a vacuum to the connection hole, the packing member and the vacuum hole, including the vacuum flow path.

In this case, the substrate is characterized in that the processed in the manufacturing process of the flat panel display device, the high temperature process is characterized in that the thin film deposition process, especially PECVD, the present invention will be described in more detail with reference to the drawings.

4 is a partial perspective view showing a substrate transfer robot according to the present invention, a body part 110 which is lifted up and down, an arm part 120 which contracts and extends from one point thereof, and the arm part 120. ) It may be divided into a hand portion 130 that is attached to the end to directly support the substrate (2).

At this time, the body portion 110 may have a form of a vertical shaft as shown as an example, and may have a configuration capable of moving in the plane along the rail or the bottom surface according to the purpose. In addition, the arm part 120 may be in the form of a horizontal shaft capable of contraction and extension, not illustrated in the form of the articulated joint, and the hand part 130 attached to the end thereof has a frame 132 connected to the arm part 120 and thus From at least one catch bar 134 branched side by side in the same direction.

 In this case, although not shown in the separate drawings, the hand 130 is particularly provided with two or more layers so as to have different heights from each other, and each of the loaders (loaders) and unloaders (loader, unloader) It may be operated as an unloader, but in any case, one or more kit bars 134 are arranged side by side in the same plane so that the substrate 2 can be seated, and a frame 132 for connecting and fixing one end thereof. It includes, and approximately the middle portion of the frame 132 is connected to the end of the arm portion (120).

In addition, at least one vacuum suction port 136 and an alignment sensor 138 are provided along the upper surface of each basket bar 134 for stable holding of the substrate 2, preferably the vacuum suction hole 136 is provided. The plurality of catch bars 134 may be arranged along the longitudinal direction, the alignment sensor 138 may be provided at one end biased toward the frame 132 direction.

Accordingly, when the substrate 2 is seated on the catch bar 134, the vacuum adsorption unit 136 creates a vacuum and grips it tightly, and the alignment sensor 138 is one edge of the substrate 2 facing the frame 132. You can check whether it is properly seated through the alignment status of.

On the other hand, the above description may be no different from the general case, the present invention is a vacuum suction port provided with a plurality of the hand portion 130 for supporting the substrate 2, in particular along the upper surface of the catch bar 134 ( 136), which will be described in more detail with reference to FIG. 6 showing an exploded perspective view of FIG. 5 and a cross-sectional structure taken along line VI-VI shown in FIG.

As shown, the vacuum suction port 136 according to the present invention includes at least one vacuum pad 140 largely seated along the upper surface of the kit bar 134, a packing member 152 interposed therein, and the vacuum pad ( 140 may be bent into a bracket 146 for coupling to the kit bar upper surface.

In more detail, first, the vacuum passage 135 is formed inside the kit bar 134 and is connected to a pressure reducing means such as an external pump, and a plurality of connection holes 135a are provided along the top surface of the kit bar 134. It is in communication with the vacuum flow path 135.

In addition, the vacuum pads 140 respectively seated on the catch bars 134 may be made of a polyetheretherketone (PEEK) material, which is a thermoplastic resin having a large heat resistance, that is, on the upper surface of the catch bar 134. The bottom surface 141 is in contact with a convex spherical shape, while the top surface has an approximately circular cube shape which is flat as in the past. And the annular engaging end 144 protrudes laterally along the lower side of the side, and the bent hole 142 is provided in the center up and down direction.

Next, the vacuum hole 142 of the vacuum pad 140 and the connection hole 135a of the kit bar 134 are connected to the packing member 152, which is made of a material having excellent elasticity and airtightness such as rubber. While having a tubular shape having a predetermined length, one end is received into the vacuum hole 142 and the other end is received into the connection hole 135a of the catch bar 134.                     

Finally, the bracket 146 has a flange shape in which an insertion hole 148 of a diameter capable of covering the annular locking end 144 of the vacuum pad 140 is vertically penetrated at an approximately center thereof.

Accordingly, the vacuum pad 140 is seated on the upper surface of the basket bar 134 such that the vacuum hole 142 of the vacuum pad 140 and the connection hole 135a of the basket bar 134 are connected in a one-to-one correspondence through the packing member 152. The bracket 146 covers the bracket 146 so that the vacuum pad 140 penetrates the insertion hole 148 of the bracket 146, and the edge of the insertion hole 148 hangs the annular end 144 of the vacuum pad 140. The bracket 146 penetrates the edge of the bracket 146 and is fixed by using a plurality of screws 150 inserted into the kit bar 134. In this case, the bracket 146 has the angle of the vacuum pad 140 to a certain degree. Step 147 of a predetermined height is provided on the bottom surface to be inclined.

That is, the biggest feature of the present invention is that the bottom surface 141 of the vacuum pad 140 can be inclined freely in any direction on the plane, and at the same time, the vacuum hole 142 and the connection hole 135a In order to prevent the occurrence of a gap between the tube-shaped packing member 152 to maintain the airtight, the vacuum pad 140 is utilized by the packing member 152 as a joint as long as it is not obstructed by the bracket 146 The predetermined angle may be tilted.

The reason for having such a configuration is that the substrate is in contact with the upper surface of the vacuum pad 140 because the shape is deformed in a high temperature process to stably and closely grip and hold the curved or curved substrate. Even though the vacuum pad 140 is inclined along this, the upper surface of the vacuum pad 140 may be in close contact with each other. As a result, the vacuum flow path 135 or the connection hole 135a and the packing may be formed using an external vacuum pump. When a vacuum is applied to the vacuum hole 142 through the member 152, a gap is not generated, so that suction gripping is possible.

In this case, preferably, the height of the vacuum pad 140 is slightly longer to facilitate the angle change than the conventional one, and may be, for example, about 4.5 to 5.5 mm.

A process of transporting the substrate using the substrate transfer robot according to the present invention described above will be briefly described with reference to FIGS. 4 to 6.

First of all, the apparatus for manufacturing a flat panel display device to which the substrate 2 is to be taken out, for example, thin film deposition with high temperature, in particular, a substrate transfer robot is positioned in front of a PECVD chamber, and then the body portion 110 and the arm portion 120 are associated with each other. Through the operation, the hand part 130 is aligned to the front immediately below the substrate to be transferred.

Subsequently, the arm portion 120 extends so that the hand portion 130 is arranged side by side directly below the target substrate, and then the substrate 2 is moved on the catch bar 134 by lifting and lowering the body portion 110. .

Next, the arm portion 120 is contracted so that the hand portion 130 and the substrate 2 seated on the upper surface thereof are carried out to the outside. In this process, the adsorption pad 140 according to the present invention is disposed on the rear surface of the substrate 2. Inclined at a predetermined angle while being inclined along the curved state, the suction sensor is gripped with a vacuum, and the alignment sensor 138 checks the alignment state of the substrate 2.

Subsequently, the substrate transfer robot is positioned with the substrate 2 held in front of a manufacturing apparatus of a separate flat panel display such as a cassette into which the substrate 2 is to be loaded, and the substrate 2 is moved by lifting and lowering the body portion 110. The hand portion 130 held by) is aligned directly behind the position where the substrate 2 is to be loaded.

Subsequently, the arm portion 120 extends and the substrate 2 and the hand portion 130 are inserted directly to the upper end of the carrying position, and then the body 110 descends, leaving only the substrate 2 in the carrying position and descending to the bottom thereof. After the arm 120 is contracted, the hand 130 is re-extracted again.

In this process, the vacuum pad 140 of the hand unit 130 releases the vacuum so that the substrate 2 can be easily separated, and the alignment state of the substrate is adjusted using the alignment sensor 138 according to the purpose. It is also possible to check.

The substrate transfer robot according to the present invention described above has the advantage that the adsorption pad can be tilted freely to a predetermined angle, so that the substrate having the curved surface as well as the stable substrate can be stably gripped by a high temperature process or the like.

This has the advantage of safer substrate transport.

Claims (13)

A hook bar provided with a connection hole along an upper surface thereof, and having a vacuum flow path for communicating the connection hole therein, the at least one being arranged side by side; Tilt the vacuum pads and the vacuum pads that are seated along the upper surface of the basket bar in a state where the vacuum holes in one-to-one correspondence with each connection hole are vertically penetrated and the bottom surface contacting the upper surface of the basket bar is spherical. A vacuum suction port having a bracket which secures the upper surface of the basket bar to a load; Substrate transfer robot having a hand portion including a frame connecting the end of the basket. The method of claim 1, The vacuum pad is a substrate transfer robot, characterized in that the polyether ether ketone material. The method of claim 1, The substrate suction robot further includes a tube-shaped packing member having an elastic upper and lower ends respectively inserted into the vacuum hole and the connection hole to tightly connect them. The method of claim 3, wherein The packing member is a substrate transfer robot, characterized in that the rubber material. The method of claim 1, Substrate transfer robot, characterized in that it further comprises an annular engaging end projecting laterally along the bottom side of the vacuum pad. The method of claim 5, The bracket is a substrate transfer robot, characterized in that the insertion hole covering the annular locking end while penetrating by the vacuum pad and penetrates up and down to cover the upper side of the basket bar while bordering the side of the vacuum pad. The method of claim 6, The bracket is a substrate transfer robot, characterized in that screwed to the basket bar. The method of claim 1, And at least one alignment sensor provided at an edge of the basket bar facing the frame to sense an alignment state of the substrate. The method of claim 1, An arm portion connected at one end to the middle of the frame to shrink and extend; Substrate transfer robot, characterized in that it further comprises a body portion which is connected to the other end of the arm portion is elevated. A substrate transfer method of a substrate transfer robot according to any one of claims 1 to 9, When the substrate is seated on the vacuum suction hole of the hand part, the vacuum pad is inclined along the curved surface of the substrate to closely contact the vacuum hole with the back surface of the substrate without gap; And vacuum is applied to the connection hole and the vacuum hole, including the vacuum flow path, to suck and hold the substrate. The method of claim 10, The substrate is a substrate transfer method characterized in that the manufacturing process of the flat panel display device. The method of claim 11, The high temperature process is a substrate transfer method, characterized in that the thin film deposition process. The method of claim 12, The thin film deposition process is a substrate transfer method, characterized in that the PECVD process.

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