KR20050114208A - 고분해능의 압전 모터 - Google Patents

고분해능의 압전 모터 Download PDF

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Publication number
KR20050114208A
KR20050114208A KR1020057001396A KR20057001396A KR20050114208A KR 20050114208 A KR20050114208 A KR 20050114208A KR 1020057001396 A KR1020057001396 A KR 1020057001396A KR 20057001396 A KR20057001396 A KR 20057001396A KR 20050114208 A KR20050114208 A KR 20050114208A
Authority
KR
South Korea
Prior art keywords
voltage
electrode
piezoelectric motor
vibrator
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020057001396A
Other languages
English (en)
Korean (ko)
Inventor
가너제프
Original Assignee
나노모션 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 나노모션 리미티드 filed Critical 나노모션 리미티드
Publication of KR20050114208A publication Critical patent/KR20050114208A/ko
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
KR1020057001396A 2002-07-25 2003-07-23 고분해능의 압전 모터 Ceased KR20050114208A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/206,717 2002-07-25
US10/206,717 US7061158B2 (en) 2002-07-25 2002-07-25 High resolution piezoelectric motor

Publications (1)

Publication Number Publication Date
KR20050114208A true KR20050114208A (ko) 2005-12-05

Family

ID=30770353

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057001396A Ceased KR20050114208A (ko) 2002-07-25 2003-07-23 고분해능의 압전 모터

Country Status (6)

Country Link
US (2) US7061158B2 (https=)
EP (1) EP1527484A2 (https=)
JP (1) JP2006503529A (https=)
KR (1) KR20050114208A (https=)
AU (1) AU2003245022A1 (https=)
WO (1) WO2004012279A2 (https=)

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US7061158B2 (en) * 2002-07-25 2006-06-13 Nanomotion Ltd. High resolution piezoelectric motor
JP2007524339A (ja) * 2004-02-25 2007-08-23 ナノモーション リミテッド 多方向圧電モータ配置
GB0506358D0 (en) 2004-09-29 2005-05-04 Nanomotion Ltd Assembly
KR100691280B1 (ko) 2005-09-05 2007-03-12 삼성전기주식회사 압전 진동자, 그 제조방법 및 압전 진동자를 구비하는 선형액추에이터
US9806640B2 (en) * 2006-03-30 2017-10-31 Nanomotion Ltd. Piezoelectric transmission systems
KR100817470B1 (ko) * 2006-10-24 2008-03-31 한국과학기술연구원 압전 선형 모터
JP5269887B2 (ja) * 2007-05-09 2013-08-21 ナノインク インコーポレーティッド 小型ナノファブリケーション装置
CN101458435B (zh) * 2007-12-10 2013-06-19 德昌电机(深圳)有限公司 全方向照相机系统
JP5218257B2 (ja) * 2009-04-30 2013-06-26 コニカミノルタアドバンストレイヤー株式会社 駆動装置
US8912708B2 (en) * 2009-06-22 2014-12-16 Piezomotor Uppsala Ab Electromechanical motor
EP2870690B1 (en) 2012-07-05 2016-04-20 Noliac A/S A wobble motor with a solid state actuator
CN103856096B (zh) * 2012-12-07 2015-12-16 纳米新能源（唐山）有限责任公司 高功率纳米摩擦发电机及其制备方法
DE102013203836B4 (de) * 2013-03-06 2018-07-26 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelektrisches Ultraschall-Vibrationselement und seine Verwendung
CN103730984B (zh) * 2013-12-25 2016-04-06 惠州市桑莱士光电有限公司 一种高像素驱动马达
US11039814B2 (en) 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
CN106712572B (zh) * 2017-04-01 2019-01-15 吉林大学 一种基于压电纤维的粘滑直线驱动器
CN106877736B (zh) * 2017-04-01 2018-07-31 吉林大学 一种基于压电纤维的粘滑惯性旋转驱动器
DE102017107275A1 (de) * 2017-04-05 2018-10-11 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
US10648852B2 (en) 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
US10656007B2 (en) 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
WO2019226547A1 (en) 2018-05-21 2019-11-28 Exo Imaging, Inc. Ultrasonic transducers with q spoiling
JP7515182B2 (ja) 2018-08-01 2024-07-12 エコー イメージング，インク． ハイブリッド端子を備えた超音波トランスデューサの統合のためのシステムおよび方法
EP3857308A4 (en) * 2018-09-25 2022-06-08 Exo Imaging Inc. IMAGING DEVICES WITH SELECTIVELY VARIABLE PROPERTIES
JP7515183B2 (ja) 2018-12-27 2024-07-12 エコー イメージング，インク． 低コスト、低サイズおよび低電力で超音波イメージングにおける画質を維持する方法
WO2021050853A1 (en) 2019-09-12 2021-03-18 Exo Imaging, Inc. Increased mut coupling efficiency and bandwidth via edge groove, virtual pivots, and free boundaries
JP7190590B2 (ja) 2020-03-05 2022-12-15 エクソ イメージング，インコーポレイテッド プログラム可能な生体構造及びフロー撮像を有する超音波撮像デバイス
US11951512B2 (en) 2021-03-31 2024-04-09 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US11819881B2 (en) 2021-03-31 2023-11-21 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US12486159B2 (en) 2021-06-30 2025-12-02 Exo Imaging, Inc. Micro-machined ultrasound transducers with insulation layer and methods of manufacture
US20250112563A1 (en) * 2022-01-13 2025-04-03 Acuvi Ab Multi Drive-Mode Actuators

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4997177A (en) 1987-10-23 1991-03-05 Hitachi, Ltd. Method of and apparatus for conveying object by utilizing vibration
CA2020185A1 (en) * 1990-03-05 1991-09-06 Gordon Walter Culp Electrical drive for a segmented transducer
JPH06303782A (ja) * 1993-04-14 1994-10-28 Hitachi Ltd 駆動装置
US5616980A (en) * 1993-07-09 1997-04-01 Nanomotion Ltd. Ceramic motor
IL106296A0 (en) * 1993-07-09 1993-12-28 Nanomotion Ltd Ceramic motor
IL114656A0 (en) 1995-07-18 1995-11-27 Nanomotion Ltd Ceramic motor
IL111597A (en) * 1994-11-10 1999-03-12 Nanomotion Ltd Piezoelectric propulsion unit for vertical raising and lowering of a window
JPH1132491A (ja) * 1997-05-16 1999-02-02 Seiko Instr Inc 超音波モータ及び超音波モータ付電子機器
US6617759B1 (en) * 1997-12-15 2003-09-09 Nanomotion Ltd. Conveying means and method
US6252333B1 (en) 1998-02-20 2001-06-26 Seiko Instruments Inc. Stage utilizing ultrasonic motor and electronic equipment and printer utilizing the stage
JP4376342B2 (ja) * 1999-03-02 2009-12-02 セイコーインスツル株式会社 電子時計
EP1186063B1 (en) 1999-05-31 2006-07-12 Nanomotion Ltd. Multilayer piezoelectric motor
US6384514B1 (en) * 1999-07-28 2002-05-07 Technology Commercialization Corp. Reversible piezoelectric positioning device and a disk drive using same
US7061158B2 (en) * 2002-07-25 2006-06-13 Nanomotion Ltd. High resolution piezoelectric motor

Also Published As

Publication number Publication date
AU2003245022A1 (en) 2004-02-16
US20040017134A1 (en) 2004-01-29
JP2006503529A (ja) 2006-01-26
WO2004012279A2 (en) 2004-02-05
US20060113866A1 (en) 2006-06-01
AU2003245022A8 (en) 2004-02-16
US7247971B2 (en) 2007-07-24
EP1527484A2 (en) 2005-05-04
US7061158B2 (en) 2006-06-13
WO2004012279A3 (en) 2004-03-18

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Patent event date: 20050125

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