KR20050002178A - A multi-layer with high antiwear and lubricous coated to cemeted carbide tool - Google Patents

A multi-layer with high antiwear and lubricous coated to cemeted carbide tool Download PDF

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KR20050002178A
KR20050002178A KR1020030043513A KR20030043513A KR20050002178A KR 20050002178 A KR20050002178 A KR 20050002178A KR 1020030043513 A KR1020030043513 A KR 1020030043513A KR 20030043513 A KR20030043513 A KR 20030043513A KR 20050002178 A KR20050002178 A KR 20050002178A
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thin film
tialcrn
multilayer
thickness
tialn
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Korean (ko)
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박준현
고영봉
김학규
김경배
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한국야금 주식회사
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/44Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2228/00Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10Coatings

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To provide a multi-layered hard thin film of coated hard alloy exhibiting superior performance when high speed processing Al and Al alloy having the total thin film thickness of 1.0 to 2.5 μm by depositing a CrN thin film having thickness of 0.5 to 1.5 μm as the outermost layer, thereby improving lubrication characteristics. CONSTITUTION: In a multi-layered hard thin film used for coating the surface of a cutting tool or wear resistance tool for processing Al and Al alloy, or Cu and Cu alloy, the multi-layered hard thin film comprises a multi-layered thin film of TiAlCrN/TiAlN deposited on the surface of the tool in thickness of 0.5 to 1.5 μm; a Cr metal layer deposited on the multi-layered thin film of TiAlCrN/TiAlN in thickness of 0.2 to 0.5 μm; and a CrN thin film as the outermost layer deposited on the Cr metal layer in thickness of 0.5 to 1.5 μm so that the total thin film thickness becomes 1.0 to 2.5 μm.

Description

내마모성 및 윤활성이 우수한 다층경질박막{A multi-layer with high antiwear and lubricous coated to cemeted carbide tool}A multi-layer with high antiwear and lubricous coated to cemeted carbide tool}

본 발명은 다층경질 박막에 관한 것으로서, 보다 상세하게는 용착이 심한 가공물의 절삭에 적합한 성능을 갖는 절삭공구/내마모성 공구용의 내마모성 및 윤활성이 우수한 다층경질 박막에 관한 것이다.The present invention relates to a multilayer hard thin film, and more particularly, to a multilayer hard thin film having excellent abrasion resistance and lubricity for a cutting tool / abrasion resistant tool having a performance suitable for cutting a heavily welded workpiece.

연질 재료이면서 용착성이 심한 재질인 알루미늄의 절삭 시에는 코팅을 하지 않은 일반 초경이나 다이아몬드공구, 최근에는 DLC(Diamond like carbon) 코팅 공구를 적용하고 있으며 PVD법을 이용한 TiN 박막을 공구에 일부 적용하고 있다.When cutting aluminum, which is a soft material with high adhesion, general carbide or diamond tools without coating, and recently DLC (Diamond like carbon) coating tools are applied, and some TiN thin films using PVD are applied to the tools. have.

이들 다이아몬드 공구중 PCD 공구,CBN 공구 및 다이아몬드 코팅공구는 우수한 내마모성으로 인해 알루미늄 고속 절삭 시에 적합하나 다이아몬드의 특성으로 인해 충격에 약해 단속 작업에서 파손이 발생하기 쉬우며 가격이 고가인 단점이 있다. 또한, DLC 코팅 공구는 최근에 각광을 받고 있는 박막으로 우수한 윤활성으로 인해 알루미늄 가공에 우수한 특성을 나타내고 있다. 일반적으로 DLC는 성능과가격이 다이아몬드공구와 일반 코팅공구의 중간정도로 형성되어 있어 알루미늄 가공분야에서 적용이 확대되고 있는 추세이나 가격적인면 때문에 아직도 코팅을 하지 않은 초경공구가 많이 사용되고 있다.Among these diamond tools, PCD tools, CBN tools, and diamond coated tools are suitable for high speed cutting of aluminum due to their excellent wear resistance, but they are susceptible to damage due to the characteristics of diamond, which is easy to cause breakage in intermittent operations and is expensive. In addition, DLC coating tools are recently attracting attention as a thin film showing excellent properties for aluminum processing due to their excellent lubricity. In general, DLC has a performance and price that is halfway between diamond tools and general coating tools, and its application is expanding in the aluminum processing field.

알루미늄은 함유 원소인 Si의 함유량에 의해 용착성이 결정되며 Si의 함유량이 높을수록 용착성이 심해 DLC 및 다이아몬드공구를 사용하며 Si의 함유량이 상대적으로 적어 용착이 심하지 않은 재질에는 대부분이 초경을 적용하며 일부 PVD법을 이용한 TiN 박막을 적용한다. 대부분의 절삭 분야에서 TiN 대비 박막의 경도가 우수한 TiCN, TiAlN계 박막의 적용이 일반화 되어있으나 알루미늄 가공에는 적극적으로 응용되지 못하고 있는 것은 이들 박막이 TiN 대비 박막의 표면조도가 우수하지 못해 정상적인 마모가 아닌 용착으로 인해 공구 수명이 끝나기 때문이다.The weldability of aluminum is determined by the content of Si, which is a containing element. The higher the content of Si, the more weldable. DLC and diamond tools are used. And TiN thin film using some PVD method is applied. The application of TiCN and TiAlN-based thin films, which are superior in hardness to TiN in most cutting applications, is common, but it is not actively applied to aluminum processing because these films do not have good surface roughness compared to TiN, which is not normal wear. Welding is the end of the tool life.

이러한 이유로 인해 상대적으로 알루미늄의 중저속 가공에서는 코팅을 하지 않은 초경 공구가 아직도 많이 적용되고 있으나 최근에는 TiAlN 박막의 표면 조도를 개선하거나 TiAlN 박막에 TiN 박막을 적층하여 표면조도를 개선한 박막이 개발되어 적용되고 있다. 그러나 박막 경도의 한계로 인해 고속 절삭에서는 DLC 및 다이아몬드공구 대비 내마모성이 현저히 열세한 결과를 나타내고 있다.For this reason, in the medium and low speed machining of aluminum, many carbide tools without coating are still applied, but recently, a thin film having improved surface roughness of TiAlN thin film or laminated TiN thin film on TiAlN thin film has been developed. Is being applied. However, due to the limitation of thin film hardness, high-speed cutting shows a significantly inferior wear resistance compared to DLC and diamond tools.

최근에는 절삭공구 또는 내마모성 공구의 성능을 향상시키기 위해서 기존 TiAlN 피복 경질 합금에 금속원소인 실리콘(Si),크롬(Cr)등을 첨가한 TiAlMN 형태의 박막이 개발되었다.Recently, in order to improve the performance of cutting tools or wear-resistant tools, TiAlMN-type thin films in which a metal element, such as silicon (Si) and chromium (Cr), are added to an existing TiAlN-coated hard alloy has been developed.

이러한 TiAlMN 피복 경질 합금의 경우 경도가 Hv 3000이상으로 나타나며 내산화 온도가 1000℃ 이상으로 나타나 절삭공구 또는 내마모성 공구의 표면에 피복시 TiAlN 피복 경질 합금보다 고속 절삭에서 우수한 내마모성을 나타낸다. 상기 박막층은 TiAlN/TiAlCrN 구조로 교차하여 100-1700층으로 교차 적층하여 내마모성과 함께 단속절삭 시 파손을 방지하는 내충격성도 향상 시켰다.In the case of TiAlMN coated hard alloy, the hardness is higher than Hv 3000 and the oxidation temperature is higher than 1000 ° C., which shows superior wear resistance at high cutting speed than TiAlN coated hard alloy when coated on the surface of a cutting tool or wear resistant tool. The thin film layer was intersected with a TiAlN / TiAlCrN structure and laminated to 100-1700 layers to improve wear resistance and impact resistance to prevent breakage during intermittent cutting.

상기 TiAlCrN 피복 경질층은 (TiaAlbCrc)N의 조성으로 이루어져 있으며 여기서 a+b+c=1이고 c=5원자%-12원자%인 경질박막이며 TiAlN 피복 경질층은 (TiaAlb)N의 조성으로 이루어져 있으며 여기서 a+b=1이고 a=50원자%-60원자%이고 b=50원자%-40원자%인 경질박막으로 TiaAlbCrcN 피복 경질층은 우선 성장방위가 (200)면임을 특징으로 하는 경질박막이다.The TiAlCrN coated hard layer is composed of (TiaAlbCrc) N, where a + b + c = 1 and c = 5 atomic% -12 atomic%, and the TiAlN coated hard layer is composed of (TiaAlb) N. Where a + b = 1, a = 50 atomic% -60 atomic%, and b = 50 atomic% -40 atomic%, the TiaAlbCrcN-coated hard layer is characterized in that the growth direction is first (200) plane. to be.

상기와 같은 것은 본 출원인이 특허 출원하여 공개된 대한민국 공개 특허 8359호에 개시되어 있다.Such is disclosed in Korean Patent Publication No. 8359, to which the applicant has applied for a patent.

본 발명은 PVD법을 이용하여 알루미늄 등의 용착이 심한 재질 가공용 박막을 증착함에 있어 가격은 기존 TiN 증착 공구와 유사하면서 절삭 성능은 개선하여 DLC,다이아몬드공구와 같이 고속 가공이 가능한 박막을 제공하기 위한 것으로, 상기 대한민국 공개 특허 8359호에 언급되어 있는 것처럼 TiAlN 피복 경질 합금에 금속원소인 Cr을 첨가한 TiAlCrN 피복 경질 합금과 TiAlN 피복 경질 합금을 100층-1700층으로 교차하여 0.5㎛-1.5㎛의 두께로 적층 코팅하여 고온경도 및 산화 개시온도를 향상시키고 그 위에 Cr 금속층을 0.2㎛-0.5㎛ 증착하여 TiAlCrN 다층박막과 CrN 박막의 밀착도 향상과 함께 절삭 시 박막외부에서 가해지는 충격을 완하시키는 충격 흡수층으로서의 역할을 하게 하고자 한다. 따라서 본 발명은 최외각층으로는CrN 박막을 0.5㎛-1.5㎛로 증착하여 내용착성을 향상시켜 총 박막두께가 1.0㎛-2.5㎛인 알루미늄 및 알루미늄 합금 등의 고속 가공 시 우수한 성능을 나타내는 피복 경질 합금의 다층 경질 박막을 제공하는데 그 목적이 있다.The present invention is to provide a thin film capable of high-speed processing, such as DLC, diamond tools by improving the cutting performance, while the price is similar to the existing TiN deposition tool in depositing materials with high deposition such as aluminum using PVD method As mentioned in Korean Patent Laid-Open No. 8359, a thickness of 0.5 μm-1.5 μm is obtained by crossing TiAlCrN-coated hard alloy and TiAlN-coated hard alloy containing Ti as a metal element to TiAlN-coated hard alloy with 100-1700 layers. Laminated coating improves high temperature hardness and oxidation start temperature, and deposits Cr metal layer 0.2㎛-0.5㎛ on it to improve adhesion between TiAlCrN multilayer thin film and CrN thin film and to reduce impact applied to the outside of thin film during cutting. I want to play a role as. Therefore, in the present invention, the outermost layer is coated with a CrN thin film having a thickness of 0.5 μm-1.5 μm to improve welding resistance, and thus, a coated hard alloy exhibiting excellent performance in high-speed processing of aluminum and aluminum alloys having a total film thickness of 1.0 μm-2.5 μm. Its purpose is to provide a multilayer hard thin film.

또한 본 발명에서 적용한 CrN 박막은 박막의 경도는 TiN 박막 보다 낮으나 내식성 및 윤활성 등이 우수하여 일반 내마공구 보다 금형, 자동차용 부품 등의 마찰이 발생하는 곳에 적용할 수 있다.In addition, the CrN thin film applied in the present invention has a lower hardness than the TiN thin film but is excellent in corrosion resistance and lubricity, and thus may be applied to a place where friction of molds, automotive parts, etc. occurs than general wear tools.

도 1은 본명과 종래기술에 대한 각 박막의 면조도 그래프1 is a surface roughness graph of each thin film for the real name and the prior art

상기의 목적을 달성하기 위해서 본 발명은,In order to achieve the above object, the present invention,

알루미늄 및 알루미늄 합금 또는 구리 및 구리 합금 가공용 절삭공구 또는 내마모용 공구 표면에 피복하기 위한 다층경질 박막으로서, TiAlCrN/TiAlN의 다층박막을 0.5㎛~1.5㎛로 증착하고 그 위에 Cr 금속층을 0.2㎛~0.5㎛로 증착하고 최외각층으로 CrN 박막을 0.5㎛~1.5㎛로 증착하여 총 박막두께가 1.0㎛~2.5㎛인 다층 경질 박막을 제공한다.Multi-layered thin film for coating aluminum and aluminum alloys or cutting tools for machining copper and copper alloys or wear-resistant tools, wherein a multilayer thin film of TiAlCrN / TiAlN is deposited in a thickness of 0.5 µm to 1.5 µm, and a Cr metal layer is deposited thereon. Deposition at 0.5 μm and CrN thin film at 0.5 μm to 1.5 μm as the outermost layer to provide a multilayer rigid thin film having a total thickness of 1.0 μm to 2.5 μm.

여기서, 상기 다층 경질 박막은 UBM법 및 / 또는 아크법으로 공구에 증착시킴이 바람직하고,Here, the multilayer hard thin film is preferably deposited on the tool by the UBM method and / or arc method,

상기 TiAlN/TiAlCrN의 다층 박막은 교차하여 100-1700층으로 코팅시킴이 바람직하다.The multi-layered thin film of TiAlN / TiAlCrN is preferably coated with 100-1700 layers.

또한, 상기 TiAlCrN 박막은 (TiaAlbCrc)N의 조성으로 이루어져 있으며 여기서 a+b+c=1이고, c=5원자%-12원자%인 것이 바람직하고,In addition, the TiAlCrN thin film is composed of a composition of (TiaAlbCrc) N, where a + b + c = 1, c = 5 atomic%-12 atomic%,

상기 TiaAlbCrcN 피복층은 우선 성장방위가 (200)면임이 바람직하다.Preferably, the TiaAlbCrcN coating layer has a growth direction of (200) plane.

이하에서는 본 발명을 바람직한 실시예를 통하여 보다 상세히 설명한다.Hereinafter, the present invention will be described in more detail with reference to preferred embodiments.

본 발명에서 사용되는 코팅법으로는 언밸런스드 마그네트론 스퍼터법(UBM법)과 아크법 이 결합된 하이브라이드(Hybrid) 방식을 이용하여 UBM법으로는 TiAlCrN 박막과 TiAlN 박막의 다층 코팅을 실시하였으며 아크법으로는 Cr 및 CrN 박막 코팅을 실시하였다.As a coating method used in the present invention, a multilayer coating of a TiAlCrN thin film and a TiAlN thin film was performed by the UBM method by using a hybrid method of an unbalanced magnetron sputter method (UBM method) and an arc method. Cr and CrN thin film coating was carried out.

제조공정은 로타리펌프, 부스터 펌프, 터보 펌프를 이용하여 5.0×10-5Torr이하로 진공 배기하고 히터를 이용하여 로내 온도를 450℃로 가열한다. 승온후 Ar 가스와 반응가스로는 N2를 투입하여 바이어스(Bias) 전압은 50V를 인가한다. UBM법을 이용하여 TiAlCrN 박막과 TiAlN 박막의 적층을 0.5㎛-1.5㎛로 증착한 뒤 가스를 넣지 않고 아크법을 이용하여 Cr 금속층을 0.2㎛-0.5㎛ 증착한 뒤 반응가스로 N2를 투입하여 CrN 박막을 0.5㎛-1.5㎛로 증착하였다.In the manufacturing process, a rotary pump, a booster pump, and a turbo pump are evacuated to 5.0 × 10 −5 Torr or less, and the furnace temperature is heated to 450 ° C. using a heater. After the temperature increase, N2 is introduced into the Ar gas and the reaction gas, and a bias voltage is applied to 50V. After the deposition of the TiAlCrN thin film and the TiAlN thin film by using the UBM method at 0.5㎛-1.5㎛, the deposition of Cr metal layer 0.2㎛-0.5㎛ by using the arc method without adding gas, and N2 was added as a reaction gas to CrN Thin films were deposited at 0.5 μm-1.5 μm.

<실시 예1>Example 1

먼저 피코팅물은 초경합금을 사용하였으며 밀링 절삭 TEST를 위해 K10 등급의 ISO 규격 SPCN1203EDR을 코팅하였으며 선삭 절삭 TEST를 위해 K10 등급의 ISO 규격 VCGT160412에 코팅을 실시하였다.First, the coated material was cemented carbide, coated with K10 ISO standard SPCN1203EDR for milling cutting test, and coated with K10 ISO standard VCGT160412 for turning cutting test.

박막의 종류에 따른 특성을 파악하여 알루미늄 가공에 최적의 박막을 찾고자 기존 박막과 본 발명품에 대한 박막에 대해 면조도 측정과 박막의 경도를 측정하였다. 본 발명의 코팅방법은 위에서 설명한바와 같이 하이브라이드법을 이용하여 코팅하였으며 막두께에 대한 편차를 없애기 위해 실험한 모든 박막은 막두께가 2㎛가될 때까지 코팅을 실시하였다.In order to find the optimum thin film for aluminum processing by understanding the characteristics according to the type of thin film, the surface roughness measurement and the hardness of the thin film were measured for the existing thin film and the thin film for the present invention. The coating method of the present invention was coated using the hybrid method as described above, and all the thin films tested to eliminate the variation in the film thickness were coated until the film thickness was 2 μm.

아래의 표1에는 본 발명에 의해서 제조된 박막과 기존 피복 경질 합금의 경도 및 표면 조도에 대해서 나타내었다.Table 1 below shows the hardness and surface roughness of the thin film prepared by the present invention and the conventional coated hard alloy.

표1에 나타난 것처럼 종래기술로 제작된 TiN,CrN,TiAlN과 TiAlCrN 다층박막을 비교하면 CrN 박막이 경도 값은 가장 낮았으나 표면조도는 가장 우수하게 나타났으며 TiN 박막은 경도 값은 CrN 대비 다소 높았으나 표면 조도가 다소 거칠게 나타났다. 이러한 이유로 내마모성 공구에는 CrN 박막보다 TiN 박막이 널리 적용되고 있다.As shown in Table 1, when comparing TiN, CrN, TiAlN and TiAlCrN multilayer thin films manufactured in the prior art, the CrN thin film had the lowest hardness, but the surface roughness was the best, and the TiN thin film had the hardness higher than CrN. However, the surface roughness was somewhat rough. For this reason, TiN thin films are widely used in wear resistant tools rather than CrN thin films.

TiAlN 박막과 TiAlCrN 다층 박막은 표면조도는 유사하게 나타났으나 TiN,CrN 박막 대비 아주 거칠게 나타났으며 경도는 아주 우수하게 나타났다.The surface roughness of TiAlN thin film and TiAlCrN multilayer thin film was similar, but it was very rough compared to TiN, Crr thin film and the hardness was very good.

경도 값이 가장 우수한 TiAlCrN 다층 박막에 TiN,CrN 박막을 적층하여 증착하였을 때는 TiN,CrN 단층 박막일 때 보다 표면조도가 다소 감소하였으나 TiAlCrN 다층 박막의 경도를 유지하면서 우수한 표면조도를 나타내었다.When TiN and Cr films were deposited on the TiAlCrN multilayer thin films having the highest hardness, the surface roughness decreased slightly compared to that of the TiN and Cr single layer thin films, but the TiAlCrN multilayer thin films showed excellent surface roughness.

도 1에는 상기 각 박막의 면조도 측정한 그래프에 대해 나타내었다.1 is a graph showing the surface roughness of each thin film.

구 분division 박막 구조Thin film structure 박막경도(HV)Thin Film Hardness (HV) 면조도(Ra)Surface Roughness (Ra) 1One TiAlCrN/Cr/CrNTiAlCrN / Cr / CrN 30703070 0.07㎛0.07 μm 22 TiAlCrN/Ti/TiNTiAlCrN / Ti / TiN 31203120 0.14㎛0.14 μm 33 TiAlCrN/TiAlN 다층TiAlCrN / TiAlN Multilayer 31003100 0.24㎛0.24 μm 44 CrNCrN 21002100 0.05㎛0.05 μm 55 TiNTiN 25002500 0.1㎛0.1 μm 66 TiAlNTiAlN 29002900 0.2㎛0.2 μm

표 1Table 1

<실시 예2>Example 2

실시 예1에서 코팅한 시료를 이용하여 절삭 테스트를 실시하였다. 절삭 테스트는 동일 박막에 각각 선삭, 밀링 테스트를 실시하였으며 표2에 테스트 조건에 대해 나타내었으며 결과는 표3에 나타내었다.Cutting test was carried out using the sample coated in Example 1. The cutting test was performed by turning and milling tests on the same thin film, and the test conditions are shown in Table 2 and the results are shown in Table 3.

절삭 성능 비교를 위해서 K10 초경과 K10 초경에 DLC 코팅을 한 시료를 함께 테스트하였다.For comparison of cutting performance, samples with DLC coated on K10 and K10 carbide were tested together.

밀링 테스트는 폭150mm, 길이 265mm의 각재를 가공하였다.The milling test machined the square material of 150 mm in width and 265 mm in length.

테스트 결과 선삭 테스트에서는 DLC 코팅이 가장 우수한 결과를 나타내었으며 CrN,TiN 박막은 유사한 마모량을 나타내었고 본 발명품인 TiAlCrN+CrN 구조가 DLC 다음으로 우수한 결과를 나타내었다.As a result of turning test, DLC coating showed the best results, CrN and TiN thin films showed similar wear and TiAlCrN + CrN structure of the present invention showed the best after DLC.

밀링 테스트에서는 본 발명인 TiAlCrN+CrN 박막이 DLC 보다 우수한 결과를 나타내었으며 선삭, 밀링 테스트에서 모두 CrN,TiN 박막이 TiAlN 보다 우수한 결과를 나타내었는데 이는 TiAlN 박막이 경도 및 내산화성은 우수하나 박막의 표면조도가 열세하여 용착으로 인한 치핑으로 수명을 다하였으며 이러한 결과로 볼 때 용착성이 심한 재질의 가공 시에는 박막의 표면조도가 박막의 경도 및 다른 특성 보다 공구의 수명에 큰 영향을 미치는 것으로 나타났다.In the milling test, the TiAlCrN + CrN thin film of the present invention showed better results than DLC. In the turning and milling test, the CrN and TiN thin films showed better results than TiAlN, which is superior in hardness and oxidation resistance. The result was poor chip life due to welding, and as a result, the surface roughness of the thin film had a greater effect on the tool life than the hardness and other properties of the thin film when the material was heavily welded.

선삭 테스트Turning test 밀링 테스트Milling test 가공물Workpiece AC8AAC8A 좌동Left 절삭속도(m/min)Cutting speed (m / min) 700700 800800 이송량Feed amount 0.3(mm/rev)0.3 (mm / rev) 0.3(mm/刃)0.3 (mm / mm) 절입량(mm)Depth of cut (mm) 2.02.0 좌동Left 절삭유Coolant U 좌동Left 가공 시간Processing time 10분 절삭10 min cutting 12pass 절삭12pass cutting

표 2TABLE 2

구 분division 박막 구조Thin film structure 여유면 마모량(mm)Clearance wear (mm) 선삭 테스트결과Turning test result 밀링 테스트 결과Milling test results 1One TiAlCrN/Cr/CrNTiAlCrN / Cr / CrN 0.190.19 0.050.05 22 TiAlCrN/Ti/TiNTiAlCrN / Ti / TiN 0.260.26 0.130.13 33 TiAlCrN/TiAlN 다층TiAlCrN / TiAlN Multilayer 0.420.42 0.260.26 44 CrNCrN 0.420.42 0.210.21 55 TiNTiN 0.410.41 0.240.24 66 TiAlNTiAlN 10분 치핑10 minutes chipping 0.390.39 77 초경(K10)Carbide (K10) 0.490.49 8pass 치핑8pass chipping 88 DLCDLC 0.100.10 0.080.08

표 3TABLE 3

<실시 예3>Example 3

본 발명의 박막구조인 TiAlCrN 다층과 Cr 금속층 ,CrN 층의 각각의 두께에 따른 영향을 분석하고자 절삭 테스트를 실시하였다. 총 박막두께가 4.0㎛를 초과하지 않도록 증착하였다. 용착성이 심한 재질의 가공 시에는 공구의 박막두께가 두꺼우면 용착으로 인해 박리가 발생하기 용이하므로 최적의 박막두께를 찾고자 테스트를 실시하였다.Cutting tests were performed to analyze the effects of the thickness of the TiAlCrN multilayer, Cr metal layer, and CrN layer of the present invention. The total thin film was deposited so as not to exceed 4.0 μm. In the case of the processing of highly weldable material, if the thin film thickness of the tool is thick, peeling is likely to occur due to welding.

테스트 조건은 예2와 동일하게 하였으며 결과는 표4에 나타내었다.Test conditions were the same as in Example 2 and the results are shown in Table 4.

테스트 결과 Cr 금속층은 0.5㎛가 초과할시 절삭 성능의 저하가 나타났으며 Cr 금속층을 증착하지 않을 시에는 TiAlCrN 다층박막과 CrN 박막간의 박리가 발생하였다. TiAlCrN 다층과 CrN 박막의 두께가 각각 1.5㎛이하로 증착하여 총 박막두께가 2.5㎛를 초과하면 용착으로 인해 절삭 성능이 저하되는 것으로 나타났다.As a result of the test, when the Cr metal layer exceeded 0.5 μm, the cutting performance was decreased. When the Cr metal layer was not deposited, the separation between the TiAlCrN multilayer thin film and the CrN thin film occurred. When the thickness of TiAlCrN multilayer and CrN thin films were deposited below 1.5 μm, respectively, the total thin film thickness exceeded 2.5 μm, resulting in poor cutting performance due to welding.

구분division 박막 두께(㎛)Thin film thickness (㎛) 총박막두께Total film thickness 여유면 마모량(mm)Clearance wear (mm) TiAlCrN/TiAlN 다층TiAlCrN / TiAlN Multilayer Cr층Cr layer CrN층CrN layer 선삭Turning 밀링milling 본발명품Invention 1One 0.50.5 0.50.5 0.50.5 1.51.5 0.180.18 0.060.06 22 1.01.0 0.50.5 0.50.5 2.02.0 0.190.19 0.050.05 33 1.51.5 0.50.5 0.50.5 2.52.5 0.170.17 0.040.04 44 2.02.0 0.50.5 0.50.5 3.03.0 0.270.27 0.080.08 55 3.03.0 0.50.5 0.50.5 4.04.0 10분 파손10 minutes break 8pass 치핑8pass chipping 66 0.50.5 0.50.5 1.01.0 2.02.0 0.230.23 0.130.13 77 0.50.5 0.50.5 1.51.5 2.52.5 0.220.22 0.140.14 88 0.50.5 0.50.5 2.02.0 3.03.0 0.320.32 0.190.19 99 1.01.0 1.01.0 0.50.5 2.52.5 0.380.38 0.160.16 1010 1.51.5 00 0.50.5 2.02.0 0.230.23 CrN층박리CrN layer peeling

표 4Table 4

상술한 바와 같이, 본 발명에 따라 절삭공구 또는 내마모성 공구의 표면에 TiAlN 경질 피복층과 TiAlN 경질층에 금속원소인 Cr을 첨가한 TiAlCrN 다층 박막을 0.5㎛-1.5㎛로 증착하면 종래 TiAlN 박막대비 내마모성을 증대시킬 수 있다. 그리고 밀착도 증대 및 내충격성 향상을 위해 금속 Cr층을 0.2㎛-0.5㎛ 두께로 증착한 뒤 CrN 박막을 최외각에 0.5㎛-1.5㎛로 증착하여 윤활성을 증대시키면 내마모성과 내용착성이 우수한 표면 피복 경질 합금이 얻어진다.As described above, when the TiAlCrN multilayer thin film having the TiAlN hard coating layer and the TiAlN hard layer added Cr to the surface of the cutting tool or wear resistant tool is deposited at 0.5 μm to 1.5 μm, the wear resistance of the conventional TiAlN thin film is reduced. You can increase it. In order to increase adhesion and improve impact resistance, the metal Cr layer is deposited to a thickness of 0.2 μm to 0.5 μm, and then the CrN thin film is deposited to the outermost area of 0.5 μm to 1.5 μm to increase lubricity. Hard alloys are obtained.

본 발명을 절삭공구 또는 내마모성 공구에 적용하면 용착이 심한 재질인 알루미늄, 알루미늄 합금 또는 구리, 구리 합금 등의 재질의 고속 가공이 가능하며 특히 DLC 및 다이아몬드공구의 가격 대비 성능이 우수하여 생산성이 높아 원가 절감을 이룰 수 있다.When the present invention is applied to a cutting tool or a wear-resistant tool, it is possible to perform high-speed processing of materials such as aluminum, aluminum alloy, copper, or copper alloy, which are heavily welded, and in particular, the productivity is high due to the excellent cost performance of DLC and diamond tools. Savings can be achieved.

상기에서는 본 발명의 바람직한 실시 예를 참조하여 설명하였지만, 해당 기술 분야의 숙련된 당업자는 하기의 특허 청구 범위에 기재된 본 발명의 사상 및 영역으로부터 벗어나지 않는 범위 내에서 본 발명을 다양하게 수정 및 변경시킬 수있음을 이해할 수 있을 것이다.Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention described in the claims below. You will understand how you can.

Claims (5)

알루미늄 및 알루미늄 합금 또는 구리 및 구리 합금 가공용 절삭공구 또는 내마모용 공구 표면에 피복하기 위한 다층 경질 박막으로서, TiAlCrN/TiAlN의 다층박막을 0.5㎛-1.5㎛로 증착하고 그 위에 Cr 금속층을 0.2㎛-0.5㎛로 증착하고 최외각층으로 CrN 박막을 0.5㎛-1.5㎛로 증착하여 총 박막두께가 1.0㎛-2.5㎛가 됨을 특징으로 하는 다층 경질 박막.As a multilayer hard thin film for coating aluminum and aluminum alloy or copper and copper alloy processing cutting tools or wear-resistant tool surfaces, a multilayer thin film of TiAlCrN / TiAlN is deposited in a thickness of 0.5 µm-1.5 µm, and a Cr metal layer is deposited thereon. A multilayer rigid thin film, characterized in that the total thin film thickness is 1.0㎛-2.5㎛ by depositing 0.5Nm and CrN thin film 0.5㎛-1.5㎛ as the outermost layer. 제1항에 있어서, 상기 다층 경질 박막은 UBM법 및/또는 아크법으로 공구에 증착됨을 특징으로 하는 다층 경질 박막.The multilayer hard thin film according to claim 1, wherein the multilayer hard thin film is deposited on a tool by the UBM method and / or the arc method. 제1항에 있어서, TiAlN/TiAlCrN의 다층 박막은 교차하여 100-1700층으로 코팅됨을 특징으로 하는 다층경질박막.The multilayer hard thin film according to claim 1, wherein the multilayer thin film of TiAlN / TiAlCrN is coated with 100-1700 layers by crossing. 제 1항에 있어서, 상기 TiAlCrN 박막은 (TiaAlbCrc)N의 조성으로 이루어져 있으며 여기서 a+b+c=1이고 c=5원자%-12원자%인 다층 경질 박막.The multilayer hard film of claim 1, wherein the TiAlCrN thin film is composed of (TiaAlbCrc) N, wherein a + b + c = 1 and c = 5 atomic% -12 atomic%. 제 4항에 있어서, 상기 TiaAlbCrcN 피복층은 우선 성장방위가 (200)면임을 특징으로 하는 다층경질박막.5. The multilayer hard thin film according to claim 4, wherein the TiaAlbCrcN coating layer has a growth direction of (200) plane.
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JP5392408B2 (en) * 2010-07-06 2014-01-22 株式会社タンガロイ Coated cBN sintered body tool
WO2015034203A1 (en) * 2013-09-09 2015-03-12 한국야금 주식회사 Hard coating film for cutting tools
KR102404693B1 (en) 2021-10-07 2022-06-07 주식회사 대신스페샬 method of preventing the counterfeiting securities using adhesive tape

Cited By (8)

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KR100987685B1 (en) * 2006-09-27 2010-10-13 히타치 긴조쿠 가부시키가이샤 Hard-material-coated member excellent in durability
KR100821535B1 (en) * 2007-01-17 2008-04-14 오에스지 가부시키가이샤 Hard multilayer coating, and hard multilayer coated tool including the hard multilayer coating
JP5392408B2 (en) * 2010-07-06 2014-01-22 株式会社タンガロイ Coated cBN sintered body tool
WO2015034203A1 (en) * 2013-09-09 2015-03-12 한국야금 주식회사 Hard coating film for cutting tools
CN105518178A (en) * 2013-09-09 2016-04-20 韩国冶金株式会社 Hard coating film for cutting tools
US9855608B2 (en) 2013-09-09 2018-01-02 Korloy Inc. Hard coating film for cutting tools
CN105518178B (en) * 2013-09-09 2018-06-29 韩国冶金株式会社 Cutting element hard coat film
KR102404693B1 (en) 2021-10-07 2022-06-07 주식회사 대신스페샬 method of preventing the counterfeiting securities using adhesive tape

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