JPH11291103A - Coated cutting tool - Google Patents

Coated cutting tool

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Publication number
JPH11291103A
JPH11291103A JP11412098A JP11412098A JPH11291103A JP H11291103 A JPH11291103 A JP H11291103A JP 11412098 A JP11412098 A JP 11412098A JP 11412098 A JP11412098 A JP 11412098A JP H11291103 A JPH11291103 A JP H11291103A
Authority
JP
Japan
Prior art keywords
cutting tool
nitrogen
cutting
coated
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11412098A
Other languages
Japanese (ja)
Inventor
Hisanori Ohara
久典 大原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP11412098A priority Critical patent/JPH11291103A/en
Publication of JPH11291103A publication Critical patent/JPH11291103A/en
Pending legal-status Critical Current

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  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a coated cutting tool capable of maintaining a high- accuracy cutting at a high efficiency. SOLUTION: In this cutting tool made of ceramic, cemented carbide, cermet or high-speed steel as a base material, at least one of a cutting face, flank, cutting edge ridge and chip flowing groove is coated so that a hard carbon film containing nitrogen is the outermost layer wherein the ratio of nitrogen to carbon is not less than 2 atom % and not more than 30 atom %.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、フライス加工、旋
削加工、穿孔加工、歯切加工等に用いられる切削工具の
うち、工具の表面に耐摩耗性被膜を形成した、いわゆる
被覆切削工具に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a so-called coated cutting tool in which a wear-resistant coating is formed on the surface of a cutting tool among milling, turning, drilling, gear cutting and the like. It is.

【0002】[0002]

【従来の技術】切削加工の高能率化・高精度化の要求を
満たすために、新しい切削工具材料が次々と開発されて
いる。この様な材料開発の流れの中で、各種工具素材上
へのセラミックスコーティング技術は、欠かせない工具
製造技術の一つとなっている。また、最近の動向とし
て、加工能率をより一層向上させるために、切削速度が
より高速になりつつあり、切れ刃の摩耗がますます激し
くなる傾向がある。この様な摩耗を抑えるために、セラ
ミックスコーティング膜の成分として、炭化チタン(T
iC)、窒化チタン(TiN)、炭窒化チタン(TiC
N)といったチタン系セラミックスによって形成された
硬質の耐摩耗性皮膜が現在最も広く使われている。
2. Description of the Related Art New cutting tool materials are being developed one after another in order to satisfy the demand for higher efficiency and higher precision in cutting. In such a flow of material development, ceramic coating technology on various tool materials has become one of the indispensable tool manufacturing technologies. Further, as a recent trend, in order to further improve the processing efficiency, the cutting speed is becoming higher, and the wear of the cutting edge tends to become more and more intense. In order to suppress such abrasion, titanium carbide (T
iC), titanium nitride (TiN), titanium carbonitride (TiC)
Hard wear-resistant films formed of titanium-based ceramics such as N) are currently most widely used.

【0003】しかし、上記の様な耐摩耗性被膜は、切削
される材料(以下被削材)が工具の切れ刃近傍に溶着
し、切れ刃の欠けを誘発するという、いわゆる「溶着欠
損」の抑制効果が不十分であるという欠点があった。こ
の原因は溶着物と耐摩耗性皮膜との間の密着力が高く、
構成刃先の成長を招き、結果として切れ刃先端部の大規
模な欠損等の現象を引き起こしていたためであると考え
られる。また穿孔加工においては、特に深い穴をドリル
で加工する際に、切り屑の流出抵抗が増大し、ドリルの
折損などのトラブルを引き起こすという現象をなくす効
果も不十分であった。
However, the wear-resistant coating as described above has a so-called "weld defect" in which a material to be cut (hereinafter referred to as a work material) is welded to the vicinity of a cutting edge of a tool to induce chipping of the cutting edge. There was a disadvantage that the suppression effect was insufficient. This is because the adhesion between the deposit and the wear-resistant coating is high,
This is considered to be because the growth of the constituent cutting edge was caused, and as a result, a phenomenon such as a large-scale chipping at the tip of the cutting edge was caused. In drilling, in particular, when drilling deep holes, the flow-out resistance of chips increases, and the effect of eliminating the phenomenon of causing troubles such as breakage of the drill was insufficient.

【0004】この様な被削材の溶着を防いだり切り屑の
流出抵抗を抑える一つの方法として、二硫化モリブデン
などの層状化合物からなる潤滑牲皮膜を上述の耐摩耗性
被膜の上に積層した工具も提案され、市販されている
が、二硫化モリブデンなどの層状化合物は機械的強度が
低いために摩耗しやすく、切削開始直後には良好な特性
を示すものの、潤滑性皮膜の損耗に伴って溶着防止の効
果が失われてしまうという欠点があった。
As one method of preventing such welding of the work material and suppressing the outflow resistance of chips, a lubricating film made of a layered compound such as molybdenum disulfide is laminated on the above-mentioned wear-resistant film. Tools have also been proposed and are commercially available, but layered compounds such as molybdenum disulfide tend to wear due to their low mechanical strength and exhibit good properties immediately after the start of cutting, but with the wear of the lubricating film, There is a disadvantage that the effect of preventing welding is lost.

【0005】またダイヤモンドあるいはダイヤモンド状
炭素からなる硬質被膜を被覆した工具も提案され、一部
実用化が図られているが、工具母材との密着強度が低か
ったり不安定であったりするために剥離しやすく、性能
が不安定であるという問題があった。このように、従来
の工具材料・被覆膜材料では、これらのニーズを充分に
満足することはできていなかった。
A tool coated with a hard coating made of diamond or diamond-like carbon has also been proposed and partially put to practical use. However, since the adhesion strength to a tool base material is low or unstable, the tool is not suitable. There was a problem that the film was easily peeled off and the performance was unstable. As described above, conventional tool materials and coating film materials have not been able to sufficiently satisfy these needs.

【0006】[0006]

【発明が解決しようとする課題】本発明は、かかる従来
の事情に鑑み、セラミックスコーティングの優れた点を
活かしながら、被覆切削工具の表面への被削材の溶着を
防ぐと同時に被削材や切り屑との滑りを良くすることが
できる画期的な被覆切削工具を提供しようとするもので
ある。
SUMMARY OF THE INVENTION In view of the above-mentioned circumstances, the present invention prevents the welding of a work material on the surface of a coated cutting tool, while taking advantage of the advantages of a ceramic coating, and at the same time prevents the work material An object of the present invention is to provide a revolutionary coated cutting tool capable of improving the slip with chips.

【0007】[0007]

【課題を解決するための手段】本発明の第1の特徴とす
るところは、超硬合金、高速度鋼などを基材とする切削
工具の表面のうち、切削に関与する部位、即ち披削材と
擦れる逃げ面、切り屑と擦れるすくい面、それら二つの
面の境界部に当たる切れ刃稜線部、更に切り屑が流れる
溝の4つの部位のうちのいずれか一つまたは二つ以上の
部位が、窒素を含有する硬質炭素膜で被覆されているこ
とである。
SUMMARY OF THE INVENTION A first feature of the present invention is that a portion of a surface of a cutting tool made of a cemented carbide, a high-speed steel, or the like, which is involved in cutting, that is, a cutting portion. Any one or more of the flank rubbing with the material, the rake face rubbing with the chips, the cutting edge ridge line at the boundary between these two surfaces, and the four parts of the groove through which the chips flow, And a hard carbon film containing nitrogen.

【0008】そしてこの窒素含有硬質炭素膜における炭
素に対する窒素の比率が2原子%以上30原子%以下で
あること、また不可避不純物の一つとして水素を含んで
いることを第2の特徴としている。
The second feature is that the ratio of nitrogen to carbon in the nitrogen-containing hard carbon film is not less than 2 atomic% and not more than 30 atomic%, and that hydrogen is contained as one of the inevitable impurities.

【0009】また該窒素含有硬質炭素膜が基材上に直接
被覆された単層構造、あるいは該窒素含有硬質炭素膜
が、基材に隣接して形成された下地層の上に形成され、
該下地層の成分が周期律表のIVa,Va,VIa族元
素の炭化物、窒化物、炭窒化物、並びにAlN、Si
C、Si34 、B4 C、BN及びこれらの化合物、混
合物、多層構造物からなることを第3の特徴としてい
る。
A nitrogen-containing hard carbon film directly coated on a substrate, or a single-layer structure, or the nitrogen-containing hard carbon film is formed on an underlayer formed adjacent to the substrate,
The components of the underlayer are carbides, nitrides, carbonitrides, and AlN, Si of the elements of groups IVa, Va and VIa of the periodic table.
A third feature is that it is composed of C, Si 3 N 4 , B 4 C, BN and their compounds, mixtures, and multilayer structures.

【0010】このような被覆切削工具の用途としては、
最も一般的な鉄系合金はもちろんのこと、とりわけアル
ミニウム合金や銅合金のような軟質且つ焼付きやすい材
料の切削加工に適しており、これは別の特徴の一つであ
る。切削加工の種類としては、旋削加工、フライス加
工、エンドミルによるフライス加工、ドリルによる穿孔
加工、カッターによる歯切加工など、全ての切削加工が
対象となる。
[0010] Applications of such coated cutting tools include:
It is suitable for cutting soft and easy-to-seize materials such as aluminum alloys and copper alloys, as well as the most common iron-based alloys, which is another characteristic. The types of cutting include all types of cutting such as turning, milling, milling with an end mill, drilling with a drill, and gear cutting with a cutter.

【0011】[0011]

【作用】既に説明した様に、切削工具においては、披削
材や切り屑と接触する部位における摩擦摩耗特性が、工
具の性能を左右する重要な因子となっている。本発明者
は、各種セラミックスの持つ多種多様な特徴を活かすこ
との出来る皮膜を検討する中から、該切削工具のうちの
切削に関与する部位、即ち被削材と擦れる逃げ面、切り
屑と擦れるすくい面、それら二つの面の境界部に当たる
稜線部、更に切り屑が流れる溝を加えた4つの部位のう
ちのいずれか一つまたは二つ以上の部位が、窒素を含有
する硬質炭素膜で被覆されていれば、切削加工中の溶着
現象をなくしたり、切り屑の流出抵抗を抑えることがで
きることを見いだした。また従来から用いられていたダ
イヤモンドやダイヤモンド状炭素膜に起こりやすかった
剥離現象もなくすことができることも見いだした。この
原因は、窒素を添加したことで、ダイヤモンド状炭素膜
に近い材質・構造を持った硬質炭素膜が、圧縮内部応力
の低減、膜自身の耐摩耗性向上、下地層との親和性(密
着性)向上などの面で改善され、剥離しにくく耐摩耗性
も向上したためであると考えられる。
As described above, in a cutting tool, the friction and wear characteristics of a portion in contact with a cutting material or a chip are an important factor influencing the performance of the tool. The present inventor has studied coatings that can make use of various characteristics of various ceramics, and found that a portion of the cutting tool involved in cutting, that is, a flank surface that rubs with the work material, rubs with chips. A rake face, a ridge line at the boundary between the two faces, and one or more of the four portions with a groove through which the chips flow are coated with a hard carbon film containing nitrogen. It has been found that if it is done, it is possible to eliminate the welding phenomenon during the cutting process and to suppress the chip outflow resistance. It has also been found that it is possible to eliminate the peeling phenomenon that has been apt to occur in the conventionally used diamond or diamond-like carbon film. The reason for this is that the addition of nitrogen causes the hard carbon film, which has a material and structure close to that of a diamond-like carbon film, to reduce the internal compressive stress, improve the wear resistance of the film itself, and have an affinity with the underlying layer (adhesion This is considered to be due to improvement in the aspect such as improvement of the abrasion resistance.

【0012】本発明者は、硬質炭素膜への窒素添加が膜
内部応力に与える影響を調査した結果、窒素を含まない
ダイヤモンド状炭素膜の残留圧縮応力を1とした時に、
炭素に対する窒素の比率を3原子%とした窒素含有硬質
炭素膜では残留圧縮応力が0.8となり、窒素を数原子
%添加することで、硬質炭素膜の残留圧縮応力が目覚ま
しく低下することを見いだした。圧縮応力が高すぎる
と、膜自身が圧壊するだけでなく、切削加工中の外部応
力なども加わって、膜の損壊が促進される傾向にある。
従って窒素を添加することが膜の圧縮損壊の抑制に効果
があることが推察される。
The present inventor has investigated the effect of the addition of nitrogen to the hard carbon film on the internal stress of the film. As a result, when the residual compressive stress of the diamond-like carbon film containing no nitrogen is set to 1,
The residual compressive stress of a nitrogen-containing hard carbon film in which the ratio of nitrogen to carbon is 3 atomic% is 0.8, and the residual compressive stress of the hard carbon film is remarkably reduced by adding several atomic% of nitrogen. Was. If the compressive stress is too high, not only the film itself is crushed, but also external stress during cutting is applied, and the film tends to be damaged.
Therefore, it is presumed that the addition of nitrogen is effective in suppressing the compression damage of the membrane.

【0013】次に本発明者は、硬質炭素膜への窒素添加
が膜の耐摩耗性に与える影響を調査した結果、窒素を含
まないダイヤモンド状炭素膜の摩耗量を1とした時に、
炭素に対する窒素の比率を3原子%とした窒素含有硬質
炭素膜では摩耗量が0.6となり、窒素を数原子%添加
することで、硬質炭素膜の耐摩耗牲が目覚ましく向上す
ることを見いだした。この試験では相手材を軸受け鋼
(JIS SUJ2)の鋼球とし、潤滑油を全く用いない条件
でのボールオンディスク試験を用いた。このように耐摩
耗性が著しく向上する理由は、一つには窒素添加による
残留圧縮応力の低減にあるものと思われるが、もう一つ
は窒化炭素化合物が生成したことが考えられる。窒化炭
素化合物とは、ダイヤモンドを越える硬質物質として期
待されている新材料であるが、窒化炭素として完全な形
で合成された例はない。本発明による窒素含有硬質炭素
膜の膜内部には、わずかな量の窒素しか存在しないが、
ダイヤモンド状炭素のマトリックス中に窒化炭素の微細
粒子が分散した構造を持っている可能性があり、この窒
化炭素成分が耐摩耗性向上にも好影響を与えたものと考
えられる。
Next, the present inventor investigated the effect of the addition of nitrogen to the hard carbon film on the wear resistance of the film. As a result, when the wear amount of the diamond-like carbon film containing no nitrogen was set to 1,
In the case of a nitrogen-containing hard carbon film in which the ratio of nitrogen to carbon was 3 atomic%, the wear amount was 0.6, and it was found that the wear resistance of the hard carbon film was remarkably improved by adding several atomic% of nitrogen. . In this test, the opposing material was a steel ball of bearing steel (JIS SUJ2), and a ball-on-disk test was performed under the condition that no lubricating oil was used. The reason why the wear resistance is remarkably improved in this way is presumably due to the reduction of the residual compressive stress due to the addition of nitrogen. Another reason is considered to be the formation of a carbon nitride compound. A carbon nitride compound is a new material expected as a hard substance exceeding diamond, but there is no example of a carbon nitride synthesized in perfect form. Although only a small amount of nitrogen is present inside the film of the nitrogen-containing hard carbon film according to the present invention,
It is possible that the carbon nitride has a structure in which fine particles of carbon nitride are dispersed in a matrix of diamond-like carbon, and this carbon nitride component is considered to have had a favorable effect on the improvement of wear resistance.

【0014】またダイヤモンド状炭素膜に窒素を添加す
ることが、膜の密着強度にも好影響を与えることが本発
明者によって確認された。本発明では、窒素含有硬質炭
素膜を工具母材表面上に直接形成しても、優れた効果が
得られる。
The present inventors have confirmed that the addition of nitrogen to the diamond-like carbon film has a favorable effect on the adhesion strength of the film. In the present invention, excellent effects can be obtained even if the nitrogen-containing hard carbon film is formed directly on the surface of the tool base material.

【0015】本発明のもう一つの特徴の一つに、周期律
表のIVa,Va,VIa族元素の炭化物、窒化物、炭
窒化物、並びに、AlN、SiC、Si34 、B4
C、BN及びこれらの化合物、混合物からなる一つ以上
の中間層を介して、窒素含有硬質炭素膜を最外層に形成
すると言う多層構造物としたことが挙げられるが、ここ
で用いられている周期律表のIVa,Va,VIa族元
素やAl、Si、Bといった元素は、容易に窒素や炭素
と反応することが知られている。
Another feature of the present invention is that carbides, nitrides, carbonitrides, and AlN, SiC, Si 3 N 4 , B 4 of elements IVa, Va, and VIa of the periodic table.
A multi-layer structure in which a nitrogen-containing hard carbon film is formed as an outermost layer via one or more intermediate layers made of C, BN, a compound thereof, and a mixture is used. It is known that elements such as group IVa, Va, and VIa of the periodic table, Al, Si, and B easily react with nitrogen and carbon.

【0016】本発明者は共同研究者らと共に、この炭素
と反応することを利用して、ダイヤモンドあるいはダイ
ヤモンド状炭素膜を基材上に形成する際に、周期律表の
IVa,Va,VIa族元素やAl、Si、Bといった
元素そのもの、あるいはこれらの炭化物、炭窒化物など
を利用することを提案している(例えば特開昭57−1
58372号公報、特開昭58−126972号公報、
特開昭61−104078号公報、特開昭62−116
767号公報など)。しかしこれらの提案では、いずれ
も最外層がダイヤモンドまたは硬質炭素膜(ダイヤモン
ド状炭素膜)であるという点で、本発明とは異なる。即
ち既に述べたように、中間層材料と硬質炭素膜との密着
性を向上させるためには、硬質炭素膜に窒素を少量でも
添加することが極めて有効なのである。これは、炭素は
往々にして「低硬度の黒鉛質物質」に変化し、材料中に
このような低硬度物質が生成することで、界面や材料そ
のものの機械的強度を損ねるが、このような場合に窒素
が存在すると、黒鉛質の物質の生成を抑制でき、また中
間層構成物質中の元素と窒化反応を起こすことでも密着
強度向上に効果があるものと推定される。
The present inventor, together with co-workers, utilizes the reaction with this carbon to form a diamond or diamond-like carbon film on a substrate, thereby forming a group IVa, Va, or VIa of the periodic table. It has been proposed to use the element itself or elements such as Al, Si, and B, or their carbides, carbonitrides, etc.
No. 58372, JP-A-58-126972,
JP-A-61-104078, JP-A-62-116
767). However, these proposals differ from the present invention in that the outermost layer is a diamond or hard carbon film (diamond-like carbon film). That is, as described above, in order to improve the adhesion between the intermediate layer material and the hard carbon film, it is extremely effective to add even a small amount of nitrogen to the hard carbon film. This is because carbon often changes to a “low-hardness graphitic substance”, and the low-hardness substance is formed in the material, which impairs the mechanical strength of the interface and the material itself. In this case, it is presumed that the presence of nitrogen can suppress the formation of a graphitic substance, and also has the effect of improving the adhesion strength by causing a nitridation reaction with an element in the intermediate layer constituent material.

【0017】硬質炭素膜への窒素添加量としては、炭素
に対する窒素の比率が2原子%以上、30原子%以下で
あることが好ましい。窒素の比率が2原子%を下回る
と、窒素添加の効果が得られない。また窒素の比率が3
0原子%施を越えると、膜の硬度が極端に低下する傾向
を示し、好ましくないこともわかった。炭素と窒素の比
率が重要であり、窒素含有硬質炭素膜中の炭素と窒素の
組成比(含有率)をそれぞれA原子%、B原子%とした
時に、炭素に対する窒素の比率とは、炭素に対する窒素
の比率(原子%)=B÷(A十B)×100で計算され
るものとした。このような組成比の測定については、化
学分析、物理分析などのあらゆる手法が適用できるが、
本発明者らはX線光電子分析法(XPS法)を用いて分
析を行った。分析においては、膜の最表面における吸着
不純物を物理的に除去するための「イオンビームスパッ
タリング」を併用した。
The amount of nitrogen added to the hard carbon film is preferably such that the ratio of nitrogen to carbon is 2 atomic% or more and 30 atomic% or less. If the ratio of nitrogen is less than 2 atomic%, the effect of adding nitrogen cannot be obtained. The nitrogen ratio is 3
When the amount exceeds 0 atomic%, the hardness of the film tends to be extremely reduced, which is not preferable. The ratio of carbon to nitrogen is important. When the composition ratio (content) of carbon and nitrogen in the nitrogen-containing hard carbon film is A atomic% and B atomic%, respectively, the ratio of nitrogen to carbon is It was assumed that the ratio of nitrogen (atomic%) = B ÷ (A / 10B) × 100. For the measurement of such a composition ratio, any method such as chemical analysis and physical analysis can be applied.
The present inventors performed analysis using X-ray photoelectron analysis (XPS method). In the analysis, "ion beam sputtering" for physically removing adsorbed impurities on the outermost surface of the film was used.

【0018】なお窒素含有硬質炭素膜の形成において炭
化水素ガスを用いる場合は、前記不可避不純物として水
素が含まれる。条件によりその含有量を変化させること
ができるが、例えば炭素に対する組成比は30〜40原
子%程度である。水素は膜の硬度を下げ、圧縮残留応力
を下げるので、膜厚を厚くすることができるなどの効果
がある。従って、固体炭素を原料として窒素含有硬質炭
素膜を形成する場合は、不可避不純物として水素を含ま
ないが、必要によっては膜形成雰囲気中に水素を添加し
て水素を含有せしめてもよい。
When a hydrocarbon gas is used in forming the nitrogen-containing hard carbon film, hydrogen is contained as the inevitable impurity. The content can be changed depending on the conditions. For example, the composition ratio to carbon is about 30 to 40 atomic%. Hydrogen lowers the hardness of the film and lowers the compressive residual stress, and thus has the effect of increasing the film thickness. Therefore, when a nitrogen-containing hard carbon film is formed from solid carbon as a raw material, hydrogen is not included as an unavoidable impurity, but hydrogen may be added to the film-forming atmosphere to contain hydrogen if necessary.

【0019】なお本発明の被覆切削工具の用途として
は、アルミニウム合金や銅合金など軟質で且つ工具表面
に融着を起こしやすい披削材の加工が特に好適である。
その詳細については実施例によって説明する。なお実施
例ではドリルについての結果のみを説明しているが、ド
リル以外の工具、例えばエンドミル、バイト、刃先交換
型チップ、メタルソー、歯切工具、リーマであっても同
様の効果が得られることは言うまでもない。また実施例
では高速度鋼と超硬合金製の工具についてのみ説明して
いるが、これら以外のセラミックス、サーメットといっ
た切削工具用材質においても同様の効果が得られると考
えられる。
As a use of the coated cutting tool of the present invention, it is particularly preferable to process a soft cutting material such as an aluminum alloy or a copper alloy, which is likely to be fused to the tool surface.
The details will be described with reference to embodiments. Although only the results for the drill are described in the embodiments, the same effect can be obtained even with tools other than the drill, for example, an end mill, a cutting tool, a tip-changeable insert, a metal saw, a gear cutting tool, and a reamer. Needless to say. In the embodiment, only the tool made of high-speed steel and cemented carbide is described. However, it is considered that similar effects can be obtained with other materials for cutting tools such as ceramics and cermets.

【0020】[0020]

【発明の実施の形態】本発明の具体的な実施の形態につ
いては実施例で示す。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments of the present invention will be shown in Examples.

【0021】[0021]

【実施例】高周波電界中におけるプラズマCVD法によ
りダイヤモンド状炭素膜を形成する公知の手法におい
て、原料ガスであるメタンガスに窒素ガスを添加するこ
とで、窒素含有硬質炭素膜を形成した。得られた窒素含
有硬質炭素膜の厚みは1μmであった。なお原料ガス中
への窒素ガスの添加比率を変化させることで、0原子%
から35原子%までの窒素比率の窒素添加硬質炭素膜を
得た。この窒素添加硬質炭素膜の形成は、高速度鋼SK
H51を基材とするツイストドリルの刃部表面を被覆す
るように形成したものである。ドリルのサイズは直径
3.2mm、長さ150mmとした。また各種の中間層物質
をスパッタ法、アークイオンプレーティング法、中空陰
極放電イオンプレーティング法などを用いて該ドリルの
表面に形成し、その上に窒素含有硬質炭素膜を形成した
ドリルも作成した。
EXAMPLE In a known method of forming a diamond-like carbon film by a plasma CVD method in a high-frequency electric field, a nitrogen-containing hard carbon film was formed by adding nitrogen gas to methane gas as a raw material gas. The thickness of the obtained nitrogen-containing hard carbon film was 1 μm. By changing the ratio of nitrogen gas added to the raw material gas, 0 atomic% was obtained.
And a nitrogen-added hard carbon film having a nitrogen ratio of up to 35 at%. This nitrogen-added hard carbon film is formed by high-speed steel SK
It is formed so as to cover the blade part surface of a twist drill using H51 as a base material. The size of the drill was 3.2 mm in diameter and 150 mm in length. Various intermediate layer materials were formed on the surface of the drill by using a sputtering method, an arc ion plating method, a hollow cathode discharge ion plating method, etc., and a drill having a nitrogen-containing hard carbon film formed thereon was also prepared. .

【0022】これらのドリルに対して、アルミニウム合
金(JIS A5052)の穴開け加工を実施し、ドリルの性能
を評価した。切削条件はドリル外周での切削速度100
m/分、送り量0.2mm/回転、穴深さ50mm、水溶性
切削油剤の外部給油方式とし、穴開け時の切削抵抗の変
化、ドリル破損時の穴開け個数、試験柊了時のドリルの
状態を観察した。試験を行った膜構造と切削試験結果を
表1に示す。表1からわかるように、実施例1〜20は
何れも比較例1〜5に比し、切削抵抗が小さく、ドリル
寿命も極めて長く、且つ試験終了後も硬質炭素膜が健全
な状態にあることが確認できた。
The drills were drilled with an aluminum alloy (JIS A5052) to evaluate the performance of the drills. The cutting conditions are 100 cutting speeds around the periphery of the drill.
m / min, feed rate 0.2mm / rotation, hole depth 50mm, water-soluble cutting oil external lubrication method, change in cutting resistance when drilling, number of drilling holes when drill breaks, drill at the end of test holly Was observed. Table 1 shows the film structures tested and the cutting test results. As can be seen from Table 1, each of Examples 1 to 20 has a smaller cutting resistance, an extremely long drill life, and a hard carbon film in a sound state even after the test is completed, as compared with Comparative Examples 1 to 5. Was confirmed.

【0023】[0023]

【表1】 [Table 1]

【0024】上記と同様の手法で、高周波電界の代りに
直流電界を用いたプラズマCVD法により、窒素含有硬
質炭素膜を形成した。なお基材は超硬合金(JIS P30)
とし、形状はφ8.5の油穴付きツイストドリルを用
い、表2に示す膜構造の試作を行った。これらのドリル
に対して、アルミニウム合金(ADC12 )の穴開け加工を
実施し、ドリルの性能を評価した。切削条件はドリル外
周での切削速度500m/分、送り量0.4mm/回転、
穴深さ26mm、水容性切削油剤の内部給油方式とし、穴
開け時の切削抵抗の変化、切削長30m時点でのドリル
の状態を観察した。試験を行った膜構造と切削試験結果
を表2に示す。表2からわかるように、実施例21〜4
0は何れも比較例6〜10に比し、切削抵抗が小さく、
ドリル寿命も極めて長く、且つ試験終了後も硬質炭素膜
が健全な状態にあることが確認できた。
In the same manner as described above, a nitrogen-containing hard carbon film was formed by a plasma CVD method using a DC electric field instead of a high-frequency electric field. The base material is cemented carbide (JIS P30)
Using a twist drill having an oil hole of φ8.5, a prototype of the film structure shown in Table 2 was produced. Drilling of aluminum alloy (ADC12) was performed on these drills, and the performance of the drills was evaluated. The cutting conditions were as follows: cutting speed at the outer periphery of the drill: 500 m / min, feed: 0.4 mm / rotation
A hole depth of 26 mm, a water-soluble cutting oil was used as an internal lubrication method, and changes in cutting resistance during drilling and the state of the drill at a cutting length of 30 m were observed. Table 2 shows the film structures that were tested and the cutting test results. As can be seen from Table 2, Examples 21 to 4
0 is smaller than Comparative Examples 6 to 10, the cutting resistance is smaller,
It was confirmed that the drill life was extremely long and that the hard carbon film was in a healthy state even after the test was completed.

【0025】[0025]

【表2】 [Table 2]

【0026】[0026]

【発明の効果】本発明によれば、切削工具のすくい面と
逃げ面等の切削に関与する部位における被削材の溶着を
防ぐとともに切り屑の流れをスムースにすることがで
き、工具の摩耗を穏やかに進行させることができるだけ
でなく、コーティング膜の持つ耐摩耗性を最大限に引き
出すことができる。また本発明は、穴あけ加工、エンド
ミル加工、フライス切削、旋削共に利用することができ
有用である。
According to the present invention, it is possible to prevent the welding of a work material at a part involved in cutting, such as a rake face and a flank face of a cutting tool, and to make the flow of chips smooth, thereby reducing the wear of the tool. Not only can proceed gently, but also the wear resistance of the coating film can be maximized. The present invention is useful because it can be used in all of drilling, end milling, milling, and turning.

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】 セラミックス、超硬合金、サーメットあ
るいは高速度鋼を基材とした切削工具において、該切削
工具のすくい面、逃げ面、切れ刃稜線部、切り屑が流れ
る溝の4つの部位のうちの少なくとも一つまたは二つ以
上の部位が耐摩耗性被膜で被覆されてなり、該耐摩耗性
被膜の最外層は、炭素を主成分として炭素に対する窒素
の比率が2原子%以上30原子%以下であり、炭素と窒
素以外の成分として不可避不純物を含んだ窒素含有硬質
炭素膜であることを特徴とする被覆切削工具。
1. A cutting tool based on ceramics, cemented carbide, cermet or high-speed steel, wherein the cutting tool has a rake face, a flank face, a cutting edge ridge portion, and a groove through which chips flow. At least one or two or more of them are coated with a wear-resistant coating, and the outermost layer of the wear-resistant coating has carbon as a main component and a nitrogen to carbon ratio of 2 to 30 atomic%. A coated cutting tool comprising: a nitrogen-containing hard carbon film containing unavoidable impurities as components other than carbon and nitrogen.
【請求項2】 不可避不純物の一つが水素であることを
特徴とする請求項1記載の被覆切削工具。
2. The coated cutting tool according to claim 1, wherein one of the unavoidable impurities is hydrogen.
【請求項3】 窒素含有硬質炭素膜が切削工具基材表面
に直接被覆形成されてなることを特徴とする請求項1ま
たは2記載の被覆切削工具。
3. The coated cutting tool according to claim 1, wherein the nitrogen-containing hard carbon film is directly formed on the surface of the cutting tool substrate.
【請求項4】 窒素含有硬質炭素膜と切削工具基材との
間には1層以上の中間層を設けた多層耐摩耗被覆構造で
あることを特徴とする請求項1または2記載の被覆切削
工具。
4. The coated cutting according to claim 1, wherein the coated cutting has a multilayer wear-resistant coating structure in which one or more intermediate layers are provided between the nitrogen-containing hard carbon film and the cutting tool base material. tool.
【請求項5】 窒素含有硬質炭素膜に接する中間層が、
周期律表ΙVa,Va,VΙa族元素の炭化物、窒化
物、炭窒化物、並びにAlN、SiC、Si34 、B4
C、BN及びこれらの化合物、混合物からなることを
特徴とする請求項1、2または4記載の被覆切削工具。
5. The intermediate layer in contact with the nitrogen-containing hard carbon film,
Carbide, nitride, carbonitride, and AlN, SiC, Si 3 N 4 , B 4
The coated cutting tool according to claim 1, 2 or 4, comprising C, BN, a compound thereof, and a mixture thereof.
【請求項6】 切削工具は、非鉄金属切削用であること
を特徴とする請求項1、2、3、4または5記載の被覆
切削工具。
6. The coated cutting tool according to claim 1, wherein the cutting tool is for non-ferrous metal cutting.
【請求項7】 アルミニウム合金の切削に用いられるド
リル、エンドミル、バイト、刃先交換型チップ、メタル
ソー、歯切工具、リーマのいずれかであることを特徴と
する請求項6記載の被覆切削工具。
7. The coated cutting tool according to claim 6, wherein the cutting tool is any one of a drill, an end mill, a cutting tool, a tip-changeable insert, a metal saw, a gear cutting tool, and a reamer used for cutting an aluminum alloy.
【請求項8】 超硬合金または高速度鋼を基材としたド
リルまたはエンドミルの基材表面に、直接窒化チタン膜
を形成し、その上に設けた炭化チタン膜を介して、最外
層に請求項1または2記載の窒素含有硬質炭素膜を形成
したことを特徴とする被覆切削工具。
8. A titanium nitride film is formed directly on the surface of a drill or end mill base made of cemented carbide or high-speed steel, and the outermost layer is formed via a titanium carbide film provided on the titanium nitride film. Item 6. A coated cutting tool comprising the nitrogen-containing hard carbon film according to item 1 or 2.
JP11412098A 1998-04-08 1998-04-08 Coated cutting tool Pending JPH11291103A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11412098A JPH11291103A (en) 1998-04-08 1998-04-08 Coated cutting tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11412098A JPH11291103A (en) 1998-04-08 1998-04-08 Coated cutting tool

Publications (1)

Publication Number Publication Date
JPH11291103A true JPH11291103A (en) 1999-10-26

Family

ID=14629646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11412098A Pending JPH11291103A (en) 1998-04-08 1998-04-08 Coated cutting tool

Country Status (1)

Country Link
JP (1) JPH11291103A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001232501A (en) * 2000-01-24 2001-08-28 Barta Ag Cutting tool, cutting tip, and manufacturing method for them
JP2005253894A (en) * 2004-03-15 2005-09-22 Seiko Epson Corp Ornament, production method thereof and timepiece
JP2007136611A (en) * 2005-11-18 2007-06-07 Hitachi Tool Engineering Ltd Amorphous carbon coated cutting tool and manufacturing method for it
JP2008229781A (en) * 2007-03-20 2008-10-02 Osg Corp Hard film and tool coated with hard film
JP2008229780A (en) * 2007-03-20 2008-10-02 Osg Corp Hard film and tool coated with hard film
JP2008254144A (en) * 2007-04-06 2008-10-23 Osg Corp Hard film and hard film coated tool
JP2008254145A (en) * 2007-04-06 2008-10-23 Osg Corp Hard film and hard film coated tool

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001232501A (en) * 2000-01-24 2001-08-28 Barta Ag Cutting tool, cutting tip, and manufacturing method for them
JP2005253894A (en) * 2004-03-15 2005-09-22 Seiko Epson Corp Ornament, production method thereof and timepiece
JP2007136611A (en) * 2005-11-18 2007-06-07 Hitachi Tool Engineering Ltd Amorphous carbon coated cutting tool and manufacturing method for it
JP2008229781A (en) * 2007-03-20 2008-10-02 Osg Corp Hard film and tool coated with hard film
JP2008229780A (en) * 2007-03-20 2008-10-02 Osg Corp Hard film and tool coated with hard film
JP2008254144A (en) * 2007-04-06 2008-10-23 Osg Corp Hard film and hard film coated tool
JP2008254145A (en) * 2007-04-06 2008-10-23 Osg Corp Hard film and hard film coated tool

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