KR200419687Y1 - 평판표시장치의 결함 검사장치 - Google Patents

평판표시장치의 결함 검사장치 Download PDF

Info

Publication number
KR200419687Y1
KR200419687Y1 KR2020060009140U KR20060009140U KR200419687Y1 KR 200419687 Y1 KR200419687 Y1 KR 200419687Y1 KR 2020060009140 U KR2020060009140 U KR 2020060009140U KR 20060009140 U KR20060009140 U KR 20060009140U KR 200419687 Y1 KR200419687 Y1 KR 200419687Y1
Authority
KR
South Korea
Prior art keywords
flat panel
panel display
display device
color filter
defect
Prior art date
Application number
KR2020060009140U
Other languages
English (en)
Korean (ko)
Inventor
박희재
홍찬희
이일환
신흥현
권동혁
Original Assignee
에스엔유 프리시젼 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스엔유 프리시젼 주식회사 filed Critical 에스엔유 프리시젼 주식회사
Priority to KR2020060009140U priority Critical patent/KR200419687Y1/ko
Application granted granted Critical
Publication of KR200419687Y1 publication Critical patent/KR200419687Y1/ko
Priority to TW096100961A priority patent/TWI409529B/zh

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0242Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0278Detecting defects of the object to be tested, e.g. scratches or dust
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Analytical Chemistry (AREA)
  • Geometry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
KR2020060009140U 2006-04-06 2006-04-06 평판표시장치의 결함 검사장치 KR200419687Y1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR2020060009140U KR200419687Y1 (ko) 2006-04-06 2006-04-06 평판표시장치의 결함 검사장치
TW096100961A TWI409529B (zh) 2006-04-06 2007-01-10 用以檢查平面顯示器上的缺陷之裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2020060009140U KR200419687Y1 (ko) 2006-04-06 2006-04-06 평판표시장치의 결함 검사장치

Publications (1)

Publication Number Publication Date
KR200419687Y1 true KR200419687Y1 (ko) 2006-06-23

Family

ID=44482015

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2020060009140U KR200419687Y1 (ko) 2006-04-06 2006-04-06 평판표시장치의 결함 검사장치

Country Status (2)

Country Link
KR (1) KR200419687Y1 (zh)
TW (1) TWI409529B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150139103A (ko) * 2014-06-02 2015-12-11 삼성디스플레이 주식회사 검사장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5958808B2 (ja) * 2012-06-04 2016-08-02 株式会社Joled 表示パネルの製造方法、その検査装置及び検査方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69330709T2 (de) * 1992-12-28 2002-07-11 Canon K.K., Tokio/Tokyo Blickrichtungsdetektor und Kamera mit diesem Detektor
TWM261685U (en) * 2004-06-15 2005-04-11 Hirose Tech Co Ltd Defect-detecting equipment of glass substrate disposed with polarizer thereon

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150139103A (ko) * 2014-06-02 2015-12-11 삼성디스플레이 주식회사 검사장치
KR102200691B1 (ko) * 2014-06-02 2021-01-13 삼성디스플레이 주식회사 검사장치

Also Published As

Publication number Publication date
TWI409529B (zh) 2013-09-21
TW200739187A (en) 2007-10-16

Similar Documents

Publication Publication Date Title
US8976250B2 (en) Lens inspection system
TWI289719B (en) Inspection system imager method for inspecting surfaces for defect and method for fabricating electrical circuit
US20050220330A1 (en) Method of inspecting an mura defect in a pattern and apparatus used for the same
KR100863140B1 (ko) 반도체 웨이퍼의 이물 검사 및 리페어 시스템과 그 방법
KR101437902B1 (ko) 엘이디 패키지의 렌즈 외관 검사장치
KR100578560B1 (ko) 자동 광학 검사 장치
KR20010042027A (ko) 물체의 구조화된 표면 광학검사 방법 및 장치
WO2013069100A1 (ja) プリント基板の検査装置
KR20170049266A (ko) 비전검사장치 및 비전검사방법
US7643141B2 (en) Method and apparatus for inspecting color filter
KR20030078648A (ko) 컬러필터 검사장치
KR200419687Y1 (ko) 평판표시장치의 결함 검사장치
JP2014085300A (ja) 太陽電池セルの検査装置
KR20230068578A (ko) 광루미네선스 검사와 자동광학검사를 동시에 수행하는 마이크로 led 검사장비
KR101001113B1 (ko) 웨이퍼 결함의 검사장치 및 검사방법
TW202127012A (zh) 光學檢測設備與光學檢測方法
JP2005326227A (ja) 穴領域検出装置および穴領域検出方法
WO2003060488A1 (en) Lcc device inspection module
KR102020879B1 (ko) 층간 절연체로 투명 pid를 갖는 다층레이어 패널의 표면검사장치
TW202018285A (zh) 異物檢查裝置及異物檢查方法
JP2011106912A (ja) 撮像照明手段およびパターン検査装置
KR100978487B1 (ko) 기판검사용 조명장치
KR100965418B1 (ko) 기판 결함 검출 장치
KR20130051874A (ko) 기판 검사장치
CN112782175A (zh) 一种检测设备及检测方法

Legal Events

Date Code Title Description
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20130617

Year of fee payment: 8

FPAY Annual fee payment

Payment date: 20140610

Year of fee payment: 9

FPAY Annual fee payment

Payment date: 20150526

Year of fee payment: 10

EXPY Expiration of term