TW200739187A - Device for detecting defects on flat panel display - Google Patents

Device for detecting defects on flat panel display

Info

Publication number
TW200739187A
TW200739187A TW096100961A TW96100961A TW200739187A TW 200739187 A TW200739187 A TW 200739187A TW 096100961 A TW096100961 A TW 096100961A TW 96100961 A TW96100961 A TW 96100961A TW 200739187 A TW200739187 A TW 200739187A
Authority
TW
Taiwan
Prior art keywords
glass substrate
camera
color filters
defects
detecting defects
Prior art date
Application number
TW096100961A
Other languages
Chinese (zh)
Other versions
TWI409529B (en
Inventor
Heui-Jae Pahk
Chan-Hee Hong
Il-Hwan Lee
Heung-Hyun Shin
Dong-Hyuk Kwon
Original Assignee
Snu Precision Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Snu Precision Co Ltd filed Critical Snu Precision Co Ltd
Publication of TW200739187A publication Critical patent/TW200739187A/en
Application granted granted Critical
Publication of TWI409529B publication Critical patent/TWI409529B/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0242Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0278Detecting defects of the object to be tested, e.g. scratches or dust
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Geometry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

This invention provides a device for detecting defects on flat panel display using optical detection, which is capable of detecting defects on flat display with glass substrate provided with color filters including red, green, blue filtering layers. Light sources are arranged in a manner that the light is capable of shining on defects on the mentioned glass substrate and the light has wavelength capable of being interdicted by color filters; a camera is placed on top of the mentioned glass substrate and is able to capture the defect images projected by the light sources and outputs the image data; a computer is connected to the camera and can process the image data inputted from the mentioned camera by computer programs. According to this invention, it is able to use single light source interdicted by the color filters of the flat display to examine existing defects on the mentioned glass substrate correctly in a simple manner, so as to increase product reliability and yield ratio in a time saving process.
TW096100961A 2006-04-06 2007-01-10 Device for detecting defects on flat panel display TWI409529B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2020060009140U KR200419687Y1 (en) 2006-04-06 2006-04-06 Device for detecting defects on flat panel display

Publications (2)

Publication Number Publication Date
TW200739187A true TW200739187A (en) 2007-10-16
TWI409529B TWI409529B (en) 2013-09-21

Family

ID=44482015

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096100961A TWI409529B (en) 2006-04-06 2007-01-10 Device for detecting defects on flat panel display

Country Status (2)

Country Link
KR (1) KR200419687Y1 (en)
TW (1) TWI409529B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI583940B (en) * 2012-06-04 2017-05-21 Joled Inc A manufacturing method of a display panel, an inspection apparatus, and a inspection method thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102200691B1 (en) * 2014-06-02 2021-01-13 삼성디스플레이 주식회사 Inspecting apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69330709T2 (en) * 1992-12-28 2002-07-11 Canon K.K., Tokio/Tokyo Direction of view detector and camera with this detector
TWM261685U (en) * 2004-06-15 2005-04-11 Hirose Tech Co Ltd Defect-detecting equipment of glass substrate disposed with polarizer thereon

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI583940B (en) * 2012-06-04 2017-05-21 Joled Inc A manufacturing method of a display panel, an inspection apparatus, and a inspection method thereof

Also Published As

Publication number Publication date
TWI409529B (en) 2013-09-21
KR200419687Y1 (en) 2006-06-23

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