KR20040101272A - Ozone water supplying apparatus - Google Patents

Abstract

The ejector for connecting the pure water inlet tube 12 and the ozone gas inlet tube 13 to suction ozone gas through the ozone gas inlet tube 13 by the flow of pure water introduced through the pure water inlet tube 12 ( 2) and an ozone water supply device 1 including an ozone water supply pipe 5 for supplying ozone water generated by the ejector 2 to a point of use, wherein a flow rate adjusting mechanism 25 is installed in the ozone gas introduction pipe 13. The ozone water supply pipe 5 is provided with a concentration detector 24 for detecting the ozone water concentration, and the control means 30 for adjusting the opening degree of the flow rate adjustment mechanism 25 based on the detection of the concentration detector 24. It further comprises. According to this ozone water supply apparatus 1, ozone water of desired density | concentration can be supplied intermittently economically and efficiently.

Description

Ozone water supply device {OZONE WATER SUPPLYING APPARATUS}

Ozone water is conventionally used for wet cleaning of electronic parts and the like and resist stripping in a photo process, and is produced by dissolving ozone gas in ultrapure water in an ozone water production apparatus. As a conventional ozone water supply apparatus, what is disclosed by Unexamined-Japanese-Patent No. 7-185572 is known, for example, The structure is shown by FIG.

As shown in Fig. 3, in the ozone water supply device, the ozone gas supply pipe 52 and the water supply pipe 54 are connected to the ejector 50, and ozone is generated by the water flow from the water supply pipe 54 to the ejector 50. The ozone gas generated in the gas generator 56 is drawn into the ejector 50 through the ozone gas supply pipe 52 and mixed with ultrapure water to generate ozone water. The ozone water is supplied to the gas-liquid separator 58 so that undissolved ozone gas is separated and then supplied to the use point through the ozone water supply pipe 60.

The gas-liquid separator 58 is provided with a densitometer 62 for measuring the ozone concentration of ozone water, and a flow meter 64 for measuring the flow rate of ozone water is provided in the ozone water supply pipe 60, and the control device 66 is a densitometer ( The voltage of the ozone gas generator 56 is adjusted by the voltage regulator 68 based on the detection result of 62 and the flowmeter 64.

However, the above-described ozone water supply device has a problem that the followability of the ozone water concentration is poor because the amount of ozone gas sucked from the ejector 50 does not change immediately even when the voltage of the ozone gas generator 56 is changed. there was. Therefore, when it is necessary to supply the ozone water intermittently, it is necessary to wait for a long time until the ozone water is stabilized to the desired concentration immediately after the start of supply (5-6 minutes according to the above-mentioned publication), and the ozone water discarded during that time is not only wasted. But there was a problem that a loss of process time occurs.

In addition, when ozone water is used at a plurality of use points, when the ozone gas supply pipe 52 is branched to produce ozone water near each use point, the voltage change of the ozone gas generator 56 is changed to the ozone gas flow rate at all use points. There is a problem that it is difficult to individually control the ozone water concentration at each point of use because of its influence. On the other hand, when the ozone water supply pipe 60 is branched and guided to each point of use, the transport distance by the ozone water supply pipe 60 inevitably becomes long (for example, 20 to 100 m), and thus dissolved ozone is being transported. There is a problem that there is a fear that the ozone concentration is lowered due to self-decomposition. For this reason, conventionally, an ozone gas generator had to be installed in the vicinity of each use point, and there was a problem in terms of equipment cost and maintenance.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone water supply device for supplying ozone water used for cleaning, resist stripping, and the like in a manufacturing process of an electronic component, and more particularly, to an ozone water supply device capable of intermittently supplying ozone water.

1 is a block diagram showing a schematic configuration of an ozone water supply device according to an embodiment of the present invention.

FIG. 2 is a block diagram showing an application example of the ozone water supply device shown in FIG.

3 is a block diagram showing a schematic configuration of a conventional ozone water supply device;

The present invention has been made to solve the above problems, and an object of the present invention is to provide an ozone water supply device capable of intermittently supplying ozone water of a desired concentration economically and efficiently.

An object of the present invention is an ozone water generated by an ejector and an ejector, to which a pure water introduction tube and an ozone gas introduction tube are connected and suction-mixing ozone gas through an ozone gas introduction tube by a flow of pure water introduced through the pure water introduction tube. And an ozone water supply pipe for supplying to the point of use, the flow rate adjusting mechanism is installed in the ozone gas introduction pipe, the concentration detector for detecting the ozone water concentration is installed in the ozone water supply pipe, and the flow rate adjusting mechanism is opened based on the detection of the concentration detector. It is achieved by the ozone water supply device, characterized in that it further comprises a control means for adjusting the opening.

It is preferable that the control means increases the opening degree of the flow rate adjustment mechanism when the detected concentration of the concentration detector is lower than the predetermined concentration, and decreases the opening degree of the flow rate adjustment mechanism when the detected concentration of the concentration detector is higher than the predetermined concentration. Do.

The ozone gas introduction pipe can be configured such that one end thereof is connected to the ozone gas generator and the other end thereof is connected to the plurality of ejectors via the plurality of distribution pipes. In this case, the concentration detector is preferably installed in each ozone water supply pipe connected to each ejector, and the flow rate adjustment mechanism is preferably installed in each distribution pipe. And the control means corresponds to the corresponding flow rate based on the detection of the concentration detector. It is preferable to adjust the opening degree of an adjustment mechanism.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to an accompanying drawing. 1 is a block diagram showing a schematic configuration of an ozone water supply device according to an embodiment of the present invention. As shown in FIG. 1, the ozone water supply device 1 includes an ejector 2 and a gas-liquid separation device 3.

The pure water inlet tube 12 and the ozone gas inlet tube 13 are connected to the ejector 2, and when the pure water introduced from the pure water inlet tube 12 is injected from a nozzle (not shown), the water flows into the ejector 2 by ozone gas. It is comprised so that ozone gas may be suction-introduced from the introduction pipe 13 and mixed inside. Pure water and ozone gas to be introduced can be produced by a known pure water producing device and an ozone gas generating device, respectively. The pure water production apparatus may be a reverse osmosis pure water production apparatus, for example, and preferably includes a cartridge such as an ion exchange resin so that ultrapure water of high purity can be produced. Moreover, as an ozone gas generator, the electrolysis method ozone generator which electrolyzes pure water and produces | generates a high concentration of ozone gas can be illustrated, and it processes the pressure regulating valve which makes the supply pressure of a primary side constant, and excess ozone gas. It is preferred to include an exhaust ozone decomposer.

The discharge side of the ejector 2 is connected to the gas-liquid separator 3 through the mixing tube 4, and the pure water and ozone gas mixed by the ejector 2 are passed through the mixing tube 4 to the gas-liquid separator 3. Is introduced.

An ozone gas discharge pipe 14 and an ozone water supply pipe 5 are connected to the gas-liquid separator 3, and the ozone gas discharge pipe 14 is connected to an ozone gas decomposer 15 filled with an ozone gas decomposition catalyst. The excess ozone gas which is not dissolved in the pure water introduced into the gas-liquid separator 3 from the mixing pipe 4 is transferred to the ozone gas decomposer 15 through the ozone gas discharge pipe 14 to be decomposed into oxygen, and only ozone water is ozone water. It is supplied to the point of use through the supply pipe (5). In addition, a well-known thing can also be used also for a gas-liquid separator, For example, the cyclone type which separates ozone water and ozone gas using a centrifugal force, or the baffle type which makes gas-liquid two-phase flow collide with a baffle board. Or a demister type for separating gas-liquid using a wire mesh.

The pure water inlet pipe 12, the ozone water supply pipe 5, and the ozone gas discharge pipe 14 are each provided with a pure water supply valve 21, an ozone water supply valve 22, and an ozone gas discharge valve 23, and a control device 30. Their opening and closing is controlled by

The ozone water supply pipe 5 is provided with a dissolved ozone monitor 24, and the ozone gas introduction pipe 13 includes a flow rate adjusting mechanism 25. The dissolved ozone monitor 24 is a concentration detector which detects the ozone concentration of ozone water passing through, and outputs a detection result to the control apparatus 30. Although it is preferable to use the inline type | system | group with favorable response characteristic for the dissolved ozone monitor 24, even if it is a sampling system, it can use by correct | amending the response time. In addition, the flow volume adjustment mechanism 25 consists of a variable orifice valve etc. which can change the opening degree of the ozone gas introduction pipe 13 continuously, for example, and the opening degree is adjusted by the control apparatus 30, for example. .

Next, the operation of the ozone water supply device including the above-described configuration will be described. At the time of supplying ozone water, ozone gas and pure water are introduce | transduced into the ejector 2 by making all the pure water supply valve 21, the ozone water supply valve 22, and the ozone gas discharge valve 23 open. The pure water introduced into the ejector 2 is preferably highly purified ultrapure water. In addition, it is preferable that the supply pressure of the ozone gas generator (not shown) which supplies ozone gas to the ozone gas introduction tube 13 exists in the range of 0.1-0.3 MpaG.

The ozone gas and the pure water introduced into the ejector 2 are sufficiently mixed in the course of passing through the ejector 2 and the mixing tube 4 to become ozone water, and after the excess ozone gas is removed in the gas-liquid separator 3, the ozone water is removed. Ozone water is supplied through the supply pipe (5). The concentration of ozone water supplied is always detected by the dissolved ozone monitor 24 and input to the control device 30.

When the ozone water concentration is higher than the desired concentration, the controller 30 reduces the opening of the flow rate adjusting mechanism 25 to reduce the flow rate of the ozone gas introduced into the ejector 2, while the ozone water concentration is lower than the desired concentration. The degree of opening of the ground flow adjusting mechanism 25 is increased to increase the flow rate of the ozone gas introduced into the ejector 2. As a result, even if the supply amount of ozone water or the like changes, the ozone water concentration can be maintained at a nearly desired value.

In the intermittent supply of ozone water or the like, when a stop signal of ozone water is input to the control device 30, the control device 30 keeps the pure water supply valve 21 and the ozone gas discharge valve 23 closed to supply the ozone water. Stop it. Since the introduction of ozone gas into the ejector 2 is performed by the suction force according to the water flow, the introduction of ozone gas into the ejector 2 also stops when the flow of pure water introduced into the ejector 2 is closed by closing the pure water supply valve 21. do. In addition, by closing the ozone gas discharge valve 23, the ozone gas remaining in the gas-liquid separator 3 is prevented from leaking to the outside. As a result, the supply of ozone water can be stopped without unnecessary waste of pure water and ozone gas. On the other hand, when excess ozone gas is generated in the ozone gas generated by the ozone gas generator during the stop of supply of ozone water, it is decomposed by, for example, an exhaust ozone decomposer (not shown) included in the ozone gas generator. Can be.

After the supply stops for a predetermined period of time, when the request signal for ozone water is input to the control device 30, the control device 30 opens the pure water supply valve 21 and the ozone gas discharge valve 23 to the ejector 2. Resume supply of pure water to the furnace. Therefore, the water flow of pure water is generated in the ejector 2, and suction of ozone gas is also started with this. The concentration of ozone water supplied from the ozone water supply pipe 5 becomes somewhat unstable immediately after resumption of supply, but the control device 30 adjusts the opening degree of the flow rate adjusting mechanism 25 based on the detection of the dissolved ozone monitor 24. You can keep the value you want. Therefore, the ozone water of a desired concentration can be supplied immediately after the start of supply of the ozone water, and the ozone water does not need to be disposed of unnecessarily. The opening and closing of the pure water supply valve 21 and the ozone gas discharge valve 23 and the opening degree adjustment of the flow rate adjusting mechanism 25 by the control device 30 are repeatedly performed while supplying the ozone water intermittently.

When ozone water is used at a plurality of use points, as shown in Fig. 2, the ozone gas inlet pipe 13 connected to one ozone gas generator 40 is branched so that the ozone gas is distributed through the distribution pipes 13a and 13b. 13c, 13d) to be guided to the vicinity of each use point. The flow rate adjustment mechanism 25 is provided in the distribution pipes 13a-13d, respectively. In addition, the ejector 2, the gas-liquid separator 3, the ozone water supply pipe 5, the pure water introduction pipe 12, the control device 30, and the like are provided at each use point, and the control device 30 is a dissolved ozone monitor. Based on the detection of (24), the opening degree of the flow rate adjustment mechanism 25 of the distribution pipes 13a-13d corresponding to a use point is adjusted.

This configuration makes it possible to individually control the concentration of ozone water at each of a plurality of points of use even when there is only one source of ozone gas, so that the cost of the equipment can be reduced and the maintenance can be facilitated. In addition, since ozone water can be produced after the transfer to the point of use in the state of ozone gas, there is no need for long distance transfer in the state of ozone water, and it is possible to prevent the possibility of ozone decomposing naturally and the concentration of ozone water is reduced. Can be. In particular, when the ultrapure water of very high purity in which the containing organic material is decomposed into ultraviolet light of short wavelength (185 nm) is used, the effect of using the ozone water supply device having such a structure is further increased.

Example

In the configuration shown in Fig. 2, the ozone gas generator uses an electrolysis method ozone generator that electrolyzes pure water to generate a high concentration of ozone gas, and uses a maximum amount of ozone gas of 48 g / h. Then, the pressure of the ozone gas is controlled to be always maintained at 0.1 MPaG, and the ozone water is supplied by the distribution pipes 13a to 13d branched from the ozone gas introduction pipe 13 at a concentration of generated ozone gas of 230 g / m 3. It was configured to distribute evenly to the apparatus 1. Fluorine resin tubes having an inner diameter of 4 mm and an outer diameter of 6 mm are used for the ozone gas introduction pipe 13 and the distribution pipes 13a to 13d, and the ozone gas flow paths from the ozone gas generator 40 to the respective use points are 40 m and 60 m, respectively. , 70 m and 80 m. In addition, in each ozone water supply apparatus 1, the flow volume of the pure water introduced into the ozone water production apparatus 2 through the pure water inlet pipe 12 is 2.5 flow rate in the normal state with ozone water supplied from the ozone water supply pipe 5. L / min, the concentration was set to 20 ppm. In addition, the gas-liquid separation apparatus 3 used the cyclone type, and the flow rate adjustment mechanism 25 used the variable orifice valve. An inline dissolved ozone monitor was used for the dissolved ozone monitor 24.

Under this condition, the supply of ozone water was started with the pure water supply valve 21, the ozone water supply valve 22, and the ozone gas discharge valve 23 open. The ozone water concentration supplied from the ozone water supply pipe 5 at the point of use farthest from the ozone gas generator 40 was measured, and the result was as shown in Table 1 below.

Ozone Water Concentration (ppm) At the start of supply 0 5 seconds later 16 10 seconds later 19 After 20 seconds 21 30 seconds later 20

As is clear from Table 1, the concentration of ozone water discharged from the ozone water production apparatus 2 is 0 ppm at the start of ozone water supply, but increases rapidly with the passage of time, and the desired value is almost 20 ppm after 10 seconds (20 ppm). ) As the ozone water concentration approached the desired value, the control device 30 gradually decreased the opening degree of the flow rate adjusting mechanism 25, whereby the ozone water concentration was maintained at the almost desired value thereafter. On the other hand, the result was the same also at other points of use.

According to the ozone water supply device according to the present invention, since ozone water having a desired concentration can be supplied immediately after the start of supply of the ozone water, waste of ozone water immediately after the start of supply can be prevented when the ozone water is intermittently supplied, and The waiting time until the concentration has stabilized can be eliminated.

Claims (3)

An ejector to which a pure water introduction tube and an ozone gas introduction tube are connected, and suction and mix ozone gas through the ozone gas introduction tube by a flow of pure water introduced through the pure water introduction tube; And Ozone water supply pipe for supplying ozone water generated by the ejector to the point of use Including, Here, the ozone gas introduction pipe is provided with a flow rate adjustment mechanism, the ozone water supply pipe is provided with a concentration detector for detecting the ozone water concentration, Control means for adjusting the opening degree of the flow rate adjusting mechanism based on the detection of the concentration detector Ozone water supply device further comprising. The method of claim 1, The control means enlarges the opening degree of the flow rate adjusting mechanism when the detected concentration of the concentration detector is lower than a predetermined concentration, and the opening degree of the flow rate adjusting mechanism when the detected concentration of the concentration detector is higher than the predetermined concentration. Smaller Ozone water supply. The method of claim 1, One end of the ozone gas introduction pipe is connected to the ozone gas generator, the other end is connected to the plurality of ejectors through a plurality of distribution pipes, The concentration detectors are respectively installed in the ozone water supply pipes connected to the respective ejectors, the flow rate adjusting mechanisms are installed in the respective distribution pipes, The control means adjusts the opening degree of the corresponding flow adjusting mechanism based on the detection of the concentration detector. Ozone water supply.