JP2013086011A - Method for producing ozonated water and apparatus for producing ozonated water - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing ozonated water by utilizing surplus ozone.SOLUTION: The method for producing ozonated water includes an ozone generation means, fluid feed means, ozone dissolution means for dissolving ozone in the fed fluid, and gas/liquid separation means which separate ozone remaining undissolved in the ozone dissolution means, wherein the ozone dissolution means and the gas/liquid separation means constitute one unit on the same line, at least two such units are arranged on their respective lines parallelly branched from the fluid feed means, and the ozone separated in the gas/liquid separation means in one unit is sent to the ozone dissolution means in the other unit.

Description

  The present invention relates to a method and apparatus for producing ozone water using surplus ozone.

  As shown in FIG. 5, the conventional ozone water production mechanism dissolves and mixes the gas containing ozone from the ozone generating means 101 into water by the ozone dissolving means 102. This ozone mixed water enters the gas-liquid separation means 103, and ozone that cannot be completely dissolved in water is separated as excess ozone. This surplus ozone passes through the waste ozone treatment means 104 and is reduced to oxygen and released into the atmosphere. And ozone water is supplied from the gas-liquid separation means 103.

  However, in the ozone water production apparatus having the above configuration, only about 40 to 50% of the ozone supplied from the ozone generating means 101 is dissolved, and ozone that cannot be completely dissolved is reduced to oxygen by the waste ozone treatment means 104, and the atmosphere There was a problem of being released inside.

  To solve this problem, the ozone generating means, two ozone dissolving means for dissolving ozone in the pressurized water, and surplus ozone separating means for separating surplus ozone in the ozone water, the surplus ozone Two rows of parallel piping sections are formed in the water supply pipe connected to the water supply port of the separation means, and the ozone dissolving means is interposed in each, and the ozone generating means is connected to one of the ozone dissolving means However, an ozone water production apparatus has been proposed in which the ozone discharged from the surplus ozone separating means is returned to the other ozone dissolving means to increase the ozone dissolving rate (see, for example, Patent Document 1). ). The ozone water production apparatus 201 (see FIG. 6) returns the ozone separated by the surplus ozone separation apparatus 202 to oxygen by the ozone decomposition apparatus 228 and returns it to the ejector 216 for dissolution without releasing it to the atmosphere. By using surplus ozone effectively, ozone water having a high ozone dissolution rate can be produced.

  However, the ozone returned by the ozone return pipe 224 is dissolved and mixed in the tap water, merges in front of the water supply port 203, and again accumulates in the ozone water tank 205 of the surplus ozone separator 202 from the water supply port 203. The surplus ozone of the return ozone having the concentration is separated three times, and there is a problem that the return ozone is diluted. Further, the diameter of the nozzle of the ejector 216 and the diameter of the diffuser of the parallel piping portion 214a are made larger than those of the parallel piping portion 214b, and the amount of tap water in the parallel piping portion 214a is increased, thereby making the ozone mixing rate constant. However, if the amount of tap water in the parallel piping section 214b is reduced, the return ozone pull-in force in the ejector 216 is reduced, resulting in a new problem that the return ozone cannot be mixed and dissolved.

  Also, a plurality of ozone dissolving means and gas-liquid separating means are provided, and one of the ozone dissolving means blows a gas containing ozone gas flowing out from the ozone generating means into the water supplied from the water system to dissolve ozone. Gas component containing undissolved ozone gas is separated from the ozone-containing water by gas-liquid separation means, and the separated gas component is supplied to other ozone dissolution means, where it is blown into the water supplied from the water system to generate ozone gas. An ozone water production system characterized by being dissolved is proposed (see, for example, Patent Document 2).

  As one of the processes of the ozone water production system, in addition to the water system 304, another water system 304a is provided, and other gas components containing ozone at a high concentration separated by the gas-liquid separation means 302 provided in the water system 304 are provided. There is a process of supplying to other ozone dissolving means 302a provided in the water system 304a (see FIG. 7). The water system 304 shown in the upper side of FIG. 7 is provided in order from the upstream side to the downstream side of the circulation pump 329, the ozone dissolution means 302, the gas-liquid separation means 307, and the ozone utilization facility 305. Gas containing ozone from 301 is blown. Further, the water system 304 from the raw water supply device 303 joins the inlet side of the circulation pump 329. In the other system 304a shown in the lower side of FIG. 4, another circulation pump 329a, other ozone dissolving means 302a, and other ozone utilization equipment 305a are provided in order from the upstream side to the downstream side. Is injected with a gas component containing ozone at a high concentration separated by the gas-liquid separation means 307. Furthermore, another water system 304a from another raw water supply device 303a joins the inlet side of another circulation pump 329a. By operating the circulation pump 329, the system water of the water system 304 flows into the ozone dissolving means 302, where gas containing ozone from the ozone generating means 301 is blown, and ozone water and gaseous components are downstream of the water system 304. The gas-liquid mixture flows out. The gas-liquid mixture then flows into the gas-liquid separation means 307, where the gaseous component containing ozone at a high concentration is separated from the ozone water. The ozone water flows into the ozone utilization facility 305 provided downstream thereof, and the separated gas component flows into the other ozone dissolving means 302a provided in the other water system 304a from the pipe f. On the other hand, by operating the other circulation pump 329a, the system water of the other water system 304a flows into the other ozone dissolving means 302a, where a gas component containing ozone gas from the gas-liquid separation means 307 is blown, A gas-liquid mixture of ozone water and gaseous components flows downstream. The gas-liquid mixture then flows into another ozone utilization facility 305a, and used relatively low-concentration ozone water is discharged downstream. The discharged ozone water is circulated again to another ozone dissolving means 302a via another circulation pump 329a.

  According to the ozone water production system configured in this way, the ozone gas generated by the ozone generating means is reused without being wasted, so that the operating cost can be greatly reduced compared to the conventional system, and the ozone utilization rate. However, the capacity of the ozone generating means can be reduced, but another raw water supply device is indispensable for providing the other water system 304a, and the system increases and becomes complicated, resulting in installation cost and running cost. Also gets higher.

Japanese Patent No. 2976875 JP 2004-188246 A

  The present invention has been made in view of the above-mentioned problems of the prior art, and effectively uses surplus ozone that cannot be dissolved, and provides a low-cost ozone water production method and apparatus with high ozone dissolution efficiency. The purpose is to provide.

An ozone water production method comprising ozone generating means, means for supplying fluid, ozone dissolving means for dissolving ozone in the supplied fluid, and gas-liquid separation means for separating ozone that could not be dissolved by the ozone dissolving means In
The ozone dissolving means and the gas-liquid separating means constitute one unit on the same line, and at least two of the units are respectively arranged on each line branched in parallel from the fluid supplying means, The first feature is that the ozone separated by the gas-liquid separation means of the unit is transferred to the ozone dissolving means of the other unit.

The ozone dissolving means of each unit is a first ozone dissolving means and a second ozone dissolving means, and the ratio of the suction pressure (negative pressure) of the first ozone dissolving means to the suction pressure (negative pressure) of the second ozone dissolving means is The second characteristic is that the following relational expression is satisfied.
A / B ≧ 0.28 (1)
A: Suction pressure (gauge pressure) of the first ozone dissolution means
B: Suction pressure (gauge pressure) of the second ozone dissolving means

Thirdly, the suction pressure (gauge pressure) of the first ozone dissolving means is −5 kPa or less, and the maximum linear velocity of the fluid passing through the first ozone dissolving means is 5.42 m / sec or more, and The fourth characteristic is that the maximum cross-sectional area and the minimum cross-sectional area ratio with respect to an axis whose axis is the direction in which the fluid passes satisfy the following relational expression.
C / D ≧ 2.2 (2)
C: Maximum cross-sectional area D: Minimum cross-sectional area

Ozone water production comprising an ozone generator, a fluid supply device, an ozone dissolution device for dissolving ozone in a fluid supplied by the supply device, and a gas-liquid separation device for separating ozone that could not be dissolved by the ozone dissolution device In the device
A first unit comprising at least a first ozone-dissolving device and a first gas-liquid separation device disposed on the same line as the first ozone-dissolving device, a second ozone-dissolving device, and the same line as the second ozone-dissolving device A second unit comprising a second gas-liquid separator disposed above, and a first flow control valve and a second flow control valve upstream of the first ozone dissolving device and the second ozone dissolving device. Are arranged, and a first back pressure control valve and a second back pressure control valve for adjusting the back pressure of ozone water after gas-liquid separation downstream of the first gas-liquid separator and the second gas-liquid separator Are arranged, and the first unit and the second unit are arranged on each line branched in parallel from a line to which a fluid is supplied from the fluid supply device, and the first gas-liquid separation device is the second The fifth thing that is connected with the ozone dissolving device And butterflies.

The sixth feature is that the ratio of the suction pressure (negative pressure) of the first ozone dissolving device and the suction pressure (negative pressure) of the second ozone dissolving device satisfies the following relational expression.
A / B ≧ 0.28 (1)
A: Suction pressure (gauge pressure) of the first ozone dissolving device
B: Suction pressure (gauge pressure) of the second ozone dissolving device

The seventh feature is that the suction pressure (gauge pressure) of the first ozone dissolver is −5 kPa or less, and the maximum linear velocity of the fluid passing through the first ozone dissolver is 5.42 m / sec or more, and The eighth characteristic is that the maximum cross-sectional area and the minimum cross-sectional area ratio with respect to an axis whose axis is the direction through which the fluid passes satisfy the following relational expression.
C / D ≧ 2.2 (2)
C: Maximum cross-sectional area D: Minimum cross-sectional area

The ninth feature is that the ozone dissolving device is an ejector or an aspirator, and the tenth feature is that the ejector has a reduced diameter portion, a throat portion, and an enlarged diameter portion formed continuously. ,
A first channel forming means for forming a first inlet channel from the first inlet to the first channel, the ejector having a first inlet and a first channel extending in the longitudinal direction; ,
A second inlet portion and a second passage portion extending along a tapered surface surrounding the first passage portion, and a second inlet flow from the second inlet portion to the second passage portion. Second flow path forming means for forming a path;
A narrow-diameter portion, an enlarged-diameter portion, and an outlet portion; a flow area is enlarged from the narrow-diameter portion to the enlarged-diameter portion and the outlet portion; A third channel forming means for forming an outlet channel communicating with the one inlet channel and the second inlet channel,
A swirling flow generating means for generating a swirling flow in at least one of the first inlet channel and the second inlet channel is an eleventh feature.

  The present invention is configured as described above, and the following excellent effects can be obtained.

(1) Since the pressure of the liquid supplied under pressure is lower than that of a single pipe by forming the parallel pipe section, an inexpensive supply means can be used.
(2) Since the pressure of the liquid supplied under pressure is lower than that of a single pipe by forming the parallel pipe section, a large amount of ozone water can be produced.
(3) Since surplus ozone is effectively utilized, ozone water with high ozone dissolution efficiency can be produced.
(4) Since surplus ozone is effectively utilized and the amount of ozone discharged is reduced, the cost required for equipment for treating surplus ozone can be reduced.

It is the flowchart which showed the ozone water manufacturing process of 1st embodiment of this invention. It is the flowchart which showed the ozone water manufacturing apparatus of 1st embodiment of this invention. It is a longitudinal cross-sectional view which shows the ejector of 1st embodiment of this invention. It is a principal part enlarged view of FIG. It is a flowchart of the conventional ozone water manufacturing system. It is a schematic block diagram of the other conventional ozone water manufacturing apparatus. It is a process flow figure of other conventional ozone water manufacturing systems.

(Embodiment 1)
Hereinafter, although the first embodiment of the present invention will be described with reference to FIGS. 2 to 4, it is needless to say that the present invention is not limited to this embodiment. Moreover, in this embodiment, it demonstrates by the example which uses water as a fluid.

  In FIG. 2, the ozone water production apparatus of the present invention includes an ozone generator 1, a fluid supply device 2, two gas self-priming ozone dissolving devices 3a and 3b, and surplus ozone 5a and 5b that could not be dissolved. Two gas-liquid separators 4a and 4b for separating gas, flow rate adjusting valves 7a and 7b for adjusting the flow rate of water supplied to each of the ozone dissolving devices 3a and 3b, and gas-liquid separators 4a and 4b It comprises back pressure control valves 8a and 8b for adjusting the back pressure of ozone water, and a waste ozone treatment device 9 for treating surplus ozone 5b. Excess ozone is ozone that could not be dissolved by the ozone dissolver.

  The water pressurized and supplied using the fluid supply device 2 such as a pump is supplied to the first ozone dissolving device 3a and the second ozone dissolving device 3b, which are connected in parallel by two pipes. Ozone generated from the ozone generator 1 is self-primed by the first ozone dissolving device 3a and mixed with water in the first ozone dissolving device 3a. The ozone mixed water discharged from the first ozone dissolving device 3a is separated into the first surplus ozone 5a and the first ozone water 6a containing ozone that could not be dissolved by the first gas-liquid separation device 4a. The ozone 5a is self-primed by the second ozone dissolving device 3b and mixed with the water branched in the second ozone dissolving device 3b. The ozone mixed water discharged from the second ozone dissolving device 3b is separated into the second surplus ozone gas 5b containing ozone that could not be dissolved by the second gas-liquid separator 4b and the second ozone water 6b, and the first ozone water 6a. And the second ozone water 6b merge. The second surplus ozone gas 5b is reduced to oxygen gas by the waste ozone treatment device 9 and released. In order to adjust the flow rate of water to the first ozone dissolving device 3a and the second ozone dissolving device 3b, the first flow rate adjusting valve 7a and the second flow rate adjusting valve 7b are used. The back pressure is adjusted by the first back pressure adjustment valve 8a and the second back pressure adjustment valve 8b so as to maintain the pressure balance in the two-gas liquid separation device 4b.

  Here, the ratio Ps1 (gauge pressure) / Ps2 (gauge pressure) of the suction pressure Ps1 (gauge pressure) in the first ozone dissolving device 3a and the suction pressure Ps2 (gauge pressure) in the second ozone dissolving device 3b is 0. 28 or more is good. Under a condition lower than 0.28, the flow rate of water in the first ozone dissolving device 3a is decreased, the flow rate of water in the second ozone dissolving device 3b is increased, or the water flow diameter of the first ozone dissolving device 3a is increased. In addition, the water flow diameter of the second ozone dissolving device 3b is reduced, and in the first ozone dissolving device, the mixing and dissolving performance of high-concentration ozone from the ozone generating means is lowered, and the dissolved ozone concentration of ozone water is lowered. There is a fear.

  Further, the suction pressure Ps1 (gauge pressure) in the first ozone dissolving apparatus 3a is preferably −5 kPa or less. If -5 kPa <Ps1 (gauge pressure) <0 kPa, stable suction performance cannot be obtained, and if 0 kPa ≦ Ps1 (gauge pressure), means for supplying ozone, such as a blower, is required, which increases costs. .

  Furthermore, in order to maintain Ps1 (gauge pressure) at -5 kPa or less, in the first ozone dissolving apparatus 3a, a certain flow velocity and a differential pressure, that is, a certain flow velocity difference is required, and the maximum linear velocity LV1max is LV1max. ≧ 5.42 m / sec and the ratio of the maximum cross-sectional area to the minimum cross-sectional area with respect to the axis whose axis is the direction in which the fluid passes is preferably 2.2 or more.

  When LV1max is less than 5.42 m / sec, it is difficult to maintain Ps1 (gauge pressure) ≦ −5 kPa even when the water passage maximum cross-sectional area / water passage minimum cross-sectional area is 2.2 or more. Similarly, if the maximum cross-sectional area of the water passing portion / the minimum cross-sectional area of the water passing portion is less than 2.2, it is difficult to maintain Ps1 (gauge pressure) ≦ −5 kPa even when LV1max is 5.42 m / sec or more. It is because it becomes.

  Hereinafter, the ejector according to the first embodiment of the present invention will be described with reference to FIGS. FIG. 3 is a longitudinal sectional view showing a configuration of the ejector according to the first embodiment of the present invention, and FIG. 4 is an enlarged view of a main part of FIG. The ejector includes a substantially cylindrical main body 11 and a substantially cylindrical nozzle member 12 fitted to the main body 11.

  A receiving portion 16 into which the nozzle member 12 is fitted is provided on one end surface of the main body 11, and an outlet opening 31 that forms the outlet channel 15 is provided on the other end surface. A female screw portion 21 is provided on the opening side of the inner peripheral surface of the receiving portion 16. An annular groove portion 20 is provided on the bottom surface 32 of the receiving portion 16, and the outer peripheral surface of the annular groove portion 20 is located on a substantially extended line of the female screw portion 21. Inside the main body 11, a diameter-reduced portion 17 that is formed on the bottom surface of the receiving portion 16 and has a diameter reduced to a truncated cone shape, a throat portion 18 that is a columnar narrow-diameter portion continuously connected to the diameter-reduced portion 17, and A diameter-expanded portion 19 that is connected to the throat portion 18 and expands in a truncated cone shape toward the outlet opening 31 is provided on the central axis of the main body 11, and the venturi effect is exerted from the diameter-reduced portion 17 to the outlet opening 31. An outlet channel 15 is formed.

  A second inlet opening 30 is provided at a predetermined position in the circumferential direction on the peripheral surface of the main body 11, and the second inlet opening 30 communicates with the annular groove 20. On the bottom surface 32 of the receiving portion 16, a plurality of radial curved groove portions are provided at equal intervals in the circumferential direction from the annular groove portion 20 to the periphery of the reduced diameter portion 17.

  The nozzle member 12 includes a cylindrical portion 22 having a male screw portion 24 provided on the outer peripheral surface thereof, and a protruding portion 23 that is coaxial with the cylindrical portion 22 and protrudes in a truncated cone shape on one end surface of the cylindrical portion 22. A first inlet opening 20 is provided on the end surface of the cylindrical portion 22, and a discharge port 25 is provided on the end surface of the protruding portion 23. Inside the nozzle member 12, a truncated cone-shaped taper portion 26 whose diameter is reduced from the middle of the flow path to the discharge port 25 is provided on the central axis of the nozzle member 12, and from the first inlet opening 29 to the discharge port 25. A first inlet flow path 13 that is throttled on the outlet side is formed.

  The male threaded portion 24 of the nozzle member 12 is threadably engaged with the female threaded portion 21 of the receiving portion 16 of the main body 11 until the end surface 33 of the cylindrical portion 22 abuts the bottom surface 32 of the receiving portion 16 of the main body 11. The member 12 is inserted into the receiving portion 16 of the main body 11. At this time, the protruding portion 23 serving as a convex portion is accommodated in the reduced diameter portion 17 serving as the concave portion of the main body 11, and the groove portion 12 provided on the bottom surface 32 of the receiving portion 16 of the main body 11 and the protruding portion 23 side of the nozzle member 12. A communication flow path 27 is formed by the end face 33 of the first end. Further, a clearance is provided between the inner peripheral surface (tapered surface) of the reduced diameter portion 17 of the main body 11 and the outer peripheral surface (tapered surface) of the projecting portion 23 of the nozzle member 12, and along this taper surface by this clearance. An annular channel 28 is formed.

As a result, the second inlet channel 14 is communicated from the second inlet opening 30 to the throat portion 18 of the main body 11 through the annular groove 20, the communication channel 27, and the annular channel 28, and is throttled on the outlet side. Is formed. The bottom surface 32 of the receiving portion 16 of the main body 11 and the end surface 33 on the protruding portion 23 side of the nozzle member 12 may be in contact with each other, or may have an appropriate clearance. When the clearance is provided, the clearance portion and the groove portion form the communication channel 27.

  The material of the main body 11 and the nozzle member 12 is not particularly limited as long as it is a material that is not affected by the fluid to be used, and may be polyvinyl chloride, polypropylene, polyethylene, or the like. In particular, when a corrosive fluid is used as the fluid, it is preferably a fluororesin such as polytetrafluoroethylene, polyvinylidene fluoride, or tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer resin. It can be used as a fluid, and is suitable because there is no fear of corrosion of piping members even when corrosive gas permeates. The constituent material of the main body 11 or the nozzle member 12 may be a transparent or translucent member, and in this case, it is preferable because the state of fluid mixing can be visually confirmed. Depending on the substance flowing through the fluid mixer, the material of each component may be a metal or alloy such as iron, copper, copper alloy, brass, aluminum, stainless steel, titanium, or the like. In particular, when the fluid is food, hygienic and long-life stainless steel is preferable. Any method may be used for assembling the main body 11 and the nozzle member 12 as long as the internal fluid sealing property such as screwing, welding, welding, adhesion, pinning, and fitting is maintained. Pipes (not shown) for introducing and discharging fluid are connected to the first inlet opening 29, the second inlet opening 30 and the outlet opening 31, respectively, but the connection method is not particularly limited.

  The ozone water produced by the ozone water production apparatus of the present invention can be used for disinfection / sterilization of hands, equipment, water tanks, water, floors, air, hot springs, pool water, seawater, environmental water, clothing, vegetables, metal parts, etc. Sterilization, antibacterial, bacteriostatic, sterilization, cleaning of silicon wafers, semiconductor substrates, photomask substrates, silicon materials, ingredients, films, clothing, vegetables, metal parts, removal of photoresists and residues, organic compounds, inorganic compounds・ Oxidation of metals, water treatment of industrial wastewater such as water, sewage, and factories, purification and decontamination of contaminated ground, pretreatment of plating treatment, food materials, membranes, clothing, vegetables, surfaces of metal parts Used for processing, pulp bleaching, accelerated oxidation, etc.

  Next, an ozone dissolution test was performed using the embodiment of the present invention. The results are shown below.

  As shown in FIG. 2, water is supplied from a water tank storing tap water to an ozone dissolution apparatus connected in two pipes in parallel using a pump. Ozone generated from the ozone generator is self-primed by the first ozone dissolver and mixed with tap water in the first ozone dissolver. After the ozone mixed water discharged from the first ozone dissolving device is separated into the first surplus ozone and ozone containing ozone that could not be dissolved by the first gas-liquid separation device, the first surplus ozone is further Self-primed by the second ozone dissolver and mixed with tap water branched in the second ozone dissolver. After the ozone mixed water discharged from the second ozone dissolving device is separated into second surplus ozone and second ozone water containing ozone that could not be dissolved by the second gas-liquid separator, the first ozone water and the second ozone water are separated. Ozone water merges. The second surplus ozone is reduced to oxygen gas by the ozonolysis device and released. The ozone concentration generated from the ozone generator was measured using a gas phase ozone concentration meter, and the ozone concentration of the ozone water after joining was measured using a liquid phase ozone concentration meter.

In this test, the amount of ozone per unit time was calculated from the liquid phase ozone concentration of the produced ozone water and the gas phase ozone concentration generated from the ozone generator, and the ozone dissolution efficiency was determined by the following equation.
Dissolution efficiency (%) = amount of liquid phase ozone / introduced gas phase ozone x 100

[Measurement of gas phase ozone concentration]
Gas phase ozone concentration meter: OZ-30 manufactured by TOA DK Corporation
[Measurement of liquid phase ozone concentration]
Liquid phase ozone concentration meter: OZ-20 manufactured by Toa DKK Corporation

  The ozone dissolution test in the present invention was conducted for each of Examples 1 to 3 and Comparative Examples 1 to 3. The test results are shown in Tables 1 to 3.

[Example 1]
When the ozone dissolver is a tap water flow rate of 10 to 25 L / min, an ozone dissolution test is performed using an ejector having a water supply pressure of 0.01 to 0.05 MPa and a suction pressure (gauge pressure) of −1 to −21 kPa. The ozone dissolution efficiency is shown in Table 1.

[Example 2]
The ozone dissolution test was performed using an ejector with an ozone dissolving device having a water supply pressure of 0.01 to 0.09 MPa and a suction pressure (gauge pressure) of −7 to −50 kPa when the tap water flow rate is 10 to 25 L / min. The ozone dissolution efficiency is shown in Table 2.

[Example 3]
When the ozone dissolver is a tap water flow rate of 10 to 25 L / min, an ozone dissolution test is performed using an ejector having a feed water pressure of 0.04 to 0.27 MPa and a suction pressure (gauge pressure) of -15 to -72 kPa. The ozone dissolution efficiency is shown in Table 3.

  Further, the ozone self-priming performance at each Ps1 (gauge pressure) when the ratio of Ps1 (gauge pressure) and Ps2 (gauge pressure) was made constant was examined, and the results at that time are shown in Table 4.

  Further, Table 5 shows the relationship between PV1 and Ps1 (gauge pressure).

[Comparative Example 1]
The ozone dissolution apparatus used in Example 1 was used, and an ozone dissolution test was performed using a single pipe instead of a parallel pipe. The ozone dissolution efficiency at that time is shown in Table 1.

[Comparative Example 2]
The ozone dissolution apparatus used in Example 2 was used, and an ozone dissolution test was conducted using a single pipe instead of a parallel pipe. The ozone dissolution efficiency at that time is shown in Table 2.

[Comparative Example 3]
The ozone dissolution apparatus used in Example 3 was used, and an ozone dissolution test was performed using a single pipe instead of a parallel pipe. The ozone dissolution efficiency at that time is shown in Table 3.

From the results of Table 1, it can be seen that, at the same water flow rate, the water supply pressures of Examples 1-1 to 1-6 are all lower than those of Comparative Examples 1-1 to 1-3. The ozone dissolution efficiency decreased only when Ps1 (gauge pressure) / Ps2 (gauge pressure) = 0.11.
From the results of Table 2, it can be seen that, at the same water flow rate, the water supply pressures of Examples 2-1 to 2-6 are all lower than those of Comparative Examples 2-1 to 2-3. Moreover, the ozone dissolution efficiency of Examples 2-1 to 2-6 is higher than Comparative Examples 2-1 to 2-3.
From the results of Table 3, it can be seen that, at the same water flow rate, the water supply pressures of Examples 3-1 to 3-6 are all lower than those of Comparative Examples 3-1 to 3-3. Moreover, the ozone dissolution efficiency of Examples 3-1 to 3-6 is higher than Comparative Examples 3-1 to 3-3.
From the results of Tables 1 and 2, the water supply pressure is lower when two parallel pipes are formed and ozone water is produced using two ejectors than when the ejectors are used alone.
Furthermore, under conditions where Ps1 (gauge pressure) / Ps2 (gauge pressure) is 0.28 or more, dissolution efficiency is improved by 7 to 19% or more at the same water flow rate, and the feed water pressure is reduced by 50% or more. ing.
From Table 4, the condition under which ozone can be stably self-primed was that the suction pressure Ps1 (gauge pressure) was Ps1 ≦ −5 kPa.
Further, from Table 5, the maximum linear velocity LV1max satisfying the condition that the suction pressure Ps1 (gauge pressure) is Ps1 ≦ −5 kPa is LV1max ≧ 5.42 m / sec.

DESCRIPTION OF SYMBOLS 1 ... Ozone generator 2 ... Fluid supply apparatus 3a ... First ozone dissolution apparatus 3b ... Second ozone dissolution apparatus 4a ... First gas-liquid separation apparatus 4b ... Second gas-liquid separation apparatus 5a ... First surplus ozone 5b ... First 2 surplus ozone 6a ... 1st ozone water 6b ... 2nd ozone water 7a ... 1st flow control valve 7b ... 2nd flow control valve 8a ... 1st back pressure control valve 8b ... 2nd back pressure control valve 9 ... Waste ozone Processing device 10 ... Ejector 11 ... Main body 12 ... Nozzle member 13 ... First inlet channel 14 ... Second inlet channel 15 ... Outlet channel 16 ... Receiving portion 17 ... Reduced diameter portion 18 ... Throat portion 19 ... Expanded diameter portion 20 ... annular groove part 21 ... female thread part 22 ... cylindrical part 23 ... projection part 24 ... male screw part 25 ... discharge port 26 ... taper part 27 ... communication channel 28 ... annular channel 29 ... first inlet opening 30 ... first Two inlet openings 31 ... outlet opening 32 ... bottom face 33 ... end DESCRIPTION OF SYMBOLS 101 ... Ozone generation means 102 ... Ozone dissolution means 103 ... Gas-liquid separation means 104 ... Waste ozone treatment means 201 ... Ozone water production apparatus 202 ... Excess ozone separation apparatus 203 ... Water supply port 205 ... Ozone water tank 214a, 214b ... Parallel piping part 216 ... Ejector 223 ... Ozone generator 224 ... Ozone return pipe 228 ... Ozone decomposition device 301 ... Ozone generator 301a ... Other ozone generator 302 ... Ozone dissolver 302a ... Other ozone dissolver 302b ... Third ozone dissolver 303 ... Raw water supply device 303a ... Other raw water supply device 304 ... Water system 304a ... Other water system 305 ... Ozone use equipment 305a ... Other ozone use equipment 306 ... Exhaust gas treatment device 307 ... Gas-liquid separation means 329 ... Circulation pump 329a ... Other circulation pumps f ... Piping

Claims (11)

An ozone water production method comprising ozone generating means, means for supplying fluid, ozone dissolving means for dissolving ozone in the supplied fluid, and gas-liquid separation means for separating ozone that could not be dissolved by the ozone dissolving means In
The ozone dissolving means and the gas-liquid separating means constitute one unit on the same line, and at least two of the units are respectively arranged on each line branched in parallel from the fluid supplying means, A method for producing ozone water, wherein the ozone separated by the gas-liquid separation means of a unit is transferred to the ozone dissolving means of the other unit. The ozone dissolving means of each unit is a first ozone dissolving means and a second ozone dissolving means, and the ratio of the suction pressure (negative pressure) of the first ozone dissolving means to the suction pressure (negative pressure) of the second ozone dissolving means Satisfy | fills the following relational expressions, The ozone water manufacturing method of Claim 1 characterized by the above-mentioned.
A / B ≧ 0.28 (1)
A: Suction pressure (gauge pressure) of the first ozone dissolution means
B: Suction pressure (gauge pressure) of the second ozone dissolving means   The method for producing ozone water according to claim 2, wherein the suction pressure (gauge pressure) of the first ozone dissolving means is -5 kPa or less. The maximum linear velocity of the fluid passing through the first ozone dissolving means is 5.42 m / sec or more, and the maximum cross-sectional area and the minimum cross-sectional area ratio with respect to an axis whose axis is the direction in which the fluid passes are expressed by the following relational expression: The ozone water production method according to claim 1, wherein the ozone water production method is satisfied.
C / D ≧ 2.2 (2)
C: Maximum cross-sectional area D: Minimum cross-sectional area Ozone water production comprising an ozone generator, a fluid supply device, an ozone dissolution device for dissolving ozone in a fluid supplied by the supply device, and a gas-liquid separation device for separating ozone that could not be dissolved by the ozone dissolution device In the device
A first unit comprising at least a first ozone-dissolving device and a first gas-liquid separation device disposed on the same line as the first ozone-dissolving device, a second ozone-dissolving device, and the same line as the second ozone-dissolving device A second unit comprising a second gas-liquid separator disposed above, and a first flow control valve and a second flow control valve upstream of the first ozone dissolving device and the second ozone dissolving device. Are arranged, and a first back pressure control valve and a second back pressure control valve for adjusting the back pressure of ozone water after gas-liquid separation downstream of the first gas-liquid separator and the second gas-liquid separator Are arranged, and the first unit and the second unit are arranged on each line branched in parallel from a line to which a fluid is supplied from the fluid supply device, and the first gas-liquid separation device is the second Characterized by being connected to an ozone dissolver That ozone water production apparatus. 6. The ozone according to claim 5, wherein the ratio of the suction pressure (negative pressure) of the first ozone dissolving device and the suction pressure (negative pressure) of the second ozone dissolving device satisfies the following relational expression. Water production equipment.
A / B ≧ 0.28 (1)
A: Suction pressure (gauge pressure) of the first ozone dissolving device
B: Suction pressure (gauge pressure) of the second ozone dissolving device   The ozone water production apparatus according to claim 6, wherein a suction pressure (gauge pressure) of the first ozone dissolving apparatus is -5 kPa or less. The maximum linear velocity of the fluid passing through the first ozone dissolving device is not less than 5.42 m / sec, and the maximum cross-sectional area and the minimum cross-sectional area ratio with respect to an axis whose axis is the direction in which the fluid passes are expressed by the following relational expression: The ozone water production apparatus according to claim 5, wherein the ozone water production apparatus is satisfied.
C / D ≧ 2.2 (2)
C: Maximum cross-sectional area D: Minimum cross-sectional area   The ozone water producing apparatus according to claim 5, wherein the ozone dissolving apparatus is an ejector or an aspirator.   The ozone water producing apparatus according to claim 9, wherein the ejector has a reduced diameter portion, a throat portion, and an enlarged diameter portion formed continuously. A first channel forming means for forming a first inlet channel from the first inlet to the first channel, the ejector having a first inlet and a first channel extending in the longitudinal direction; ,
A second inlet portion and a second passage portion extending along a tapered surface surrounding the first passage portion, and a second inlet flow from the second inlet portion to the second passage portion. Second flow path forming means for forming a path;
A narrow-diameter portion, an enlarged-diameter portion, and an outlet portion; a flow area is enlarged from the narrow-diameter portion to the enlarged-diameter portion and the outlet portion; A third channel forming means for forming an outlet channel communicating with the one inlet channel and the second inlet channel,
The apparatus for producing ozone water according to claim 9, further comprising a swirling flow generating means for generating a swirling flow in at least one of the first inlet channel and the second inlet channel.

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