JP4228164B2 - Ozone water supply device with equalized branch system ozone flow rate - Google Patents

Ozone water supply device with equalized branch system ozone flow rate Download PDF

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JP4228164B2
JP4228164B2 JP20631799A JP20631799A JP4228164B2 JP 4228164 B2 JP4228164 B2 JP 4228164B2 JP 20631799 A JP20631799 A JP 20631799A JP 20631799 A JP20631799 A JP 20631799A JP 4228164 B2 JP4228164 B2 JP 4228164B2
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ozone
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JP2001031405A (en
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淳二 水谷
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Sasakura Engineering Co Ltd
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Sasakura Engineering Co Ltd
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【０００１】
【発明の属する技術の分野】
本発明は、単一のオゾン供給系と該オゾン供給系のオゾンが分流される複数の分岐系と該複数の分岐系のそれぞれに接続された複数のオゾン溶解装置であって該オゾン溶解装置に供給される純水に前記分流されたオゾンの一部分が溶解される複数のオゾン溶解装置と前記一部分の残部を成すオゾンが排出される複数のオゾン排出系とを備えたオゾン水供給装置に関し、特にオゾンの均等分流技術に関する。
【０００２】
【従来の技術】
オゾン水供給装置としては、従来、図３に示す如く、単一のオゾン供給系１から供給されるオゾンを例えば２台のオゾン溶解モジュール４、５に分配して供給し、その中を流れる純水にオゾンを溶解させると共に、オゾン排出系６、７から不溶解オゾンを排出するようにした装置が知られている。そして、例えば半導体の洗浄では、圧力１〜２kgf/cm2g程度のオゾン水が必要になるため、オゾン水製造用の純水をその程度の圧力で供給すると共に、この純水にオゾンを溶解させるために、オゾン排出系に背圧弁１２を設け、オゾン溶解モジュール４、５のオゾン側の圧力を０．５〜１kgf/cm2g程度になるようにしていた。
【０００３】
このようなオゾン水供給装置におけるオゾン溶解モジュールでは、オゾンの流れ抵抗は十分小さいものの、その流れ抵抗がアンバランスになると、オゾン供給系から供給されるオゾン量が、それぞれのオゾン溶解モジュール間で不均一に分配されることになった。その結果、純水に対するオゾンの溶解効率が低下し、同じ量のオゾンが供給されても、生成するオゾン水の濃度が低くなったり、濃度維持のために純水供給量を減少させると、オゾン水の供給能力が低下するという問題があった。
【０００４】
なお、オゾン溶解モジュール４、５におけるオゾンの通過抵抗の変動は、それぞれの使用条件が不可避的に異なることによってもたらされるが、その大きな原因の１つは、オゾン溶解モジュールを構成するファイバーのオゾン側空間への水滴の生成・付着であると考えられる。即ち、純水側の圧力を上げるために、オゾンの圧力もある程度上げてバランスを保つようにしているものの、ファイバー内を流れる純水の圧力がオゾンより高いことが多いため、純水のごく微量がファイバー外のオゾン側に透過し、これが水滴となってファイバー外周の各部に付着し、ファイバー間やオゾン排出系を部分的に閉塞させ、オゾンの流れ抵抗になることがある。そして、このような閉塞状態が不規則に生ずるため、並設されたオゾン溶解モジュール毎に、異なったオゾン通過抵抗となって現れる。
【０００５】
【発明が解決しようとする課題】
本発明は従来技術に於ける上記問題を解決し、オゾン水供給系のオゾンを複数のオゾン溶解装置に分流したときのオゾン流量を均等化し、オゾン溶解効率を良好に維持し、オゾン水供給能力の高いオゾン水供給装置を提供することを課題とする。
【０００６】
【課題を解決するための手段】
本発明は上記課題を解決するために、単一のオゾン供給系と該オゾン供給系のオゾンが分流される複数の分岐系と該複数の分岐系のそれぞれに接続された複数のオゾン溶解装置であって該オゾン溶解装置に供給される純水に前記分流されたオゾンの一部分が溶解される複数のオゾン溶解装置と前記一部分の残部を成すオゾンが排出される複数のオゾン排出系とを備えたオゾン水供給装置において、
前記オゾン溶解装置を流れる前記分流されたオゾンの通過抵抗より大きい抵抗を発生させる抵抗発生手段としてオリフィス又は弁を前記複数のオゾン排出系のそれぞれに設けたことを特徴とする。
【０００７】
【発明の実施の形態】
図１は本発明を適用したオゾン水供給装置の全体構成の一例を示す。
本装置は、単一のオゾン供給系である共通系１、この系のオゾンが分流される複数の分岐系として本例では２系統設けられている分岐系２、３、これらのそれぞれが接続された複数のオゾン溶解装置としてのオゾン溶解モジュール４、５、複数のオゾン排出系として本例では上記と同じ２系統の排出系６、７、抵抗発生手段としてのオリフィス８、９、等によって構成されている。オゾン溶解モジュール４、５では、純水供給系１０から供給される純水に分流されたオゾンの一部分が溶解される。オゾン排出系６、７には、前記一部分の残部を成す未溶解オゾンが排出される。符号１１は排出系を合流させたヘッダー管、１２は背圧弁、１３は排オゾン分解器、１４はオゾン水供給系である。
【０００８】
オゾン溶解モジュール４、５は、それぞれ、純水が導入される胴体４１、５１、その両端の水室４２、５２、図では少数を示しているが実際には多本数配設されているＰＴＦＥの多孔質中空状ファイバーから成る細管４３、５３、オゾン入口４４、５４、排オゾン出口４５、５５、純水入口４６、５６、オゾン水出口４７、５７、等によって構成されている。
【０００９】
オリフィス８は、オゾン溶解モジュール４、５を流れるオゾンの抵抗をＲ1 とすると、これより十分大きい抵抗として例えば５０Ｒ1 程度以上の抵抗を発生させるように定められる。背圧弁１２は、オゾンがオゾン溶解モジュール４、５内で純水中に溶解しやすいようにオゾンの圧力を高めるためのものであり、例えばオゾン溶解モジュール４、５へのオゾン入口圧力が１kgf/cm2gになるように、上記合計抵抗５０Ｒ1 を考慮した（１−５０Ｒ1 ）の値に設定される。即ち、背圧弁１２の上流側の圧力が（１−５０Ｒ1 ）になるように設定される。排オゾン分解器１３は、二酸化マンガン等のオゾン分解用触媒を内蔵していて、未溶解オゾンを分解処理する。
【００１０】
以上のようなオゾン水供給装置は次のように使用される。
共通系１には、電解式オゾン発生装置から発生した１５％程度の高濃度オゾン及び残部を成す酸素から成る混合ガスが一定量供給され、並設された２台のオゾン溶解モジュール４、５に分流される。この混合ガスは以後の流れにおいてもほぼ同程度の比率でオゾンを含有するが、本発明はオゾンに関するので、以下では混合ガス中のオゾンについて説明する。それぞれのオゾン溶解モジュール４、５では、一部分のオゾンとして流入したオゾンのうちの約７５％が細管４３及び５３内を流れる純水中に溶解し、残りの約２５％の未溶解オゾンが排オゾン出口４５及び５５から排出され、オリフィス８、９、ヘッダー管１１及び背圧弁１２を経由して排オゾン分解器１３に入り、酸素に分解される。
【００１１】
図２は、オゾン流量とオゾン通過抵抗及び各部の圧力の関係を例示した図である。横軸Ｘは分岐系のオゾン流量を示し、オゾン発生装置が定格条件で運転されたときの共通系１のオゾン流量を１００％とし、正常運転時における分岐系２、３のオゾン流量をそれぞれ５０％としている。なお、オゾン流量はオゾン溶解モジュールを通過するに従って減少するが、オゾン溶解モジュールやオリフィスの抵抗としては、通過前の流量をベースとして示している。
【００１２】
図中の横軸Ｘ、Ｘ1 及びそれらの上の各曲線Ａ〜Ｅについては以下のとおりである：
Ｘ軸；オゾンの流量を示すと共に、背圧弁１２の設定圧力、従ってその上流側の位置Ｐ1 （図１）の圧力を示し、この例では、曲線Ａ〜Ｃに対しては０．５kgf/cm2g、曲線Ｄ及びＥに対しては０．８kgf/cm2g としている。
Ｘ1 線；Ｘ軸から圧力０．８kgf/cm2gの線であると共に、それ以上の部分の圧力スケールを１０倍にして表示するための基準線である。
【００１３】
Ａ（実線）；オリフィス８、９の上流側の位置Ｐ2a及びＰ2bの圧力を示し、共通系の１００％流量に対する分岐系２、３の等分流量である５０％流量では、０．８kgf/cm2gである。従って、この流量におけるオリフィスの抵抗としては、Ｘ軸のベース圧力を引いて０．３kgf/cm2 である。なお、上記の如くＸ1 線より上では圧力スケールを１０倍にしている。従って、Ｘ1 線が変曲点になっている。次のＢ、Ｃ線についても同じである。圧力スケールを１０倍にしたのは、線Ａ、Ｂ、Ｃの差を明瞭に表すためである。
【００１４】
Ｂ（鎖線）；オゾン溶解モジュール４が上記５０％流量時に例えば０．００５kgf/cm2 （５ｍｍＡｑ）の正常な抵抗値を持つとしたときのオゾン溶解モジュール４の上流側位置Ｐ3aの圧力を示す。従って、この点Ｂ1 の圧力は、５０％流量では０．８０５kgf/cm2gである。
【００１５】
Ｃ（一点鎖線）；オゾン溶解モジュール５が上記５０％流量時に例えば０．０１kgf/cm2 という通常時の２倍に大きくなった抵抗値を持つとしたときのオゾン溶解モジュール５の上流側位置Ｐ3bの圧力を示す。従って、この点Ｃ1 の圧力は、５０％流量では０．８１０kgf/cm2gである。
【００１６】
Ｄ（二点鎖線）；参考として、オリフィスを備えていない従来のオゾン水供給装置において、オゾン溶解モジュール４が正常な抵抗０．００５kgf/cm2 を持つときの点Ｐ3aの圧力を示す。なお、この条件では、Ｘの基準圧力即ち背圧弁１２の圧力が図において（ ）で示すように０．８kgf/cm2g程度に設定される。従って、５０％流量時には、この点Ｄ1 の圧力は０．８０５kgf/cm2gになっている。なお、この線Ｄ及び次のＥは、Ｘ1 線上の線Ａ〜Ｃと同様にＸ軸から上で１０倍の圧力スケールで示されている。
【００１７】
Ｅ（二点鎖線）；上記条件でオゾン溶解モジュール５が大きい抵抗０．０１kgf/cm2 を持つときの点Ｐ3bの圧力を示す。この場合にも背圧弁１２は０．８kgf/cm2g程度に高く設定されている。従って、５０％流量時には、この点Ｅ1 の圧力は０．８１kgf/cm2gになる。
【００１８】
オゾン系の上記圧力特性において、オゾン溶解モジュール４、５の抵抗が相互に異なっていても、上流側位置Ｐ3aとＰ3bとは同じ共通系１から分岐した分岐系２、３の位置になるので、これらの圧力は同じになる。その結果、オゾン溶解モジュール４側の線Ｂでは、最初の５０％の流量が増加し、点Ｂ1 が圧力上昇した点Ｂ2 位置になり、一方、オゾン溶解モジュール５側の線Ｃでは、最初の５０％流量が減少し、点Ｃ1 が圧力の減少した点Ｃ2 になる。そして、計算によれば、これらの点Ｂ2 、Ｃ2 の圧力は共に圧力０．８０７kgf/cm2g程度になり、それぞれの流量は４９．５％及び５０．５％程度になる。この結果によれば、本発明の適用により、オゾン溶解モジュール４、５に２倍の抵抗差が生じても、各分岐系では±０．５％程度という僅かな流量差が生ずるのみである。
【００１９】
これに対してオリフィスを設けないときの線Ｄ、Ｅでは、上記の場合と同様に、Ｄ1 の点がＤ2 になってＥ1 の点がＥ2 になり、これらの間では、計算上同一圧力約０．８０７kgf/cm2gでそれぞれの流量が５８．６％及び４１．４％になり、それぞれ分岐系２、３の間では、±８．６％という大きな流量差が生ずる。
【００２０】
以上の如く、本発明を適用すれば、オゾン溶解モジュール４、５のオゾンの流れ抵抗に大きなアンバランスが生じても、オゾン流量の差を十分小さくすることができる。即ち、本発明では、背圧弁で圧力を上げて使用するオゾン供給系の特性を巧みに利用し、背圧弁で無駄に昇圧する圧力を小さくし、これによって得られた圧力をそれぞれの分岐系に設けたオリフィスの抵抗として利用することにより、分岐系間のオゾン溶解モジュールの抵抗差に基づく流量差を大幅に均一化することができる。
【００２１】
一方、オゾン溶解モジュールにおけるオゾンの溶解効率は、オゾンの定格流量時の効率を１００％とすると、流量が少なくなっても余り大きくならず、流量が多くなるとそれに対応して低下する傾向になる。その結果、本発明を適用したときの上記オゾン流量５０％±０．５％では、共に５０％のときに較べて合計オゾン溶解量が９９．５％程度以上になるが、本発明を適用しないときのオゾン流量５０％±８．７％では、合計オゾン溶解量が９５％程度まで低下する。従って、本発明の適用により、それぞれの分岐系でオゾン溶解モジュールの抵抗が相当大きくアンバランスになっても、オゾン溶解量を維持し、オゾン水の濃度を常に満足できる範囲内の値に維持することができる。
【００２２】
なお以上では、抵抗発生手段がオリフィスである例について説明したが、抵抗発生手段としては、十分な抵抗を持たせられる各種弁等を使用することができる。
【００２３】
【発明の効果】
以上の如く本発明によれば、単一のオゾン供給系と複数の分岐系と複数のオゾン溶解装置と複数のオゾン排出系とを備えたオゾン水供給装置において、オゾン溶解装置を流れるオゾンの抵抗より十分大きい抵抗を発生させる抵抗発生手段を複数のオゾン排出系のそれぞれに設けたので、複数のオゾン溶解装置のそれぞれの避け難い運転条件の相違等により、それらの間でオゾンの通過抵抗に大きな差が生じても、排出系においてこれらの抵抗より更に十分大きい抵抗が追加されることになる。その結果、オゾン溶解装置の抵抗と抵抗発生手段の抵抗との合計抵抗としては、それぞれの分岐系間における差の比率が大幅に低下する。
【００２４】
一方、それぞれの分岐系の合流部であり始点である単一のオゾン供給系の圧力は同じであるから、実際には、各分岐系の抵抗差が同じになるように各分岐系に分配されるオゾン流量が変化することになる。そしてこの場合、このような抵抗は通常オゾン流量の二乗に比例するから、各分岐系ごとの合計抵抗を同じにするべく、抵抗差の比率の１／２乗に対応する流量差が発生することになる。そして、本発明により、前記の如く抵抗差の比率が小さくなるようにしているので、流量差の比率は更に小さい値になる。その結果、単一の供給系から分岐系へ流れるオゾン量が十分均等化されることになる。
【００２５】
例えば、分岐系が２系統で単一の供給系を流れるオゾン流量Ｑの半分のＱ／２がそれぞれの分岐系に流れ、そのときの２分岐系のオゾン溶解モジュールの抵抗がそれぞれｒと２ｒであるとし、抵抗発生手段で発生させる抵抗Ｒが５０ｒであるとすれば、それぞれの分岐系の合計抵抗は５１ｒと５２ｒになり、それぞれの分岐系のオゾン流量が変わることによって両分岐系の合計抵抗が同じ値で５１．５ｒになるとすれば、それぞれの抵抗値の変動は約±１％になり、５０％流量に対してはその半分の±０．５％になり、従って流量変動はそのルートで±０．７％になり、ｒ側の流量が５０．７％で２ｒ側の流量が４９．３％になる。
【００２６】
このように、オゾン量が少ない流量差に均等化されると、純水に対するオゾンの溶解量も均等化され、オゾン水濃度を目的とする高濃度に維持することができる。そして、供給能力の高いオゾン水供給装置を実現することができる。
【図面の簡単な説明】
【図１】本発明を適用したオゾン水供給装置の全体構成の１例を示す説明図である。
【図２】上記装置におけるオゾン圧力と流量との関係を示す曲線図である。
【図３】従来のオゾン水供給装置の全体構成の１例を示す説明図である。
【符号の説明】
１ 共通系（単一のオゾン供給系）
２、３ 分岐系
４、５ オゾン溶解モジュール（複数のオゾン溶解装置）
６、７ オゾン排出系
８、９ オリフィス（抵抗発生手段）[0001]
[Field of the Invention]
The present invention relates to a single ozone supply system, a plurality of branch systems into which ozone of the ozone supply system is diverted, and a plurality of ozone dissolvers connected to each of the plurality of branch systems. In particular, the present invention relates to an ozone water supply apparatus comprising a plurality of ozone dissolving apparatuses in which a part of the divided ozone is dissolved in supplied pure water and a plurality of ozone discharge systems in which ozone forming the remainder of the part is discharged. It is related to the ozone equal diversion technology.
[0002]
[Prior art]
As an ozone water supply device, as shown in FIG. 3, conventionally, ozone supplied from a single ozone supply system 1 is distributed and supplied to, for example, two ozone dissolution modules 4 and 5, and pure water flowing through the ozone supply module 1 is distributed. An apparatus is known in which ozone is dissolved in water and insoluble ozone is discharged from ozone discharge systems 6 and 7. For example, in cleaning semiconductors, ozone water with a pressure of about 1 to 2 kgf / cm 2 g is required. Therefore, pure water for producing ozone water is supplied at that pressure, and ozone is dissolved in this pure water. In order to achieve this, a back pressure valve 12 is provided in the ozone discharge system so that the pressure on the ozone side of the ozone dissolution modules 4 and 5 is about 0.5 to 1 kgf / cm 2 g.
[0003]
In the ozone dissolution module in such an ozone water supply device, although the flow resistance of ozone is sufficiently small, if the flow resistance becomes unbalanced, the amount of ozone supplied from the ozone supply system is not balanced between the ozone dissolution modules. It was distributed evenly. As a result, the ozone dissolution efficiency in pure water decreases, and even if the same amount of ozone is supplied, if the concentration of the generated ozone water decreases or the supply amount of pure water decreases to maintain the concentration, There was a problem that the water supply capacity declined.
[0004]
In addition, although the fluctuation | variation of the ozone passage resistance in the ozone dissolution modules 4 and 5 is brought about by inevitably differing each use conditions, one of the big causes is the ozone side of the fiber which comprises an ozone dissolution module. It is thought that water droplets are generated and attached to the space. In other words, in order to increase the pressure on the pure water side, the pressure of ozone is raised to some extent to maintain the balance, but the pressure of pure water flowing in the fiber is often higher than ozone, so there is a very small amount of pure water. May permeate to the ozone side outside the fiber and become water droplets and adhere to each part of the outer periphery of the fiber, partially blocking between the fibers and the ozone discharge system, and may become ozone flow resistance. And since such a clogging state arises irregularly, it appears as a different ozone passage resistance for every ozone dissolution module arranged in parallel.
[0005]
[Problems to be solved by the invention]
The present invention solves the above-mentioned problems in the prior art, equalizes the ozone flow rate when ozone in the ozone water supply system is divided into a plurality of ozone dissolving devices, maintains good ozone dissolving efficiency, and provides ozone water supply capability. It is an object of the present invention to provide an ozone water supply apparatus having a high level.
[0006]
[Means for Solving the Problems]
In order to solve the above problems, the present invention includes a single ozone supply system, a plurality of branch systems into which ozone of the ozone supply system is diverted, and a plurality of ozone dissolving apparatuses connected to each of the plurality of branch systems. A plurality of ozone dissolving devices in which a part of the divided ozone is dissolved in pure water supplied to the ozone dissolving device, and a plurality of ozone discharge systems in which ozone forming the remainder of the part is discharged. In the ozone water supply device,
Characterized by providing each orifice or valve of said plurality of ozone discharge system as a resistance generating means for generating a flow resistance greater than the resistance of the diverted ozone flowing through the ozone dissolution apparatus.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows an example of the overall configuration of an ozone water supply apparatus to which the present invention is applied.
In this apparatus, a common system 1 which is a single ozone supply system, and a plurality of branch systems 2 and 3 provided in this example as a plurality of branch systems into which ozone of this system is shunted are connected to each other. In this example, the ozone dissolution modules 4 and 5 as a plurality of ozone dissolving devices, the two discharge systems 6 and 7 as described above, the orifices 8 and 9 as resistance generating means, etc. ing. In the ozone dissolution modules 4 and 5, a part of the ozone divided into the pure water supplied from the pure water supply system 10 is dissolved. Undissolved ozone constituting the remainder of the part is discharged to the ozone discharge systems 6 and 7. Reference numeral 11 is a header pipe that joins the discharge system, 12 is a back pressure valve, 13 is an exhaust ozone decomposer, and 14 is an ozone water supply system.
[0008]
The ozone melting modules 4 and 5 are respectively the fuselages 41 and 51 into which pure water is introduced, the water chambers 42 and 52 at both ends thereof, and a small number in the figure, but in fact, a large number of PTFEs are arranged. It is constituted by thin tubes 43 and 53 made of porous hollow fibers, ozone inlets 44 and 54, exhaust ozone outlets 45 and 55, pure water inlets 46 and 56, ozone water outlets 47 and 57, and the like.
[0009]
The orifice 8 is determined so as to generate a resistance of, for example, about 50 R 1 or more as a sufficiently larger resistance, where R 1 is the resistance of ozone flowing through the ozone melting modules 4 and 5. The back pressure valve 12 is for increasing the pressure of ozone so that ozone is easily dissolved in the pure water in the ozone dissolution modules 4 and 5. For example, the ozone inlet pressure to the ozone dissolution modules 4 and 5 is 1 kgf / The value is set to (1-50R 1 ) in consideration of the total resistance 50R 1 so as to be cm 2 g. That is, the pressure on the upstream side of the back pressure valve 12 is set to be (1-50R 1 ). The exhaust ozone decomposer 13 incorporates an ozone decomposition catalyst such as manganese dioxide and decomposes undissolved ozone.
[0010]
The ozone water supply apparatus as described above is used as follows.
The common system 1 is supplied with a fixed amount of a mixed gas composed of about 15% high-concentration ozone generated from the electrolytic ozone generator and the remaining oxygen, and is supplied to two ozone melting modules 4 and 5 arranged in parallel. Divided. Although this mixed gas contains ozone at a substantially similar ratio in the subsequent flow, the present invention relates to ozone, and therefore the ozone in the mixed gas will be described below. In each of the ozone dissolution modules 4 and 5, about 75% of the ozone flowing in as a part of ozone is dissolved in pure water flowing in the narrow tubes 43 and 53, and the remaining about 25% of undissolved ozone is exhausted ozone. The gas is discharged from the outlets 45 and 55, enters the exhaust ozone decomposer 13 via the orifices 8 and 9, the header pipe 11 and the back pressure valve 12, and is decomposed into oxygen.
[0011]
FIG. 2 is a diagram illustrating the relationship between the ozone flow rate, the ozone passage resistance, and the pressure of each part. The horizontal axis X represents the ozone flow rate of the branch system, the ozone flow rate of the common system 1 when the ozone generator is operated under rated conditions is 100%, and the ozone flow rates of the branch systems 2 and 3 during normal operation are 50% respectively. %. Although the ozone flow rate decreases as it passes through the ozone dissolution module, the resistance of the ozone dissolution module and the orifice is shown based on the flow rate before passing.
[0012]
The horizontal axes X and X 1 in the figure and the curves A to E above them are as follows:
X axis; showing the flow rate of ozone and the set pressure of the back pressure valve 12, and therefore the pressure at the upstream position P 1 (FIG. 1). In this example, for the curves A to C, 0.5 kgf / For kg 2 g and curves D and E, it is 0.8 kgf / cm 2 g.
X 1 line; a line with a pressure of 0.8 kgf / cm 2 g from the X-axis, and a reference line for displaying the pressure scale of the portion beyond it by 10 times.
[0013]
A (solid line); indicates the pressure at the positions P2a and P2b upstream of the orifices 8 and 9, and 0.8 kgf / cm at 50% flow rate, which is the equal flow rate of the branch systems 2 and 3 with respect to 100% flow rate of the common system 2 g. Accordingly, the resistance of the orifice at this flow rate is 0.3 kgf / cm 2 when the base pressure of the X axis is subtracted. Note that the pressure scale 10 times above the X 1 line as described above. Therefore, the X 1 line is an inflection point. The same applies to the following B and C lines. The reason why the pressure scale is 10 times is to clearly show the difference between the lines A, B, and C.
[0014]
B (chain line): Indicates the pressure at the upstream position P3a of the ozone dissolution module 4 when the ozone dissolution module 4 has a normal resistance value of, for example, 0.005 kgf / cm 2 (5 mmAq) at the 50% flow rate. Therefore, the pressure at this point B 1 is 0.805 kgf / cm 2 g at a 50% flow rate.
[0015]
C (one-dot chain line); upstream position P3b of the ozone dissolution module 5 when the ozone dissolution module 5 has a resistance value that is twice as large as that of the normal time of 0.01 kgf / cm 2 at the 50% flow rate, for example. Indicates the pressure. Therefore, the pressure at this point C 1 is 0.810 kgf / cm 2 g at 50% flow rate.
[0016]
D (two-dot chain line): As a reference, in a conventional ozone water supply apparatus not provided with an orifice, the pressure at the point P3a when the ozone dissolution module 4 has a normal resistance of 0.005 kgf / cm 2 is shown. Under this condition, the reference pressure of X, that is, the pressure of the back pressure valve 12, is set to about 0.8 kgf / cm 2 g as indicated by () in the figure. Accordingly, at the 50% flow rate, the pressure at this point D 1 is 0.805 kgf / cm 2 g. Incidentally, the line D and the following E is indicated by 10-fold pressure scale on the X-axis as with the line A~C of X 1 line.
[0017]
E (two-dot chain line); the pressure at the point P3b when the ozone dissolution module 5 has a large resistance of 0.01 kgf / cm 2 under the above conditions. Also in this case, the back pressure valve 12 is set as high as about 0.8 kgf / cm 2 g. Therefore, at 50% flow rate, the pressure at this point E 1 is 0.81 kgf / cm 2 g.
[0018]
In the above pressure characteristics of the ozone system, even if the resistances of the ozone melting modules 4 and 5 are different from each other, the upstream positions P3a and P3b are the positions of the branch systems 2 and 3 branched from the same common system 1. These pressures will be the same. As a result, in the line B on the ozone dissolution module 4 side, the flow rate of the first 50% increases, and the point B 1 becomes the point B 2 position where the pressure has increased, while on the line C on the ozone dissolution module 5 side, The point C 1 becomes the point C 2 where the pressure is reduced. According to the calculation, the pressures at these points B 2 and C 2 are both about 0.807 kgf / cm 2 g, and the respective flow rates are about 49.5% and 50.5%. According to this result, even if a double resistance difference occurs in the ozone dissolution modules 4 and 5 due to the application of the present invention, only a slight flow rate difference of about ± 0.5% occurs in each branch system.
[0019]
On the other hand, in the lines D and E when the orifice is not provided, the point of D 1 becomes D 2 and the point of E 1 becomes E 2 in the same manner as in the above case. At the same pressure of about 0.807 kgf / cm 2 g, the respective flow rates become 58.6% and 41.4%, and a large flow rate difference of ± 8.6% occurs between the branch systems 2 and 3, respectively.
[0020]
As described above, if the present invention is applied, the difference in ozone flow rate can be sufficiently reduced even if a large imbalance occurs in the ozone flow resistance of the ozone melting modules 4 and 5. That is, in the present invention, the characteristics of the ozone supply system that is used by increasing the pressure with the back pressure valve are skillfully utilized, the pressure that is increased unnecessarily by the back pressure valve is reduced, and the resulting pressure is applied to each branch system. By using it as the resistance of the provided orifice, the flow rate difference based on the resistance difference of the ozone dissolution module between the branch systems can be made substantially uniform.
[0021]
On the other hand, the ozone dissolution efficiency in the ozone dissolution module does not increase much even if the flow rate decreases, assuming that the efficiency at the rated flow rate of ozone is 100%, and tends to decrease correspondingly when the flow rate increases. As a result, when the ozone flow rate is 50% ± 0.5% when the present invention is applied, the total ozone dissolution amount is about 99.5% or more compared to the case where both are 50%, but the present invention is not applied. When the ozone flow rate is 50% ± 8.7%, the total ozone dissolution amount decreases to about 95%. Therefore, by applying the present invention, even if the resistance of the ozone dissolution module becomes considerably large and unbalanced in each branch system, the amount of ozone dissolution is maintained, and the concentration of ozone water is always maintained within a satisfactory value. be able to.
[0022]
In the above, an example in which the resistance generating means is an orifice has been described. However, as the resistance generating means, various valves or the like that can provide sufficient resistance can be used.
[0023]
【The invention's effect】
As described above, according to the present invention, in the ozone water supply apparatus including a single ozone supply system, a plurality of branch systems, a plurality of ozone dissolution apparatuses, and a plurality of ozone discharge systems, the resistance of ozone flowing through the ozone dissolution apparatus. Since resistance generating means for generating a sufficiently large resistance is provided in each of the plurality of ozone discharge systems, the ozone passage resistance between them is large due to differences in operating conditions that are unavoidable among the plurality of ozone dissolving apparatuses. Even if a difference occurs, a resistance much larger than these resistances is added in the exhaust system. As a result, as the total resistance of the resistance of the ozone dissolving apparatus and the resistance of the resistance generating means, the ratio of the difference between the respective branch systems is greatly reduced.
[0024]
On the other hand, since the pressure of the single ozone supply system, which is the confluence of each branch system and the starting point, is the same, in fact, it is distributed to each branch system so that the resistance difference of each branch system is the same. The ozone flow rate will change. In this case, since such resistance is generally proportional to the square of the ozone flow rate, a flow rate difference corresponding to the 1/2 power of the resistance difference ratio is generated in order to make the total resistance of each branch system the same. become. According to the present invention, since the ratio of the resistance difference is reduced as described above, the ratio of the flow rate difference is further reduced. As a result, the amount of ozone flowing from the single supply system to the branch system is sufficiently equalized.
[0025]
For example, Q / 2, which is half the ozone flow rate Q flowing through a single supply system with two branch systems, flows to each branch system, and the resistance of the ozone dissolution module of the two branch system at that time is r and 2r, respectively. Assuming that the resistance R generated by the resistance generating means is 50r, the total resistance of each branch system is 51r and 52r, and the total resistance of both branch systems is changed by changing the ozone flow rate of each branch system. If the current value is 51.5r with the same value, the variation of each resistance value will be about ± 1%, and for 50% flow rate, it will be half of that ± 0.5%. The flow rate on the r side is 50.7% and the flow rate on the 2r side is 49.3%.
[0026]
Thus, when the ozone amount is equalized to a small flow rate difference, the amount of ozone dissolved in the pure water is also equalized, and the ozone water concentration can be maintained at a desired high concentration. And an ozone water supply apparatus with high supply capability is realizable.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram showing an example of the overall configuration of an ozone water supply apparatus to which the present invention is applied.
FIG. 2 is a curve diagram showing the relationship between ozone pressure and flow rate in the apparatus.
FIG. 3 is an explanatory diagram showing an example of the overall configuration of a conventional ozone water supply apparatus.
[Explanation of symbols]
1 Common system (single ozone supply system)
2, 3 Branch system 4, 5 Ozone dissolution module (multiple ozone dissolution devices)
6, 7 Ozone discharge system 8, 9 Orifice (resistance generating means)

Claims (1)

単一のオゾン供給系と該オゾン供給系のオゾンが分流される複数の分岐系と該複数の分岐系のそれぞれに接続された複数のオゾン溶解装置であって該オゾン溶解装置に供給される純水に前記分流されたオゾンの一部分が溶解される複数のオゾン溶解装置と前記一部分の残部を成すオゾンが排出される複数のオゾン排出系とを備えたオゾン水供給装置において、
前記オゾン溶解装置を流れる前記分流されたオゾンの通過抵抗より大きい抵抗を発生させる抵抗発生手段としてオリフィス又は弁を前記複数のオゾン排出系のそれぞれに設けたことを特徴とするオゾン水供給装置。A single ozone supply system, a plurality of branch systems into which ozone of the ozone supply system is diverted, and a plurality of ozone dissolvers connected to each of the plurality of branch systems, each of which is supplied to the ozone dissolver In an ozone water supply device comprising a plurality of ozone dissolving devices in which a part of the diverted ozone is dissolved in water and a plurality of ozone discharging systems in which ozone forming the remainder of the portion is discharged,
Ozone water supplying apparatus characterized in that provided in each of the orifices or valves of the plurality of ozone discharge system as a resistance generating means for generating a flow resistance greater than the resistance of the diverted ozone flowing through the ozone dissolution apparatus.
JP20631799A 1999-07-21 1999-07-21 Ozone water supply device with equalized branch system ozone flow rate Expired - Lifetime JP4228164B2 (en)

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