KR20040051982A - a particle excluding apparatus of a cleanroom wiper - Google Patents
a particle excluding apparatus of a cleanroom wiper Download PDFInfo
- Publication number
- KR20040051982A KR20040051982A KR1020020079695A KR20020079695A KR20040051982A KR 20040051982 A KR20040051982 A KR 20040051982A KR 1020020079695 A KR1020020079695 A KR 1020020079695A KR 20020079695 A KR20020079695 A KR 20020079695A KR 20040051982 A KR20040051982 A KR 20040051982A
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- South Korea
- Prior art keywords
- wiper
- casing
- clean
- dust
- clean air
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
- B08B15/026—Boxes for removal of dirt, e.g. for cleaning brakes, glove- boxes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/89—Arrangement or mounting of control or safety devices
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Abstract
Description
본 발명은 일정크기로 절단 완료된 상태의 크린룸용 와이퍼의 표면에 존재하는 먼지를 제거할 수 있도록 하는 크린룸용 와이퍼의 먼지제거장치에 관한 것으로, 더 자세하게는 케이싱의 내부에 와이퍼가 투입되는 회전드럼을 설치하고, 케이싱내상부 일측에 청정공기를 주입할 수 있도록 하는 청정공기 주입구를 마련하는 동시에 케이싱의 내하부 일측에 먼지가 포함된 오염공기를 배출하도록 하는 오염공기 배출구를 마련한 것에 관한 것이다.The present invention relates to a dust removal device of the clean room wiper to remove the dust present on the surface of the clean room wiper in a state of being cut to a certain size, more specifically, a rotating drum in which the wiper is put into the casing And a clean air inlet for injecting clean air into one side of the upper portion of the casing, and at the same time, a contaminated air outlet for discharging the contaminated air containing dust on the inner lower side of the casing.
일반적으로 청정상태와 무균상태를 유지해야 하는 크린룸(청정실)은 전자산업 및 식품, 의약산업에서 여러 분야에 이용되고 있으며, 특히 반도체 및 TFT LCD 제조 공정을 실시하는 크린룸 내에서 웨이퍼(wafer)나 장치 및 기구 등을 청소할 때에 이용되는 크린룸용 와이퍼는 먼지(particle)나 수분 등의 흡착성이 우수하고, 사용 중에 먼지 등이 억제되는 섬유 재질로 제조되는 것이 보통이다.In general, clean rooms (clean rooms) that need to be kept clean and sterile are used in various fields in the electronics industry, food, and medicine industries, and especially wafers and devices in clean rooms that perform semiconductor and TFT LCD manufacturing processes. And the clean room wiper used for cleaning the appliance and the like are usually made of a fiber material which is excellent in adsorption of particles and moisture and in which dust and the like are suppressed during use.
이러한 크린룸용 와이퍼는 일정폭의 와이퍼를 원형으로 감은 형태의 롤형 와이퍼와 장방형의 닦개형 와이퍼가 주로 사용되며, 본 발명은 특히 장방형의 닦개형 와이퍼에 관계하는 것이다.Such a clean room wiper is mainly used a roll-type wiper and a rectangular wiper wiper of the shape wound around the wiper of a certain width, the present invention relates to a rectangular wiper wiper in particular.
상기 닦개형 와이퍼는 폭이 넓고 길이가 긴 와이퍼원단을 일정폭으로 자른 다음 일정폭으로 가공된 와이퍼원단을 다시 일정길이로 잘라 장방형으로 만들게 되는 것이 보통이며, 절단과정 등에서 외표면에 부착된 먼지 등을 제거하기 위해 절단작업후에 와이퍼를 세탁한 후 포장하게 된다.The wiper-type wiper generally cuts the wide and long wiper fabric to a certain width, and then cuts the wiper fabric processed to a certain length to a certain length to form a rectangular shape. The wiper is washed and then packaged after cutting to remove the pressure.
그런데 종래에 있어서는 절단작업 후에 와이퍼 표면에 부착된 먼지를 제거하는 작업을 하지 않은 채 곧바로 와이퍼를 세척하였기 때문에 와이퍼 표면으로부터 먼지를 완벽하게 제거할 수 없게 되고, 그에 따라 고품질의 와이퍼를 생산할 수 없게 되는 문제가 있었다.However, in the related art, since the wiper was immediately washed without removing dust attached to the surface of the wiper after cutting, the dust could not be completely removed from the surface of the wiper, and thus, high-quality wipers could not be produced. There was a problem.
본 발명은 상기 종래의 실정을 감안하여 안출한 것이며, 그 목적이 절단작업을 마친 와이퍼를 세척하기 전에 그 표면에 부착된 먼지를 제거할 수 있도록 하는 것에 의해 고품질의 와이퍼를 생산할 수 있도록 하는 크린룸용 와이퍼의 먼지제거장치를 제공하는 데에 있는 것이다.The present invention has been made in view of the above-mentioned conventional situation, and the purpose of the clean room for producing a high quality wiper by making it possible to remove the dust attached to the surface before washing the wiper after the cutting operation It is to provide a wiper dust removal device.
도 1은 본 발명의 한 실시예의 사시도1 is a perspective view of one embodiment of the present invention
도 2는 동 실시예의 요부 종단면도2 is a longitudinal sectional view showing main parts of the embodiment;
<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>
10 : 와이퍼 건조장치11 : 케이싱10: wiper drying device 11: casing
12 : 회전개폐도아13 : 회전드럼12: rotation opening and closing door 13: rotating drum
13a : 통기공14 : 청정공기 주입구13a: vent 14: clean air inlet
15 : 오염공기 배출구16 : 송풍팬15: polluted air outlet 16: blower fan
17 : 필터18 : 배기팬17 filter 18 exhaust fan
W : 와이퍼W: Wiper
본 발명은 상기의 목적을 달성하기 위하여 전면에 회전개폐도아가 마련되는 케이싱의 내부에 회전드럼을 설치하고, 회전드럼의 내상부 일측에 청정공기를 주입할 수 있도록 하는 청정공기 주입구를 마련하는 동시에 회전드럼의 내하부 일측에 먼지가 포함된 오염공기를 배출하도록 하는 오염공기 배출구를 마련하는 것을 특징으로 하며, 이하 그 구체적인 기술내용을 첨부도면에 의거하여 더욱 자세히 설명하면 다음과 같다.The present invention provides a clean air inlet for installing a rotating drum inside the casing is provided with a rotary opening and closing door to the front, and injecting clean air to one side of the inner upper portion of the rotating drum to achieve the above object. Characterized by providing a contaminated air outlet for discharging the contaminated air containing dust on the inner lower side of the rotating drum, the following detailed description of the technical details according to the accompanying drawings.
즉, 도 1에는 본 발명의 한 실시예의 사시도가 도시되어 있고, 도 2에는 동 실시예의 요부 종단면도가 도시되어 있는 바, 본 발명은 절단작업이 완료된 와이퍼(W)의 표면에 부착된 먼지 등을 제거할 수 있도록 하는 크린룸용 와이퍼의 먼지제거장치(10)를 구성함에 있어서, 전면에 회전개폐도아(12)가 마련되는 케이싱(11)의 내부에 다수의 통기공(13a)이 외주면에 형성된 회전드럼(13)을 설치하고, 케이싱(11)의 내상부 일측에 청정공기를 주입할 수 있도록 하는 청정공기 주입구(14)를 마련하는 동시에 케이싱(11)의 내하부 일측에 먼지가 포함된 오염공기를 배출하도록 하는 오염공기 배출구(15)를 마련하여서 되는 것이다.That is, Figure 1 is a perspective view of one embodiment of the present invention, Figure 2 is a longitudinal cross-sectional view of the main part of the embodiment, the present invention is a dust, etc. attached to the surface of the wiper (W) is a cutting operation is completed In constructing the dust removal device 10 of the clean room wiper to remove the, a plurality of vent holes (13a) formed on the outer circumferential surface of the casing 11 is provided with a rotary opening and closing door 12 on the front The rotary drum 13 is installed, and the clean air inlet 14 for injecting clean air into one side of the inner upper portion of the casing 11 is provided with contamination containing dust on one side of the inner lower portion of the casing 11. It is to provide a polluted air outlet 15 to discharge the air.
본 발명에 있어서 청정공기 주입구(14)에는 송풍팬(16)과 다수의 필터(17)가설치되고, 오염공기 배출구(15)에는 배기팬(18)이 설치된다.In the present invention, the blower fan 16 and the plurality of filters 17 are provided in the clean air inlet 14, and the exhaust fan 18 is provided in the polluted air outlet 15.
상기와 같이 구성된 본 발명에 있어서는 케이싱(11) 전면의 회전개폐도아(12)를 열고 절단작업이 완료된 와이퍼(W)를 회전드럼(13)에 투입한 후 회전개폐도아(12)를 닫고, 회전드럼(13)의 구동모터(미도시)와 청정공기 주입구(14)의 송풍팬(16)과 오염공기 배출구(15)의 배기팬(18)을 동시에 작동시키게 되면 회전드럼(13)의 회전으로 와이퍼(W)의 표면에 부착된 먼지가 떨어지게 되고 청정공기 주입구(14)를 통해 공급되는 청정공기가 통기공(13a)이 형성된 회전드럼(13)의 내부로 진입하게 되어 회전드럼(13) 내부에서 먼지가 부유되며, 부유되는 먼지와 공기는 배기팬(18)이 설치된 오염공기 배출구(15)를 통해 외부로 배출되므로 와이퍼(W)의 표면에 부착된 먼지의 대부분을 제거할 수 있게 된다.In the present invention configured as described above, the rotary opening and closing door 12 on the front of the casing 11 is opened, and after the cutting operation is completed, the wiper W is inserted into the rotating drum 13, and the rotary opening and closing door 12 is closed and rotated. When the driving motor (not shown) of the drum 13 and the blowing fan 16 of the clean air inlet 14 and the exhaust fan 18 of the polluted air outlet 15 are operated at the same time, the rotation of the rotating drum 13 The dust attached to the surface of the wiper (W) falls and the clean air supplied through the clean air inlet (14) enters the inside of the rotating drum (13) formed with the ventilation hole (13a) inside the rotating drum (13) In the dust is suspended, the suspended dust and air is discharged to the outside through the polluted air outlet 15 is installed exhaust fan 18 can remove most of the dust attached to the surface of the wiper (W).
본 발명의 먼지제거장치(10)를 통하여 절단과정 등에서 와이퍼(W)의 표면에 부착된 먼지의 대부분을 제거한 후 와이퍼(W)를 세탁하게 되면 보다 간편하고도 신속하게 세탁을 마칠 수 있게 되어 세탁효율을 크게 향상시킬 수 있게 된다.When the wiper (W) is washed after removing most of the dust attached to the surface of the wiper (W) in the cutting process and the like through the dust removing apparatus 10 of the present invention, the laundry can be finished more simply and quickly. Efficiency can be greatly improved.
이상에서와 같이 본 발명은 다수의 통기공(13a)이 마련된 회전드럼(13)이 내장된 케이싱(11)의 내상부로부터 청정공기를 공급하는 청정공기 주입구(14)를 마련하고 케이싱(11)의 내하부 일측에서 오염공기를 배출할 수 있도록 하는 오염공기 배출구(15)를 마련한 것으로, 본 발명에 의하면 절단작업을 완료한 와이퍼(W)를 세탁하기 전에 그 표면에 부착된 먼지의 대부분을 제거할 수 있게 되므로 세탁효율을크게 향상시킬 수 있게 됨은 물론 보다 고품질의 와이퍼를 제작할 수 있게 되는 등의 효과를 얻을 수 있게 된다.As described above, the present invention provides a clean air inlet 14 for supplying clean air from the inner upper portion of the casing 11 in which the rotating drum 13 provided with a plurality of vent holes 13a is provided, and the casing 11. In order to discharge the polluted air from the lower part of the inner side of the polluted air outlet 15 is provided, according to the present invention removes most of the dust attached to the surface before washing the wiper (W) completed the cutting operation Since it is possible to greatly improve the washing efficiency, it is possible to obtain the effect of being able to produce a higher-quality wiper.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2002-0079695A KR100481294B1 (en) | 2002-12-13 | 2002-12-13 | a particle excluding apparatus of a cleanroom wiper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2002-0079695A KR100481294B1 (en) | 2002-12-13 | 2002-12-13 | a particle excluding apparatus of a cleanroom wiper |
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| Publication Number | Publication Date |
|---|---|
| KR20040051982A true KR20040051982A (en) | 2004-06-19 |
| KR100481294B1 KR100481294B1 (en) | 2005-04-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-2002-0079695A KR100481294B1 (en) | 2002-12-13 | 2002-12-13 | a particle excluding apparatus of a cleanroom wiper |
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| KR (1) | KR100481294B1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100613584B1 (en) * | 2004-10-13 | 2006-08-17 | 동부일렉트로닉스 주식회사 | Method for measuring the degree of contamination using wiper |
| CN106540942A (en) * | 2015-09-17 | 2017-03-29 | 李海栓 | Powder recovering device |
| CN108279203A (en) * | 2018-04-25 | 2018-07-13 | 龙钜超洁净科技（苏州）有限公司 | A kind of non-dust cloth bulky grain detection device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100976987B1 (en) | 2010-01-07 | 2010-08-19 | 주식회사 올루 | Instrument for testing particulate contamination of cleanroom supplies |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3035018B2 (en) * | 1991-08-20 | 2000-04-17 | 彰 水野 | Clean room air purification method |
| JPH0783471A (en) * | 1993-09-14 | 1995-03-28 | Nippon Sanso Kk | Method and equipment for discharging exhaust gas in clean room |
| JP2001141274A (en) * | 1999-11-12 | 2001-05-25 | Daikin Ind Ltd | Clean room |
| KR200247348Y1 (en) * | 2001-06-05 | 2001-10-29 | 주식회사 한국이엔씨 | Device for blowing and filtering air into a clean room |
-
2002
- 2002-12-13 KR KR10-2002-0079695A patent/KR100481294B1/en active IP Right Grant
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100613584B1 (en) * | 2004-10-13 | 2006-08-17 | 동부일렉트로닉스 주식회사 | Method for measuring the degree of contamination using wiper |
| CN106540942A (en) * | 2015-09-17 | 2017-03-29 | 李海栓 | Powder recovering device |
| CN108279203A (en) * | 2018-04-25 | 2018-07-13 | 龙钜超洁净科技（苏州）有限公司 | A kind of non-dust cloth bulky grain detection device |
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| Publication number | Publication date |
|---|---|
| KR100481294B1 (en) | 2005-04-07 |
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