KR20040008878A - Vaccum Gate Valve - Google Patents

Vaccum Gate Valve Download PDF

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Publication number
KR20040008878A
KR20040008878A KR1020020042607A KR20020042607A KR20040008878A KR 20040008878 A KR20040008878 A KR 20040008878A KR 1020020042607 A KR1020020042607 A KR 1020020042607A KR 20020042607 A KR20020042607 A KR 20020042607A KR 20040008878 A KR20040008878 A KR 20040008878A
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KR
South Korea
Prior art keywords
pneumatic
valve body
valve
guide
bellows
Prior art date
Application number
KR1020020042607A
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Korean (ko)
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KR100489553B1 (en
Inventor
박웅기
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박웅기
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Application filed by 박웅기 filed Critical 박웅기
Priority to KR10-2002-0042607A priority Critical patent/KR100489553B1/en
Priority to PCT/KR2003/001286 priority patent/WO2004010035A1/en
Priority to AU2003245081A priority patent/AU2003245081A1/en
Publication of KR20040008878A publication Critical patent/KR20040008878A/en
Application granted granted Critical
Publication of KR100489553B1 publication Critical patent/KR100489553B1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3268—Mounting of sealing rings

Abstract

PURPOSE: A plurality of bellows units is provided as a pressing member to a valve body to improve sealing between a passage and a valve body in a valve housing. CONSTITUTION: In a vacuum gate valve, a plurality of bellows(40) is installed in rear part of a valve body(2). A hydraulic pressure applying member(5) is installed in the other end of the bellows. An up and down guide member(6) to guide an up and down of the valve body is interacted with a lifting member(3). A horizontal guide member is installed in the valve body and the hydraulic pressure applying member.

Description

진공 게이트밸브{Vaccum Gate Valve}Vacuum Gate Valve

본 발명은 진공 게이트밸브에 관한 것으로 특히, 4각의 통로와 이와 대응되는 4각의 밸브체를 구비한 게이트밸브에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum gate valve, and more particularly, to a gate valve having a four angle passage and a corresponding four angle valve body.

일반적으로 진공 게이트밸브는 작업환경이 진공을 요하는 경우에 통로의 개폐작동을 위하여 사용되는 것인데, 이러한 게이트밸브를 중심으로 좌,우측에 형성된 서로 압력이 다른 형태의 작업환경이 필요한 경우에 이러한 불균등 상태에서의 진공압하에서 작업이 이루어지도록 하기 위하여 사용되는 것이다.In general, the vacuum gate valve is used for opening and closing the passage when the working environment requires a vacuum, and this unevenness is required when the working environment having different pressures formed on the left and right sides of the gate valve is required. It is used to make the work under vacuum under the condition.

그런데, 이와 같이 사용되고 있는 게이트밸브중 4각의 밸브체를 갖춘 게이트밸브의 경우, 밸브체의 승하강 작동이나 가압 전후진 작동이 원활하지 못하고, 밸브를 이루는 전체적인 구조가 복잡한 문제점이 있으며, 특히, 밸브하우징에 형성된 통로와 밸브체와의 사이에 기밀을 유지시키기 위한 작동구조상 취약점이 있어 밀폐유지효과가 일정하거나 고르지 못하여 작동불량률이 높아지는 원인이 되고 있으나, 이를 개선할 만한 별도의 수단이 강구되지 못하고 있는 실정인 것이다.However, in the case of the gate valve having a four-angle valve element among the gate valves used in this way, the lifting and lowering operation of the valve body and the pressurizing forward and backward operation are not smooth, and there is a problem that the overall structure of the valve is complicated. There is a weakness in the operation structure to maintain the airtightness between the passage formed in the valve housing and the valve body, so that the sealing maintenance effect is constant or uneven, which causes the failure rate to increase. There is a situation.

즉, 밸브하우징에 형성된 통로와 밸브체와의 사이에 기밀을 유지시키기 위한 작동수단이 밸브체의 승,하강시 함께 가압 또는 가압의 해제 작동이 이루어지도록 하는 기구적인 메카니즘을 밸브하우징의 내측에 형성하여 작동이 이루어지도록 하고 있으나, 밸브체에 설치된 오링의 전부위에 걸쳐 고르게 가압력이 전달되는 것이아니라 일측으로 편중된 상태로 작동이 이루어지게 되므로, 기밀유지체의 역할을 담당하는 오링의 기밀유지효과가 부분적으로 약화되면서 작동상 불량률이 높아지는 문제점으로 부각되고 있는 것이다.That is, an actuating means for maintaining airtightness between the passage formed in the valve housing and the valve body forms a mechanical mechanism inside the valve housing so that pressurization or release of pressurization is performed together with the valve body when the valve body is raised or lowered. It is to be operated, but the pressure is not evenly transmitted over the whole of the O-ring installed in the valve body, the operation is carried out in a biased state to one side, the O-ring acting as the airtight retaining effect As it is partially weakened, the operation defect rate is increasing.

본 발명은 전술한 종래의 문제점을 근본적으로 해소하기 위하여 연구 개발된것으로 다음과 같은 목적을 가지고 있다.The present invention has been researched and developed to fundamentally solve the above-mentioned conventional problems, and has the following objectives.

본 발명의 주목적은 밸브하우징에 형성된 통로와 밸브체사이에 기밀유지가 보다 균일하고 확실하게 이루어지도록 하기 위하여 기존과는 달리 밸브체의 가압수단을 복수개의 벨로우즈유니트로 이루어지는 벨로우즈 타입으로 구성한 게이트밸브를 제공하고자 하는데 있다.The main object of the present invention is to provide a more uniform and reliable airtightness between the passage formed in the valve housing and the valve body, unlike the conventional one, a gate valve comprising a bellows type consisting of a plurality of bellows unit pressurizing means of the valve body. It is to provide.

본 발명의 다른 목적은 밸브체를 승하강시키는 승하강기구나 밸브체를 가압하는 가압기구를 기존과는 다른 형태의 가이드기구에 의하여 보다 확실한 가이드가 이루어져 보다 정교한 작동이 이루어져 작동신뢰도를 보다 향상시킬수 있도록 하고자 하는데 있다.Another object of the present invention is to provide a more precise guide by a guide mechanism of a different type than the conventional lifting mechanism for raising and lowering the valve body and the pressure mechanism for pressurizing the valve body so that more precise operation can be made to further improve the operation reliability I want to.

도1은 본 발명인 밸브의 조립상태 단면도,1 is a cross-sectional view of the assembly state of the present inventors valve,

도2는 도1의 Ⅱ-Ⅱ선 단면도,2 is a cross-sectional view taken along the line II-II of FIG. 1;

도3은 도2의 Ⅲ-Ⅲ선 단면도,3 is a cross-sectional view taken along line III-III of FIG. 2;

도4는 본 발명의 변형례로서 공압전달기구를 가이드로드에 형성한 예를 도1의 Ⅳ-Ⅳ선 형태로 대응되게 보여주는 종단면도,FIG. 4 is a longitudinal sectional view showing an example of forming a pneumatic transfer mechanism on a guide rod as a modified example of the present invention in line IV-IV of FIG. 1; FIG.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>

1:밸브하우징, 2:밸브체,1: valve housing, 2: valve body,

3:승하강기구, 4:가압기구,3: lifting mechanism, 4: pressure mechanism,

5:공압전달기구, 6:상하가이드기구,5: pneumatic conveying mechanism, 6: upper and lower guide mechanism,

7:수평가이드기구, 10:통로,7: number evaluation guide mechanism, 10: passage,

30:공압실린더, 32:피스톤로드,30: pneumatic cylinder, 32: piston rod,

40:벨로우즈유니트40: Bellows unit

본 발명은 전술한 목적들을 달성하기 위하여, 밸브하우징의 내부에서 밸브체가 승하강기구에 의하여 승하강이 이루어지고, 상기 밸브체는 가압기구에 의하여 상기 밸브하우징에 형성된 통로의 개폐가 가능하게 이루어지는 통상의 진공 게이트밸브에 있어서, 상기 밸브체의 후부에는 상기 가압기구로서 팽창 및 수축에 의하여 변위가 가능한 다수의 벨로우즈유니트가 설치되고, 상기 다수의 벨로우즈유니트의 다른 일측에는 공압전달기구를 설치하며, 상,하가이드기구는 상기 공압전달기구의 일부와 상기 가압기구를 포함하여 승하강 작동이 이루어지는 승하강기구와 연동되도록 가이드로드 형태로 설치되어지고, 상기 밸브체를 수평 방향으로 가이드하는 수평가이드기구를 밸브체와 상기 공압전달기구에 마련하여 이루어지는 진공 게이트밸브를 제공한다.In order to achieve the above object, the present invention, the valve body is raised and lowered by the elevating mechanism in the interior of the valve housing, the valve body is usually made to open and close the passage formed in the valve housing by the pressure mechanism. In the vacuum gate valve of the valve body, a plurality of bellows units which are displaceable by expansion and contraction as the pressurization mechanism are installed at the rear of the valve body, and on the other side of the plurality of bellows units, a pneumatic transfer mechanism is provided. The lower guide mechanism includes a part of the pneumatic transmission mechanism and the pressurizing mechanism, and is installed in the form of a guide rod so as to be interlocked with the lifting mechanism that moves up and down, and a horizontal guide mechanism for guiding the valve body in a horizontal direction. The vacuum gate valve provided in the valve body and the pneumatic transmission mechanism is provided. The.

또한, 상기 공압전달기구는 내부에 공급통로를 갖고 상기 벨로우즈유니트와 각각 내부가 연통되도록 상호간 고정 설치되는 공압전달블록과 상기 공압전달블록과 연결 설치되어 외부의 공압공급라인과 연결 설치되는 공급통로를 갖는 공압연결체의 결합된 형태로 이루어지되, 상기 공압연결체가 상기 승하강기구인 공압실린더의 피스톤로드를 길게 연장 형성하고 상기 피스톤로드의 내부에 공급통로를 형성하여 이루어지는 진공 게이트밸브를 제공한다.In addition, the pneumatic delivery mechanism has a supply passage therein and is connected to the pneumatic transfer block and the pneumatic transfer block which is installed fixed to each other so that the inside and the bellows unit is in communication with each other, the supply passage is installed connected to the external pneumatic supply line It is made of a combined form of the pneumatic connector having, the pneumatic connector provides a vacuum gate valve formed by extending the piston rod of the pneumatic cylinder which is the lifting mechanism and forming a supply passage in the piston rod.

또한, 상기 상하가이드기구는 가이드로드 형태로 이루어지고 상기 공압연결체가 상기 가이드로드의 내측에 공급통로를 형성하고, 상기 수평가이드기구는 상기 밸브체의 하부가 상기 공압전달블록의 수평가이드판을 타고 슬라이드 이동이 가능하게 마련하여 이루어지는 진공 게이트밸브가 제공된다.In addition, the upper and lower guide mechanism is formed in the form of a guide rod and the pneumatic connecting member forms a supply passage in the inner side of the guide rod, the horizontal guide mechanism is the lower portion of the valve body rides on the horizontal guide plate of the pneumatic transfer block Provided is a vacuum gate valve provided to enable slide movement.

이하, 첨부된 도면에 의하여 본 발명의 바람직한 실시예를 나누어 보다 상세히 살펴보기로 한다.Hereinafter, the preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

본 발명은 도1 내지 도4에 도시한 바와 같이, 공통적으로 밸브하우징(1)의 내부에서 밸브체(2)가 승하강기구(3)에 의하여 승,하강이 이루어지고, 상기 밸브체(2)는 가압기구(4)에 의하여 상기 밸브하우징(1)에 형성된 통로(10)의 개폐가 가능하게 이루어지는 통상의 진공 게이트밸브에 있어서, 상기 밸브체(2)의 후부에는 상기 가압기구(4)로서 팽창 및 수축에 의하여 변위가 가능한 다수의 벨로우즈유니트(40)가 설치되고, 상기 다수의 벨로우즈유니트(40)의 다른 일측에는 공압전달기구(5)를 설치하며, 상기 밸브체(2)의 승하강시 가이드 역할을 수행하는 상,하가이드기구(6)는 상기 공압전달기구(5)의 일부와 상기 가압기구(4)를 포함하여 승하강 작동이 이루어지는 승하강기구(3)와 연동되도록 가이드로드(60) 형태로 설치되어지고, 상기 밸브체(2)를 수평 방향으로 가이드하는 수평가이드기구(7)를 밸브체(2)와 상기 공압전달기구(5)에 마련하여 이루어지게 된다.In the present invention, as shown in Figs. 1 to 4, the valve body 2 is raised and lowered by the lifting mechanism 3 in the valve housing 1 in common, and the valve body 2 In the conventional vacuum gate valve which can open and close the passage 10 formed in the valve housing 1 by the pressurizing mechanism 4, the pressurizing mechanism 4 is attached to the rear part of the valve body 2. As a plurality of bellows unit 40 that can be displaced by expansion and contraction is installed, and the other side of the plurality of bellows unit 40 is provided with a pneumatic transmission mechanism 5, the lifting and lowering of the valve body (2) The upper and lower guide mechanisms 6, which serve as the guided guides, include a part of the pneumatic transmission mechanism 5 and the pressurizing mechanisms 4 to guide and interlock with the lifting mechanisms 3 for lifting and lowering operation. It is provided in the form of (60), and the said valve body 2 in a horizontal direction A horizontal guide mechanism 7 for guiding is provided on the valve body 2 and the pneumatic transmission mechanism 5.

이때, 상기 공압전달기구(5)는 내부에 공급통로(51)를 갖고 상기 벨로우즈유니트(40)와 각각 내부가 연통되도록 상호간 고정 설치되는 공압전달블록(50)과 상기 공압전달블록(50)과 연결 설치되어 외부의 공압공급라인(54)과 연결 설치되는 공급통로(53)를 갖는 공압연결체(52)의 결합된 형태로 이루어지되, 상기 공압연결체(52)가 상기 승하강기구(3)인 공압실린더(30)의 피스톤로드(32)를 길게 연장 형성하고 상기 피스톤로드(32)의 내부에 공급통로(53)를 형성하여 이루어질수 있으며, 상기 공압공급라인(54)엔 공급통로(53)로 공압을 제공하거나 공급통로(53)의 내부 공압을 제거 개방하여 대기압 상태를 유지하도록 하기 위한 제어밸브(56)를 설치하게 된다.At this time, the pneumatic delivery mechanism 5 has a supply passage 51 therein and the pneumatic delivery block 50 and the pneumatic delivery block 50 are fixed to each other so as to communicate with the bellows unit 40 inside each; It is made of a combined form of the pneumatic connector 52 having a supply passage 53 connected to and installed to be connected to the external pneumatic supply line 54, the pneumatic connector 52 is the lifting mechanism (3) The piston rod 32 of the pneumatic cylinder (30) is formed to extend and the supply passage 53 is formed in the interior of the piston rod 32, the pneumatic supply line 54, the supply passage 53 The control valve 56 is provided to maintain the atmospheric pressure by providing pneumatic pressure or by removing the internal pneumatic pressure of the supply passage (53).

물론, 상기 상하가이드기구(6)는 가이드로드(60) 형태로 이루어지고 도4에 예시한 바와 같이 상기 공압연결체(52)가 상기 가이드로드(60)의 내측에 공급통로(53)를 형성하고, 상기 수평가이드기구(7)는 상기 밸브체(2)의 하부가 상기 공압전달블록(50)의 수평가이드판(70)을 타고 슬라이드 이동이 가능하게 마련하여 이루어지도록 구성할 수도 있다.Of course, the upper and lower guide mechanism 6 is formed in the form of a guide rod 60 and the pneumatic connector 52 forms a supply passage 53 inside the guide rod 60 as illustrated in FIG. 4. In addition, the horizontal guide mechanism 7 may be configured such that the lower portion of the valve body 2 is provided to allow the slide movement by riding the horizontal guide plate 70 of the pneumatic transfer block 50.

물론, 이때 밸브하우징(1)의 내측에 위치하고 밸브체(2)와 공압전달블록(50)의 사이로서 상기 피스톤로드(32)와 상기가이드로드(60)를 외부에서 감싼 상태로 벨로우즈 형태의 신축이 가능한 기밀유지부재(8)를 각각 설치하여 밸브하우징(1)내부의 기밀유지가 보다 완벽하게 구성함이 바람직하다.Of course, at this time, located inside the valve housing (1) between the valve body 2 and the pneumatic transfer block 50 in the bellows-type expansion and contraction in the state wrapped around the piston rod 32 and the guide rod 60 from the outside It is preferable that the airtight holding inside the valve housing 1 is configured more completely by installing each of the possible airtight holding members 8.

미설명 부호로서 20은 밸브체(2)에 설치되는 오링을 나타낸다.As reference numeral 20, an O-ring provided in the valve body 2 is shown.

다음은 전술한 바와 같이 이루어지는 본 발명인 진공 게이트밸브의 작동과정을 살펴보기로 한다.Next will be described the operation of the vacuum gate valve of the present invention made as described above.

본 발명인 진공 게이트밸브를 설치하여 사용하고자 하는 부위에 설치하고 사용하게 되면, 통로(10)를 폐쇄시켜 밸브를 닫아 놓는 상태와 반대로 상기 통로(10)를 열어 개방시키는 경우를 각각 나누어 살펴보면 다음과 같다.When the vacuum gate valve of the present invention is installed and used in a portion to be used, the case of opening and opening the passage 10 as opposed to a state in which the passage is closed by closing the passage 10 is as follows. .

우선, 밸브하우징(1)에 형성한 통로(10)를 닫아 밀폐시키고자 하는 경우엔 가압기구(4)엔 공압을 전달하지 아니한 비가압상태를 유지하고 승하강기구(3)인 공압실린더(30)를 작동시켜 내부의 피스톤로드(32)가 상승하면서 밸브체(2)가 상하가이드기구(6)인 가이드로드(60)에 의하여 정확하게 위치를 자리잡으면서 상기 통로(10)의 대향된 위치로 위치이동이 이루어지도록 한 다음, 제어밸브(56)를 조작하여 공압전달기구(5)에 있어서, 공압공급라인(54)중에 대기중이던 공압을 공압연결체(52)의 공급통로(53) 및 공압전달블록(50)의 공급통로(51)를 거쳐 가압기구(4)인 복수개의 벨로우즈유니트(40) 각각에게 동시에 공급이 이루어지도록 한다.First, in the case where the passage 10 formed in the valve housing 1 is to be closed and closed, the pressure mechanism 4 maintains a non-pressurized state in which no air pressure is transmitted, and the pneumatic cylinder 30 which is the lifting mechanism 3 is closed. To the opposite position of the passage (10) while the piston rod (32) is raised and the valve element (2) is accurately positioned by the guide rod (60), which is a vertical guide mechanism (6). After the movement of the position is performed, the control valve 56 is operated to provide the pneumatic pressure in the pneumatic supply line 54 with the supply passage 53 and the pneumatic pressure of the pneumatic connector 52. Through the supply passage 51 of the transfer block 50 is to be simultaneously supplied to each of the plurality of bellows unit 40, which is the pressure mechanism (4).

그리하면, 상기 공압전달기구(5)중 공압전달블록(50)은 제자리에서 움직이지 아니하는 고정위치 상태에서 복수개의 벨로우즈유니트(40)는 동시에 팽창되면서 밸브체(2)는 전진하되, 수평가이드기구(7)인 수평가이드판(70)의 상부로 상기 밸브체(2)가 미끄러지듯이 슬라이드 이동하면서 정확한 위치이동이 동시에 이루어지게 되고, 상기 밸브체(2)의 선단에 미리 설치되어진 오링(20)은 밸브하우징(1)의내측으로서 통로(10)의 외주연을 밀폐상태로 가압작동을 수행하게 되며, 밸브체(2)에 의한 통로(10)의 밀폐에 의하여 밸브를 닫는 작동이 이루어지게 된다.Then, the pneumatic transfer block 50 of the pneumatic transfer mechanism (5) in the fixed position state that does not move in place while the plurality of bellows unit 40 is expanded at the same time while the valve body (2) is advanced, the horizontal guide While the valve body 2 slides as if the valve body 2 slides to the upper portion of the horizontal guide plate 70, which is a mechanism 7, the O-ring 20 is installed in advance at the tip of the valve body 2. In the inside of the valve housing (1), the outer circumference of the passage (10) performs a pressurized operation in a sealed state, and the operation of closing the valve by the sealing of the passage (10) by the valve body (2) is made. do.

물론, 이때, 밸브체(2)의 상승 이동과정에서는 상하가이드기구(6)에 의하여 정확한 위치의 설정 작동이 이루어지게 되고, 수평 가압과정에 있어서는 수평가이드기구(7)에 의한 정확한 수평 위치이동이 가능하게 되고, 더우기 가압기구(4)인 복수개의 벨로우즈유니트(40)에 상기 공압전달기구(5)에 의하여 공압이 전달되는 경우 동시에 작동이 이루어지되, 벨로우즈유니트(4))의 특성상 밸브체(2)의 후부에서 전체 부위에 걸쳐 고른 가압력이 정확하게 전달되게 되므로 오링(20)에 전달되는 가압력도 어느 부위에서나 동일하고도 균일하게 전달되어 아주 정확하게 기밀유지가 가능하게 되는 것이다.Of course, at this time, in the ascending movement of the valve body 2, the setting operation of the correct position is made by the up and down guide mechanism 6, and in the horizontal pressurization process, the accurate horizontal position movement by the horizontal guide mechanism 7 is performed. When the pneumatic pressure is transmitted to the plurality of bellows units 40, which are pressurizing mechanisms 4, by means of the pneumatic transfer mechanism 5, the operation is performed at the same time, and in view of the characteristics of the bellows unit 4, Since the pressing force is evenly transmitted over the entire part at the rear part of 2), the pressing force transmitted to the O-ring 20 is also transmitted uniformly and uniformly at any part so that the airtightness can be maintained very accurately.

다음, 밸브체(2)를 원위치시켜 밸브를 개방시키고자 하는 경우엔 우선 제어밸브(56)를 조작하여 공압공급라인(54)을 개방시키게 되면 복수개의 벨로우즈유니트(40)에 가하여지던 공압이 해제되어 벨로우즈유니트(40)는 수평가이드기구(7)인 수평가이드판(70)을 타고 원위치로 후진하게 되고, 이와 같이 후진한 상태에서 승하강기구(3)인 공압실린더(30)를 작동시켜 피스톤로드(32)를 하강시키면 밸브체(2)를 포함하여 가압기구(4) 및 공압전달기구(5)도 함께 상하가이드기구(6)인 가이드로드(6)를 타고 원위치로 하강하여 다음의 작동을 위한 대기상태로 위치하게 되고 결국, 밸브의 개방작동은 완료되게 된다.Next, in order to open the valve by returning the valve body 2, first, when the pneumatic supply line 54 is opened by operating the control valve 56, the air pressure applied to the plurality of bellows units 40 is released. The bellows unit 40 is then moved back to its original position by taking the horizontal guide plate 70, which is the horizontal guide mechanism 7, and operating the pneumatic cylinder 30, which is the lifting mechanism 3, in the reversed state. When the rod 32 is lowered, the pressure mechanism 4 and the pneumatic transmission mechanism 5 together with the valve body 2 are also lowered to their original positions by the guide rod 6, which is the upper and lower guide mechanisms 6, and then operates. It is placed in the standby state for the valve, and eventually the opening operation of the valve is completed.

물론, 이와 같이 통로(10)를 개폐시키는 과정에서 밸브하우징(1)과 같은 고정부(固定部)와 피스톤로드(32)나 가이드로드(60)와 같은 가동부(可動部)사이에서의 기밀유지는 밸브하우징(1)의 내부에위치하게 되는 기밀유지부재(8)에 의하여 보다 완벽하게 이루어지게 된다.Of course, in the process of opening and closing the passage 10 in this manner, the airtightness is maintained between the fixed part such as the valve housing 1 and the movable part such as the piston rod 32 or the guide rod 60. Is more completely made by the hermetic holding member (8) which is located inside the valve housing (1).

이상 살펴본 바와 같이, 본 발명인 진공 게이트밸브는 기존과는 달리 밸브체(2)의 가압기구(4)를 함께 연동이 이루어지는 복수개의 벨로우즈유니트(40)로 구성하여 밸브하우징(1)에 형성된 통로(10)와 밸브체(2)사이에 기밀유지가 보다 균일하고 확실하게 이루어지고 밸브체(2)를 승하강시키는 승하강기구(3)나 밸브체를 가압하는 가압기구(4)를 기존과는 다른 형태의 상하가이드기구(7)나 수평가이드기구(7)에 의하여 보다 확실한 가이드가 이루어져 보다 정교한 작동이 이루어지게 되며 작동신뢰도를 보다 향상시킬 수 있는 등의 우수한 효과를 갖는다.As described above, the vacuum gate valve according to the present invention, unlike the conventional method, is formed of a plurality of bellows units 40 in which the pressurizing mechanism 4 of the valve body 2 is interlocked together and formed in the valve housing 1. The airtight holding is more uniformly and reliably between 10) and the valve body 2, and the lifting mechanism 3 for raising and lowering the valve body 2 and the pressurizing mechanism 4 for pressurizing the valve body are different. The upper and lower guide mechanism 7 or the horizontal guide mechanism 7 of the other forms a more reliable guide is made more precise operation and has an excellent effect, such as to improve the operation reliability more.

Claims (4)

밸브하우징(1)의 내부에서 밸브체(2)가 승하강기구(3)에 의하여 승,하강이 이루어지고, 상기 밸브체(2)는 가압기구(4)에 의하여 상기 밸브하우징(1)에 형성된 통로(10)의 개폐가 가능하게 이루어지는 통상의 진공 게이트밸브에 있어서,In the valve housing 1, the valve body 2 is moved up and down by the lifting mechanism 3, and the valve body 2 is connected to the valve housing 1 by the pressure mechanism 4. In the normal vacuum gate valve which can open and close the formed passage 10, 상기 밸브체(2)의 후부에는 상기 가압기구(4)로서 팽창 및 수축에 의하여 변위가 가능한 다수의 벨로우즈유니트(40)가 설치되고,On the rear of the valve body 2, a plurality of bellows units 40 which are displaceable by expansion and contraction as the pressing mechanism 4 are provided. 상기 다수의 벨로우즈유니트(40)의 다른 일측에는 공압전달기구(5)를 설치하며,On the other side of the plurality of bellows unit 40 is installed a pneumatic transmission mechanism (5), 상기 밸브체(2)의 승하강시 가이드 역할을 수행하는 상,하가이드기구(6)는 상기 공압전달기구(5)의 일부와 상기 가압기구(4)를 포함하여 승하강 작동이 이루어지는 승하강기구(3)와 연동되도록 가이드로드(60) 형태로 설치되어지고,The upper and lower guide mechanisms 6, which serve as guides when the valve body 2 moves up and down, include a part of the pneumatic transmission mechanism 5 and the lifting mechanism 4 to move up and down. (3) is installed in the form of a guide rod 60 to be interlocked, 상기 밸브체(2)를 수평 방향으로 가이드하는 수평가이드기구(7)를 밸브체(2)와 상기 공압전달기구(5)에 마련하여 이루어지는 것을 특징으로 하는 진공 게이트밸브.And a horizontal guide mechanism (7) for guiding the valve body (2) in the horizontal direction to the valve body (2) and the pneumatic transmission mechanism (5). 제1항에 있어서,The method of claim 1, 상기 공압전달기구(5)는 내부에 공급통로(51)를 갖고 상기 벨로우즈유니트(40)와 각각 내부가 연통되도록 상호간 고정 설치되는 공압전달블록(50)과;The pneumatic delivery mechanism (5) has a supply passage 51 therein and a pneumatic delivery block (50) which is fixed to each other so as to communicate with the bellows unit (40) inside; 상기 공압전달블록(50)과 연결 설치되어 외부의 공압공급라인(54)과 연결 설치되는 공급통로(53)를 갖는 공압연결체(52)의 결합된 형태로 이루어지되,Is connected to the pneumatic transfer block 50 is made of a combined form of the pneumatic connector 52 having a supply passage 53 which is connected to the pneumatic supply line 54 is installed, 상기 공압연결체(52)가 상기 승하강기구(3)인 공압실린더(30)의 피스톤로드(32)를 길게 연장 형성하고 상기 피스톤로드(32)의 내부에 공급통로(53)를 형성하여 이루어지며, 상기 공압공급라인(54)엔 제어밸브(56)를 설치하여 이루어지는 것을 특징으로 하는 진공 게이트밸브.The pneumatic connector 52 is formed by elongating the piston rod 32 of the pneumatic cylinder 30, which is the lifting mechanism 3, and forming a supply passage 53 in the piston rod 32. The vacuum gate valve, characterized in that the pneumatic supply line (54) is provided by installing a control valve (56). 제1항에 있어서,The method of claim 1, 상기 상하가이드기구(6)는 가이드로드(60) 형태로 이루어지고 상기 공압연결체(52)가 상기 가이드로드(60)의 내측에 공급통로(53)를 형성하고,The upper and lower guide mechanism 6 is formed in the form of a guide rod 60 and the pneumatic connector 52 forms a supply passage 53 inside the guide rod 60, 상기 수평가이드기구(7)는 상기 밸브체(2)의 하부가 상기 공압전달블록(50)의 수평가이드판(70)을 타고 슬라이드 이동이 가능하게 마련하여 이루어지는 것을 특징으로 하는 진공 게이트 밸브.The horizontal guide mechanism (7) is a vacuum gate valve, characterized in that the lower portion of the valve body (2) is provided to enable the slide movement on the horizontal guide plate (70) of the pneumatic transfer block (50). 제1항에 있어서,The method of claim 1, 상기 밸브하우징(1)의 내측에 위치하고 밸브체(2)와 공압전달블록(50)의 사이로서 상기 피스톤로드(32)와 상기가이드로드(60)를 외부에서 감싼 상태로 벨로우즈 형태의 신축이 가능한 기밀유지부재(8)를 각각 설치하여 이루어지는 것을 특징으로 하는 진공 게이트 밸브.It is located inside the valve housing (1) between the valve body (2) and the pneumatic transfer block 50 can be expanded in the bellows shape while wrapping the piston rod 32 and the guide rod 60 from the outside A vacuum gate valve, characterized in that each airtight holding member (8) is provided.
KR10-2002-0042607A 2002-07-19 2002-07-19 Vaccum Gate Valve KR100489553B1 (en)

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KR101363527B1 (en) * 2012-05-31 2014-02-14 (주)에스더블유피 vacuum gate valve
US9706765B2 (en) 2012-11-02 2017-07-18 Ges Co., Ltd. Device for repelling wild animals and harmful animals using laser

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