KR200345562Y1 - Bending Apparatus for Probe Pin - Google Patents

Abstract

The present invention is applied to the probe pins used in the probe unit of the probe card or probe unit for inspecting the electrical characteristics of the inspected object during the semiconductor manufacturing process. In particular, the present invention relates to a bending device for performing a bending process of the probe pin during the manufacturing process of such a probe pin.

According to the present invention, there is provided a bending device of the probe pin to be bent by pressing the body portion of the rear end in the clamping state is to be made in the correct position located a certain length away from the tip of the probe pin by a certain length. This greatly reduces the occurrence of defective products by accurate tolerance management, and improves the quality as well as the productivity.

Description

Bending Apparatus for Bending Apparatus {Bending Apparatus for Probe Pin}

The present invention is applied to the probe pins used in the probe unit of the probe card or probe unit for inspecting the electrical characteristics of the inspected object during the semiconductor manufacturing process. In particular, the present invention relates to a bending device for performing a bending process of the probe pin during the manufacturing process of such a probe pin.

In the conventional manufacturing process of semiconductors, the probe device is used to measure the electrical characteristics of various semiconductor devices in the state before they are completed, in the state of semiconductor wafers. In some cases, the manufacturing process of the liquid crystal display is performed, and the lighting test is performed in advance by using the probe unit during the manufacturing process of the liquid crystal display, thereby increasing the reliability and making the production more efficient.

In this measurement or test, the probe pin is brought into contact with the electrode pad and the electrical properties are measured through the probe pin. In this case, the probe pin is used as a thin rod to bend the end of the tapered shape. Doing.

However, in the conventional bending method, a conventional method is to press and hold a portion while pressing a tapered tip portion into a pinhole. In this tapering process, even if the thickness of the probe pin itself is too thin, no matter how precisely the processing is performed, a machining error occurs, and thus the diameter of the tapered portion inserted into the pinhole is not constant so that the bending part Since the length is not constant, there is a problem that a lot of product defects occur because of a lot of difficulties in tolerance management.

In addition, when performing bending work by pressing the tip, it is difficult to obtain accurate bending angles unless it is a skilled worker, not only to allow easy tolerance management, but also to cause uneven product quality and poor productivity. It is a reality.

The present invention has been made in order to solve such a conventional problem has the following objectives.

The main purpose of the present invention is to maintain the exact length from the tip end of the probe pin to the bending part and to bend the bending angle so that the bending angle can be kept constant so that the same product can be repeatedly reproduced and the excellent quality of the product is consistently maintained. The quality control can be made more easily by maintaining it, and the possibility of producing defective products can be excluded in advance, and the productivity can be improved and the production can be always made constant regardless of skilled or unskilled persons.

Another object of the present invention is to adjust the length from the tip end of the probe pin to the bending portion to be bent, the position of the clamping portion can be adjusted, the bending working angle of the bending configuration can be configured to control the different Regardless of the type of probe pin, it is intended to be able to perform various bending operations by adjusting it to specifications as needed.

1 to 4 are schematic diagrams for explaining the concept according to the present invention,

1 is a planar system diagram illustrating an initial state in which loading or unloading is performed;

Figure 2 is a planar system diagram illustrating a state of positioning in order to determine the length from the tip of the probe pin to the bending portion;

3 is a planar system diagram illustrating a state in which the tip of the probe pin is clamped;

4 is a planar system diagram showing a state in which a main body portion is bent while clamping a tip end portion of a probe pin;

5 to 8 show a preferred example of the device according to the present invention,

5 is a whole plan view,

6 is a partially cutaway front view as seen from the front of FIG. 5;

7 is a front view showing the left and right position adjuster of the bending support block;

Figure 8 is a front view showing the center of the bending length adjustment mechanism,

9 and 10 show another example of the apparatus according to the present invention,

9 is an overall plan view,

10 is a partially cutaway front view.

<Explanation of symbols for the main parts of the drawings>

1: bending support block, 2: length adjustment cam,

3: length adjusting mechanism, 4: clamp adjusting cam,

5: clamp mechanism, 6: pressure bar,

7: probe pin, 8: legs,

9: surface plate, 10: operating lever,

12: lever operating shaft, 14: length adjustment cam operating shaft,

16: clamp adjustment cam working shaft, 18: assembly member,

20: Tip Base, 22: Guide Base

The present invention is a bending device of a preferred probe pin made in order to achieve the above object, a table with a plurality of legs is installed so as to form a space at the bottom, and installed on one side of the table and the rotation in place by the operating lever A lever actuating shaft, and a length adjusting cam actuating shaft and a clamp adjusting cam actuating shaft, which are interlocked by the lever actuating shaft and the belt and installed on the other side of the surface plate, respectively; A length adjusting cam and a clamp adjusting cam fixedly installed at an upper portion of the operating shaft, a length adjusting mechanism interlocked by the length adjusting cam, a clamp mechanism interlocked by the clamp adjusting cam, the length adjusting mechanism and the clamp mechanism Bending support block together with the assembly member is installed on the top adjacent to each other, the pressure is installed on the upper portion of the clamp adjustment cam A top of the clamp control cam having a bar, a tip base installed at a position adjacent to the pressure bar as an upper portion of the surface plate, and a step with the tip base adjacent to the tip base, and provided with a pressure bar; Is provided with a probe pin bending device comprising a guide base which is installed to maintain the same plane.

In addition, a displacement angle controller with respect to the actuating lever is installed at an adjacent position of the actuating lever as a lower portion of the surface plate, and a bending support block at an opposite side position of the assembly member to which the length adjusting mechanism and the clamping mechanism are installed and coupled as the upper portion of the surface plate. An up and down position adjuster is installed to adjust the up and down position of the assembling member, including a length position adjuster for adjusting the position of the length adjusting mechanism on the opposite side of the length adjusting mechanism as an upper portion of the assembling member. Provided is a probe pin bending device in which a left and right position adjuster for adjusting the left and right positions of the bending support block is provided at a position adjacent to the bending support block as an upper portion of the member.

First, with reference to the accompanying drawings will be described in more detail for each embodiment of the device of the present invention.

They have a table 9 in which a plurality of legs 8 are installed so that a space is formed at the bottom thereof, and a lever installed at one side of the table 9 and rotatably installed in place by an operating lever 10. A shaft 12, a length adjusting cam operating shaft 14 and a clamp adjusting cam operating shaft 16, which are interlocked by the lever operating shaft 12 and the belt, respectively, and installed on the other side of the surface plate 9; The length adjusting cam working shaft 14 and the clamp adjusting cam working shaft 16 and the length adjusting cam (2) and the clamp adjusting cam (4) fixedly installed on the upper side is interlocked by the length adjusting cam (2) The length adjustment mechanism 3, the clamp mechanism 5 interlocked by the clamp adjustment cam 4, and the bending support block 1 together with the length adjustment mechanism 3 and the clamp mechanism 5 are mutually An assembly member 18 installed adjacent to the upper portion, a pressure bar 6 installed above the clamp adjustment cam 4, and the surface plate ( A tip base 20 which is respectively installed at a position adjacent to the pressure bar 6 as an upper portion of 9) and adjacent to the tip base 20 and is stepped with the tip base 20 but has a pressure bar 6 The guide base 22 is installed to maintain the same plane as the upper surface of the clamp adjustment cam (4) is provided.

At this time, the lever operating shaft 12 is fitted into the bearing 24 is installed to the inside of the surface plate 9 is coupled to the angular rotation in place by the operating lever 10 fixedly installed on one side, the operating lever ( On the lower side of 10) is provided a pulley 26 that is interlocked together.

Next, the clamp adjustment cam operating shaft 16 is fitted to the bearing 28 is installed to the inside of the surface plate 9, the clamp adjustment cam (4) provided with a pressure bar (6) at the top is fixedly installed, Pulleys 30 and 32 are installed vertically, respectively.

Next, the length adjustment cam working shaft 14 is a bearing 34 is installed to the inside of the surface plate 9, the length adjustment cam 2 is installed on the upper side, the pulley 36 is installed on the lower side.

Thus, the pulley 26 of the lever operating shaft 12 and the pulley 32 of the clamp adjustment cam operating shaft 16 are configured to be coupled to each other by the belt 38, the clamp adjustment cam operating shaft (16) The pulley 30 of the pulley (30) and the pulley 36 of the length adjustment cam operating shaft 14 is configured to be coupled to each other by the belt 40 to the power transmission is made to operate the lever operating shaft 12 by the operating lever (10) When rotating, the clamp adjustment cam operating shaft 16 and the length adjustment cam operating shaft 14 are configured to be operated at the same time.

Next, the clamp mechanism 5 is installed on the upper portion of the assembly member 18 so as to be interlocked with each other by the clamp adjustment cam (4), the pressure idle movement is in contact with the clamp adjustment cam (4) at the bottom A clamp 44 provided with a roll 42, an upper movable member 46 on which the clamp 44 is fixed, and a lower portion of the movable member 46 and fixed to the assembly member 18. The movable member 46 and the fixed member 50 is elastically supported by the return spring 48 and the movable member 46 is installed to enable the reciprocating slide movement at the upper portion thereof.

Next, the length adjustment mechanism (3) is installed on the upper portion of the assembly member 18 to be interlocked with each other by the length adjustment cam (2), the pressurized revolution movement is possible in contact with the length adjustment cam (2) A rear member 54 provided with a roll 52, an upper movable member 56 having a length adjusting bar 3a fixed to the rear member 54 and a tip thereof, and a lower portion of the movable member 56. And a fixing member 60 fixedly installed with the assembly member 18 and elastically supported with the movable member 56 by a return spring 58 and movable member 56 installed on the upper portion thereof to allow reciprocating slide movement. ) Are assembled to each other.

In addition, a displacement angle adjuster 62 with respect to the actuating lever 10 is provided at an adjacent position of the actuating lever 10 as the lower part of the base 9, and the length adjusting mechanism 3 as the upper part of the base 9. And up and down position adjuster 64 for adjusting the up and down position of the assembly member 18 including the bending support block 1 at the opposite side position of the assembly member 18 to which the clamp mechanism 5 is installed and coupled. On the opposite side of the length adjusting mechanism 3 as an upper portion of the assembly member 18, a length position adjuster 66 for adjusting the position of the length adjusting mechanism 3 is installed. In the position adjacent to the bending support block 1 as an upper portion, left and right position adjusters 68 for adjusting the left and right positions of the bending support block 1 are respectively installed.

At this time, the displacement angle adjuster 62 is configured to be limited by adjusting the rotation angle range of the operating lever 10 while moving forward, backward as the screw type, the vertical position adjuster 64, the length position The adjuster 66 and the left and right position adjuster 68 are provided with micrometers 74, 76 and 78 on one side, respectively, and screw stoppers 84, 86 and 88 so as to fix the position at the displacement position on the opposite side. Are each installed and configured.

Next, a counter 90 is installed on the other side of the surface plate 9, and a spring 92 is connected between the counter 90 and an interlocking portion between the actuating lever 10 for reciprocating operation of the actuating lever 10. Accordingly, the counter 90 is also configured to be interlocked.

Next, the configuration illustrated in FIGS. 9 and 10 illustrates another preferred embodiment of the present invention, which opposes the lever operating shaft 12 including the operating lever 10 as opposed to the above-described embodiment. Shows an example of installation on the right side.

That is, in the surface plate 9, in order to install the installation position of the operating lever 10 on the opposite side, the lever operating shaft 12 is installed at a position adjacent to the length adjustment cam operating shaft 14, and the lever The operating shaft 12, the length adjustment cam operating shaft 14 and the clamp adjustment cam operating shaft 16 allow power transmission by the pulley and the belt, and the lever operating shaft 12 by the operating lever 10. When rotating, the clamp adjusting cam operating shaft 16 and the length adjusting cam operating shaft 14 are shown to be configured to be operated simultaneously.

At this time, the power transmission method of the lever operating shaft 12 and the length adjustment cam operation shaft 14 is configured to enable power transmission with each other by, for example, a pulley and a belt located at the bottom, and the length adjustment cam operation shaft 14 ) And the clamp adjustment cam operating shaft 16 is configured such that the power transmission is performed by the belt 41 between the pulleys 27 and 31 positioned in the lower portion of the power transmission method. By rotating the lever operating shaft 12 by means that the clamp adjustment cam operating shaft 16 and the length adjustment cam operating shaft 14 is configured only to be able to operate at the same time is different from the above-described embodiment and the remaining technical configuration is mutually Mostly the same.

Of course, in the case of the embodiment illustrated in Figures 9 and 10, but not separately illustrated in the case of the counter 90, the operating lever 10 is installed by installing a spring between the operating lever 10 and the interlocking portion. The counter 90 is configured to operate according to the number of times of operation.

The probe pin bending device of the present invention made as described above is operated through the following process, which will be described below with reference to the drawings of FIGS. 1 to 10 based on the basic concept of the present invention. can do.

That is, the loading step of loading the probe pin, the length adjusting step of accurately adjusting the length of the bending portion as the tip portion of the probe pin before performing the bending operation, the bending as one side of the tip portion in the length is adjusted in this way Clamping step to clamp the position until just before the part, Bending step to make the bending part by angular displacement by pressurizing the main body part located in the rear part in the state that the clamping of the tip part is made accurately, and unwinding the probe pin that the bending work is performed in the bending step The operation is performed as follows based on a probe pin bending method including an unloading step of loading.

First, as the loading step of loading the probe pin, as shown in Figures 1, 5 and 6, for example, the bending support block (1) is located in a fixed position and the length adjustment interlocked by the length adjustment cam (2) The length adjustment bar 3a of the mechanism 3 is located at the initial position, and the clamping mechanism 5 or the pressure bar 6, which is interlocked by the clamp adjustment cam 4, is also positioned at the initial position. The front end portion (7a) of the loading step to be positioned in contact with the corner portion formed by the bending support block (8) and the length adjustment bar (3a), wherein the probe pin (7) is very fine, using tweezers The loading operation will be performed.

Next, a length adjusting step of accurately adjusting the length of the bending portion as the tip of the probe pin 7 before performing the bending operation, in this case, as illustrated in FIGS. 2, 5 and 6 For example, the bending support block 1 is located at a fixed position and the length adjusting bar 3a of the length adjusting mechanism 3 interlocked by the length adjusting cam 2 is until the length adjusting cam 2 is positioned at the apex. Pressing the length adjusting mechanism 3 to move to the most advanced position while pressing the probe pin 7 to adjust the length from the tip portion 7a to the bending portion of the probe pin 7. .

The following is a clamping step of clamping the position until just before the bending portion as one side of the tip portion 7a in the state where the length is adjusted, as shown in FIGS. 3, 5 and 6. The adjusting bar 3a moves backward and the clamping mechanism 5 moves forward by the clamp adjusting cam 4 to clamp the tip 7a of the probe pin 7 with the bending support block 1. Going through.

The following is a bending step in which a bending part is made by angular displacement by pressing the main body part 7b located at the rear part in the state in which the clamping of the tip part 7a is accurately performed as described above, as illustrated in FIGS. 4 to 6. The clamp mechanism 5 presses the body portion 7b in the rear position except for the tip portion 7a of the probe pin 7 while the pressure bar 6 is displaced in the clamping state, and the bending portion is made while the angle displacement is performed. The process is done.

The following is an unloading step of unloading the probe pins in which the bending operation is performed in the bending step, and the length adjusting cam 2 and the clamp adjusting cam 4 are initialized as illustrated in FIGS. 1, 5, and 6. The length adjusting bar 3a and the clamp mechanism 5 are then returned to their original positions, and the unloading of the probe pin 7 after the bending operation is completed is started again. Will be

As the operation is made as described above, the bending of the probe pin 7 can be performed sequentially and repeatedly.

As described above, according to the present invention, it is possible to maintain the exact length from the tip portion 7a of the probe pin 7 to the bending portion and to bend the bending angle of the bending portion so that the repetitive reproduction of the same product is always performed. It is possible to maintain the excellent quality of the product constantly, making it easier to control the quality, to eliminate the possibility of defective product production in advance, and to improve the productivity at any time regardless of skilled or unskilled people Production is possible.

In addition, the displacement angle adjuster 62, the position adjuster 64 and the length position adjuster 66 and the like can be installed to adjust the length from the leading end portion 7a of the probe pin 7 to the bending portion to be bent, clamping It is possible to adjust the position of the part, and it is possible to adjust the bending angle of the bending part to have excellent effects such as performing various bending work by adjusting it to the specification if necessary regardless of different probe pins having different specifications. do.

Claims (5)

A surface plate 9 provided with a plurality of legs 8 so that a space is formed in the lower portion, A lever operating shaft 12 installed on one side of the surface plate 9 and rotatably installed in place by the operating lever 10, A length adjusting cam operating shaft 14 and a clamp adjusting cam operating shaft 16 interlocked by the lever operating shaft 12 and the belt and installed on the other side of the surface plate 9, respectively; A length adjustment cam 2 and a clamp adjustment cam 4 fixedly installed on the length adjustment cam operation shaft 14 and the clamp adjustment cam operation shaft 16; A length adjustment mechanism 3 interlocked by the length adjustment cam 2, a clamp mechanism 5 interlocked by the clamp adjustment cam 4, An assembly member 18 having the length adjusting mechanism 3 and the clamping mechanism 5 installed at an upper portion of the bending support block 1 adjacent to each other; A pressure bar 6 installed at the upper portion of the clamp adjustment cam 4, a tip base 20 installed at a position adjacent to the pressure bar 6 as an upper portion of the surface plate 9, and A guide base 22 adjacent to the tip base 20 and provided with a step with the tip base 20 to maintain the same plane as the upper surface of the clamp control cam 4 on which the pressure bar 6 is provided. Bending device of the probe pin, characterized in that comprises a). The method of claim 1, The lever operating shaft 12 is fitted to the bearing 24 is installed to the inside of the surface plate 9 is coupled to the angular rotation in place by the operating lever 10 is fixed fixed to one side, the operating lever 10 On the lower side of the) pulley 26 that is interlocked together is installed, The clamp adjustment cam operating shaft 16 is fitted to the bearing 28 is installed to the inside of the surface plate 9, the clamp adjustment cam (4) provided with a pressure bar (6) at the top is fixedly installed, the lower pulley 30 and 32 are installed up and down respectively, The length adjustment cam working shaft 14 is a bearing 34 is installed to the inside of the surface plate 9, the length adjustment cam (2) is installed on the upper side, a pulley (36) is installed on the lower side, The pulley 26 of the lever operating shaft 12 and the pulley 32 of the clamp adjusting cam operating shaft 16 are configured to be coupled to each other by the belt 38, the clamp adjustment cam operating shaft 16 Pulley (30) of the pulley (30) and the pulley (36) of the length adjustment cam operating shaft 14 is configured to be coupled to each other by the power transmission belt (40) to the lever operating shaft 12 by the operating lever (10) Bending device of the probe pin, characterized in that the clamp adjustment cam operating shaft (16) and the length adjustment cam operating shaft (14) is configured to be operated simultaneously. The method of claim 1, The clamp mechanism 5 is installed on the upper part of the assembly member 18 so as to be interlocked with each other by the clamp adjustment cam 4, the pressurized revolution movement is possible in the state in contact with the clamp control cam (4) at the bottom. And a clamp 44 provided with a roll 42, an upper movable member 46 to which the clamp 44 is fixed, and a lower portion of the movable member 46 and fixed to the assembly member 18. The movable member 46 and the fixed member 50 is elastically supported by the return spring 48, the movable member 46 is installed to enable the reciprocating slide movement at the upper portion is assembled to each other, The length adjustment mechanism (3) is installed on the upper portion of the assembly member 18 so as to be interlocked with each other by the length adjustment cam (2), so that the pressure revolving motion in contact with the length adjustment cam (2) A rear member 54 provided with a roll 52, an upper movable member 56 having a length adjusting bar 3a fixed to the rear member 54 and a front end thereof, and a lower portion of the movable member 56; The fixing member 60 is fixedly installed with the assembly member 18 and the movable member 56 is elastically supported by the return spring 58 and the movable member 56 is installed to allow the reciprocating slide movement thereon. Are composed of assembled with each other, The displacement angle adjuster 62 with respect to the actuating lever 10 is installed at a position adjacent to the actuating lever 10 as the lower part of the base 9, and the length adjusting mechanism 3 is provided as the upper part of the base 9. Up and down position adjuster 64 for adjusting the up and down position of the assembly member 18 including the bending support block 1 is installed at the opposite side position of the assembly member 18 to which the clamp mechanism 5 is installed and coupled, On the opposite side of the length adjusting mechanism 3 as the upper portion of the assembly member 18, a length position adjuster 66 for adjusting the position of the length adjusting mechanism 3 is provided, and as the top of the assembly member 18, Bending device of the probe pin, characterized in that the left and right position adjusters (68) for adjusting the left and right positions of the bending support block (1) in the position adjacent to the bending support block (1), respectively. The method of claim 3, The displacement angle controller 62 is configured to be limited by adjusting the rotation angle range of the operating lever 10 while being forward and backward as the screw type rotates, The vertical position adjuster 64, the length position adjuster 66 and the left and right position adjuster 68 are micrometers (74, 76, 78) are respectively installed on one side and the screw to fix the position in the displacement position on the opposite side Equipped stopper 84,86,88 respectively, In accordance with the reciprocating operation of the operating lever 10 by installing a counter 90 on the other side of the surface plate 9 and connecting a spring 92 between the counter 90 and the linkage between the operating lever 10. Bending apparatus of the probe pin, characterized in that the counter 90 is also configured to be interlocked. The method of claim 1, In the surface plate 9, the lever operating shaft 12 is installed at a position adjacent to the length adjusting cam operating shaft 14 so as to install the installation position of the operating lever 10 on the opposite side, and the lever operating shaft 12, the length adjustment cam operating shaft 16 and the clamp adjustment cam operating shaft 16 to the power transmission by the pulley and the belt, and by rotating the lever operating shaft 12 by the operating lever (10) Bending apparatus of the probe pin, characterized in that the clamp adjustment cam operating shaft (16) and the length adjustment cam operating shaft (14) is configured to be operated at the same time.